CN113452285B - Electromagnetic suspension device - Google Patents

Electromagnetic suspension device Download PDF

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CN113452285B
CN113452285B CN202110649483.8A CN202110649483A CN113452285B CN 113452285 B CN113452285 B CN 113452285B CN 202110649483 A CN202110649483 A CN 202110649483A CN 113452285 B CN113452285 B CN 113452285B
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electromagnet
tooth
inductance
coil
teeth
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CN113452285A (en
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王俊亭
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Jinggangshan University
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Jinggangshan University
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention relates to the technical field of electromagnetic suspension and discloses an electromagnetic suspension device. The electromagnet coil of the electromagnetic suspension device is sleeved on the electromagnet tooth part and/or the yoke part, the inductance coil is sleeved on the inductance tooth part and/or the yoke part outside a magnetic loop generated by the electromagnet coil, so that the measuring position and the electromagnet acting position are kept consistent, and the performance of the electromagnetic suspension device is improved. And the first interval is smaller than the second interval, and the third interval is greater than the second interval, and the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the induction coil, so that the magnetic field generated by the electromagnet coil can be prevented from interfering the induced electromotive force of the induction coil, and the accuracy and the sensitivity of the induction coil for measuring the displacement of the rotor can be ensured. By the mode, the invention is beneficial to keeping the measuring position consistent with the electromagnet acting position and ensuring the measuring precision and sensitivity.

Description

Electromagnetic suspension device
Technical Field
The invention relates to the technical field of electromagnetic suspension, in particular to an electromagnetic suspension device.
Background
The electromagnetic suspension technology adopts an active electromagnet which is composed of an iron core and a conductive coil. After control current is introduced into the conductive coil, a magnetic loop is generated in the iron core, the rotor and the working gap, the generated electromagnetic force acts on the rotor, and the electromagnetic force can apply acting force on an object under the condition of no contact. Through differential control, the electromagnetic force can basically form a linear relation with the current and the working gap within a certain range, and the electromagnetic force is dynamically adjusted through a control system, so that the linear electromagnet is commonly used in an active magnetic suspension bearing, an electromagnetic suspension and a linear actuator.
Self-sensing is one of the currently leading research directions in electromagnetic levitation technology. The implementation methods of electromagnetic suspension self-sensing are mainly divided into two categories: state space methods and inductance detection methods. The state space method is insufficient in robustness, accuracy and environment adaptability, the application range is limited, and the inductance detection method realizes self-sensing estimation of rotor displacement by detecting the change of inductance. The inductance detection method is commonly a small signal injection method, a differential transformer method and a current ripple characteristic method. The small signal injection method and the differential transformer method take injected periodic small signals as carriers, and are commonly used for inductive displacement sensors or linear power amplifiers with independent structures in order to avoid the influence of an alternating magnetic field of an electromagnet on high-frequency small signals. The current ripple characteristic method uses current ripples as carriers and can only be used for two-level power amplifiers with large current ripples, an alternating magnetic field generated by the current ripples enables strong eddy currents to exist on the stator and the rotor, the eddy currents cause current ripple distortion and the inductance of the inductance coil is not obvious along with the change of an air gap, the inductance sensitivity is reduced, the high-frequency current signals in the electromagnet coil are used for measuring the displacement of the rotor by the current ripple characteristic method, and therefore the structure of the electromagnet body and additional injection signals do not need to be changed.
In order to increase the sensitivity and linearity of the inductive displacement sensor and suppress the output error caused by temperature drift, the inductive displacement sensor usually adopts a differential connection, and the change of the working gap of the electromagnet is obtained according to the ratio of the measured input voltage and the measured output differential pressure.
Based on the mechanical structure characteristics and the system characteristics of the active electromagnet, the inductive self-sensing technology can ensure the measurement precision and has small influence on the system stability. However, the inductive displacement sensor with an independent structure is different from the electromagnet in installation position, namely the measurement position is different from the electromagnet action position, so that the performance of the control system is reduced. In addition, the current differential transformer type self-sensing device has interference between the electromagnetic field of the electromagnet and the electromotive force induced by the inductance coil, which affects the measurement accuracy and sensitivity of the sensor.
Disclosure of Invention
In view of this, the present invention provides an electromagnetic suspension device, which is beneficial to keeping a measurement position consistent with an electromagnet action position, and is beneficial to ensuring measurement accuracy and sensitivity.
In order to solve the technical problems, the invention adopts a technical scheme that: an electromagnetic levitation apparatus is provided. The electromagnetic suspension device comprises a rotor and at least one group of electromagnetic suspension assembly, wherein the electromagnetic suspension assembly comprises an iron core, and the iron core comprises at least one group of electromagnet tooth assembly, at least one group of inductance tooth assembly and a yoke portion. Each group of electromagnet tooth combination at least comprises two electromagnet tooth parts, each group of inductance tooth combination at least comprises an inductance tooth part, and at least one group of electromagnet tooth combination and at least one group of inductance tooth combination are arranged on the same side of the yoke part. Wherein the at least one set of electromagnet tooth combinations and the at least one set of inductive tooth combinations face the mover. The electromagnetic suspension assembly further comprises an electromagnet coil, and the electromagnet coil is sleeved on the electromagnet tooth part and/or the electromagnet yoke part. The electromagnetic suspension assembly further comprises an inductance coil, and the inductance coil is sleeved on the inductance tooth part and/or the yoke part outside a magnetic loop generated by the electromagnet coil. The electromagnet tooth part and the rotor are arranged at a first interval, the inductance tooth part and the rotor are arranged at a second interval, a third interval is arranged between the adjacent electromagnet tooth part and the adjacent inductance tooth part, the first interval is smaller than the second interval, and the third interval is larger than the second interval.
The invention has the beneficial effects that: different from the prior art, the invention provides an electromagnetic suspension device. The iron core of the electromagnetic suspension device comprises at least one group of electromagnet tooth combination, at least one group of inductance tooth combination and a yoke part. Each group of electromagnet tooth combination at least comprises two electromagnet tooth parts, and each group of inductance tooth combination at least comprises one inductance tooth part. The at least one group of electromagnet tooth combination and the at least one group of inductance tooth combination are arranged on the same side of the yoke part. The electromagnet coil is sleeved on the electromagnet tooth part and/or the yoke part, and the inductance coil is sleeved on the inductance tooth part and/or the yoke part which is positioned outside a magnetic loop generated by the electromagnet coil. Therefore, the middle surface of the electromagnet and the middle surface of the inductive sensor are in the same plane, namely the measuring position and the acting position of the electromagnet are kept consistent, and the performance of the electromagnetic suspension device is improved. The middle plane of the electromagnet and the middle plane of the inductance sensor can be understood as symmetrical planes of the electromagnet tooth part and the inductance tooth part of the iron core in the thickness direction of the electromagnet tooth part and the inductance tooth part.
And a first interval is formed between the electromagnet tooth part and the rotor, a second interval is formed between the inductance tooth part and the rotor, and a third interval is formed between the adjacent electromagnet tooth part and the inductance tooth part. The first distance is smaller than the second distance, and the third distance is larger than the second distance. Because the intensity of the magnetic field generated by the electromagnet coil is far greater than that of the magnetic field generated by the inductance coil, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductance coil, the magnetic field generated by the electromagnet coil can be prevented from interfering with the induced electromotive force generated by the inductance coil, and the measurement precision and sensitivity of the inductance coil to the displacement of the rotor can be guaranteed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention. Moreover, the drawings and the description are not intended to limit the scope of the inventive concept in any way, but rather to illustrate it by those skilled in the art with reference to specific embodiments.
FIG. 1 is a schematic structural view of a prior art magnetic bearing;
FIG. 2 is a schematic diagram of a prior art inductive sensor configuration;
FIG. 3 is a schematic structural diagram of another embodiment of a prior art inductive sensor;
FIG. 4 is a schematic structural diagram of a first embodiment of the electromagnetic levitation apparatus of the present invention;
fig. 5 is a schematic structural view of a first embodiment of the core of the present invention;
FIG. 6 is a schematic structural diagram of a second embodiment of the electromagnetic levitation apparatus of the present invention;
fig. 7 is a schematic structural view of a second embodiment of the core of the present invention;
fig. 8 is a schematic structural view of a third embodiment of the core of the present invention;
FIG. 9 is a schematic structural diagram of a third embodiment of an electromagnetic levitation apparatus of the present invention;
fig. 10 is a schematic structural view of a fourth embodiment of a core of the present invention;
fig. 11 is a schematic structural view of a fifth embodiment of the core of the present invention;
FIGS. 12a-12b are schematic structural views of a fourth embodiment of the electromagnetic levitation apparatus of the present invention;
FIG. 13 is a magnetic field schematic of the electromagnetic levitation apparatus shown in FIGS. 12a-12 b;
FIG. 14 is a schematic structural diagram of a fifth embodiment of the electromagnetic levitation apparatus of the present invention;
fig. 15 is a schematic view of the magnetic field of the electromagnetic levitation apparatus shown in fig. 14.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
In order to solve the technical problems that in the prior art, the installation positions of an inductive displacement sensor with an independent structure and an electromagnet are different, so that the measurement position and the action position of the electromagnet are different, and the electromagnetic field of the electromagnet in the self-sensing of a differential transformer interferes with the induced electromotive force of a self-induction coil, an embodiment of the invention provides an electromagnetic suspension device. The electromagnetic suspension device comprises a rotor and at least one group of electromagnetic suspension assembly, wherein the electromagnetic suspension assembly comprises an iron core, and the iron core comprises at least one group of electromagnet tooth assembly, at least one group of inductance tooth assembly and a yoke portion. Each group of electromagnet tooth combination at least comprises two electromagnet tooth parts, each group of inductance tooth combination at least comprises an inductance tooth part, and at least one group of electromagnet tooth combination and at least one group of inductance tooth combination are arranged on the same side of the yoke part. Wherein the at least one set of electromagnet tooth combinations and the at least one set of inductive tooth combinations face the mover. The electromagnetic suspension assembly further comprises an electromagnet coil, and the electromagnet coil is sleeved on the electromagnet tooth part and/or the electromagnet yoke part. The electromagnetic suspension assembly further comprises an inductance coil, and the inductance coil is sleeved on the inductance tooth part and/or the yoke part outside a magnetic loop generated by the electromagnet coil. The electromagnet tooth part and the rotor are arranged at a first interval, the inductance tooth part and the rotor are arranged at a second interval, a third interval is arranged between the adjacent electromagnet tooth part and the adjacent inductance tooth part, the first interval is smaller than the second interval, and the third interval is larger than the second interval. As described in detail below.
In the active electromagnet, when an eddy current sensor or an inductive displacement sensor with an independent structure is used for measuring the displacement of the rotor, the middle surface of the inductive sensor on the mechanical structure cannot be the same plane with the middle surface of the electromagnet, so that the measuring position is different from the action position of the electromagnet, a position error is introduced into a control system, and the performance of the control system is reduced.
As shown in fig. 1, in a magnetic suspension bearing, for example, an inductance sensor 01 and a magnetic suspension bearing 02 which are generally independent structures are located at different positions in the axial direction of a mover 03, and the installation positions of the inductance sensor 01 and the magnetic suspension bearing 02 need to be adjusted in advance. If the mover 03 is in the state shown by the dotted line in fig. 1, the displacement of the mover 03 at the position of the inductive sensor 01 is different from the displacement of the mover 03 at the position of the magnetic suspension bearing 02, and the displacement value of the mover 03 measured by the inductive sensor 01 cannot be applied to the magnetic suspension bearing 02 to control the movement of the mover 03.
Therefore, theoretically, the measured position and the action position of the electromagnet need to be kept consistent, and the measured mover displacement can be matched with the electromagnetic force provided by the electromagnet, so that the position of the mover can be accurately controlled.
When a differential transformer type sensor (explained below) is used for measuring the displacement of the rotor, when a digital power amplifier is used in a control system, the measurement accuracy and the sensitivity of the sensor are reduced because the magnetic field of the multi-harmonic alternating electromagnet interferes with the induced electromotive force of the sensor at a specific frequency; in order to avoid the influence of the multi-harmonic alternating magnetic field of the electromagnet, a linear power amplifier is often used, and the efficiency of the electromagnetic suspension system is greatly reduced.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an embodiment of an inductive sensor in the prior art.
In one embodiment, the inductive sensor 01 may be a differential transformer sensor, which is one type of mutual inductance displacement sensor. When two coils are provided on the same pole of the electromagnet 011, one of them is a bias coil 012 and the other is a control coil 013. A small high-frequency signal is added to the bias current of the bias coil 012, and a change in voltage across the control coil 013 is detected, so that displacement of the mover 03 is detected based on the relationship between the coil inductance and the mover position.
Referring to fig. 3, fig. 3 is a schematic structural diagram of another embodiment of an inductive sensor in the prior art.
In one embodiment, the inductive sensor 01 may be a self-inductive displacement sensor. The inductance sensor injects a small high-frequency signal into the self-inductance coil 014 to obtain displacement information of the mover 03 based on the relationship between the coil inductance and the position of the mover 03, wherein the displacement information is obtained by the differential pressure (U) output from the self-inductance coil 014 1 -U 2 )/(U 1 +U 2 ) To reflect the coil inductance change. At present, the sensor is used as a sensor independent from an electromagnet structure, and the basic structure of the sensor is shown in figure 3.
The current ripple characteristic method is to control the current ripple in the current as the carrier, modulate the mover displacement signal, and measure the mover displacement based on the relationship between the electromagnet coil inductance and the mover displacement, the self-sensing method must adopt a two-level digital power amplifier with large current ripple, has the defect of increased mover vibration, conflicts with the development trend of the three-level switch power amplifier technology which seeks for high efficiency and reduces the eddy current loss and noise in the magnetic suspension bearing, and is influenced by the change of the duty ratio of the Pulse Width Modulation (PWM) signal, so that the sensitivity of the measuring system is reduced.
When the state space method is used for estimating the displacement of the rotor, the robustness, the accuracy and the environment adaptability of the rotor are insufficient, and the application range is limited.
In view of this, an embodiment of the present invention provides an electromagnetic levitation device, which can overcome the defect of inconsistency between the measurement position and the electromagnetic force action position in the conventional electromagnetic levitation control system, eliminate various interferences existing in other self-sensing technologies, avoid the debugging of the position between an independent sensor and an electromagnet during installation, and is beneficial to improving the performance of the electromagnetic levitation control system.
In an embodiment, the electromagnetic suspension device may be in the form of a magnetic suspension bearing, a magnetic suspension motor, a magnetic suspension positioning platform, and a magnetic suspension motion platform, which are not limited herein.
Specifically, the electromagnetic levitation device comprises a rotor and at least one set of electromagnetic levitation components. The electromagnetic suspension assembly comprises an iron core, and the iron core comprises at least one group of electromagnet tooth combination, at least one group of inductance tooth combination and a yoke part. Each group of electromagnet tooth combination at least comprises two electromagnet tooth parts, and each group of inductance tooth combination at least comprises one inductance tooth part. The at least one group of electromagnet tooth combination and the at least one group of inductance tooth combination are arranged on the same side of the yoke part. The at least one group of electromagnet tooth combination and the at least one group of inductance tooth combination face the rotor. The electromagnetic suspension assembly further comprises an electromagnet coil, and the electromagnet coil is sleeved on the electromagnet tooth part and/or the electromagnet yoke part. The electromagnetic suspension assembly further comprises an inductance coil, and the inductance coil is sleeved on the inductance tooth part and/or the yoke part outside a magnetic loop generated by the electromagnet coil.
A magnetic circuit generated by electrifying the electromagnet coil reaches the rotor through the electromagnet teeth so as to provide electromagnetic force for the rotor to drive the rotor to move. The distance between the inductance tooth part and the mover can influence the inductance of the inductance coil, so that the distance can be used for measuring the distance between the inductance tooth part and the mover, namely measuring the displacement condition of the mover. Because the intensity of the magnetic field generated by the electromagnet coil is far greater than that of the magnetic field generated by the inductance coil, and harmonic components are complex, if the magnetic circuit of the magnetic field generated by the electromagnet coil passes through the inductance coil, the induced electromotive force at two ends of the inductance coil can be influenced, and the interference on the measurement result is caused.
Through the mode, the middle surface of the electromagnet and the middle surface of the inductance sensor are the same plane, which means that the position of the magnetic field generated by the electromagnet coil and acting on the rotor and the position of the magnetic field generated by the inductance coil and acting on the rotor are both positioned on the middle surfaces of the electromagnet tooth parts or the inductance tooth parts, namely the measuring position is consistent with the acting position of the electromagnet, so that the measured rotor displacement can be matched with the electromagnetic force required by the electromagnet, the action of the rotor can be accurately controlled, and the performance of the electromagnetic suspension device can be improved.
A first interval is formed between the electromagnet tooth parts and the rotor, a second interval is formed between the inductance tooth parts and the rotor, and a third interval is formed between the adjacent electromagnet tooth parts and the adjacent inductance tooth parts. The first interval is smaller than the second interval, the distance between the electromagnet tooth part and the rotor is closer, the distance between the inductance tooth part and the rotor is further, the magnetic resistance of the air gap is larger, the magnetic resistance of the iron core is smaller, so that the magnetic circuit of the magnetic field generated by the electromagnet coil can reach the rotor through the electromagnet tooth part and cannot pass through the inductance tooth part, namely, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductance coil, the induced electromotive force of the inductance coil can be prevented from being interfered by the magnetic field generated by the electromagnet coil, and the measurement precision and the sensitivity of the displacement of the rotor can be guaranteed.
According to the principle that the magnetic circuit is shortest, the third distance is larger than the second distance, which means that the distance between the adjacent electromagnet tooth parts and the inductor tooth parts is larger than the distance between the inductor tooth parts and the rotor, so that the magnetic circuit of the magnetic field generated by the inductor coil can reach the rotor, and the phenomenon that the magnetic circuit of the magnetic field generated by the inductor coil directly returns to the inductor coil through the adjacent electromagnet tooth parts without passing through the rotor is avoided.
The magnetic path of the magnetic field generated by the inductor coil passes through the electromagnet coil. Because the strength of the magnetic field generated by the electromagnet coil is far greater than that of the magnetic field generated by the inductance coil, although the magnetic circuit of the magnetic field generated by the inductance coil passes through the electromagnet coil, the magnetic circuit does not cause obvious interference to the electromagnetic force generated by the electromagnet coil.
Furthermore, the iron core can be integrally processed by a magnetic conductive material, and the integral iron core is provided with the at least one group of electromagnet tooth combination, the at least one group of inductance tooth combination and the yoke part; or the iron core can be formed by laminating a plurality of laminated sheets, the laminated sheets are made of magnetic conductive materials, and at least part of the laminated sheets are provided with the at least one group of electromagnet tooth combinations, the at least one group of inductance tooth combinations and the yoke part.
Referring to fig. 4 and 5, fig. 4 is a schematic structural diagram of a first embodiment of an electromagnetic levitation device of the present invention, and fig. 5 is a schematic structural diagram of a first embodiment of an iron core of the present invention. Wherein fig. 4 and 5 show a cross-sectional structure taken along the median plane of the core. The mid-plane of the core is understood to be the plane of symmetry of the core in its thickness direction.
The present embodiment is different from the above embodiments in that the electromagnetic levitation apparatus includes a set of electromagnetic levitation components. The iron core of the electromagnetic suspension assembly comprises two electromagnet tooth parts and an inductance tooth part, the inductance tooth part is located between the two electromagnet tooth parts, and the inductance tooth part is located in the middle of a yoke part between the two electromagnet tooth parts.
In the present embodiment, the electromagnetic levitation apparatus includes a mover 11 and an electromagnetic levitation assembly 21. The electromagnetic levitation assembly 21 includes an electromagnet coil 31, an inductance coil 41, and an iron core 51. The iron core 51 includes an electromagnet tooth 511, an electromagnet tooth 512, an inductance tooth 513, and a yoke 514.
Alternatively, the iron core 51 may be made of a material with good magnetic permeability, or may be laminated with a material with good magnetic permeability, which is not limited herein.
The electromagnet tooth portion 511, the electromagnet tooth portion 512, and the inductance tooth portion 513 are provided on the same side of the yoke portion 514. The inductive tooth 513 is located between the electromagnet tooth 511 and the electromagnet tooth 512. The electromagnet coil 31 is fitted to the yoke portion 514 between the electromagnet tooth portion 511 and the inductance tooth portion 513 and between the electromagnet tooth portion 512 and the inductance tooth portion 513. The inductor coil 41 is fitted over the inductor teeth 513.
Of course, in other embodiments of the present invention, the electromagnet coil 31 may also be sleeved on the electromagnet teeth 511 and/or the electromagnet teeth 512, which is not limited herein.
Since the position of the electromagnetic force exerted on the mover 11 by the magnetic field generated by the electromagnet coil 31 can be equivalent to the orthographic projection position of the center position between the electromagnet teeth 511 and the electromagnet teeth 512 on the surface of the mover 11, the inductance teeth 513 are located between the electromagnet teeth 511 and the electromagnet teeth 512, and the distances from the inductance teeth 513 to the electromagnet teeth 511 and the electromagnet teeth 512 are equal, that is, the inductance teeth 513 are arranged in the center, and the inductance coil 41 is used for measuring the displacement of the position of the electromagnet coil 31 acting on the mover 11.
The electromagnet teeth 511, the electromagnet teeth 512, and the mover 11 have pitches g11 and g12, respectively. The inductance teeth 513 have a spacing g13 with the mover 11. The inductive toothing 513 has a distance g14 from the electromagnet toothing 511 or the electromagnet toothing 512. Wherein each of the aforementioned distances is referred to as a minimum distance.
g13 is greater than g11 and g12, so that a magnetic circuit of the magnetic field generated by the electromagnet coil 31 reaches the mover 11 through the electromagnet teeth 511 and the electromagnet teeth 512, and does not pass through the inductor teeth 513, that is, the magnetic circuit of the magnetic field generated by the electromagnet coil 31 does not pass through the inductor coil 41, the magnetic field generated by the electromagnet coil 31 can be prevented from interfering with induced electromotive forces at two ends of the inductor coil 41, and the accuracy and sensitivity of the inductor coil 41 for measuring the displacement of the mover 11 can be improved.
Moreover, g13 is smaller than g14, which can ensure that the magnetic path of the magnetic field generated by the inductor coil 41 reaches the mover 11, so as to prevent the magnetic path of the magnetic field generated by the inductor coil 41 from directly passing through the adjacent electromagnet teeth 511 and 512 to return to the inductor coil 41 without passing through the mover 11, and can ensure that the function of the inductor coil 41 for measuring the displacement of the mover 11 is realized.
When the control current I + I is input to the electromagnet coil 31, a magnetic field magnetic circuit 311 is generated. According to the principle of the shortest magnetic path, the magnetic field magnetic path 311 does not pass through the inductor tooth 513, and the magnetic field magnetic path 311 passes through the electromagnet tooth 511, the yoke 514, the electromagnet tooth 512, and the mover 3 in sequence, and then returns to the electromagnet tooth 511 to form a closed magnetic loop, so that induced electromotive forces at both ends of the inductor coil 41 form a closed magnetic loop
Figure BDA0003111178290000071
The accuracy and sensitivity of the displacement of the mover 11 measured by the inductor 41 can be ensured without being affected by the magnetic field generated by the electromagnet coil 31.
When current is injected across the inductor 41
Figure BDA0003111178290000072
When the period is small, the inductor 41 generates a magnetic field circuit 411 and a magnetic field circuit 412, respectively. According to the principle that the magnetic circuit is shortest, the magnetic field magnetic circuit 411 sequentially passes through the inductance tooth 513, the mover 11, the electromagnet tooth 511 and the yoke 514, and then returns to the inductance tooth 513 to form a closed magnetic loop; the magnetic field magnetic circuit 412 passes through the inductor teeth 513, the mover 11, the electromagnet teeth 512, and the yoke 514 in sequence, and then returns to the inductor teeth 513 to form a closed magnetic circuit.
Measuring inductance at this timeInduced electromotive force of the coil 41
Figure BDA0003111178290000073
According to the relation between the inductance of the inductance coil 41 and the displacement of the mover 11, the induced electromotive force is adjusted
Figure BDA0003111178290000074
The signals are processed to obtain the displacement value of the mover 11, i.e. the displacement of the mover at the position where the electromagnetic force provided by the electromagnet coil 31 acts is directly measured by the inductor coil 41.
It should be noted that, in this embodiment, a current is injected into both ends of the inductance coil 41
Figure BDA0003111178290000075
Simultaneously measuring the induced electromotive force of the induction coil 41
Figure BDA0003111178290000076
The situation that voltage signals are injected into two ends of the inductance coil 41 and the voltage signals output by the inductance coil 41 are measured is avoided, so that the inductance change situation of the inductance coil 41 is reflected, and the displacement of the mover 11 is favorably measured. In addition, in the present embodiment, the current signal, rather than the voltage signal, is injected into the two ends of the inductance coil 41, which is more convenient for data processing.
Referring to fig. 6 to 8, fig. 6 is a schematic structural diagram of an electromagnetic levitation device according to a second embodiment of the present invention, fig. 7 is a schematic structural diagram of an iron core according to a second embodiment of the present invention, and fig. 8 is a schematic structural diagram of an iron core according to a third embodiment of the present invention. Fig. 6 to 8 show sectional structures taken along the median plane of the core. The mid-plane of the core is understood to be the plane of symmetry of the core in its thickness direction.
In the present embodiment, the electromagnetic levitation apparatus includes a mover 13, an electromagnetic levitation assembly 231, and an electromagnetic levitation assembly 232. The electromagnetic levitation assembly 231 includes an electromagnet coil 331, an inductor coil 431, and an iron core 53. The core 53 includes an electromagnet tooth 531, an electromagnet tooth 532, an inductor tooth 533, and a yoke 534. The electromagnetic levitation assembly 232 includes an electromagnet coil 332, an inductor coil 432, and an iron core 54. The core 54 includes an electromagnet tooth portion 541, an electromagnet tooth portion 542, an inductance tooth portion 543, and a yoke portion 544.
As shown in fig. 6 and 7, the electromagnet teeth 531, the electromagnet teeth 532, and the inductor teeth 533 are provided on the same side of the yoke 534. The inductive tooth 533 is located centrally between the electromagnet tooth 531 and the electromagnet tooth 532. The electromagnet coil 331 is fitted to the yoke 534 between the electromagnet tooth 531 and the inductor tooth 533 and between the electromagnet tooth 532 and the inductor tooth 533. The inductor 431 is sleeved on the inductor teeth 533.
As shown in fig. 6 and 8, the electromagnet tooth portion 541, the electromagnet tooth portion 542, and the inductance tooth portion 543 are provided on the same side of the yoke portion 544. The inductance tooth portion 543 is located between the electromagnet tooth portion 541 and the electromagnet tooth portion 542 and is provided centrally. The electromagnet coil 332 is fitted around the yoke portion 544 between the electromagnet tooth portion 541 and the inductor tooth portion 543, and between the electromagnet tooth portion 542 and the inductor tooth portion 543. The inductor coil 432 is sleeved on the inductor tooth 543.
As shown in fig. 6, the electromagnet teeth 531, 532, and the mover 13 have pitches g31 and g32, respectively. The inductance teeth 533 and the mover 13 have a distance g33 therebetween. The inductive tooth 533 has a distance g34 from the electromagnet tooth 531 or the electromagnet tooth 532. The electromagnet tooth 541, the electromagnet tooth 542, and the mover 13 have pitches g35 and g36, respectively. A distance g37 is provided between the inductance teeth 543 and the mover 13. A distance g38 is provided between the inductance tooth portion 543 and the electromagnet tooth portion 541 or the electromagnet tooth portion 542. Wherein each of the aforementioned distances is referred to as a minimum distance.
g33 is greater than g31 and g32, and g37 is greater than g35 and g36, so that the magnetic circuit of the magnetic field generated by the electromagnet coil reaches the rotor through the electromagnet tooth part and does not pass through the inductance tooth part, that is, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductor coil, the magnetic field generated by the electromagnet coil can be prevented from interfering the induced electromotive force of the inductance coil, and the measurement accuracy and sensitivity of the rotor displacement can be favorably ensured.
Moreover, g33 is smaller than g34, g37 is smaller than g38, so that the magnetic circuit of the magnetic field generated by the inductance coil can reach the mover, the magnetic circuit of the magnetic field generated by the inductance coil is prevented from directly returning to the inductance coil through the adjacent electromagnet teeth without passing through the mover, and the function of the inductance coil for measuring the displacement of the mover can be realized.
The current in the electromagnet coil 331 and the electromagnet coil 332 is composed of a bias current I and a control current I. The controller adjusts the currents of the electromagnet coil 331 and the electromagnet coil 332 according to the displacement of the mover 13, and when the currents I + I or I-I are input to the electromagnet coil 331 and the electromagnet coil 332, respectively, the electromagnetic levitation assembly 231 and the electromagnetic levitation assembly 232 generate a magnetic field magnetic circuit 3311 and a magnetic field magnetic circuit 3321, respectively. In fig. 6, the electromagnet coil 331 inputs the current I + I, and the electromagnet coil 332 inputs the current I-I, i.e. a current bias differential control is adopted, which belongs to the understanding scope of the skilled person and will not be described herein again. The end faces of the electromagnet tooth portions 531 and 541 which face each other are the same magnetic poles as the electromagnet magnetic fields 3311 and 3321, respectively, and the end faces of the electromagnet tooth portions 532 and 542 which face each other are also the same magnetic poles as the electromagnet magnetic fields 3311 and 3321, respectively.
According to the principle of the shortest magnetic path, the magnetic field magnetic path 3311 does not pass through the inductor teeth 533, and the magnetic field magnetic path 3311 passes through the electromagnet teeth 531, the yoke 534, the electromagnet teeth 532, and the mover 13 in sequence, and then returns to the electromagnet teeth 531 to form a closed magnetic circuit. Since the magnetic field path 3321 passes through the electromagnet teeth 541, the yoke 544, the electromagnet teeth 542, and the mover 13 in this order without passing through the inductor teeth 543, and then returns to the electromagnet teeth 541 to form a closed magnetic circuit, the differential pressure output from the inductor 431 and the inductor 432 is generated by the inductor 431 and the inductor 432
Figure BDA0003111178290000091
Is not affected by the magnetic fields generated by the electromagnet coils 331 and 332.
Inductor 431 and inductor 432 are connected and a voltage is injected across them
Figure BDA0003111178290000092
When the period is small, the inductor 431 generates a magnetic field magnetic circuit 4311 and a magnetic field magnetic circuit 4312, respectively, and the inductor 432 generates a magnetic field magnetic circuit 4321 and a magnetic field magnetic circuit 4322, respectively. Magnetic field magnetic circuit 4 based on the principle of shortest magnetic circuit311 sequentially passes through the inductance tooth portion 533, the mover 13, the electromagnet tooth portion 531 and the yoke portion 534, and then returns to the inductance tooth portion 533 to form a closed magnetic loop; the magnetic field magnetic circuit 4312 passes through the inductor teeth 533, the mover 13, the electromagnet teeth 532, and the yoke 534 in sequence, and then returns to the inductor teeth 533 to form a closed magnetic circuit. The magnetic field magnetic circuit 4321 sequentially passes through the inductance tooth 543, the mover 13, the electromagnet tooth 541 and the yoke 544, and then returns to the inductance tooth 543 to form a closed magnetic loop; the magnetic field magnetic circuit 4322 sequentially passes through the inductance teeth 543, the mover 13, the electromagnet teeth 542, and the yoke 544, and then returns to the inductance teeth 543 to form a closed magnetic circuit.
At this time, the differential pressure output by the inductor 431 and the inductor 432 is measured
Figure BDA0003111178290000093
According to the relation between the inductance and the displacement of the mover 13, the differential pressure is adjusted
Figure BDA0003111178290000094
The signals are processed to obtain the displacement value of the mover 13, and the displacement of the position on the mover acted by the electromagnetic force provided by the electromagnet coils 331 and 332 is directly measured by the inductance coils 431 and 432.
Of course, in other embodiments of the present invention, it is not required that the same magnetic poles of the magnetic fields generated by the two sets of electromagnetic levitation assemblies are oppositely disposed on two sides of the mover, and the electromagnetic force applied to the mover by the magnetic field generated by the electromagnetic coil and the measurement accuracy and sensitivity of the inductance coil are not affected.
Referring to fig. 9 to 11, fig. 9 is a schematic structural diagram of a third embodiment of an electromagnetic levitation device of the present invention, fig. 10 is a schematic structural diagram of a fourth embodiment of an iron core of the present invention, and fig. 11 is a schematic structural diagram of a fifth embodiment of an iron core of the present invention. Among them, fig. 9 to 11 show a sectional structure taken along the median plane of the core. The mid-plane of the core is understood to be the plane of symmetry of the core in its thickness direction.
The present embodiment is different from the above embodiments in that the inductance tooth portion is located outside the electromagnet tooth portion, and the inductance coil is fitted over the inductance tooth portion. Of course, in other embodiments of the present invention, the inductor coil may also be sleeved on the yoke portion between the adjacent electromagnet tooth portion and the inductor tooth portion.
In the present embodiment, the electromagnetic levitation apparatus includes a mover 14, an electromagnetic levitation assembly 241, and an electromagnetic levitation assembly 242. The electromagnetic levitation assembly 241 includes an electromagnet coil 341, an inductor coil 441, an inductor coil 442, and an iron core 55. The iron core 55 includes a solenoid tooth 551, a solenoid tooth 552, an inductor tooth 553, an inductor tooth 554, and a yoke 555. The electromagnetic levitation assembly 242 includes an electromagnet coil 342, an inductor coil 443, an inductor coil 444, and an iron core 56. The iron core 56 includes an electromagnet tooth 561, an electromagnet tooth 562, an inductor tooth 563, an inductor tooth 564, and a yoke 565.
As shown in fig. 9 and 10, the electromagnet teeth 551, the electromagnet teeth 552, the inductance teeth 553, and the inductance teeth 554 are provided on the same side of the yoke 555. Inductive tooth 553 is located on a side of electromagnet tooth 551 remote from electromagnet tooth 552, and inductive tooth 554 is located on a side of electromagnet tooth 552 remote from electromagnet tooth 551. The electromagnet coil 341 is fitted to a yoke portion 555 between the electromagnet tooth portions 551 and 552. The inductor coil 441 is disposed on the inductor teeth 553, and the inductor coil 442 is disposed on the inductor teeth 554.
As shown in fig. 9 and 11, the electromagnet tooth portion 561, the electromagnet tooth portion 562, the inductance tooth portion 563, and the inductance tooth portion 564 are provided on the same side of the yoke portion 565. Inductive tooth 563 is located on a side of electromagnet tooth 561 remote from electromagnet tooth 562, and inductive tooth 564 is located on a side of electromagnet tooth 562 remote from electromagnet tooth 561. The electromagnet coil 342 is fitted to the yoke portion 565 between the electromagnet tooth portion 561 and the electromagnet tooth portion 562. The inductor 443 is fitted over the inductor tooth 563, and the inductor 444 is fitted over the inductor tooth 564.
As shown in fig. 9, the electromagnet teeth 551, the electromagnet teeth 552, and the mover 14 have pitches g411 and g412, respectively. The inductor teeth 553, the inductor teeth 554, and the mover 14 have pitches g421 and g422, respectively. Inductance teeth 553 and electromagnet teeth 551 have a spacing g431 therebetween, and inductance teeth 554 and electromagnet teeth 552 have a spacing g432 therebetween. The electromagnet teeth 561, the electromagnet teeth 562, and the mover 14 have pitches g441 and g442, respectively. Gap g451 and gap g452 are provided between inductor tooth 563, inductor tooth 564, and mover 14, respectively. Inductance tooth 563 and electromagnet tooth 561 have a gap g461, and inductance tooth 564 and electromagnet tooth 562 have a gap g 462. Wherein each of the aforementioned distances is referred to as a minimum distance.
g421 and g422 are both larger than g411 and g412, and g451 and g452 are both larger than g441 and g442, so that the magnetic path of the magnetic field generated by the electromagnet coil reaches the mover through the electromagnet teeth and does not pass through the inductor teeth, that is, the magnetic path of the magnetic field generated by the electromagnet coil does not pass through the inductor coil, the magnetic field generated by the electromagnet coil can be prevented from interfering with the induced electromotive force generated by the inductor coil, and the measurement precision and sensitivity of the mover displacement can be ensured.
Moreover, g421 is smaller than g431, g422 is smaller than g432, g451 is smaller than g461, and g452 is smaller than g462, so that the magnetic path of the magnetic field generated by the inductance coil can reach the mover, the magnetic path of the magnetic field generated by the inductance coil is prevented from directly returning to the inductance coil through the adjacent electromagnet teeth without passing through the mover, and the function of measuring the displacement of the mover by the inductance coil can be realized.
The electromagnet coil 341 and the electromagnet coil 342 adopt current bias differential control, and the current in the electromagnet coil 341 and the electromagnet coil 342 consists of bias current I and control current I. The currents of the electromagnet coil 341 and the electromagnet coil 342 are adjusted by the controller according to the displacement of the mover 14, and when the currents I + I or I-I are input to the electromagnet coil 341 and the electromagnet coil 342, the magnetic levitation assembly 241 and the magnetic levitation assembly 242 generate a magnetic field magnetic circuit 3411 and a magnetic field magnetic circuit 3421, respectively. In fig. 9, electromagnet coil 341 receives current I + I, and electromagnet coil 342 receives current I-I.
According to the principle of the shortest magnetic path, the magnetic field magnetic path 3411 does not pass through the inductor teeth 553 and the inductor teeth 554, and the magnetic field magnetic path 3411 passes through the electromagnet teeth 551, the yoke 555, the electromagnet teeth 552, and the mover 14 in sequence, and then returns to the electromagnet teeth 551 to form a closed magnetic loop. Magnetic field magnetic circuit 3421 does not pass through inductive tooth 563 and inductive tooth 564, and magnetic field magnetic circuit 3421 passes through electromagnet tooth 561 and yoke in this orderPortion 565, electromagnet teeth 562, and mover 14, and then back to electromagnet teeth 561 form a closed magnetic circuit, so that the differential pressure output from inductor coils 441 and 443 forms a closed magnetic circuit
Figure BDA0003111178290000111
The differential pressure signals output from the inductor 442 and the inductor 444 are similarly output without being affected by the magnetic fields generated by the electromagnet coils 341 and 342.
The inductor coils 441 and 443 are connected and a voltage is injected across them
Figure BDA0003111178290000112
When the period is small, the induction coil 441 generates a magnetic field circuit 4411, and the induction coil 443 generates a magnetic field circuit 4431. According to the shortest magnetic path principle, the magnetic field magnetic path 4411 passes through the inductor teeth 553, the mover 14, the electromagnet teeth 551, and the yoke 555 in sequence, and then returns to the inductor teeth 553 to form a closed magnetic loop. The magnetic field magnetic circuit 4431 sequentially passes through the inductor teeth 563, the mover 14, the electromagnet teeth 561, and the yoke 565, and then returns to the inductor teeth 563 to form a closed magnetic circuit.
Similarly, inductor 442 and inductor 444 are connected and a voltage is injected across them
Figure BDA0003111178290000113
When the period is small, the inductor 442 generates a magnetic field circuit 4421, and the inductor 444 generates a magnetic field circuit 4441. According to the principle of the shortest magnetic path, the magnetic field magnetic path 4421 passes through the inductive tooth 554, the mover 14, the electromagnet tooth 552, and the yoke 555 in sequence, and then returns to the inductive tooth 554 to form a closed magnetic loop. Magnetic field magnetic circuit 4441 passes through inductive teeth 564, mover 14, electromagnet teeth 562, and yoke 565 in sequence, and then back to inductive teeth 564 to form a closed magnetic loop.
At this time, the differential pressure output by the induction coils 441 and 443 is measured
Figure BDA0003111178290000114
According to the relation between the inductance and the displacement of the mover 14, the differential pressure is adjusted
Figure BDA0003111178290000115
The signals are processed to obtain the displacement value of the mover 14 at the position where the inductance tooth 553 and the inductance tooth 563 are connected, and similarly, the displacement value of the mover 14 at the position where the inductance tooth 554 and the inductance tooth 564 are connected. Coordinate interpolation or coordinate transformation is performed according to the measured displacement values of the two points on the mover 14, and the mover displacement of the electromagnetic force acting position provided by the electromagnet coil 341 and the electromagnet coil 342 is obtained.
The foregoing specific calculation process of coordinate interpolation or coordinate transformation belongs to the understanding of those skilled in the art, and will not be described herein again.
Referring to fig. 12a-12b and fig. 13, fig. 12a-12b are schematic structural diagrams of a fourth embodiment of the electromagnetic levitation device of the present invention, and fig. 13 is a schematic magnetic field diagram of the electromagnetic levitation device shown in fig. 12a-12 b. Fig. 12a-12b, 13 show cross-sectional configurations taken along the mid-plane of the core. The mid-plane of the core is understood to be the plane of symmetry of the core in its thickness direction.
The present embodiment shows the electromagnetic suspension device in the form of a magnetic suspension bearing. The present embodiment is different from the above embodiments in that the electromagnetic levitation device includes at least two sets of electromagnet tooth combinations and at least two sets of inductance tooth combinations, each set of electromagnet tooth combinations includes two electromagnet tooth portions, and each set of inductance tooth combinations includes at least one inductance tooth portion. The iron core is annular. Each group of electromagnet tooth combination is distributed in sequence along the circumferential direction of the iron core, at least one group of inductance tooth combination is arranged between the electromagnet tooth combinations adjacent to each other in the circumferential direction of the iron core, and the inductance coil is arranged on the inductance tooth portion.
In the present embodiment, the electromagnetic levitation apparatus includes the mover 15, the electromagnet tooth combination 251, the electromagnet tooth combination 252, the electromagnet tooth combination 253, the electromagnet tooth combination 254, the inductance tooth combination 271, the inductance tooth combination 272, the inductance tooth combination 273, and the inductance tooth combination 274.
The electromagnet tooth combination 251, the electromagnet tooth combination 252, the electromagnet tooth combination 253, the electromagnet tooth combination 254, the inductance tooth combination 271, the inductance tooth combination 272, the inductance tooth combination 273, and the inductance tooth combination 274 are on the same iron core 57. The iron core 57 is annular, and the inductance tooth portion group 271, the electromagnet tooth portion group 251, the inductance tooth portion group 272, the electromagnet tooth portion group 252, the inductance tooth portion group 273, the electromagnet tooth portion group 253, the inductance tooth portion group 274, and the electromagnet tooth portion group 254 are sequentially distributed in the circumferential direction of the iron core 57.
The electromagnet tooth combination 251 and the electromagnet tooth combination 253 are arranged opposite to each other in the y-direction of freedom to control the displacement of the mover 15 in the y-direction of freedom; the electromagnet tooth combinations 252 and the electromagnet tooth combinations 254 are arranged opposite to each other in the degree of freedom x direction to control the displacement of the mover 15 in the degree of freedom x direction. The degree of freedom x-direction and the degree of freedom y-direction are perpendicular to each other, and define a cross section of the mover 15. Wherein the cross section of the mover 15 should be understood as a section taken perpendicular to the axial direction of the mover 15, as shown in fig. 12a-12b, fig. 13.
Of course, in other embodiments of the present invention, the electromagnetic levitation apparatus may include other numbers of electromagnet tooth combinations and inductive tooth combinations, and is not limited to the four sets of electromagnet tooth combinations including electromagnet tooth combination 251, electromagnet tooth combination 252, electromagnet tooth combination 253, and electromagnet tooth combination 254 in the present embodiment, and the four sets of inductive tooth combinations including inductive tooth combination 271, inductive tooth combination 272, inductive tooth combination 273, and inductive tooth combination 274 in the present embodiment.
Electromagnet tooth combination 251 includes electromagnet teeth 5711, electromagnet teeth 5712, and electromagnet teeth 5713. Electromagnet tooth set 252 includes electromagnet teeth 5721, electromagnet teeth 5722, and electromagnet teeth 5723. Electromagnet tooth combination 253 includes electromagnet tooth 5731, electromagnet tooth 5732, and electromagnet tooth 5733. The electromagnet tooth combination 254 includes an electromagnet tooth 5741, an electromagnet tooth 5742, and an electromagnet tooth 5743. The inductive tooth combination 271 includes an inductive tooth 2711, the inductive tooth combination 272 includes an inductive tooth 2721, the inductive tooth combination 273 includes an inductive tooth 2731, and the inductive tooth combination 274 includes an inductive tooth 2741. Electromagnetic levitation apparatus further includes electromagnet coil 351, inductor 451, electromagnet coil 352, inductor 452, electromagnet coil 353, inductor 453, electromagnet coil 354, and inductor 454.
As shown in fig. 12a-12b, the electromagnet teeth 5711, 5712, 5713, and 2711 are disposed on the same side of the yoke 575. The electromagnet teeth 5711, the electromagnet teeth 5712, and the electromagnet teeth 5713 are distributed in this order in the circumferential direction of the iron core 57, that is, the electromagnet teeth 5711 and the electromagnet teeth 5713 are respectively located on both sides of the electromagnet teeth 5712 in the circumferential direction of the iron core 57 (or the circumferential direction of the mover 15). Inductive tooth 2711 is located on the side of electromagnet tooth 5711 remote from electromagnet tooth 5712. The electromagnet coil 351 is disposed on the electromagnet tooth portion 5711, the electromagnet tooth portion 5712, and the electromagnet tooth portion 5713, that is, the electromagnet coil 351 on the electromagnet tooth portion 5711, the electromagnet tooth portion 5712, and the electromagnet tooth portion 5713 is wound by a single conductive wire. The inductor coil 451 is fitted over the inductor teeth 2711.
The electromagnet tooth portion 5721, the electromagnet tooth portion 5722, the electromagnet tooth portion 5723, and the inductance tooth portion 2721 are provided on the same side of the yoke portion 575. The electromagnet teeth 5721, the electromagnet teeth 5722, and the electromagnet teeth 5723 are distributed in this order in the circumferential direction of the iron core 57, that is, the electromagnet teeth 5721 and the electromagnet teeth 5723 are respectively located on both sides of the electromagnet teeth 5722 in the circumferential direction of the iron core 57 (or the circumferential direction of the mover 15). Inductive tooth 2721 is located on the side of electromagnet tooth 5721 remote from electromagnet tooth 5722. The electromagnet coil 352 is disposed around the electromagnet teeth 5721, 5722, and 5723, that is, the electromagnet coil 352 on the electromagnet teeth 5721, 5722, and 5723 is wound from a single conductive wire. The inductor coil 452 is sleeved on the inductor tooth 2721.
Electromagnet tooth 5731, electromagnet tooth 5732, electromagnet tooth 5733, and inductor tooth 2731 are provided on the same side of yoke 575. The electromagnet teeth 5731, the electromagnet teeth 5732, and the electromagnet teeth 5733 are distributed in this order in the circumferential direction of the core 57, that is, the electromagnet teeth 5731 and the electromagnet teeth 5733 are located on both sides of the electromagnet teeth 5732 in the circumferential direction of the core 57 (or the circumferential direction of the mover 15), respectively. Inductive tooth 2731 is located on a side of electromagnet tooth 5731 remote from electromagnet tooth 5732. The electromagnet coils 353 are placed on the electromagnet teeth 5731, 5732, and 5733, that is, the electromagnet coils 353 on the electromagnet teeth 5731, 5732, and 5733 are wound with one wire. The inductor coil 453 is fitted over the inductor teeth 2731.
The electromagnet tooth portion 5741, the electromagnet tooth portion 5742, the electromagnet tooth portion 5743, and the inductance tooth portion 2741 are provided on the same side of the yoke portion 575. The electromagnet teeth 5741, the electromagnet teeth 5742, and the electromagnet teeth 5743 are distributed in this order in the circumferential direction of the core 57, that is, the electromagnet teeth 5741 and the electromagnet teeth 5743 are respectively located on both sides of the electromagnet teeth 5742 in the circumferential direction of the core 57 (or the circumferential direction of the mover 15). Inductor teeth 2741 are on the side of electromagnet teeth 5741 away from electromagnet teeth 5742. The electromagnet coils 354 are disposed on the electromagnet tooth portions 5741, 5742, and 5743, that is, the electromagnet coils 354 on the electromagnet tooth portions 5741, 5742, and 5743 are wound from a single conductive wire. The inductor coil 454 is fitted over the inductor teeth 2741.
The electromagnet teeth 5711, 5712, 5713, and the mover 15 have pitches g511, g512, and g513, respectively. The inductance teeth 2711 and the mover 15 have a gap g514 therebetween. Inductance tooth 2711 and electromagnet tooth 5711 have a spacing g515 therebetween.
The electromagnet teeth 5721, 5722, 5723, and the mover 15 have pitches g521, g522, and g523, respectively. The inductive tooth 2721 and the mover 15 have a spacing g524 therebetween. Inductive tooth 2721 is spaced apart from electromagnet tooth 5721 by a distance g525, and inductive tooth 2721 is spaced apart from electromagnet tooth 5713 by a distance g 526.
The electromagnet teeth 5731, 5732, 5733, and the mover 15 have pitches g531, g532, and g533 therebetween, respectively. The inductance teeth 2731 and the mover 15 have a distance g534 therebetween. Inductance tooth 2731 and electromagnet tooth 5731 have a spacing g535 therebetween and inductance tooth 2731 and electromagnet tooth 5723 have a spacing g536 therebetween.
The electromagnet tooth portion 5741, the electromagnet tooth portion 5742, the electromagnet tooth portion 5743, and the mover 15 have pitches g541, g542, and g543, respectively. The inductance teeth 2741 and the mover 15 have a spacing g544 therebetween. Inductance tooth 2741 and electromagnet tooth 5741 are separated by a distance g545, inductance tooth 2741 and electromagnet tooth 5733 are separated by a distance g546, and inductance tooth 2711 and electromagnet tooth 5743 are separated by a distance g 547.
Each of the foregoing distances is referred to as a minimum distance.
g514 is greater than g511 and g543, g524 is greater than g521 and g513, g534 is greater than g531 and g523, and g544 is greater than g541 and g533, so that a magnetic circuit of a magnetic field generated by the electromagnet coil reaches the mover through the electromagnet teeth without passing through the inductor teeth, that is, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductor coil, and therefore, the magnetic field generated by the electromagnet coil can be prevented from interfering with induced electromotive force generated by the inductor coil, and the accuracy and sensitivity of the inductor coil in measuring the displacement of the mover can be improved.
Moreover, g514 is smaller than g515 and g547, g524 is smaller than g525 and g526, g534 is smaller than g535 and g536, and g544 is smaller than g545 and g546, so that the magnetic circuit of the magnetic field generated by the inductance coil can reach the mover, the magnetic circuit of the magnetic field generated by the inductance coil is prevented from directly returning to the inductance coil through the adjacent electromagnet teeth without passing through the mover, and the function of measuring the displacement of the mover by the inductance coil can be realized.
The electromagnet coils 351 and 353 adopt current bias differential control, and the currents in the electromagnet coils 351 and 353 are both composed of a bias current I and a control current iy so as to control the displacement of the mover 15 in the direction of the degree of freedom y. The controller adjusts the currents of the electromagnet coils 351 and 353 according to the displacement of the mover 15, and the electromagnet coils 351 receive the current I + iy or I-iy to generate the magnetic field magnetic circuit 3511 and the magnetic field magnetic circuit 3512. A magnetic field magnetic circuit 3531 and a magnetic field magnetic circuit 3532 are generated after current I + iy or I-iy is input into the electromagnet coil 353. In fig. 12a the electromagnet coil 351 is fed with current I + iy and the electromagnet coil 353 is fed with current I-iy.
According to the principle of the shortest magnetic circuit, the magnetic field magnetic circuit 3511 does not pass through the inductor teeth 2711, and the magnetic field magnetic circuit 3511 sequentially passes through the electromagnet teeth 5712, the yoke 575, the electromagnet teeth 5711 and the mover 15, and then returns to the electromagnet teeth 5712 to form a closed magnetic circuit. The magnetic field magnetic circuit 3512 does not pass through the inductance tooth 2721, and the magnetic field magnetic circuit 3512 sequentially passes through the electromagnet tooth 5712, the yoke 575, the electromagnet tooth 5713, and the mover 15, and then returns to the electromagnet tooth 5712 to form a closed magnetic circuit.
Similarly, the magnetic field magnetic circuit 3531 does not pass through the inductor teeth 2731, and the magnetic field magnetic circuit 3531 passes through the electromagnet teeth 5732, the yoke 575, the electromagnet teeth 5731 and the mover 15 in sequence, and then returns to the electromagnet teeth 5732 to form a closed magnetic circuit. The magnetic field magnetic circuit 3532 does not pass through the inductor teeth 2741, and the magnetic field magnetic circuit 3532 passes through the electromagnet teeth 5732, the yoke 575, the electromagnet teeth 5733, and the mover 15 in this order, and then returns to the electromagnet teeth 5732 to form a closed magnetic circuit.
The electromagnet coil 352 and the electromagnet coil 354 adopt current bias differential control, and the currents in the electromagnet coil 352 and the electromagnet coil 354 are both composed of a bias current I and a control current ix so as to control the displacement of the mover 15 in the direction of the degree of freedom x. According to the displacement of the mover 15, the controller adjusts the currents of the electromagnet coil 352 and the electromagnet coil 354, and a magnetic field magnetic circuit 3521 and a magnetic field magnetic circuit 3522 are generated after the current I + ix or I-ix is input into the electromagnet coil 352. A magnetic field magnetic circuit 3541 and a magnetic field magnetic circuit 3542 are generated after current I + ix or I-ix is input into the electromagnet coil 354. In FIG. 12a, solenoid coil 352 receives current I + ix and solenoid coil 354 receives current I-ix.
According to the principle of the shortest magnetic circuit, the magnetic field magnetic circuit 3521 does not pass through the inductive tooth 2721, and the magnetic field magnetic circuit 3521 sequentially passes through the electromagnet tooth 5722, the yoke 575, the electromagnet tooth 5721 and the mover 15, and then returns to the electromagnet tooth 5722 to form a closed magnetic circuit. The magnetic field magnetic circuit 3522 does not pass through the inductor teeth 2731, and the magnetic field magnetic circuit 3522 sequentially passes through the electromagnet teeth 5722, the yoke 575, the electromagnet teeth 5723, and the mover 15, and then returns to the electromagnet teeth 5722 to form a closed magnetic loop.
Similarly, the magnetic field magnetic circuit 3541 does not pass through the inductor teeth 2741, and the magnetic field magnetic circuit 3541 sequentially passes through the electromagnet teeth 5742, the yoke 575, the electromagnet teeth 5741, and the mover 15, and then returns to the electromagnet teeth 5742 to form a closed magnetic circuit. The magnetic field magnetic circuit 3542 does not pass through the inductor teeth 2711, and the magnetic field magnetic circuit 3542 sequentially passes through the electromagnet teeth 5742, the yoke 575, the electromagnet teeth 5743, and the mover 15, and then returns to the electromagnet teeth 5742 to form a closed magnetic circuit.
Inductor 451 and inductor 453 are connected and a voltage of
Figure BDA0003111178290000151
When the period is small, the inductor 451 generates a magnetic field magnetic circuit 4511 and a magnetic field magnetic circuit 4512, respectively, and the inductor 453 generates a magnetic field magnetic circuit 4531 and a magnetic field magnetic circuit 4532, respectively.
According to the principle of shortest magnetic circuit, a magnetic field magnetic circuit 4511 sequentially passes through the inductance tooth 2711, the mover 15, the electromagnet tooth 5711 and the yoke 575, and then returns to the inductance tooth 2711 to form a closed magnetic circuit; the magnetic field magnetic circuit 4512 sequentially passes through the inductor teeth 2711, the mover 15, the electromagnet teeth 5743, and the yoke 575, and then returns to the inductor teeth 2711 to form a closed magnetic loop. The magnetic field magnetic circuit 4531 sequentially passes through the inductance tooth 2731, the mover 15, the electromagnet tooth 5731 and the yoke 575, and then returns to the inductance tooth 2731 to form a closed magnetic loop; the magnetic field magnetic circuit 4532 passes through the inductor teeth 2731, the mover 15, the electromagnet teeth 5723, and the yoke 575 in sequence, and then returns to the inductor teeth 2731 to form a closed magnetic circuit.
Similarly, inductor 452 is connected to inductor 454, and a voltage of
Figure BDA0003111178290000152
When the period is small, the inductor 452 generates a magnetic field magnetic circuit 4521 and a magnetic field magnetic circuit 4522, respectively, and the inductor 454 generates a magnetic field magnetic circuit 4541 and a magnetic field magnetic circuit 4542, respectively.
According to the principle of shortest magnetic circuit, a magnetic field magnetic circuit 4521 sequentially passes through an inductive tooth portion 2721, a mover 15, an electromagnet tooth portion 5721 and a yoke portion 575 and then returns to the inductive tooth portion 2721 to form a closed magnetic loop; the magnetic field magnetic circuit 4522 sequentially passes through the inductive tooth 2721, the mover 15, the electromagnet tooth 5713, and the yoke 575, and then returns to the inductive tooth 2721 to form a closed magnetic loop. The magnetic field magnetic circuit 4541 sequentially passes through the inductance tooth 2741, the mover 15, the electromagnet tooth 5741 and the yoke 575, and then returns to the inductance tooth 2741 to form a closed magnetic loop; the magnetic field magnetic circuit 4542 sequentially passes through the inductor teeth 2741, the mover 15, the electromagnet teeth 5733, and the yoke 575, and then returns to the inductor teeth 2741 to form a closed magnetic circuit.
At this time, the differential pressure output from the inductor 451 and the inductor 453 is measured
Figure BDA0003111178290000161
According to the relation between the inductance and the displacement of the mover 15, the differential pressure is adjusted
Figure BDA0003111178290000162
The signals are processed to obtain the displacement value of the mover 15 in the direction in which the inductance teeth 2711 and the inductance teeth 2731 face each other. Measuring differential pressure output by inductor 452 and inductor 454
Figure BDA0003111178290000163
According to the relation between the inductance and the displacement of the mover 15, the differential pressure is adjusted
Figure BDA0003111178290000164
The signals are processed to obtain the displacement value of the mover 15 in the direction in which the inductive tooth portions 2721 and 2741 face each other. The obtained displacement value of the mover 15 in the direction in which the inductive tooth portion 2711 and the inductive tooth portion 2731 face each other and the obtained displacement value of the mover 15 in the direction in which the inductive tooth portion 2721 and the inductive tooth portion 2741 face each other are subjected to coordinate conversion, so that displacements of the mover 15 in the x-direction and the y-direction of the degree of freedom can be obtained.
Further, in each group of electromagnet tooth combination, the cross-sectional area of the electromagnet tooth in the middle is larger than the sum of the cross-sectional areas of the electromagnet teeth on the two sides. For example, the cross-sectional area of electromagnet teeth 5712 is greater than the sum of the cross-sectional areas of electromagnet teeth 5711 and electromagnet teeth 5713, as shown in fig. 12 a.
Of course, in other embodiments of the present invention, two electromagnet tooth combinations are not oppositely disposed on two sides of the mover, for example, the number of the electromagnet tooth combinations may be three, the three electromagnet tooth combinations are uniformly distributed along the circumferential direction of the mover, and the electromagnetic force acting on the mover by the three electromagnet tooth combinations can also control the movement of the mover in the above-mentioned x-direction and y-direction of the degree of freedom.
Referring to fig. 14 and 15, fig. 14 is a schematic structural diagram of a fifth embodiment of the electromagnetic levitation device of the present invention, and fig. 15 is a schematic magnetic field diagram of the electromagnetic levitation device shown in fig. 14. Wherein fig. 14 and 15 show a sectional structure taken along a median plane of the core. The mid-plane of the core is understood to be the plane of symmetry of the core in its thickness direction.
The present embodiment shows the electromagnetic suspension device in the form of a magnetic suspension bearing. The present embodiment is different from the above embodiments in that the electromagnetic levitation device includes at least two sets of electromagnet tooth combinations and at least two sets of inductance tooth combinations, each set of electromagnet tooth combinations includes two electromagnet tooth portions, and each set of inductance tooth combinations includes at least one inductance tooth portion. The iron core is annular. At least one group of inductance tooth part combinations are arranged in each group of electromagnet tooth part combinations, the inductance tooth part combinations are located between the electromagnet tooth parts of the single electromagnet tooth part combinations along the circumferential direction of the iron core, and the inductance coils are arranged on the inductance tooth parts.
In the present embodiment, the electromagnetic levitation device includes the mover 16, an electromagnet tooth combination 261, an electromagnet tooth combination 262, an electromagnet tooth combination 263, an electromagnet tooth combination 264, an inductance tooth combination 281, an inductance tooth combination 282, an inductance tooth combination 283, and an inductance tooth combination 284.
The iron core 58 is shared by the electromagnet tooth combination 261, the electromagnet tooth combination 262, the electromagnet tooth combination 263, the electromagnet tooth combination 264, the inductance tooth combination 281, the inductance tooth combination 282, the inductance tooth combination 283, and the inductance tooth combination 284. The iron core 58 is annular, and the electromagnet tooth combination 261, the electromagnet tooth combination 262, the electromagnet tooth combination 263, and the electromagnet tooth combination 264 are distributed in this order along the circumferential direction of the iron core 58. Inductive tooth combination 281 is located between the electromagnet teeth of electromagnet tooth combination 261, inductive tooth combination 282 is located between the electromagnet teeth of electromagnet tooth combination 262, inductive tooth combination 283 is located between the electromagnet teeth of electromagnet tooth combination 263, and inductive tooth combination 284 is located between the electromagnet teeth of electromagnet tooth combination 264.
The electromagnet tooth combination 261 and the electromagnet tooth combination 263 are arranged opposite to each other in the y-direction of the degree of freedom to control the displacement of the mover 16 in the y-direction of the degree of freedom; the electromagnet tooth combinations 262 and the electromagnet tooth combinations 264 are arranged opposite to each other in the x-direction of the degree of freedom to control the displacement of the mover 16 in the x-direction of the degree of freedom. The degree of freedom x-direction and the degree of freedom y-direction are perpendicular to each other, and define a cross section of the mover 16. Wherein the cross section of the mover 16 should be understood as a section taken perpendicular to the axial direction of the mover 16, as shown in fig. 14 and 15.
As shown in fig. 14, electromagnet tooth set 261 includes electromagnet teeth 5811 and electromagnet teeth 5812, electromagnet tooth set 262 includes electromagnet teeth 5821 and electromagnet teeth 5822, electromagnet tooth set 263 includes electromagnet teeth 5831 and electromagnet teeth 5832, and electromagnet tooth set 264 includes electromagnet teeth 5841 and electromagnet teeth 5842. Inductive tooth combination 281 includes inductive tooth 2811, inductive tooth combination 282 includes inductive tooth 2821, inductive tooth combination 283 includes inductive tooth 2831, and inductive tooth combination 284 includes inductive tooth 2841.
The electromagnetic levitation device further includes an electromagnet coil 361, an inductance coil 461, an electromagnet coil 362, an inductance coil 462, an electromagnet coil 363, an inductance coil 463, an electromagnet coil 364, and an inductance coil 464.
The electromagnet tooth 5811, the electromagnet tooth 5812, and the inductance tooth 2811 are provided on the same side of the yoke 585. The electromagnet teeth 5811 and the electromagnet teeth 5812 are distributed in this order in the circumferential direction of the iron core 58. Inductive tooth 2811 is located between electromagnet tooth 5811 and electromagnet tooth 5812. Further, the inductance tooth 2811 is disposed centrally between the electromagnet tooth 5811 and the electromagnet tooth 5812. The electromagnet coil 361 is sleeved on the electromagnet tooth portion 5811 and the electromagnet tooth portion 5812, that is, the electromagnet coil 361 on the electromagnet tooth portion 5811 and the electromagnet tooth portion 5812 is wound by a conducting wire. The inductor coil 461 is fitted over the inductor teeth 2811.
The electromagnet teeth 5821, the electromagnet teeth 5822, and the inductor teeth 2821 are provided on the same side of the yoke 585. The electromagnet teeth 5821 and the electromagnet teeth 5822 are distributed in this order in the circumferential direction of the iron core 58. Inductor tooth 2821 is located between electromagnet tooth 5821 and electromagnet tooth 5822. Further, inductor teeth 2821 are centered between electromagnet teeth 5821 and electromagnet teeth 5822. The electromagnet coil 362 is sleeved on the electromagnet tooth 5821 and the electromagnet tooth 5822, that is, the electromagnet coil 362 on the electromagnet tooth 5821 and the electromagnet tooth 5822 is wound by a conductive wire. The inductor coil 462 is disposed on the inductor teeth 2821.
The electromagnet teeth 5831, the electromagnet teeth 5832, and the inductor teeth 2831 are provided on the same side of the yoke 585. The electromagnet teeth 5831 and the electromagnet teeth 5832 are distributed in this order in the circumferential direction of the iron core 58. Inductor tooth 2831 is located between electromagnet tooth 5831 and electromagnet tooth 5832. Further, inductor teeth 2831 are centered between electromagnet teeth 5831 and electromagnet teeth 5832. The electromagnet coil 363 is sleeved on the electromagnet tooth portion 5831 and the electromagnet tooth portion 5832, that is, the electromagnet coil 363 on the electromagnet tooth portion 5831 and the electromagnet tooth portion 5832 is wound by a conducting wire. The inductor coil 463 is fitted over the inductor tooth 2831.
The electromagnet teeth 5841, the electromagnet teeth 5842, and the inductor teeth 2841 are provided on the same side of the yoke 585. The electromagnet teeth 5841 and the electromagnet teeth 5842 are distributed in this order in the circumferential direction of the iron core 58. Inductor teeth 2841 are located between electromagnet teeth 5841 and electromagnet teeth 5842. Further, inductor teeth 2841 are centered between electromagnet teeth 5841 and electromagnet teeth 5842. The electromagnet coil 364 is sleeved on the electromagnet tooth 5841 and the electromagnet tooth 5842, that is, the electromagnet coil 364 on the electromagnet tooth 5841 and the electromagnet tooth 5842 is wound by a conducting wire. The inductor coil 464 is disposed on the inductor teeth 2841.
The electromagnet teeth 5811, the electromagnet teeth 5812, and the mover 16 have pitches g611 and g612, respectively. The inductor teeth 2811 and the mover 16 have a gap g613 therebetween. Inductance tooth 2811 and electromagnet tooth 5811 or electromagnet tooth 5812 have a distance g614 between them. The electromagnet teeth 5821, the electromagnet teeth 5822, and the mover 16 have pitches g621 and g622, respectively. The inductor teeth 2821 and the mover 16 have a distance g623 therebetween. Inductor tooth 2821 and electromagnet tooth 5821 or electromagnet tooth 5822 have a spacing g624 therebetween. The electromagnet teeth 5831, the electromagnet teeth 5832, and the mover 16 have pitches g631 and g632, respectively. The inductor 2831 and the mover 16 have a gap g633 therebetween. The inductive tooth 2831 and the electromagnet tooth 5831 or the electromagnet tooth 5832 have a spacing g634 between them. The electromagnet tooth 5841, the electromagnet tooth 5842, and the mover 16 have pitches g641 and g642, respectively. A gap g643 is provided between the inductor teeth 2841 and the mover 16. The inductive tooth 2841 and the electromagnet tooth 5841 or the electromagnet tooth 5842 have a spacing g644 therebetween. Each of the foregoing distances is referred to as a minimum distance.
g613 is greater than g611 and g612, g623 is greater than g621 and g622, g633 is greater than g631 and g632, and g643 is greater than g641 and g642, so that a magnetic circuit of a magnetic field generated by the electromagnet coil reaches the mover through the electromagnet teeth and does not pass through the inductor teeth, that is, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductor coil, the magnetic field generated by the electromagnet coil can be prevented from interfering with the induced electromotive force generated by the inductor coil, and the accuracy of measuring the displacement of the mover by the magnetic field generated by the inductor coil can be improved.
Moreover, g613 is smaller than g614, g623 is smaller than g624, g633 is smaller than g634, and g643 is smaller than g644, so that the magnetic path of the magnetic field generated by the inductance coil can reach the mover, the magnetic path of the magnetic field generated by the inductance coil is prevented from directly returning to the inductance coil through the adjacent electromagnet teeth without passing through the mover, and the function of measuring the displacement of the mover by the inductance coil can be realized.
The electromagnet coil 361 and the electromagnet coil 363 adopt current bias differential control, and the currents in the electromagnet coil 361 and the electromagnet coil 363 are both composed of bias current I and control current iy so as to control the displacement of the mover 16 in the direction of the degree of freedom y. According to the displacement of the mover 16, the controller adjusts the currents of the electromagnet coil 361 and the electromagnet coil 363, and a magnetic field magnetic circuit 3611 is generated after the current I + iy or I-iy is input into the electromagnet coil 361. A magnetic field magnetic circuit 3631 is generated after current I + iy or I-iy is input into the electromagnet coil 363. In fig. 14, electromagnet coil 361 receives current I + iy, and electromagnet coil 363 receives current I-iy.
According to the principle of the shortest magnetic circuit, the magnetic field magnetic circuit 3611 does not pass through the inductive tooth 2811, and the magnetic field magnetic circuit 3611 sequentially passes through the electromagnet tooth 5812, the yoke 585, the electromagnet tooth 5811, and the mover 16, and then returns to the electromagnet tooth 5812 to form a closed magnetic circuit. Similarly, the magnetic field magnetic circuit 3631 does not pass through the inductor teeth 2831, and the magnetic field magnetic circuit 3631 passes through the electromagnet teeth 5832, the yoke 585, the electromagnet teeth 5831, and the mover 16 in sequence, and then returns to the electromagnet teeth 5832 to form a closed magnetic circuit.
The electromagnet coils 362 and 364 adopt differential control of current bias, and the currents in the electromagnet coils 362 and 364 are both composed of a bias current I and a control current ix to control the displacement of the mover 16 in the direction of the degree of freedom x. According to the displacement of the mover 16, the controller adjusts the currents of the electromagnet coils 362 and 364, and the electromagnet coils 362 receive the current I + ix or I-ix to generate the magnetic field magnetic circuit 3621. A magnetic field magnetic circuit 3641 is generated after current I + ix or I-ix is input into the electromagnet coil 364. In FIG. 14, the electromagnet coil 362 receives current I + ix, and the electromagnet coil 364 receives current I-ix.
According to the principle of the shortest magnetic path, the magnetic field magnetic path 3621 does not pass through the inductor teeth 2821, and the magnetic field magnetic path 3621 passes through the electromagnet teeth 5822, the yoke 585, the electromagnet teeth 5821, and the mover 16 in sequence, and then returns to the electromagnet teeth 5822 to form a closed magnetic loop. Similarly, the magnetic field magnetic circuit 3641 does not pass through the inductive tooth 2841, and the magnetic field magnetic circuit 3641 passes through the electromagnet tooth 5842, the yoke 585, the electromagnet tooth 5841 and the mover 16 in sequence, and then returns to the electromagnet tooth 5842 to form a closed magnetic loop.
The inductor 461 and the inductor 463 are connected and a voltage of
Figure BDA0003111178290000191
When the period is small, inductor 461 generates magnetic field magnetic circuit 4611 and magnetic field magnetic circuit 4612, respectively, and inductor 463 generates magnetic field magnetic circuit 4631 and magnetic field magnetic circuit 4632, respectively.
According to the principle of the shortest magnetic circuit, the magnetic field magnetic circuit 4611 sequentially passes through the inductive tooth portion 2811, the mover 16, the electromagnet tooth portion 5811 and the yoke portion 585, and then returns to the inductive tooth portion 2811 to form a closed magnetic loop; the magnetic field magnetic circuit 4612 passes through the inductor teeth 2811, the mover 16, the electromagnet teeth 5812, and the yoke 585 in sequence, and then returns to the inductor teeth 2811 to form a closed magnetic loop. The magnetic field magnetic circuit 4631 passes through the inductive tooth 2831, the mover 16, the electromagnet tooth 5831 and the yoke 585 in sequence, and then returns to the inductive tooth 2831 to form a closed magnetic loop; the magnetic field magnetic circuit 4632 passes through the inductor teeth 2831, the mover 16, the electromagnet teeth 5832, and the yoke 585 in sequence, and then returns to the inductor teeth 2831 to form a closed magnetic circuit.
Similarly, inductor 462 is connected to inductor 464 and is charged with a voltage of
Figure BDA0003111178290000201
When the period is small, the inductor 462 generates a magnetic field magnetic circuit 4621 and a magnetic field magnetic circuit 4622, respectively, and the inductor 464 generates a magnetic field magnetic circuit 4641 and a magnetic field magnetic circuit 4642, respectively.
According to the principle of the shortest magnetic circuit, the magnetic field magnetic circuit 4621 sequentially passes through the inductive tooth 2821, the mover 16, the electromagnet tooth 5821 and the yoke 585, and then returns to the inductive tooth 2821 to form a closed magnetic loop; the magnetic field magnetic circuit 4622 passes through the inductor teeth 2821, the mover 16, the electromagnet teeth 5822, and the yoke 585 in sequence, and then returns to the inductor teeth 2821 to form a closed magnetic circuit. The magnetic field magnetic circuit 4641 sequentially passes through the inductive tooth 2841, the mover 16, the electromagnet tooth 5841 and the yoke 585, and then returns to the inductive tooth 2841 to form a closed magnetic loop; the magnetic field magnetic circuit 4642 passes through the inductor teeth 2841, the mover 16, the electromagnet teeth 5842, and the yoke 585 in sequence, and then returns to the inductor teeth 2841 to form a closed magnetic circuit.
At this time, the differential pressure output from the inductor 461 and the inductor 463 is measured
Figure BDA0003111178290000202
According to the relation between the inductance and the displacement of the mover 16, the differential pressure is adjusted
Figure BDA0003111178290000203
The signals are processed to obtain the rotor16 displacement values in the y-direction of freedom. Measuring differential pressure output by inductor 462 and inductor 464
Figure BDA0003111178290000204
According to the relation between the inductance and the displacement of the mover 16, the differential pressure is adjusted
Figure BDA0003111178290000205
The signals are processed to obtain displacement values of the mover 16 in the x-direction of the degree of freedom.
In summary, the iron core of the electromagnetic levitation device provided by the present invention includes at least one set of electromagnet tooth assembly, at least one set of inductance tooth assembly, and a yoke. Each group of electromagnet tooth combination at least comprises two electromagnet tooth parts, and each group of inductance tooth combination at least comprises one inductance tooth part. The at least one group of electromagnet tooth combination and the at least one group of inductance tooth combination are arranged on the same side of the yoke part. The at least one group of electromagnet tooth combination and the at least one group of inductance tooth combination face the rotor. The electromagnet coil is sleeved on the electromagnet tooth part and/or the yoke part, and the inductance coil is sleeved on the inductance tooth part and/or the yoke part which is positioned outside a magnetic loop generated by the electromagnet coil. The middle surface of the electromagnet and the middle surface of the inductive sensor are the same plane, so that the measuring position is kept consistent with the acting position of the electromagnet, and the performance of the electromagnetic suspension device is improved.
And a first interval is formed between the electromagnet tooth part and the rotor, a second interval is formed between the inductance tooth part and the rotor, and a third interval is formed between the adjacent electromagnet tooth part and the inductance tooth part. The first distance is smaller than the second distance, and the third distance is larger than the second distance. Because the intensity of the magnetic field generated by the electromagnet coil is far greater than that of the magnetic field generated by the inductance coil, the magnetic circuit of the magnetic field generated by the electromagnet coil does not pass through the inductance coil, the magnetic field generated by the electromagnet coil can be prevented from interfering the induced electromotive force of the inductance coil, and the measurement precision and sensitivity of the inductance coil to the displacement of the rotor can be guaranteed.
In addition, in the present invention, unless otherwise expressly specified or limited, the terms "connected," "stacked," and the like are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (5)

1. An electromagnetic levitation device, comprising a mover and at least one set of electromagnetic levitation components, wherein the electromagnetic levitation components comprise:
an iron core, including at least one set of electromagnet tooth combinations, at least one set of inductance tooth combinations, and a yoke portion, each set of electromagnet tooth combinations at least including two electromagnet tooth portions, each set of inductance tooth combinations at least including one inductance tooth portion, the at least one set of electromagnet tooth combinations and the at least one set of inductance tooth combinations being disposed on the same side of the yoke portion, wherein the at least one set of electromagnet tooth combinations and the at least one set of inductance tooth combinations face the mover; the number of the electromagnet tooth parts is two, and the number of the inductance tooth parts is one; the inductance tooth part is positioned between the two electromagnet tooth parts, the inductance tooth part is positioned in the middle of the yoke part between the two electromagnet tooth parts, and the inductance tooth part is equal to the electromagnet tooth parts on the two sides in distance;
the electromagnet coil is sleeved on the electromagnet tooth part and/or the yoke part;
the inductance coil is sleeved on the inductance tooth part and/or the yoke part outside a magnetic loop generated by the electromagnet coil;
the electromagnet tooth part and the rotor have a first interval therebetween, the inductance tooth part and the rotor have a second interval therebetween, the electromagnet tooth part and the inductance tooth part which are adjacent to each other have a third interval therebetween, the first interval is smaller than the second interval, and the third interval is larger than the second interval.
2. An electromagnetic levitation apparatus as recited in claim 1,
the electromagnetic suspension device comprises two groups of electromagnetic suspension assemblies, and the two groups of electromagnetic suspension assemblies are respectively arranged on two opposite sides of the rotor.
3. An electromagnetic levitation apparatus as recited in claim 1,
the electromagnetic suspension device comprises at least two groups of electromagnet tooth combinations and at least two groups of inductance tooth combinations;
the iron core is annular;
each group of electromagnet tooth part combinations are sequentially distributed along the circumferential direction of the iron core, at least one group of inductance tooth part combinations are arranged between the electromagnet tooth part combinations adjacent to each other in the circumferential direction of the iron core, and the inductance coils are arranged on the inductance tooth parts.
4. An electromagnetic levitation apparatus as recited in claim 1,
the electromagnetic suspension device comprises at least two groups of electromagnet tooth combinations and at least two groups of inductance tooth combinations;
the iron core is annular;
each group of electromagnet tooth part combination is distributed in sequence along the circumferential direction of the iron core, at least one group of inductance tooth part combination is arranged in each group of electromagnet tooth part combination, the inductance tooth part combination is located between the electromagnet tooth parts of the electromagnet tooth part combination along the circumferential direction of the iron core, and the inductance coil is arranged on the inductance tooth part.
5. Electromagnetic levitation apparatus as recited in claim 1 or 2,
the iron core is integrally processed by a magnetic conductive material, and the iron core is integrally provided with at least one group of electromagnet tooth part combination, at least one group of inductance tooth part combination and the yoke part; or
The iron core is formed by laminating a plurality of laminated sheets, the laminated sheets are made of magnetic conductive materials, and at least part of the laminated sheets are provided with the at least one group of electromagnet tooth part combination, the at least one group of inductance tooth part combination and the yoke part.
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