CN113452280B - Swing type actuator utilizing elastic modulus gradient and composite electret elastomer - Google Patents

Swing type actuator utilizing elastic modulus gradient and composite electret elastomer Download PDF

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CN113452280B
CN113452280B CN202110626813.1A CN202110626813A CN113452280B CN 113452280 B CN113452280 B CN 113452280B CN 202110626813 A CN202110626813 A CN 202110626813A CN 113452280 B CN113452280 B CN 113452280B
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modulus
elastomer
stretchable
electret
elastic modulus
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CN113452280A (en
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张舒文
徐明龙
刘开园
嵇辉
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Xian Jiaotong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
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Abstract

The invention discloses a swing type actuator utilizing elastic modulus gradient and a composite electret elastomer, which comprises a stretchable bottom electrode, a low-modulus elastomer substrate contacted with the upper end of the stretchable bottom electrode, a high-modulus elastomer substrate connected with the low-modulus elastomer substrate through a chemical bond, nano electret particles positioned in the high-modulus elastomer substrate, a stretchable top electrode positioned at the upper end of the low-modulus elastomer substrate, and the low-modulus elastomer substrate, the nano electret particles, the high-modulus elastomer substrate, the stretchable bottom electrode and the stretchable top electrode jointly form a swing type actuating unit with ultra-large deformation capacity under a low voltage condition, and an actuating end connected with the side section of the actuating unit swings. The controller outputs a control signal, the control signal is amplified by the voltage amplifier and then output to the stretchable bottom electrode and the stretchable top electrode of the actuating unit, and the oscillating actuation is carried out by utilizing electrostrictive force caused by the potential difference between the electrodes.

Description

Swing type actuator utilizing elastic modulus gradient and composite electret elastomer
Technical Field
The invention relates to a force actuator, in particular to a swing type actuator utilizing elastic modulus gradient and composite electret elastomer material.
Background
The technology of flexible actuators based on elastomer material substrates is in explosive growth in recent years, and particularly, the demand for flexible large-deformation actuating devices based on the requirements of ocean exploration, bionic machines and the like is short. However, the electrically driven dielectric elastomer actuator technology in the prior art still mainly uses the electrostrictive effect, but the required voltage is high, the dependence of the deformation range and the output force on material parameters is large, the scale effect is not obvious enough, and the insufficiency of a single actuation mode is gradually difficult to meet the requirement along with the improvement of the required level.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a swing type actuator utilizing an elastic modulus gradient and a composite electret elastomer, wherein the elastic modulus gradient generates non-uniform deformation and then outputs a swing angle, and the output swing capacity is improved by means of micro-nano geometric scale regulation and pre-charging. Compared with the prior art, the scheme has the advantages of large material selection range, small dielectric parameter dependence, more obvious scale effect, novel actuation mode and the like.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a swing type actuator utilizing elastic modulus gradient and composite electret elastomer comprises a stretchable bottom electrode 1, a low-modulus elastomer substrate 2 contacted with the upper end of the stretchable bottom electrode 1, a high-modulus elastomer substrate 3 connected with the low-modulus elastomer substrate 2 through a chemical bond, nano electret particles 4 positioned in the high-modulus elastomer substrate 3, a stretchable top electrode 5 positioned at the upper end of the low-modulus elastomer substrate 3, the low-modulus elastomer substrate 2, the nano electret particles 4, the high-modulus elastomer substrate 3, the stretchable bottom electrode 1 and the stretchable top electrode 5 jointly form a swing type actuating unit with super large deformation capacity, an actuating end 6 connected with the side cross section of the swing type actuating unit swings, and the swing type actuator further comprises a voltage power amplifier 8 connected with the stretchable bottom electrode 1 and the stretchable top electrode 5 and a controller 7 connected with the voltage power amplifier 8; the controller 7 outputs a control signal, the control signal is amplified by the voltage power amplifier 8 and then output to the stretchable bottom electrode 1 and the stretchable top electrode 5 of the swing type actuation unit, and the swing type actuation is carried out by utilizing electrostrictive force caused by the potential difference on the stretchable bottom electrode 1 and the stretchable top electrode 5; when electrostrictive force is loaded on the composite electret elastomer material with elastic modulus gradient, the deformation degree is inconsistent due to the uneven elastic modulus of the material, the layer with small elastic modulus, namely the low-modulus elastomer substrate 2, has larger deformation, while the layer with large elastic modulus, namely the high-modulus elastomer substrate 3, has smaller deformation, and generates inclined deformation at the side end of the material; the doped nano electret particles 4 are arranged in the high-modulus elastomer substrate 3, and the characteristic dimension of the nano electret particles 4 is bound in a cross-linking grid and an interface with smaller dimension, and the nano electret particles 4 are subjected to net charge polarization in advance, so that when an external voltage with the same strength is applied, an additional electric field force is generated between the inner part of the material and an electrode, and the electric field force increases the non-uniform deformation degree of the material. The above technique has the following significant advantages: the method has the advantages of low driving voltage, strong designability of driving waveform, strong material selectivity, small dependence of dielectric parameters of the material, overlarge deformation range, continuous adjustment, high force-electric coupling degree, strong micro-scale designability and the like.
The stretchable bottom electrode 1 and the stretchable top electrode 5 have an additional stiffness more than an order of magnitude lower than the elastomeric material and good adhesion, as well as good electrical conductivity.
The elastic modulus transition between the low modulus elastomeric substrate 2 and the high modulus elastomeric substrate 3 should be continuous and linked by chemical bonds, the low modulus elastomeric substrate 2 and the high modulus elastomeric substrate 3 being the same material or family of materials with a gradient of crosslink density.
The material of the high modulus elastomeric substrate (3) needs to capture the same characteristic dimension of the cross-linked network at the height of the nano-electret particles 4 as the characteristic dimension of the nano-electret particles 4 for capture.
The actuating end 6 is made of materials and geometrical dimensions matched with the material mechanics and actuating requirements of the swing type actuating unit.
The actuator is in a single-layer actuation mode, a stacked actuation mode or a geometric repeated mode to enhance the actuation capability.
The net pre-applied charge of the nano electret particles 4 is related to the amount of the nano electret particles 4 and the polarization condition, and as the amount of the nano electret particles 4 increases, the equivalent stiffness of the material gradually increases and the tensile rate gradually decreases, so that the comprehensive consideration needs to be combined with the action requirement.
Compared with the prior art, the invention has the following advantages:
1) Compared with the traditional extrusion type displacement output, the swing type actuation method driven by low voltage can realize the swing type displacement output which is more common in the actuation requirements of the bionic robot and the deep sea exploration robot under the low voltage driving, simplify the mechanical quantity conversion difficulty in the force-electricity coupling effect and realize the more direct load output.
2) Compared with the existing deformation technology generated by electrostriction, the invention has more obvious scale effect, namely that the swing angle is in inverse proportion to the third power of the material thickness, and the traditional electrostriction deformation is in inverse proportion to the second power of the material thickness.
3) Compared with the traditional dielectric elastomer material with high dependence on dielectric constant, the invention reduces the dependence on the dielectric constant of the material in the actuation process through the preset bulk net charge and greatly improves the actuation capability.
In a word, the invention can realize large swing angle swing output under low voltage driving.
Drawings
Fig. 1 is a schematic cross-sectional view of an actuator structure. To better illustrate the microstructure design and innovation of the present invention, the cross-linked network and the nano-electret particles in fig. 1 are not true sizes, but are schematic diagrams magnified several times, the geometric dimensions of the cross-linked network tend to be on the nanometer to micrometer scale, and the dimensions of the nano-electret particles also tend to be on the 5-100 nanometer scale.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples.
As shown in fig. 1, the swing type actuator using elastic modulus gradient and composite electret elastomer material of the present invention comprises a stretchable bottom electrode 1, a low modulus elastomer substrate 2 contacting with the upper end of the stretchable bottom electrode 1, a high modulus elastomer substrate 3 connected with the low modulus elastomer substrate 2 through a chemical bond, nano electret particles 4 located in the high modulus elastomer substrate 3, a stretchable top electrode 5 located at the upper end of the low modulus elastomer substrate 3, the low modulus elastomer substrate 2, the nano electret particles 4, the high modulus elastomer substrate 3, the stretchable bottom electrode 1 and the stretchable top electrode 5 together form a swing type actuation unit with ultra large deformation capability, and an actuation end 6 connected with the side cross section of the swing type actuation unit performs swing operation; the stretchable bottom electrode 1 and the stretchable top electrode 5 are connected with each other through a stretchable top electrode 8, and the stretchable top electrode is connected with the stretchable bottom electrode 1 and the stretchable top electrode 5 through a stretchable top electrode 8. The controller 7 outputs a control signal, the control signal is amplified by the voltage amplifier 8 and then output to the stretchable bottom electrode 1 and the stretchable top electrode 5 of the swing type actuation unit, and the swing type actuation is performed by utilizing electrostrictive force caused by the potential difference on the stretchable bottom electrode 1 and the stretchable top electrode 5. When electrostrictive force is loaded on the composite electret elastomer material with elastic modulus gradient, the deformation degree is different due to the uneven elastic modulus of the materialThus, the layer having a small elastic modulus has a large deformation, and the layer having a large elastic modulus has a small deformation, and an oblique deformation is generated at the material side end; as shown in FIG. 1, assuming that the total height of the material is H, the length of the electrode in the planar direction is x 0 The modulus of elasticity at the height of the material being the variable h is Y h There is a deformation S of the material at that height h Is composed of
Figure BDA0003101626130000041
Where σ is the electrostrictive stress experienced.
A difference of deformation Δ S in the thickness direction is
Figure BDA0003101626130000042
In the formula S H ,S 0 ,Y H ,Y 0 The amount of deformation of the material and the modulus of elasticity of the material at heights H and 0, respectively.
At an angle of oscillation of
Figure BDA0003101626130000051
Wherein ε, E, U, H and m are dielectric constant, applied electric field, applied voltage, total height of material and ratio of maximum/minimum elastic modulus. To facilitate the separation of the variables, the pivot angle is written as above, and it can be seen that the pivot angle of the actuator is inversely proportional to the third power of the thickness under the condition that the applied voltage is not changed. The nano electret particles are doped in the elastomer material, and the nano electret particles are bound in a cross-linking grid and an interface with smaller sizes and are applied with net charge polarization, so that additional electric field force is generated between the inner part of the material and an electrode when external voltage with the same strength is applied, and the non-uniform deformation degree of the material is increased by the electric field force. And the net charge is pre-applied in the material and the swing angle expression becomes the one when the net charge is pre-set close to one end of the material (high elastic modulus material cross-link density is large and the corresponding cross-linked network characteristic size is small enough to constrain the nano-electret particles)
Figure BDA0003101626130000052
Wherein U is h The surface potential of the layer after the net charge is applied can be regulated in size and polarity according to the polarization type and the material type, namely, the positive and negative and the size are controllable, so that the controllability of the swing angle actuator is greatly enhanced.
The swing actuator has the following obvious advantages: the method has the advantages of low driving voltage, strong designability of driving waveform, simple material system, ultra-large deformation range, continuous adjustment, high force-electric coupling degree, strong micro-scale designability and the like. Experiments prove that the swing angle tan theta of the material in a resonance state can exceed 10 when the driving voltage is only 300V (thousands of volts in the prior art) -1 The order of magnitude, i.e. a material several centimeters long, can realize the swing of the end part more than 1 centimeter, and the swing angle under the non-resonance state can also reach 10 -2 In order of magnitude, i.e., in millimeters.
As a preferred embodiment of the present invention, the crosslinking density of the low modulus elastomeric substrate 2 and the high modulus elastomeric substrate 3 is simple and controllable. And the material system is definite.
As a preferred embodiment of the present invention, the nano electret particles 4 have a more distinct electret property and a more consistent compatibility with the matrix material.
As a preferred embodiment of the invention, the poling process is matched to material thickness, electret type and net charge density is tunable.

Claims (7)

1. A swing type actuator utilizing elastic modulus gradient and a composite electret elastomer is characterized in that: the device comprises a stretchable bottom electrode (1), a low-modulus elastomer substrate (2) contacted with the upper end of the stretchable bottom electrode (1), a high-modulus elastomer substrate (3) connected with the low-modulus elastomer substrate (2) through a chemical bond, nano electret particles (4) positioned in the high-modulus elastomer substrate (3), a stretchable top electrode (5) positioned at the upper end of the high-modulus elastomer substrate (3), a low-modulus elastomer substrate (2), the nano electret particles (4), the high-modulus elastomer substrate (3), the stretchable bottom electrode (1) and the stretchable top electrode (5) jointly form a swinging type actuating unit with ultra-large deformation capacity, an actuating end (6) connected with the side cross section of the swinging type actuating unit performs swinging operation, and the device further comprises a voltage power amplifier (8) connected with the stretchable bottom electrode (1) and the stretchable top electrode (5) and a controller (7) connected with the voltage power amplifier (8); the controller (7) outputs a control signal, the control signal is amplified by a voltage power amplifier (8) and then is output to the stretchable bottom electrode (1) and the stretchable top electrode (5) of the swing type actuating unit, and the swing type actuating unit performs swing type actuation by utilizing electrostrictive force caused by the potential difference on the stretchable bottom electrode (1) and the stretchable top electrode (5); when electrostrictive force is loaded on a composite electret elastomer material with elastic modulus gradient, the deformation degree is inconsistent due to the uneven elastic modulus of the material, a layer with small elastic modulus, namely a low-modulus elastomer substrate (2), has larger deformation, a layer with large elastic modulus, namely a high-modulus elastomer substrate (3), has smaller deformation, generates inclined deformation at the side end of the material, and the driving deformation condition is described as follows:
the total height of the material is H, and the length of the electrode along the plane direction is x 0 The modulus of elasticity at the height of the material being the variable h is Y h There is a deformation S of the material at that height h Is composed of
Figure FDA0003937110820000011
Wherein σ is the electrostrictive stress experienced;
a difference of deformation Δ S in the thickness direction is
Figure FDA0003937110820000012
In the formula S H ,S 0 ,Y H ,Y 0 Respectively, the material at the height of H and 0The amount of deformation and the modulus of elasticity of the material;
a swing angle of
Figure FDA0003937110820000021
Wherein epsilon, E, U, H and m are respectively dielectric constant, external electric field, external voltage, total height of the material and maximum/minimum elastic modulus ratio; in order to conveniently separate variables, the swing angle is written into the form, so that the swing angle of the actuator is in an inverse relation with the third power of the thickness under the condition that the applied voltage is not changed; the nano electret particles (4) are doped in the high-modulus elastomer substrate (3), and because the characteristic sizes of the nano electret particles (4) are bound in a cross-linking grid and an interface with smaller sizes and the net charge polarization is applied to the nano electret particles (4) in advance, additional electric field force is generated between the inner part of the material and an electrode when external voltage with the same strength is applied, and the electric field force increases the non-uniform deformation degree of the material; when a net charge is pre-applied to the material and assuming the pre-set location of the net charge is near one end of the material, the expression for the pivot angle becomes
Figure FDA0003937110820000022
Wherein U is h The surface potential of the layer after the net charge is applied can be regulated in size and polarity according to the polarization type and the material type, namely, the positive and negative and the size are controllable, so that the controllability of the swing angle actuator is greatly enhanced.
2. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the stretchable bottom electrode (1) and the stretchable top electrode (5) have an additional stiffness that is more than an order of magnitude lower than the elastomeric material.
3. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the elastic modulus transition between the low modulus elastomeric substrate (2) and the high modulus elastomeric substrate (3) should be continuous and linked by chemical bonds, the low modulus elastomeric substrate (2) and the high modulus elastomeric substrate (3) being of the same material or family of materials having a gradient in crosslink density.
4. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the material of the high modulus elastomeric substrate (3) requires the same characteristic dimension of the cross-linked network at the height of the captured nano-electret particles (4) as the characteristic dimension of the nano-electret particles (4) for capture.
5. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the actuating end (6) is made of materials and geometrical dimensions matched with the material mechanics and actuating requirements of the swing type actuating unit.
6. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the actuator is in a single-layer actuation mode, a stacked actuation mode or a geometric repeated mode to enhance the actuation capability.
7. The oscillating actuator using an elastic modulus gradient and a composite electret elastomer as claimed in claim 1, wherein: the pre-applied net charge of the nano-electret particles (4) is related to the amount of nano-electret particles (4) and the polarization conditions.
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US8217381B2 (en) * 2004-06-04 2012-07-10 The Board Of Trustees Of The University Of Illinois Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
US7538476B2 (en) * 2007-03-30 2009-05-26 Intel Corporation Multi-layer piezoelectric actuators with conductive polymer electrodes
US20110024010A1 (en) * 2009-07-31 2011-02-03 Gm Global Technology Operations, Inc. Performance adaptive tires utilizing active material actuation
CN202573145U (en) * 2012-05-28 2012-12-05 北京优士邻科技发展有限公司 Elastic electret composite membrane
CN110323963B (en) * 2019-06-29 2020-07-10 西安交通大学 Electret composite material single-electrode actuator with tension and compression bidirectional output and method
CN110474565A (en) * 2019-09-10 2019-11-19 大连理工大学 A kind of automatically controlled bend in one direction type deformation-variation rigidity integrated driver
CN110576447A (en) * 2019-09-10 2019-12-17 大连理工大学 electric control bidirectional bending type deformation-variable rigidity integrated driver
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