CN113376732A - Intermediate infrared hollow waveguide and manufacturing method thereof - Google Patents
Intermediate infrared hollow waveguide and manufacturing method thereof Download PDFInfo
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- CN113376732A CN113376732A CN202110544143.9A CN202110544143A CN113376732A CN 113376732 A CN113376732 A CN 113376732A CN 202110544143 A CN202110544143 A CN 202110544143A CN 113376732 A CN113376732 A CN 113376732A
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- cladding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/023—Microstructured optical fibre having different index layers arranged around the core for guiding light by reflection, i.e. 1D crystal, e.g. omniguide
- G02B6/02304—Core having lower refractive index than cladding, e.g. air filled, hollow core
Abstract
The invention relates to a mid-infrared hollow waveguide and a manufacturing method thereof. The outer surface of the fiber core cladding is attached to the inner surface of the substrate, the fiber core cladding is of a hollow structure, the inner area of the fiber core cladding is a fiber core area, and the fiber core area is used for transmitting mid-infrared light waves. The inner surface of the fiber core cladding is a negative curvature surface, the inner surface of the fiber core cladding is provided with a metal film in a laminating manner, the metal film is provided with a dielectric film in a laminating manner, and then a hollow core waveguide with the negative curvature inner surface is formed, and meanwhile, the metal film and the dielectric film are arranged on the inner surface of the hollow core waveguide.
Description
Technical Field
The invention relates to the technical field of hollow waveguide manufacturing, in particular to a mid-infrared hollow waveguide and a manufacturing method thereof.
Background
Hollow core waveguides have been proposed for over 20 years, the most common being circular hollow core waveguides, which are widely used in many fields such as spectroscopy and imaging. Such circular hollow core waveguides still suffer from high transmission losses. In view of the foregoing, there is a need for a waveguide of a novel structure that can reduce the transmission loss of a hollow core waveguide.
Disclosure of Invention
The invention aims to provide a mid-infrared hollow-core waveguide and a manufacturing method thereof, which can obviously reduce the transmission loss of the hollow-core waveguide and have a wider low-loss transmission window.
In order to achieve the purpose, the invention provides the following scheme:
a mid-infrared hollow core waveguide comprising a substrate, a core cladding and a core region;
the outer surface of the fiber core cladding is attached to the inner surface of the substrate; the fiber core cladding is of a hollow structure, and the inner area of the fiber core cladding is the fiber core area;
the inner surface of the fiber core cladding is a negative curvature surface; a metal film is attached to the inner surface of the fiber core cladding, and a dielectric film is attached to the metal film;
the core region is used for transmitting middle infrared light waves.
A method of fabricating a hollow core waveguide, the method comprising the steps of:
drawing the cladding member to a designed outer diameter by using a drawing tower to obtain the drawn cladding member;
placing a plurality of drawn cladding members into a substrate, wherein the drawn cladding members are uniformly arranged along the circumferential direction of the inner surface of the substrate, and two adjacent drawn cladding members are tightly connected to form a first preform;
drawing the first preform rod by using a drawing tower to form a first hollow waveguide base tube with the inner surface being a negative curvature surface;
plating a metal film on the inner surface of the first hollow waveguide substrate tube by adopting a liquid phase coating method;
and plating a dielectric film on the metal film by adopting a liquid phase coating method.
A method of fabricating a hollow core waveguide, the method comprising the steps of:
manufacturing a fiber core cladding by using a fiber core cladding mold;
placing the fiber core cladding into a substrate to form a second preform;
drawing the second preform rod by using a drawing tower to form a second hollow waveguide base tube with the inner surface being a negative curvature surface;
plating a metal film on the inner surface of the second hollow waveguide substrate tube by adopting a liquid phase coating method;
and plating a dielectric film on the metal film by adopting a liquid phase coating method.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention discloses a mid-infrared hollow waveguide and a manufacturing method thereof. The outer surface of the fiber core cladding is attached to the inner surface of the substrate, the fiber core cladding is of a hollow structure, the inner area of the fiber core cladding is a fiber core area, and the fiber core area is used for transmitting mid-infrared light waves. The inner surface of the fiber core cladding is a negative curvature surface, the inner surface of the fiber core cladding is provided with a metal film in a laminating manner, the metal film is provided with a dielectric film in a laminating manner, and then a hollow core waveguide with the negative curvature inner surface is formed, and meanwhile, the metal film and the dielectric film are arranged on the inner surface of the hollow core waveguide.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a hollow-core waveguide provided in embodiment 1 of the present invention.
Figure 2 is a schematic diagram of another configuration of hollow core waveguide according to embodiment 1 of the present invention.
Fig. 3 is a comparison graph of simulation calculation results of the loss of the basement membrane provided in example 1 of the present invention.
Fig. 4 is a graph comparing loss characteristics provided by example 1 of the present invention.
Fig. 5 is a flowchart of a method of manufacturing the optical disc device according to embodiment 2 of the present invention.
Fig. 6 is a flowchart of another manufacturing method according to embodiment 3 of the present invention.
Fig. 7 is a schematic structural diagram of a core-cladding mold according to embodiment 3 of the present invention.
Description of the symbols:
1-a substrate; 2-core cladding; 3-a core region; 4-a metal film; 5-dielectric film; 21-a cladding member; 22-clad substrate; 23-arc-shaped bulge.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a mid-infrared hollow-core waveguide and a manufacturing method thereof, which can obviously reduce the transmission loss of the hollow-core waveguide and have a wider low-loss transmission window.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1:
this embodiment is intended to provide a mid-infrared hollow core waveguide comprising, as shown in figure 1, a substrate 1, a core cladding 2 and a core region 3.
The outer surface of the fiber core cladding 2 is attached to the inner surface of the substrate 1, the fiber core cladding 2 is of a hollow structure, the inner area of the fiber core cladding is the fiber core area 3, and the fiber core area 3 is used for transmitting mid-infrared light waves.
The inner surface of the fiber core cladding 2 is a negative curvature surface, the inner surface of the fiber core cladding 2 is provided with a metal film 4 in an attaching mode, and the metal film 4 is provided with a dielectric film 5 in an attaching mode.
The waveguide provided by the embodiment has an inner surface structure with a negative curvature, the inner surface of the waveguide is sequentially plated with the metal film 4 and the dielectric film 5, and the waveguide with the negative curvature surface and simultaneously plated with the metal film 4 and the dielectric film 5 transmits mid-infrared light waves, so that the transmission loss is only about half of that of the traditional round hollow waveguide with the same aperture, the same metal film and the same dielectric film, and a wider low-loss transmission window is formed.
As an alternative embodiment, in order to make the inner surface of the core cladding 2 a negative curvature surface, as shown in fig. 1, the structure of the core cladding 2 is: the core cladding 2 includes a plurality of cladding members 21, and the cladding members 21 have a circular and/or elliptical radial cross-section. Specifically, all the cladding members 21 are circular, or all the cladding members 21 are elliptical, or a part of the cladding members 21 are circular, and the other cladding members 21 are elliptical. In the case where the partial cladding member 21 is circular and the other cladding member 21 is elliptical, the present embodiment does not limit the number and positional relationship of the elliptical cladding members 21 and the circular cladding members 21, and the number and positional relationship are arbitrary as long as the inner surface of the core cladding 2 to be formed can be ensured to be a negative curvature surface.
The radial section of the inner surface of the substrate 1 is circular, the plurality of cladding members 21 are uniformly arranged along the circumferential direction of the inner surface of the substrate 1, and the two adjacent cladding members 21 are tightly connected, so that the inner surface of the formed fiber core cladding 2 is a negative curvature surface to form a negative curvature waveguide, and the negative curvature waveguide has the advantages that the negative curvature boundary structure reduces the contact area between the boundary and an optical field, and the anti-resonance characteristic inhibits the coupling between the fiber core and the cladding mode, so that the transmission loss is reduced.
When the core cladding 2 includes a plurality of cladding members 21, the cladding members 21 are cladding tubes and/or cladding rods. Specifically, all the cladding members 21 are clad pipes, or all the cladding members 21 are clad rods, or a part of the cladding members 21 are clad pipes, and the other cladding members 21 are clad rods. In the case where the partial cladding member 21 is a cladding pipe and the other cladding member 21 is a cladding rod, the cladding pipe and the cladding rod are arranged in an arbitrary arrangement, and in this case, the number of cladding pipes and cladding rods is not limited at all.
The shape (circular and/or oval) of the cladding member 21 and the structure (cladding pipe and/or cladding rod) of the cladding member 21 may be arbitrarily combined, and this embodiment is not limited to this.
As another alternative embodiment, as shown in fig. 2, the core cladding 2 includes a cladding base 22 and a plurality of arc-shaped protrusions 23. The outer surface of the cladding substrate 22 is in contact with the inner surface of the substrate 1. The radial section of the inner surface of the cladding base body 22 is circular, a plurality of arc-shaped protrusions 23 are uniformly arranged along the circumferential direction of the inner surface of the cladding base body 22, and two adjacent arc-shaped protrusions 23 are tightly connected. By adopting the structure, the inner surface of the fiber core cladding layer 2 can be ensured to be a negative curvature surface, so that a negative curvature waveguide is formed, the negative curvature waveguide has the advantages that the negative curvature boundary structure reduces the contact area between the boundary and the optical field, and the anti-resonance characteristic inhibits the coupling between the fiber core and the cladding mode, so that the transmission loss is reduced.
For better transmission of mid-infrared light waves, the material of the metal film 4 in this embodiment may be gold, silver, copper, or aluminum, which has high reflectivity at a wavelength of 0.3-20 μm. The material of the dielectric film 5 may be an inorganic material or a resin material. The inorganic material may include AgI, ZnS, ZnSe, SiO2And the resin material may include polymethyl methacrylate (PMMA), Polyimide (PI), cycloolefin polymer (COP), cycloolefin copolymer (COC), Polyethylene (PE),Polypropylene (PP), ethylene-vinyl acetate copolymer (EVA), Polycarbonate (PC), fluorocarbon polymer (FCP), and the like.
It is experimentally verified that silver is preferable as a material of the metal film 4 due to high reflectivity and a mature coating process. As the material of the dielectric film 5, silver iodide and cycloolefin polymer are preferable. In order to further reduce the transmission loss, hollow-core waveguides (AgI/Ag) plated with an AgI film and an Ag film and hollow-core waveguides (COP/Ag) plated with a COP film and an Ag film may be selected.
The material of the substrate 1 in this embodiment may be Polycarbonate (PC), and the material of the cladding member 21 may also be Polycarbonate (PC).
The embodiment integrates the advantages of the metal film 4+ dielectric film 5 waveguide and the negative curvature waveguide, and provides the hollow metal film 4+ dielectric film 5 waveguide with the negative curvature boundary structure, and the waveguide has transmission loss which is only about half of that of a round hollow waveguide with the same size, the same metal film and the same dielectric film, and simultaneously has a wider low-loss transmission window.
In this embodiment, the inner diameter of the waveguide can be arbitrarily selected from several tens of micrometers to several millimeters to adapt to different types of light sources and detectors. The designed waveguide has good flexibility, and the minimum bending radius can reach within 1 cm. The designed waveguide can be used for low-loss transmission of laser and incoherent broad-spectrum light sources, and the length of the designed waveguide can reach tens of meters. The designed waveguide can realize low-loss transmission in middle and far infrared wave bands, and under the same condition, the loss value is only half of that of a circular metal film and dielectric film hollow waveguide.
As shown in fig. 3, which gives a simulation of the fundamental mode loss of a circular hollow-core waveguide and a negative curvature hollow-core waveguide each having a core diameter of 700 μm, the metal film 4 and the dielectric film 5 are made of the same material and have the same thickness, and the thickness of the dielectric film 5 is set to 950 nm. As can be seen from fig. 3, the loss of the negative curvature metal waveguide is higher than that of the circular metal waveguide at the wavelength of 10.6 μm, but when the dielectric film 5 is plated, the loss of the negative curvature metal film 4+ dielectric film 5 waveguide is rapidly decreased, and the loss is about half of that of the circular metal film + dielectric film waveguide. This also demonstrates the good results of the waveguide used in this example.
As shown in fig. 4, a graph comparing the loss characteristics of a negative curvature metal film 4+ dielectric film 5 waveguide and a circular metal film + dielectric film waveguide is shown. The waveguides used in FIG. 4 all had a core diameter of 700 μm and a length of 50 cm. The plating process, material and film thickness of the metal film and the dielectric film of the two waveguides are completely the same, the thickness of the silver film (metal film 4) is about 300nm, and the thickness of the silver iodide film (dielectric film 5) is about 900 nm. As is clear from fig. 4, the loss of the negative curvature metal film 4+ dielectric film 5 waveguide at a wavelength of 10 μm is about half of that of the circular metal film 4+ dielectric film 5 waveguide, and the interference peak of the negative curvature waveguide is narrower and the low-loss transmission window is wider. This again demonstrates the good results achieved by the waveguide used in this example.
Because light waves are reflected for multiple times at the boundary of air/medium and the boundary of the dielectric film 5/the metal film 4, the dielectric film 5 in the metal film 4+ dielectric film 5 waveguide is like a Fabry-Perot interference cavity, and the optimal film thickness of the dielectric film 5 can be designed by combining the theory that the hollow waveguide transmits electromagnetic waves and the influence of the dielectric film 5 on the waveguide transmission loss, wherein the optimal film thickness is the thickness which enables the waveguide transmission loss to be minimum at a certain wavelength. The optimum film thickness of the dielectric film 5 is determined in accordance with the refractive index and the transmission wavelength of the material of the dielectric film 5. Specifically, the optimal film thickness of the dielectric film 5 is determined by an optimal film thickness formula.
When the transmission wavelength is far less than the inner diameter of the waveguide, the optimal film thickness of the dielectric film 5 with the lowest loss obtained by the metal film 4+ dielectric film 5 waveguide is as follows:
in the formula 1, doptThe optimal film thickness of the dielectric film 5; λ is the transmission wavelength; n isdIs the refractive index of the material used for the dielectric film 5. In the actual design, the actual value of the optimum film thickness should be slightly smaller than the theoretical value calculated by equation 1, taking into account the absorption coefficient of the dielectric film 5 and the roughness of the surface.
Example 2:
when the core cladding 2 is structured to include a plurality of cladding members 21, the present embodiment is directed to a method of fabricating a hollow core waveguide, as shown in fig. 5, the method comprising the steps of:
s11: drawing the cladding member 21 to a designed outer diameter by using a drawing tower to obtain a drawn cladding member;
s12: placing a plurality of drawn cladding members into a substrate 1, wherein the drawn cladding members are uniformly arranged along the circumferential direction of the inner surface of the substrate 1, and two adjacent drawn cladding members are tightly connected to form a first preform;
s13: drawing the first preform rod by using a drawing tower to form a first hollow waveguide base tube with the inner surface being a negative curvature surface;
s14: plating a metal film 4 on the inner surface of the first hollow waveguide substrate tube by adopting a liquid phase coating method;
s15: and plating a dielectric film 5 on the metal film 4 by adopting a liquid phase coating method.
Specifically, the manufacturing method proposed in this embodiment will be described by taking the cladding member 21 as a PC rod/tube as an example. The PC rod/tube is first drawn to the desired PC slim rod/tube using a drawing tower at a temperature of about 200 degrees c. And then inserting the PC slim rods/tubes into the PC substrate 1, and uniformly arranging to form a negative curvature structure supported by 8 PC slim rods/tubes to form a first preform. And secondarily drawing the first prefabricated rod in a drawing tower to form a first hollow waveguide substrate tube with the same cross-sectional structure and shape and thinner overall size.
Taking silver (Ag) as the material of the metal film 4 and silver iodide (AgI) as the material of the dielectric film 5 as an example, the two are the most commonly used metal material and dielectric material in the mid-infrared band. Experiments prove that the silver plating process of the hollow-core waveguide with the negative curvature is the same as the AgI film forming process of the round hollow-core waveguide. Specifically, the method for plating the metal film 4 and the dielectric film 5 comprises the following steps: firstly, the gap between the rod/tube at the fiber core boundary and the substrate 1 is blocked by ultraviolet glue at the two ends of the waveguide, so as to prevent the plating solution from entering and influencing the plating effect. Then, a liquid phase coating method is used, a silver film is firstly coated on the inner surface of the first hollow waveguide tube based on the principle of silver mirror reaction, the reaction liquid and the reduction liquid are simultaneously introduced into the hollow core of the waveguide, and a layer of silver film with the thickness of 200-500 nanometers is coated. And finally, a liquid phase coating method is adopted, the iodine-containing cyclohexane solution passes through the waveguide fiber core, and a layer of AgI film is coated on the metal film 4 to form the dielectric film 5, so that the preparation is finished.
The embodiment provides a manufacturing method of a negative-curvature hollow metal film 4+ dielectric film 5 waveguide, and a core area 3 of the waveguide is used for transmitting mid-infrared light waves. The so-called negative curvature is that the core area of the waveguide is formed by a hollow structure surrounded by a tube/rod array, the structure with the negative curvature is formed by assembling and drawing by a drawing tower, and the film forming process of a metal film 4 and the film forming process of a dielectric film 5 on the inner surface of the waveguide are the same as the plating mode of the traditional circular hollow waveguide.
Example 3:
when the core cladding 2 is structured to include a cladding base 22 and a plurality of arcuate projections 23, this embodiment is used to provide another method of fabricating a hollow core waveguide, as shown in fig. 6, the method comprising the steps of:
s21: manufacturing a fiber core cladding 2 by using a fiber core cladding 2 mold;
s22: placing the fiber core cladding 2 into a substrate 1 to form a second prefabricated rod;
s23: drawing the second preform rod by using a drawing tower to form a second hollow waveguide base tube with the inner surface being a negative curvature surface;
s24: plating a metal film 4 on the inner surface of the second hollow waveguide substrate tube by adopting a liquid phase coating method;
s25: and plating a dielectric film 5 on the metal film 4 by adopting a liquid phase coating method.
Specifically, as shown in fig. 7, a structural diagram of the core-cladding mold used in the present embodiment is given. A core cladding 2 having a negative curvature surface on the inner surface can be formed by adding a material to the mold, molding the material, and winding the molded material.
In addition, the methods for wire drawing and film coating are the same as those described in example 2, and are not described again here.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A mid-infrared hollow core waveguide comprising a substrate, a core cladding and a core region;
the outer surface of the fiber core cladding is attached to the inner surface of the substrate; the fiber core cladding is of a hollow structure, and the inner area of the fiber core cladding is the fiber core area;
the inner surface of the fiber core cladding is a negative curvature surface; a metal film is attached to the inner surface of the fiber core cladding, and a dielectric film is attached to the metal film;
the core region is used for transmitting middle infrared light waves.
2. A hollow core waveguide according to claim 1 wherein the core cladding comprises a plurality of cladding members; the radial section of the cladding member is circular and/or elliptical;
the radial section of the inner surface of the substrate is circular; the cladding members are uniformly arranged along the circumferential direction of the inner surface of the substrate, and two adjacent cladding members are tightly connected.
3. A hollow core waveguide according to claim 2 wherein the cladding member is a cladding tube and/or a cladding rod.
4. A hollow core waveguide according to claim 3 wherein when the cladding members are cladding tubes and cladding rods, the cladding tubes and cladding rods are arranged in any arrangement.
5. A hollow core waveguide according to claim 1 wherein the core cladding comprises a cladding base and a plurality of arcuate projections;
the outer surface of the cladding substrate is attached to the inner surface of the substrate;
the radial section of the inner surface of the cladding substrate is circular; the arc-shaped protrusions are uniformly arranged along the circumferential direction of the inner surface of the cladding substrate, and two adjacent arc-shaped protrusions are tightly connected.
6. A hollow core waveguide according to claim 1 wherein the material of the metal film is gold, silver, copper or aluminium.
7. A hollow core waveguide according to claim 1 wherein the dielectric film is of an inorganic material or a resin material.
8. A hollow core waveguide according to claim 1 wherein the thickness of the dielectric film is determined in accordance with the refractive index and transmission wavelength of the material of the dielectric film.
9. A method of fabricating a hollow core waveguide according to claim 2 comprising the steps of:
drawing the cladding member to a designed outer diameter by using a drawing tower to obtain the drawn cladding member;
placing a plurality of drawn cladding members into a substrate, wherein the drawn cladding members are uniformly arranged along the circumferential direction of the inner surface of the substrate, and two adjacent drawn cladding members are tightly connected to form a first preform;
drawing the first preform rod by using a drawing tower to form a first hollow waveguide base tube with the inner surface being a negative curvature surface;
plating a metal film on the inner surface of the first hollow waveguide substrate tube by adopting a liquid phase coating method;
and plating a dielectric film on the metal film by adopting a liquid phase coating method.
10. A method of fabricating a hollow core waveguide according to claim 5 comprising the steps of:
manufacturing a fiber core cladding by using a fiber core cladding mold;
placing the fiber core cladding into a substrate to form a second preform;
drawing the second preform rod by using a drawing tower to form a second hollow waveguide base tube with the inner surface being a negative curvature surface;
plating a metal film on the inner surface of the second hollow waveguide substrate tube by adopting a liquid phase coating method;
and plating a dielectric film on the metal film by adopting a liquid phase coating method.
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| CN107991733A (en) * | 2016-10-27 | 2018-05-04 | 华东师范大学 | Metal capillary germanium dioxide dielectric film mid and far infrared hollow-core fiber and preparation |
| CN209014757U (en) * | 2018-11-20 | 2019-06-21 | 北京交通大学 | For polarizing the hollow wave guide for keeping THz wave transmission |
| US20200115270A1 (en) * | 2017-03-14 | 2020-04-16 | Nanyang Technological University | Fiber preform, optical fiber and methods for forming the same |
| US20200326473A1 (en) * | 2019-04-10 | 2020-10-15 | IRflex Corporation | Hollow-core fiber with anti-resonant arches and method of manufacturing thereof |
| CN111812772A (en) * | 2020-06-15 | 2020-10-23 | 艾菲博(宁波)光电科技有限责任公司 | Hollow polarization-maintaining anti-resonance optical fiber and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991733A (en) * | 2016-10-27 | 2018-05-04 | 华东师范大学 | Metal capillary germanium dioxide dielectric film mid and far infrared hollow-core fiber and preparation |
| US20200115270A1 (en) * | 2017-03-14 | 2020-04-16 | Nanyang Technological University | Fiber preform, optical fiber and methods for forming the same |
| CN209014757U (en) * | 2018-11-20 | 2019-06-21 | 北京交通大学 | For polarizing the hollow wave guide for keeping THz wave transmission |
| US20200326473A1 (en) * | 2019-04-10 | 2020-10-15 | IRflex Corporation | Hollow-core fiber with anti-resonant arches and method of manufacturing thereof |
| CN111812772A (en) * | 2020-06-15 | 2020-10-23 | 艾菲博(宁波)光电科技有限责任公司 | Hollow polarization-maintaining anti-resonance optical fiber and preparation method thereof |
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Inventor after: Shi Yiwei Inventor after: He Menghui Inventor after: Chang Chao Inventor after: Li Weixuan Inventor after: Zeng Jiafu Inventor after: Chen Zhangxiong Inventor after: Zhu Xiaosong Inventor before: Shi Yiwei Inventor before: He Menghui Inventor before: Li Weixuan Inventor before: Zeng Jiafu Inventor before: Chen Zhangxiong Inventor before: Zhu Xiaosong |
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