CN113418819A - Automatic temperature control system of microbalance - Google Patents
Automatic temperature control system of microbalance Download PDFInfo
- Publication number
- CN113418819A CN113418819A CN202110678273.1A CN202110678273A CN113418819A CN 113418819 A CN113418819 A CN 113418819A CN 202110678273 A CN202110678273 A CN 202110678273A CN 113418819 A CN113418819 A CN 113418819A
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- China
- Prior art keywords
- microbalance
- temperature control
- cooling jacket
- control system
- autonomous temperature
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- 238000001816 cooling Methods 0.000 claims abstract description 43
- 239000010453 quartz Substances 0.000 claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 230000000149 penetrating effect Effects 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 239000000110 cooling liquid Substances 0.000 claims description 5
- 238000005057 refrigeration Methods 0.000 abstract description 16
- 239000010410 layer Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229920002545 silicone oil Polymers 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004321 preservation Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000105 evaporative light scattering detection Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000003380 quartz crystal microbalance Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G23/00—Auxiliary devices for weighing apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G9/00—Methods of, or apparatus for, the determination of weight, not provided for in groups G01G1/00 - G01G7/00
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Control Of Temperature (AREA)
Abstract
The invention provides an autonomous temperature control system of a microbalance, which comprises: the system comprises a refrigeration and heating integrated machine, a connecting hose, a controller, a cable, a quartz antenna and a cooling jacket; the quartz balance is installed in the cooling jacket, the refrigerating and heating all-in-one machine is connected with the cooling jacket through the connecting hose, and the controller is connected with the cooling jacket through the cable; the invention adopts a cooling and heating integrated machine cooling and heating mode to realize the automatic accurate temperature control of the quartz balance.
Description
Technical Field
The invention relates to the technical field of temperature control measurement, in particular to an automatic temperature control system of a microbalance.
Background
The microbalance is a very sensitive mass detection instrument, the measurement precision of the microbalance can reach nanogram level, the microbalance is 1000 times higher than a sensitive microgram level electronic microbalance, and the mass change which can be measured theoretically is equivalent to a fraction of a monolayer or an atomic layer. The quartz crystal microbalance utilizes the piezoelectric effect of quartz crystal, converts the surface quality change of the quartz crystal electrode into the frequency change of the output electric signal of the quartz crystal oscillation circuit, and further obtains high-precision data through other auxiliary equipment such as a computer.
The commonly used quartz microbalances suffer from the following disadvantages: according to relevant standards, the temperature of a wafer measured by a quartz balance is kept at-50 ℃, and the balance measurement can meet the requirements of test measurement standards only at the temperature, so that the conventional quartz microbalances are all carried out in the environment that the space of a ring mould device is kept at low temperature;
however, in practical tests, the temperature of the working environment is generally controlled by the ring mold space or the infrared heating cage, and the quartz balance probe is placed near the test product. During the test, the temperature of the test product is also heated to a maximum of +100 ℃ and the quartz balance, if placed in the vicinity of the product, will reach a temperature of 100 ℃ without cooling measures. At 100 ℃, the electronic devices inside the probe of the quartz balance can hardly work normally. Moreover, at +100 ℃, the deposition of contaminants on quartz wafers will not meet the standard requirements and it will be difficult to effectively capture the contaminants.
In recent years, an autonomous cooling microbalance is successfully developed in China, but the microbalance is only limited to work in a low-temperature circular mold space and cannot work in a high-temperature circular mold space, and the application range is limited. In addition, the conventional microbalance with the temperature control function cannot realize continuous temperature control in a wide temperature range of-173 ℃ to +100 ℃, has poor temperature control precision, generally has the temperature control precision of more than or equal to +/-2 ℃, and cannot meet the requirements of high precision and high stability of the conventional test detection.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an automatic temperature control system of a microbalance.
The invention provides an autonomous temperature control system of a microbalance, which comprises: the system comprises a refrigeration and heating integrated machine, a connecting hose, a controller, a cable, a quartz antenna and a cooling jacket;
the quartz balance is installed in the cooling jacket, the refrigeration and heating all-in-one machine is connected with the cooling jacket through the connecting hose, and the controller is connected with the cooling jacket through the cable.
Preferably, the quartz balance and the cooling jacket are installed inside the circular mold equipment, and the refrigerating and heating all-in-one machine and the controller are installed outside the circular mold equipment.
Preferably, the cooling jacket is suspended inside the ring mould apparatus by a lifting rope.
Preferably, the interior of the ring die apparatus is set in a vacuum state.
Preferably, a cabin penetrating flange is fixedly installed on one side of the ring die equipment, a through hole is formed in the cabin penetrating flange and is communicated with the inside and the outside of the ring die equipment, and the cabin penetrating flange is detachable relative to the ring die equipment.
Preferably, the connection hose and the cable pass through the through hole.
Preferably, the refrigeration and heating integrated machine refrigerates cooling liquid, and the cooling liquid is conveyed to the cooling jacket through the connecting hose.
Preferably, a red copper net is wound at one end of the connecting hose close to the cooling jacket, and the red copper net covers the cable at the same time.
Preferably, the outer side of the red copper net is coated with a plurality of layers of heat preservation layers.
Preferably, the cooling jacket is coated with a plurality of insulating layers.
Preferably, the connection hose comprises a stainless steel material.
Preferably, the vacuum state is a low vacuum state, and the vacuum degree of the low vacuum state is less than or equal to 10-1Pa。
Preferably, the cooling liquid comprises refrigeration silicone oil.
Preferably, the refrigeration and heating integrated machine is matched with the controller to realize the precision control of more than or equal to 0.5 ℃.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts a cooling and heating integrated machine cooling and heating mode to realize the autonomous accurate temperature control of the quartz balance;
2. the temperature-controlled quartz balance is installed by adopting a detachable cabin-penetrating flange and a lifting rope, and can be quickly taken out and installed;
3. the invention can be suitable for the high-temperature working condition of the ring die space, the maximum temperature can reach 100 ℃, the working at the temperature of-173 to +100 ℃ in the ring die space can be realized, the temperature can be continuously controlled, and the adaptability of the measuring system is improved.
4. The invention can realize that the temperature control precision of the system is more than or equal to +/-0.5 ℃, and meet the requirements of customers on high precision and high stability of test detection.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of an autonomous temperature control system of a microbalance;
shown in the figure:
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1
As shown in fig. 1, an autonomous temperature control system for a microbalance includes: the system comprises a refrigeration and heating integrated machine 1, a connecting hose 2, a controller 4, a cable 5, a quartz balance 7 and a cooling jacket 8; the quartz balance 7 is arranged in a cooling jacket 8, the refrigerating and heating integrated machine 1 is connected with the cooling jacket 8 through a connecting hose 2, and the controller 4 is connected with the cooling jacket 8 through a cable 5. The quartz balance 7 and the cooling jacket 8 are arranged inside the ring die equipment 9, the refrigerating and heating integrated machine 1 and the controller 4 are arranged outside the ring die equipment 9, and the cooling jacket 8 is hung inside the ring die equipment 9 through the lifting rope 6; and a cabin penetrating flange 3 is fixedly arranged on one side of the ring die equipment 9, the cabin penetrating flange 3 is provided with a through hole and is communicated with the inside and the outside of the ring die equipment 9, the connecting hose 2 and the cable 5 penetrate through the through hole, and the refrigeration and heating integrated machine 1 is matched with the controller 4 to realize the precision control of more than or equal to 0.5 ℃.
The inside vacuum state that sets up of ring die equipment 9, 1 refrigeration heating all-in-one is to the coolant liquid refrigeration, the coolant liquid passes through coupling hose 2 and carries to cooling jacket 8, coupling hose 2 is close to the winding red copper net of 8 one ends of cooling jacket, red copper net cladding cable 5 simultaneously, red copper net outside cladding multilayer heat preservation, 8 outside cladding multilayer heat preservation of cooling jacket, coupling hose 2 adopts stainless steel, the vacuum state is the low vacuum state, wear 3 relative ring die equipment 9 of cabin flange and can dismantle, the coolant liquid includes refrigeration silicone oil.
Example 2
Example 2 is a preferred example of example 1.
As shown in fig. 1, an autonomous temperature control system of a microbalance mainly comprises a refrigeration and heating all-in-one machine 1, a connecting hose 2, a cabin penetrating flange 3, a controller 4, a cable 5, a lifting rope 6, a quartz balance 7 and a cooling jacket 8; the refrigeration and heating integrated machine 1 is connected through an internal and external stainless steel connecting hose 2 of a ring die device 9, the internal and external stainless steel connecting hose 2 of the ring die device 9 penetrates through a cabin penetrating flange 3, and the cabin penetrating flange 3 is fixed on the ring die device 9; after the refrigeration and heating integrated machine 1 cools the refrigeration silicone oil, the refrigeration silicone oil is conveyed into a cooling jacket 8, and the quartz balance 7 is cooled through the cooling jacket 8.
The refrigerating and heating integrated machine 1 has the characteristics of controllable temperature, self-adaptive adjustment, high temperature control precision and the like, and is stable and reliable in long-term operation; the quartz balance 7 is arranged in the cooling jacket 8, is tightly connected and has good heat conductivity, and is hoisted by the hoisting rope 6, so that the measurement is convenient; the whole automatic temperature control system of the microbalance is connected by a detachable cabin-penetrating flange 3, so that the whole system can be conveniently and rapidly detached and moved; the quartz balance 7 adopts the highly intelligent PLC 4 to realize the accurate control of the temperature of the quartz balance 7; the quartz balance 7 and the cooling jacket 8 can reach the normal testing temperature in a short time, and the precision deviation is very small; a red copper mesh (100 meshes) with the length of about 1/3 of the stainless steel connecting hose 2 is wound at one end (close to a quartz balance 7) of the stainless steel connecting hose 2 in the ring die equipment 9, the cable 5 and the temperature measuring cable are wrapped, the heat dissipation of the lead is increased, and then a multilayer heat-insulating layer with the thickness of 15 layers is wrapped on the outer surface; in addition, the surface of the cooling jacket 8 is also covered with two layers of 15 layers of insulating layers.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. An autonomous temperature control system for a microbalance, comprising: the device comprises a refrigerating and heating integrated machine (1), a connecting hose (2), a controller (4), a cable (5), a quartz balance (7) and a cooling jacket (8);
the quartz balance (7) is installed in the cooling jacket (8), the refrigerating and heating all-in-one machine (1) is connected with the cooling jacket (8) through the connecting hose (2), and the controller (4) is connected with the cooling jacket (8) through the cable (5).
2. The microbalance autonomous temperature control system of claim 1, wherein: the quartz balance (7) and the cooling jacket (8) are installed inside the circular mold device (9), and the refrigerating and heating integrated machine (1) and the controller (4) are installed on the outer side of the circular mold device (9).
3. The microbalance autonomous temperature control system of claim 2, wherein: the cooling jacket (8) is suspended inside the ring die equipment (9) through a lifting rope (6).
4. The microbalance autonomous temperature control system of claim 2, wherein: the interior of the circular mould equipment (9) is set to be in a vacuum state.
5. The microbalance autonomous temperature control system of claim 2, wherein: the cabin penetrating flange (3) is fixedly installed on one side of the ring die equipment (9), the cabin penetrating flange (3) is provided with a through hole and is communicated with the inside and the outside of the ring die equipment (9), and the cabin penetrating flange (3) is detachable relative to the ring die equipment (9).
6. The microbalance autonomous temperature control system of claim 5, wherein: the connecting hose (2) and the cable (5) pass through the through hole.
7. The microbalance autonomous temperature control system of claim 6, wherein: the refrigerating and heating integrated machine (1) refrigerates cooling liquid, and the cooling liquid is conveyed to the cooling jacket (8) through the connecting hose (2).
8. The microbalance autonomous temperature control system of claim 1, wherein: and a red copper net is wound at one end of the connecting hose (2) close to the cooling jacket (8), and the red copper net covers the cable (5) at the same time.
9. The microbalance autonomous temperature control system of claim 8, wherein: and the outer side of the red copper net is coated with a plurality of layers of heat-insulating layers.
10. The microbalance autonomous temperature control system of claim 9, wherein: and a plurality of layers of heat-insulating layers are coated on the outer side of the cooling jacket (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110678273.1A CN113418819A (en) | 2021-06-18 | 2021-06-18 | Automatic temperature control system of microbalance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110678273.1A CN113418819A (en) | 2021-06-18 | 2021-06-18 | Automatic temperature control system of microbalance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113418819A true CN113418819A (en) | 2021-09-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110678273.1A Pending CN113418819A (en) | 2021-06-18 | 2021-06-18 | Automatic temperature control system of microbalance |
Country Status (1)
| Country | Link |
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| CN (1) | CN113418819A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101885848A (en) * | 2010-07-09 | 2010-11-17 | 电子科技大学 | Trifluoroisoproanol substituted phenol functional group-containing organophosphorus sensitive siloxane polymer material and preparation method thereof |
| JP2011215024A (en) * | 2010-03-31 | 2011-10-27 | Fujitsu Ltd | Quartz crystal microbalance gas sensor and gas measuring method |
| CN107677563A (en) * | 2017-10-11 | 2018-02-09 | 北京航空航天大学 | Quartz crystal temperature probe, quartz crystal microbalance and its application method |
| CN108717029A (en) * | 2018-05-31 | 2018-10-30 | 北京航空航天大学 | Low-temperature control system and control method for vacuum QCM |
-
2021
- 2021-06-18 CN CN202110678273.1A patent/CN113418819A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011215024A (en) * | 2010-03-31 | 2011-10-27 | Fujitsu Ltd | Quartz crystal microbalance gas sensor and gas measuring method |
| CN101885848A (en) * | 2010-07-09 | 2010-11-17 | 电子科技大学 | Trifluoroisoproanol substituted phenol functional group-containing organophosphorus sensitive siloxane polymer material and preparation method thereof |
| CN107677563A (en) * | 2017-10-11 | 2018-02-09 | 北京航空航天大学 | Quartz crystal temperature probe, quartz crystal microbalance and its application method |
| CN108717029A (en) * | 2018-05-31 | 2018-10-30 | 北京航空航天大学 | Low-temperature control system and control method for vacuum QCM |
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Application publication date: 20210921 |