CN113376774A - Optical fiber array and coupling structure for silicon optical module - Google Patents
Optical fiber array and coupling structure for silicon optical module Download PDFInfo
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- CN113376774A CN113376774A CN202110805317.2A CN202110805317A CN113376774A CN 113376774 A CN113376774 A CN 113376774A CN 202110805317 A CN202110805317 A CN 202110805317A CN 113376774 A CN113376774 A CN 113376774A
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- Prior art keywords
- optical fiber
- fiber array
- optical
- silicon
- coupling
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 100
- 230000003287 optical effect Effects 0.000 title claims abstract description 66
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 61
- 239000010703 silicon Substances 0.000 title claims abstract description 61
- 238000010168 coupling process Methods 0.000 title claims abstract description 39
- 230000008878 coupling Effects 0.000 title claims abstract description 37
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 37
- 239000000835 fiber Substances 0.000 claims description 35
- 239000011521 glass Substances 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 229910000833 kovar Inorganic materials 0.000 claims description 10
- 238000004026 adhesive bonding Methods 0.000 claims description 5
- 229910000531 Co alloy Inorganic materials 0.000 claims description 3
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 3
- 238000003698 laser cutting Methods 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000010923 batch production Methods 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/424—Mounting of the optical light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
- G02B6/425—Optical features
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Coupling Of Light Guides (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention provides an optical fiber array for a silicon optical module and a coupling structure for the silicon optical module, wherein the optical fiber array has the advantages of simple structure, low processing difficulty, low cost and favorable batch production, the coupling structure can realize precise coupling with a silicon optical chip and has better reliability.
Description
Technical Field
The invention relates to the technical field of optical communication, in particular to an optical fiber array and a coupling structure for a silicon optical module.
Background
The silicon optical chip is used as a core device of the silicon optical module, an electric port at one end is connected with an electric chip arranged on the circuit board in an electric signal mode through gold wire bonding, and the other end is butted with the optical port in a waveguide mode. At present, most optical module manufacturers adopt optical fibers to realize the butt joint of a waveguide and an optical port, that is, one end of the optical fiber is connected with a connector at the optical port end of the optical module, and the other end of the optical fiber is directly coupled and connected with the waveguide end face on a silicon optical chip through an optical fiber array.
In the prior art, an optical fiber array for optical coupling disclosed in chinese patent publication No. CN105717577A and a lens optical fiber array disclosed in chinese patent publication No. CN208125949U are provided with a V-groove structure to ensure coupling accuracy, which increases the processing difficulty of a glass optical fiber mechanism, and is complex in process, high in cost, and not suitable for mass production.
In addition, optical path butt joint can be realized only by precisely coupling the optical fiber array with the waveguide end face on the silicon optical chip, and micron-scale deviation is not allowed, so that a clamp is required to be used for fully clamping the optical fiber array during coupling. Among the prior art, this fiber array mechanism generally chooses the glass material preparation for use, because the glass surface is more smooth, too loose can lead to skidding during anchor clamps centre gripping, and too tight can lead to glass to break, also is the big problem that exists among the current coupling process.
Disclosure of Invention
In view of the above problems, the present invention provides an optical fiber array for a silicon optical module and a coupling structure for a silicon optical module, where the optical fiber array has a simple structure, low processing difficulty, low cost, and is beneficial to mass production, and the coupling structure can realize precise coupling with a silicon optical chip and has good reliability.
The technical scheme is as follows: an optical fiber array for a silicon optical module, comprising a base, characterized in that: the optical fiber array device comprises a base and is characterized in that an optical fiber array groove is formed in the bottom of the base, a plurality of optical fibers can be placed in the optical fiber array groove side by side, two adjacent optical fibers are arranged in a closely attached mode, the bottom surface of the optical fiber array groove is a plane, the optical fibers are fixed in the optical fiber array groove through gluing, and a cover plate is fixed at the lower end of each optical fiber through gluing.
Further, the upper end of base still is provided with clamping part.
Furthermore, one side surface of the clamping part is a vertically arranged plane, and the other side surface opposite to the vertically arranged plane is an inclined surface inclined from top to bottom.
Furthermore, the base is made of kovar alloy with the thermal expansion coefficient similar to that of glass, and the cover plate is made of kovar alloy with the thermal expansion coefficient similar to that of glass or glass.
Further, the kovar alloy includes an iron-nickel-cobalt alloy.
Further, the width of the optical fiber array groove is larger than or equal to the sum of the widths of the optical fibers in the optical fiber array groove.
Further, the optical fiber includes a bare fiber and an outer cladding layer included outside the bare fiber.
The utility model provides a coupling structure for silicon optical module, its characterized in that includes foretell fiber array that is used for silicon optical module, still includes silicon optical chip, be equipped with a plurality of V type grooves that set up side by side on the silicon optical chip, the tip of the optic fibre in the fiber array sets to naked fibre, is used for connecting silicon optical chip, every naked fibre is different respectively fix a position in the V type groove, the front end of naked fibre is provided with the coupling fiber end face that is used for the coupling, coupling fiber end face hugs closely silicon optical chip's waveguide terminal surface.
Furthermore, the coupling optical fiber end face is manufactured by precision grinding or laser cutting.
Further, the distance between the centers of the V-shaped grooves is equal to the width of the optical fiber.
The invention has the following advantages:
the optical fiber array for the silicon optical module cancels the structure that a V-shaped groove is dug on an optical fiber array mechanism in the prior art, and the base, the optical fiber and the cover plate are assembled into a whole, so the structure is simple and reliable, the processing process difficulty is reduced, when the silicon optical chip is coupled, the positioning is directly carried out through the V-shaped groove arranged on the silicon optical chip, and the degree of freedom of the optical fiber on the horizontal plane can be completely limited because the V-shaped groove is arranged on the waveguide end surface of the silicon optical chip, so the optical fiber array can adopt a simple structure, the processing difficulty is low, the cost is low, and the mass production is facilitated.
The optical fiber array used for the silicon optical module is made of kovar alloy with the thermal expansion coefficient close to that of glass, the optical fiber array is not easy to break and deform during coupling and clamping, and has better reliability.
The coupling structure for the silicon optical module is realized based on the optical fiber array for the silicon optical module, and reduces the process difficulty, the processing cost and the reliability while ensuring the coupling precision.
Drawings
FIG. 1 is a schematic diagram of a mount for an optical fiber array of a silicon optical module in an embodiment;
FIG. 2 is a schematic diagram of an optical fiber array for a silicon optical module in an embodiment;
FIG. 3 is a schematic side view of an optical fiber array for a silicon optical module according to an embodiment;
FIG. 4 is a schematic front view of an optical fiber array for a silicon optical module according to an embodiment;
FIG. 5 is a schematic diagram of a coupling structure for a silicon optical module in an embodiment;
FIG. 6 is a side view of a coupling structure for a silicon light module in an embodiment.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, wherein the drawings provided in the present embodiments illustrate the basic idea of the invention only in a schematic way, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complex.
See fig. 1 to 4, an optical fiber array for silicon optical module, including base 1, the bottom of base is equipped with optical fiber array groove 2, can place a plurality of optic fibre 3 side by side in the optical fiber array groove 2, and two adjacent optic fibre are hugged closely and are arranged, and the bottom surface in optical fiber array groove 2 is the plane to can ensure the highly uniform of the optic fibre setting in optical fiber array groove 2, optic fibre 3 is through adhesive fixation in optical fiber array groove 2, and optic fibre 2 lower extreme has apron 4 through adhesive fixation.
Specifically, the lower surface of the cover plate 4 can be leveled with the lower surface of the base 1, the optical fibers 3 are placed in the optical fiber array groove 2 in a flush mode, and when the cover plate 4 is glued, the lower surface of the cover plate 4 and the lower surface of the base 1 are in the same plane, so that the precision degree of the optical fiber array and the silicon optical chip in the coupling process is guaranteed.
In addition, the upper end of the base 1 is further provided with a clamping portion 5, specifically, one side surface of the clamping portion 5 is a vertically arranged plane 51, the other side surface opposite to the vertically arranged plane is an inclined surface 52 inclined from top to bottom, the clamping portion 5 can be matched with a clamping fixture, the plane 51 can be used for positioning, and the inclined surface 52 can be used for matching and correcting when the fixture and the clamping portion have an angular deviation.
In this embodiment, base 1 forms through the kovar alloy preparation that is close with glass thermal expansion coefficient, and the apron forms through kovar alloy or glass preparation that are close with glass thermal expansion coefficient, and the kovar alloy can adopt current iron nickel cobalt alloy, is difficult for breaking deformation during the coupling centre gripping, has better reliability, and fiber array mechanism chooses for use the metal material preparation, compares in the glass material, and the cost has reduced an order of magnitude, and the producer of also being convenient for simultaneously carries out the centre gripping in the course of working.
Specifically, the optical fiber 3 comprises a bare fiber 31 and an outer cladding 32 outside the bare fiber, the width of the optical fiber array groove is larger than or equal to the sum of the widths of all optical fibers in the optical fiber array groove, a gap of about 0.05mm can be reserved, and poor assembly is avoided.
In this embodiment, the optical fibers are fixed between the base and the cover plate by gluing to limit the degree of freedom in the height direction, two adjacent optical fibers are arranged in close contact, and the width of the optical fiber array groove is equal to or slightly greater than the sum of the widths of all the optical fibers to limit the degree of freedom in the left and right directions. The structure that V type groove was dug to establish on fiber array mechanism among the prior art is cancelled with this, assembles base, optic fibre and apron an organic whole, and simple structure is reliable, has reduced the processing technology degree of difficulty.
Referring to fig. 5 and 6, in an embodiment of the present invention, a coupling structure for a silicon optical module is further provided, including an optical fiber array for a silicon optical module in the above-mentioned embodiment, and further including a silicon optical chip 6, where the silicon optical chip 6 is provided with a plurality of V-shaped grooves 61 arranged side by side, a distance between centers of the V-shaped grooves is equal to a width of an optical fiber, ends of optical fibers in the optical fiber array are provided with bare fibers 31 for connecting the silicon optical chip, each bare fiber 31 is respectively positioned in a different V-shaped groove 61, by such arrangement, when the optical fiber 3 of the optical fiber array is coupled with the silicon optical chip 6, the optical fiber 3 cannot be bent and can be straightly fitted with the V-shaped grooves 61, a coupling fiber end face 33 for coupling is provided at a front end of the bare fiber 31, and the coupling fiber end face 33 is tightly attached to a waveguide end face 62 of the silicon optical chip.
In this embodiment, the coupling fiber end face is manufactured by precision grinding or laser cutting, and the coupling precision can be ensured.
When the optical fiber array is coupled with the silicon optical chip, the optical fiber array components are assembled firstly, placed at preset positions through the clamping fixture, and then positioned through the V-shaped groove of the silicon optical chip, so that the optical fiber array is coupled with the waveguide end face. Optical fiber has certain elasticity, and the V type groove plays the guide effect, and optic fibre atress can not be crooked, and naked fibre is direct fixes a position through the V type groove that sets up on the silicon optical chip, because the waveguide terminal surface of silicon optical chip has set up the V type groove, can restrict the degree of freedom of optic fibre on the horizontal plane completely to the optical fiber array can adopt simple structure, and the processing degree of difficulty is low, and is with low costs, does benefit to mass production.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. An optical fiber array for a silicon optical module, comprising a base, characterized in that: the optical fiber array device comprises a base and is characterized in that an optical fiber array groove is formed in the bottom of the base, a plurality of optical fibers can be placed in the optical fiber array groove side by side, two adjacent optical fibers are arranged in a closely attached mode, the bottom surface of the optical fiber array groove is a plane, the optical fibers are fixed in the optical fiber array groove through gluing, and a cover plate is fixed at the lower end of each optical fiber through gluing.
2. An optical fiber array for a silicon optical module as defined in claim 1, wherein: the upper end of the base is also provided with a clamping part.
3. An optical fiber array for a silicon optical module as defined in claim 2, wherein: one side surface of the clamping part is a vertically arranged plane, and the other side surface opposite to the vertically arranged plane is an inclined surface inclined downwards from top to bottom.
4. An optical fiber array for a silicon optical module as defined in claim 1, wherein: the base is made of kovar alloy with the thermal expansion coefficient similar to that of glass, and the cover plate is made of kovar alloy with the thermal expansion coefficient similar to that of glass or glass.
5. An optical fiber array for a silicon optical module according to claim 4, wherein: the kovar alloy includes an iron-nickel-cobalt alloy.
6. An optical fiber array for a silicon optical module according to claim 4, wherein: the width of the optical fiber array groove is larger than or equal to the sum of the widths of the optical fibers in the optical fiber array groove.
7. An optical fiber array for a silicon optical module as defined in claim 1, wherein: the optical fiber includes a bare fiber and an outer cladding included outside the bare fiber.
8. A coupling structure for a silicon optical module, characterized by: the optical fiber array for the silicon optical module according to any one of claims 1 to 7, further comprising a silicon optical chip, wherein the silicon optical chip is provided with a plurality of V-shaped grooves arranged side by side, the end portions of the optical fibers in the optical fiber array are arranged as bare fibers for connecting the silicon optical chip, each bare fiber is respectively positioned in different V-shaped grooves, the front end of each bare fiber is provided with a coupling optical fiber end face for coupling, and the coupling optical fiber end face is tightly attached to the waveguide end face of the silicon optical chip.
9. A coupling structure for a silicon light module as claimed in claim 8, characterized in that: the coupling optical fiber end face is manufactured by precision grinding or laser cutting.
10. A coupling structure for a silicon light module as claimed in claim 8, characterized in that: the distance between the centers of the V-shaped grooves is equal to the width of the optical fiber.
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CN202110805317.2A CN113376774A (en) | 2021-07-16 | 2021-07-16 | Optical fiber array and coupling structure for silicon optical module |
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CN202110805317.2A CN113376774A (en) | 2021-07-16 | 2021-07-16 | Optical fiber array and coupling structure for silicon optical module |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024045805A1 (en) * | 2022-09-01 | 2024-03-07 | 华为技术有限公司 | Optical assembly, optical chip, electronic device, and optical communication system |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06160660A (en) * | 1992-11-17 | 1994-06-07 | Sumitomo Cement Co Ltd | Holder and method for holding optical fiber |
JPH06313822A (en) * | 1993-04-30 | 1994-11-08 | Sumitomo Metal Mining Co Ltd | Laser-fused metal case for optical device |
CN103197389A (en) * | 2013-03-14 | 2013-07-10 | 武汉世翔科技有限公司 | Novel light path coupling optical fiber array |
CN203224649U (en) * | 2013-03-14 | 2013-10-02 | 武汉世翔科技有限公司 | A novel optical path coupling fiber array |
CN207268792U (en) * | 2017-09-05 | 2018-04-24 | 深圳加华微捷科技有限公司 | A kind of fiber array |
CN209784601U (en) * | 2019-05-31 | 2019-12-13 | 亨通洛克利科技有限公司 | structure suitable for optical module coupling |
CN111007591A (en) * | 2019-12-24 | 2020-04-14 | 武汉驿路通科技股份有限公司 | Optical fiber array with high reliability |
CN215219252U (en) * | 2021-07-16 | 2021-12-17 | 亨通洛克利科技有限公司 | Optical fiber array and coupling structure for silicon optical module |
CN114325954A (en) * | 2022-01-04 | 2022-04-12 | 武汉光迅科技股份有限公司 | Novel optical fiber array structure and manufacturing method thereof |
-
2021
- 2021-07-16 CN CN202110805317.2A patent/CN113376774A/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06160660A (en) * | 1992-11-17 | 1994-06-07 | Sumitomo Cement Co Ltd | Holder and method for holding optical fiber |
JPH06313822A (en) * | 1993-04-30 | 1994-11-08 | Sumitomo Metal Mining Co Ltd | Laser-fused metal case for optical device |
CN103197389A (en) * | 2013-03-14 | 2013-07-10 | 武汉世翔科技有限公司 | Novel light path coupling optical fiber array |
CN203224649U (en) * | 2013-03-14 | 2013-10-02 | 武汉世翔科技有限公司 | A novel optical path coupling fiber array |
CN207268792U (en) * | 2017-09-05 | 2018-04-24 | 深圳加华微捷科技有限公司 | A kind of fiber array |
CN209784601U (en) * | 2019-05-31 | 2019-12-13 | 亨通洛克利科技有限公司 | structure suitable for optical module coupling |
CN111007591A (en) * | 2019-12-24 | 2020-04-14 | 武汉驿路通科技股份有限公司 | Optical fiber array with high reliability |
CN215219252U (en) * | 2021-07-16 | 2021-12-17 | 亨通洛克利科技有限公司 | Optical fiber array and coupling structure for silicon optical module |
CN114325954A (en) * | 2022-01-04 | 2022-04-12 | 武汉光迅科技股份有限公司 | Novel optical fiber array structure and manufacturing method thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024045805A1 (en) * | 2022-09-01 | 2024-03-07 | 华为技术有限公司 | Optical assembly, optical chip, electronic device, and optical communication system |
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