CN113293352B - Low-cost target for vacuum coating - Google Patents
Low-cost target for vacuum coating Download PDFInfo
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- CN113293352B CN113293352B CN202110606892.XA CN202110606892A CN113293352B CN 113293352 B CN113293352 B CN 113293352B CN 202110606892 A CN202110606892 A CN 202110606892A CN 113293352 B CN113293352 B CN 113293352B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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Abstract
The invention discloses a low-cost target for vacuum coating, which comprises a target pipe, a transition layer and an inner lining pipe which are sequentially sleeved from outside to inside; the two ends of the target body tube are provided with tube joints which can be connected with the coating equipment through the tube joints; the two ends of the target pipe, the transition layer and the lining pipe are hermetically connected; the hollow structure of the lining pipe forms a cooling pipeline. The low-cost material is added to serve as the lining pipe, the transition layer structure is adopted, the problems that the pipe body of the pipe target is likely to be in vacuum leakage in the using process and the using state of the target cannot be distinguished are effectively solved, and the comprehensive cost of the product is greatly reduced.
Description
Technical Field
The invention relates to the technical field of tubular targets for magnetron sputtering, in particular to a low-cost target for vacuum coating.
Background
At present, in the field of magnetron sputtering vacuum coating, a seamless target tube, a planar target and a multi-arc target have the advantages of high target utilization rate and uniform film, and rare metals such as niobium, zirconium, titanium, tantalum and the like have different special physical properties and are important coating materials. Wherein, Nb is generated in the magnetron sputtering process of the niobium element205Is an electrochromic material with excellent performance, the refractive index of the film is higher, and the film is made of Si02Films with different refractive indexes can be prepared by matching, so that the Nb205 film is more and more widely applied, and the demand of niobium targets is more and more; zirconium, titanium and other metals have excellent acid and alkali resistance, and the produced nitride and oxide film has the characteristics of high strength and beautiful color, and is an important decorative film material.
However, the rare metal target tube is high in cost, and on one hand, the rare metal material is expensive; on the other hand, a large amount of turning materials and leftover materials are generated in the pipe processing process, so that the production cost is obviously increased; meanwhile, about 30-50% of the material still remains on the sputtered tube target and is not utilized, so that the use cost is increased; in addition, the cooling liquid is introduced into the middle pipeline of the target pipe, the target body is gradually consumed and thinned in the use process, the quality of the pipe has flaws such as cracks, and the use safety problem can occur, so the quality requirement on the target pipe is very strict, and the production cost is greatly increased. The rare metal tube target has high use cost and production cost, and the popularization of the rare metal tube target is greatly limited.
Therefore, it is an urgent problem to be solved by those skilled in the art to provide a low-cost target for vacuum deposition to reduce the production cost and improve the utilization rate of rare metals.
Disclosure of Invention
In view of the above, the invention provides a low-cost vacuum coating target, which adds a low-cost material as a lining tube and adopts a transition layer structure, thereby effectively solving the problems that the tube body is likely to be vacuum leaked and the use state of the target material cannot be distinguished in the use process of the tube target, and greatly reducing the comprehensive cost of the product.
In order to achieve the purpose, the invention adopts the following technical scheme:
a low-cost target for vacuum coating is characterized by comprising a target body pipe, a transition layer and an inner lining pipe which are sequentially sleeved from outside to inside;
the two ends of the target body tube are provided with tube joints, and the target body tube can be connected with a coating device through the tube joints;
the two ends of the target pipe, the transition layer and the lining pipe are hermetically connected;
and a cooling pipeline is formed in the lining pipe.
Preferably, the pipe joint is of a threaded structure, is used for connecting the target body pipe and the coating equipment, and is made of the same material as the target body pipe.
Preferably, the transition layer is one or a combination of more of polymer resin, graphite, inorganic salt and oxide.
The beneficial effects of the preferred technical scheme are as follows: on the one hand, the transition layer can be used as an adhesive to play a role in connection and be used for connecting the target pipe and the lining pipe, and on the other hand, the sputtering performance of the transition layer can be used as an indicator of the consumption state of the target pipe according to different sputtering performances of the transition layer. By selecting the materials as the transition layer, the consumption of the lining pipe can be prevented, and the pollution of the coating film caused by the sputtering participation of the lining pipe can be prevented. In the process of sputtering coating, the target body tube is used as a functional consumption material and is gradually consumed along with the coating, when the target body tube is consumed to a transition layer, different glow and arc characteristics can occur when an electron beam meets the transition layer, so that the target body tube can be observed and identified in time by an operator, and the target body tube can play an indicating role. If the transition layer is the non-conductive material such as the high molecular resin, the inorganic salt, the oxide and the like, the electron beam can not generate glow and arc light when meeting the transition layer, and other conductive parts of the target body have obvious glow or arc light; when the transition layer is a graphite material of the present invention, the arc or glow is more intense because graphite is more conductive than the target tube, and therefore a significant difference in intensity occurs when the electron beam encounters the transition layer. The different performance of the transition layer sputtering indicates the consumption condition of the target tube, so that the effective components of the target tube material can be consumed to the maximum extent by a user. The invention can prevent the pollution of the film layer caused by the sputtering of the lining tube due to the transitional consumption of the target material; and target body tube waste caused by a large amount of reserved target body materials for preventing the leakage of cooling liquid in a cooling pipeline caused by excessive consumption of the target body is avoided.
Preferably, the transition layer is made of polymer resin.
The beneficial effects of the preferred technical scheme are as follows: because the high polymer material is not conductive, the electron beam can not generate glow or arc light when meeting the transition layer in the coating process, and other conductive parts of the target body have obvious glow or arc light, and the light intensity difference is convenient for operators to observe the consumption condition of the target body tube; meanwhile, the high polymer material has low price and low melting point, is easy to coat or nest on the surface of the lining pipe, and is convenient for engineering implementation.
Preferably, the transition layer is made of graphite.
The beneficial effects of the preferred technical scheme are as follows: the graphite has the obvious light difference in the coating process and also has the function of preventing the pollution of a coating cavity. Because graphite has the characteristics of high melting point, high boiling point and high heat dissipation efficiency, the atmosphere environment of the coating cavity is protected, the temperature field of the target tube is more uniform and consistent, and the stability of coating is facilitated.
Preferably, the graphite used in the transition layer is wrapped on the lining pipe in the form of graphite foil.
Preferably, the transition layer adopts one or more combination of inorganic salt or oxide.
The beneficial effects of the preferred technical scheme are as follows: the transition layer is made of inorganic salt and oxide, has the characteristics of high boiling point and difficult evaporation or sputtering, can be used as a barrier layer and does not participate in the coating process, so that the coating cavity can be protected from being polluted by impurity elements, the target body tube material can be used to the maximum extent, the material waste is avoided, and the comprehensive cost is reduced.
Preferably, the oxide includes any one of titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, and molybdenum oxide.
Further preferably, the transition layer is an oxide of the constituent material of the target tube.
When the transition layer is preferably made of oxides of the target body tube, for example, titanium oxide is selected as the transition layer for the titanium target body tube, zirconium oxide is selected as the transition layer for the zirconium target body tube, niobium oxide is selected as the transition layer for the niobium target body tube, tantalum oxide is selected as the transition layer for the tantalum target body tube, molybdenum oxide is selected as the transition layer for the molybdenum target body tube, and chromium oxide is selected as the transition layer for the chromium target body tube. On the one hand, the transition layer is difficult to evaporate or sputter, and thus has a barrier function; and even if a small amount of sputtering enters the cavity, the pollution of heterogeneous elements can be avoided. For example, in the process of coating a titanium target tube, oxygen is generally required to be introduced to form a titanium oxide film layer, titanium oxide is selected as a transition layer at the moment, and even if titanium oxide of the transition layer is evaporated or sputtered, the titanium oxide is the same as the film layer formed by the target tube, so that pollution is avoided.
In addition, when the oxide layer is selected as the transition layer, the oxide layer is preferably prepared by a thermal spraying process so as to enhance the adhesion of the transition layer and avoid the transition layer from falling off.
Meanwhile, the transition layer of the low-cost target for vacuum coating can also adopt various combinations of polymer resin, graphite, inorganic salt and oxide.
Preferably, the sealing connection comprises welding, copper ring sealing connection, rubber ring sealing connection or polytetrafluoroethylene sealing connection.
The beneficial effects of the preferred technical scheme are as follows: the cooling pipeline formed by the lining pipe is filled with cooling liquid to cool the target body pipe in the film coating process so as to form a stable temperature field and stabilize the film coating process. The transition layer and the two ends of the lining pipe are usually immersed in the cooling liquid, and in order to prevent the cooling liquid from entering the transition layer, the sealing structure of the invention has the function of preventing the cooling liquid from permeating.
Preferably, the sealed connection is sealed by welding.
The beneficial effects of the preferred technical scheme are as follows: the welding seal is not affected by temperature and deformation, and is more stable and reliable. The invention can prevent the cooling liquid in the cooling pipeline from leaking through the sealing connection; and the cooling pipeline is prevented from being communicated with the target body pipe through the transition layer after the target body pipe is consumed, so that cooling liquid is leaked, and the vacuum coating cavity is further damaged and polluted.
Preferably, the target tube is made of any one of titanium, titanium alloy, zirconium alloy, tantalum alloy, niobium alloy, chromium alloy, molybdenum alloy, high-purity copper and silver. Wherein, the high-purity copper refers to copper with the purity of more than 99.99 percent.
Preferably, the lining pipe is made of any one of stainless steel, carbon steel, copper alloy, aluminum and aluminum alloy.
The beneficial effects of the preferred technical scheme are as follows: according to the invention, the lining pipe is made of stainless steel, carbon steel, copper and copper alloy, aluminum and aluminum alloy and the like with low cost and excellent rolling characteristics, so that the material cost is reduced, the quality of the lining pipe is better ensured, the quality requirement on the target body pipe is greatly reduced, and especially the requirement on crack defects is greatly reduced, so that the defects of short service life of the target material, influence on the use safety of vacuum equipment and the like caused by the defects of pipe body cracks and the like of the traditional target pipe are greatly improved, and the production cost of the target pipe is also greatly reduced.
Preferably, the low-cost target for vacuum coating is formed by rolling and rolling.
After the lining pipe is connected with the target body pipe through the transition layer, the target body pipe is formed by rolling and calendering, so that gaps among the lining pipe, the target body pipe and the transition layer can be reduced, the target body pipe can be effectively cooled by cooling liquid in a cooling pipeline, and the stability of a coating film is facilitated.
According to the technical scheme, compared with the prior art, the low-cost target for vacuum coating has the following beneficial effects:
(1) according to the invention, the low-cost material is adopted as the lining pipe, so that the production cost is reduced, the quality of the lining pipe is better ensured, and the quality requirement on the target body pipe is greatly reduced, thereby greatly improving the short service life of the target material caused by the defects of pipe body cracks and the like, improving the use safety of vacuum equipment and greatly reducing the production cost of products;
(2) meanwhile, the invention adopts a transition layer structure, so that the effective components of the target tube can be consumed to the maximum extent, and the target tube can be prevented from reaching the lining tube due to consumption transition to cause pollution of a film layer; the excessive reservation amount for preventing the leakage of the cooling liquid caused by the penetration of the pipe wall due to the excessive consumption of the target pipe is not needed, the target pipe can be used to the maximum extent, the waste of the target pipe is avoided, and the comprehensive cost is reduced;
(3) in addition, the low-cost target for vacuum coating provided by the invention is particularly suitable for target tube products made of rare metal materials, the production cost can be effectively reduced, and the tube material of the target body is preferably one of titanium, titanium alloy, zirconium alloy, tantalum alloy, niobium alloy, chromium alloy, molybdenum alloy, high-purity copper and silver.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a low-cost vacuum deposition target according to embodiments 1 to 3 of the present invention.
In the figure: 1 is a pipe joint, 2 is a target pipe, 3 is a lining pipe, 4 is a sealing connection, 5 is a transition layer, and 6 is a cooling pipeline.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, embodiment 1 of the present invention discloses a low-cost target for vacuum coating, which comprises a target tube, a transition layer and an inner lining tube, which are sequentially sleeved from outside to inside; the hollow structure of the lining pipe forms a cooling pipeline.
The target body tube is provided with a threaded structure at two ends, and can be connected with a coating cavity of coating equipment through the threaded structure, so that the target body tube is convenient to disassemble and connect; the outer diameter of the target tube is 160mm, the wall thickness is 10mm, the length is 1600mm, and the material is pure zirconium.
The lining pipe is made of 6061 aluminum alloy, and has an outer diameter of 139.5mm, a thickness of 6mm and a length of 1600 mm.
The transition layer is formed by nesting graphite foils, and the thickness of the transition layer is 0.5 mm.
And the two ends of the target body pipe, the transition layer and the lining pipe are elastically pressed and connected through a circular silica gel sealing ring, the diameter of the rubber ring is 0.8mm, and the rubber ring is pressed between the target body pipe and the lining pipe.
In contrast, pure zirconium targets with an outer diameter of 160mm, an inner diameter of 127mm and a length of 1600mm are commonly used as targets for vacuum coating in the industry at present.
Compared with the conventional zirconium target tube in the field, the target for vacuum coating disclosed by the embodiment 1 of the invention has the advantage that the consumption of the zirconium material is reduced by 35%. Because the aluminum pipe which is mature in rolling process, stable in quality and low in price is adopted, the problem of cooling liquid leakage caused by unstable quality of the pipe is greatly reduced, and the production cost is greatly reduced.
Meanwhile, as the invention adopts the graphite foil as the transition layer process, the transition layer is exposed due to gradual consumption in the use process of the vacuum coating of the target tube, and the graphite is a good electric conductor and stronger arc light is observed in the exposed area, thereby forming the use state mark.
In addition, the rubber ring is used for sealing, so that the cooling liquid can be effectively prevented from leaking into the vacuum cavity through the transition layer under the condition that the target body tube is consumed and the lining tube is exposed, and the safe use of the product is ensured.
Therefore, coating operators can use the target material to the maximum extent, and the graphite melting point and the boiling point are far higher than those of zirconium metal, so that the pollution to the coating vacuum cavity is small, and the operators can stop sputtering coating as required.
In the embodiment, the lining pipe is made of aluminum, the transition layer is made of graphite and is a good thermal conductor, the lining pipe has excellent heat conduction and heat dissipation functions, and the target pipe has better heat dissipation efficiency, so that the coating process is more stable, and the film layer is better and uniform.
Therefore, compared with the traditional target material, the overall cost is reduced by more than 30%, and the product quality and the use stability are improved.
Example 2
As shown in fig. 1, embodiment 2 of the present invention provides a low-cost target for vacuum coating, including a target tube, a transition layer, and an inner liner tube sequentially sleeved from outside to inside; the hollow structure of the lining pipe forms a cooling pipeline; and sequentially sleeving the target pipe and the lining pipe through the transition layer, and rolling to obtain the final size of the product.
The target body tube is provided with a threaded structure at two ends, and can be connected with an empty coating cavity of the coating equipment through the threaded structure, so that the target body tube is convenient to disassemble and connect; the outer diameter of the target body tube is 160mm, the thickness is 10mm, the length is 1600mm, and the material is pure titanium;
the lining pipe is made of Q235 seamless steel, the outer diameter is 136mm, the thickness is 3mm, and the length is 1600 mm;
the transition layer is formed by spraying titanium oxide, and the thickness of the transition layer is 2 mm;
and the two ends of the target pipe, the transition layer and the lining pipe are sealed by argon arc welding.
In contrast, pure titanium targets with an outer diameter of 160mm, an inner diameter of 130mm and a length of 1600mm are commonly used as targets for vacuum coating in the industry at present.
Compared with the conventional titanium target tube in the field, the target for vacuum coating disclosed by the embodiment 2 of the invention has the advantage that the use amount of the titanium material is reduced by 30%. Because the seamless steel pipe with mature rolling process and stable quality is adopted, the problem of coolant leakage caused by unstable pipe quality is greatly reduced, and the product quality is improved.
Meanwhile, because the invention adopts the process of spraying the titanium oxide transition layer, the transition layer is exposed due to gradual consumption of the target tube in the use process of vacuum coating, and the titanium oxide is not conductive and can not observe arc light in the exposed area, thereby forming the use state mark.
The coating film layer of this embodiment is the mixed rete of titanium metal rete and titanium oxide, and a small amount of titanium oxide of transition layer is sputtered to the rete and also can not pollute the rete quality, has guaranteed product quality.
In addition, through welded seal, the cooling liquid can be effectively prevented from leaking into the vacuum cavity through the transition layer under the condition that the target body tube is consumed and the lining tube is exposed, and the safe use of the product is ensured.
Therefore, coating operators can use the target material to the maximum extent, the vacuum cavity cannot be polluted, and sputtering coating can be stopped as required. Therefore, compared with the traditional target material, the whole cost is greatly reduced by more than 20%, and the product quality and the use stability are improved.
Example 3
As shown in fig. 1, embodiment 3 of the present invention provides a low-cost target for vacuum coating, including a target tube, a transition layer, and an inner liner tube sequentially sleeved from outside to inside; the hollow structure of the lining pipe forms a cooling pipeline; and sequentially sleeving the target pipe and the lining pipe through the transition layer, and rolling to obtain the final size of the product.
The target body tube is provided with a threaded structure at two ends, and can be connected with an empty coating cavity of the coating equipment through the threaded structure, so that the target body tube is convenient to disassemble and connect; the outer diameter of the target body tube is 160mm, the thickness is 10mm, the length is 1600mm, and the material is pure niobium;
the lining pipe is made of 304 seamless stainless steel, and has an outer diameter of 136mm, a thickness of 3mm and a length of 1600 mm;
the transition layer is formed by spraying mixed powder of niobium oxide and silicon oxide, the weight ratio is 5:1, and the thickness is 2 mm;
and the two ends of the target pipe, the transition layer and the lining pipe are sealed by argon arc welding.
In contrast, pure titanium targets with an outer diameter of 160mm, an inner diameter of 130mm and a length of 1600mm are commonly used as targets for vacuum coating in the industry at present.
Compared with the conventional niobium target tube in the field, the target for vacuum coating disclosed by the embodiment 3 of the invention has the advantage that the consumption of niobium materials is reduced by 30%. Because the seamless stainless steel pipe with mature rolling process and stable quality is adopted, the problem of cooling liquid leakage caused by unstable pipe quality is greatly reduced, the cost is reduced, and the product quality is improved.
Meanwhile, because the invention adopts the process of spraying the transition layer, the transition layer is exposed due to gradual consumption in the use process of vacuum coating of the target tube, and the transition layer is not conductive, so that arc light cannot be observed in the exposed area, thereby forming the use state mark.
In the embodiment, the mixed powder of niobium oxide and silicon oxide is used, the melting point of the silicon oxide is only 1723 ℃, and the temperature in the sputtering process is up to 2000-3000 ℃, so that the silicon oxide has the function of a binder under a high-temperature condition, and the falling of a transition layer and the pollution to a coating cavity are further avoided.
In addition, through welded seal, the cooling liquid can be effectively prevented from leaking into the vacuum cavity through the transition layer under the condition that the target body tube is consumed and the lining tube is exposed, and the safe use of the product is ensured.
Therefore, coating operators can use the target material to the maximum extent, the vacuum cavity cannot be polluted, and sputtering coating can be stopped as required. Therefore, compared with the traditional target material, the whole cost is greatly reduced by more than 20%, and the product quality and the use stability are improved.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description. The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. A low-cost target for vacuum coating is characterized by comprising a target pipe, a transition layer and an inner lining pipe which are sequentially sleeved from outside to inside;
the two ends of the target body tube are provided with tube joints, and the target body tube can be connected with a coating device through the tube joints;
the two ends of the target pipe, the transition layer and the lining pipe are hermetically connected;
the hollow structure of the lining pipe forms a cooling pipeline;
the sealing connection comprises welding, copper ring sealing connection, rubber ring sealing connection or polytetrafluoroethylene sealing connection;
the transition layer is made of one or more of polymer resin, graphite, inorganic salt and oxide;
the lining pipe is made of any one of stainless steel, carbon steel, copper alloy, aluminum and aluminum alloy;
and the target body pipe, the transition layer and the lining pipe are sequentially sleeved and then rolled.
2. The low-cost vacuum plating target according to claim 1, wherein the pipe joint has a threaded structure.
3. The low-cost vacuum plating target according to claim 1, wherein the oxide comprises any one of titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, and molybdenum oxide.
4. The low-cost vacuum plating target according to claim 3, wherein the transition layer is an oxide of a constituent material of the target tube.
5. The low-cost target for vacuum deposition according to claim 1, wherein the target tube is made of any one of titanium, titanium alloy, zirconium alloy, tantalum alloy, niobium alloy, chromium alloy, molybdenum alloy, high-purity copper, and silver.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7785921B1 (en) * | 2009-04-13 | 2010-08-31 | Miasole | Barrier for doped molybdenum targets |
| WO2014022288A1 (en) * | 2012-08-01 | 2014-02-06 | Materion Advanced Materials Technologies And Services Inc. | Direct cooled rotary sputtering target |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CA2418807A1 (en) * | 2000-09-08 | 2003-02-05 | Asahi Glass Company, Limited | Cylindrical target and its production method |
| WO2014150664A1 (en) * | 2013-03-15 | 2014-09-25 | Materion Corporation | Plating stack to condition a bonding surface |
| US11094514B2 (en) * | 2018-12-21 | 2021-08-17 | Oumeida Applied Materials Technology Co., Ltd. | Rotatable sputtering target |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7785921B1 (en) * | 2009-04-13 | 2010-08-31 | Miasole | Barrier for doped molybdenum targets |
| WO2014022288A1 (en) * | 2012-08-01 | 2014-02-06 | Materion Advanced Materials Technologies And Services Inc. | Direct cooled rotary sputtering target |
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