CN113314392A - Space plasma instrument calibration ion source device - Google Patents
Space plasma instrument calibration ion source device Download PDFInfo
- Publication number
- CN113314392A CN113314392A CN202110563062.3A CN202110563062A CN113314392A CN 113314392 A CN113314392 A CN 113314392A CN 202110563062 A CN202110563062 A CN 202110563062A CN 113314392 A CN113314392 A CN 113314392A
- Authority
- CN
- China
- Prior art keywords
- electric field
- field generating
- ionization chamber
- accelerating electric
- generating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a space plasma instrument calibration ion source device, which comprises an ionization cavity (14), a differential pump (20), a hot cathode filament (10) discharge device and an accelerating electric field generating device (15), wherein the accelerating electric field generating device (15) comprises a positive electrode (16), a grounding electrode (17) and a negative electrode (18); the hot cathode filament (10) discharge device is assembled at one side of the ionization chamber (14), and the other side of the ionization chamber (14) is fixed with an accelerating electric field generating device (15) which are communicated with the ionization chamber (14); the center of the accelerating electric field generating device (15) is integrally provided with a through hole, and the accelerating electric field generating device comprises three layers of metal grids which are respectively used as a positive electrode (16), a grounding electrode (17) and a negative electrode (18) of an electric field area; the differential pump (20) is mounted on one side of the accelerating electric field generating device (15). The invention effectively reduces the ion beam current intensity, meets the ground calibration test of the space plasma instrument, optimizes the test device and simplifies the test process.
Description
Technical Field
The invention relates to the technical field of ion sources, in particular to a space plasma instrument calibration ion source device.
Background
The ion source is an applied scientific technology with wide application, multiple related sciences, strong technological property and rapid development. The invention relates to a space plasma instrument calibration ion source device which is used as an ion source with strong specificity and is mainly applied to a ground calibration test of a space detector. The space plasma instrument calibration ion source device uses tungsten filaments to generate hot electrons with limited quantity and limited strength, reduces the average free path of electrons and the quantity of generated ions, and then the ion beam current strength generated by the ion source can be effectively controlled by designing the accelerating electric field generating device with large aperture. However, the ion beam intensity generated by the ion source used in modern science and technology reaches the milliampere to muir level, and the traditional space detector ground calibration test needs to reduce the ion beam intensity generated by the ion source by installing a grid mesh and other methods, so that the test device and the test process are complicated.
Disclosure of Invention
The invention relates to a space plasma instrument calibration ion source device. The space plasma instrument scaling ion source device comprises an ionization chamber 14, a differential pump 20, a hot cathode filament 10 discharge device and an accelerating electric field generating device 15, wherein the accelerating electric field generating device 15 comprises a positive electrode 16, a grounding electrode 17 and a negative electrode 18. The discharge device of the hot cathode filament 10 is assembled on one side of the ionization chamber 14, and the accelerating electric field generating device 15 is fixed on the other side of the ionization chamber 14 and is communicated with the ionization chamber 14. The accelerating electric field generating device 15 is provided with a through hole 10 cm at the center, and comprises three layers of metal grids which are respectively used as a positive electrode 16, a grounding electrode 17 and a negative electrode 18 of an electric field area. The differential pump 20 is mounted on one side of the accelerating electric field generating means 15. The space plasma instrument calibration ion source device utilizes the hot cathode filament 10 to emit fewer hot electrons with lower intensity, ionizes fewer ions in the ionization cavity 14 relative to the traditional ion source, and then leads out ion beam current through the ion leading-out through hole 19 with the diameter of 10 cm, thereby effectively controlling the flow of the ion beam current and meeting the ion beam current intensity requirement of a space plasma instrument ground calibration experiment.
Based on this, it is necessary to overcome the defects of the prior art, and to provide a calibration ion source device for a space plasma instrument, which can simplify the test device, optimize the test process, and improve the test efficiency.
The technical scheme is as follows:
a space plasma instrument scaling ion source device is characterized by comprising an ionization cavity 14, a differential pump 20, a hot cathode filament 10 discharge device and an accelerating electric field generating device 15, wherein the accelerating electric field generating device 15 comprises a positive electrode 16, a grounding electrode 17 and a negative electrode 18; the hot cathode filament 10 discharge device is assembled at one side of the ionization chamber 14, and the other side of the ionization chamber 14 is fixed with an accelerating electric field generating device 15 which are communicated with the ionization chamber 14; the accelerating electric field generating device 15 is integrally provided with a through hole at the center, and comprises three layers of metal grids which are respectively used as a positive electrode 16, a grounding electrode 17 and a negative electrode 18 of an electric field area; the differential pump 20 is mounted on one side of the accelerating electric field generating means 15.
Further, the through hole is an ion extraction through hole 19. The diameter of the through hole is 5-10 cm.
Further, the ionization chamber 14 is designed with an air inlet duct 13 and an ion exit opening 21.
Further, the hot cathode filament 10 discharge device uses a tungsten filament as an electron generating material, the tungsten filament being connected to a power source 11.
Further, an ion extraction through hole 19 with a diameter of 10 cm is designed at the center of the accelerating electric field generating device 15.
Further, the differential pump 20 is connected to the accelerating electric field generating device 15, and the differential pump 20 is communicated with the ionization chamber 14.
When the device works, gas enters the ionization chamber 14 and fills the whole ionization chamber 14, meanwhile, a voltage source is switched on for the hot cathode filament 10, the tungsten filament generates heat to generate hot electrons, the hot electrons are influenced by an electromagnetic field in the ionization chamber 14 to move and collide with gas atoms to generate ions, and the ions are led out to the accelerating electric field generating device 15 in the ionization chamber 14.
Specifically, a space plasma instrument scaling ion source device comprises: the ionization chamber 14 is provided with an air inlet pipeline 13 and an ion outlet 21, and assembling positions convenient for other devices to be installed are arranged at two ends of the ionization chamber; a hot cathode filament 10 discharge device, the hot cathode filament 10 discharge device using a tungsten filament as an electron generating material, the tungsten filament being connected to a power supply 11; an accelerating electric field generating device 15, wherein an ion extraction through hole 19 with the diameter of 10 cm is designed in the center of the accelerating electric field generating device 15, and the accelerating electric field generating device 15 is provided with three layers of metal grids which are respectively used as a positive electrode 16, a grounding electrode 17 and a negative electrode 18 of an electric field extreme; and the differential pump 20 is connected with the accelerating electric field generating device 15 and communicated with the ionization cavity 14.
When the space plasma instrument calibration ion source device works, gas enters the ionization cavity and fills the whole ionization cavity, meanwhile, a voltage source is connected to the hot cathode filament, the tungsten filament generates heat to generate hot electrons, the hot electrons move under the action of an electromagnetic field in the ionization cavity and collide with gas atoms to generate a large amount of ions, and the ions are led out to the accelerating electric field generating device in the ionization cavity. On one hand, the quantity and the intensity of hot electrons generated by the hot cathode filament are limited, so that the quantity of ions generated in the ionization cavity can be effectively controlled; on the other hand, the accelerating electric field generating device is provided with an ion leading-out through hole with the diameter of 10 cm, so that the flux of ions emitted by the ion source is effectively reduced. Compared with the traditional ion source, the design of the invention can effectively reduce the ion beam current intensity, meet the ground calibration test of the space plasma instrument and achieve the effects of optimizing the test device and simplifying the test process.
The advantages and positive effects are as follows:
the invention uses tungsten filament to generate limited quantity and intensity of hot electrons, reduces electron mean free path, reduces quantity of ions, and can effectively control ion beam current intensity generated by ion source through designing large-aperture accelerating electric field generating device. Compared with the traditional ion source, the design of the invention can effectively reduce the ion beam current intensity, meet the ground calibration test of the space plasma instrument and achieve the effects of optimizing the test device and simplifying the test process.
Drawings
FIG. 1 is a schematic structural diagram of a calibration ion source device of a space plasma instrument according to the present invention.
In the figure:
10. a hot cathode filament; 11. a power source; 12. an air valve; 13. an air intake duct; 14. an ionization chamber; 15. an accelerating electric field generating device; 16. a positive electrode; 17. a ground electrode; 18. a negative electrode; 19. an ion extraction through hole; 20. a differential pump; 21. and an ion exit port.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In one embodiment, as shown in fig. 1, fig. 1 is a schematic structural diagram of a calibration ion source device of a spatial plasma instrument in one embodiment, and in this embodiment, a calibration ion source device of a spatial plasma instrument is provided, which includes a hot cathode filament 10, a power supply 11, an air valve 12, an air inlet pipe 13, an ionization chamber 14, an accelerating electric field generating device 15, a positive electrode 16, a ground electrode 17, a negative electrode 18, an ion extraction through hole 19, and a differential pump 20. The discharge device of the hot cathode filament 10 is assembled on one side of the ionization chamber 14, and the accelerating electric field generating device 15 is fixed on the other side of the ionization chamber 14 and is communicated with the ionization chamber 14. The accelerating electric field generating device 15 is provided with a through hole 10 cm at the center, and comprises three layers of metal grids which are respectively used as a positive electrode 16, a grounding electrode 17 and a negative electrode 18 of an electric field area. The through holes are ion extraction through holes 19. The differential pump 20 is mounted on one side of the accelerating electric field generating means 15. The space plasma instrument calibration ion source device utilizes the hot cathode filament 10 to emit fewer hot electrons with lower intensity, ionizes fewer ions in the ionization cavity 14 relative to the traditional ion source, and then leads out ion beam current through the ion leading-out through hole 19 with the diameter of 10 cm, thereby effectively controlling the flow of the ion beam current and meeting the ion beam current intensity requirement of a space plasma instrument ground calibration experiment.
The ionization chamber 14 is provided with an air inlet pipeline 13 and an ion outlet 21, and two ends of the ionization chamber are provided with assembling positions convenient for installing other devices; an air valve 12 is arranged on the air inlet pipeline 13. A hot cathode filament 10 discharge device, the hot cathode filament 10 discharge device using a tungsten filament as an electron generating material, the tungsten filament being connected to a controllable power supply 11; an accelerating electric field generating device 15, wherein an ion extraction through hole 19 with the diameter of 10 cm is designed in the center of the accelerating electric field generating device 15, and the accelerating electric field generating device 15 is provided with three layers of metal grids which are respectively used as a positive electrode 16, a grounding electrode 17 and a negative electrode 18 of an electric field extreme; and the differential pump 20, the differential pump 20 is connected with the accelerating electric field generating device 15, and the differential pump 20 is communicated with the ionization chamber 14.
When the ion source works, the gas valve 12 is opened, gas enters the ionization chamber 14 through the gas pipeline 13, meanwhile, a power supply 11 is utilized to apply voltage to the hot cathode filament 10, the hot cathode filament 10 generates heat to generate hot electrons, the hot electrons collide with the gas in the ionization chamber 14 to generate ions, the ions are led out to the accelerating electric field generating device 15, a positive strong electric field is generated between the positive electrode 16 and the grounding electrode 17, the ions generated by the ion chamber 14 are accelerated to a certain exit speed, a reverse weak electric field is generated between the grounding electrode 17 and the negative electrode 18 to prevent electrons outside the ion source from entering the ion source through the ion leading-out through hole 19, the differential pump 20 is assembled below the accelerating electric field generating device, and the differential pump 20 is used for maintaining the pressure balance between the inside and the outside of the ion source.
In the ion source in the above embodiment, on one hand, the quantity and intensity of the hot electrons generated by the hot cathode filament 10 are limited, so that the quantity of the ions generated in the ionization chamber 14 can be effectively controlled; on the other hand, the accelerating electric field generating device 15 is designed with an ion extraction through hole 19 with a diameter of 10 cm, so that the flux of the ion extracted from the ion source is effectively reduced. Therefore, the requirement of the ion strength required by the ground calibration test of the space plasma instrument is met, the test efficiency is improved, and the test flow is optimized.
The hot cathode filament 10 is made of a tungsten filament material.
Specific examples of the gas include nitrogen, helium, hydrogen, and other inert gases that do not participate in chemical reactions, and are not limited herein and may be provided according to actual needs.
The above-described examples merely express embodiments of the present application, but are not to be construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, and these variations and modifications are within the scope of the present application.
Claims (7)
1. A space plasma instrument scaling ion source device is characterized by comprising an ionization chamber (14), a differential pump (20), a hot cathode filament (10) discharge device and an accelerating electric field generating device (15), wherein the accelerating electric field generating device (15) comprises a positive electrode (16), a grounding electrode (17) and a negative electrode (18); the hot cathode filament (10) discharge device is assembled at one side of the ionization chamber (14), and the other side of the ionization chamber (14) is fixed with an accelerating electric field generating device (15) which are communicated with the ionization chamber (14); the center of the accelerating electric field generating device (15) is integrally provided with a through hole, and the accelerating electric field generating device comprises three layers of metal grids which are respectively used as a positive electrode (16), a grounding electrode (17) and a negative electrode (18) of an electric field area; the differential pump (20) is mounted on one side of the accelerating electric field generating device (15).
2. The device according to claim 1, wherein the through-hole is an ion extraction through-hole (19).
3. The device according to claim 1, characterized in that the ionization chamber (14) is designed with an air inlet duct (13) and an ion exit opening (21).
4. The device according to claim 1, wherein the hot cathode filament (10) discharge device uses a tungsten filament as an electron generating material, the tungsten filament being connected to a power source (11).
5. The device of claim 1, wherein the through-hole has a diameter of 5-10 cm.
6. The device according to claim 1, characterized in that said differential pump (20) is connected to said accelerating electric field generating means (15), said differential pump (20) being in communication with said ionization chamber (14).
7. The device according to any one of claims 1 to 6, wherein, in operation, gas enters the ionization chamber (14) and fills the entire ionization chamber (14), and at the same time, a voltage source is connected to the hot cathode filament (10), the tungsten filament generates heat to generate thermal electrons, the thermal electrons move in the ionization chamber (14) under the action of an electromagnetic field and collide with gas atoms to generate ions, and the ions are extracted from the ionization chamber (14) to the accelerating electric field generating device (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110563062.3A CN113314392B (en) | 2021-05-24 | 2021-05-24 | Space plasma instrument calibration ion source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110563062.3A CN113314392B (en) | 2021-05-24 | 2021-05-24 | Space plasma instrument calibration ion source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113314392A true CN113314392A (en) | 2021-08-27 |
| CN113314392B CN113314392B (en) | 2022-12-30 |
Family
ID=77374424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110563062.3A Active CN113314392B (en) | 2021-05-24 | 2021-05-24 | Space plasma instrument calibration ion source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113314392B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5189303A (en) * | 1991-07-23 | 1993-02-23 | Nissin Electric Co., Ltd. | Ion source having a mass separation device |
| US20020053880A1 (en) * | 2000-11-09 | 2002-05-09 | Nissin Electric Co., Ltd. | Ion source and operation method thereof |
| CN204441246U (en) * | 2015-04-13 | 2015-07-01 | 山东省科学院海洋仪器仪表研究所 | A kind of orthogonal ion source apparatus |
-
2021
- 2021-05-24 CN CN202110563062.3A patent/CN113314392B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5189303A (en) * | 1991-07-23 | 1993-02-23 | Nissin Electric Co., Ltd. | Ion source having a mass separation device |
| US20020053880A1 (en) * | 2000-11-09 | 2002-05-09 | Nissin Electric Co., Ltd. | Ion source and operation method thereof |
| CN204441246U (en) * | 2015-04-13 | 2015-07-01 | 山东省科学院海洋仪器仪表研究所 | A kind of orthogonal ion source apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113314392B (en) | 2022-12-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3924134A (en) | Double chamber ion source | |
| US4800281A (en) | Compact penning-discharge plasma source | |
| CN207783240U (en) | A kind of double-plasma ion source | |
| CN111681936B (en) | Tip field negative hydrogen ion source device for high-energy ion implanter | |
| CN109830419B (en) | Miniature penning ion source | |
| CN113314392B (en) | Space plasma instrument calibration ion source device | |
| CN112164644A (en) | Penning ion source | |
| JPH01501353A (en) | dynamic electron emission device | |
| JP2002062388A (en) | Inertia electrostatic containment nuclear fusion device and radioisotope production system | |
| US2668260A (en) | Ion source | |
| Yamada | Development of an Electron Attachment Type Negative Fullerene Ion Source | |
| JP3504290B2 (en) | Method and apparatus for generating low energy neutral particle beam | |
| CN111370286B (en) | Plasma source for therapeutic equipment and method of use thereof | |
| CN210075676U (en) | Laser ion accelerator | |
| CN108990246B (en) | A kind of Plasma contact device of band annular ionisation chamber | |
| JP4587766B2 (en) | Cluster ion beam equipment | |
| CN113027717A (en) | Micro thruster based on carbon nano tube micro-pore array electrode | |
| US5326227A (en) | Exhaust apparatus with vacuum pump | |
| EP0469631B1 (en) | Ion pump and vacuum pumping unit using the same | |
| CN212907638U (en) | Penning ion source | |
| JP6752449B2 (en) | Ion beam neutralization method and equipment | |
| US5240381A (en) | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus | |
| CN217883934U (en) | ECR negative hydrogen ion source | |
| CN221227815U (en) | Ionization source device, hydrogen atom laser and integrated test system | |
| Dudnikov et al. | Surface plasma source to generate high‐brightness H− beams for ion projection lithographya |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |