CN113324949B - 一种基于纳米同轴波导管的光纤氢气传感器及其制备方法 - Google Patents
一种基于纳米同轴波导管的光纤氢气传感器及其制备方法 Download PDFInfo
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- CN113324949B CN113324949B CN202110629305.9A CN202110629305A CN113324949B CN 113324949 B CN113324949 B CN 113324949B CN 202110629305 A CN202110629305 A CN 202110629305A CN 113324949 B CN113324949 B CN 113324949B
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- optical fiber
- hydrogen sensor
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- hydrogen
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 83
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 83
- 239000013307 optical fiber Substances 0.000 title claims abstract description 72
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims 9
- 238000002360 preparation method Methods 0.000 title abstract description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 70
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000000737 periodic effect Effects 0.000 claims abstract description 16
- 239000004005 microsphere Substances 0.000 claims description 64
- 239000004793 Polystyrene Substances 0.000 claims description 58
- 229920002223 polystyrene Polymers 0.000 claims description 58
- 239000000835 fiber Substances 0.000 claims description 32
- 238000005530 etching Methods 0.000 claims description 29
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 22
- 239000000243 solution Substances 0.000 claims description 20
- 230000007797 corrosion Effects 0.000 claims description 18
- 238000005260 corrosion Methods 0.000 claims description 18
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- -1 polyethylene Polymers 0.000 claims description 7
- 239000004698 Polyethylene Substances 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 230000004907 flux Effects 0.000 claims description 6
- 239000011259 mixed solution Substances 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- 229920000573 polyethylene Polymers 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000002090 nanochannel Substances 0.000 claims 2
- 150000002431 hydrogen Chemical class 0.000 abstract description 43
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 30
- 230000035945 sensitivity Effects 0.000 abstract description 16
- 238000001514 detection method Methods 0.000 abstract description 14
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
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CN106053393A (zh) * | 2016-05-18 | 2016-10-26 | 南京信息工程大学 | 一种基于纳米共轴腔结构和表面等离激元效应的相对湿度传感器件及其制作方法 |
US10725373B1 (en) * | 2016-10-21 | 2020-07-28 | Iowa State University Research Foundation, Inc. | Nano-patterning methods including: (1) patterning of nanophotonic structures at optical fiber tip for refractive index sensing and (2) plasmonic crystal incorporating graphene oxide gas sensor for detection of volatile organic compounds |
CN108956530B (zh) * | 2018-04-15 | 2021-05-11 | 桂林电子科技大学 | 一种基于布拉格光纤端面金孔阵列结构的折射率传感器 |
US10989867B2 (en) * | 2019-04-15 | 2021-04-27 | The Curators Of The University Of Missouri | Microsphere based patterning of metal optic/plasmonic sensors including fiber based sensors |
CN110389122B (zh) * | 2019-09-03 | 2022-05-20 | 中国工程物理研究院流体物理研究所 | 一种基于超材料的荧光增强型全光纤氢气传感器 |
CN111208059B (zh) * | 2020-02-11 | 2022-09-30 | 南京信息工程大学 | 基于核/壳纳米周期性线阵列等离子体超材料的光纤氢气传感器 |
CN111307726B (zh) * | 2020-03-11 | 2022-06-24 | 南京信息工程大学 | 光纤复合模式高灵敏度丙酮传感器及其制备方法 |
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Effective date of registration: 20231116 Address after: Factory Area No. 7, Fenghua Industrial Park, No. 80 9th Street, Tianjin Development Zone, Binhai New Area, Tianjin, 300000 Patentee after: BOYI (TIANJIN) PNEUMATIC TECHNOLOGY INSTITUTE Co.,Ltd. Address before: 230000 floor 1, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee before: Dragon totem Technology (Hefei) Co.,Ltd. Effective date of registration: 20231116 Address after: 230000 floor 1, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee after: Dragon totem Technology (Hefei) Co.,Ltd. Address before: 210044 No. 219 Ning six road, Jiangbei new district, Nanjing, Jiangsu Patentee before: Nanjing University of Information Science and Technology |