CN113376845A - Stray light absorbing device - Google Patents
Stray light absorbing device Download PDFInfo
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- CN113376845A CN113376845A CN202110684604.2A CN202110684604A CN113376845A CN 113376845 A CN113376845 A CN 113376845A CN 202110684604 A CN202110684604 A CN 202110684604A CN 113376845 A CN113376845 A CN 113376845A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
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Abstract
The invention relates to a stray light absorbing device, which belongs to the technical field of high-power laser devices and comprises a lens, an absorber and a peripheral pipeline, wherein the lens and the absorber are sequentially arranged along the transmission direction of stray light, the lens expands the diameter of incident stray light, the absorber absorbs partial stray light and reflects and converges the residual stray light between the absorber and the lens, the stray light is returned between the absorber and the lens to consume energy, the peripheral pipeline is used for packaging the lens and the absorber, and the inner wall of the peripheral pipeline can absorb the stray light transmitted to the surface of the peripheral pipeline.
Description
Technical Field
The invention belongs to the technical field of high-power laser devices, and particularly relates to a stray light absorption device.
Background
Large high power laser devices can output laser pulses with energies ranging from thousands of joules to tens of thousands of joules, peak powers up to tewatts or even mugwatts, and are complex in construction and large in scale, typically consisting of hundreds to thousands of optical elements. Because of the residual reflection of the surface film layer of the optical element, the laser pulse generates complicated and uncontrollable stray light when being transmitted and amplified in the optical path link. High-flux stray light can damage optical elements and deteriorate beam quality, so that the service life of the laser device is reduced, and the output performance of a high-power laser device is severely restricted, so that how to manage and control the stray light is always a focus of attention in the field of strong laser research and design.
For stray light in a divergent form, the laser flux it strikes the optical element is low, and if it does not strike the target surface directly, it is generally ignored. For the stray light in a convergent form, because the laser flux irradiated on the optical element is high, the stray light is actively absorbed by a stray light absorber, so that the damage to the optical-mechanical structure is avoided. At present, common stray light absorbers are wedge-shaped, triangular cone-shaped, shutter-shaped, curved-surface-shaped and the like, the stray light absorbers directly face high-flux stray light, the risk of laser damage to the stray light absorbers is high, and even if the damage threshold of optical materials of the absorbers is high, the surfaces of optical elements are broken due to the fact that high-flux laser radiation is accumulated and received for a long time, particles such as dust and the like are generated, the clean environment in a light beam pipeline is polluted, and the service life of the optical elements of a main light path is influenced.
Disclosure of Invention
In order to solve the above problems, a stray light absorption device is proposed to split and dissipate stray light energy, so as to reduce the risk of damage to optical elements, and not bring a cleaning risk to the original light path.
In order to achieve the purpose, the invention provides the following technical scheme:
a stray light absorbing device comprising:
a lens serving as a window of the stray light absorbing device and expanding the aperture of the incident stray light;
the absorber absorbs part of stray light and reflects and converges the residual stray light between the absorber and the lens, one part of the residual stray light is transmitted through the lens, the other part of the residual stray light is transmitted to the absorber to be absorbed and reflected to form secondary residual stray light, the secondary residual stray light converges between the absorber and the lens, and the stray light returns back between the absorber and the lens to consume energy;
and the peripheral pipeline is used for packaging the lens and the absorber, and the inner wall of the peripheral pipeline can absorb the stray light transmitted to the surface of the peripheral pipeline.
Furthermore, the front surface of the lens is coated with an antireflection film and is used for transmitting all stray light into the stray light absorption device as much as possible, and the curvature radius of the rear surface of the lens is negative and is used for expanding the diameter of the incident stray light and reducing the laser damage load pressure of the absorber.
Furthermore, the lens is made of an optical material with high laser damage threshold and high optical transmittance.
Preferably, the lens is fused silica or K9 glass.
Further, the front surface radius of curvature of the absorber is negative.
Furthermore, the absorber is made of an optical material with high laser damage threshold and high optical absorption coefficient. Preferably, the laser damage threshold of the lens is 30J/cm2The optical transmittance was 99.6%, and the laser damage threshold of the absorber was 20J/cm2The optical absorption coefficient thereof was 45%.
Preferably, the absorber is ultraviolet glass ZJB360, ultraviolet glass ZJB380 or AB5 glass.
Furthermore, the lens is obliquely arranged relative to the absorber, so that residual stray light is prevented from being directly reflected back to an original light path.
Preferably, the inclination angle of the lens is 1 to 5 °.
Further, the absolute value of the radius of curvature of the rear surface of the lens is set to R1And R is1The aperture of the expanded stray light is not larger than the aperture of the light passing through the absorber, and the stray light is prevented from escaping without being absorbed and reflected by the absorber.
Further, the converging focal length of the incident stray light is set to F, the distance from the main point of the stray light to the lens is set to L, the distance between the lens and the absorber is set to D, and the absolute value of the curvature radius of the front surface of the absorber is set to R2Then R is2<2(F-L-D), avoiding the lens damage caused by the high flux reflected stray light converging on the lens surface.
When designing the radius of curvature of the front surface of the absorber, it is mainly considered that stray light reflected by the absorber converges between the lens and the absorber. When R is2When R is 2(F-L-D), the reflected stray light may be condensed on the lens surface, and when R is R2<2(F-L-D), the reflected stray light is concentrated in front of the lens, preferably when R is2When F-L-D is used, the reflected stray light is condensed near the intermediate position between the lens and the absorber, and the risk of damage to the optical element is reduced.
Furthermore, the peripheral pipeline is of a semi-closed and detachable structure and is used for absorbing stray light scattered to the inner wall of the peripheral pipeline, so that the peripheral pipeline is convenient to clean.
Preferably, the peripheral pipeline is cylindrical and comprises a cylinder body, a left end face and a right end face, the right end face is sealed to serve as a closed end, the left end face is opened to serve as an open end, and the closed end is detachably connected with the cylinder body through bolts, buckles or hinges.
Preferably, the peripheral pipeline is of a square structure, the top surface, the bottom surface, the front end surface, the rear end surface and the right end surface of the peripheral pipeline are all sealed, the left end surface of the peripheral pipeline is open, and the front end surface, the rear end surface and the right end surface of the peripheral pipeline are detachably connected with the top surface and the bottom surface through bolts, buckles or hinges respectively.
Preferably, the peripheral pipeline is made of stainless steel or aluminum alloy, and the surface of the peripheral pipeline is subjected to anodic oxidation treatment.
The invention has the beneficial effects that:
1. based on the optical design principle, most of incident stray light is limited in the stray light absorption device, so that the stray light is turned back for multiple times, energy is consumed continuously, the small escaping stray light is changed into low-flux laser in a divergent mode through a lens, the damage risk of an optical element is reduced, and meanwhile, the clean risk of an original light path is not brought.
2. The lens is adopted to expand the incident stray light, so that the contact area between the stray light and the absorber is increased, and the risk of laser flux damage is reduced.
3. The stray light is turned back for multiple times by optimizing the rear surface shape of the lens and the front surface shape of the absorber, energy is continuously dissipated, meanwhile, the strongest part of the laser flux is positioned in an air medium between the lens and the absorber by optimizing the curvature of the surface shapes, the requirement on the thickness of the absorber material is reduced, and the cost is reduced.
4. The lens is obliquely arranged relative to the absorber, so that residual stray light is prevented from being directly reflected back to the original light path, and the adverse effect of the stray light on the original light path is reduced.
5. Simple structure and reasonable design, stray light absorption effect is better, and the production and processing cost is low.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the results of a simulation of a stray light absorption device based on ZeMax ray tracing software sequence mode;
fig. 3 is a diagram showing the result of simulation of the stray light absorbing device based on TracePro software non-sequential pattern.
In the drawings: 1-lens, 2-absorber, 3-peripheral pipe.
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The first embodiment is as follows:
as shown in fig. 1, a stray light absorbing device includes a lens 1, an absorber 2, and a peripheral pipe 3, wherein the lens 1 and the absorber 2 are arranged in this order along a stray light transmission direction.
The lens 1 is used as a window of the stray light absorption device to expand the aperture of the incident stray light. That is to say, the lens 1 is adopted to expand incident stray light, so that the contact area between the stray light and the absorber 2 is increased, and the risk of laser flux damage is reduced. Specifically, the front surface of the lens 1 is coated with an antireflection film for transmitting all stray light into the stray light absorption device as much as possible. Meanwhile, the curvature radius of the rear surface of the lens 1 is negative, and the lens is used for expanding the aperture of the incident stray light and reducing the laser damage load pressure of the absorber 2. The lens 1 is made of an optical material with high laser damage threshold and high optical transmittance. Preferably, the lens is fused silica or K9 glass.
The absorber 2 is used for absorbing part of stray light and reflecting and converging residual stray light between the absorber 2 and the lens 1, one part of the residual stray light is transmitted through the lens 1, the other part of the residual stray light is transmitted to the absorber 2 to be absorbed and reflected to form secondary residual stray light, the secondary residual stray light converges between the absorber 2 and the lens 1, and the stray light is repeatedly folded back between the absorber 2 and the lens 1 to consume energy.
Specifically, the front surface curvature radius of the absorbent body 2 is negative. Meanwhile, the absorber 2 is made of an optical material with a high laser damage threshold and a high optical absorption coefficient. Preferably, the laser damage threshold of the lens 1 is 30J/cm2The optical transmittance thereof was 99.6%, and the laser damage threshold of the absorber 2 was 20J/cm2The optical absorption coefficient thereof was 45%. Preferably, the absorber 2 is ultraviolet glass ZJB360 or ultraviolet glass ZJB 380.
The lens 1 is obliquely arranged relative to the absorber 2, so that residual stray light is prevented from being directly reflected back to an original light path, and the adverse effect of the stray light on the original light path is reduced. Preferably, the inclination angle of the lens 1 is 1-5 °. The inclination angle is influenced by the convergence focal length of the stray light, the parameters of the absorber and the like, and the inclination angle is repeatedly adjusted according to the light ray tracing result in the iteration process of the optical design, so that the stray light is limited between the lens 1 and the absorber 2 as much as possible while the partial stray light is prevented from being directly reflected back to the original light path. The absolute value of the radius of curvature of the rear surface of the lens 1 is set to R1And R is1The aperture of the stray light after being expanded is ensured to be not larger than the aperture of the light passing of the absorber 2, and the stray light is prevented from escaping without being absorbed and reflected by the absorber 2. That is, the absolute value R of the radius of curvature of the rear surface of the lens 11The stray light cannot be too small, so that the aperture of the light beam is larger than the clear aperture of the absorber 2 due to excessive divergence of the stray light, and part of the stray light cannot be absorbed and reflected by the absorber 2. Setting the convergence focal length of incident stray light as F, the distance from the main point of the stray light to the lens 1 as L, the distance between the lens 1 and the absorber 2 as D, and the absolute value of the curvature radius of the front surface of the absorber 2 as R2Then R is2<2(F-L-D), avoiding the damage of the lens 1 caused by the high flux reflected stray light converging on the surface of the lens 1. That is, when designing the radius of curvature of the front surface of the absorbent member 2, the main consideration isThe stray light reflected by the absorber 2 is condensed between the lens 1 and the absorber 2. When R is2When the value is 2(F-L-D), the reflected stray light may be condensed on the surface of the lens 1, and when R is the value2<2(F-L-D), the reflected stray light is collected before the lens 1, preferably when R is2When F-L-D, the reflected stray light is concentrated near the intermediate position between the lens 1 and the absorber 2, and the risk of damage to the optical elements is reduced. The stray light is turned back for multiple times by optimizing the rear surface profile of the lens 1 and the front surface profile of the absorber 2, energy is continuously dissipated, and meanwhile, the strongest part of the laser flux is positioned in an air medium between the lens 1 and the absorber 2 by optimizing the profile curvature, so that the requirement on the material thickness of the absorber 2 is reduced, and the cost is reduced.
The peripheral pipe 3 is used to enclose the lens 1 and the absorber 2, and the inner wall of the peripheral pipe 3 is capable of absorbing stray light transmitted to the surface thereof. Specifically, the peripheral pipe 3 is of a semi-enclosed structure and is used for absorbing stray light scattered to the inner wall of the peripheral pipe, and meanwhile, the peripheral pipe 3 is of a detachable structure and is convenient for cleaning residues and dust generated when laser is radiated onto an optical element for a long time. Meanwhile, the peripheral pipeline 3 is made of stainless steel or aluminum alloy, and the surface of the peripheral pipeline is subjected to anodic oxidation treatment.
In this embodiment, the peripheral pipe 3 is cylindrical and includes a cylinder, a left end surface and a right end surface, wherein the right end surface is closed as a closed end, the left end surface is open as an open end, and the right end surface is detachably connected to the cylinder through a bolt, a buckle or a hinge. In addition, the right end face and the barrel can be connected in an inserting mode, specifically, a groove is formed in the barrel, and a protrusion embedded into the groove is formed in the right end face.
In other embodiments, the peripheral pipe 3 has a square structure, the top surface, the bottom surface, the front end surface, the rear end surface and the right end surface of the peripheral pipe are all closed, the left end surface of the peripheral pipe is open, and the front end surface, the rear end surface and the right end surface of the peripheral pipe are detachably connected with the top surface and the bottom surface respectively through bolts, buckles or hinges. In addition, the front end face, the rear end face and the right end face can be respectively connected with the top face and the bottom face in an inserting mode, and inserting connection can be achieved if the grooves are matched with the protrusions.
Example two:
as shown in fig. 1, the same parts of this embodiment as those of the first embodiment are not described again, except that:
the lens 1 is made of fused quartz, the center thickness is 6mm, the light-passing aperture is 50mm multiplied by 50mm, the front surface of the lens is coated with an antireflection film, the transmittance in the light-passing aperture is better than 99.6% @351nm, and the curvature radius of the rear surface is set to be-100 mm.
The absorber 2 was made of AB5 glass, with a center thickness of 10mm and a front surface radius of curvature of-100 mm. The lens 1 is placed tilted by 3 deg. along the Y-axis with respect to the absorber 2.
The focusing focal length of the stray light is 400mm, the distance from the main point of the stray light to the lens 1 is 200mm, and the distance from the lens 1 to the absorber 2 is 100 mm.
Based on the above optical parameters, the results of simulating the stray light absorbing device based on the ZeMax light tracing software sequence mode were as shown in fig. 2. As can be seen from fig. 2: after the stray light enters the stray light absorbing device through the lens 1, the aperture of the light beam is enlarged, the contact area of the absorber 2 and the stray light is increased, and the laser flux load pressure of the absorber 2 is reduced. The absorber 2 absorbs part of the stray light and reflects the remaining stray light out. The reflected residual stray light is focused between the absorber 2 and the lens 1, the focal point falls in the air medium, and damage to the optical elements is avoided. The reflected residual stray light reaches the rear surface of the lens 1, part of the residual stray light is transmitted out through the lens 1 and is changed into stray light in the form of divergent light, the other part of the residual stray light is returned to the absorber 2 and is further absorbed and reflected to form secondary residual stray light, and the secondary residual stray light is converged between the absorber 2 and the lens 1, namely the stray light is returned between the absorber 2 and the lens 1 for multiple times to consume energy.
Based on the above optical parameters, the results of simulating the stray light absorbing device based on TracePro software non-sequential mode simulation are shown in fig. 3. As can be seen from fig. 3: the final direction of the stray light is mainly divided into two types, namely the stray light is absorbed by the absorber 2 after being reflected for multiple times, and the stray light is diffused out through the lens 1, so that the diffused low-flux stray light cannot damage optical elements.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (10)
1. A stray light absorbing device, comprising:
a lens serving as a window of the stray light absorbing device and expanding the aperture of the incident stray light;
the absorber absorbs part of stray light and reflects and converges the residual stray light between the absorber and the lens, one part of the residual stray light is transmitted through the lens, the other part of the residual stray light is transmitted to the absorber to be absorbed and reflected to form secondary residual stray light, the secondary residual stray light converges between the absorber and the lens, and the stray light returns back between the absorber and the lens to consume energy;
and the peripheral pipeline is used for packaging the lens and the absorber, and the inner wall of the peripheral pipeline can absorb the stray light transmitted to the surface of the peripheral pipeline.
2. A stray light absorbing device according to claim 1, wherein the front surface of said lens is coated with an antireflection film, and the radius of curvature of the rear surface is negative, so as to reduce the laser damage load pressure of the absorber.
3. A stray light absorbing device according to claim 2, wherein said lens is made of an optical material having a high laser damage threshold and a high optical transmittance.
4. A stray light absorbing device according to claim 1, wherein the radius of curvature of the front surface of said absorbing body is negative.
5. A stray light absorbing device according to claim 4, wherein said absorber is made of an optical material selected from the group consisting of those having a high laser damage threshold and a high optical absorption coefficient.
6. A stray light absorbing device according to claim 1, wherein said peripheral duct is a semi-enclosed, removable structure for absorbing stray light scattered to an inner wall thereof.
7. A stray light absorbing device according to claim 6, wherein said peripheral tube is made of stainless steel or aluminum alloy and is anodized.
8. A stray light absorbing device according to any one of claims 1 to 7, wherein said lens is disposed obliquely with respect to the absorbing body to prevent residual stray light from being reflected directly back into the original optical path.
9. A stray light absorbing device according to claim 8, wherein the absolute value of the radius of curvature of the rear surface of the lens is set to R1R is set according to the clear aperture of the absorber, the distance between the lens and the absorber, and the focal length of the incident stray light1And the aperture of the expanded stray light is not larger than the light-transmitting aperture of the absorber.
10. A stray light absorbing device according to claim 9, wherein the focus of the incident stray light on the condensing lens is set to F, the distance from the principal point of the stray light to the lens is set to L, the distance between the lens and the absorber is set to D, and the absolute value of the radius of curvature of the front surface of the absorber is set to R2Then R is2<2(F-L-D), avoiding the lens damage caused by the high flux reflected stray light converging on the lens surface.
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