CN113413629B - Organic solvent separation device and system method for flat panel display based on condensation method - Google Patents
Organic solvent separation device and system method for flat panel display based on condensation method Download PDFInfo
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- 238000009833 condensation Methods 0.000 title claims abstract description 110
- 230000005494 condensation Effects 0.000 title claims abstract description 110
- 238000000926 separation method Methods 0.000 title claims abstract description 71
- 239000003960 organic solvent Substances 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000010438 heat treatment Methods 0.000 claims abstract description 79
- 238000001514 detection method Methods 0.000 claims abstract description 67
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims description 31
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 26
- 238000011144 upstream manufacturing Methods 0.000 claims description 23
- 238000009835 boiling Methods 0.000 claims description 20
- 239000000110 cooling liquid Substances 0.000 claims description 16
- 238000005192 partition Methods 0.000 claims description 9
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 239000002351 wastewater Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
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- 238000011084 recovery Methods 0.000 abstract description 3
- 238000005253 cladding Methods 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 10
- 239000002699 waste material Substances 0.000 description 8
- YKUCHDXIBAQWSF-UHFFFAOYSA-N methyl 3-hydroxybenzoate Chemical compound COC(=O)C1=CC=CC(O)=C1 YKUCHDXIBAQWSF-UHFFFAOYSA-N 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 239000003085 diluting agent Substances 0.000 description 2
- 238000005194 fractionation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229940120152 methyl 3-hydroxybenzoate Drugs 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 210000003019 respiratory muscle Anatomy 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000729 antidote Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000001146 hypoxic effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010815 organic waste Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0033—Other features
- B01D5/0051—Regulation processes; Control systems, e.g. valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0078—Condensation of vapours; Recovering volatile solvents by condensation characterised by auxiliary systems or arrangements
- B01D5/009—Collecting, removing and/or treatment of the condensate
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The invention discloses a device and a system method for separating an organic solvent for flat panel display based on a condensation method, and relates to the technical field of TFT-LCD organic solvent recovery. In the present invention: a separation cavity is arranged in the separation device, and a gas heat return pipe is connected between the separation device and the main heating device; the separation intracavity is equipped with a plurality of condensation boxes, and the ring side of condensation box and the chamber wall face sealing connection of separation chamber are including being in the auxiliary heat chamber between the adjacent condensation box in the separator, and the ring side of the non-downside terminal surface of last baffle and auxiliary heat chamber inner wall face sealing connection, the lower part surface embedding cladding of last baffle dispose the heating plate, and the periphery of heating plate is connected with the heating rod of a plurality of crisscross distributions. The condensation box is internally provided with a low-temperature inner box. The invention greatly improves the condensation separation efficiency of the organic solvent in the condensation box, and meanwhile, the temperature control detection is arranged at the continuous key position, so that the air flow continuously keeps higher liquefaction efficiency and liquefaction purity of the organic solvent in the separation process.
Description
Technical Field
The invention belongs to the technical field of TFT-LCD organic solvent recovery, and particularly relates to a condensation method-based organic solvent separation device and system method for flat panel display.
Background
In the manufacturing process of the TFT-LCD, various organic solvents are used to perform auxiliary operations, such as a stripping solution (methyl 3-hydroxybenzoate), a diluent (PGMEA), a developing solution (tetramethylammonium hydroxide), and the like. After various organic solvents are used, organic solvent waste liquid needs to be treated. Many of the organic solvents have high price and great pollution discharge hazard, and are very necessary to be recycled. For example, TMAH is an important component of a developer used in photolithography (a soluble region that dissolves a photoresist by exposure), and the aqueous TMAH solution contains water as a main component and accounts for 99% or more. It is widely used for development in lithography processes, whether I-line, 248nm, 193nm immersion or EUV, using TMAH aqueous solution as the developer. TMAH (tetramethylammonium hydroxide), however, is toxic and can inhibit respiratory muscle groups through skin contact or inhalation, causing respiratory muscle cessation, leading to hypoxic death in the brain of the inhalant. No antidote is available at present. It is necessary to purify and recover the waste liquid of the organic solvent which is high in cost and easy to recover.
As a method for recovering an organic solvent from an organic waste liquid generated in a conventional TFT-LCD manufacturing process, a fractionation method, a condensation method, an absorption method, a biofilm method, and the like are commonly used. For example, in the fractionation or condensation process, the heating temperature of the original waste liquid is controlled to be high, and during actual gas-liquid separation, the temperature control is poor due to the influence of the structural design of an actual separation device and a separation channel, so that the liquefaction efficiency of the organic solvent is reduced, and the liquefaction purity is low.
Disclosure of Invention
The invention aims to provide an organic solvent separation device and a system method for flat panel display based on a condensation method, which greatly improve the condensation separation efficiency of an organic solvent in a condensation box, and simultaneously configure temperature control detection at a continuous key position, so that the gas flow continuously keeps higher liquefaction efficiency and liquefaction purity of the organic solvent in the separation process.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to an organic solvent separation device for flat panel display based on a condensation method, wherein a main heating device is connected with a gas pipe for leading out heated gas, the downstream end of the gas pipe is connected with a separation device, a separation cavity is arranged in the separation device, and a gas heat return pipe is connected between the separation device and the main heating device; the separation intracavity is equipped with a plurality of condensation boxes, and the ring side of condensation box and the chamber wall face sealing connection of separation chamber are including being in the auxiliary heating chamber between the adjacent condensation box in the separator, and auxiliary heating intracavity is provided with upper baffle, and the ring side face of the non-downside terminal surface of upper baffle and auxiliary heating intracavity wall face sealing connection, and the lower part surface embedding cladding of upper baffle disposes the heating plate, and the periphery of heating plate is connected with the heating rod of a plurality of crisscross distributions.
A low-temperature inner box is arranged in the condensation box, the annular side surface of the non-lower side end surface of the low-temperature inner box is hermetically connected with the wall surface of an inner cavity of the condensation box, a circuitous condensation channel surrounding the low-temperature inner box is arranged in the condensation box, a reflux inner cavity is arranged in the low-temperature inner box, and an upstream temperature detection module and a downstream temperature detection module are arranged on the outer surface of the low-temperature inner box in a fitting manner; the condensation box is provided with an inlet pipe positioned at the upstream of the circuitous condensation duct and an outlet pipe positioned at the downstream of the circuitous condensation duct; the inlet pipe position of the first condensation box is provided with a first inflow temperature detection module for detecting the initial inlet airflow temperature, the outlet pipe position of the non-tail condensation box is provided with an outflow temperature detection module for detecting the outlet condensation box airflow temperature, the inlet pipe position of the non-first condensation box is provided with a second inflow temperature detection module for detecting the auxiliary heat cavity inflow temperature, and the outlet pipe of the tail condensation box is provided with a tail inflow temperature detection module for detecting the outlet tail condensation box airflow temperature.
The preferable technical scheme of the separation device comprises the following contents: the upstream end of the gas heat return pipe is connected to the bottom of the separation cavity of the separation device, the downstream end of the gas heat return pipe is connected to a position above the liquid level of the main heating device, and the gas heat return pipe is provided with an electromagnetic valve and a circulating power device.
The preferable technical scheme of the separation device comprises the following contents: the low-temperature inner box is connected with a flow inlet pipe connected with an upstream port of the backflow inner cavity, the low-temperature inner box is connected with a flow outlet pipe connected with a downstream port of the backflow inner cavity, and the flow inlet pipe and the flow outlet pipe are connected with an external cooling circulation device.
The preferable technical scheme of the separation device comprises the following contents: the upstream temperature detection module is positioned at the upstream part of the backflow inner cavity of the low-temperature inner box, and the downstream temperature detection module is positioned at the downstream part of the backflow inner cavity of the low-temperature inner box; the low-temperature inner box is a copper material box body or a heat conduction material box body with a silver-plated layer on the surface.
The preferable technical scheme of the separation device comprises the following contents: the discharge pipe and the introduction pipe in the auxiliary heat cavity are positioned on the opposite sides of the upper partition plate, and the discharge pipe and the introduction pipe are positioned in the upper area of the heating rod.
The preferable technical scheme of the separation device comprises the following contents: the bottom of the condensing box is provided with a liquid collecting part, the bottom of the separating device is provided with a heat insulation collecting tank communicated with the liquid collecting part, and the bottom of the separating device is provided with a liquid guide pipe communicated with the heat insulation collecting tank.
The preferable technical scheme of the separation device comprises the following contents: temperature sensing probes facing the opposite direction of the airflow flow are arranged on the primary inflow temperature detection module, the outflow temperature detection module, the secondary inflow temperature detection module and the wake flow temperature detection module.
The invention relates to a condensation method-based organic solvent separation system for flat panel display, which comprises the following contents:
s1, filtering the waste water solution containing TMAH or PMA, injecting the filtered waste water solution into a main heating device, and continuously heating by the main heating device, wherein the heating temperature is kept at the boiling point T of the organic solventYThe above.
S2, introducing the water vapor and the organic solvent gas in the main heating device into the separating device, entering a separating cavity of the separating device, and entering the condensation box from the inlet pipe of the first condensation box.
S3, injecting cooling liquid into the backflow inner cavity of the low-temperature inner box through the inflow pipe, and discharging the cooling liquid through the outflow pipe; the surface temperature of the low-temperature inner box is detected by the upstream temperature detection module and the downstream temperature detection module, and the surface temperature of the low-temperature inner box detected by the upstream temperature detection module is set as TSThe surface temperature of the low-temperature inner box sensed by the downstream temperature detection module is TX(ii) a When TX≤TY-ΔT1The liquid flow is not carried out on the inlet pipe and the outlet pipe, wherein the pressure is 0.05TY≤ΔT1≤0.1TY(ii) a When TY-ΔT1＜TX＜TYAnd TS≤TY-ΔT1The flow rate of the coolant in the inlet pipe and the outlet pipe is V, and F (V). varies.F (T)a) Wherein, F (T)a)＝TX-TY+ΔT1(ii) a (III) when TY-ΔT1＜TX＜TYAnd TY-ΔT1＜TS＜TYThe cooling liquid flows through the inlet pipe and the outlet pipe according to the method in the second step, the electromagnetic valve on the gas heat return pipe is opened, and the circulating power of the circulating power device is set to be P1Then F (P) is present1)∝F(Tb) Wherein, F (T)b)＝TS-TY+ΔT1。
S4, leading the organic solvent gas into the hot air flow of the condensing box when the organic solvent gas meets the condition that the temperature is lower than TYThe organic solvent liquefied in the moving path of the hot gas around the circuitous condensation channel flows into the liquid collecting part and the heat insulation collecting tank.
S5, detecting the temperature of the air flow discharged from the discharge pipe of any one non-tail-end condensation box by the outflow temperature detection module, and setting the detected temperature as TO(ii) a When TO≥TY+ΔT2The heating plate does not need to heat the air flow passing through, wherein the temperature is 0.05TY≤ΔT2≤0.1TY(ii) a When TO＜TY+ΔT2The heating plate needs to heat the air flow passing through it, and the heating power of the heating plate is set as P2Then F (P) is present2)∝F(Tc) Wherein, F (T)c)＝TY+ΔT2-TO。
S6, detecting the temperature of the air flow entering the guide inlet pipe of the non-head end condensation box by the secondary inflow temperature detection module, and setting the detected temperature as TI(ii) a When TI≥TY+ΔT2The heating rod does not need to heat the air flow flowing through; when TI＜TY+ΔT2The heating rod is required to heat the air flow flowing through, and the heating power of the heating rod is set as P3Then F (P) is present3)∝F(Td) Wherein, F (T)d)＝TY+ΔT2-TI。
S7, detecting the temperature of the airflow discharged from the outlet pipe of the tail end condensation box by the wake flow temperature detection module, and setting the detected temperature as TW(ii) a When TW＜TYThe low-temperature inner box in the tail end condensation box is connectedThe flow velocity of the inflow pipe and the outflow pipe maintains the current state; when TW≥TYThe flow inlet pipe and the flow outlet pipe connected with the low-temperature inner box in the tail end condensation box continue to increase the flow rate of the cooling liquid until T is metW＜TY。
As a preferred technical scheme of the separation system, the separation system comprises the following contents: the flowing direction of cooling liquid fluid formed in the flow inlet pipe, the backflow inner cavity of the low-temperature inner box and the flow outlet pipe is opposite to the flowing direction of air flow fluid formed in the circuitous condensation channel of the condensation box.
As a preferred technical scheme of the separation system, the separation system comprises the following contents: a first inflow temperature detection module at the position of the inlet pipe of the first condensation box detects the temperature of the current mixed gas flow, and when the temperature is lower than the boiling point T of the organic solventYThe system drives and controls the main heating device to improve the heating power, simultaneously opens the electromagnetic valve of the gas regenerative tube and the circulating power device to start the gas flow circulation, and ensures that the temperature of the gas flow entering the first condensing box is higher than the boiling point T of the organic solventY。
The invention has the following beneficial effects:
1. according to the invention, the TFT-LCD organic solvent waste liquid is heated, and the airflow environment temperature of the organic solvent to be condensed is accurately controlled in the separation device, so that the condensation separation efficiency of the organic solvent in the condensation box is greatly improved, and meanwhile, the temperature control detection is configured at the continuous key position, so that the airflow continuously keeps higher liquefaction efficiency and liquefaction purity of the organic solvent in the separation process, and the efficient continuous condensation separation and recovery of the organic solvent are realized;
2. the invention can continuously purify and separate high-purity original solvent in waste liquid in various processing procedures of TFT-LCD, for example, methyl 3-hydroxybenzoate is separated and purified in stripping waste liquid, PGMEA (propylene glycol monomethyl ether acetate) is separated and purified in diluent waste liquid, TMAH (tetramethylammonium hydroxide) is separated and purified in developing solution waste liquid, and the invention can also be widely used in separation scenes with continuous and high-purity requirements.
Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view showing the overall structure of an organic solvent separation apparatus for flat panel display according to the present invention;
FIG. 2 is a schematic view of the structure of the separation apparatus of the present invention;
FIG. 3 is an enlarged view of a portion A of FIG. 2;
FIG. 4 is a schematic view of a partial flow chart of the process of the organic solvent separation system for flat panel display according to the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1-a main heating device; 2-gas transmission pipe; 3-a separation device; 4-an injection pipe; 5-a separation chamber; 6-a condensation box; 7-auxiliary heat cavity; 8-an outlet pipe; 9-a lead-in tube; 10-circuitous condensation duct; 11-a low temperature inner box; 12-reflux lumen; 13-an inflow pipe; 14-a flow outlet pipe; 15-an outlet drain pipe; 16-an upper partition plate; 17-a heating plate; 18-a heating rod; 19-first inflow temperature detection module; 20-an upstream temperature detection module; 21-a downstream temperature detection module; 22-first outflow temperature detection module; 23-a secondary inflow temperature detection module; 24-a secondary outflow temperature detection module; 25-a liquid collection portion; 26-a thermally insulated collection tank; 27-liquid draft tube; 28-gas regenerative tube; 29-an electromagnetic valve; 30-circulation power device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
The main heating device 1 is connected with a gas pipe 2 used for leading out heating gas, the downstream end of the gas pipe 2 is connected with a separating device 3, a separating cavity 5 is arranged in the separating device 3, a plurality of condensing boxes 6 are arranged in the separating cavity 5, and the annular side of each condensing box 6 is in sealing connection with the wall surface of the separating cavity 5. Box 11 in the low temperature is equipped with in the condensation box 6, and in the ring side of box 11 in the low temperature, go up, left and right lateral surface and the inner chamber wall sealing connection of condensation box 6, be equipped with circuitous condensation duct 10 in the condensation box 6, box 11 in circuitous condensation duct 10 centers on the low temperature, and box 11 includes backward flow inner chamber 12 in the low temperature. And the inflow pipe 13 is connected with an upstream port of the backflow inner cavity 12. And the outlet pipe 14 is connected with a downstream port of the backflow inner cavity 12. The exterior of the inlet pipe 13 and the outlet pipe 14 is connected with a cooling circulation device. The outer surface of the low-temperature inner box 11 is attached with an upstream temperature detection module 20 and a downstream temperature detection module 21, which are used for detecting the box body surface temperature of the upstream and downstream areas of the low-temperature inner box 11. Meanwhile, in order to improve the heat conduction efficiency of the low-temperature inner box 11, the low-temperature inner box 11 may be a copper material box or a heat conduction material box with a silver-plated surface.
The flowing direction of the cooling liquid fluid formed in the inlet pipe 13, the return inner cavity 12 of the low-temperature inner box 11 and the outlet pipe 14 is opposite to the flowing direction of the airflow fluid formed in the circuitous condensation channel 10 of the condensation box 6, so that the reverse hot airflow in the circuitous condensation channel 10 can be fully cooled.
The bottom of the condensation box 6 is provided with a liquid collecting part 25, the bottom of the separation device 3 is provided with a heat insulation collecting tank 26, the heat insulation collecting tank 26 is communicated with the liquid collecting part 25, the bottom of the separation device 3 is provided with a liquid guide pipe 27, and the liquid guide pipe 27 is communicated with the heat insulation collecting tank 26.
The condensation box 6 is provided with an inlet pipe 9 and an outlet pipe 15, wherein the inlet pipe 9 is positioned at the upstream of the circuitous condensation duct 10, and the outlet pipe 15 is positioned at the downstream of the circuitous condensation duct 10. In the same auxiliary heat cavity 7, the outlet pipe 15 and the inlet pipe 9 are positioned at two sides of the upper clapboard 16.
The separating device 3 comprises an auxiliary heat cavity 7, the auxiliary heat cavity 7 is located between the adjacent condensation boxes 6, the upper partition plate 16 is installed in the auxiliary heat cavity 7, and the upper side surface, the left side surface and the right side surface of the upper partition plate 16 are hermetically connected with the inner wall surface of the auxiliary heat cavity 7. The heater chip 17 is embedded in the lower surface of the upper partition 16. A plurality of heater rods 18 are installed perpendicularly to the outside of the heater chip 17, and the heater rods 18 are positioned below the outlet pipe 15 and the inlet pipe 9.
Example two
Based on the first embodiment, a gas heat return pipe 28 is connected between the separation device 3 and the main heating device 1, one end of the gas heat return pipe 28 is communicated with the bottom layer area of the separation chamber 5 of the separation device 3, and the other end of the gas heat return pipe 28 is communicated with the area above the liquid level of the main heating device 1. The gas return pipe 28 is also provided with a solenoid valve 29 and a circulation power device 30 for circulating the gas flow which does not meet the temperature condition and assisting in reducing the heat load of the condensation box 6.
EXAMPLE III
Based on the first and second embodiments, the first inflow temperature detection module 19 is disposed at the position of the inlet pipe 9 of the first condensation box 6, and is used for detecting the initial inlet airflow temperature. And an outlet temperature detection module 22, which is configured at the position of the outlet pipe 15 of the non-tail condensation box 6 and is used for detecting the temperature of the airflow of the discharged condensation box 6. And the secondary inflow temperature detection module 23 is configured at the position of the inlet pipe 9 of the non-first condensation box 6 and used for detecting the inflow temperature of the auxiliary heat cavity 7. And the wake temperature detection module 24 is configured at the position of the exhaust port pipe 15 of the tail condensation box 6 and is used for detecting the temperature of the airflow exhausted from the tail condensation box 6.
Temperature sensing probes are arranged on the first inflow temperature detection module 19, the outflow temperature detection module 22, the second inflow temperature detection module 23 and the wake flow temperature detection module 24, and the direction of the temperature sensing probes is opposite to the flow direction of the air flow.
Example four
Based on the first embodiment, the second embodiment and the third embodiment, the invention relates to a method for separating an organic solvent for flat panel display based on a condensation method, which specifically comprises the following steps:
in the first step, a phase containing TMAH or PMAFiltering the waste water solution, injecting the filtered waste water solution into the main heating device 1, continuously heating the main heating device 1, and keeping the heating temperature at the boiling point T of the organic solventYThe above. [ in the separation of the organic solvent according to the present invention, provided that the boiling point of the organic solvent is higher than the boiling point of water, for example, TMAH has a boiling point of 120 ℃ and PMA has a boiling point of 154.8 ℃ and is higher than the boiling point of water]。
In the second step, the water vapor and the organic solvent gas in the main heating device 1 are introduced into the separation device 3, enter the separation chamber of the separation device 3, and enter the condensation box 6 from the inlet pipe 9 of the first condensation box 6.
A first inflow temperature detection module 19 at the position of the inlet pipe 9 of the first condensation box 6 detects the temperature of the current mixed gas flow, and when the temperature is lower than the boiling point T of the organic solventYThen the system drives and controls the main heating device 1 to increase the heating power, and simultaneously opens the electromagnetic valve 29 of the gas heat return pipe 28 and the circulating power device 30 to start the gas flow circulation, so as to ensure that the temperature of the gas flow entering the first condensation box 6 is higher than the boiling point T of the organic solventY。
Thirdly, the flow inlet pipe 13 injects cooling liquid into the backflow inner cavity of the low-temperature inner box 11 and discharges the cooling liquid through the flow outlet pipe 14; the upstream temperature detection module 20 and the downstream temperature detection module 21 detect the surface temperature of the low-temperature inner box 11, and the surface temperature of the low-temperature inner box 11 sensed by the upstream temperature detection module 20 is set as TSThe surface temperature of the low-temperature inner box 11 sensed by the downstream temperature detection module 21 is TX。
When TX≤TY-ΔT1The liquid flow is not performed in the inlet pipe 13 and the outlet pipe 14, wherein delta T1The value of (A) and the boiling point T of the organic solventYPositive correlation; when TY-ΔT1＜TX＜TYAnd TS≤TY-ΔT1The flow rate V of the cooling liquid in the inlet pipe 13 and the outlet pipe 14 and the specific temperature difference F (T) are seta) In a positive correlation, wherein F (T)a)＝TX-TY+ΔT1(ii) a (III) when TY-ΔT1＜TX＜TYAnd TY-ΔT1＜TS＜TYThe flow of the cooling liquid is continued through the inlet pipe 13 and the outlet pipe 14 according to the method of the second two, and simultaneously the electromagnetic valve 29 on the gas backheating pipe 28 is opened, and the circulating power of the circulating power device 30 is set to be P1To a specific temperature difference F (T)b) In a positive correlation, wherein F (T)b)＝TS-TY+ΔT1。
The fourth step, the organic solvent gas meets the condition that the temperature is lower than T in the hot air flow which is introduced into the condensing box 6YIs liquefied, the organic solvent liquefied in the moving path of the hot gas around the circuitous condensation duct 10 flows into the liquid collection part 25 and the insulated collection tank 26.
Fifthly, the outflow temperature detection module 22 detects the temperature of the airflow discharged from the discharge port pipe 15 of any one of the non-tail-end condensation boxes 6, and the detected temperature is set to be TO(ii) a When TO≥TY+ΔT2The heating plate 17 does not need to heat the air flow flowing through, where Δ T2The value of (A) and the boiling point T of the organic solventYPositive correlation; when TO＜TY+ΔT2The heating plate 17 needs to heat the air flow passing through it, and the heating power of the heating plate is set as P2Then F (P) is present2)∝F(Tc) Wherein, F (T)c)＝TY+ΔT2-TO。
Sixthly, the secondary inflow temperature detection module 23 detects the temperature of the air flow entering the inlet pipe 9 of the non-head end condensation box 6, and the detected temperature is set as TI(ii) a When TI≥TY+ΔT2The heating rod 18 does not need to heat the air flow passing through it; when TI＜TY+ΔT2The heating rod 18 needs to heat the air flow passing through it, and the heating power of the heating rod 18 is set as P3Then heating power P3And specific temperature difference TdIn a positive correlation, wherein F (T)d)＝TY+ΔT2-TI。
Seventhly, the wake temperature detection module 24 detects the temperature of the air flow discharged from the discharge port pipe 15 of the tail end condensation box 6Detecting the temperature, and setting the detected temperature as TW(ii) a When TW＜TYIf so, the flow rates of the inlet pipe 13 and the outlet pipe 14 connected with the low-temperature inner box 11 in the tail end condensation box 6 are maintained in the current state; when TW≥TYThe flow rate of the cooling liquid is continuously increased by the inlet pipe 13 and the outlet pipe 14 connected with the low-temperature inner box 11 in the tail end condensation box 6 until T is metW＜TY。
In the description herein, references to the terms "embodiment" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (4)
1. A flat panel display-use organic solvent separation system based on a condensation method is characterized in that:
the device comprises a main heating device (1), wherein the main heating device (1) is connected with a gas pipe (2) for leading out heated gas, and the downstream end of the gas pipe (2) is connected with a separating device (3); a separation cavity (5) is arranged in the separation device (3), and a gas heat return pipe (28) is connected between the separation device (3) and the main heating device (1); a plurality of condensation boxes (6) are arranged in the separation cavity (5), the annular sides of the condensation boxes (6) are in sealing connection with the cavity wall surface of the separation cavity (5), an auxiliary heating cavity (7) between adjacent condensation boxes (6) is arranged in the separation device (3), an upper partition plate (16) is arranged in the auxiliary heating cavity (7), the annular side surface of the non-lower side end surface of the upper partition plate (16) is in sealing connection with the inner wall surface of the auxiliary heating cavity (7), a heating sheet (17) is embedded, coated and configured on the lower surface of the upper partition plate (16), and a plurality of heating rods (18) distributed in a staggered mode are connected to the periphery of the heating sheet (17);
a low-temperature inner box (11) is arranged in the condensation box (6), the side surface of a ring of the non-lower side end surface of the low-temperature inner box (11) is connected with the wall surface of an inner cavity of the condensation box (6) in a sealing manner, a circuitous condensation channel (10) surrounding the low-temperature inner box (11) is arranged in the condensation box (6), a backflow inner cavity (12) is arranged in the low-temperature inner box (11), and an upstream temperature detection module (20) and a downstream temperature detection module (21) are attached to the outer surface of the low-temperature inner box (11); the condensation box (6) is provided with a guide inlet pipe (9) positioned at the upstream of the circuitous condensation channel (10), and the condensation box (6) is provided with a discharge outlet pipe (15) positioned at the downstream of the circuitous condensation channel (10); a first inflow temperature detection module (19) for detecting the temperature of an initial inlet airflow is arranged at the position of an inlet pipe (9) of a first condensation box (6), an outflow temperature detection module (22) for detecting the temperature of the airflow discharged from the condensation box (6) is arranged at the position of an outlet pipe (15) of a non-tail condensation box (6), a second inflow temperature detection module (23) for detecting the inflow temperature of an auxiliary heat cavity (7) is arranged at the position of the inlet pipe (9) of the non-first condensation box (6), and a tail inflow temperature detection module (24) for detecting the temperature of the airflow discharged from the tail condensation box (6) is arranged on the outlet pipe (15) of the tail condensation box (6);
the upstream end of the gas heat return pipe (28) is connected to the bottom position of a separation cavity (5) of the separation device (3), the downstream end of the gas heat return pipe (28) is connected to a position above the liquid level of the main heating device (1), and the gas heat return pipe (28) is provided with an electromagnetic valve (29) and a circulating power device (30);
the low-temperature inner box (11) is connected with an inlet pipe (13) connected with an upstream port of the backflow inner cavity (12), the low-temperature inner box (11) is connected with an outlet pipe (14) connected with a downstream port of the backflow inner cavity (12), and the inlet pipe (13) and the outlet pipe (14) are connected with an external cooling circulation device; the flow direction of cooling liquid fluid formed in the flow inlet pipe (13), the return inner cavity (12) of the low-temperature inner box (11) and the flow outlet pipe (14) is opposite to the direction of air flow fluid formed in the circuitous condensation channel (10) of the condensation box (6);
a liquid collecting part (25) is arranged at the bottom of the condensing box (6), a heat insulation collecting tank (26) communicated with the liquid collecting part (25) is arranged at the bottom of the separating device (3), and a liquid guide pipe (27) communicated with the heat insulation collecting tank (26) is arranged at the bottom of the separating device (3);
the separation system comprises the following steps:
s1, filtering the waste water solution containing TMAH or PMA, injecting the filtered waste water solution into the main heating device (1), and continuously heating the main heating device (1) at the heating temperature kept at the boiling point T of the organic solventYAbove (provided that the boiling point of the organic solvent is greater than the boiling point of water, the boiling point of TMAH is 120 ℃ and the boiling point of PMA is 154.8 ℃);
s2, introducing water vapor and organic solvent gas in the main heating device (1) into the separation device (3), entering a separation cavity (5) of the separation device (3), and entering the condensation box (6) from an inlet pipe (9) of the first condensation box (6);
s3, injecting cooling liquid into a backflow inner cavity (12) of the low-temperature inner box (11) through a flow inlet pipe (13), and discharging the cooling liquid through a flow outlet pipe (14); the upstream temperature detection module (20) and the downstream temperature detection module (21) detect the surface temperature of the low-temperature inner box (11), and the surface temperature of the low-temperature inner box (11) sensed by the upstream temperature detection module (20) is set as TSThe surface temperature of the low-temperature inner box (11) sensed by the downstream temperature detection module (21) is TX；
When TX≤TY-ΔT1The liquid flow is not performed in the inlet pipe (13) and the outlet pipe (14), wherein the flow rate is 0.05TY≤ΔT1≤0.1TY；
When TY-ΔT1＜TX＜TYAnd TS≤TY-ΔT1The flow of the coolant is started at the inlet pipe (13) and the outlet pipe (14), and if the flow rate of the coolant at the inlet pipe (13) and the outlet pipe (14) is V, F (V) and F (T) are presenta) Wherein, F (T)a)＝TX-TY+ΔT1；
(III) when TY-ΔT1＜TX＜TYAnd TY-ΔT1＜TS＜TYThe flow of the cooling liquid is continued to be carried out by the inlet pipe (13) and the outlet pipe (14) according to the method II, meanwhile, an electromagnetic valve (29) on the gas backheating pipe (28) is opened, and the circulating power of the circulating power device (30) is set to be P1Then F (P) is present1)∝F(Tb) Wherein, F (T)b)＝TS-TY+ΔT1；
S4, leading the organic solvent gas into the hot air flow of the condensing box (6) when the organic solvent gas meets the condition that the temperature is lower than TYThe organic solvent liquefied in the moving path of the hot gas around the circuitous condensation channel (10) flows into a liquid collecting part (25) and an insulated collecting tank (26);
s5, the outlet temperature detection module (22) detects the temperature of the air flow discharged from the discharge port pipe (15) of any one non-tail end condensation box (6), and the detected temperature is TO；
When TO≥TY+ΔT2The heating plate (17) does not need to heat the air flow passing through, wherein 0.05TY≤ΔT2≤0.1TY；
When TO＜TY+ΔT2The heating plate (17) needs to heat the air flow passing through, and the heating power of the heating plate is set as P2Then F (P) is present2)∝F(Tc) Wherein, F (T)c)＝TY+ΔT2-TO；
S6, detecting the temperature of the air flow entering the inlet pipe (9) of the non-head end condensation box (6) by the secondary inflow temperature detection module (23), and setting the detected temperature as TI；
When TI≥TY+ΔT2The heating rod (18) does not need to heat the air flow passing through;
when TI＜TY+ΔT2The heating rod (18) needs to heat the air flow passing through, and the heating power of the heating rod (18) is set as P3Then F (P) is present3)∝F(Td) Wherein, F (T)d)＝TY+ΔT2-TI；
S7, the wake temperature detection module (24) detects the temperature of the air flow discharged from the discharge port pipe (15) of the tail end condensation box (6), and the detected temperature is set as TW；
When TW＜TYThe flow rates of the flow inlet pipe (13) and the flow outlet pipe (14) connected with the low-temperature inner box (11) in the tail end condensation box (6) are maintained in the current state;
when TW≥TYThe flow velocity of the cooling liquid is continuously increased by the flow inlet pipe (13) and the flow outlet pipe (14) connected with the low-temperature inner box (11) in the tail end condensation box (6) until T is metW＜TY；
S8, detecting the temperature of the current mixed gas flow by a first inflow temperature detection module (19) at the position of an inlet pipe (9) of a first condensation box (6), and when the temperature is lower than the boiling point T of the organic solventYThe system drives and controls the main heating device (1) to improve the heating power, and simultaneously opens the electromagnetic valve (29) of the gas heat return pipe (28) and the circulating power device (30) to start the gas flow circulation to ensure that the temperature of the gas flow entering the first condensation box (6) is higher than the boiling point T of the organic solventY。
2. The organic solvent separation system for flat panel display according to claim 1, wherein:
the upstream temperature detection module (20) is positioned at the upstream part of the backflow inner cavity (12) of the low-temperature inner box (11), and the downstream temperature detection module (21) is positioned at the downstream part of the backflow inner cavity (12) of the low-temperature inner box (11); the low-temperature inner box (11) is a copper material box body or a heat conduction material box body with a silver-plated surface.
3. The organic solvent separation system for flat panel display according to claim 1, wherein:
and the outlet pipe (15) and the inlet pipe (9) in the auxiliary heat cavity (7) are positioned on the opposite sides of the upper partition plate (16), and the outlet pipe (15) and the inlet pipe (9) are positioned in the upper area of the heating rod (18).
4. The organic solvent separation system for flat panel display according to claim 1, wherein:
and temperature sensing probes facing the opposite direction of the airflow flow are arranged on the primary inflow temperature detection module (19), the outflow temperature detection module (22), the secondary inflow temperature detection module (23) and the wake flow temperature detection module (24).
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107648874A (en) * | 2017-10-30 | 2018-02-02 | 新中天环保股份有限公司 | A kind of volatile solvent condensate recycling device |
| CN211445113U (en) * | 2019-12-25 | 2020-09-08 | 安徽中盈国创环保科技有限公司 | Industrial environment-friendly solvent recovery unit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102380222B (en) * | 2011-11-02 | 2014-02-12 | 广州市纤维产品检测院 | Organic solvent recycling system |
| CN102836564A (en) * | 2012-08-31 | 2012-12-26 | 南京理工大学 | Condensation and adsorption-combined organic solvent recovering device |
| JP6454660B2 (en) * | 2016-05-30 | 2019-01-16 | パナソニック株式会社 | Solvent separation method and solvent separation apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107648874A (en) * | 2017-10-30 | 2018-02-02 | 新中天环保股份有限公司 | A kind of volatile solvent condensate recycling device |
| CN211445113U (en) * | 2019-12-25 | 2020-09-08 | 安徽中盈国创环保科技有限公司 | Industrial environment-friendly solvent recovery unit |
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