CN113324399B - Device and method for removing residual liquid in acid exhaust pipeline and acid exhaust system - Google Patents
Device and method for removing residual liquid in acid exhaust pipeline and acid exhaust system Download PDFInfo
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- CN113324399B CN113324399B CN202110203799.4A CN202110203799A CN113324399B CN 113324399 B CN113324399 B CN 113324399B CN 202110203799 A CN202110203799 A CN 202110203799A CN 113324399 B CN113324399 B CN 113324399B
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- acid exhaust
- exhaust pipeline
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/04—Heating arrangements using electric heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The invention provides a device and a method for removing residual liquid in an acid exhaust pipeline and an acid exhaust system, wherein the device comprises the following components: the heating part is fixedly arranged on the acid exhaust pipeline and is used for heating the acid exhaust pipeline so as to vaporize residual liquid in the acid exhaust pipeline; the heating part is electrically connected with the heating switch. According to the invention, the heating part is used for heating the acid exhaust pipeline, so that the residual liquid in the acid exhaust pipeline is vaporized, the vaporized residual liquid is discharged along the acid exhaust pipeline, and then all the residual liquid can be discharged, so that no residual liquid exists in the acid exhaust pipeline, and the residual liquid in the acid exhaust pipeline can be removed.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a device and a method for removing residual liquid in an acid exhaust pipeline and an acid exhaust system.
Background
A400 normal pressure diffusion furnace tube's board acid exhaust system includes: an acid exhaust pipe, a residual liquid discharge plug, a U-shaped pipe and a quartz exhaust pipe. The height from the bottom of the U-shaped pipe to the top end of the acid exhaust pipeline is about 2 meters. In semiconductor manufacturing processes, the wet oxygen process time in many menu process flows is up to 255 minutes, with hydrogen evolution of 5.6 liters/minute and oxygen evolution of 4 liters/minute, and the simultaneous use of ethylene dichloride, ethylene dichloride evolution of 300 milliliters/minute, is also required during the wet oxygen process. When the process temperature reaches about 1000 ℃, dichloroethylene is decomposed into hydrogen chloride gas, and the hydrogen chloride gas is mixed with the residual water vapor of the process to become hydrochloric acid. Hydrochloric acid can corrode an acid exhaust pipeline and flow back to a U-shaped pipe of the machine acid exhaust system, when liquid is excessively accumulated in the U-shaped pipe, process residual gas cannot be exhausted through the acid exhaust pipeline, so that a flow detection sensor of the acid exhaust pipeline is triggered, and then menu process flow is stopped, and products are scrapped.
Disclosure of Invention
The invention aims to overcome the defects that when excessive liquid is accumulated in a U-shaped pipe in the prior art, process residual gas cannot be discharged through an acid exhaust pipe, so that a flow detection sensor of the acid exhaust pipe is triggered, menu process flow is stopped, and products are scrapped.
The invention solves the technical problems by the following technical scheme:
the invention provides a device for removing residual liquid in an acid exhaust pipeline, which comprises:
the heating part is fixedly arranged on the acid exhaust pipeline and is used for heating the acid exhaust pipeline so as to vaporize residual liquid in the acid exhaust pipeline;
and a heating switch electrically connected with the heating part.
Preferably, the removing device further comprises:
the temperature detector is fixedly arranged on the acid exhaust pipeline and is electrically connected with the temperature controller, and the temperature controller is also electrically connected with the heating switch;
the temperature detector is used for collecting temperature signals and sending the temperature signals to the temperature controller;
the temperature controller is used for controlling the heating switch to be opened or closed according to the temperature signal.
Preferably, the temperature controller is specifically configured to:
analyzing the temperature signal into a corresponding temperature value;
when the temperature value is larger than a first preset temperature threshold value, the heating switch is controlled to be turned off;
and when the temperature value is smaller than or equal to a second preset temperature threshold, controlling the heating switch to be closed, wherein the second preset temperature threshold is smaller than the first preset temperature threshold.
Preferably, the heating part is a heating belt, a heating bag or a heating ring.
Preferably, the temperature detector comprises a thermocouple.
The invention also provides a method for removing residual liquid in the acid exhaust pipeline, which comprises the following steps:
and removing the residual liquid in the acid exhaust pipeline by the device for removing the residual liquid in the acid exhaust pipeline.
The invention also provides an acid exhaust system, which comprises an acid exhaust pipeline, and further comprises:
the device for removing residual liquid in the acid exhaust pipeline.
Preferably, the acid exhaust duct comprises a first acid exhaust duct and a second acid exhaust duct;
the first acid exhaust pipeline comprises a vertical part and a transverse part, one end of which is communicated with the top end of the vertical part;
the heating portion covers a first preset position range of the vertical portion and a second preset position range of the lateral portion.
Preferably, the transverse portion is inclined downward by a predetermined angle from one end communicating with the vertical portion to a starting end.
Preferably, the acid exhaust system further comprises:
the second acid exhaust pipeline is arranged between the bottom end of the first acid exhaust pipeline and the top end of one vertical section of the U-shaped pipeline.
The invention has the positive progress effects that: the acid exhaust pipeline is heated through the heating part, so that residual liquid in the acid exhaust pipeline is vaporized, the vaporized residual liquid is discharged along the acid exhaust pipeline, and the residual liquid in the acid exhaust pipeline can be removed. Therefore, the invention can prevent residual liquid from accumulating in the U-shaped pipe, and avoid the risk of scrapping products caused by stopping menu process flow due to triggering of the acid exhaust pipeline flow detection sensor.
Drawings
Fig. 1 is a schematic structural view of a device for removing residual liquid in an acid exhaust duct according to embodiment 1 of the present invention.
Fig. 2 is a schematic diagram showing the structure of an acid exhaust system according to embodiment 3 of the present invention.
Detailed Description
The invention is further illustrated by means of the following examples, which are not intended to limit the scope of the invention.
Example 1
The embodiment provides a device for removing residual liquid in an acid exhaust pipeline. Referring to fig. 1, the removing apparatus includes:
a heating part 2 fixed on the acid exhaust pipeline 1, and a heating switch 3 electrically connected with the heating part 2. Wherein, the heating part 2 is used for heating the acid exhaust pipeline 1 to vaporize the residual liquid in the acid exhaust pipeline 1, and the heating switch 3 is used for controlling the heating part 2 to start or stop heating.
In particular, in order to realize the temperature self-adaptive adjustment, the removing device further comprises: a temperature detector 4 fixedly arranged on the acid exhaust pipeline 1 and a temperature controller 5.
The temperature detector 4 is electrically connected with the temperature controller 5, and the temperature controller 5 is also electrically connected with the heating switch 3. Wherein, temperature detector 4 is used for gathering the temperature signal in real time and sends the temperature signal who gathers to temperature controller 5. The temperature controller 5 is used for controlling the opening or closing of the heating switch according to the received temperature signal.
Specifically, after receiving the temperature signal, the temperature controller analyzes the temperature signal into a corresponding temperature value, and when the temperature value is greater than a first preset temperature threshold, controls the heating switch 3 to be turned off, so that the heating part 2 stops heating.
In specific implementation, the temperature controller 5 is further configured to control the heating switch 3 to be turned on when the temperature value is less than or equal to a second preset temperature threshold, so that the heating portion 2 starts heating or re-heats. It should be appreciated that the second preset temperature threshold is less than the first preset temperature threshold.
Preferably, the first preset temperature threshold is 125 ℃ and the second preset temperature threshold is 105 ℃, so that the temperature of the outer wall of the acid exhaust pipeline 1 is controlled to be about 120 ℃ to avoid liquefying residual gas in the pipeline.
In particular, the heating unit 2 may be a heating belt, a heating pack, or a heating ring. Of course, the present invention is not limited to the specific structure of the heating portion 2, and may take any other suitable form.
Preferably, the heating part 2 is a heating belt, which is fixed to the acid exhaust duct by winding, as shown in fig. 1. Specifically, the heating unit 2 is a glass fiber heating belt, and parameters of the glass fiber heating belt are as follows:
| width of (L) | Power per meter | Length of |
| 30mm (millimeter) | 100 Watts/meter | 5 m |
The appropriate heating portion 2 may be selected according to actual needs including, but not limited to, the type and power requirements of the heating portion 2.
In the present embodiment, the heating part 2 of suitable power may be selected so that the temperature value of the acid exhaust duct does not exceed 150 degrees celsius in the case where the heating part 2 is continuously heated even if the thermostat 5 fails.
In specific implementation, the temperature detector 4 can be implemented by a thermocouple. Of course, the invention is not limited to thermocouples and any other suitable temperature detector may be used.
Preferably, the removal device further comprises a leakage switch 6. The temperature controller 5 is electrically connected with the leakage switch 6, and the leakage switch 6 is used for performing power-off protection when leakage occurs.
The device for removing residual liquid in the acid exhaust pipeline of the embodiment heats the acid exhaust pipeline through the heating part, so that the residual liquid in the acid exhaust pipeline is vaporized, the vaporized residual liquid is discharged along the acid exhaust pipeline, and the residual liquid in the acid exhaust pipeline can be removed. Therefore, the invention can prevent residual liquid from accumulating in the U-shaped pipe, and avoid the risk of scrapping products caused by stopping menu process flow due to triggering of the acid exhaust pipeline flow detection sensor.
Example 2
The embodiment provides a method for removing residual liquid in an acid exhaust pipeline, which comprises the following steps:
the residual liquid in the acid vent pipe was removed by the removing device for the residual liquid in the acid vent pipe in example 1.
The specific implementation process is as follows: the temperature signal of the acid exhaust pipeline 1 is acquired in real time through the temperature detector 4 and is sent to the temperature controller 5, after the temperature controller 5 receives the temperature signal, the temperature signal is firstly analyzed into a corresponding temperature value, and then when the temperature value is larger than a first preset temperature threshold value, the heating switch 3 is controlled to be turned off, so that the heating part 2 stops heating; when the temperature value is equal to or lower than the second preset temperature threshold value, the heating switch 3 is controlled to be closed so as to enable the heating part 2 to heat again. Thereby, the temperature of the acid vent pipe can be kept heated to between the first preset temperature threshold and the second preset temperature threshold.
According to the method for removing the residual liquid in the acid exhaust pipeline, the acid exhaust pipeline is heated through the heating part, so that the residual liquid in the acid exhaust pipeline is vaporized, the vaporized residual liquid is discharged along the acid exhaust pipeline, and the residual liquid in the acid exhaust pipeline is removed. Therefore, the invention can prevent residual liquid from accumulating in the U-shaped pipe, and avoid the risk of scrapping products caused by stopping menu process flow due to triggering of the acid exhaust pipeline flow detection sensor.
Example 3
The present embodiment provides an acid exhaust system. Referring to fig. 2, the acid vent system includes an acid vent pipe 1, and the acid vent system further includes: the apparatus for removing residual liquid in an acid vent line according to example 1.
In particular, the acid exhaust duct 1 includes a first acid exhaust duct 101 disposed outside a machine (not shown) and a second acid exhaust duct 102 disposed inside the machine. Wherein the first acid exhaust duct 101 includes a vertical portion 1011 and a lateral portion 1012 having one end communicating with the top end of the vertical portion 1011.
In the present embodiment, the heating portion 2 covers a first preset position range of the vertical portion 1011 and a second preset position range of the lateral portion 1012. Preferably, the first predetermined position range is the entire length of the vertical portion 1011 and the second predetermined position is about 30 cm of the length of the lateral portion 1012.
In practice, the transverse portion 1012 is inclined downward at a predetermined angle (e.g., greater than 3 degrees) from the end communicating with the vertical portion 1011 as the starting end, so that residual liquid is less likely to collect in the transverse portion 1012.
In particular embodiments, the acid exhaust system further comprises:
the U-shaped pipeline 7 is arranged in the machine table, wherein the second acid exhaust pipeline 102 is arranged between the bottom end of the first acid exhaust pipeline 101 and the top end of one vertical section of the U-shaped pipeline 7, and air is introduced into the top end of the other vertical section of the U-shaped pipeline 7 so as to form negative pressure in the pipeline.
The acid exhaust system of the embodiment heats the acid exhaust pipeline through the heating part, so that residual liquid in the acid exhaust pipeline is vaporized, and the vaporized residual liquid is discharged along the acid exhaust pipeline, so that the residual liquid in the U-shaped pipeline is reduced, and even no residual liquid in the U-shaped pipeline is achieved. Therefore, the invention can prevent residual liquid from accumulating in the U-shaped pipe, and avoid the risk of scrapping products caused by stopping menu process flow due to triggering of the acid exhaust pipeline flow detection sensor.
In addition, the acid exhaust system of the present embodiment further includes: liquid discharge hole 9, plug 10, exhaust pipe 11 and acid exhaust manifold 12. Wherein, liquid discharge hole 9 opens in the bottom of U-shaped pipeline 7, and the one end of blast pipe 11 communicates with another vertical section of U-shaped pipeline 7, and the other end of blast pipe 11 communicates with the process cavity of diffusion furnace tube, and sour exhaust house steward 12 communicates with the other end of transverse portion 1012. The liquid discharge hole 9 is used to discharge the residual liquid in the U-shaped pipe 7 when the plug 10 is pulled out, and the discharge of the residual liquid through the liquid discharge hole 9 requires careful operation due to the complicated connection relationship of the U-shaped pipe 7 and the slender exhaust pipe 11. In the case where the residual liquid in the U-shaped pipe is reduced, the number of operations of discharging the residual liquid through the liquid discharge hole 9 can be reduced; in the case where there is no residual liquid in the U-shaped pipe, the operation of discharging the residual liquid through the liquid discharge hole 9 can be dispensed with.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.
Claims (5)
1. An acid exhaust system, comprising: the acid exhaust pipeline and the device for removing residual liquid in the acid exhaust pipeline are arranged in the diffusion furnace;
the acid exhaust pipeline comprises a first acid exhaust pipeline and a second acid exhaust pipeline;
the first acid exhaust pipeline comprises a vertical part and a transverse part, one end of which is communicated with the top end of the vertical part;
the second acid exhaust pipeline is arranged between the bottom end of the first acid exhaust pipeline and the top end of one vertical section of the U-shaped pipeline;
the removing device includes:
the heating part is fixedly arranged on the acid exhaust pipeline and is used for heating the acid exhaust pipeline so as to vaporize residual liquid in the acid exhaust pipeline;
wherein the heating portion covers a first preset position range of the vertical portion and a second preset position range of the lateral portion;
the heating part is a heating belt which is fixed on the acid exhaust pipeline in a winding manner;
a heating switch electrically connected to the heating unit;
the removing device further includes:
the temperature detector is fixedly arranged on the acid exhaust pipeline and is electrically connected with the temperature controller, and the temperature controller is also electrically connected with the heating switch;
the temperature detector is used for collecting temperature signals and sending the temperature signals to the temperature controller;
the temperature controller is used for controlling the heating switch to be opened or closed according to the temperature signal; the temperature controller is specifically used for:
analyzing the temperature signal into a corresponding temperature value;
when the temperature value is larger than a first preset temperature threshold value, the heating switch is controlled to be turned off;
when the temperature value is smaller than or equal to a second preset temperature threshold, controlling the heating switch to be closed, wherein the second preset temperature threshold is smaller than the first preset temperature threshold;
the removing device further comprises a leakage switch, and the leakage switch is electrically connected with the temperature controller;
the leakage switch is used for performing power-off protection when leakage occurs.
2. An acid exhaust system according to claim 1, wherein the lateral portion is inclined downward at a predetermined angle from an end communicating with the vertical portion as a starting end.
3. An acid exhaust system as claimed in claim 1, wherein the heating section is a heating pack or a heating ring.
4. An acid exhaust system as claimed in claim 1, wherein the temperature detector comprises a thermocouple.
5. A method for removing residual liquid in an acid exhaust duct, the method comprising:
the residual liquid in the acid vent line is removed by the acid vent system of any one of claims 1-4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110203799.4A CN113324399B (en) | 2021-02-23 | 2021-02-23 | Device and method for removing residual liquid in acid exhaust pipeline and acid exhaust system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110203799.4A CN113324399B (en) | 2021-02-23 | 2021-02-23 | Device and method for removing residual liquid in acid exhaust pipeline and acid exhaust system |
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| Publication Number | Publication Date |
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| CN113324399A CN113324399A (en) | 2021-08-31 |
| CN113324399B true CN113324399B (en) | 2023-04-28 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN205244719U (en) * | 2015-11-11 | 2016-05-18 | 东旭（营口）光电显示有限公司 | Pipeline temperature regulating device |
| CN107632642A (en) * | 2017-11-03 | 2018-01-26 | 上海正帆科技股份有限公司 | Exhaust pipe heating system |
| CN208847848U (en) * | 2018-08-14 | 2019-05-10 | 德淮半导体有限公司 | Pipe detection device |
| CN209896033U (en) * | 2019-07-05 | 2020-01-03 | 北京北方华创微电子装备有限公司 | Buffer chamber |
| CN212091553U (en) * | 2020-04-13 | 2020-12-08 | 四川仲测质量技术检测有限公司 | Graphite is cleared up and is ventilated and use sour gas processing apparatus |
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