CN113284148A - Screen dust filtering method - Google Patents

Screen dust filtering method Download PDF

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CN113284148A
CN113284148A CN202110834814.5A CN202110834814A CN113284148A CN 113284148 A CN113284148 A CN 113284148A CN 202110834814 A CN202110834814 A CN 202110834814A CN 113284148 A CN113284148 A CN 113284148A
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image
mask
screen
pixel
stage
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CN113284148B (en
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Suzhou Gaoshi Semiconductor Technology Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/94Investigating contamination, e.g. dust
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
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Abstract

The invention discloses a screen dust filtering method, which comprises the following steps: 1) the first stage, the preparation stage: providing a screen to be filtered, arranging at least one group of side light sources beside the upper surface of the screen to be filtered, and respectively arranging at least one group of image capturing units and backlight sources at the upper side and the lower side of the screen to be filtered; 2) the second stage, image acquisition stage: obtaining a single top-lighting image
Figure 961941DEST_PATH_IMAGE002
With single underlying lighting image
Figure 994926DEST_PATH_IMAGE004
Figure 227193DEST_PATH_IMAGE006
=1,2,3…,n(ii) a 3) A third stage, an image processing stage: several single filtering masks
Figure 405758DEST_PATH_IMAGE008
Integrating according to the second stage of segmentation rule to obtain the total filtering mask
Figure 813606DEST_PATH_IMAGE010
. According to the invention, the method not only can distinguish and identify whether the dust foreign matters are on the upper surface or the lower surface of the screen, but also can distinguish and identify the dust foreign matters on the backlight source, and filters the dust foreign matters together, so that the steps are simple and convenient, the operation is easy, the detection time is saved, the detection precision is improved, the misjudgment rate is reduced, and the productivity is improved.

Description

Screen dust filtering method
Technical Field
The invention relates to the field of image defect detection, in particular to a screen dust filtering method.
Background
Today, with the rapid development of industrial technologies, electronic products of various sizes, models, types and structures are full of our daily lives, screens or display panels are more important indispensable components in electronic products, and the detection of screen defects is essential in the process from the production completion to the factory shipment of the screens or display panels. In the process of researching and realizing screen defect detection, researchers find that the screen detection method in the prior art has the following problems:
for the screen defect detection, manual detection is time-consuming and labor-consuming, so that most of the prior art detects the screen by using an automatic detection device (AOI) based on machine vision, and in the back-end process of the screen, dust in the production environment falls on the screen panel to cause the AOI to detect foreign matters such as dust and the like as defects, so that a large amount of misjudgments are caused, the defect rate of the screen is higher than the real level, and unnecessary rework and capacity waste of the screen are caused.
In view of the above, it is necessary to develop a screen dust filtering method to solve the above problems.
Disclosure of Invention
In order to overcome the problems of the dust filtering method, the invention provides a screen dust filtering method, which solves the problem that the backlight foreign matter and the lower foreign matter cannot be identified and filtered simultaneously in the traditional method, can distinguish and identify whether the dust foreign matter is on the upper surface or the lower surface of a screen, can distinguish and identify the dust foreign matter on the backlight, and filters the dust foreign matter together, and has the advantages of simple steps, easy operation, detection time saving, detection precision improvement, misjudgment rate reduction and capacity improvement.
As for the dust filtering method, the screen dust filtering method of the present invention for solving the above technical problems includes the steps of:
1) the first stage, the preparation stage:
providing a screen to be filtered, arranging at least one group of side light sources beside the upper surface of the screen to be filtered, and respectively arranging at least one group of image capturing units and backlight sources at the upper side and the lower side of the screen to be filtered;
2) the second stage, image acquisition stage:
positioning an ROI on a screen through a predetermined rule, generating ROI information, and segmenting the screen according to the ROI information to obtain at least one effective detection area, wherein each group of image capturing units is aligned with a corresponding effective detection area;
each group of image capturing units captures the upper surface of the corresponding effective detection area to obtain a single upper light-striking image in the states that the side light source is opened and the backlight source is closed
Figure 100002_DEST_PATH_IMAGE001
Or a single lower lighting image is obtained by capturing the lower surface of the corresponding effective detection area under the states of the side light source being closed, the screen being electrified and the backlight source being opened
Figure 358486DEST_PATH_IMAGE002
i=1,2,3…,n
3) A third stage, an image processing stage:
an image preprocessing step: sequentially polishing the single sheet
Figure 72364DEST_PATH_IMAGE001
And a single under-lighting image
Figure 665151DEST_PATH_IMAGE002
Performing pretreatment to form single-piece upper-polishing foreign-matter masks
Figure 100002_DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 670147DEST_PATH_IMAGE004
, i =1,2,3…,n
Mask synthesis: make a single piece of foreign matter mask
Figure 546836DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 916769DEST_PATH_IMAGE004
Are combined to form a single filter mask
Figure 100002_DEST_PATH_IMAGE005
And a plurality of single filter masks are arranged
Figure 918223DEST_PATH_IMAGE005
Integrating according to the second stage of segmentation rule to obtain the total filtering mask
Figure 930172DEST_PATH_IMAGE006
Said total filtering mask
Figure 661368DEST_PATH_IMAGE006
For filtering out dust in subsequent screen defect detection to prevent defect misjudgment, wherein,
Figure 100002_DEST_PATH_IMAGE007
i =1,2,3…,n
optionally, the image preprocessing step in the third stage includes the following steps:
step S1, respectively polishing the single sheet according to the ROI information and the effective detection region obtained in the second stage
Figure 998940DEST_PATH_IMAGE001
And a single under-lighting image
Figure 583896DEST_PATH_IMAGE002
Sequentially correcting and detecting dust to obtain a single-piece foreign matter mask
Figure 117646DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 454081DEST_PATH_IMAGE004
Step S2, removing noise points in the mask, and forming a single top-polished foreign-body mask obtained in step S1
Figure 946242DEST_PATH_IMAGE003
With a single underlying photoresist foreign-body mask
Figure 917DEST_PATH_IMAGE004
Performing a morphological treatment comprising erosion and dilation;
optionally, in the third stage of mask synthesis, the morphologically processed single piece is masked with a polished foreign matter
Figure 948144DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 794877DEST_PATH_IMAGE004
Performing pixel-by-pixel or operation to obtain single filter mask
Figure 802148DEST_PATH_IMAGE005
i =1,2,3…,n
Optionally, the step S1 includes the following steps:
step S11, adjusting each effective detection area by expanding and contracting the effective area;
step S12, polishing the image on the single sheet
Figure 593386DEST_PATH_IMAGE001
And a single under-lighting image
Figure 219671DEST_PATH_IMAGE002
Carrying out fuzzy processing and denoising;
step S13, for longitudeSingle-sheet under-laid-out image processed at step S12
Figure 779965DEST_PATH_IMAGE002
Performing gray closing operation to erase the lower lighting image of a single sheet
Figure 99082DEST_PATH_IMAGE002
The dark spot in the middle can obtain a single lower lighting comparison picture
Figure 112037DEST_PATH_IMAGE008
i =1,2,3…,n
Step S14, single polishing comparison chart
Figure 401067DEST_PATH_IMAGE008
With corresponding single underlying luminous image
Figure 295162DEST_PATH_IMAGE002
By subtraction, a single underlying luminous image is formed
Figure 565606DEST_PATH_IMAGE002
The dark spot area in the picture is lightened to obtain a corresponding single lower lighting response picture
Figure 100002_DEST_PATH_IMAGE009
i =1,2,3…,n
Step S15, for the single-sheet lower-lighting response chart obtained in step S14
Figure 613328DEST_PATH_IMAGE009
Single window mean map for maximum
Figure 846994DEST_PATH_IMAGE010
i =1,2,3…,n
Step S16, the single-sheet lower-striking response chart obtained in the step S14
Figure 381881DEST_PATH_IMAGE009
Corresponding single-window mean map obtained in step S15
Figure 308380DEST_PATH_IMAGE010
Subtracting to enhance the response of the real dark spot;
step S17, performing binary segmentation on the result of the step S16 to obtain a binary image containing dark point information, wherein the area higher than the threshold value is the dark point in the image;
step S18, screening the result of the step S17, selecting the points meeting the conditions as the final detection result to obtain a single piece of lower-beat light foreign body mask
Figure 30348DEST_PATH_IMAGE004
Optionally, in step S13, the formula of the gray closing operation is:
Figure 100002_DEST_PATH_IMAGE011
wherein, the gray scale expansion operation formula is as follows:
Figure 130022DEST_PATH_IMAGE012
the corrosion formula is:
Figure 100002_DEST_PATH_IMAGE013
in the formula (I), the compound is shown in the specification,
Figure 801306DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 100002_DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates; dst represents: an image processed by gray closing operation;
Figure 961023DEST_PATH_IMAGE016
indicating an erosion/expansion nucleus, a matrix of elements m x n in size, each 1, m and n being controlled by external parameters,can be adjusted according to the image condition;
Figure 186599DEST_PATH_IMAGE017
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 276915DEST_PATH_IMAGE018
represents: pixel y-axis coordinates in erosion/dilation kernel; max represents: solving the maximum value of the element; min represents: solving the minimum value of the elements; an element refers to the gray scale of a pixel; close represents: closing operation; the enode represents: carrying out corrosion operation; dilate denotes: an expansion operation; src represents: and (6) original drawing.
Optionally, in step S14, the subtraction formula is:
Figure 100002_DEST_PATH_IMAGE019
in the formula (I), the compound is shown in the specification,
Figure 937791DEST_PATH_IMAGE020
represents: a single pixel in a discrete image;
Figure 100002_DEST_PATH_IMAGE021
represents: a marking of the pixel in the mask; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing subtraction operation;
Figure 737251DEST_PATH_IMAGE022
represents: only the regions of the mask that are not 0 are subtracted.
Alternatively, the window maximum in step S15 is equivalent to the gray scale expansion operation, and the formula is:
Figure 964970DEST_PATH_IMAGE023
window mean uses mean filtering:
Figure DEST_PATH_IMAGE024
wherein kernel denotes the filtering kernel of the mean filtering
Figure 140868DEST_PATH_IMAGE025
In the formula (I), the compound is shown in the specification,
Figure 255585DEST_PATH_IMAGE026
comprises the following steps: the abbreviation of kernel;
Figure 678476DEST_PATH_IMAGE027
represents: the number of columns of the filter kernel;
Figure 613066DEST_PATH_IMAGE028
represents: the number of rows of the filter kernel;
Figure 45184DEST_PATH_IMAGE029
represents: the width of the filter kernel, i.e. the number of columns of the filter kernel;
Figure 748829DEST_PATH_IMAGE030
represents: the height of the filter kernel, i.e. the number of rows of the filter kernel;
Figure 608200DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 30086DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates;
Figure 265895DEST_PATH_IMAGE017
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 818187DEST_PATH_IMAGE018
represents: pixel y-axis coordinates in erosion/dilation kernel; dst represents: an image processed by gray closing operation; src represents: original drawing; max represents: finding the maximum value of the element, the element meansThe gray scale of the pixel; and, anchor. x represents: filtering the x coordinate of the kernel anchor point; and, anchor. The y-coordinate of the anchor point is filtered.
Optionally, the binarization formula in step S17 is:
Figure 848460DEST_PATH_IMAGE031
in the formula (I), the compound is shown in the specification,
Figure DEST_PATH_IMAGE032
comprises the following steps: gray values at the original image coordinates (x, y);
Figure 429745DEST_PATH_IMAGE033
comprises the following steps: the threshold value is set to a value that is,
Figure 203666DEST_PATH_IMAGE034
comprises the following steps: a non-zero value that should be assigned in the mask;
Figure 881903DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 83077DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates; dst represents: and (5) processing the image through a gray closing operation.
Optionally, the merging in step S18 is disclosed as:
Figure 213975DEST_PATH_IMAGE035
in the formula (I), the compound is shown in the specification,
Figure 791587DEST_PATH_IMAGE020
represents: a single pixel in a discrete image; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing to be combined;
Figure 589910DEST_PATH_IMAGE022
represents:merging is only performed on areas of the mask that are not 0.
One of the above technical solutions has the following advantages or beneficial effects: the method solves the problem that the foreign matters on the backlight source and the foreign matters on the lower surface cannot be identified and filtered simultaneously in the traditional method, can distinguish and identify whether the dust foreign matters are on the upper surface or the lower surface of the screen, can distinguish and identify the dust foreign matters on the backlight source, and filters the dust foreign matters together.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings of the embodiments will be briefly described below, and it is apparent that the drawings in the following description relate only to some embodiments of the present invention and are not limiting thereof, wherein:
fig. 1 is a front view of an on-screen dust filtering apparatus according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating screen originals captured by a single set of image capture units in a screen dust filtering method according to an embodiment of the present invention;
fig. 3 is a diagram illustrating a corresponding effective detection area obtained after extracting screen original images captured by a single group of image capturing units in a screen dust filtering method according to an embodiment of the present invention;
fig. 4 is a single upper luminous image photographed in the screen dust filtering method according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating a single piece of the upper-polished image obtained in FIG. 4 is processed to obtain a corresponding single piece of the upper-polished foreign matter mask;
FIG. 6 is a diagram illustrating a single under-bump image captured on the lower surface of a corresponding effective detection area in a screen dust filtering method according to an embodiment of the present invention;
FIG. 7 is a corresponding single underlying smooth foreign matter mask obtained by processing the single underlying smooth image obtained in FIG. 6;
fig. 8 is a diagram illustrating that the single upper polished foreign matter mask obtained in fig. 5 and the corresponding single lower polished foreign matter mask obtained in fig. 7 are combined to obtain a single filtering mask;
fig. 9 is an original of an under-lighting image obtained by the screen dust filtering method according to an embodiment of the present invention, in which bottom surface dust and backlight dust appear dark;
FIG. 10 illustrates an image of the original of the under-lighted image of FIG. 9 after blurring;
FIG. 11 shows the image of FIG. 10 after the close operation;
fig. 12 shows an image obtained by subtracting the image in fig. 11 from the image in fig. 9;
the image after the enhanced response to the image of fig. 12 is shown in fig. 13;
fig. 14 shows an image obtained by subjecting the image in fig. 13 to binarization processing;
FIG. 15 illustrates the resulting upper polish dust mask captured and processed by a corresponding set of image capture units;
the merged single filter mask is shown in fig. 16.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the description and claims of the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprise" or "comprises", and the like, means that the element or item listed before "comprises" or "comprising" covers the element or item listed after "comprising" or "comprises" and its equivalents, and does not exclude other elements or items. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc., are defined with respect to the configurations shown in the respective drawings, and in particular, "height" corresponds to a dimension from top to bottom, "width" corresponds to a dimension from left to right, "depth" corresponds to a dimension from front to rear, which are relative concepts, and thus may be varied accordingly depending on the position in which it is used, and thus these or other orientations should not be construed as limiting terms.
Terms concerning attachments, coupling and the like (e.g., "connected" and "attached") refer to a relationship wherein structures are secured or attached, either directly or indirectly, to one another through intervening structures, as well as both movable or rigid attachments or relationships, unless expressly described otherwise.
Example 1
Fig. 1 shows embodiment 1 of the present invention, and as can be seen in conjunction with the illustration of fig. 1, the screen dust filtering method includes the steps of:
1) the first stage, the preparation stage:
providing a screen 11 to be filtered, arranging at least one group of side light sources 14 beside the upper surface of the screen 11 to be filtered, and respectively arranging at least one group of image capturing units 13 and a backlight source 12 at the upper side and the lower side of the screen 11 to be filtered; wherein, the upper surface of the screen 11 may be attached with screen upper surface dust 111, the inside of the screen 11 may be formed with screen internal defects 113, the lower surface of the screen 11 may be attached with screen lower surface dust 112, and the upper surface and the inside of the backlight 12 may be attached with lamp box dust 121;
2) the second stage, image acquisition stage:
positioning the ROI on the screen 11 by a predetermined rule, generating ROI information, segmenting the screen 11 according to the ROI information to obtain at least one effective detection region, each set of the image capturing units 13 being aligned with a corresponding one of the effective detection regions;
each group of image capturing units 13 captures the upper surface of the corresponding effective detection area to obtain a single upper light-striking image in the state that the side light source 14 is opened and the backlight source 12 is closed
Figure 430827DEST_PATH_IMAGE036
Or a single lower lighting image is obtained by capturing the lower surface of the corresponding effective detection area under the state that the side light source 14 is closed, the screen 11 is powered on and the backlight source 12 is opened
Figure DEST_PATH_IMAGE037
i =1,2,3…,n
3) A third stage, an image processing stage:
an image preprocessing step: sequentially polishing the single sheet
Figure 111338DEST_PATH_IMAGE036
And a single under-lighting image
Figure 977794DEST_PATH_IMAGE037
Performing pretreatment to form single-piece upper-polishing foreign-matter masks
Figure 879891DEST_PATH_IMAGE038
With single underlying foreign matter polishing mask
Figure 50233DEST_PATH_IMAGE039
, i =1,2,3…,n
Mask synthesis: make a single piece of foreign matter mask
Figure 890144DEST_PATH_IMAGE038
With single underlying foreign matter polishing mask
Figure 543980DEST_PATH_IMAGE039
Are combined to form a single filter mask
Figure 51315DEST_PATH_IMAGE040
And a plurality of single filter masks are arranged
Figure 765194DEST_PATH_IMAGE040
Integrating according to the second stage of segmentation rule to obtain the total filtering mask
Figure 357980DEST_PATH_IMAGE041
Said total filtering mask
Figure 815506DEST_PATH_IMAGE041
For filtering out dust in subsequent screen defect detection to prevent defect misjudgment, wherein,
Figure 177349DEST_PATH_IMAGE042
i =1,2,3…,n
as a further improvement, the image preprocessing step in the third stage includes the steps of:
step S1, respectively polishing the single sheet according to the ROI information and the effective detection region obtained in the second stage
Figure 327707DEST_PATH_IMAGE036
And a single under-lighting image
Figure 266844DEST_PATH_IMAGE037
Sequentially correcting and detecting dust to obtain a single-piece foreign matter mask
Figure 13215DEST_PATH_IMAGE038
With single underlying foreign matter polishing mask
Figure 478831DEST_PATH_IMAGE039
Step S2, removing noise points in the mask, and forming a single top-polished foreign-body mask obtained in step S1
Figure 550823DEST_PATH_IMAGE038
With a single underlying photoresist foreign-body mask
Figure 367470DEST_PATH_IMAGE039
Performing a morphological treatment comprising erosion and dilation; FIG. 15 illustrates a top-lit dust mask captured and processed by a set of image capture units;
as a further improvement, in the third stage mask synthesis step, the single piece after morphological treatment is polished to form a foreign body mask
Figure 646092DEST_PATH_IMAGE038
With single underlying foreign matter polishing mask
Figure 966215DEST_PATH_IMAGE039
Performing pixel-by-pixel or operation to obtain single filter mask
Figure 209109DEST_PATH_IMAGE043
i =1,2,3…,n. The merged single sheet filter mask is shown in FIG. 16
Figure 919576DEST_PATH_IMAGE043
As a further improvement, the step S1 includes the following steps:
step S11, adjusting each effective detection area by expanding and contracting the effective area;
step S12, polishing the image on the single sheet
Figure 7749DEST_PATH_IMAGE036
And under a single sheetPolishing images
Figure 713536DEST_PATH_IMAGE037
Carrying out fuzzy processing and denoising; fig. 9 shows an original of one of the underlying luminous images, the lower surface dust and the backlight dust appear dark, and fig. 10 shows an image of the original after blurring processing;
step S13, the single under-lighting image processed by step S12
Figure 861752DEST_PATH_IMAGE037
Performing gray closing operation to erase the lower lighting image of a single sheet
Figure 731619DEST_PATH_IMAGE037
The dark spot in the middle can obtain a single lower lighting comparison picture
Figure 872751DEST_PATH_IMAGE044
i =1,2,3…,n(ii) a An image obtained after the close operation processing is shown in fig. 11;
step S14, single polishing comparison chart
Figure 183777DEST_PATH_IMAGE044
With corresponding single underlying luminous image
Figure 752162DEST_PATH_IMAGE037
By subtraction, a single underlying luminous image is formed
Figure 515850DEST_PATH_IMAGE037
The dark spot area in the picture is lightened to obtain a corresponding single lower lighting response picture
Figure 460672DEST_PATH_IMAGE045
i =1,2,3…,n(ii) a Fig. 12 shows an image obtained by the subtraction processing;
step S15, for the single-sheet lower-lighting response chart obtained in step S14
Figure 354767DEST_PATH_IMAGE045
Single window mean map for maximum
Figure 359632DEST_PATH_IMAGE046
i =1,2,3…,n
Step S16, the single-sheet lower-striking response chart obtained in the step S14
Figure 610616DEST_PATH_IMAGE045
Corresponding single-window mean map obtained in step S15
Figure 93549DEST_PATH_IMAGE046
Subtracting to enhance the response of the real dark spot; the image after the enhanced response is shown in FIG. 13;
step S17, performing binary segmentation on the result of the step S16 to obtain a binary image containing dark point information, wherein the area higher than the threshold value is the dark point in the image; fig. 14 shows an image after the binarization processing;
step S18, screening the result of the step S17, selecting the points meeting the conditions as the final detection result to obtain a single piece of lower-beat light foreign body mask
Figure 113589DEST_PATH_IMAGE047
As a further improvement, in step S13, the formula of the gray closing operation is:
Figure 23776DEST_PATH_IMAGE011
wherein, the gray scale expansion operation formula is as follows:
Figure 762056DEST_PATH_IMAGE048
the corrosion formula is:
Figure 48681DEST_PATH_IMAGE013
in the formula (I), the compound is shown in the specification,
Figure 47861DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 145261DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates; dst represents: an image processed by gray closing operation;
Figure 354526DEST_PATH_IMAGE016
the corrosion/expansion nucleus is a matrix with m × n elements of 1, and m and n are controlled by external parameters and can be adjusted according to the image condition;
Figure 929995DEST_PATH_IMAGE017
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 173894DEST_PATH_IMAGE018
represents: pixel y-axis coordinates in erosion/dilation kernel; max represents: solving the maximum value of the element; min represents: solving the minimum value of the elements; an element refers to the gray scale of a pixel; close represents: closing operation; the enode represents: carrying out corrosion operation; dilate denotes: an expansion operation; src represents: and (6) original drawing.
As a further improvement, in step S14, the subtraction formula is:
Figure 176617DEST_PATH_IMAGE049
in the formula (I), the compound is shown in the specification,
Figure 138756DEST_PATH_IMAGE020
represents: a single pixel in a discrete image is represented,
Figure 246478DEST_PATH_IMAGE021
represents: a marking of the pixel in the mask; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing subtraction operation;
Figure 344884DEST_PATH_IMAGE022
represents: only the regions of the mask that are not 0 are subtracted.
As a further improvement, the window maximum in step S15 is equivalent to the gray scale expansion operation, which is expressed by the formula:
Figure 643141DEST_PATH_IMAGE050
window mean uses mean filtering:
Figure 577730DEST_PATH_IMAGE024
wherein kernel is the filtering kernel of mean filtering
Figure 478690DEST_PATH_IMAGE025
In the formula (I), the compound is shown in the specification,
Figure 447914DEST_PATH_IMAGE026
comprises the following steps: the abbreviation of kernel;
Figure 41706DEST_PATH_IMAGE027
represents: the number of columns of the filter kernel;
Figure 322646DEST_PATH_IMAGE028
represents: the number of rows of the filter kernel;
Figure 43609DEST_PATH_IMAGE029
represents: the width of the filter kernel, i.e. the number of columns of the filter kernel;
Figure 851028DEST_PATH_IMAGE030
represents: the height of the filter kernel, i.e. the number of rows of the filter kernel;
Figure 632033DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 524903DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates;
Figure 643031DEST_PATH_IMAGE017
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 73267DEST_PATH_IMAGE018
represents: pixel y-axis coordinates in erosion/dilation kernel; dst represents: an image processed by gray closing operation; src represents: original drawing; max represents: solving the maximum value of an element, wherein the element refers to the gray level of a pixel; and, anchor. x represents: filtering the x coordinate of the kernel anchor point; and, anchor. The y-coordinate of the anchor point is filtered.
As a further improvement, the binarization formula in step S17 is:
Figure 274442DEST_PATH_IMAGE031
in the formula (I), the compound is shown in the specification,
Figure 405340DEST_PATH_IMAGE032
comprises the following steps: gray values at the original image coordinates (x, y);
Figure 717372DEST_PATH_IMAGE033
comprises the following steps: the threshold value is set to a value that is,
Figure 374750DEST_PATH_IMAGE034
comprises the following steps: a non-zero value that should be assigned in the mask;
Figure 231979DEST_PATH_IMAGE014
represents: target pixel x-axis coordinates;
Figure 99440DEST_PATH_IMAGE015
represents: target pixel y-axis coordinates; dst represents: and (5) processing the image through a gray closing operation.
As a further improvement, the merging in step S18 is disclosed as:
Figure 700317DEST_PATH_IMAGE035
in the formula (I), the compound is shown in the specification,
Figure 602414DEST_PATH_IMAGE020
represents: a single pixel in a discrete image; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing to be combined;
Figure 755178DEST_PATH_IMAGE022
represents: merging is only performed on areas of the mask that are not 0.
The merged single sheet filter mask is shown in FIG. 16
Figure DEST_PATH_IMAGE051
Repeatedly executing the steps to obtain single filter masks processed and combined by the original images obtained by other groups of image capturing units, and reversely combining all the single filter masks according to the ROI segmentation rule to obtain the total filter mask
Figure 391827DEST_PATH_IMAGE052
Said total filtering mask
Figure 796394DEST_PATH_IMAGE052
The screen defect detection device is used for filtering out dust in subsequent screen defect detection so as to prevent defect misjudgment.
Example 2
Fig. 2 to 8 show embodiment 2 of the present invention, and referring to fig. 2, it can be seen that embodiment 2 differs from embodiment 1 in that more detailed filtering steps are disclosed:
the first step is as follows: bright screen detection (turning on the backlight, lighting the screen), determining whether to light (the central area is lighted with the gray scale greater than 40);
and secondly, extracting effective ROI detection areas, specifically, positioning the ROI of the screen to be filtered according to a predetermined rule of 2 x 3 (rows and columns), generating ROI information, uniformly dividing the screen 11 into 6 effective detection areas according to the ROI information, arranging six groups of image capturing units 13, forming image capturing groups of 2 x 3 (rows and columns) by the six groups of image capturing units 13 in an equidistant array mode, and aligning each group of image capturing units with a corresponding effective detection area.
Since the dust filtering steps of each group of image capturing units 13 are the same, for the sake of space saving, the subsequent steps only describe the filtering process for one group of image capturing units 13 in detail, the screen original image captured by a single group of image capturing units 13 is shown in fig. 2, and the corresponding effective detection area obtained after extraction is shown in fig. 3;
thirdly, closing the backlight, opening the upper side light, switching to a black picture or cutting off the black picture, and shooting a single upper lighting image
Figure DEST_PATH_IMAGE053
As shown in FIG. 4, the corresponding single piece of photo-mask is obtained after the treatment
Figure 219242DEST_PATH_IMAGE054
As shown in fig. 5, a single lower lighting image is captured and obtained from the lower surface of the corresponding effective detection area in the states of the side light source 14 being turned off, the screen 11 being powered on and the backlight source 12 being turned on
Figure DEST_PATH_IMAGE055
As shown in fig. 6, the corresponding single piece of bottom-lighting foreign matter mask is obtained after the treatment
Figure 480590DEST_PATH_IMAGE056
As shown in fig. 7; in the embodiment shown in fig. 2, six sets of image capturing units are arranged, and accordingly six upper lighting images are formed, respectively:
Figure DEST_PATH_IMAGE057
and correspondingly carrying out co-processing to obtain six upper polishing photomasks:
Figure 135694DEST_PATH_IMAGE058
(ii) a Likewise, co-growSix lower polishing patterns are respectively as follows:
Figure DEST_PATH_IMAGE059
Figure 750477DEST_PATH_IMAGE060
and correspondingly carrying out co-processing to obtain six lower-printing photomasks:
Figure DEST_PATH_IMAGE061
Figure 643478DEST_PATH_IMAGE062
fourthly, as shown in FIG. 8, a single piece is masked with a foreign material
Figure 138044DEST_PATH_IMAGE054
With single underlying foreign matter polishing mask
Figure 467394DEST_PATH_IMAGE056
Are combined to form a single filter mask
Figure DEST_PATH_IMAGE063
And a plurality of single filter masks are arranged
Figure 10502DEST_PATH_IMAGE063
Performing integration according to the segmentation rule to obtain the total filtering mask
Figure 220992DEST_PATH_IMAGE064
Said total filtering mask
Figure 542252DEST_PATH_IMAGE064
For filtering out dust in subsequent screen defect detection to prevent defect misjudgment, wherein,
Figure DEST_PATH_IMAGE065
i =1,2,3…,6。
the number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
The features of the different implementations described herein may be combined to form other embodiments not specifically set forth above. The components may be omitted from the structures described herein without adversely affecting their operation. Further, various individual components may be combined into one or more components to perform the functions described herein.
Furthermore, while embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in a variety of fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.

Claims (9)

1. A screen dust filtering method is characterized by comprising the following steps:
1) the first stage, the preparation stage:
providing a screen (11) to be filtered, arranging at least one group of side light sources (14) beside the upper surface of the screen (11) to be filtered, and respectively arranging at least one group of image capturing units (13) and backlight sources (12) at the upper side and the lower side of the screen (11) to be filtered;
2) the second stage, image acquisition stage:
-locating a ROI on the screen (11) by predetermined rules and generating ROI information, segmenting the screen (11) in accordance with the ROI information to obtain at least one active detection region, each group of said image capturing units (13) being aligned with a respective one of the active detection regions;
each group of image capturing units (13) captures the upper surface of the corresponding effective detection area to obtain a single upper light-striking image in the state that the side light source (14) is opened and the backlight source (12) is closed
Figure DEST_PATH_IMAGE001
Or a single lower lighting image is obtained by capturing the lower surface of the corresponding effective detection area under the states that the side light source (14) is closed, the screen (11) is electrified and the backlight source (12) is opened
Figure 239116DEST_PATH_IMAGE002
i=1,2,3…,n
3) A third stage, an image processing stage:
an image preprocessing step: sequentially polishing the single sheet
Figure 444970DEST_PATH_IMAGE001
And a single under-lighting image
Figure 640459DEST_PATH_IMAGE002
Performing pretreatment to form single-piece upper-polishing foreign-matter masks
Figure DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 211249DEST_PATH_IMAGE004
, i =1,2,3…,n
Mask synthesis: make a single piece of foreign matter mask
Figure 384698DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 863084DEST_PATH_IMAGE004
Are combined to form a single filter mask
Figure DEST_PATH_IMAGE005
And a plurality of single filter masks are arranged
Figure 381921DEST_PATH_IMAGE005
According to the firstTwo stages of segmentation rules are integrated to obtain a total filtering mask
Figure 920350DEST_PATH_IMAGE006
Said total filtering mask
Figure 321375DEST_PATH_IMAGE006
For filtering out dust in subsequent screen defect detection to prevent defect misjudgment, wherein,
Figure DEST_PATH_IMAGE007
i =1,2,3…,n
2. the screen dust filtering method of claim 1, wherein the image preprocessing step in the third stage comprises the steps of:
step S1, respectively polishing the single sheet according to the ROI information and the effective detection region obtained in the second stage
Figure 947660DEST_PATH_IMAGE001
And a single under-lighting image
Figure 117741DEST_PATH_IMAGE002
Sequentially correcting and detecting dust to obtain a single-piece foreign matter mask
Figure 827071DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 246551DEST_PATH_IMAGE004
Step S2, removing noise points in the mask, and forming a single top-polished foreign-body mask obtained in step S1
Figure 66740DEST_PATH_IMAGE003
With a single underlying photoresist foreign-body mask
Figure 622486DEST_PATH_IMAGE004
Morphological treatments including erosion and dilation are performed.
3. The screen dust filtering method of claim 2, wherein the morphologically processed sheet is masked with the foreign matter in the mask synthesizing step of the third stage
Figure 237138DEST_PATH_IMAGE003
With single underlying foreign matter polishing mask
Figure 612756DEST_PATH_IMAGE004
Performing pixel-by-pixel or operation to obtain single filter mask
Figure 371721DEST_PATH_IMAGE005
i =1,2,3…,n
4. The screen dust filtering method of claim 2, wherein the step S1 includes the steps of:
step S11, adjusting each effective detection area by expanding and contracting the effective area;
step S12, polishing the image on the single sheet
Figure 516395DEST_PATH_IMAGE008
And a single under-lighting image
Figure DEST_PATH_IMAGE009
Carrying out fuzzy processing and denoising;
step S13, the single under-lighting image processed by step S12
Figure 770790DEST_PATH_IMAGE009
Performing gray closing operation to erase the lower lighting image of a single sheet
Figure 633703DEST_PATH_IMAGE009
The dark spot in the middle can obtain a single lower lighting comparison picture
Figure 795694DEST_PATH_IMAGE010
i =1,2,3…,n
Step S14, single polishing comparison chart
Figure 326033DEST_PATH_IMAGE010
With corresponding single underlying luminous image
Figure 813646DEST_PATH_IMAGE009
By subtraction, a single underlying luminous image is formed
Figure 898277DEST_PATH_IMAGE009
The dark spot area in the picture is lightened to obtain a corresponding single lower lighting response picture
Figure DEST_PATH_IMAGE011
i =1,2,3…,n
Step S15, for the single-sheet lower-lighting response chart obtained in step S14
Figure 208166DEST_PATH_IMAGE011
Single window mean map for maximum
Figure 593011DEST_PATH_IMAGE012
i =1,2,3…,n
Step S16, the single-sheet lower-striking response chart obtained in the step S14
Figure 251526DEST_PATH_IMAGE011
Corresponding single-window mean map obtained in step S15
Figure 89032DEST_PATH_IMAGE012
Subtraction to enhance true darknessThe response of the point;
step S17, performing binary segmentation on the result of the step S16 to obtain a binary image containing dark point information, wherein the area higher than the threshold value is the dark point in the image;
step S18, screening the result of the step S17, selecting the points meeting the conditions as the final detection result to obtain a single piece of lower-beat light foreign body mask
Figure 563849DEST_PATH_IMAGE004
5. The screen dust filtering method of claim 4, wherein in the step S13, the gray closing operation formula is:
Figure DEST_PATH_IMAGE013
wherein, the gray scale expansion operation formula is as follows:
Figure 740884DEST_PATH_IMAGE014
the corrosion formula is:
Figure DEST_PATH_IMAGE015
in the formula (I), the compound is shown in the specification,
Figure 773562DEST_PATH_IMAGE016
represents: target pixel x-axis coordinates;
Figure 832784DEST_PATH_IMAGE017
represents: target pixel y-axis coordinates; dst represents: an image processed by gray closing operation;
Figure 812373DEST_PATH_IMAGE018
denotes the corrosion/swelling nuclei, m x n sizeThe elements of (1) are matrixes of 1, and m and n are controlled by external parameters and can be adjusted according to the image condition;
Figure DEST_PATH_IMAGE019
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 109493DEST_PATH_IMAGE020
represents: pixel y-axis coordinates in erosion/dilation kernel; max represents: solving the maximum value of the element; min represents: solving the minimum value of the elements; an element refers to the gray scale of a pixel; close represents: closing operation; the enode represents: carrying out corrosion operation; dilate denotes: an expansion operation; src represents: and (6) original drawing.
6. The screen dust filtering method of claim 4, wherein in step S14, the subtraction formula is:
Figure DEST_PATH_IMAGE021
in the formula (I), the compound is shown in the specification,
Figure 922860DEST_PATH_IMAGE022
represents: a single pixel in a discrete image is represented,
Figure 734958DEST_PATH_IMAGE023
represents: a marking of the pixel in the mask; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing subtraction operation;
Figure 846133DEST_PATH_IMAGE024
represents: only the regions of the mask that are not 0 are subtracted.
7. The screen dust filtering method of claim 4, wherein the window maximum in the step S15 is equivalent to a gray scale expansion operation, which is expressed by the formula:
Figure DEST_PATH_IMAGE026
window mean uses mean filtering:
Figure 132846DEST_PATH_IMAGE027
wherein kernel denotes the filtering kernel of the mean filtering
Figure 38485DEST_PATH_IMAGE028
In the formula (I), the compound is shown in the specification,
Figure 337879DEST_PATH_IMAGE029
comprises the following steps: the abbreviation of kernel;
Figure 252746DEST_PATH_IMAGE030
represents: the number of columns of the filter kernel;
Figure 586775DEST_PATH_IMAGE031
represents: the number of rows of the filter kernel;
Figure 663316DEST_PATH_IMAGE032
represents: the width of the filter kernel, i.e. the number of columns of the filter kernel;
Figure 59793DEST_PATH_IMAGE033
represents: the height of the filter kernel, i.e. the number of rows of the filter kernel;
Figure 778350DEST_PATH_IMAGE016
represents: target pixel x-axis coordinates;
Figure 701307DEST_PATH_IMAGE017
represents: eyes of a userMarking the y-axis coordinate of the pixel;
Figure 214328DEST_PATH_IMAGE019
represents: pixel x-axis coordinates in the erosion/dilation kernel;
Figure 957156DEST_PATH_IMAGE020
represents: pixel y-axis coordinates in erosion/dilation kernel; dst represents: an image processed by gray closing operation; src represents: original drawing; max represents: solving the maximum value of an element, wherein the element refers to the gray level of a pixel; and, anchor. x represents: filtering the x coordinate of the kernel anchor point; and, anchor. The y-coordinate of the anchor point is filtered.
8. The screen dust filtering method of claim 4, wherein the binarization formula in step S17 is:
Figure DEST_PATH_IMAGE034
in the formula (I), the compound is shown in the specification,
Figure 151508DEST_PATH_IMAGE035
comprises the following steps: gray values at the original image coordinates (x, y);
Figure 923112DEST_PATH_IMAGE036
comprises the following steps: the threshold value is set to a value that is,
Figure 482400DEST_PATH_IMAGE037
comprises the following steps: a non-zero value that should be assigned in the mask;
Figure 978104DEST_PATH_IMAGE016
represents: target pixel x-axis coordinates;
Figure 772884DEST_PATH_IMAGE017
represents: target pixel y-axis coordinates; dst represents: and (5) processing the image through a gray closing operation.
9. The screen dust filtering method of claim 4, wherein the merged presentation in the step S18 is:
Figure 936012DEST_PATH_IMAGE038
in the formula (I), the compound is shown in the specification,
Figure 790836DEST_PATH_IMAGE022
represents: a single pixel in a discrete image; dst represents: an image processed by gray closing operation; saturrate denotes: filling operation; src1 and src2 represent: two images needing to be combined;
Figure 508256DEST_PATH_IMAGE024
represents: merging is only performed on areas of the mask that are not 0.
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