CN113340481A - Pressure sensor and preparation method thereof - Google Patents
Pressure sensor and preparation method thereof Download PDFInfo
- Publication number
- CN113340481A CN113340481A CN202110426759.6A CN202110426759A CN113340481A CN 113340481 A CN113340481 A CN 113340481A CN 202110426759 A CN202110426759 A CN 202110426759A CN 113340481 A CN113340481 A CN 113340481A
- Authority
- CN
- China
- Prior art keywords
- conductive
- layer
- flexible substrate
- pressure sensor
- substrate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Abstract
The invention provides a pressure sensor and a preparation method thereof, wherein the pressure sensor comprises a first layer of conductive flexible substrate electrode, a second layer of conductive flexible substrate electrode, an elastic medium array, an adhesive layer and a conductive lead; the first layer of conductive flexible substrate electrodes and the second layer of conductive flexible substrate electrodes are spaced apart by an insulating elastic medium array; the conductive leads are led out from the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode; the sides of the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode are bonded by an adhesive layer. The pressure sensor can be widely applied to the fields of intelligent artificial limbs, high-end robots, virtual reality, wearable sensors and the like.
Description
Technical Field
The invention relates to the field of pressure sensor preparation, in particular to a pressure sensor and a preparation method thereof.
Background
The skin, the tissue with the largest and most important surface area, can assist the human body to sense various external stimuli, including mechanical stimuli, photo-thermal stimuli, electrical stimuli, physiological stimuli, and the like. Mechanical stimulation is the most common stimulation method, and helps the human body to respond to the change of the external environment in time. For the groups with skin damage and obstacles for sensing external force stimulation, the flexible pressure sensor has more and more important application in the aspects of health, medical treatment, sports and the like.
Pressure sensors with different working mechanisms, including capacitive, piezoelectric, frictional and piezoresistive sensors, have been developed according to the principle of signal conversion, wherein capacitive and piezoresistive sensors are more promising due to the simplicity of their manufacturing process, high sensitivity and operational stability, and both types of sensors estimate the magnitude of external stress by capturing the change of the electrical parameter in response through an external circuit, for example, a piezoresistive sensor detects a mechanical signal by capturing the change of contact resistance caused by external stress. A high-performance piezoelectric sensor was prepared by Panasonic electric appliance industry Co., Ltd using a piezoelectric composite material composed of amorphous chlorinated polyethylene, crystalline chlorinated polyethylene and piezoelectric ceramic powder (patent No. CN 1250158A). Wanyubingo et al, a institute of science and materials science, academy of Chinese academy of sciences, developed a flexible capacitive touch sensor (patent No. CN103424214A) which comprises a flexible insulating medium layer prepared from Polydimethylsiloxane (PDMS) or vulcanized silicone Rubber (RTV) and upper and lower conductive capacitive electrode plate layers prepared from silicone grease conductive adhesive. Force-sensitive resistance materials were used by hong Kong textile and garment research center, Inc. to develop a piezoresistive sensor for detecting sole pressure (patent No. CN 102770742A).
The traditional silicon-based pressure sensor has the characteristic that the whole sensor cannot be bent and deformed, so that the pressure sensor is rarely used in the fields of biomedicine and the like. Meanwhile, the complexity of the preparation method, the high preparation cost, the high response characteristic of the used material and other factors seriously limit the application of the flexible intraocular sensor in the fields of attachable equipment, biological robots, biomedical diagnosis and treatment and the like. Many scholars at home and abroad make a great deal of research on the problems, for example, people such as the hong Kong tally university of science and technology propose a new method for processing a fabric strain sensor (patent number: CN 101598529A); methods have been proposed by Happy et al of Qinghua university for improving response characteristics of materials used (patent No.: CN102163687A, CN101118948A)
Although many new preparation and doping methods are proposed for various properties of the selected material at home and abroad at present, the minimum limit and the maximum range of detection are difficult to be considered, the air permeability and the ductility are difficult to be ensured simultaneously, the preparation cost is low, the response speed is high, the size is small and the like, and therefore the actual working environment of the pressure sensor is seriously displayed. With the aging of the population, the demand of pressure sensors which are suitable for wider working environments and have higher detection and comfort performance is increasing.
Disclosure of Invention
The invention provides a pressure sensor which simultaneously ensures air permeability and ductility, low manufacturing cost, high response speed and small volume.
The invention also aims to provide a preparation method of the pressure sensor
In order to achieve the technical effects, the technical scheme of the invention is as follows:
a pressure sensor comprises a first layer of conductive flexible substrate electrode, a second layer of conductive flexible substrate electrode, an elastic medium array, an adhesive layer and a conductive lead; the first layer of conductive flexible substrate electrodes and the second layer of conductive flexible substrate electrodes are spaced apart by an elastic dielectric array; the conductive leads are led out from the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode; the edges of the first layer of conductive flexible substrate electrodes and the second layer of conductive flexible substrate electrodes are encapsulated by an adhesive layer.
Further, the elastic media array is comprised of elastic spacers, the elastic spacer material comprising: polydimethylsiloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum-catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymer.
Further, the elastic spacers may be doped with conductive materials, including but not limited to: zero-dimensional nanomaterials (nanogold spheres, nanocopper spheres, nanogold cubes, nanocopper cubes, and the like); one-dimensional nanowires (nano silver wires, nano copper wires, nano gold wires, carbon nanotubes, etc.); two-dimensional nanomaterials (graphene and its derivatives, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphitic boron nitride, transition metal oxides, metal oxyhalides;); conductive thin films (gold thin films, aluminum thin films, silver thin films, copper thin films, platinum thin films, ITO thin films, etc.); conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ionic gels).
Further, the shape of the elastic spacer includes: pyramidal, hemispherical, pyramidal, cylindrical, cubic.
Further, the substrate material of the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode may be, but is not limited to: textile substrates (gauze, silk, bandages, cotton, linen, etc.), plastic substrates (PET, PEN, PMMA, PC, PU, PI, etc.), elastic substrates (PDMS, Ecoflex, rubber, elastic polyurethane, etc.).
Further, the first layer of conductive flexible substrate electrode and the second layer of conductive flexible substrate electrode may be, but not limited to: zero-dimensional nanomaterials (nanogold spheres, nanogold cubes, and the like), one-dimensional nanowires (nanogold wires, carbon nanotubes, and the like), two-dimensional nanomaterials (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphite boron nitride, transition metal oxides, metal oxyhalides;), conductive films (gold films, aluminum films, silver films, copper films, platinum films, ITO films, and the like), conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ionic gels), liquid metals, and the like.
Further, the conductive lead is any conductive lead that can conduct electricity and has some flexibility, but the resistance does not exceed ten percent of the sensor resistance.
Further, 0.5-2 ml of conductive silver paste is dripped at the tail end of the conductive lead, and the conductive lead is bonded with the substrate of the first layer of conductive flexible substrate electrode and the substrate of the second layer of conductive flexible substrate electrode; the conductive leads are in close contact with the substrates of the first layer of conductive flexible substrate electrodes and the second layer of conductive flexible substrate electrodes through metal sewing, a clamping mode or a conductive adhesive tape.
A method for preparing a pressure sensor comprises the following steps:
s1: preparing Ecoflex mixed solutions I and II and a nano silver wire mixed solution;
s2: uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze, wherein the coating width is 0.5-1.5 mm, and then drying;
s3: uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying;
s4: penetrating a conductive lead through one side of the gauze which is not coated with the Ecoflex mixed solution II, dripping a small amount of conductive silver paste at the contact part of the silver wire and the gauze, and drying;
s5: using a dispensing needle, dropping the Ecoflex mixed solution I on the intersection points of the grids in a certain layer of gauze, and slowly stretching to form an elastic pillar array. Then drying until the elastic strut is obviously deformed by external force, and still rapidly recovering to the original shape when the external force is removed;
s6: the two layers of gauze on both sides of the gauze not connected to the silver wire were sealed with Ecoflex mixed solution I and then dried under pressure in a holding device.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
the invention uses the Ecoflex elastic column array to support the upper and lower conductive layers, and different elastic column shapes, sizes and array sizes can meet the requirements of different measurement ranges and sensitivities. And the size of the Ecoflex elastic column array with wider full measurement range and higher sensitivity can be found through debugging and calibration. When the device is not stressed, the resistance is close to infinity due to the supporting effect of the Ecoflex elastic column array, and when the device is stressed, the resistance is a finite value, so that the minimum limit of measurement is ensured; the flexible substrate electrode adopts gauze or elastic cloth, so that the invention has certain extensibility and can be normally used after being stretched. Meanwhile, due to the net structure of the silk fabric, the fabric has extremely high air permeability, meets the requirements of some biological and medical fields, and can be worn for a long time; the invention changes the shape of the middle support elastic column array under the external stress to change the conductive loop, and the shape of the elastic column array is restored to the original state when the external force is removed. The elastic column formed by the prepared Ecoflex mixed solution has small elastic coefficient and Young modulus, so that the elastic column can be quickly restored to the initial state. When the external force is too large, the elastic column can ensure that the Ecoflex cannot be broken or cracked due to too large deformation through the change in the transverse direction and the longitudinal direction, so that the extremely long service life and the overload capacity of the device are ensured; the wearable flexible pressure sensor designed by the invention is a measuring unit, but a sensor unit array can be obtained by repeating the operation method. The sensor unit array may be fabricated, but is not limited to, in conjunction with a dispenser or 3D printer. The sensor can be worn on a human body and measures physical and physiological signals such as pulse, finger bending degree and the like.
Drawings
FIG. 1 is a perspective view of the pressure sensor of the present invention;
FIG. 2 is a side view of the pressure sensor of the present invention;
FIG. 3 is a flow chart of a method of making a pressure sensor of the present invention;
FIG. 4 is a response plot of the sensitivity of the pressure sensor array of the present invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent;
for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product;
it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
As shown in fig. 1-2, a pressure sensor includes a first layer of conductive flexible substrate electrodes 1 and a second layer of conductive flexible substrate electrodes 2, an elastic medium array 3, an adhesive layer 4, and conductive leads 5; the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2 are separated by an insulating elastic medium array 3; the conductive lead 5 is led out from the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2; the edges of the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2 are encapsulated by an adhesive layer 4.
The elastic medium array 3 is composed of elastic spacers, the elastic spacer material comprising: polydimethylsiloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum-catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymer.
The elastomeric spacers may be doped with conductive materials including, but not limited to: zero-dimensional nanomaterials (nanogold spheres, nanocopper spheres, nanogold cubes, nanocopper cubes, and the like); one-dimensional nanowires (nano silver wires, nano copper wires, nano gold wires, carbon nanotubes, etc.); two-dimensional nanomaterials (graphene and its derivatives, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphitic boron nitride, transition metal oxides, metal oxyhalides;); conductive thin films (gold thin films, aluminum thin films, silver thin films, copper thin films, platinum thin films, ITO thin films, etc.); conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ionic gels).
The shape of the elastic spacer includes: pyramidal, hemispherical, pyramidal, cylindrical, cubic.
The substrate materials of the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2 can be, but are not limited to: textile substrates (gauze, silk, bandages, cotton, linen, etc.), plastic substrates (PET, PEN, PMMA, PC, PU, PI, etc.), elastic substrates (PDMS, Ecoflex, rubber, elastic polyurethane, etc.).
A first layer of conductive flexible substrate electrode 1 and a second layer of conductive flexible substrate electrode 2, the electrodes of which may be but are not limited to: zero-dimensional nanomaterials (nanogold spheres, nanogold cubes, and the like), one-dimensional nanowires (nanogold wires, carbon nanotubes, and the like), two-dimensional nanomaterials (graphene and derivatives thereof, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transition metal sulfides, graphite boron nitride, transition metal oxides, metal oxyhalides;), conductive films (gold films, aluminum films, silver films, copper films, platinum films, ITO films, and the like), conductive polymers (PEDOT: PSS, PPY, hydrogels, organic ionic gels), liquid metals, and the like.
The conductive lead 5 is any conductive lead that can conduct electricity and has some flexibility but a resistance that does not exceed ten percent of the sensor resistance.
0.5-2 ml of conductive silver paste is dripped at the tail end of the conductive lead 5, and the conductive lead 5 is bonded with the substrates of the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2; the conductive lead 5 is closely contacted with the substrates of the first layer of conductive flexible substrate electrode 1 and the second layer of conductive flexible substrate electrode 2 through metal sewing, a clamping mode or a conductive adhesive tape.
As shown in fig. 3, a method for manufacturing a pressure sensor includes the following steps:
s1: preparing Ecoflex mixed solutions I and II and a nano silver wire mixed solution;
s2: uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze, wherein the coating width is 0.5-1.5 mm, and then drying;
s3: uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying;
s4: penetrating a conductive lead through one side of the gauze which is not coated with the Ecoflex mixed solution II, dripping a small amount of conductive silver paste at the contact part of the silver wire and the gauze, and drying;
s5: dripping the Ecoflex mixed solution I on the intersection points of grids in a certain layer of gauze by using a dispensing needle, and slowly stretching to form an elastic strut array; then drying until the elastic strut is obviously deformed by external force, and still rapidly recovering to the original shape when the external force is removed;
s6: the two layers of gauze on both sides of the gauze not connected to the silver wire were sealed with Ecoflex mixed solution I and then dried under pressure in a holding device.
The preparation method of the Ecoflex mixed solution I in this example:
1) mixing Ecoflex A and Ecoflex B in a volume ratio of 1:1 at room temperature in air;
2) taking 4mL of each of the two solutions;
3) implanting the mixed solution into a rotation-revolution instrument, firstly revolving for 60 seconds, and then revolving for 30 seconds;
4) and putting the fully mixed solution into a vacuum box, and standing for 10s after completely vacuumizing.
The preparation method of the Ecoflex mixed solution II in this example:
1) mixing Ecoflex A, Ecoflex B, a thickening agent and a retarder in a certain ratio at room temperature in the air;
2) mixing Ecoflex A, Ecoflex B and a thickening agent according to the volume ratio of 4:4:0.1 without or with reduced retarder;
3) implanting the mixed solution into a rotation-revolution instrument, firstly revolving for 60 seconds, and then revolving for 30 seconds;
4) and putting the fully mixed solution into a vacuum box, and standing for 10s after completely vacuumizing.
In this embodiment, the preparation method of the nano silver wire mixed solution includes:
1) preparing a nano-silver wire mixed solution, and mixing 0.5% of hydroxypropyl methyl cellulose (HPMC), a photoinitiator, a nano-silver wire and absolute ethyl alcohol at a mass ratio of 4:2:18:27 at room temperature in air to prepare the nano-silver wire mixed solution;
2) putting the mixed solution into a rotation-revolution instrument, firstly revolving for 60s, and then revolving for 30 s;
3) and putting the fully mixed solution in a vacuum box, and standing for 60s after completely vacuumizing.
And (3) testing the effect:
as shown in FIG. 4, the performance of some of the sensing units is tested using a sensor sensing array
1. Slowly placing standard weights with different weights under a quasi-steady state, recording the piezoresistive response of the sensor, and drawing a sensitivity-pressure response curve;
2. under the conditions that the applied stress is 0.98kPa and the applied pressure frequency is 1.8Hz, the contact pressure of the human body is simulated, and the stability of the service life is tested;
3. recording the corresponding pressure resistance of the flexible sensor under the pressure action of the same frequency and different intensities, simulating the impact of different intensities when the pressure intensity is 15Pa,30Pa,125Pa,1.15kPa and 2.3kPa, and testing the response capability of the sensor to the stress intensity;
4. under the pressure action of different frequencies and the same intensity, recording the piezoresistive correspondence of the flexible sensor, simulating the impact of different frequencies when the pressure applying strong frequencies are respectively 2.5Hz,9.8Hz,14.8Hz and 24.6Hz, and testing the stable response capability of the sensor to the frequency;
the flexible pressure sensor is worn on the wrist to measure extremely weak physiological signals such as pulse, and because all parts of the sensor are flexible, the flexible pressure sensor can be well attached to the epidermis of a human body through self deformation, and because of good air permeability, a wearer has extremely comfortable experience. Transmitting the transmitted resistance change electrical signal to a terminal, and drawing a data graph; the flexible pressure sensor disclosed by the invention has high sensitivity to load and is suitable for pressure tests in different environments. Especially, under the common pressure condition in life, the sensitivity shows nearly linear response, and the method has wide prospect in the field of medical treatment and health. Under the load action with the same strength and increased frequency, the piezoresistive response strength does not show obvious change, and the response frequency and the load action frequency do not have obvious asynchronism and frequency difference, so that the stability of the sensor is better, the sensor is suitable for testing pressure for a long time, and the sensor can be used for the aspects of sports, medical science, health monitoring and the like; the employed Ecoflex elastic pillar array and the flexible silk fabric substrate electrode have certain tensile property, and can provide a foundation for measuring tensile stress.
By combining the examples, the flexible pressure sensor detection device and the sensing device provided by the invention have the advantages of reasonable design, excellent performance and wide application range, the sensors are easy to integrate, the external stress change can be monitored at any time, and whether physiological and medical problems exist in a wearer or not can be effectively judged.
The same or similar reference numerals correspond to the same or similar parts;
the positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the present patent;
it should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A pressure sensor is characterized by comprising a first layer of conductive flexible substrate electrode (1), a second layer of conductive flexible substrate electrode (2), an elastic medium array (3), an adhesive layer (4) and a conductive lead (5); the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) are separated by an elastic medium array (3); the conductive lead (5) is led out from the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2); the edges of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) are encapsulated by an adhesive layer (4).
2. A pressure sensor according to claim 1, wherein the array of elastic media (3) is comprised of an elastic spacer material comprising: polydimethylsiloxane, silicone rubber, polyurethane, polyethylene terephthalate, polyimide, platinum-catalyzed silicone rubber, polyethylene naphthalate, epoxy resin, polyethylene oxide, styrene-butadiene block copolymer.
3. The pressure sensor of claim 2, wherein the elastic spacer is doped with a conductive material, the conductive material comprising: zero-dimensional nano material, one-dimensional nano wire, two-dimensional nano material, conductive film and conductive polymer.
4. The pressure sensor of claim 2, wherein the shape of the resilient spacer comprises: pyramidal, hemispherical, pyramidal, cylindrical, cubic.
5. A pressure sensor according to claim 4, characterized in that the substrate material of the first (1) and second (2) layer of electrically conductive flexible substrate electrodes comprises: a fabric substrate, a plastic substrate, and an elastic substrate.
6. A pressure sensor according to claim 5, characterized in that the electrode material of the first (1) and second (2) layer of electrically conductive flexible substrate electrodes comprises: zero-dimensional nano material, one-dimensional nano wire, two-dimensional nano material, conductive film, conductive polymer and liquid metal.
7. A pressure sensor according to claim 6, characterized in that the conductive lead (5) is any conductive lead that is conductive and flexible, but has a resistance not exceeding ten percent of the sensor resistance.
8. The pressure sensor according to claim 7, characterized in that the conductive lead (5) is bonded to the substrate of the first layer of conductive flexible substrate electrode (1) and the second layer of conductive flexible substrate electrode (2) by dispensing 0.5-2 ml of conductive silver paste on the end of the conductive lead (5).
9. A pressure sensor according to claim 8, characterized in that the conductive leads (5) are in close contact with the substrate of the first layer of conductive flexible substrate electrodes (1) and the second layer of conductive flexible substrate electrodes (2) by means of metal stitching, clamping or conductive tape.
10. A method of manufacturing a pressure sensor according to any of claims 1 to 8, comprising the steps of:
s1: preparing Ecoflex mixed solutions I and II and a nano silver wire mixed solution;
s2: uniformly coating the Ecoflex mixed solution II on two opposite sides of the upper and lower layers of gauze, wherein the coating width is 0.5-1.5 mm, and then drying;
s3: uniformly coating the nano silver wire mixed solution on two layers of gauze, and then drying;
s4: penetrating a conductive lead through one side of the gauze which is not coated with the Ecoflex mixed solution II, dripping a small amount of conductive silver paste at the contact part of the silver wire and the gauze, and drying;
s5: dripping the Ecoflex mixed solution I on the intersection points of grids in a certain layer of gauze by using a dispensing needle, and slowly stretching to form an elastic strut array; then drying until the elastic strut is obviously deformed by external force, and still rapidly recovering to the original shape when the external force is removed;
s6: the two layers of gauze on both sides of the gauze not connected to the silver wire were sealed with Ecoflex mixed solution I and then dried under pressure in a holding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110426759.6A CN113340481B (en) | 2021-04-20 | 2021-04-20 | Pressure sensor and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110426759.6A CN113340481B (en) | 2021-04-20 | 2021-04-20 | Pressure sensor and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113340481A true CN113340481A (en) | 2021-09-03 |
| CN113340481B CN113340481B (en) | 2023-05-30 |
Family
ID=77468216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110426759.6A Active CN113340481B (en) | 2021-04-20 | 2021-04-20 | Pressure sensor and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113340481B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820048A (en) * | 2021-09-30 | 2021-12-21 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN116086661A (en) * | 2023-04-11 | 2023-05-09 | 柔微智能科技(苏州)有限公司 | Preparation method of pressure sensitive material, pressure sensor and sensing array assembly |
| CN113820048B (en) * | 2021-09-30 | 2024-04-26 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0701129D0 (en) * | 2007-01-19 | 2007-02-28 | Wound Solutions Ltd | A flexible pressure sensor |
| CN105181187A (en) * | 2015-09-09 | 2015-12-23 | 沈阳仪表科学研究院有限公司 | Silicon-based pressure sensor and manufacturing method thereof |
| CN105858598A (en) * | 2016-04-06 | 2016-08-17 | 西安交通大学 | Manufacturing and controlling method of flexible micro-driver for controlling micro-nano particles |
| WO2016153155A1 (en) * | 2015-03-23 | 2016-09-29 | 울산과학기술원 | Biomimetic based pressure sensor manufacturing method and pressure sensor manufactured thereby |
| CN106197772A (en) * | 2016-07-06 | 2016-12-07 | 无锡格菲电子薄膜科技有限公司 | A kind of pliable pressure sensor and preparation method thereof |
| CN106370327A (en) * | 2016-10-08 | 2017-02-01 | 中国科学院深圳先进技术研究院 | Flexible pressure sensor and manufacturing method thereof |
| CN107644806A (en) * | 2017-08-30 | 2018-01-30 | 中山大学 | The graphical preparation method of the orderly self assembly of metal oxide and metal-oxide film |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN208350249U (en) * | 2018-05-10 | 2019-01-08 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor |
| CN111387645A (en) * | 2020-04-16 | 2020-07-10 | 北京纳米能源与系统研究所 | Intelligent insole capable of monitoring plantar pressure in real time |
-
2021
- 2021-04-20 CN CN202110426759.6A patent/CN113340481B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0701129D0 (en) * | 2007-01-19 | 2007-02-28 | Wound Solutions Ltd | A flexible pressure sensor |
| WO2016153155A1 (en) * | 2015-03-23 | 2016-09-29 | 울산과학기술원 | Biomimetic based pressure sensor manufacturing method and pressure sensor manufactured thereby |
| CN105181187A (en) * | 2015-09-09 | 2015-12-23 | 沈阳仪表科学研究院有限公司 | Silicon-based pressure sensor and manufacturing method thereof |
| CN105858598A (en) * | 2016-04-06 | 2016-08-17 | 西安交通大学 | Manufacturing and controlling method of flexible micro-driver for controlling micro-nano particles |
| CN106197772A (en) * | 2016-07-06 | 2016-12-07 | 无锡格菲电子薄膜科技有限公司 | A kind of pliable pressure sensor and preparation method thereof |
| CN106370327A (en) * | 2016-10-08 | 2017-02-01 | 中国科学院深圳先进技术研究院 | Flexible pressure sensor and manufacturing method thereof |
| CN107644806A (en) * | 2017-08-30 | 2018-01-30 | 中山大学 | The graphical preparation method of the orderly self assembly of metal oxide and metal-oxide film |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN208350249U (en) * | 2018-05-10 | 2019-01-08 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor |
| CN111387645A (en) * | 2020-04-16 | 2020-07-10 | 北京纳米能源与系统研究所 | Intelligent insole capable of monitoring plantar pressure in real time |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113820048A (en) * | 2021-09-30 | 2021-12-21 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN113820048B (en) * | 2021-09-30 | 2024-04-26 | 中国科学院重庆绿色智能技术研究院 | Conformal flexible mechanical sensing network and printing preparation method thereof |
| CN116086661A (en) * | 2023-04-11 | 2023-05-09 | 柔微智能科技(苏州)有限公司 | Preparation method of pressure sensitive material, pressure sensor and sensing array assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113340481B (en) | 2023-05-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Afsarimanesh et al. | A review on fabrication, characterization and implementation of wearable strain sensors | |
| Xia et al. | Robust and flexible strain sensors based on dual physically cross-linked double network hydrogels for monitoring human-motion | |
| Wang et al. | Polyurethane/cotton/carbon nanotubes core-spun yarn as high reliability stretchable strain sensor for human motion detection | |
| Trung et al. | Flexible and stretchable physical sensor integrated platforms for wearable human‐activity monitoringand personal healthcare | |
| Chen et al. | Highly stretchable fiber-shaped e-textiles for strain/pressure sensing, full-range human motions detection, health monitoring, and 2D force mapping | |
| Rossi et al. | Electroactive fabrics and wearable biomonitoring devices | |
| Zhou et al. | All-nanofiber network structure for ultrasensitive piezoresistive pressure sensors | |
| Kim et al. | Robust and scalable three-dimensional spacer textile pressure sensor for human motion detection | |
| Zhu et al. | Highly-stretchable porous thermoplastic polyurethane/carbon nanotubes composites as a multimodal sensor | |
| Yan et al. | Weaved piezoresistive triboelectric nanogenerator for human motion monitoring and gesture recognition | |
| CN109724723B (en) | Textile material-based wearable pressure sensor and preparation method thereof | |
| Zhu et al. | Self-powered and multi-mode flexible sensing film with patterned conductive network for wireless monitoring in healthcare | |
| Jiang et al. | Stretchable strain and temperature sensor based on fibrous polyurethane film saturated with ionic liquid | |
| CN110411623B (en) | High-sensitivity flexible piezoresistive sensor and preparation method and application thereof | |
| CN110082012B (en) | Flexible pressure sensor and manufacturing method thereof | |
| Chen et al. | Multifunctional iontronic sensor based on liquid metal-filled ho llow ionogel fibers in detecting pressure, temperature, and proximity | |
| You et al. | Flexible porous Gelatin/Polypyrrole/Reduction graphene oxide organohydrogel for wearable electronics | |
| Liu et al. | All textile-based robust pressure sensors for smart garments | |
| Wang et al. | Skin-inspired tactile sensor based on gradient pore structure enable broad range response and ultrahigh pressure resolution | |
| Han et al. | Sensitive, stretchable, and breathable pressure sensors based on medical gauze integrated with silver nanowires and elastomers | |
| CN113340481B (en) | Pressure sensor and preparation method thereof | |
| Yao et al. | Poly (vinyl alcohol)/phosphoric acid gel electrolyte@ polydimethylsiloxane sponge for piezoresistive pressure sensors | |
| Lin et al. | A flexible pressure sensor based on bimaterial conductivity-conversion mechanism | |
| Ma et al. | Stretchable porous conductive hydrogel films prepared by emulsion template method as flexible sensors | |
| Zhao et al. | Skin-Inspired Highly Sensitive Tactile Sensors with Ultrahigh Resolution over a Broad Sensing Range |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |