CN113295270B - Light beam alignment device and method for ultralow-temperature vacuum environment - Google Patents
Light beam alignment device and method for ultralow-temperature vacuum environment Download PDFInfo
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- CN113295270B CN113295270B CN202110611324.9A CN202110611324A CN113295270B CN 113295270 B CN113295270 B CN 113295270B CN 202110611324 A CN202110611324 A CN 202110611324A CN 113295270 B CN113295270 B CN 113295270B
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 31
- 238000009434 installation Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000005057 refrigeration Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 3
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0266—Field-of-view determination; Aiming or pointing of a photometer; Adjusting alignment; Encoding angular position; Size of the measurement area; Position tracking; Photodetection involving different fields of view for a single detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
Abstract
The invention provides a light beam alignment device and an alignment method for an ultralow temperature vacuum environment, wherein the device comprises: the ultra-low temperature vacuum cabin body, an alignment target, a vacuum interface, a vacuum program control displacement platform, a guide laser module, an alignment device vacuum cabin body, a first diaphragm, a second diaphragm, an installation and adjustment laser module and a working light source. The invention has the advantages that: 1. no complex light path and circuit, simple structure and convenient use; 2. the applicable wavelength range is wide, and the wavelength is not limited; 3. the light beam alignment precision is high; 4. the alignment process does not change incident light power, does not introduce stray light, and does not influence the subsequent measurement precision of light power measurement and the like.
Description
Technical Field
The invention belongs to the technical field of light beam alignment, and particularly relates to a light beam alignment device and an alignment method for an ultralow-temperature vacuum environment.
Background
The light beam alignment is an important problem in the processes of optical precision measurement, optical metering and the like, and particularly relates to the alignment of non-visible light beams in special environments such as ultralow temperature vacuum and the like, so that the alignment difficulty is higher. The existing light beam alignment method generally utilizes a four-quadrant detector and is assisted by related optical devices such as reflection, light splitting and the like, and the light beam alignment condition is judged by monitoring the reading of the four-quadrant detector. As most of four-quadrant detectors are Si detectors, the four-quadrant detectors can only be used for aligning light beams with the wave band of 200 nm-1100 nm. For other bands such as ultraviolet and infrared, the prior art generally uses 632.8nm helium-neon laser as guiding light, and the helium-neon laser is aligned first, and the light of other bands is aligned indirectly by means of being coaxial with the helium-neon laser.
The existing light beam alignment device based on the four-quadrant detector has the following defects: (1) the amplifier circuit with high gain coefficient and a certain optical system are needed to be matched, the system is complex and expensive, and especially for the middle through hole type four-quadrant detector, special flow sheet customization is needed. (2) The applicable wavelength range is narrow. The four-quadrant detector type light beam alignment device is only suitable for 200 nm-1100 nm wave bands, and other wave bands need to be indirectly aligned by utilizing guiding light. (3) The alignment operation is difficult. The four-quadrant detector type light beam alignment device realizes light beam alignment by means of the reading of four quadrants, the alignment difficulty is very high due to factors such as instability of the detector and high-gain amplification, and the alignment needs to be repeatedly adjusted; (4) is not suitable for the ultra-low temperature vacuum environment and has low alignment precision. The alignment precision of the four-quadrant detector type light beam alignment device is higher when the four-quadrant detector type light beam alignment device is closer to an alignment target, but the four-quadrant detector cannot work at the temperature of liquid helium and can only be arranged on the outer side of a cold screen, so that the alignment precision is reduced; (5) the incident light power is varied. The four-quadrant detector type light beam alignment device generally realizes light beam positioning and collimation by detecting stray light of an incident light beam, and because the measurement of the stray light can change the incident light power, the stray light is generally required to be corrected and compensated in the subsequent measurement process, which is not favorable for the accuracy of the subsequent measurement of light power and the like.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: 1. providing a light beam alignment method and an alignment device suitable for an ultralow temperature vacuum environment; 2. aiming at the defect that the existing light beam alignment method based on the four-quadrant detector is only suitable for the alignment of light beams with wave bands of 200 nm-1100 nm, the universal light beam alignment method without the limitation of the wavelength range is provided; 3. aiming at the problems of high alignment and debugging difficulty and low precision of the traditional light beam alignment method, the light beam alignment device with compact structure and strong universality is provided, so that the alignment and debugging difficulty is simplified, and the alignment precision is improved; 4. the high-precision alignment of the incident beam is realized under the conditions of not monitoring stray light and not changing the light power of the alignment beam, and the accuracy of subsequent measurement of the light power and the like is improved. In view of the shortcomings of the prior art beam alignment techniques, the object of the present invention is: 1. providing a light beam alignment method suitable for an ultralow temperature vacuum environment; the light beam alignment device is compact in structure, simple to operate, strong in universality and wide in applicable wavelength range; 3. the method improves the alignment precision of the light beam, does not change the optical power of the alignment light beam, and improves the accuracy of subsequent measurement of the optical power and the like.
The technical scheme of the invention is as follows: a beam alignment apparatus for use in an ultra-low temperature vacuum environment, comprising: the system comprises an ultralow-temperature vacuum cabin body, an alignment target, a vacuum interface, a vacuum program-controlled displacement table, a guide laser module, an alignment device vacuum cabin body, a first diaphragm, a second diaphragm, a debugging laser module and a working light source; wherein, the vacuum program control displacement table, the guide laser module and the vacuum chamber body of the alignment device jointly form an external light beam alignment module; the first diaphragm, the second diaphragm, the adjusting laser module and the working light source are aligned with the centers of the vacuum interfaces at the front end and the rear end of the module with the external light beams, and are aligned with a target coaxial line.
Among the above-mentioned device, be provided with standard vacuum interface on the same axis around the alignment device vacuum storehouse body, the internal portion of ultra-low temperature vacuum storehouse installs the programme-controlled displacement platform in vacuum to install the guide laser module on the programme-controlled displacement platform in vacuum, realize the lift of guide laser module through controlling the programme-controlled displacement platform in vacuum, cut into the light path with the laser module as required and shift out the light path, accomplish the switching in the light path.
In the device, an external light beam alignment module in the alignment device is connected with the ultralow-temperature vacuum cabin body through a vacuum interface, and the ultralow-temperature vacuum cabin body and the external light beam alignment module after being installed are integrated and have constant relative positions;
in the device, the alignment target, the centers of the vacuum interfaces at the front end and the rear end of the external light beam alignment module, the first diaphragm, the second diaphragm, the laser installation and adjustment module and the working light source are positioned on the same optical axis;
in the device, vacuum interfaces at the front end and the rear end of the external light beam alignment module are vacuum-sealed by using O rings so as to ensure the vacuum degree of a device system;
in the device, the laser guide module and the laser adjusting module adopt red light or green light laser light sources with compact structure and good light beam quality.
The invention also provides a light beam alignment method for the ultralow temperature vacuum environment, which comprises a light beam alignment device installation and debugging method and a light beam alignment method, and specifically comprises the following steps:
step 1: the method for installing and debugging the light beam alignment device comprises the following specific steps:
before ultralow-temperature refrigeration and vacuumizing are carried out on an ultralow-temperature vacuum cabin body and an alignment device vacuum cabin body, opening the alignment device vacuum cabin body, adjusting the position of a laser installation and adjustment module, and enabling installation and adjustment laser to penetrate through the centers of vacuum interfaces and then hit the center of an alignment target;
secondly, closing the vacuum cabin body of the alignment device and keeping the position constant, sequentially arranging a first diaphragm and a second diaphragm on a light path of the adjustment laser, and fixing the position of the light path;
thirdly, removing the laser module, opening a vacuum chamber body of the alignment device, and moving the program-controlled displacement table to move the laser module into the light path;
fourthly, lighting the guide laser module, and adjusting the position of the guide laser module to ensure that the guide light just passes through the first diaphragm and the second diaphragm in sequence;
and fifthly, fixing and recording the position L1 of the guide laser module through the vacuum program control displacement table, closing the vacuum cabin body of the alignment device, moving the vacuum program control displacement table to move the guide laser module out of the light path, closing the guide laser module, and completing the installation and debugging of the light beam alignment device.
Step 2: the light beam alignment method comprises the following specific steps:
firstly, moving a vacuum program control displacement table to move a guide laser module into a light path (position L1);
secondly, lightening a guide laser module, fixing the vacuum cabin body of the alignment device in a light path, and then sequentially placing a first diaphragm and a second diaphragm;
thirdly, closing the guide laser module, and moving the program-controlled displacement table in vacuum to move the guide laser module out of the light path;
and fourthly, lighting the working light source, installing and adjusting the position of the working light source, so that the emergent light beam of the working light source sequentially passes through the second diaphragm and the first diaphragm, and the light beam of the working light source is incident to the center of the alignment target.
Adopt above-mentioned scheme: 1. no complex light path and circuit, simple structure and convenient use; 2. the applicable wavelength range is wide, and the wavelength is not limited; 3. the light beam alignment precision is high; 4. the alignment process does not change incident light power, does not introduce stray light, and does not influence the subsequent measurement precision of light power measurement and the like.
Drawings
FIG. 1 is a schematic diagram of the adjustment of the beam alignment apparatus of the present invention.
FIG. 2 is a schematic structural diagram of a beam alignment apparatus according to the present invention.
FIG. 3 is a schematic diagram illustrating the alignment effect of light beams according to the present invention.
Detailed Description
In order to facilitate an understanding of the invention, the invention is described in more detail below with reference to the accompanying drawings and specific examples. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Example one
As shown in fig. 1 to 3, an embodiment of the present invention is a beam alignment apparatus for an ultra-low temperature vacuum environment, including: the system comprises an ultralow-temperature vacuum cabin body 1, an alignment target 2, a vacuum interface 3, a vacuum program-controlled displacement table 4, a guide laser module 5, an alignment device vacuum cabin body 6, a first diaphragm 7, a second diaphragm 8, an installation and adjustment laser module 9 and a working light source 10; wherein, the vacuum program control displacement table 4, the guide laser module 5 and the alignment device vacuum chamber body 6 jointly form an external light beam alignment module.
In the alignment device, be provided with standard vacuum interface on the same axis around the ultra-low temperature vacuum storehouse body 1, alignment device vacuum storehouse body 6 internally mounted has programme-controlled displacement platform in vacuum 4 to install guide laser module 5 on programme-controlled displacement platform in vacuum 4, realize guiding laser module 5 through the programme-controlled displacement platform in control vacuum 4 and go up and down, cut into the light path with laser module 5 as required and shift out the light path, accomplish the switching in the light path. After the installation is finished, the external light beam alignment module is installed on an external light path of the ultra-low temperature vacuum cabin body 1 through a standard vacuum interface, and the temperature of the external light beam alignment module is still in a normal temperature state because the external light beam alignment module is in a vacuum environment. Besides the above elements, the alignment device of the present invention further comprises a first diaphragm, a second diaphragm, a laser installation and adjustment module and a working light source which are placed at the front end of the external light beam alignment module, wherein the first diaphragm 7, the second diaphragm 8, the laser installation and adjustment module 9 and the working light source 10 are coaxial with the centers of the vacuum interfaces at the front end and the rear end of the external light beam alignment module, and the alignment target.
An external light beam alignment module in the alignment device is connected with the ultralow-temperature vacuum cabin body 1 through a vacuum interface, and the ultralow-temperature vacuum cabin body 1 and the external light beam alignment module after being installed are integrated and have constant relative positions;
the alignment target, the centers of the vacuum interfaces at the front end and the rear end of the external light beam alignment module, the first diaphragm, the second diaphragm, the laser installation and adjustment module and the working light source are positioned on the same optical axis;
vacuum interfaces at the front end and the rear end of the external light beam alignment module are sealed in a vacuum mode through O rings so as to guarantee the vacuum degree of a device system;
the laser guide module and the adjustment laser module adopt red light or green light laser sources with compact structure and good light beam quality.
Example two
On the basis of the above embodiment, the present invention further provides a light beam alignment method for an ultra-low temperature vacuum environment, including a light beam alignment apparatus installation and debugging method and a light beam alignment method, which specifically includes:
(1) method for installing and debugging light beam alignment device
Before ultralow-temperature refrigeration and vacuumizing are carried out on the ultralow-temperature vacuum bin body and the alignment device vacuum bin body, the alignment device vacuum bin body is opened, the position of a laser module is adjusted, and the adjusted laser penetrates through the centers of the vacuum interfaces and then is hit to the center of an alignment target;
secondly, closing the bin body of the alignment device and keeping the position constant, sequentially arranging a first diaphragm and a second diaphragm on a light path of the adjustment laser, and fixing the position of the light path;
thirdly, removing the laser installation and adjustment module, opening a vacuum cabin body of the alignment device, and moving the program-controlled displacement table to move the guide laser module into the light path;
fourthly, lighting the guide laser module, and adjusting the position of the guide laser module to ensure that the guide light just passes through the first diaphragm and the second diaphragm in sequence;
and fifthly, fixing and recording the position L1 of the guide laser module through the vacuum program control displacement table, closing the vacuum cabin body of the alignment device, moving the vacuum program control displacement table to move the guide laser module out of the light path, closing the guide laser module, and completing the installation and debugging of the light beam alignment device.
(2) Light beam alignment method
Firstly, moving a vacuum program control displacement table to move a guide laser module into a light path (position L1);
secondly, lighting a guide laser module, fixing the vacuum chamber body of the alignment device in the light path, and then sequentially placing a first diaphragm and a second diaphragm;
thirdly, closing the guide laser module, and moving the program-controlled displacement table in vacuum to move the guide laser module out of the light path;
and fourthly, lighting the working light source, installing and adjusting the position of the working light source, so that the emergent light beam of the working light source sequentially passes through the second diaphragm and the first diaphragm, and the light beam of the working light source is incident to the center of the alignment target.
Compared with the prior art, the invention has the advantages that: 1. no complex light path and circuit, simple structure and convenient use; 2. the applicable wavelength range is wide, and the wavelength is not limited; 3. the light beam alignment precision is high; 4. the alignment process does not change incident light power, does not introduce stray light, and does not influence the subsequent measurement precision of light power measurement and the like.
The above features are combined with each other to form various embodiments not listed above, and all of them are regarded as the scope of the present invention described in the specification; also, modifications and variations may be suggested to those skilled in the art in light of the above teachings, and it is intended to cover all such modifications and variations as fall within the true spirit and scope of the invention as defined by the appended claims.
Claims (4)
1. A beam alignment apparatus for use in an ultra-low temperature vacuum environment, comprising: the system comprises an ultralow-temperature vacuum cabin body, an alignment target, a vacuum interface, a vacuum program-controlled displacement table, a guide laser module, an alignment device vacuum cabin body, a first diaphragm, a second diaphragm, a debugging laser module and a working light source; the front end and the rear end of the vacuum chamber body of the alignment device are provided with vacuum interfaces on the same axis, a vacuum program-controlled displacement table is arranged in the vacuum chamber body of the alignment device, and a guide laser module is arranged on the vacuum program-controlled displacement table, wherein the vacuum program-controlled displacement table, the guide laser module and the vacuum chamber body of the alignment device jointly form an external light beam alignment module; the alignment target, the centers of the vacuum interfaces at the front end and the rear end of the external light beam alignment module, the first diaphragm, the second diaphragm, the laser adjusting module and the working light source are positioned on the same optical axis; the lifting of the guide laser module is realized by controlling the vacuum program-controlled displacement table, and the guide laser module is switched into and out of the light path to complete the switching in the light path; the ultra-low temperature vacuum cabin body and the external light beam alignment module are integrated into a whole after being installed, and the relative position is constant.
2. The apparatus for beam alignment in ultra-low temperature vacuum environment as claimed in claim 1, wherein the vacuum interfaces at the front and rear ends of the external beam alignment module are vacuum sealed by O-rings to ensure the vacuum degree of the apparatus system.
3. The ultra-low temperature vacuum environment beam alignment apparatus as claimed in claim 1, wherein the guiding laser module and the alignment laser module are selected from red or green laser sources.
4. A light beam alignment method for an ultralow temperature vacuum environment is characterized by comprising a light beam alignment device installation and debugging method and a light beam alignment method, and specifically comprising the following steps:
step 1: the method for installing and debugging the light beam alignment device comprises the following specific steps:
before ultralow-temperature refrigeration and vacuumizing are carried out on the ultralow-temperature vacuum bin body and the alignment device vacuum bin body, the alignment device vacuum bin body is opened, the position of a laser module is adjusted, and the adjusted laser penetrates through the centers of the vacuum interfaces and then is hit to the center of an alignment target;
secondly, closing the vacuum cabin body of the alignment device and keeping the position constant, sequentially arranging a first diaphragm and a second diaphragm on a light path of the adjustment laser, and fixing the position of the light path;
thirdly, removing the laser installation and adjustment module, opening a vacuum cabin body of the alignment device, and moving the program-controlled displacement table to move the guide laser module into the light path;
fourthly, lighting the guide laser module, and adjusting the position of the guide laser module to ensure that the guide light just passes through the first diaphragm and the second diaphragm in sequence;
fifthly, fixing and recording the position L1 of the guide laser module through a vacuum program control displacement table, closing a vacuum cabin body of the alignment device, moving the vacuum program control displacement table to move the guide laser module out of a light path, closing the guide laser module, and completing installation and debugging of the light beam alignment device;
and 2, step: the light beam alignment method comprises the following specific steps:
firstly, moving a vacuum program control displacement table to move a guide laser module into an optical path position L1;
secondly, lighting a guide laser module, fixing the vacuum chamber body of the alignment device in the light path, and then sequentially placing a first diaphragm and a second diaphragm;
thirdly, closing the guide laser module, and moving the program-controlled displacement table in vacuum to move the guide laser module out of the light path;
and fourthly, lighting the working light source, installing and adjusting the position of the working light source, so that the emergent light beam of the working light source sequentially passes through the second diaphragm and the first diaphragm, and the light beam of the working light source is incident to the center of the alignment target.
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| CN103278237A (en) * | 2013-05-30 | 2013-09-04 | 中国电子科技集团公司第四十一研究所 | Device and method for optical radiation calibration |
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| CN108106722A (en) * | 2017-11-22 | 2018-06-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of low temperature radiometer laser beam position and control system |
| CN112710386A (en) * | 2020-12-17 | 2021-04-27 | 北京空间机电研究所 | Vacuum testing device and method for laser divergence angle after beam expansion |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8934097B2 (en) * | 2009-01-29 | 2015-01-13 | Lawrence Livermore National Security, Llc | Laser beam centering and pointing system |
| CN103256976B (en) * | 2013-03-20 | 2015-03-11 | 中国科学院安徽光学精密机械研究所 | Low-temperature absolute radiometer absolute spectral responsivity calibration method and experimental apparatus |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278237A (en) * | 2013-05-30 | 2013-09-04 | 中国电子科技集团公司第四十一研究所 | Device and method for optical radiation calibration |
| CN203274912U (en) * | 2013-05-30 | 2013-11-06 | 中国电子科技集团公司第四十一研究所 | An optical radiation calibrating device |
| CN108106722A (en) * | 2017-11-22 | 2018-06-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of low temperature radiometer laser beam position and control system |
| CN112710386A (en) * | 2020-12-17 | 2021-04-27 | 北京空间机电研究所 | Vacuum testing device and method for laser divergence angle after beam expansion |
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