CN113284824A - Aspheric nitrogen annealing furnace - Google Patents
Aspheric nitrogen annealing furnace Download PDFInfo
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- CN113284824A CN113284824A CN202110526450.4A CN202110526450A CN113284824A CN 113284824 A CN113284824 A CN 113284824A CN 202110526450 A CN202110526450 A CN 202110526450A CN 113284824 A CN113284824 A CN 113284824A
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 102
- 238000000137 annealing Methods 0.000 title claims abstract description 52
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 45
- 238000007789 sealing Methods 0.000 claims abstract description 28
- 239000007789 gas Substances 0.000 claims abstract description 19
- 238000011084 recovery Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 239000002912 waste gas Substances 0.000 claims abstract description 13
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 12
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 1
- 238000013461 design Methods 0.000 description 18
- 230000000694 effects Effects 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses an aspheric nitrogen annealing furnace, which comprises an annealing furnace main body, wherein the annealing furnace main body comprises a furnace body, an inner furnace chamber is arranged in the furnace body, a plurality of heating components are arranged in the inner furnace chamber, the plurality of heating components are uniformly arranged on the inner furnace chamber, a sealing groove is arranged at the top of the furnace body, a sealing ring is arranged in the sealing groove, the top of the sealing ring is connected with a furnace cover, the bottom of the furnace cover is connected with an annealing frame, the annealing frame is provided with a plurality of placing plates, the furnace cover is provided with a gas detector, the furnace cover is connected with a nitrogen gas outlet pipe, a solenoid valve is arranged in the nitrogen gas outlet pipe, the other side of the nitrogen gas outlet pipe is connected with a waste gas recovery box, the bottom of the waste gas recovery box is connected with a mounting sleeve, the mounting sleeve is arranged at the top of the furnace cover, a servo motor is arranged in the mounting sleeve, the power output end of the servo motor is connected with a rotary rod, the rotary rod penetrates through the furnace cover and extends to the bottom of the rotary rod, the fan is connected with the fan, the bottom of the furnace body is connected with a mounting seat, and four corners of the bottom of the mounting seat are connected with standing legs.
Description
Technical Field
The invention belongs to the technical field of annealing furnaces, and particularly relates to an aspheric nitrogen annealing furnace.
Background
The annealing furnace is a process used in the manufacture of semiconductor devices, which comprises the steps of heating a plurality of semiconductor chips to influence the electrical property of the semiconductor chips, wherein the heat treatment is designed aiming at different effects, the chips can be heated to activate dopants, the thin film is converted into a chip substrate interface, so that the thin film which is densely deposited changes the state of the grown thin film, the damage of implantation is repaired, the dopants are moved or transferred from one thin film to another thin film or enter a wafer substrate from the thin film, but when the existing annealing furnace is used for heating, the processed workpiece in the annealing furnace is not uniformly heated, so that the working effect of the annealing furnace can be influenced while the resource waste is serious, the cooling rate is low, and the existing annealing furnace can not well remove the oxygen in the annealing furnace, and the use requirement of a user can not be met.
Disclosure of Invention
In view of the problems raised by the above background art, the present invention is directed to: aims to provide an aspheric nitrogen annealing furnace.
In order to achieve the technical purpose, the technical scheme adopted by the invention is as follows:
an aspheric nitrogen annealing furnace comprises an annealing furnace main body, wherein the annealing furnace main body comprises a furnace body, an inner furnace chamber is arranged in the furnace body, a heat insulation sleeve is arranged between the furnace body and the inner furnace chamber, a plurality of heating assemblies are arranged in the inner furnace chamber and are uniformly arranged on the inner furnace chamber, a sealing groove is arranged at the top of the furnace body, a sealing ring is arranged in the sealing groove, the top of the sealing ring is connected with a furnace cover, the bottom of the furnace cover is connected with an annealing frame, the annealing frame is provided with a plurality of placing plates, one side of the bottom of the furnace cover is provided with a gas detector, one side of the furnace cover is connected with a nitrogen outlet pipe, an electromagnetic valve is arranged in the nitrogen outlet pipe, the other side of the nitrogen outlet pipe is connected with a waste gas recovery box, the bottom of the waste gas recovery box is connected with a mounting sleeve, the mounting sleeve is arranged at the top of the furnace cover, and a servo motor is arranged in the mounting sleeve, the power output end of the servo motor is connected with a rotary rod, the rotary rod penetrates through the furnace cover and extends to the bottom of the furnace cover, the bottom of the rotary rod is connected with a fan, the bottom of the furnace body is connected with a mounting seat, four corners of the bottom of the mounting seat are connected with station feet, four bearing plates are fixedly connected between the station feet, a nitrogen storage tank is installed on the surface of each bearing plate, one side of the nitrogen storage tank is connected with an air adding pipe, the top of the nitrogen storage tank is connected with an air outlet pipe, the air outlet pipe is connected with an air pump, the air pump is installed at the bottom of the mounting seat, the other side of the air outlet pipe sequentially penetrates through the mounting seat, the furnace body, a heat insulation sleeve and the inner furnace cavity and is connected with an air outlet disc, the air outlet disc is installed at the bottom of the inner furnace cavity and is connected with a plurality of spray heads, the surface of the mounting seat is connected with a stand column, the top of the stand is connected with a top plate, the top plate is provided with a through groove, the bottom of the top plate is connected with a hydraulic cylinder, and the power output end of the hydraulic cylinder is connected with the furnace cover.
Further inject, the furnace body surface is connected with T type post, the both sides of T type post are equipped with the inclined plane, the bell is equipped with the recess in corresponding T type post department, the both sides of recess are equipped with the mounting groove, install compression spring in the mounting groove, compression spring's free end is connected with the limiting plate, the limiting plate is installed in the mounting groove, limiting plate connection has spacing fixture block, spacing fixture block be equipped with inclined plane assorted inclined plane. The structure design increases the connecting effect and improves the sealing performance in an auxiliary way.
Further inject, T type post top is equipped with inlays the groove, inlay the inslot and install negative pole magnet, negative pole magnet is connected with anodal magnet, anodal magnet is installed at the recess top. Such a structural design makes the connection more secure.
Further limiting, guide plates are welded on two sides of the furnace cover, guide holes are formed in the guide plates, guide pillars are installed in the guide holes, and the guide pillars are installed between the top plate and the installation base. The structural design has a guiding effect when the furnace cover moves.
Further limited, the air outlet pipe is connected with a flow regulating valve. The structural design is convenient for controlling the flow.
Further limiting, and triangular reinforcing ribs are arranged at the joints of the standing legs and the bearing plates. The structural design has more supporting stability.
Further inject, the foot bottom of standing is connected with the rubber foot pad, rubber foot pad bottom is equipped with wear-resisting anti-skidding line. Such structural design makes the support more stable, difficult antiskid.
Further inject, rotary rod is connected with the bearing seal cover, the bearing seal cover is installed in the bell. The structural design has a sealing effect.
Further inject, four corners at installation cover top are equipped with the location jack, install the location inserted bar in the location jack, location inserted bar fixed mounting is in exhaust gas recovery case's bottom. Such structural design is convenient for carry out the dismouting to exhaust gas recovery case.
Further limiting, the furnace cover and the annealing frame are arranged in an integrated structure. Such a structural design makes the connection more secure.
The invention has the following advantages:
1. according to the invention, the fan is arranged, and the servo motor drives the fan to rotate by controlling the servo motor, so that the heat in the inner furnace cavity is uniformly distributed, the processed workpiece is uniformly heated, the waste of resources is reduced, the working effect of the annealing furnace is not influenced, and the processing effect is improved;
2. according to the invention, the waste gas recovery box is arranged, and the oxygen and nitrogen discharged from the inner furnace cavity are collected in a centralized manner, so that the oxygen and nitrogen are convenient to recover and are convenient to recycle for secondary use;
3. according to the invention, the air pump is arranged, when the sealing ring on the furnace cover is inserted into the sealing groove for sealing, the air pump is used for pumping out the nitrogen in the nitrogen storage tank and spraying out the nitrogen from the spray head, so that the sprayed nitrogen is mixed with the oxygen in the inner furnace chamber and is discharged from the nitrogen outlet pipe at the top, the electromagnetic valve is controlled to be closed until the gas detector detects that the inner furnace chamber has no oxygen, and then the inner furnace chamber can be filled with the nitrogen, so that the effect of discharging the oxygen is good.
Drawings
The invention is further illustrated by the non-limiting examples given in the accompanying drawings;
FIG. 1 is a schematic structural diagram of an aspheric nitrogen annealing furnace according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of an aspheric nitrogen annealing furnace according to an embodiment of the present invention;
FIG. 3 is an enlarged schematic view of a portion A of the aspheric nitrogen annealing furnace according to the embodiment of the present invention;
the main element symbols are as follows:
the annealing furnace comprises an annealing furnace body 1, a furnace body 2, an inner furnace chamber 3, a heat insulation sleeve 4, a heating assembly 5, a sealing ring 6, a furnace cover 7, an annealing frame 8, a placing plate 9, a gas detector 10, a nitrogen gas outlet pipe 11, an electromagnetic valve 12, a waste gas recovery box 13, a mounting sleeve 14, a servo motor 15, a rotating rod 16, a fan 17, a mounting seat 18, a stand foot 19, a bearing plate 20, a nitrogen gas storage box 21, a gas adding pipe 22, a gas outlet pipe 23, a gas pump 24, a gas outlet disc 25, a spray head 26, a stand column 27, a top plate 28, a through groove 29, a hydraulic cylinder 30, a T-shaped column 31, an inclined surface 32, a groove 33, a mounting groove 34, a compression spring 35, a limiting plate 36, a limiting clamping block 37, an inclined surface 38, a negative magnet 39, a positive magnet 40, a guide plate 41, a guide column 42, a flow regulating valve 43, a triangular reinforcing rib 44, a rubber foot pad 45 and a positioning insertion rod 46.
Detailed Description
In order that those skilled in the art can better understand the present invention, the following technical solutions are further described with reference to the accompanying drawings and examples.
As shown in figures 1-3, the aspheric nitrogen annealing furnace of the invention, the annealing furnace main body 1 comprises a furnace body 2, an inner furnace chamber 3 is arranged in the furnace body 2, a heat insulation sleeve 4 is arranged between the furnace body 2 and the inner furnace chamber 3, a plurality of heating components 5 are arranged in the inner furnace chamber 3, the plurality of heating components 5 are uniformly arranged on the inner furnace chamber 3, a sealing groove is arranged at the top of the furnace body 2, a sealing ring 6 is arranged in the sealing groove, a furnace cover 7 is connected at the top of the sealing ring 6, an annealing frame 8 is connected at the bottom of the furnace cover 7, a plurality of placing plates 9 are arranged on the annealing frame 8, a gas detector 10 is arranged at one side of the bottom of the furnace cover 7, a nitrogen outlet pipe 11 is connected at one side of the furnace cover 7, an electromagnetic valve 12 is arranged in the nitrogen outlet pipe 11, a waste gas recovery box 13 is connected at the other side of the nitrogen outlet pipe 11, a mounting sleeve 14 is connected at the bottom of the waste gas recovery box 13, the mounting sleeve 14 is arranged at the top of the furnace cover 7, a servo motor 15 is arranged in the mounting sleeve 14, the power output end of the servo motor 15 is connected with a rotary rod 16, the rotary rod 16 penetrates through the furnace cover 7 and extends to the bottom of the furnace cover, the bottom of the rotary rod 16 is connected with a fan 17, the bottom of the furnace body 2 is connected with a mounting seat 18, four corners of the bottom of the mounting seat 18 are connected with station feet 19, bearing plates 20 are fixedly connected among the four station feet 19, the surface of each bearing plate 20 is provided with a nitrogen storage tank 21, one side of the nitrogen storage tank 21 is connected with an air adding pipe 22, the top of the nitrogen storage tank 21 is connected with an air outlet pipe 23, the air outlet pipe 23 is connected with an air pump 24, the air pump 24 is arranged at the bottom of the mounting seat 18, the other side of the air outlet pipe 23 sequentially penetrates through the mounting seat 18, the furnace body 2, the heat insulation sleeve 4 and the inner furnace cavity 3 and is connected with an air outlet disc 25, the air outlet disc 25 is arranged at the bottom of the inner furnace cavity 3, the air outlet disc 25 is connected with a plurality of spray heads 26, the surface of the mounting seat 18 is connected with a stand column 27, the top of the upright post 27 is connected with a top plate 28, the top plate 28 is provided with a through groove 29, the bottom of the top plate 28 is connected with a hydraulic cylinder 30, and the power output end of the hydraulic cylinder 30 is connected with the furnace cover 7.
When the device is used, workpieces to be processed are sequentially placed on the placing plate 9 on the annealing frame 8, after the workpieces are placed, the hydraulic cylinder 30 is controlled to push the furnace cover 7, the furnace cover 7 drives the annealing frame 8 to move downwards until the sealing ring 6 on the furnace cover 7 is inserted into the sealing groove to be sealed, the movement of the hydraulic cylinder 30 is stopped at the same time, then the air pump 24 is controlled to start working, nitrogen in the nitrogen storage tank 21 enters the air outlet disc 25 from the air outlet pipe 23 and is sprayed out from the spray head 26 on the air outlet disc 25 and is matched with the gas detector 10, when the nitrogen in the inner furnace cavity 3 exceeds the set value of the gas detector 10, the electromagnetic valve 12 is opened, the nitrogen in the inner furnace cavity 3 enters the waste gas recovery box 13 along the nitrogen outlet pipe 11, and meanwhile, oxygen also flows out from the nitrogen outlet pipe 11 and enters the waste gas recovery box 13 to be collected in a centralized manner, and finally, the heating assembly 5 is controlled to start to work for heating, and when the heating assembly is used for heating, the servo motor 15 is controlled to drive the fan 17 to rotate, so that the heat in the inner furnace chamber 3 is uniformly distributed, and the processing effect is improved.
Preferably, the surface of the furnace body 2 is connected with a T-shaped column 31, inclined planes 32 are arranged on two sides of the T-shaped column 31, a groove 33 is arranged at a position corresponding to the T-shaped column 31 of the furnace cover 7, mounting grooves 34 are arranged on two sides of the groove 33, a compression spring 35 is mounted in the mounting groove 34, a limiting plate 36 is connected to the free end of the compression spring 35, the limiting plate 36 is mounted in the mounting groove 34, a limiting block 37 is connected to the limiting plate 36, and the limiting block 37 is provided with an inclined plane 38 matched with the inclined planes 32. The structure design increases the connecting effect and improves the sealing performance in an auxiliary way. In fact, other connecting structure shapes of the furnace body 2 and the furnace cover 7 can be considered according to specific situations.
Preferably, the top of the T-shaped column 31 is provided with an embedding groove, a negative magnet 39 is arranged in the embedding groove, the negative magnet 39 is connected with a positive magnet 40, and the positive magnet 40 is arranged at the top of the groove 33. Such a structural design makes the connection more secure. In fact, other configurations of the T-shaped posts 31 may be used, as the case may be.
Preferably, guide plates 41 are welded on both sides of the furnace cover 7, guide holes are formed in the guide plates 41, guide posts 42 are installed in the guide holes, and the guide posts 42 are installed between the top plate 28 and the installation base 18. This design provides a guiding effect for the furnace cover 7 during movement. In practice, other guide configurations of the furnace cover 7 can be used, depending on the particular circumstances.
Preferably, the gas outlet pipe 23 is connected with a flow regulating valve 43. The structural design is convenient for controlling the flow. In fact, other configurations of the flow control valve 43 may be used, as the case may be.
Preferably, triangular reinforcing ribs 44 are arranged at the joints of the standing legs 19 and the carrier plates 20. The structural design has more supporting stability. In fact, other shapes of the connection structure between the standing foot 19 and the carrier plate 20 can be considered according to specific situations.
The bottom of the preferable standing foot 19 is connected with a rubber foot pad 45, and the bottom of the rubber foot pad 45 is provided with wear-resistant anti-skidding lines. Such structural design makes the support more stable, difficult antiskid. In fact, other configurations of the rubber foot 45 are contemplated as appropriate.
Preferably, the rotary rod 16 is connected to a bearing gland which is mounted in the furnace cover 7. The structural design has a sealing effect. In fact, other configurations of the bearing seal may be used, as the case may be.
Preferably, four corners of the top of the mounting sleeve 14 are provided with positioning insertion holes, positioning insertion rods 46 are installed in the positioning insertion holes, and the positioning insertion rods 46 are fixedly installed at the bottom of the waste gas recovery tank 13. Such structural design is convenient for carry out the dismouting to exhaust gas recovery case 13. In fact, other mounting and fixing structural shapes of the exhaust gas recovery tank 13 may be considered according to specific situations.
Preferably, the furnace cover 7 and the annealing frame 8 are arranged in an integrated structure. Such a structural design makes the connection more secure. In fact, other structural shapes of the furnace cover 7 and the annealing frame 8 may be considered according to specific situations.
The foregoing embodiments are merely illustrative of the principles of the present invention and its efficacy, and are not to be construed as limiting the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. Aspheric surface nitrogen gas annealing stove, including annealing stove main part (1), its characterized in that: the annealing furnace main body (1) comprises a furnace body (2), an inner furnace chamber (3) is arranged in the furnace body (2), a heat insulation sleeve (4) is arranged between the furnace body (2) and the inner furnace chamber (3), a plurality of heating assemblies (5) are installed on the inner furnace chamber (3), the heating assemblies (5) are uniformly arranged on the inner furnace chamber (3), a sealing groove is formed in the top of the furnace body (2), a sealing ring (6) is installed in the sealing groove, the top of the sealing ring (6) is connected with a furnace cover (7), the bottom of the furnace cover (7) is connected with an annealing frame (8), a plurality of placing plates (9) are installed on the annealing frame (8), a gas detector (10) is installed on one side of the bottom of the furnace cover (7), one side of the furnace cover (7) is connected with a nitrogen gas outlet pipe (11), and an electromagnetic valve (12) is installed in the nitrogen gas outlet pipe (11), the opposite side of nitrogen gas outlet duct (11) is connected with waste gas recovery case (13), waste gas recovery case (13) bottom is connected with installation cover (14), install cover (14) and install at bell (7) top, install servo motor (15) in installation cover (14), the power take off end of servo motor (15) is connected with rotary rod (16), rotary rod (16) run through bell (7) and extend to its bottom, rotary rod (16) bottom is connected with fan (17), furnace body (2) bottom is connected with mount pad (18), four corners in mount pad (18) bottom are connected with station foot (19), four fixedly connected with carrier plate (20) between station foot (19), carrier plate (20) surface mounting has nitrogen gas bin (21), one side of nitrogen gas bin (21) is connected with gas filling pipe (22), nitrogen gas bin (21) top is connected with outlet duct (23), outlet duct (23) are connected with air pump (24), install in mount pad (18) bottom air pump (24), the opposite side of outlet duct (23) runs through mount pad (18), furnace body (2), radiation shield (4) and interior furnace chamber (3) in proper order and is connected with air outlet disc (25), the bottom of furnace chamber (3) including air outlet disc (25) are installed, air outlet disc (25) are connected with a plurality of shower nozzles (26), mount pad (18) surface connection has stand (27), stand (27) top is connected with roof (28), roof (28) are equipped with logical groove (29), roof (28) bottom is connected with hydraulic cylinder (30), the power take off end of hydraulic cylinder (30) is connected with bell (7).
2. The aspheric nitrogen annealing furnace according to claim 1, characterized in that: furnace body (2) surface connection has T type post (31), the both sides of T type post (31) are equipped with inclined plane (32), bell (7) are located to be equipped with recess (33) corresponding T type post (31), the both sides of recess (33) are equipped with mounting groove (34), install compression spring (35) in mounting groove (34), the free end of compression spring (35) is connected with limiting plate (36), install in mounting groove (34) limiting plate (36), limiting plate (36) are connected with spacing fixture block (37), spacing fixture block (37) be equipped with inclined plane (32) assorted inclined plane (38).
3. The aspheric nitrogen annealing furnace according to claim 2, characterized in that: t type post (31) top is equipped with inlays the groove, inlay the inslot and install negative pole magnet (39), negative pole magnet (39) are connected with positive pole magnet (40), install at recess (33) top positive pole magnet (40).
4. The aspheric nitrogen annealing furnace according to claim 3, characterized in that: guide plates (41) are welded on two sides of the furnace cover (7), guide holes are formed in the guide plates (41), guide columns (42) are installed in the guide holes, and the guide columns (42) are installed between the top plate (28) and the installation base (18).
5. The aspheric nitrogen annealing furnace according to claim 4, characterized in that: the air outlet pipe (23) is connected with a flow regulating valve (43).
6. The aspheric nitrogen annealing furnace according to claim 5, characterized in that: a triangular reinforcing rib (44) is arranged at the joint of the standing foot (19) and the bearing plate (20).
7. The aspheric nitrogen annealing furnace according to claim 6, characterized in that: the bottom of the standing foot (19) is connected with a rubber foot pad (45), and the bottom of the rubber foot pad (45) is provided with wear-resistant anti-skidding lines.
8. The aspheric nitrogen annealing furnace according to claim 7, characterized in that: the rotary rod (16) is connected with a bearing sealing sleeve, and the bearing sealing sleeve is arranged in the furnace cover (7).
9. The aspheric nitrogen annealing furnace of claim 8, characterized in that: four corners at installation cover (14) top are equipped with the location jack, install location inserted bar (46) in the location jack, location inserted bar (46) fixed mounting is in the bottom of exhaust gas recovery case (13).
10. The aspheric nitrogen annealing furnace of claim 9, characterized in that: the furnace cover (7) and the annealing frame (8) are arranged in an integrated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110526450.4A CN113284824A (en) | 2021-05-14 | 2021-05-14 | Aspheric nitrogen annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110526450.4A CN113284824A (en) | 2021-05-14 | 2021-05-14 | Aspheric nitrogen annealing furnace |
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| Publication Number | Publication Date |
|---|---|
| CN113284824A true CN113284824A (en) | 2021-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110526450.4A Pending CN113284824A (en) | 2021-05-14 | 2021-05-14 | Aspheric nitrogen annealing furnace |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009260115A (en) * | 2008-04-18 | 2009-11-05 | Mitsubishi Electric Corp | Producing method of silicon carbide semiconductor device |
| CN106012026A (en) * | 2016-08-04 | 2016-10-12 | 汪锐 | Annealing apparatus used for making LED wafers |
| CN207313650U (en) * | 2017-10-26 | 2018-05-04 | 东阳市恒达金属波纹管有限公司 | A kind of nitrogen annulus annealing furnace |
| CN208218670U (en) * | 2017-12-15 | 2018-12-11 | 襄阳市赛龙机械有限公司 | A kind of new aspheric annealing furnace |
| CN212833924U (en) * | 2020-08-27 | 2021-03-30 | 洛阳鼎辉特钢制品股份有限公司 | Well type annealing furnace with good sealing performance |
| CN213117448U (en) * | 2020-09-21 | 2021-05-04 | 扬州仁源机械制造有限公司 | Quick-opening pressure vessel end socket |
-
2021
- 2021-05-14 CN CN202110526450.4A patent/CN113284824A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009260115A (en) * | 2008-04-18 | 2009-11-05 | Mitsubishi Electric Corp | Producing method of silicon carbide semiconductor device |
| CN106012026A (en) * | 2016-08-04 | 2016-10-12 | 汪锐 | Annealing apparatus used for making LED wafers |
| CN207313650U (en) * | 2017-10-26 | 2018-05-04 | 东阳市恒达金属波纹管有限公司 | A kind of nitrogen annulus annealing furnace |
| CN208218670U (en) * | 2017-12-15 | 2018-12-11 | 襄阳市赛龙机械有限公司 | A kind of new aspheric annealing furnace |
| CN212833924U (en) * | 2020-08-27 | 2021-03-30 | 洛阳鼎辉特钢制品股份有限公司 | Well type annealing furnace with good sealing performance |
| CN213117448U (en) * | 2020-09-21 | 2021-05-04 | 扬州仁源机械制造有限公司 | Quick-opening pressure vessel end socket |
Non-Patent Citations (1)
| Title |
|---|
| 火树鹏: "钢的气体氮化", 30 November 1984, 机械工业出版社, pages: 17 * |
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