CN113310480B - Optical gyroscope system based on silicon nitride waveguide resonant cavity - Google Patents
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
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Abstract
The invention relates to an optical gyro system comprising: the light source is connected with the input end of the straight waveguide modulator; the output end of the straight waveguide modulator is connected with the input end of the Y waveguide phase modulator; the output end of an upper modulation arm of the Y waveguide phase modulator is connected with the input end of the first optical circulator; the output end of a lower modulation arm of the Y waveguide phase modulator is connected with the input end of the second optical circulator; the Y waveguide phase modulator is used for splitting the modulated optical signal; the output end of the first optical circulator is connected with the first waveguide coupler; the output end of the second optical circulator is connected with the second waveguide coupler; the reflection end of the first optical circulator is connected with the signal receiving module; the reflection end of the second optical circulator is connected with the frequency locking module; the frequency locking module is also connected with the light source; the first waveguide coupler and the second waveguide coupler are also connected with the resonant cavity. The invention can improve the polarization performance of the optical gyro system and reduce the system cost.
Description
Technical Field
The invention relates to the technical field of optical gyroscopes, in particular to an optical gyroscope system based on a silicon nitride waveguide resonant cavity.
Background
The inertial technology is the only core technology with full-autonomous real-time motion information acquisition capability, has the advantages of high reliability, strong anti-interference capability and the like, and plays an irreplaceable key role in numerous fields of national defense safety and national civilization. With the development of the inertial technology and the gradual expansion of the application range, in order to realize the accurate attitude detection of the motion carrier, higher requirements are put on an inertial device, wherein the requirements on high reliability, miniaturization and low cost of the medium and low precision gyroscopes are particularly urgent. The integrated optical gyroscope is used as a second-generation optical gyroscope, is different from a traditional mechanical gyroscope and an electrostatic gyroscope which utilize the fixed-axis property sensitivity of a high-speed rotor, utilizes the Sagnac effect to realize angular speed detection, does not have movable parts, has strong impact resistance and vibration resistance and has high reliability; the Sagnac effect is enhanced by utilizing multi-beam interference of narrow-linewidth laser in a high-quality-factor annular resonant cavity, hundreds or thousands of times of equivalent optical paths can be realized in a short geometric optical path, and therefore high gyro detection precision is realized in a small volume; the integrated photoelectronic technology is utilized to gradually integrate the optical and photoelectric devices and the detection circuit on a single substrate, thereby realizing the miniaturization and mass production and greatly reducing the cost of the gyroscope. Therefore, the integrated optical gyroscope is considered to be one of the most promising schemes for realizing reliability, miniaturization and low cost of the gyroscope in the whole low and medium precision fields, and has very wide application requirements and extremely important research value.
The ring waveguide resonant cavity is used as a core component of the resonant integrated optical gyroscope, the ultimate sensitivity of the resonant integrated optical gyroscope is closely related to the definition of the ring waveguide resonant cavity and the effective area enclosed by the ring waveguide resonant cavity, and compared with an optical fiber gyroscope and a laser gyroscope, the resonant integrated optical gyroscope has great advantages in the aspects of miniaturization and integration. The good and fast performance of the ring waveguide resonant cavity directly determines the resolution and other performances of the resonant integrated optical gyroscope, and is the key of the design and manufacture of the gyroscope. The traditional integrated optical gyroscope generally adopts a silicon dioxide waveguide cavity, the silicon dioxide waveguide resonant cavity has large loss and low quality factor, the polarization performance is difficult to realize, large polarization noise can be introduced into the system, an auxiliary polarization controller is needed, the system volume and the cost are increased undoubtedly, and the application and the popularization of the integrated optical gyroscope are influenced.
In summary, for the existing silica-based resonant integrated optical gyro system, the silica waveguide resonant cavity has large loss, low quality factor and difficult polarization performance, so that the system has large polarization noise, and an auxiliary polarization controller is required, which undoubtedly increases the system cost. Therefore, there is a need for an optical gyro system with high polarization performance and low cost.
Disclosure of Invention
The invention aims to provide an optical gyroscope system based on a silicon nitride waveguide resonant cavity so as to improve the polarization performance of the optical gyroscope system and reduce the system cost.
In order to achieve the purpose, the invention provides the following scheme:
an optical gyroscope system based on a silicon nitride waveguide resonant cavity, comprising: the device comprises a light source, a modulation module, a first optical circulator, a second optical circulator, a resonant cavity, a first waveguide coupler, a second waveguide coupler, a signal receiving module and a frequency locking module; the modulation module comprises a straight waveguide modulator and a Y waveguide phase modulator;
the light source is connected with the input end of the straight waveguide modulator; the straight waveguide modulator is used for carrying out signal modulation on an optical signal emitted by the light source; the output end of the straight waveguide modulator is connected with the input end of the Y waveguide phase modulator; the output end of an upper modulation arm of the Y waveguide phase modulator is connected with the input end of the first optical circulator; the output end of the lower modulation arm of the Y waveguide phase modulator is connected with the input end of the second optical circulator; the Y waveguide phase modulator is used for splitting the modulated optical signal; the output end of the first optical circulator is connected with the first waveguide coupler; the output end of the second optical circulator is connected with the second waveguide coupler; the reflection end of the first optical circulator is connected with the signal receiving module; the reflection end of the second optical circulator is connected with the frequency locking module; the frequency locking module is also connected with the light source; the first waveguide coupler and the second waveguide coupler are also connected with the resonant cavity.
Optionally, the resonant cavity is made of silicon nitride.
Optionally, the resonant cavity is a resonant cavity with an ultra-wide depth ratio structure.
Optionally, the resonant cavity is a transmissive resonant cavity.
Optionally, the resonant cavity is a ring resonant cavity.
Optionally, the optical gyro system further includes an optical isolator; the input end of the optical isolator is connected with the light source; and the output end of the optical isolator is connected with the straight waveguide modulator.
Optionally, the signal receiving module includes: the first photoelectric detector, the first signal demodulation device and the gyro signal acquisition device are sequentially connected; the input end of the first photoelectric detector is also connected with the reflection end of the first optical circulator.
Optionally, the frequency locking module includes a second photodetector and a second signal demodulation device; the input end of the second photoelectric detector is connected with the reflecting end of the second optical circulator; the output end of the second photoelectric detector is connected with the input end of the second signal demodulation device; the output end of the second signal demodulation device is connected with the light source.
Optionally, the light source is a laser.
Optionally, the laser is a tunable narrow linewidth laser.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the optical gyro system based on the silicon nitride waveguide resonant cavity, light emitted by a light source is modulated by the straight waveguide modulator before light splitting, so that transfer function difference and system non-reciprocity which are possibly caused by different modulation signals or modulator coefficients are eliminated, and the polarization performance of the optical gyro system is improved. The polarization noise can be reduced only by the connection relationship of the resonant cavity and other optical elements, thereby reducing the cost of the system.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of an optical gyro system provided in the present invention.
Description of the symbols:
the device comprises a 1-laser, a 2-optical isolator, a 3-straight waveguide modulator, a 4-upper modulation arm, a 5-lower modulation arm, a 6-first optical circulator, a 7-second optical circulator, a 8-first waveguide coupler, a 9-second waveguide coupler, a 10-resonant cavity, a 11-first photoelectric detector, a 12-first signal demodulation device, a 13-gyro signal acquisition device, a 14-second photoelectric detector and a 15-second signal demodulation device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an optical gyroscope system based on a silicon nitride waveguide resonant cavity so as to improve the polarization performance of the optical gyroscope system and reduce the system cost.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1, the optical gyro system based on a silicon nitride waveguide resonant cavity provided in the present invention includes: the device comprises a light source, a modulation module, a first optical circulator 6, a second optical circulator 7, a resonant cavity 10, a first waveguide coupler 8, a second waveguide coupler 9, a signal receiving module and a frequency locking module; the modulation module comprises a straight waveguide modulator 3 and a Y waveguide phase modulator; an optical isolator 2 is also included.
The light source is connected with the input end of the straight waveguide modulator 3; the straight waveguide modulator 3 is used for performing signal modulation on an optical signal emitted by the light source; the output end of the straight waveguide modulator 3 is connected with the input end of the Y waveguide phase modulator; the output end of an upper modulation arm 4 of the Y waveguide phase modulator is connected with the input end of a first optical circulator 6; the output end of a lower modulation arm 5 of the Y waveguide phase modulator is connected with the input end of a second optical circulator 7; the Y waveguide phase modulator is used for splitting the modulated optical signal; the output end of the first optical circulator 6 is connected with the first waveguide coupler 8; the output end of the second optical circulator 7 is connected with the second waveguide coupler 9; the reflection end of the first optical circulator 6 is connected with the signal receiving module; the reflection end of the second optical circulator 7 is connected with the frequency locking module; the frequency locking module is also connected with the light source; the first waveguide coupler 8 and the second waveguide coupler 9 are further connected with the resonant cavity 10. The input end of the optical isolator 2 is connected with the light source; the output end of the optical isolator 2 is connected with the straight waveguide modulator 3.
In practical applications, the material of the resonant cavity 10 is silicon nitride.
In practical applications, the resonant cavity 10 is a resonant cavity with an ultra-wide depth ratio structure.
In practical applications, the resonant cavity 10 is a transmissive resonant cavity.
In practical applications, the resonant cavity 10 is a ring-shaped resonant cavity.
As an optional implementation manner, the signal receiving module includes: the gyroscope comprises a first photoelectric detector 11, a first signal demodulation device 12 and a gyroscope signal acquisition device 13 which are connected in sequence; the input end of the first photoelectric detector 11 is also connected with the reflection end of the first optical circulator 6.
As an alternative embodiment, the frequency locking module includes a second photodetector 14 and a second signal demodulating device 15; the input end of the second photoelectric detector 14 is connected with the reflection end of the second optical circulator 7; the output end of the second photodetector 14 is connected with the input end of the second signal demodulating device 15; the output of the second signal demodulation means 15 is connected to the light source.
In practical applications, the light source is a laser 1.
In practical application, the laser is a tunable narrow linewidth laser.
The invention also provides a more specific implementation mode of the optical gyro system based on the silicon nitride waveguide resonant cavity. The output end of the laser 1 is connected with the input end of an optical isolator 2 through a polarization-maintaining optical fiber jumper, the output end of the optical isolator 2 is connected with the input end of a straight waveguide modulator 3 through the polarization-maintaining optical fiber jumper, the output end of the straight waveguide modulator 3 is respectively connected with an upper modulation arm 4 and a lower modulation arm 5 of a Y waveguide phase modulator through the polarization-maintaining optical fiber jumper, the upper modulation arm 4 of the Y waveguide phase modulator is connected with the input end of a first optical circulator 6 through the polarization-maintaining optical fiber jumper, and the output end of the first optical circulator 6 is connected with a resonant cavity 10 through a first waveguide coupler 8; the lower modulation arm 5 of the Y waveguide phase modulator is connected with the input end of a second optical circulator 7 through a polarization-maintaining optical fiber jumper, the output end of the second optical circulator 7 is connected with a resonant cavity 10 through a second waveguide coupler 9, the reflection end of a first optical circulator 6 is connected with the input end of a first photoelectric detector 11 through the polarization-maintaining optical fiber jumper, the output end of the first photoelectric detector 11 is connected with the input end of a first signal demodulation device 12 through a coaxial cable, and the output end of the first signal demodulation device 12 is connected with a gyro signal acquisition device 13; the reflecting end of the second optical circulator 7 is connected with the input end of the second photoelectric detector 14 through a polarization maintaining optical fiber jumper, and the output end of the second photoelectric detector 14 is connected with the input end of the second signal demodulation device 15 through a coaxial cable. In the invention, the laser adopts a tunable narrow linewidth laser, and the modulation signal of the laser can be selected from a square wave signal, a sine signal, a sawtooth wave signal and the like for modulation. The silicon nitride waveguide resonant cavity adopts a transmission type structure. The resonant cavity adopts a Si3N4 waveguide with low loss and high polarization extinction ratio.
The specific working process of the optical gyro system is as follows:
the light output by the laser 1 passes through the optical isolator 2, then the laser is modulated by the straight waveguide modulator 3, the modulated light is divided into two paths by the Y waveguide phase modulator, one path passes through the upper modulation arm 4, carrier suppression is realized by applying a triangular wave signal to the upper modulation arm, back scattering light is suppressed, then the laser passes through the first optical circulator 6, then the output light is coupled and enters the resonant cavity 10 through the first waveguide coupler 8, the laser is continuously transmitted in the resonant cavity 10, then the laser enters the second optical circulator 7 through the second waveguide coupler 9, then the laser is output through the reflection end of the second optical circulator 7, then the optical signal is converted into an electric signal through the second photoelectric detector 14 and enters the second signal demodulation device 15, and the demodulated signal serves as a frequency locking signal to lock the frequency of the laser 1.
The other path of light passes through the lower modulation arm 5, carrier suppression is realized by applying triangular wave signals to the lower modulation arm, back scattering light is suppressed, then the laser light passes through the second optical circulator 7, then the output light is coupled into the resonant cavity 10 through the second waveguide coupler 9, the laser light is continuously transmitted in the resonant cavity 10, then the laser light is coupled into the first optical circulator 6 through the first waveguide coupler 8, then the laser light is output through the reflection end of the first optical circulator 6, then the optical signal is converted into an electric signal through the first photoelectric detector 11 and then enters the first signal demodulation device 12, the demodulated signal is used as a gyro signal, and then the gyro signal enters the gyro signal acquisition device 13 to acquire the gyro signal.
In the invention, the light output by the laser is subjected to signal modulation by the straight waveguide before light splitting, which helps to eliminate transfer function difference and system nonreciprocity which can be caused by different modulation signals or different modulation coefficients of the modulator.
The waveguide ring resonator is an important component forming a plurality of integrated optical devices and has wide application in the fields of optical communication and optical sensing. The structure is integrated on a single chip by adopting a micro-nano process, and the structure has great advantages in the aspects of miniaturization and integration. The waveguide ring resonator with high polarization extinction ratio is an effective scheme for manufacturing related polarization devices and inhibiting polarization noise in integrated optical gyroscopes.
The existing integrated fiber optic gyroscope system based on the silicon dioxide waveguide resonant cavity has the advantages of large polarization noise, large volume, difficult integration, low quality factor, difficult realization of polarization performance, and large cost and system loss (about 0.1 dB/cm). Because the silicon dioxide waveguide cavity is adopted, the loss is large, the quality factor is low, and the polarization performance is difficult to realize, so that light transmitted in the cavity has two polarization states, a gyro system has large polarization noise, the system precision is reduced, an auxiliary polarization controller is needed for maintaining the transmission of one polarization state, and the problems of large volume and high cost of the whole system are caused. The silicon nitride resonant cavity is used as a sensitive unit of the optical gyro system, the silicon nitride waveguide has strong light limiting capacity, radiation resistance and good thermal stability, and meanwhile, the waveguide is designed into an ultrahigh width-depth ratio structure, so that the scattering loss caused by the roughness of the side wall can be reduced, the transmission loss is reduced, the polarization extinction ratio of the waveguide can be improved, the polarization noise of the system is reduced, an additional polarization control device is not needed to realize the polarization function, and the volume and the cost of the system are reduced. The ring resonant cavity made of the structural waveguide has high definition and single polarization performance.
In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principle and the embodiment of the present invention are explained by applying specific examples, and the above description of the embodiments is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (9)
1. An optical gyro system comprising: the device comprises a light source, a modulation module, a first optical circulator, a second optical circulator, a resonant cavity, a first waveguide coupler, a second waveguide coupler, a signal receiving module and a frequency locking module; the modulation module comprises a straight waveguide modulator and a Y waveguide phase modulator;
the light source is connected with the input end of the straight waveguide modulator; the straight waveguide modulator is used for carrying out signal modulation on an optical signal emitted by the light source; the output end of the straight waveguide modulator is connected with the input end of the Y waveguide phase modulator; the output end of an upper modulation arm of the Y waveguide phase modulator is connected with the input end of the first optical circulator; the output end of a lower modulation arm of the Y waveguide phase modulator is connected with the input end of a second optical circulator; the Y waveguide phase modulator is used for splitting the modulated optical signal; the output end of the first optical circulator is connected with the first waveguide coupler; the output end of the second optical circulator is connected with the second waveguide coupler; the reflection end of the first optical circulator is connected with the signal receiving module; the reflection end of the second optical circulator is connected with the frequency locking module; the frequency locking module is also connected with the light source; the first waveguide coupler and the second waveguide coupler are also connected with the resonant cavity;
the resonant cavity is of an ultra-wide depth ratio structure.
2. The optical gyroscope system of claim 1, wherein the material of the resonant cavity is silicon nitride.
3. An optical gyro system as claimed in claim 2 wherein the resonant cavity is a transmissive resonant cavity.
4. The optical gyroscope system of claim 1, wherein the resonant cavity is a ring resonant cavity.
5. The optical gyro system of claim 1 further comprising an optical isolator; the input end of the optical isolator is connected with the light source; and the output end of the optical isolator is connected with the straight waveguide modulator.
6. The optical gyro system of claim 1 wherein the signal receiving module comprises: the first photoelectric detector, the first signal demodulation device and the gyro signal acquisition device are sequentially connected; the input end of the first photoelectric detector is also connected with the reflection end of the first optical circulator.
7. The optical gyro system of claim 1, wherein the frequency-locking module comprises a second photodetector and a second signal demodulating device; the input end of the second photoelectric detector is connected with the reflecting end of the second optical circulator; the output end of the second photoelectric detector is connected with the input end of the second signal demodulation device; the output end of the second signal demodulation device is connected with the light source.
8. The optical gyroscope system of claim 1, wherein the light source is a laser.
9. The optical gyroscope system of claim 8, wherein the laser is a tunable narrow linewidth laser.
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| US7106448B1 (en) * | 2004-02-17 | 2006-09-12 | Sandia Corporation | Integrated resonant micro-optical gyroscope and method of fabrication |
| CN101858745B (en) * | 2010-06-21 | 2011-08-31 | 中北大学 | All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity |
| JP5338796B2 (en) * | 2010-12-07 | 2013-11-13 | 株式会社デンソー | Light gyro |
| CN102650524B (en) * | 2012-04-25 | 2014-10-15 | 北京航空航天大学 | Differential dual-interference type closed loop fiber optic gyroscope based on birefringence modulation of wide frequency light source |
| CN103335641B (en) * | 2013-06-28 | 2017-02-08 | 北京航空航天大学 | Resonator optical gyroscope based on resonant intracavity modulation |
| CN103499344B (en) * | 2013-07-22 | 2016-01-20 | 中北大学 | Double-resonant cavity resonant optic gyro |
| CN103968821B (en) * | 2014-05-19 | 2017-03-08 | 中北大学 | Two-way resonance type optical gyroscope |
| US9587945B2 (en) * | 2014-06-23 | 2017-03-07 | Honeywell International Inc. | Symmetric three-laser resonator fiber optic gyroscope |
| US9395184B2 (en) * | 2014-08-18 | 2016-07-19 | Honeywell International Inc. | Resonant fiber optic gyroscope with polarizing crystal waveguide coupler |
| CN105783904B (en) * | 2016-03-08 | 2019-05-07 | 北京航空航天大学 | A kind of resonance type optical fiber gyro frequency locker |
| US10458795B1 (en) * | 2017-08-14 | 2019-10-29 | National Technology & Engineering Solutions Of Sandia, Llc | Optomechanical gyroscope utilizing the Sagnac effect |
| EP3657126B1 (en) * | 2018-11-21 | 2021-06-16 | IMEC vzw | Optical gyroscope |
| CN209657053U (en) * | 2019-03-27 | 2019-11-19 | 杭州芯耘光电科技有限公司 | A kind of negative chirped modulation device of low pressure |
| CN110470292B (en) * | 2019-08-30 | 2023-08-01 | 哈尔滨工程大学 | Self-injection frequency-locking resonant optical gyroscope and working method thereof |
| CN111089605A (en) * | 2019-12-13 | 2020-05-01 | 北京航天时代光电科技有限公司 | Detection device and method for resonant optical gyroscope |
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