CN113267277A - Location perception structure based on light signal changes - Google Patents
Location perception structure based on light signal changes Download PDFInfo
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- CN113267277A CN113267277A CN202110540390.1A CN202110540390A CN113267277A CN 113267277 A CN113267277 A CN 113267277A CN 202110540390 A CN202110540390 A CN 202110540390A CN 113267277 A CN113267277 A CN 113267277A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
Abstract
The invention relates to the technical field of positioning perception, in particular to a positioning perception structure based on optical signal change, which comprises a light source layer: for providing an optical signal; a change layer: the optical fiber is used for sensing physical change or chemical change and changing an optical signal after the physical change or the chemical change is generated; photosensitive layer: for receiving an optical signal; the change layer and the photosensitive layer are sequentially arranged, and the light source layer is arranged inside, at the front end or at the rear end of the change layer. In the present invention, the light source provided by the light source layer reaches the photosensitive layer. When the change layer senses physical changes such as pressing and temperature change, light signals such as color and brightness of the photosensitive layer, which are emitted by the light source layer, are changed. After the plurality of positioning sensing structures are combined for use, positioning and sensing can be achieved by identifying the change of the optical signal, the structure is simple, and multipoint positioning and multipoint data volume sensing can be achieved.
Description
Technical Field
The invention relates to the field of positioning sensing structures, in particular to a positioning sensing structure based on optical signal change.
Background
In the prior art, electricity is mostly used as a principle structure for positioning robot skin, and the use schemes of the prior art comprise an array structure positioning scheme, a loop resistance value measurement positioning scheme and a single-point chip positioning scheme.
(1) The array positioning scheme can position the acting position in a time-sharing way through time-sharing loop analysis, and can measure the acting size of the acting position through loop resistance, for example, the force size of the pressed position is measured, or if the position is a temperature-sensitive detector, the position with temperature change and the temperature change size can also be measured. And the array structure can measure data of multiple points through time-sharing measurement. However, the defects are that there are many I/O contacts, and when the array shape is square, the same measurement points are used, and the number of I/O contacts is the least, but many positions of the robot skin are irregular, so that there are many I/O contacts, and many I/O interfaces are needed for electric signal processing, so that the manufacturing cost is high.
(2) The circuit resistance measurement scheme has lower cost compared with the array positioning scheme, but the scheme needs higher calculation cost to calculate the position where the multiple points act, and can not sense the degree of pressure or other magnitudes such as temperature.
(3) In addition, the chip is used at a single point or a plurality of points for data transmission, the scheme can deal with multi-point touch and multi-point data return, but the scheme is expensive and is not suitable for large-area robot skin.
The prior art has the basic requirements that the robot skin cannot have the characteristics of low manufacturing cost, multipoint positioning, multipoint data quantity sensing, high response speed and high flexibility and stability.
Therefore, a new solution is urgently needed to be provided to achieve the characteristics of low manufacturing cost, multipoint positioning, multipoint data volume sensing, high response speed and high flexibility and stability, and the necessary requirements of the robot skin can be met.
Disclosure of Invention
In order to solve the above problems, a primary object of the present invention is to provide a location sensing structure based on changes of an optical signal, which can realize location and sensing by recognizing the changes of the optical signal.
Another objective of the present invention is to provide a positioning sensing structure based on optical signal variation, which has the advantages of precise positioning, simple structure, low cost, and easy popularization.
It is still another object of the present invention to provide a positioning sensing structure based on optical signal variation, which can achieve multi-point positioning, multi-point data volume sensing, high stability and flexibility, and low delay.
A location perception structure based on optical signal change is characterized by comprising
Light source layer: for providing an optical signal;
a change layer: the optical fiber is used for sensing physical change or chemical change and changing an optical signal after the physical change or the chemical change is generated;
photosensitive layer: for receiving an optical signal;
the change layer and the photosensitive layer are sequentially arranged, and the light source layer is arranged inside, at the front end or at the rear end of the change layer. In the present invention, the signal provided by the light source layer reaches the photosensitive layer. Different materials can be used as the materials of the change layer according to different requirements, so that after the change layer senses changes such as pressing, temperature change, humidity change, contact with different substances and the like, light signals such as color, brightness and the like received by the photosensitive layer and emitted by the light source layer can be changed. After the plurality of positioning sensing structures are combined for use, the functions of positioning and sensing can be realized by identifying the change of the optical signal, the structure is simple, and multipoint positioning and multipoint data volume sensing can be realized. Specifically, when the light source layer is arranged at the front end of the change layer, the light source layer can be external natural light, an LED lamp, a laser coating sheet lamp and a fluorescent lamp, the light source layer, the change layer and the photosensitive layer are sequentially arranged, and after the change layer senses changes such as pressing, temperature changes, humidity changes and contact with different substances, light signals such as color and brightness and the like after light emitted by the light source layer passes through the physical change layer can be changed and finally received by the photosensitive layer, so that the sensing function is realized. When the light source layer is arranged in the change layer, the change layer can be an electroless fluorescent coating, an electric excitation fluorescent coating or a luminous fluorescent coating, and when the change layer senses changes such as pressing, temperature change, humidity change, contact with different substances and the like, the coating or the coating of the light source layer can be scattered or changed in other ways, so that the optical signal received by the photosensitive layer is changed. When the light source layer is arranged at the rear end of the change layer, such as on the bottom surface of the change layer, the light source layer can be an electroless fluorescent coating, a liquid laser coating or a luminous fluorescent coating, and when the change layer senses changes such as pressing, temperature change, humidity change, contact with different substances and the like, the coating or the coating of the light source layer can be scattered or changed in other ways, so that the optical signal received by the photosensitive layer is changed.
Furthermore, the positioning sensing structure also comprises an optical fiber, an optical signal detection component for converting an optical signal into an electric signal and a system analysis component for analyzing and coding electric information, wherein one end of the optical fiber is connected with the photosensitive layer, the other end of the optical fiber is connected with the input end of the optical signal detection component, and the output end of the optical signal detection component is connected with the system analysis component. The optical signal detection component may be an optical signal receiving device such as a camera or a fiber optic module. When the system works, a light signal passing through the photosensitive layer is conducted into the light signal detection assembly through the optical fiber, the light signal is processed by the light signal detection assembly to be changed into an electric signal, the electric signal is finally sent to the system analysis assembly to be analyzed and processed, and physical change or chemical change sensed by a specific change layer can be calculated by comparing change of the received electric signal. Wherein the optical fiber can be replaced with any light pipe. In particular, the use of extremely fine optical fibers allows the thickness of the arrangement to be reduced to a tolerable range. The other tube walls of the optical fiber except the upper and lower tube orifices can be dyed into lightproof colors, so that the light transmission of other tube walls except the upper and lower tube orifices is avoided to be transmitted into other optical fibers. One end of the optical fiber is connected with the photosensitive layer, and the other end of the optical fiber is connected to the optical signal detection assembly, so that the optical signal detection assembly can monitor the optical signal emitted by the other end of each optical fiber at any time.
Furthermore, the positioning sensing structure further comprises a cluster array, the cluster array is located between the other end of the optical fiber and the optical signal detection assembly, the other end of the optical fiber is connected with one end of the cluster array, and one end of the cluster array is connected with the input end of the optical signal detection assembly. When the positioning sensing structures are applied specifically, a plurality of optical fibers exist, the tail ends of a plurality of optical fibers can be bundled together by the bundling array and numbered, so that the light transmitted from which position can be known quickly, and the convenient and efficient positioning sensing is realized.
Further, the bundling array comprises a bundling structure and a bundling lens, wherein the bundling structure is used for realizing bundling of the optical fibers, and the bundling lens is located between the other end of the optical fibers and the optical signal detection assembly. When the optical fiber bundling device works specifically, the bundling structure can be adhesive glue, an array type fixed support, silica gel and the like, and only the tail ends (namely the other ends) of the optical fibers can be bundled into the array structure. The cluster lens mainly has the functions of focusing, focusing and focusing, and projects the optical information of the optical fiber cluster array onto a photosensitive chip in the optical signal detection assembly according to requirements. The arrangement of the cluster array can greatly save the cost of the structure, and the optical signals of all the optical fibers can be processed by only one detection element under the minimum condition without the need of corresponding one detection element to each optical fiber. Meanwhile, the positioning and sensing functions of the structure can be efficiently and quickly realized.
Further, the light source layer comprises an LED lamp, a floodlight sheet, a laser coating lamp, a fluorescent lamp, an internal light source and an external light source. Namely, the light source layer comprises but is not limited to an LED lamp and one of the external natural light and a floodlight sheet, an electroless fluorescent coating, an electrified cold light sheet and liquid laser paint. Specifically, the light source layer may be an LED lamp, an external natural light, a floodlight sheet, an electroless fluorescent coating, an energized cold light sheet, a laser lamp, a liquid laser coating, an internal light source, or an external light source. When the light source layer is the electrified cold light sheet lamp, the electrified cold light sheet lamp can provide a light source, and at the moment, the brightness of the electrified cold light sheet lamp can be kept constant during specific work, so that the electrified cold light sheet lamp can continuously emit light and irradiate the light to the changing layer. When the pressure positioning device is used for pressure positioning, the light source layer is positioned between the pressure applying object and the change layer, and the light source is flexible or a movable structure which is arranged point to point with the photosensitive layer. And further realize the specific positioning perception function. When the light source layer is a floodlight sheet, the light emitting sheet can not emit light, so that the light signal in the environment can be received only through one end, and the light signal is transmitted to the change layer through the other end, thereby indirectly playing a role of a light source. When the light source is a flexible cold light sheet lamp, the cold light sheet lamp can be used as a large-area light source to provide light sources for a plurality of positions.
Furthermore, the change layer comprises a glue layer capable of pressing light transmission, a light-sensitive color-changing material, a material capable of changing color after contacting different materials, a material capable of changing color after sensing temperature and humidity changes, a material capable of changing light transmission data by contacting different substances to change color or change transmittance and the like, and a material capable of changing optical signals by generating chemical reaction. That is, the change layer includes, but is not limited to, a light-permeable adhesive layer, a photochromic material, a material that changes color when contacting different materials, a material that changes color when sensing a change in temperature or humidity, and a material that changes an optical signal by generating a chemical reaction. Specifically, the change layer may be a glue layer capable of pressing light transmission, or may be a light-sensitive color-changing material, or may be a material capable of changing color after contacting with different materials, or may be a light-sensitive color-changing material, or may be a material capable of changing color after sensing temperature and humidity changes, or may be a material capable of changing color or changing transmittance and the like when contacting with different substances to change light transmission data. When the change layer is the glue film, can be for the gelatinoid of high reduction degree like aquogel, receive the back of pressing, the thickness of aquogel can change or make the thing of hindering light scatter to make under the stable prerequisite of the light signal of light source layer, can change through the luminance of aquogel, colour etc. thereby can change through this luminance, colour etc. and finally by system analysis subassembly analysis code, obtain the position of pressing, information such as dynamics, thereby realize the function of location and perception. When the change layer is photosensitive color-changing material, when receiving interference such as external pressure, the light signal that photosensitive color-changing material received can change to photosensitive color-changing material's colour can change, and then the light signal after passing photosensitive color-changing material also can take place like the change of luminance, colour etc. finally by system analysis subassembly analysis code, reachs the position and the particular case of interference such as external pressure. When the material that discolours after for sensing temperature and humidity change is changeed in the metaplasia, after sensing the change of temperature and humidity, the colour of this material can change to make under the stable prerequisite of light source layer's light signal, the light signal who sees through this material changes, finally by system analysis subassembly analysis code, reachs the position of sensing temperature variation and humidity, the specific numerical value of temperature and humidity that can sense like the same reason.
Further, the photosensitive layer comprises a light collecting lens, a floodlight sheet and a light collecting sheet. I.e., the photosensitive layer includes, but is not limited to, collector lenses, flood sheets, and collector sheets. The photosensitive layer is used for converging light onto the optical fiber or floodlighting onto the optical fiber, so that light signals on structures such as a light collecting lens and a floodlight sheet on the photosensitive layer can reach the other end through one end of the optical fiber. I.e. mainly by collecting the light transmitted through the changing layer and then transmitting it to the optical fibre. Furthermore, the photosensitive layer is connected with the optical fiber through a light collecting structure with a larger area, such as a floodlight sheet or a lens, and the function of the photosensitive layer is that when any position of the light collecting structure receives a light signal, the light signal can be conducted into the optical fiber and is transmitted to the other end of the optical fiber through the optical fiber, so that the function of enabling the area of the photosensitive layer to be larger than the area of the cluster array at the tail end of the optical fiber is achieved.
Further, the positioning sensing structure further comprises a supporting structure for mounting the light source layer, the change layer and the photosensitive layer. The supporting structure is used for fixing the light source layer, the change layer and the photosensitive layer, and the relative stability of the positions of the three-layer structure is realized.
The signal provided by the light source layer reaches the photosensitive layer. Different materials can be used as the materials of the change layer according to different requirements, so that after the change layer senses changes such as pressing, temperature change, humidity change, contact with different substances and the like, light signals such as color, brightness and the like received by the photosensitive layer and emitted by the light source layer can be changed. After the plurality of positioning sensing structures are combined for use, the functions of positioning and sensing can be realized by identifying the change of the optical signal, the structure is simple, and multipoint positioning and multipoint data volume sensing can be realized.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic diagram of the exploded structure at a in fig. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
A location perception structure based on optical signal change is characterized by comprising
Light source layer 1: for providing an optical signal;
change layer 2: the light source is used for sensing physical change and changing an optical signal passing through the light source after the physical change;
photosensitive layer 3: for receiving an optical signal through the varying layer;
the light source layer 1, the change layer 2, and the photosensitive layer 3 are sequentially disposed.
In this embodiment, the positioning sensing structure further comprises a support structure (not shown) for mounting the light source layer, the modification layer and the photosensitive layer. The support structure is used for installing the light source layer 1, the change layer 2 and the photosensitive layer 3, and the position of the three-layer structure is relatively stable. When the device is applied to robot skin, the support structure is an integral framework of the robot skin, and mounting hole positions matched with the light source layer 1, the change layer 2 and the photosensitive layer 3 in shape and size are formed in the support structure. The plastic structure can be additionally arranged to serve as a support, the plastic structure is fully distributed with sunken positions, the sunken positions are used for placing the light source layer 1, the change layer 2, the photosensitive layer 3 and other structures, and the light source layer 1, the change layer 2, the photosensitive layer 3 and other structures are arranged at the sunken positions and then just paved at the sunken positions. During installation, fixed connection or detachable connection can be selected according to specific use scenes.
In this embodiment, the positioning sensing structure further includes an optical fiber 4, an optical signal detection component for converting an optical signal into an electrical signal, and a system analysis component for analyzing and encoding electrical information, one end of the optical fiber 4 is connected to the photosensitive layer, the other end of the optical fiber 4 is connected to the input end of the optical signal detection component, and the output end of the optical signal detection component is connected to the system analysis component. During specific work, the optical signal passing through the photosensitive layer 3 is conducted into the optical signal detection assembly through the optical fiber 4, the optical signal is converted into an electric signal through the processing of the optical signal detection assembly, and finally the electric signal is sent to the system analysis assembly for analysis and processing, and the physical change sensed by the specific change layer 2 can be calculated through comparing the change of the received electric signal. Wherein the optical fiber 4 can be replaced with any light pipe. In particular, the use of extremely fine optical fibers 4 allows the arrangement thickness to be reduced to a tolerable range. The optical fiber 4 can be black to prevent light transmission and light guide from the side surface. One end of the optical fibres 4 is connected to the photosensitive layer 3 and the other end is connected to a camera so that the camera can constantly monitor the amount and colour of the light emitted by the other end of each optical fibre 4.
In this embodiment, the positioning sensing structure further includes a bundle array 5, the bundle array 5 is located between the other end of the optical fiber 4 and the optical signal detection component, the other end of the optical fiber 4 is connected to one end of the bundle array 5, and one end of the bundle array 5 is connected to the input end of the optical signal detection component. When a plurality of positioning sensing structures are applied specifically, a plurality of optical fibers 4 exist, the bundling array 5 can bundle the tail ends of a plurality of optical fibers 4 together and number the tail ends, so that the light transmitted from which position can be known quickly, and convenient and efficient positioning sensing is realized.
In the present embodiment, the bundle array 5 includes a bundle structure for realizing the bundle of the optical fibers and a bundle lens, and the bundle lens is located between the other end of the optical fiber and the optical signal detection assembly. When the optical fiber bundling device works specifically, the bundling structure can be adhesive glue, an array type fixed support and the like, and only the tail ends (namely the other ends) of the optical fibers can be bundled into the array structure. The cluster lens mainly has the functions of focusing, focusing and focusing, and projects the optical information of the optical fiber cluster array onto a photosensitive chip in the optical signal detection assembly according to requirements. The arrangement of the cluster array 5 can greatly save the cost of the structure, and only one detection element is needed to process the optical signals of all the optical fibers 4, and each optical fiber 4 does not need to correspond to one detection element. Meanwhile, the positioning and sensing functions of the structure can be efficiently and quickly realized.
In the present embodiment, the light source layer 1 includes an LED lamp, a flood sheet, a laser coated sheet lamp, a fluorescent lamp, and a flexible cold light sheet lamp. That is, the light source layer 1 includes, but is not limited to, LED lamps, flood sheets, laser coated sheet lamps, fluorescent lamps, flexible cold light sheet lamps. When the light source layer 1 is an LED lamp, the LED lamp itself can provide a light source, and at this time, the luminance of the LED lamp can be kept constant during specific work, so that the LED lamp can continuously emit light and irradiate light to the change layer 2. And further realize the specific positioning perception function. When the light source layer 1 is a floodlight sheet, since the light emitting sheet itself cannot emit light, the light source layer can only receive the light signal in the environment through one end, and the other end transmits the light signal to the changing layer 2, thereby indirectly playing a role of a light source. When the light source 1 is a flexible electroluminescent sheet lamp, the electroluminescent sheet lamp can be used as a large-area light source to provide light sources for a plurality of positions.
In this embodiment, the changing layer 2 includes a light-permeable adhesive layer, a photochromic material, a material that changes color when contacting different materials, and a material that changes color when sensing temperature and humidity. Namely, the changing layer 2 includes, but is not limited to, a light-permeable adhesive layer, a photochromic material, a material which changes color when contacting different materials, and a material which changes color when sensing a change in temperature and humidity. When the change layer 2 is the glue film, can be for the aquogel, receive the back of pressing, the thickness of aquogel can change or make the thing of hindering light scatter to make under the stable prerequisite of light signal of light source layer, can change through luminance, the colour etc. of aquogel, thereby can change through this luminance, colour etc. and finally by system analysis subassembly analysis code, obtain information such as the position of pressing, dynamics, thereby realize the function of location and perception. When change layer 2 is photosensitive color-changing material, when receiving interference such as external pressure, the light signal that photosensitive color-changing material received can change to photosensitive color-changing material's colour can change, and then the light signal after passing photosensitive color-changing material also can take place like the change of luminance, colour etc. finally by system analysis subassembly analysis code, reachs the position and the particular case of interference such as external pressure. When changing layer 2 for sensing the material that discolours behind temperature and the humidity change, after sensing the change of temperature and humidity, the colour of this material can change to make under the stable prerequisite of light source layer 1's light signal, the light signal who sees through this material changes, finally by system analysis subassembly analysis code, reachs the position of sensing temperature change and humidity, and the temperature and the specific numerical value of humidity of sensing. The variable layer can also be a drawing pin type fine hair device, and when fine hair is bent, the position of the drawing pin is displaced and is transparent, so that the position of the drawing pin is positioned and the amplitude is calculated.
In the present embodiment, the photosensitive layer 3 includes a condenser lens, a flood sheet, and glass. I.e. the photosensitive layer 3 includes, but is not limited to, a collector lens, a flood sheet and glass. The photosensitive layer 3 functions to make the light converge on the same plane of the optical fiber or flood the optical fiber 4 so that the light signal on the structures such as the collecting lens and the flood plate on the photosensitive layer can pass through one end of the optical fiber to the other end. I.e. mainly by collecting the light transmitted through the changing layer and then transmitting it to the optical fibre 4.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A location perception structure based on optical signal change is characterized by comprising
Light source layer: for providing an optical signal;
a change layer: the optical fiber is used for sensing physical change or chemical change and changing an optical signal after the physical change or the chemical change is generated;
photosensitive layer: for receiving an optical signal;
the change layer and the photosensitive layer are sequentially arranged, and the light source layer is arranged inside, at the front end or at the rear end of the change layer.
2. The structure of claim 1, further comprising an optical fiber, an optical signal detecting component for converting an optical signal into an electrical signal, and a system analyzing component for analyzing and encoding electrical information, wherein one end of the optical fiber is connected to the photosensitive layer, the other end of the optical fiber is connected to an input end of the optical signal detecting component, and an output end of the optical signal detecting component is connected to the system analyzing component.
3. The structure of claim 2, further comprising a cluster array, the cluster array is located between the other end of the optical fiber and the optical signal detection module, the other end of the optical fiber forms the cluster array, and the cluster array is connected to the input end of the optical signal detection module.
4. The structure of claim 3, wherein the bundle array comprises a bundle structure for bundling the optical fibers and a bundle lens, and the bundle lens is located between the other end of the optical fibers and the optical signal detection assembly.
5. The structure of claim 4, wherein the light source layer comprises an LED lamp, a flood light sheet, a laser paint lamp and a fluorescent lamp.
6. The structure of claim 5, wherein the change layer comprises a layer of glue that can be pressed to transmit light, a photochromic material, a material that changes color or transmittance when contacting different materials, a material that changes color when sensing temperature and humidity, or a material that generates a chemical reaction to change the light signal.
7. The structure of claim 6, wherein the photosensitive layer comprises a light collecting lens, a light diffusing sheet and glass.
8. The structure of claim 7, further comprising a fixing structure for mounting the light source layer, the variable layer and the photosensitive layer.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114046809A (en) * | 2021-11-11 | 2022-02-15 | 广东省科学院半导体研究所 | Optical sensing device, sensing equipment and system |
| CN116347792A (en) * | 2023-05-26 | 2023-06-27 | 江苏富坤光电科技有限公司 | Processing equipment is used in production of semiconductor illuminator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114046809A (en) * | 2021-11-11 | 2022-02-15 | 广东省科学院半导体研究所 | Optical sensing device, sensing equipment and system |
| CN114046809B (en) * | 2021-11-11 | 2024-04-26 | 广东省科学院半导体研究所 | Optical sensing device, sensing equipment and system |
| CN116347792A (en) * | 2023-05-26 | 2023-06-27 | 江苏富坤光电科技有限公司 | Processing equipment is used in production of semiconductor illuminator |
| CN116347792B (en) * | 2023-05-26 | 2023-07-28 | 江苏富坤光电科技有限公司 | Processing equipment is used in production of semiconductor illuminator |
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