CN113281303A - Vernier sensitization semi-filled polyimide optical fiber FPI humidity sensor - Google Patents
Vernier sensitization semi-filled polyimide optical fiber FPI humidity sensor Download PDFInfo
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- CN113281303A CN113281303A CN202110731287.5A CN202110731287A CN113281303A CN 113281303 A CN113281303 A CN 113281303A CN 202110731287 A CN202110731287 A CN 202110731287A CN 113281303 A CN113281303 A CN 113281303A
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- optical fiber
- polyimide
- vernier
- reflecting surface
- quartz tube
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 41
- 239000004642 Polyimide Substances 0.000 title claims abstract description 35
- 229920001721 polyimide Polymers 0.000 title claims abstract description 35
- 206010070834 Sensitisation Diseases 0.000 title claims description 5
- 230000008313 sensitization Effects 0.000 title claims description 4
- 239000010453 quartz Substances 0.000 claims abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000003466 welding Methods 0.000 claims abstract description 7
- 239000000835 fiber Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000001228 spectrum Methods 0.000 claims description 9
- 239000000945 filler Substances 0.000 claims description 8
- 230000003595 spectral effect Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 14
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000004044 response Effects 0.000 abstract description 3
- 238000005520 cutting process Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 230000004927 fusion Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 150000002466 imines Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005462 imide group Chemical group 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
Abstract
The invention provides a vernier-sensitized semi-filled polyimide optical fiber FPI humidity sensor. The sensor comprises a single-mode optical fiber, a quartz tube and polyimide, wherein the single-mode optical fiber and the quartz tube are subjected to fusion welding and then subjected to cutting with a specific length, and meanwhile, one side of the quartz tube is provided with a hole so as to be communicated with the outside air. Polyimide with a certain thickness is filled at the tail end of the quartz tube, so that the humidity sensor with three-surface reflection and vernier effect is formed, the sensitivity of humidity measurement is effectively improved, and the response time of the sensor is greatly shortened. The invention has the advantages of small volume, easy operation, high sensitivity and the like, and has wide application prospect.
Description
Technical Field
The invention relates to a vernier-sensitized semi-filled polyimide optical fiber FPI humidity sensor.
Technical Field
An optical fiber sensor prepared based on the Fabry-Perot interference principle is widely applied to a plurality of fields, when the optical fiber sensor is applied to humidity monitoring, a low-fineness F-P sensing cavity is generally adopted, namely, a layer of humidity sensitive material is directly or indirectly coated on the end part of a flat optical fiber to serve as a reflector, and the optical fiber F-P relative humidity sensor has the advantages of other optical fiber relative humidity sensors, and also has the advantages of simple sensing principle, easiness in preparation, high sensitivity, low cost and the like. When the humidity sensitive film interacts with water molecules, optical signals (such as intensity, wavelength, phase and the like) of an interference spectrum change along with the change of the external environment humidity, and a relation is generally established between the change of the demodulated optical wavelength and the environment humidity so as to obtain corresponding humidity information. Polyimide (PI) is an organic polymer containing imide groups, has a refractive index of about 1.70, and has the advantages of linear expansion, good film-forming property, high heat resistance, excellent mechanical properties, stable existence in a complex chemical environment and the like, so the Polyimide is one of the most popular humidity-sensitive materials at present.
Disclosure of Invention
The invention aims to solve the problems of low precision, low sensitivity and complex structure of the existing humidity sensor, and provides an optical fiber humidity sensor based on half-filling and vernier effects.
The fiber optic humidity sensor based on half-filling and vernier effect comprises a single-mode fiber (31), a quartz tube (32) and a polyimide filler (33); firstly, a quartz tube (32) and a single-mode optical fiber (31) are welded to form a first reflecting surface (311), polyimide with a proper length is filled at the other end to form a second reflecting surface (312), and a third reflecting surface (313) is formed between the tail end of a polyimide filler (33) and air. Wherein, the reflecting surface M1(311) and the reflecting surface M2(312) form an air Fabry-Perot (FP) cavity with a length L1(321) A polyimide FP cavity consisting of reflecting surfaces M2(312) and M3(313), and the cavity length is L2(322) The quartz chamber is then sanded with sandpaper to form two small holes (34) in the sides of the chamber to allow air to enter the chamber, thereby improving the sensitivity of the sensor and reducing the response time. The optical vernier effect is generated because the optical path difference of the air FP cavity and the polyimide FP cavity is approximately equal, and an optical fiber humidity sensor with the vernier effect is further formed.
When the intracavity humidity H of the optical fiber humidity sensor based on the half-filling and vernier effects changes, the intracavity refractive index n changes, the variation at the moment is delta n, the interference envelope is further translated, and the translation is delta s at the moment.
An optical signal emitted by the broadband light source (1) enters the sensing head through the circulator (2), incident light sequentially passes through the three reflecting surfaces, and part of the incident light is reflected back due to the mismatch of the refractive indexes of the reflecting surfaces. The first reflecting surface (311) and the second reflecting surface (312) form an air cavityLength of L1(321) (ii) a The second reflecting surface (312) and the third reflecting surface (313) form a polyimide cavity with the length L2(322). Wherein the complex amplitude of the light reflected by the first reflecting surface (311) is E1The complex amplitude of light reflected from the second reflecting surface (312) is E2The complex amplitude of light reflected by the third reflecting surface (313) is E3. Reflected light E1、 E2And E3The interference occurs, and the interference is received by the spectrometer (3) through the circulator (2) to display the interference spectrum of the sensor.
The preset temperature of the optical fiber humidity sensor based on the semi-filling and vernier effect is T-22T ℃.
The relation formula between the humidity and the refractive index of the optical fiber humidity sensor based on the semi-filling and vernier effects is as follows:
the relation formula of the refractive index change delta n and the interference spectrum translation delta s of the optical fiber humidity sensor based on the half filling and vernier effect is as follows:
Δn＝α·Δs (2)
in the formula, α is a predetermined constant, and can be set according to an empirical value.
Drawings
FIG. 1 is a diagram of an experimental apparatus of the present invention.
Fig. 2 is a schematic diagram of a sensor.
Detailed Description
In order to more clearly and concisely illustrate features not described in detail, related fabrication/processing steps and limitations of the specific implementation, an embodiment of a vernier-sensitization-based semi-filled polyimide fiber FPI humidity sensor is described below with reference to fig. 1 and 2.
The first embodiment is as follows: this embodiment the semi-filled polyimide optical fiber FPI humidity sensor of vernier sensitization include broadband light source (1), circulator (2), spectrum appearance (3), sensing head (4), wherein:
the sensing head (4) is composed of a single-mode optical fiber (31), a quartz tube (32) and a polyimide filler (33); a quartz tube (32) and a single-mode optical fiber (31) are fused to form a first reflecting surface (311), a polyimide filler (33) is arranged at the other end to form a second reflecting surface (312), and a third reflecting surface (313) is formed between the tail end of the polyimide filler (33) and air. The quartz chamber is then sanded with sandpaper to form two small holes (34) in the sides of the chamber to allow air to enter the chamber, thereby increasing the sensitivity of the sensor and reducing the response time.
An optical signal emitted by the broadband light source (1) enters the sensing head through the circulator (2), incident light sequentially passes through the three reflecting surfaces, and part of the incident light is reflected back due to the mismatch of the refractive indexes of the reflecting surfaces. Therefore, the first reflecting surface (311) and the second reflecting surface (312) form an air cavity with a length L1(321) (ii) a The second reflecting surface (312) and the third reflecting surface (313) form a quartz cavity with a length L2(322). Wherein the complex amplitude of the light reflected by the first reflecting surface (311) is E1The complex amplitude of light reflected from the second reflecting surface (312) is E2The complex amplitude of light reflected by the third reflecting surface (313) is E3. Reflected light E1、E2And E3The interference occurs, and the interference is received by the spectrometer (3) through the circulator (2) to display the interference spectrum of the sensor.
The broadband light source (1) in the embodiment is used for generating optical signals, the optical signals emitted by the broadband light source (1) enter the sensing head after passing through the circulator (2), sequentially pass through the air cavity and the polyimide filling cavity, and light reflected by the three reflecting surfaces interferes and is received by the spectrometer (3) through the circulator (2). The interference spectrum displayed by the spectrometer (3) is an envelope spectrum generated due to vernier effect. The cavity length is changed when the humidity H in the imine cavity of the optical fiber humidity sensor with the semi-filling and vernier effects is changed, so that the optical path difference in the imine cavity is changed, the reflection envelope spectrum is subjected to frequency shift, and the external humidity can be detected.
The second embodiment is as follows: the method for manufacturing the sensor head of the present invention will be described with reference to fig. 2, and this embodiment is further limited to the optical fiber humidity sensor based on the half-filling and vernier effect described in the first embodiment, in which the quartz tube (32) has an inner diameter of 75 μm, an outer diameter of 125 μm, a length of 200 μm, and a small hole diameter of 20 μm; the single mode fiber has an outer diameter of 125 μm, a fiber core diameter of 9 μm, and a fiber length of 50 cm. The FP cavity formed by the first reflecting surface (311) and the second reflecting surface (312) is called an air cavity, and the free spectral range of the cavity is 6.01 nm. The polyimide fill (33) has an outer diameter of 125 μm, an inner diameter of 75 μm, a core diameter of 9 μm, and a length of 147.7 μm, and the FP cavity formed by the second reflecting surface (313) and the third reflecting surface (313) is called a polyimide filled cavity, and the free spectral range of the cavity is 5.61 nm. The manufacturing process of the invention is carried out under the condition of constant temperature.
The present embodiment defines a quartz tube (32) having an inner diameter of 75 μm, an outer diameter of 125 μm, a length of 200 μm, and a small hole diameter of 20 μm; the FP cavity formed by the first reflecting surface (311) and the second reflecting surface (312) is called an air cavity, and the free spectral range of the cavity is 6.01 nm. The polyimide filled cavity (33) has an outer diameter of 125 μm, an inner diameter of 25 μm, a core diameter of 9 μm, and a length of 147.7 μm, and the FP cavity formed by the second reflecting surface (313) and the third reflecting surface (313) is called a filled cavity, and the free spectral range of the cavity is 5.61 nm. The single mode fiber has an outer diameter of 125 μm, a fiber core diameter of 9 μm, and a fiber length of 50 cm. The specific manufacturing steps of the sensing head are as follows:
welding the single-mode fiber with a quartz tube:
and (3) welding one end of the single-mode optical fiber with the smooth section with one end of the quartz tube by using a precision optical fiber welding machine. The outer diameters of the single-mode optical fiber and the hollow-core optical fiber are the same and are 125 micrometers, and quartz tubes with different lengths and different inner diameters are selected according to actual measurement requirements. In this example, the length of the quartz tube is 200 μm, the diameter of the small hole is 20 μm, the inner diameter of the quartz tube is 75 μm, the length of the single-mode fiber is 50cm, and the core diameter of the single-mode fiber is 9 μm.
Filling of polyimide:
and (3) welding the other end of the single-mode optical fiber with the quartz tube by using a precise optical fiber welding machine. The outer diameters of the single-density optical fiber and the quartz tube are the same, polyimide is required to be filled into one half of the quartz tube cavity to ensure the vernier effect, the outer diameter of the optical fiber of the quartz tube (33) is 125 mu m, the inner diameter of the optical fiber is 25 mu m, the diameter of the fiber core is 9 mu m, the length of the fiber core is 147.7 mu m, and the free spectral range of the optical fiber is 5.61 nm.
Firstly, the quartz tube is fixed on the glass slide by using the adhesive tape, and in order to ensure the filling effect, the manufacturing process is completed under a high-power microscope, and the single-mode optical fiber is firstly welded with one end of the quartz tube. Secondly, filling the rear half section of the quartz tube by adopting a half filling mode. And finally, cutting the quartz tube according to the manufacturing requirement.
Claims (4)
1. The utility model provides a semi-filled polyimide optical fiber FPI humidity transducer of vernier sensitization, its characterized in that, humidity transducer includes broadband light source (1), circulator (2), spectrum appearance (3), sensing head (4), wherein:
the sensing head (4) is composed of a single-mode optical fiber (31), a quartz tube (32) and a polyimide filler (33); welding a quartz tube (32) and a single-mode optical fiber (31) to form a first reflecting surface (311), filling polyimide with a proper length at the other end to form a second reflecting surface (312), and forming a third reflecting surface (313) between the tail end of a polyimide filler (33) and air;
optical signals emitted by the broadband light source (1) enter the sensor head (4) after passing through the circulator (2), and optical signals reflected by the sensor head (4) enter the spectrometer (3) through the circulator (2).
2. A vernier-sensitized semi-filled polyimide optical fiber FPI humidity sensor according to claim 1, wherein the quartz tube (32) has an inner diameter of 75 μm, an outer diameter of 125 μm, a length of 200 μm, and a small hole diameter of 20 μm, the FP cavity formed by the first reflecting surface (311) and the second reflecting surface (312) is called an air cavity, and the free spectral range of the cavity is 6.01 nm.
3. The vernier-sensitized semi-filled polyimide optical fiber FPI humidity sensor according to claim 1, wherein the polyimide of the polyimide filler has a wet expansion coefficient of (6-9) x 10-5/%, coefficient of thermal expansion is (4-5) × 10-5/° C, Poisson's coefficient of 0.25-0.45, and Young's modulus of 2.45 × 109Pa。
4. The vernier-sensitized semi-filled polyimide optical fiber FPI humidity sensor according to claim 1, wherein the single mode optical fiber has an outer diameter of 125 μm, a fiber core diameter of 9 μm, and a fiber length of 50 cm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113701915A (en) * | 2021-09-03 | 2021-11-26 | 西安石油大学 | Preparation method of polymer-filled optical fiber temperature sensor embedded with air bubbles |
| WO2023151112A1 (en) * | 2022-02-09 | 2023-08-17 | 深圳大学 | Optical fiber humidity sensor having temperature calibration capability |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126666A (en) * | 2007-09-27 | 2008-02-20 | 天津大学 | High sensitivity optical fiber temperature sensor |
| CN102875828A (en) * | 2012-10-24 | 2013-01-16 | 哈尔滨理工大学 | Preparation method of ceramic/polyimide composite film |
| CN108037308A (en) * | 2017-11-13 | 2018-05-15 | 华中科技大学 | A kind of cascade IFFPI air velocity transducers and its detection device based on cursor effect |
| CN108225657A (en) * | 2017-09-28 | 2018-06-29 | 南京邮电大学 | A kind of optical fiber FP baroceptors with optical vernier effect and preparation method thereof |
| CN109444080A (en) * | 2018-12-12 | 2019-03-08 | 中国计量大学 | A kind of temperature-insensitive humidity sensor |
| CN111077080A (en) * | 2020-01-16 | 2020-04-28 | 华南师范大学 | Optical fiber Mach-Zehnder interference humidity sensor based on graphene oxide sensitization |
| CN212301270U (en) * | 2020-01-16 | 2021-01-05 | 华南师范大学 | Optical fiber Mach-Zehnder interference humidity sensor based on graphene oxide sensitization |
| CN112945284A (en) * | 2021-01-26 | 2021-06-11 | 广东海洋大学 | High-sensitivity high-temperature sensor based on suspension optical fiber dislocation welding |
| CN113008406A (en) * | 2021-02-24 | 2021-06-22 | 广东海洋大学 | High-precision temperature sensor based on enhanced vernier effect |
-
2021
- 2021-06-29 CN CN202110731287.5A patent/CN113281303A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126666A (en) * | 2007-09-27 | 2008-02-20 | 天津大学 | High sensitivity optical fiber temperature sensor |
| CN102875828A (en) * | 2012-10-24 | 2013-01-16 | 哈尔滨理工大学 | Preparation method of ceramic/polyimide composite film |
| CN108225657A (en) * | 2017-09-28 | 2018-06-29 | 南京邮电大学 | A kind of optical fiber FP baroceptors with optical vernier effect and preparation method thereof |
| CN108037308A (en) * | 2017-11-13 | 2018-05-15 | 华中科技大学 | A kind of cascade IFFPI air velocity transducers and its detection device based on cursor effect |
| CN109444080A (en) * | 2018-12-12 | 2019-03-08 | 中国计量大学 | A kind of temperature-insensitive humidity sensor |
| CN111077080A (en) * | 2020-01-16 | 2020-04-28 | 华南师范大学 | Optical fiber Mach-Zehnder interference humidity sensor based on graphene oxide sensitization |
| CN212301270U (en) * | 2020-01-16 | 2021-01-05 | 华南师范大学 | Optical fiber Mach-Zehnder interference humidity sensor based on graphene oxide sensitization |
| CN112945284A (en) * | 2021-01-26 | 2021-06-11 | 广东海洋大学 | High-sensitivity high-temperature sensor based on suspension optical fiber dislocation welding |
| CN113008406A (en) * | 2021-02-24 | 2021-06-22 | 广东海洋大学 | High-precision temperature sensor based on enhanced vernier effect |
Non-Patent Citations (2)
| Title |
|---|
| MINGRAN QUAN: "Ultra-high sensitivity Fabry–Perot interferometer gas refractive index fiber sensor based on photonic crystal fiber and Vernier effect" * |
| 叶文豪: "法布里-珀罗干涉仪构成的湿度传感器", 《传感技术学报》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113701915A (en) * | 2021-09-03 | 2021-11-26 | 西安石油大学 | Preparation method of polymer-filled optical fiber temperature sensor embedded with air bubbles |
| CN113701915B (en) * | 2021-09-03 | 2023-06-23 | 西安石油大学 | Preparation method of polymer filled optical fiber temperature sensor embedded with air bubbles |
| WO2023151112A1 (en) * | 2022-02-09 | 2023-08-17 | 深圳大学 | Optical fiber humidity sensor having temperature calibration capability |
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Application publication date: 20210820 |