CN113267144A - Ceramic disc shape measuring equipment and using method thereof - Google Patents
Ceramic disc shape measuring equipment and using method thereof Download PDFInfo
- Publication number
- CN113267144A CN113267144A CN202110752797.0A CN202110752797A CN113267144A CN 113267144 A CN113267144 A CN 113267144A CN 202110752797 A CN202110752797 A CN 202110752797A CN 113267144 A CN113267144 A CN 113267144A
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- Prior art keywords
- measuring
- axis module
- ceramic disc
- platform
- shock
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- 239000000919 ceramic Substances 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000013016 damping Methods 0.000 claims abstract description 12
- 239000004579 marble Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000012876 topography Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000035939 shock Effects 0.000 description 16
- 238000010521 absorption reaction Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses a ceramic disc appearance measuring device and a using method thereof, wherein the ceramic disc appearance measuring device comprises a measuring rack, a measuring platform positioned on the measuring rack, an X-axis module positioned on the measuring platform, a Y-axis module capable of moving along the length direction of the X-axis module, a driving cylinder capable of moving along the length direction of the Y-axis module and a measuring sensor positioned at the piston rod end of the driving cylinder; the number of the measuring platforms is two, and the measuring platforms are connected with the measuring rack through the damping supporting blocks; the X-axis module is positioned on one measuring platform, and the other measuring platform is provided with a driving module which is parallel to the X-axis module. The invention realizes the rapid measurement of the surface flatness of the ceramic disc under the matching action of the measuring frame, the measuring platform, the X-axis module, the Y-axis module, the driving cylinder and the measuring sensor, and has high measuring precision and lower error.
Description
Technical Field
The invention belongs to the technical field of ceramic disc detection, and particularly relates to a ceramic disc shape measuring device and a using method thereof.
Background
The ceramic disc is usually used as a base disc in a grinding and polishing process, and since a wafer is attached to the surface of the ceramic disc for processing, the requirement on the flatness of the surface of the ceramic disc is extremely high, and the flatness of the surface of the ceramic disc needs to be accurately measured.
The traditional measurement method is to measure the surface of the ceramic disc by a dial indicator, but the method has large error and cannot accurately measure the flatness of the surface of the ceramic disc, so that the consistency of the flatness of the surface of a wafer can be influenced.
Disclosure of Invention
The invention overcomes the defects of the prior art, and provides a ceramic disc shape measuring device and a using method thereof, so as to solve the problems in the prior art.
In order to achieve the purpose, the invention adopts the technical scheme that: the ceramic disc morphology measuring equipment comprises a measuring rack, a measuring platform, an X-axis module, a Y-axis module, a driving cylinder and a measuring sensor, wherein the measuring platform is positioned on the measuring rack; wherein:
the number of the measuring platforms is two, the measuring platforms are connected with the measuring rack through the damping supporting blocks, and the ceramic discs are positioned on the two measuring platforms;
the X-axis module is positioned on one measuring platform, and the other measuring platform is provided with a driving module which is parallel to the X-axis module;
the Y-axis module is connected with the X-axis module through a mounting platform;
the measuring sensor can be used for carrying out data acquisition on the surface of the ceramic disc.
Preferably, the measuring platform and the mounting platform are marble high-precision platforms.
Preferably, the X-axis module, the Y-axis module and the driving module are all linear motor modules.
Preferably, the number of the shock absorption supporting blocks is four, and the shock absorption supporting blocks are respectively located at four corner positions of the measuring rack.
Preferably, the shock absorption supporting block comprises a shock absorption block body and a shock absorption spring, and a filling film is arranged between the shock absorption block body and the shock absorption spring.
Preferably, the damping spring is a gas spring.
Preferably, the filling film is filled with an inert gas.
The invention also discloses a use method of the ceramic disc shape measuring equipment, which comprises the following steps:
s1, placing the ceramic disc on the measuring platform, wherein the ceramic disc is located in the measuring area of the measuring sensor;
s2, carrying out data acquisition on the surface of the ceramic disc by using the measuring sensor to obtain 3D data of the whole surface of the ceramic disc;
and S3, calculating the flatness of the surface of the ceramic disc according to the 3D data of the surface of the ceramic disc.
Preferably, in step S2, the measuring sensor performs data acquisition on the surface of the ceramic disc in a line spectrum confocal manner.
The invention solves the defects in the background technology, and has the following beneficial effects:
(1) under the matching action of the measuring frame, the measuring platform, the X-axis module, the Y-axis module, the driving cylinder and the measuring sensor, the ceramic disc surface flatness can be quickly measured, the measuring precision is high, and the error is low;
(2) the measuring platform and the mounting platform both adopt high-precision marble platforms, so that the measuring precision can be effectively guaranteed in terms of hardware, and the measuring error is reduced;
(3) the existence of the damping supporting block can carry out damping supporting on the measuring platform, and the measuring platform is prevented from generating angle deviation, so that the ceramic disc is ensured to be positioned on a standard plane, and the measuring precision is ensured;
(4) adopt the filling film setting between damping block and damping spring, need not to adopt complicated mechanical structure can reach stable shock attenuation effect, occupation space is little, can last the use.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic overall structure of a preferred embodiment of the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic view of the preferred embodiment shock absorbing support block of the present invention;
FIG. 4 is an enlarged view of portion B of FIG. 3;
FIG. 5 is a flow chart of a preferred embodiment of the present invention;
in the figure: 1. a measuring rack; 2. a measuring platform; 3. an X-axis module; 4. a Y-axis module; 5. a driving cylinder; 6. a measurement sensor; 7. a ceramic pan; 8. a shock-absorbing support block; 81. a shock-absorbing block body; 82. a damping spring; 9. a driving module; 10. mounting a platform; 11. and filling the film.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 4, a ceramic disk topography measuring apparatus includes a measuring frame 1, a measuring platform 2 located on the measuring frame 1, an X-axis module 3 located on the measuring platform 2, a Y-axis module 4 capable of moving along a length direction of the X-axis module 3, a driving cylinder 5 capable of moving along a length direction of the Y-axis module 4, and a measuring sensor 6 located at a piston rod end of the driving cylinder 5; wherein:
the quantity of platform 2 of measurationing is two, measuration platform 2 is connected with measuration frame 1 through shock attenuation supporting shoe 8, ceramic dish 7 is located two and measurations platform 2, shock attenuation supporting shoe 8 includes shock attenuation block 81 and damping spring 82, be provided with filling film 11 between shock attenuation block 81 and the damping spring 82, four corner positions department at measuration frame 1 are installed to shock attenuation supporting shoe 8, carry out the shock attenuation to two measuration platforms 2 from four corners and support, avoid two measuration platforms 2 angular deviation to appear, and then guarantee that ceramic dish 7 is on the standard plane, guarantee the precision of measurationing, and the existence of filling film 11, can reach more stable shock attenuation effect.
Specifically, the gas filled in the filling film 11 is nitrogen, and the damper spring 82 is a nitrogen gas spring.
In this embodiment, the X-axis module 3 is located on one measuring platform 2, and the other measuring platform 2 is provided with the driving module 9, and the driving module 9 is parallel to the X-axis module 3, and the X-axis module 3 is matched with the driving module 9 to form a dual-drive module structure, so that the Y-axis module 4 can precisely move along the X-axis direction, and the movement angle deviation cannot occur, thereby ensuring the movement precision of the Y-axis module 4.
Specifically, in the present embodiment, the Y-axis module 4 is connected to the X-axis module 3 and the driving module 9 by using the mounting platform 10.
In this embodiment, the measuring sensor 6 moves above the ceramic disc 7 under the cooperation of the X-axis module 3, the driving module 9, the Y-axis module 4 and the driving cylinder 5, data is acquired on the surface of the ceramic disc 7 in the measuring area of the measuring sensor 6, and after the data is acquired, the flatness of the surface of the ceramic disc 7 is calculated through the acquired data.
Specifically, the measurement platform 2 and the mounting platform 10 adopted in this embodiment are both marble high-precision platforms, which can effectively ensure the measurement precision from the aspect of hardware, and reduce the measurement error.
Specifically, the X-axis module 3, the Y-axis module 4, and the driving module 9 adopted in this embodiment are all linear motor modules, and the measurement accuracy can be effectively ensured in terms of hardware, so that the measurement error is reduced.
As shown in fig. 5, a method for using a ceramic disk topography metrology apparatus includes the steps of:
s1, placing the ceramic disc 7 on the measuring platform 2, wherein the ceramic disc 7 is located in the measuring area of the measuring sensor 6;
s2, carrying out data acquisition on the surface of the ceramic disc 7 by using the measuring sensor 6 to obtain 3D data of the whole surface of the ceramic disc 7;
s3, the flatness of the surface of the ceramic disk 7 is calculated from the 3D data of the surface of the ceramic disk 7.
Specifically, in this embodiment, the measurement sensor 6 performs data acquisition on the surface of the ceramic disk 7 in a line spectrum confocal manner to obtain all 3D data of the surface of the ceramic disk 7, and then performs a collection calculation on the data to obtain the flatness of the surface of the ceramic disk 7.
In summary, under the cooperation of the measuring frame 1, the measuring platform 2, the X-axis module 3, the Y-axis module 4, the driving cylinder 5 and the measuring sensor 6, the present invention realizes the rapid measurement of the surface flatness of the ceramic disk 7, and has high measuring accuracy and low error.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (9)
1. The ceramic disc morphology measuring equipment is characterized by comprising a measuring rack, a measuring platform, an X-axis module, a Y-axis module, a driving cylinder and a measuring sensor, wherein the measuring platform is positioned on the measuring rack; wherein:
the number of the measuring platforms is two, the measuring platforms are connected with the measuring rack through the damping supporting blocks, and the ceramic discs are positioned on the two measuring platforms;
the X-axis module is positioned on one measuring platform, and the other measuring platform is provided with a driving module which is parallel to the X-axis module;
the Y-axis module is connected with the X-axis module through a mounting platform;
the measuring sensor can be used for carrying out data acquisition on the surface of the ceramic disc.
2. The apparatus of claim 1, wherein the metrology platform and the mounting platform are marble high precision platforms.
3. The apparatus of claim 1, wherein the X-axis module, the Y-axis module, and the driving module are linear motor modules.
4. The apparatus of claim 1, wherein the number of the shock-absorbing support blocks is four and the shock-absorbing support blocks are respectively located at four corners of the measuring rack.
5. The apparatus of claim 4, wherein the shock-absorbing support block comprises a shock-absorbing block and a shock-absorbing spring, and a filling film is disposed between the shock-absorbing block and the shock-absorbing spring.
6. The apparatus of claim 5, wherein the damping spring is a gas spring.
7. The apparatus of claim 5, wherein the filling film is filled with an inert gas.
8. A method for using a ceramic disk topography measuring apparatus according to any one of claims 1 to 7, comprising the steps of:
s1, placing the ceramic disc on the measuring platform, wherein the ceramic disc is located in the measuring area of the measuring sensor;
s2, carrying out data acquisition on the surface of the ceramic disc by using the measuring sensor to obtain 3D data of the whole surface of the ceramic disc;
and S3, calculating the flatness of the surface of the ceramic disc according to the 3D data of the surface of the ceramic disc.
9. The use method of the apparatus for measuring the shape of the ceramic disc as claimed in claim 8, wherein the measuring sensor performs confocal line spectrum data acquisition on the surface of the ceramic disc in step S2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110752797.0A CN113267144A (en) | 2021-07-02 | 2021-07-02 | Ceramic disc shape measuring equipment and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110752797.0A CN113267144A (en) | 2021-07-02 | 2021-07-02 | Ceramic disc shape measuring equipment and using method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN113267144A true CN113267144A (en) | 2021-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110752797.0A Pending CN113267144A (en) | 2021-07-02 | 2021-07-02 | Ceramic disc shape measuring equipment and using method thereof |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130044175A1 (en) * | 2011-08-17 | 2013-02-21 | University Of Washington Through Its Center For Commercialization | Method and System of Fabricating PZT Nanoparticle Ink Based Piezoelectric Sensor |
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN107144220A (en) * | 2017-06-10 | 2017-09-08 | 苏州康鸿智能装备股份有限公司 | A kind of dot laser measuring table |
| CN208171232U (en) * | 2018-06-07 | 2018-11-30 | 京隆科技(苏州)有限公司 | For detecting the roughness of wafer patch ring and the measuring equipment of degree of deformation |
| CN112729195A (en) * | 2021-01-09 | 2021-04-30 | 拓思精工科技(苏州)有限公司 | Ceramic disc measuring equipment |
-
2021
- 2021-07-02 CN CN202110752797.0A patent/CN113267144A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130044175A1 (en) * | 2011-08-17 | 2013-02-21 | University Of Washington Through Its Center For Commercialization | Method and System of Fabricating PZT Nanoparticle Ink Based Piezoelectric Sensor |
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN107144220A (en) * | 2017-06-10 | 2017-09-08 | 苏州康鸿智能装备股份有限公司 | A kind of dot laser measuring table |
| CN208171232U (en) * | 2018-06-07 | 2018-11-30 | 京隆科技(苏州)有限公司 | For detecting the roughness of wafer patch ring and the measuring equipment of degree of deformation |
| CN112729195A (en) * | 2021-01-09 | 2021-04-30 | 拓思精工科技(苏州)有限公司 | Ceramic disc measuring equipment |
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Application publication date: 20210817 |
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