CN113446269A - Vacuum pump and energy saving device - Google Patents

Vacuum pump and energy saving device Download PDF

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Publication number
CN113446269A
CN113446269A CN202010232216.6A CN202010232216A CN113446269A CN 113446269 A CN113446269 A CN 113446269A CN 202010232216 A CN202010232216 A CN 202010232216A CN 113446269 A CN113446269 A CN 113446269A
Authority
CN
China
Prior art keywords
cavity
vacuum pump
main body
valve
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010232216.6A
Other languages
Chinese (zh)
Inventor
顾崇诚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd
Original Assignee
Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd filed Critical Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd
Priority to CN202010232216.6A priority Critical patent/CN113446269A/en
Publication of CN113446269A publication Critical patent/CN113446269A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention discloses an energy-saving device which is applied to an exhaust pipe and a vacuum pump air outlet end of a vacuum pump. The main body comprises a main body air inlet end, a main body air outlet end, a first cavity and a second cavity. The air inlet end of the main body is communicated with the air outlet end of the vacuum pump. The air outlet end of the main body is communicated with the exhaust pipe. The first cavity is communicated with the air inlet end of the main body. The second cavity is communicated with the air outlet end of the main body and the first cavity. The valve is positioned in the second cavity and is used for closing or opening the communication relation between the first cavity and the second cavity. The vacuum generator comprises a vacuum generator air inlet end, a vacuum generator air outlet end and an air flow adjusting piece. The air inlet end of the vacuum generator is communicated with the first cavity. The air outlet end of the vacuum generator is communicated with the second cavity. The airflow adjusting piece is communicated with the first cavity and the second cavity.

Description

Vacuum pump and energy saving device
Technical Field
The invention relates to a vacuum pump and an energy-saving device, in particular to a vacuum pump and an energy-saving device capable of saving electric power.
Background
A typical vacuum pump has a pumping motor, a pumping chamber and a discharge tube. The air pumping motor can pump air from a specific object and convey the pumped air to the air pumping cavity, and the air pumping cavity can convey the air to the outside through the exhaust pipe.
However, the external atmospheric pressure also pulls the gas pressure in the pumping cavity through the exhaust pipe, so that the pumping cavity cannot be maintained at a stable negative pressure; the pumping motor consumes more power to maintain the negative pressure to pump the gas.
Therefore, there is a need for a device that allows a vacuum pump to conserve power.
Disclosure of Invention
The invention mainly aims to provide an energy-saving device which can lead a vacuum pump to save electric power.
To achieve the above object, the energy saving device of the present invention is applied to an exhaust pipe and an air outlet end of a vacuum pump of the vacuum pump, and comprises a main body, a valve and a vacuum generator. The main body comprises a main body air inlet end, a main body air outlet end, a first cavity and a second cavity. The air inlet end of the main body is communicated with the air outlet end of the vacuum pump. The air outlet end of the main body is communicated with the exhaust pipe. The first cavity is communicated with the air inlet end of the main body. The second cavity is communicated with the air outlet end of the main body and the first cavity. The valve is positioned in the second cavity and is used for closing or opening the communication relation between the first cavity and the second cavity. The vacuum generator comprises a vacuum generator air inlet end, a vacuum generator air outlet end and an air flow adjusting piece. The air inlet end of the vacuum generator is communicated with the first cavity. The air outlet end of the vacuum generator is communicated with the second cavity. The airflow adjusting piece is communicated with the first cavity and the second cavity.
According to an embodiment of the present invention, when the vacuum pump is in a standby state, the gas flow adjusting member provides an active gas flow towards the outlet of the vacuum generator, and the active gas flow pulls a gas flow in the inlet of the vacuum generator to move towards the outlet of the vacuum generator, so as to pull and extract a gas flowing into the first cavity from the outlet of the vacuum pump, so that a gas pressure in the vacuum pump maintains a negative pressure.
According to an embodiment of the present invention, after the gas flow adjusting member drags and extracts the gas flowing into the first cavity from the gas outlet of the vacuum pump, the active gas flow of the gas flow adjusting member pushes the gas to the gas outlet of the vacuum generator, flows into the second cavity, and flows to the outside through the gas outlet of the main body.
According to an embodiment of the present invention, the energy saving device further includes a valve chute, the valve chute is disposed in the second cavity; the valve gate includes a gate portion in which the valve gate moves.
According to an embodiment of the present invention, the valve chute further comprises at least one vent; the active airflow of the airflow adjusting piece pushes the gas to the air outlet end of the vacuum generator, flows into the second cavity, passes through the at least one vent and flows to the outside through the air outlet end of the main body.
According to an embodiment of the present invention, the energy saving device further includes an elastic member, and the elastic member connects the sliding groove portion and the valve.
According to an embodiment of the present invention, the elastic member provides an elastic force to the valve to move the valve to close the communication relationship between the first cavity and the second cavity.
According to an embodiment of the present invention, when the vacuum pump is operated, the vacuum pump inputs an exhaust gas into the first chamber, and the exhaust gas pushes the valve, so that the communication relationship between the first chamber and the second chamber is opened; therefore, the exhaust gas flows into the second cavity, passes through the at least one vent and flows outwards through the gas outlet end of the main body.
Another main object of the present invention is to provide a vacuum pump that can save electricity.
To achieve the above object, the vacuum pump of the present invention includes an exhaust pipe, an exhaust end of the vacuum pump, and the energy saving device.
Through the structural design of the vacuum pump and the energy-saving device, the gas pressure in the vacuum pump can not be pulled by the external atmosphere, the gas pressure in the vacuum pump can maintain stable negative pressure, and an air suction motor in the vacuum pump does not need to consume more electric power to maintain the negative pressure, so that the energy-saving effect can be achieved.
Drawings
Fig. 1 is a schematic diagram of an energy saving device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an exhaust pipe, an energy saving device, and a vacuum pump in standby according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of an exhaust pipe, an energy saving device and a vacuum pump in operation according to an embodiment of the present invention.
Reference numerals
Energy saving device 1
Main body 10
Main body air inlet end 11
Main body air outlet end 12
First chamber 13
Second chamber 14
Elastic member 20
Valve 30
Valve gate chute 40
Slide groove part 41
Air vent 42
Vacuum generator 50
Vacuum producer inlet 51
Vacuum generator outlet port 52
Airflow adjuster 53
Vacuum pump 100
Vacuum pump outlet port 110
Exhaust pipe 200
Direction of suction A
Direction of air flow guidance B
Direction of air outlet C of vacuum pump
Exhaust direction D, E, F
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1 to 3, an energy saving device according to an embodiment of the present invention is described. FIG. 1 is a schematic diagram of an energy saving device according to an embodiment of the present invention; FIG. 2 is a schematic diagram of an exhaust pipe, an energy saving device and a vacuum pump in standby according to an embodiment of the present invention; FIG. 3 is a schematic diagram of an exhaust pipe, an energy saving device and a vacuum pump in operation according to an embodiment of the present invention.
As shown in fig. 1 to 3, in an embodiment of the present invention, a vacuum pump 100 includes an exhaust pipe 200, a vacuum pump outlet 110 and an energy saving device 1. The energy-saving device is applied to the exhaust pipe 200 and the vacuum pump outlet 110. The energy saving device 1 can maintain the negative pressure inside the vacuum pump 100 to save electric power. The economizer 1 includes a main body 10, an elastic member 20, a valve 30, a valve chute 40, and a vacuum generator 50.
In one embodiment of the present invention, the main body 10 includes a main body inlet 11, a main body outlet 12, a first cavity 13 and a second cavity 14. The main body inlet end 11 is connected to the vacuum pump outlet end 110 to receive the gas exhausted from the vacuum pump outlet end 110. The main body gas outlet end 12 is connected to the exhaust pipe 200 to exhaust gas to the exhaust pipe 200, and then discharged to the outside through the exhaust pipe 200. The first cavity 13 communicates with the body inlet end 11. The second cavity 14 is communicated with the main body air outlet end 12 and the first cavity 13.
In an embodiment of the present invention, the valve 30 is located in the second cavity 14 and can move in the second cavity 14 to block or separate from the communication between the first cavity 13 and the second cavity 14, so that the communication between the first cavity 13 and the second cavity 14 is closed or opened.
In one embodiment of the present invention, the valve chute 40 is disposed in the second chamber 14. The valve gate chute 40 includes a chute portion 41 and two air ports 42. The valve 30 moves within the chute portion 41 to block or separate from the communication between the first and second chambers 13 and 14. The vent 42 is for passing gas to flow to the outside; however, the number of the vents 42 is not limited to two, and may be changed to one according to design requirements.
In one embodiment of the present invention, the vacuum generator 50 includes a vacuum generator inlet 51, a vacuum generator outlet 52 and a flow adjustment member 53. The vacuum generator inlet 51 is connected to the first chamber 13, and the vacuum generator inlet 51 is used for allowing the gas in the first chamber 13 to flow in. The vacuum generator outlet 52 is connected to the second chamber 14, and the vacuum generator outlet 52 is used for allowing gas to flow into the second chamber 14. The gas flow adjusting member 53 is connected to the first chamber 13 and the second chamber 14, the gas flow adjusting member 53 is used for providing an active gas flow towards the vacuum generator outlet 52, the active gas flow pulls a gas flow in the vacuum generator inlet 51 towards the vacuum generator outlet 52, and pulls and extracts a gas flowing from the vacuum pump outlet 110 into the first chamber 13, so that the gas pressure in the vacuum pump 100 maintains a negative pressure. The active flow of the flow adjuster 53 pushes the gas to the vacuum generator outlet 52, and flows into the second chamber 14, through the two vents 42, and to the outside through the main body outlet 12.
In one embodiment of the present invention, the elastic member 20 is, for example, a spring, which connects the slide groove portion 41 and the valve 30. The elastic member 20 provides an elastic force to the valve 30, so that the valve 30 moves to block the communication between the first chamber 13 and the second chamber 14, so as to close the communication between the first chamber 13 and the second chamber 14.
As shown in fig. 1 and 2, in an embodiment of the present invention, when a user needs to use the energy saving device 1 on the vacuum pump 100 to save energy of the vacuum pump 100, first, the user needs to combine the vacuum pump outlet 110 of the vacuum pump 100 with the main body inlet 11, and selectively combine the exhaust pipe 200 with the main body outlet 12.
Then, when the vacuum pump 100 is in standby, an air-extracting motor (not shown) in the vacuum pump 100 still waits to rotate at a low speed to exhaust a small amount of residual gas; at this time, the elastic force provided by the elastic member 20 to the valve 30 may move the valve 30 to block the communication between the first cavity 13 and the second cavity 14, so as to close the communication between the first cavity 13 and the second cavity 14. The gas flow adjusting member 53 provides an active gas flow toward the vacuum generator outlet 52, and the active gas flow pulls a gas flow in the vacuum generator inlet 51 toward the vacuum generator outlet 52 to pull and extract a gas flowing from the vacuum generator outlet 110 into the first chamber 13; after the gas flow adjusting member 53 pulls and extracts the gas flowing from the vacuum pump outlet 110 into the first chamber 13, the active gas flow of the gas flow adjusting member 53 pushes the gas along the gas flow guiding direction B to the vacuum generator outlet 52 and flows into the second chamber 14, and then flows to the outside through the vent 42 and the main body outlet 12. Therefore, the valve 30 and the vacuum generator 50 can block the external atmospheric pressure from directly affecting the vacuum pump 100, so that the gas pressure in the vacuum pump 100 is not pulled by the external atmosphere, the gas pressure in the vacuum pump 100 can maintain a stable negative pressure, and the pumping motor in the vacuum pump 100 does not need to consume more power to maintain the negative pressure, thereby achieving the effects of energy saving and power saving.
In addition, as shown in fig. 3, when the vacuum pump 100 operates, the vacuum pump 100 may draw gas toward a specific object (not shown) and input a large amount of drawn exhaust gas into the first chamber 13, and the large amount of exhaust gas pushes the valve 30, so that the communication relationship between the first chamber 13 and the second chamber 14 is opened; thereby, the exhaust gas can directly flow from the first chamber 13 to the second chamber 14 along the outlet direction C of the vacuum pump, collide with the valve 30, turn along the exhaust direction D, pass through the two vents 42 along the exhaust direction E, and finally flow to the outside along the exhaust direction F and through the outlet end 12 of the main body. After the vacuum pump 100 stops inputting the extracted exhaust gas into the first chamber 13, the elastic member 20 provides an elastic force to the valve 30, so that the valve 30 moves to block the communication between the first chamber 13 and the second chamber 14, thereby cutting off the communication between the first chamber 13 and the second chamber 14.
Through the structural design of the vacuum pump, the gas pressure in the vacuum pump can not be pulled by the external atmosphere, the gas pressure in the vacuum pump can maintain stable negative pressure, and an air suction motor in the vacuum pump does not need to consume more electric power to maintain the negative pressure, so that the energy-saving effect can be achieved.
The present invention shows features different from the prior art in terms of the purpose, means and effect. It should be noted that the above-mentioned embodiments are merely examples for convenience of description, and the scope of the present invention is not limited to the above-mentioned embodiments, but only by the claims.

Claims (9)

1. The utility model provides an economizer, is applied to an exhaust pipe and a vacuum pump of a vacuum pump end of giving vent to anger which characterized in that, this economizer includes:
a body, comprising:
a main body air inlet end communicated with the vacuum pump air outlet end;
a main body air outlet end communicated with the exhaust pipe;
the first cavity is communicated with the air inlet end of the main body; and
the second cavity is communicated with the air outlet end of the main body and the first cavity;
a valve located in the second cavity for closing or opening the communication between the first cavity and the second cavity; and
a vacuum generator, comprising:
the air inlet end of the vacuum generator is communicated with the first cavity;
the air outlet end of the vacuum generator is communicated with the second cavity; and
and the airflow adjusting piece is communicated with the first cavity and the second cavity.
2. The energy saving device of claim 1, wherein the airflow adjusting member provides an active airflow toward the outlet of the vacuum generator when the vacuum pump is in standby state, and the active airflow pulls an airflow in the inlet of the vacuum generator to move toward the outlet of the vacuum generator so as to pull and extract a gas flowing from the outlet of the vacuum pump into the first cavity, so that a gas pressure in the vacuum pump maintains a negative pressure.
3. The energy saving device of claim 2, wherein after the gas flow adjusting member pulls and extracts the gas flowing into the first chamber from the outlet of the vacuum pump, the active gas flow of the gas flow adjusting member pushes the gas to the outlet of the vacuum generator, flows into the second chamber, and flows to the outside through the outlet of the main body.
4. The energy saving device of claim 3, further comprising a valve chute disposed in the second chamber; the valve chute includes a chute portion in which the valve moves.
5. The energy saving device of claim 4, wherein the valve chute further comprises at least one vent; the active airflow of the airflow adjusting member pushes the gas to the air outlet end of the vacuum generator, flows into the second cavity, passes through the at least one vent, and flows to the outside through the air outlet end of the main body.
6. The energy saving device of claim 5, further comprising a resilient member connecting the chute portion and the valve.
7. The energy saving device of claim 6, wherein the elastic member provides an elastic force to the valve to move the valve to close the communication between the first chamber and the second chamber.
8. The energy saving device of claim 7, wherein when the vacuum pump is operated, the vacuum pump inputs an exhaust gas into the first chamber, and the exhaust gas pushes the valve to open the communication between the first chamber and the second chamber; therefore, the exhaust gas flows into the second cavity, passes through the at least one vent and flows to the outside through the main body gas outlet end.
9. A vacuum pump comprising an exhaust pipe and a vacuum pump outlet, characterized in that the vacuum pump comprises an energy saving device as claimed in any one of claims 1 to 8.
CN202010232216.6A 2020-03-27 2020-03-27 Vacuum pump and energy saving device Pending CN113446269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010232216.6A CN113446269A (en) 2020-03-27 2020-03-27 Vacuum pump and energy saving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010232216.6A CN113446269A (en) 2020-03-27 2020-03-27 Vacuum pump and energy saving device

Publications (1)

Publication Number Publication Date
CN113446269A true CN113446269A (en) 2021-09-28

Family

ID=77808136

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010232216.6A Pending CN113446269A (en) 2020-03-27 2020-03-27 Vacuum pump and energy saving device

Country Status (1)

Country Link
CN (1) CN113446269A (en)

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