CN113293350B - Titanium alloy surface modification method - Google Patents

Titanium alloy surface modification method Download PDF

Info

Publication number
CN113293350B
CN113293350B CN202110582236.0A CN202110582236A CN113293350B CN 113293350 B CN113293350 B CN 113293350B CN 202110582236 A CN202110582236 A CN 202110582236A CN 113293350 B CN113293350 B CN 113293350B
Authority
CN
China
Prior art keywords
titanium alloy
target
graphite
modifying
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110582236.0A
Other languages
Chinese (zh)
Other versions
CN113293350A (en
Inventor
吴红艳
张成远
赵科
杨欣烨
王鹏
于林汕
范哲航
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Information Science and Technology
Original Assignee
Nanjing University of Information Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Information Science and Technology filed Critical Nanjing University of Information Science and Technology
Priority to CN202110582236.0A priority Critical patent/CN113293350B/en
Publication of CN113293350A publication Critical patent/CN113293350A/en
Application granted granted Critical
Publication of CN113293350B publication Critical patent/CN113293350B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a titanium alloy surface modification method, which comprises the steps of suspending a pretreated titanium alloy part in a graphite source target of a plasma metallurgical furnace, and inserting infiltrated metal/alloy rods (chromium, molybdenum, tungsten and other units and multi-element alloys) on the graphite source target to form a composite target structure; and (3) starting a glow electrode treatment technology, regulating the structural voltage of the composite target to 550-950V, and regulating the argon-nitrogen ratio to 3:3-3:0, so that the graphite source target and the titanium alloy workpiece are heated to 500-1000 ℃, bombarding the surface of the titanium alloy workpiece, and cooling after the treatment is finished, thereby obtaining the surface-modified titanium alloy workpiece. The invention uses high-melting point metal element and carbon/nitrogen element as sputtering target material source to carry out surface metallurgical treatment on the titanium alloy product to form a high-hardness wear-resistant metallurgical ceramic layer, the components of the ceramic layer on the metal surface and the hardness are distributed in a gradient way, the modification method is simple, the combination of the modification layer and the base layer is tight, and the combination strength is high.

Description

Titanium alloy surface modification method
Technical Field
The invention relates to a surface modification method, in particular to a titanium alloy surface modification method.
Background
With the development of equipment manufacturing industry, the requirements for hard alloy processing parts such as tools and gears made of titanium alloy are continuously improved, in the cutting processing, the hardness and strength of the tools directly affect the processing efficiency, precision and surface quality, but the contradiction exists between the strength and the hardness, the material with high hardness is low in strength, and the improvement of the strength is often at the cost of the reduction of the hardness, and the contradiction cannot be reconciled only by changing the tool materials. In order to solve the contradiction, one or more layers of high-hardness and high-wear-resistance materials are coated on a titanium alloy cutter substrate, the conventional method comprises Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD), the coating prepared by the CVD technology has good wear resistance, but the CVD technology has high treatment temperature, the bending strength of the cutter material is easy to be reduced, meanwhile, the inside of the film is in a tensile stress state, microcracks are easy to be generated when the cutter is used, and the waste gas and waste liquid discharged by the CVD technology can cause larger environmental pollution and contradict the environment-friendly manufacturing concept advocated by great force at present, so that development and application are limited in the middle ninety years; the PVD technique can control the processing temperature below 500 ℃ without environmental influence, but a boundary layer exists between the plating layer and the substrate, and the plating layer is easy to fall off under special conditions such as impact, impact and the like.
Disclosure of Invention
The invention aims to: the invention aims to provide a titanium alloy surface modification method capable of forming a ceramic modification layer with high hardness and wear resistance on the surface of a titanium alloy workpiece.
The technical scheme is as follows: the invention relates to a titanium alloy surface modification method, which comprises the following steps:
(1) Pretreating the surface of a titanium alloy workpiece;
(2) Suspending the pretreated titanium alloy workpiece in a graphite source target of a plasma metallurgical furnace, and inserting a metal rod into the graphite source target to form a composite target structure;
(3) And (3) carrying out glow electrode treatment on the titanium alloy product.
In the step (1), the pretreatment includes: polishing the surface of the titanium alloy product, and then placing the titanium alloy product in acetone for ultrasonic cleaning.
In the step (2), the metal rod is pure chromium, pure molybdenum or pure tungsten and alloy.
The step (3) includes: firstly, pre-bombarding and preheating a titanium alloy workpiece under the condition of 20-40 Pa inert argon gas and 200-500V voltage; and then introducing nitrogen to ensure that the argon-nitrogen ratio is 3:3-0, increasing the working air pressure to 40-100Pa and the voltage to 550-1000V, heating the composite target and the titanium alloy part to 500-1000 ℃, and cooling after the treatment is finished to obtain the surface modified titanium alloy part.
In the step (2), the graphite source electrode target material is a hollow cylindrical graphite target material, the height is 200-400 mm, the outer diameter is 50-400 mm, the inner diameter is 50-300 mm, and a circular hole array with the diameter of 2-5mm is processed in the middle of the graphite source electrode target material. Preferably, the round holes in the round hole array are larger than 5 rows longitudinally along the graphite source electrode target material and are spaced 2-5mm transversely.
Further, hanging the pretreated titanium alloy workpiece in the graphite source target of the plasma metallurgical furnace, so that the titanium alloy workpiece is positioned at the center of the circular hole array area; and inserting a metal rod into the round hole of the graphite source electrode target material to form a composite target material structure.
In the step (3), the surface of the titanium alloy workpiece is pre-bombarded under 20-40 Pa of inert argon gas, and the voltage of the titanium alloy workpiece is 300-400V.
In the step (3), after the surface of the titanium alloy workpiece is pre-bombarded, nitrogen can be introduced to ensure that the argon-nitrogen ratio is 3:1-3, and the working air pressure is increased to 40-100 Pa.
In the step (3), the voltage of the graphite composite target structure is 550-1000V, and the voltage of the titanium alloy workpiece is 200-500V.
In the step (3), the temperature is reduced under the protection of micro-glow.
The principle of the invention: the principle of the plasma glow discharge technology is mainly that glow discharge is generated between a cathode and an anode as well as between the source and the anode through high voltage at the cathode and the source, a large amount of argon atoms in a cavity are ionized into argon ion forms, the argon ions continuously bombard graphite targets of the source under the action of an electric field and a magnetic field to sputter the argon ions in the forms of atoms, ions and particle clusters, and the atoms, the ions and the particle clusters with stronger activity can move towards titanium alloy parts under the action of the electric field and the magnetic field at a certain energy. The substrate, namely the cathode, also has glow discharge effect, partial argon ions bombard the substrate to generate vacancy defects, so that graphite particles are conveniently adsorbed and deposited on the surface of the substrate, atoms in the substrate and the surface of the substrate move vigorously under the action of high temperature, the diffusion effect of the atoms is enhanced, and the atoms on the surface of the substrate and the atoms in the substrate can diffuse mutually, so that a ceramic layer which is well combined and has high hardness and strength is formed on the surface of the infiltrated substrate.
The advantages of the hollow cylindrical graphite target are mainly two, and firstly, the advantages of the shape are that the cross section of the cylindrical target is circular, so that the cathode substrate can be placed at the center of the cylindrical target, the polar distance between the source electrode target and the cathode substrate is ensured to be certain, and meanwhile, the surface of the substrate can be prevented from being polluted by impurity atoms generated at the positions of a polar rod and the like. Secondly, a metal rod is inserted into the round hole of the graphite target, multi-element co-permeation is realized by utilizing the point discharge effect, the electric field intensity of the point part is stronger, and the ionization and permeation plating effects of elements in the metal rod can be enhanced.
The technical difficulties of the invention are as follows: the synchronous treatment process of alloy carbide, nitride and carbonitride on the surface of a titanium alloy workpiece realizes the core of the process in the design of a cylindrical structure, wherein the design comprises the cylindrical thickness, the pore diameter and the pore distribution have obvious influence on the promotion of the plasma generation rate and the concentration distribution.
Compared with the prior art, the invention has the following beneficial effects:
(1) The high-melting-point metal element and the carbon element are used as target materials, the surface metallurgical treatment is carried out on the titanium alloy workpiece to form a high-hardness wear-resistant metallurgical ceramic layer, the components and the hardness of the ceramic layer on the metal surface are distributed in a gradient way, the thickness of the metallurgical layer can reach more than 60 micrometers, and the hardness is more than 2000HV0.1;
(2) The modification method is simple, the modified layer and the base layer are tightly combined, and the combination strength is high.
Drawings
FIG. 1 is a scanning electron microscope image of a cross section of a surface modified titanium alloy article of example 1;
FIG. 2 is a graph showing the variation of the surface hardness of the surface-modified titanium alloy article with the pressing depth in example 1;
FIG. 3 is a graphical surface metallographic micrograph of hardness as a function of depth of indentation;
fig. 4 is a schematic view of a cylindrical graphite target.
FIG. 5 is a surface metallurgical layer gear and its surface hardness; fig. (a) is a photograph of a gear having a composite plating layer, and fig. (b) is a surface hardness value before and after the treatment.
Detailed Description
The present invention will be described in further detail with reference to examples.
The invention discloses a titanium alloy surface modification method, which comprises the following steps:
(1) Pretreating the surface of a titanium alloy workpiece;
(2) Suspending the pretreated titanium alloy workpiece in a graphite source electrode target material of a plasma metallurgical furnace, and inserting a infiltrated metal rod into the graphite source electrode target material to form a composite target material structure;
(3) The glow electrode treatment technology is started, firstly, the surface of a titanium alloy workpiece is pre-bombarded under the inert argon gas of 30-55 Pa, the voltage of the titanium alloy workpiece is 200-500V, then, nitrogen is introduced, the argon-nitrogen ratio is 3:3-3:0, the working air pressure is increased to 40-100Pa, the working voltage of the composite target is regulated to the required voltage of 550-1000V, the composite target and the titanium alloy workpiece are treated, the temperature of the composite target and the titanium alloy workpiece is increased to 500-1000 ℃, and the temperature is reduced after the treatment is finished, so that the surface modified titanium alloy workpiece is obtained.
The method comprises the steps of (1) polishing the surface of a titanium alloy workpiece, then placing the titanium alloy workpiece in acetone for ultrasonic cleaning, wherein the composite target material in step (2) is a hollow cylindrical graphite target material with the height of 200-400 mm, the outer diameter of 50-400 mm, the inner diameter of 50-300 mm, a round hole array with the diameter of 2-5mm is processed in the middle of a graphite source electrode target material, round holes in the round hole array are longitudinally larger than 5 rows along the graphite source electrode target material, the transverse interval is 2-5mm, an insertable metal rod in the round hole of the graphite target material in step (2) is a pure chromium metal target material or a pure tungsten metal target material, 30-55 Pa of inert argon gas is firstly used in a plasma metallurgical furnace in step (3), the surface of the titanium alloy workpiece is pre-bombarded under 30-55 Pa of inert gas in step (3), the voltage of the titanium alloy workpiece is 300-400V during pre-bombardment, and then 3:3-3:0 of argon-nitrogen mixed gas is introduced, so that the mixed gas pressure can reach 40-100Pa, the voltage of the graphite source electrode target material is 800-1000V, the voltage of the titanium alloy workpiece is 200-1000 Pa, and the micro-cooling is prepared under the condition of 500 Pa.
Example 1
(1) And (3) carrying out surface polishing treatment on the titanium alloy gear, then placing the titanium alloy gear in acetone for ultrasonic cleaning, hanging the pretreated titanium alloy gear at the central position of a cylindrical graphite source electrode target material of a plasma metallurgical furnace, and enabling the gear to be positioned at the middle position of a hole array of the graphite source electrode target material.
(2) As shown in fig. 4, the height of the cylindrical graphite target is 200mm, the outer diameter is 60mm, the inner diameter is 55mm, a circular hole array is processed in the middle, the diameter of the circular holes is 4mm, the longitudinal direction is 9 rows, the transverse interval is 3mm, and co-doped pure chromium metal rods are inserted into all the hole structures, wherein the size is phi 4mm multiplied by 10mm;
(3) Opening a vacuum pump, pumping the furnace to a final vacuum, filling argon to 20Pa, pumping again to the final vacuum degree, reciprocating for 2-3 times so as to remove air in the furnace as much as possible, filling argon to 35Pa, opening cooling water, turning on a workpiece power supply, applying 300V voltage to a titanium alloy gear, pre-bombarding a sample for about 10 minutes, cleaning the sample on one hand, and activating the surface so as to facilitate the adsorption of active atoms on the other hand; after pre-bombardment, adjusting the cylindrical graphite source electrode to a test value of 900V, adjusting the titanium alloy sheet-making voltage to 450V, enabling the titanium alloy gear and the cylindrical graphite source electrode to reach the working temperature of 960 ℃, stabilizing all process parameters and starting to keep the temperature for 3 hours; closing a source power supply, adjusting the air pressure to 20Pa, reducing the cathode voltage to 200V, and reducing the temperature under the protection of micro-glow; the gas source and the cathode power supply are closed, the furnace is pumped to the extreme vacuum, cooled to the room temperature and discharged, a high-hardness wear-resistant chromium and graphite composite layer is formed on the surface of the titanium alloy gear, as shown in figure 1, a chromium-carbon composite coating is arranged at the position A, obvious infiltration element change exists at the position B, the titanium alloy gear belongs to an element diffusion layer between a deposition layer and a matrix, and C is the titanium alloy gear matrix, so that the obvious advantage of the composite coating design by utilizing the double-glow technology is that the combination between the deposition layer and the matrix is better, the combination of different element layers is realized through the middle diffusion layer, and the integral hardness and wear resistance of the material are improved.
Fig. 2 is a graph for testing the surface hardness of a single chromium layer and a surface modified titanium alloy gear, wherein the hardness of the material is continuously reduced along with the increase of the pressing depth, and finally the material tends to be stable, and after the two layers are compared, the overall hardness of the chromium-carbon composite coating is always higher than that of the chromium single coating, and the penetration of carbon increases the hardness of the material. The metallographic photograph of the surface modified titanium alloy gear is shown in fig. 3, a large number of unit cells exist in the photograph, the grain boundary is clear, the tissue distribution is compact and uniform, the crystal grain growth condition is good, the chromium-carbon composite infiltration layer is uniformly deposited in double-glow sputtering, and the coating quality is high. Meanwhile, a large number of black spots, namely carbon elements, are distributed in the unit cells, the distribution is uniform, the permeability is good, and the hardness and the wear resistance of the matrix are enhanced.
Example 2
(1) And (3) carrying out surface polishing treatment on the titanium alloy gear, then placing the titanium alloy gear in acetone for ultrasonic cleaning, hanging the pretreated titanium alloy gear in the center of a cylindrical graphite source target of a plasma metallurgical furnace, and enabling the gear to be positioned in the middle of a hole array of the graphite source target.
(2) Based on the dimension of the cylindrical graphite target in FIG. 4, the height is 200mm, the outer diameter is 60mm, the inner diameter is 55mm, a circular hole array is processed in the middle, the diameter of the circular holes is 5mm, the longitudinal rows are 20, the transverse intervals are 3mm, and co-doped pure tungsten metal rods are inserted into all the hole structures, wherein the dimension is phi 5mm multiplied by 10mm;
(3) Opening a vacuum pump, pumping the furnace to a final vacuum, filling argon to 20Pa, pumping again to the final vacuum degree, reciprocating for 2-3 times so as to remove air in the furnace as much as possible, filling argon to 35Pa, opening cooling water, turning on a workpiece power supply, applying 300V voltage to a titanium alloy gear, pre-bombarding a sample for about 10 minutes, cleaning the sample on one hand, and activating the surface so as to facilitate the adsorption of active atoms on the other hand; after pre-bombardment, introducing argon-nitrogen mixed gas with the ratio of 3:2 to ensure that the mixed gas pressure can reach 90Pa, adjusting the cylindrical graphite source electrode to a test value of 950V, adjusting the voltage of a titanium alloy workpiece to 450V, ensuring that the titanium alloy gear and the cylindrical graphite source electrode reach the working temperature of 970 ℃, stabilizing all process parameters and starting to keep the temperature for 4 hours; closing a source power supply, adjusting the air pressure to 20Pa, reducing the cathode voltage to 200V, and reducing the temperature under the protection of micro-glow; and (3) closing an air source and a cathode power supply, pumping the furnace to a final vacuum, cooling to room temperature, and discharging to form a high-hardness wear-resistant tungsten and graphite composite layer on the surface of the titanium alloy gear.
FIG. 5 shows a sample of a carbonitride composite metallurgical layer of Ti doped with tungsten, with a surface hardness up to 2400HV0.1, which is improved by a factor of 6 over the hardness of the matrix.

Claims (8)

1. A method for modifying the surface of a titanium alloy, comprising the steps of:
(1) Pretreating the surface of a titanium alloy workpiece;
(2) Suspending the pretreated titanium alloy workpiece in a graphite source target of a plasma metallurgical furnace, and inserting a metal rod into the graphite source target to form a composite target structure;
the graphite source electrode target is a hollow cylindrical graphite target, the height is 200-400 mm, the outer diameter is 50-100 mm, the inner diameter is 50-90 mm, and a circular hole array with the diameter of 3-5 mm is processed in the middle of the graphite source electrode target;
the round holes in the round hole array are circumferentially distributed 20-50 along the graphite source target, and 6-10 rows are longitudinally arranged; and (3) carrying out glow metal infiltration treatment on the titanium alloy product.
2. The method for modifying a surface of a titanium alloy according to claim 1, wherein the step (3) comprises: firstly, introducing 20-40 Pa inert argon gas, and pre-bombarding and pre-heating the titanium alloy workpiece under the voltage condition of 200-500V; and the post-voltage is increased to 550-1000V, so that the temperature of the composite target and the titanium alloy part is increased to 500-1000 ℃, and the temperature is reduced after the treatment is finished, thus obtaining the surface modified titanium alloy part.
3. The method for modifying the surface of the titanium alloy according to claim 2, wherein the pretreated titanium alloy part is suspended in a graphite source target material of a plasma metallurgical furnace, so that the titanium alloy part is positioned at the center of the circular hole array area; and inserting a metal rod into the round hole of the graphite source electrode target material to form a composite target material structure.
4. The method for modifying a surface of a titanium alloy according to claim 1, wherein in the step (2), the metal rod is pure chromium, pure molybdenum or pure tungsten.
5. The method for modifying the surface of a titanium alloy according to claim 1, wherein in the step (3), the surface of the titanium alloy workpiece is pre-bombarded under an inert gas of 20-40 Pa, and the voltage of the titanium alloy workpiece is 300-400V.
6. The method for modifying the surface of the titanium alloy according to claim 1, wherein in the step (3), argon-nitrogen mixed gas is introduced after the pre-bombardment and the pre-heating treatment, the argon-nitrogen ratio is 3:1-3, the working air pressure is increased to 40-100Pa, and the voltage is increased to 550-1000V.
7. The method for modifying the surface of a titanium alloy according to claim 1, wherein in the step (3), the voltage of the graphite composite target structure is 550-1000V, and the voltage of the titanium alloy product is 200-500V.
8. The method for modifying the surface of a titanium alloy according to claim 1, wherein in the step (3), the temperature is lowered under the protection of a micro-glow.
CN202110582236.0A 2021-05-26 2021-05-26 Titanium alloy surface modification method Active CN113293350B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110582236.0A CN113293350B (en) 2021-05-26 2021-05-26 Titanium alloy surface modification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110582236.0A CN113293350B (en) 2021-05-26 2021-05-26 Titanium alloy surface modification method

Publications (2)

Publication Number Publication Date
CN113293350A CN113293350A (en) 2021-08-24
CN113293350B true CN113293350B (en) 2023-05-23

Family

ID=77325524

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110582236.0A Active CN113293350B (en) 2021-05-26 2021-05-26 Titanium alloy surface modification method

Country Status (1)

Country Link
CN (1) CN113293350B (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1451779A (en) * 2002-03-11 2003-10-29 太原理工大学表面工程研究所 Process for glow ion hydrogen-free carbonizing titanium surface
CN203613259U (en) * 2013-12-02 2014-05-28 北京石油化工学院 Isoelectric acicular cathode glow discharge device for surface modifying of titanium alloy
CN104388891A (en) * 2014-12-05 2015-03-04 西安赛福斯材料防护有限责任公司 Hardening method of inner surface of cylinder barrel of titanium and titanium alloy hydraulic cylinder
CN105386049B (en) * 2015-11-21 2017-10-10 太原理工大学 A kind of method for preparing gradient hard composite coating in carbide surface
CN105734487B (en) * 2016-03-11 2018-04-13 太原理工大学 A kind of method that titanium alloy gear surface prepares obdurability molybdenum gradient modified layer
CN106337161B (en) * 2016-12-01 2018-09-21 西北有色金属研究院 A kind of method of titanium-based or zirconium-based metallic surface plasma oxygen-carbon co-cementation
CN108796493B (en) * 2018-06-04 2020-11-06 常熟理工学院 Hole sealing modification method for cold spraying coating on surface of light metal
CN109023362B (en) * 2018-07-09 2020-12-29 中国人民解放军空军勤务学院 Impact-resistant wear-resistant lubricating composite coating on surface of hydraulic valve rod and preparation method thereof
CN111575643A (en) * 2020-05-29 2020-08-25 太原理工大学 Method for preparing tantalum diffusion layer on surface of titanium alloy

Also Published As

Publication number Publication date
CN113293350A (en) 2021-08-24

Similar Documents

Publication Publication Date Title
US7160616B2 (en) DLC layer system and method for producing said layer system
EP0797688B1 (en) Method for deposition of diamondlike carbon films
EP0797838B1 (en) Method and apparatus for plasma processing
EP2122006B1 (en) Methods and apparatus for forming diamond-like coatings
JPS6319590B2 (en)
CN108385066B (en) Preparation method of hydrogen-free metal doped diamond-like coating and product thereof
CN109338319A (en) A method of improving carbide surface titanium aluminium nitrogen coating obdurability
Zhang et al. Columnar and nanocrystalline combined microstructure of the nitrided layer by active screen plasma nitriding on surface-nanocrystalline titanium alloy
CN114351110B (en) Reinforced diamond-like film and preparation method thereof
EP2829635A1 (en) Method for controlled production of diffusion based coatings by vacuum cathodic arc systems
CN113265642B (en) Method for depositing diamond-like film on inner wall surface of metal cylinder (or pipe) with large length-diameter ratio
CN113293350B (en) Titanium alloy surface modification method
CN107002228B (en) plasma treatment and reactor for thermochemical treatment of the surface of metal pieces
CN108796493B (en) Hole sealing modification method for cold spraying coating on surface of light metal
CN113403577B (en) Method for improving binding force of Cu matrix and carbon-based film
CN114411098A (en) Coating method of TiNb coating
CN113564517A (en) Device and method for in-situ deposition of PVD (physical vapor deposition) coating after low-temperature rapid toughness nitriding
CN106756827B (en) A kind of process of surface treatment of jewellery rigid pure gold
CN109023286B (en) Composite gradient wear-resistant alloy layer and preparation method thereof
CN116356278A (en) High sp 3 Hydrogen-containing carbon-based film with C content and preparation method thereof
CN115287596B (en) Preparation method of chromium alloy layer on stainless steel
CN113502463B (en) Equipment for depositing diamond-like film on inner wall of metal cylinder (or pipe) with large length-diameter ratio
CA2207273C (en) Method and apparatus for plasma processing
US20220307123A1 (en) Multi-layer coating
CN116607100A (en) Continuous superhard wear-resistant infiltration layer on metal surface and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant