CN113252573A - Photo-thermal spectrum trace gas detection device and method based on cavity enhancement - Google Patents
Photo-thermal spectrum trace gas detection device and method based on cavity enhancement Download PDFInfo
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- CN113252573A CN113252573A CN202110572615.1A CN202110572615A CN113252573A CN 113252573 A CN113252573 A CN 113252573A CN 202110572615 A CN202110572615 A CN 202110572615A CN 113252573 A CN113252573 A CN 113252573A
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Abstract
The invention discloses a photothermal spectroscopy trace gas detection device and method based on cavity enhancement.A low-frequency sawtooth wave generated by a signal generator and a high-frequency sine wave generated by a phase-locked amplifier are sent to an adder, and the superposed signals form a modulation signal of laser wavelength; the modulation signal is sent into a laser controller, the wavelength of laser output by the tunable semiconductor laser is changed through a temperature module and a current module, the laser enters a gas chamber of gas to be detected after passing through a laser collimation system, and the target gas to be detected absorbs part of laser energy; laser is focused to the root position of quartz tuning fork interdigital through focusing lens facula after the gas chamber that awaits measuring is emergent, because the thermal elastic deformation of light induced and piezoelectric effect, the vibration signal conversion who produces is the signal of telecommunication and inputs this signal of telecommunication into the lock-in amplifier and carries out harmonic signal collection, and harmonic data is input computer at last and is handled, the inversion gas concentration. The device has the advantages of high sensitivity, low cost, non-contact measurement and the like.
Description
Technical Field
The invention relates to a cavity-enhanced photo-thermal spectrum trace gas detection device and method.
Background
The quartz enhanced photothermal spectroscopy technology is a novel trace gas detection technology proposed by Mr. Mazuei et al in 2018, and a plurality of research units at home and abroad utilize the technology to realize non-contact gas measurement with high sensitivity, good selectivity, high response speed in recent years. This technique takes advantage of the light absorbing properties of quartz materials and converts the absorbed light energy into thermal energy. Due to the thermoelastic effect, the surface of the quartz tuning fork can generate mechanical deformation, and an electric signal can be detected by utilizing the piezoelectric effect of quartz, so that the gas concentration is inverted. Under the same gas concentration and experimental conditions, the noise value only fluctuates randomly within a certain small range, and the signal value becomes the determining factor of the signal-to-noise ratio and the minimum detection limit of the sensor. Therefore, enhancing the signal level of the photothermal spectroscopy system and further improving the signal-to-noise ratio of the system is an effective means for improving the detection performance of the photothermal spectroscopy sensor.
In the photo-thermal spectrum trace gas detection technology based on the quartz tuning fork, laser is irradiated on the interdigital root of the quartz tuning fork after being excited by a gas chamber to be detected, so that the tuning fork vibrates to generate a photo-thermal signal. In the photothermal spectroscopy technology, the magnitude of the photothermal signal is in direct proportion to the vibration amplitude of the tuning fork, so that the vibration amplitude of the tuning fork is enhanced, a higher signal amplitude value is obtained, and the performance of the gas sensor is improved. At present, a method for improving the intensity of photo-thermal signals by increasing the laser excitation power is an effective way for increasing the swing amplitude of the tuning fork. However, the laser power is too high, the thermal noise amplitude in the tuning fork can sharply rise, the signal-to-noise ratio of the sensing system is deteriorated, and the detection performance of the sensor is limited finally, so that the method has great limitation.
Disclosure of Invention
The invention provides a photo-thermal spectrum trace gas detection device and method based on cavity enhancement, which are developed by enhancing the signal intensity of a photo-thermal spectrum technology and inspired by a cavity enhanced photo-acoustic spectrum technology, and utilize the principle that a resonance tube can enable sound waves generated by tuning fork vibration to form standing wave fields to be enhanced and react on a quartz tuning fork to enhance the vibration amplitude and enhance the signal amplitude.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a light and heat spectrum trace gas detection device based on cavity reinforcing, includes tunable semiconductor laser, laser alignment system, the gas chamber that awaits measuring, focusing lens, quartz tuning fork, resonance tube, signal generator, laser controller, adder, lock-in amplifier, computer, wherein:
the two sections of resonance tubes are arranged on the front side and the rear side of the center of the interdigital of the quartz tuning fork;
the low-frequency sawtooth wave generated by the signal generator and the high-frequency sine wave generated by the phase-locked amplifier are sent to an adder, and the superposed signals form a modulation signal of laser wavelength;
the modulation signal is sent into a laser controller, the wavelength of laser output by the tunable semiconductor laser is changed through a temperature module and a current module, the laser is incident into a gas chamber of gas to be detected after passing through a laser collimation system, and the target gas to be detected absorbs part of laser energy;
laser is focused to the root position of quartz tuning fork interdigital through focusing lens facula after the gas chamber that awaits measuring is emergent, because the thermal elastic deformation of light induced and piezoelectric effect, the vibration signal conversion who produces is the signal of telecommunication and inputs this signal of telecommunication into the lock-in amplifier and carries out harmonic signal collection, and the harmonic data is input in the computer at last and is handled, the inversion gas concentration.
A method for detecting trace gas based on cavity-enhanced photothermal spectroscopy by using the device specifically comprises the following steps:
the method comprises the following steps: adjusting a light path sequentially passing through a tunable semiconductor laser, a laser collimation system, a gas chamber to be measured, a focusing lens and a quartz tuning fork, ensuring that the light path is straight in the horizontal and vertical directions, and reasonably selecting the inner diameter and the length of a resonance tube;
step two: the laser controller controls the output wavelength of the tunable semiconductor laser in a mode of changing temperature and current, and finds the temperature and the current of the corresponding detection gas absorption line;
step three: using a computer to control a phase-locked amplifier to scan the resonance frequency of the quartz tuning fork, setting half of the obtained resonance frequency as the frequency of a sine wave, and then scanning the modulation depth to obtain the optimal modulation depth;
step four: the position of the quartz tuning fork is adjusted in a three-dimensional mode, the laser is ensured to be incident on the root positions of two interdigital parts of the quartz tuning fork, and the relative positions of the two sections of resonance tubes and the quartz tuning fork are optimized to enable the experiment effect to be optimal;
step five: the temperature or the current is changed through the laser controller, so that the wavelength of the tunable semiconductor laser is adjusted to a proper range, the low-frequency sawtooth wave output by the signal generator acts on the tunable semiconductor laser, and a complete second harmonic signal is obtained through data processing of a computer and the phase-locked amplifier;
step six: the electric signal generated by the quartz tuning fork due to the piezoelectric effect is transmitted to the phase-locked amplifier, the second harmonic signal is obtained by processing the electric signal by the computer and the phase-locked amplifier, and the concentration information of the target gas can be inverted according to the peak value of the second harmonic signal.
Compared with the prior art, the invention has the following advantages:
1. the invention skillfully introduces the resonance tube sound wave enhancement principle in the quartz enhanced photoacoustic spectrometry technology into the quartz enhanced photothermal spectrometry technology, enhances the amplitude of photothermal signals and is beneficial to the improvement of system performance.
2. The detection device has the advantages of high sensitivity, low cost, non-contact measurement and the like.
Drawings
FIG. 1 is a block diagram of an apparatus for cavity-enhanced photothermal spectroscopy trace gas detection;
fig. 2 is a diagram showing a positional relationship between the quartz tuning fork and the resonance tube.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
The invention provides a cavity-enhanced photothermal spectroscopy trace gas detection device, which comprises a tunable semiconductor laser 1, a laser collimation system 2, a gas chamber 3 to be detected, a focusing lens 4, a quartz tuning fork 5, a resonance tube 6, a phase-locked amplifier 7, a signal generator 8, a laser controller 9, an adder 10 and a computer 11, wherein the cavity-enhanced photothermal spectroscopy trace gas detection device comprises:
the resonance tube 6 is provided with two sections, the two sections of resonance tubes 6 are arranged at the front side and the rear side of the center of the interdigital of the quartz tuning fork 5 and are used for enhancing a sound wave field, and the relative positions of the quartz tuning fork 5 and the resonance tube 6 can be adjusted;
the low-frequency sawtooth wave generated by the signal generator 8 and the high-frequency sine wave generated by the phase-locked amplifier 7 are sent to an adder 10, and the superposed signals form a modulation signal of laser wavelength;
the modulation signal is sent into a laser controller 9, the wavelength of the laser output by the tunable semiconductor laser 1 is changed through a temperature module and a current module, the laser passes through a laser collimation system 2 and then is incident into a gas chamber 3 to be measured, and the target gas to be measured absorbs part of the laser energy;
after the laser is emitted from the gas chamber 3 to be measured, light spots are focused to the root position of the interdigital of the quartz tuning fork 5 through the focusing lens 4, due to the photo-induced thermoelastic deformation and the piezoelectric effect, a generated vibration signal is converted into an electric signal through the quartz tuning fork 5, the electric signal is input into the phase-locked amplifier 7 for harmonic signal acquisition, and harmonic data are finally input into the computer 11 for subsequent processing and gas concentration inversion.
A method for detecting trace gas based on cavity-enhanced photothermal spectroscopy by using the device specifically comprises the following steps:
the method comprises the following steps: and adjusting the light path sequentially passing through the tunable semiconductor laser 1, the laser collimation system 2, the gas chamber to be measured 3, the focusing lens 4 and the quartz tuning fork 5, ensuring that the light path is straight in the horizontal and vertical directions, and reasonably selecting the inner diameter and the length of the resonance tube 6.
Step two: the laser controller 9 controls the output wavelength of the tunable semiconductor laser 1 by changing the temperature and current to find the temperature and current corresponding to the absorption line of the detection gas.
Step three: the computer 11 is used to operate the lock-in amplifier 7 to scan the resonance frequency of the quartz tuning fork 5, half of the obtained resonance frequency is set as the frequency of the sine wave, and then the modulation depth is scanned to obtain and set the optimal modulation depth.
Step four: the position of the quartz tuning fork 5 is adjusted in a three-dimensional mode, the laser is enabled to be incident on the root position of the interdigital of the quartz tuning fork 5, the amplitude of the obtained photothermal signal is maximum, and the relative positions of the two sections of resonance tubes 6 and the quartz tuning fork 5 are optimized to enable the experiment effect to be optimal.
Step five: the wavelength of the tunable semiconductor laser 1 is adjusted to a proper range by changing the temperature or the current through the laser controller 9, so that the low-frequency sawtooth wave output by the signal generator 8 acts on the tunable semiconductor laser 1, and a complete second harmonic signal can be obtained through data processing of the computer 11 and the phase-locked amplifier 7.
Step six: the electric signal generated by the quartz tuning fork 5 due to the piezoelectric effect is transmitted to the lock-in amplifier 7, and is processed by the computer 11 and the lock-in amplifier 7 to obtain a second harmonic signal, and the concentration information of the target gas can be inverted according to the peak value of the second harmonic signal.
In the invention, the tunable semiconductor laser 1 is a distributed feedback semiconductor laser of a near-infrared continuously tunable single longitudinal mode output or a tunable laser of other wave bands.
In the invention, in order to realize the sound wave enhancement effect of the resonance tube 6, the inner diameter and the length of the resonance tube 6 are reasonably selected within a certain range.
In the invention, in order to avoid the influence of the contact between the quartz tuning fork 5 and the resonant tube 6 on the vibration of the quartz tuning fork 5, a certain gap is reserved between the quartz tuning fork 5 and the resonant tube 6. When the thickness of the quartz tuning fork 5 is 0.32 mm, a gap of 0.5 mm can be reserved.
In the invention, the relative distance between the top of the quartz tuning fork 5 and the resonant tube 6 in height is not more than 2 mm.
In the invention, the quartz tuning fork 5 is arranged in the closed gas chamber, the gas pressure of the closed gas chamber is between 50 and 500 Torr, and the specific gas pressure value is determined according to the measured gas molecule relaxation time.
In the present invention, in order to make the quartz tuning fork 5 have a larger vibration amplitude, laser is irradiated on the root positions of the fingers of the quartz tuning fork 5 (as shown in fig. 2) to make the tuning fork generate a larger elastic deformation.
In the present invention, the equivalent impedance value of the quartz tuning fork 5 should be less than 200 k Ω, and the quality factor should be greater than 10000, so as to eliminate the electronic noise and improve the signal value as much as possible.
In the invention, the noise of the system is reduced by adopting the wavelength modulation and second harmonic demodulation technology, the output wavelength of the laser is modulated by the sine wave generated by the phase-locked amplifier 7, and the modulation frequency is equal to half of the resonance frequency of the quartz tuning fork 5.
In the invention, a computer 11 is connected with a phase-locked amplifier 7, and real-time control and signal acquisition processing are carried out through software.
In the present invention, the resonance tube 6 may be replaced with a cavity having other shapes to enhance the acoustic effect, for example: cylindrical cavities, circular cavities, elliptical cavities, etc.
Claims (10)
1. The utility model provides a light and heat spectrum trace gas detection device based on cavity reinforcing, its characterized in that the device includes tunable semiconductor laser, laser collimation system, the gas air chamber that awaits measuring, focusing lens, quartz tuning fork, resonance tube, signal generator, laser controller, adder, lock-in amplifier, computer, wherein:
the two sections of resonance tubes are arranged on the front side and the rear side of the center of the interdigital of the quartz tuning fork;
the low-frequency sawtooth wave generated by the signal generator and the high-frequency sine wave generated by the phase-locked amplifier are sent to an adder, and the superposed signals form a modulation signal of laser wavelength;
the modulation signal is sent into a laser controller, the wavelength of laser output by the tunable semiconductor laser is changed through a temperature module and a current module, the laser is incident into a gas chamber of gas to be detected after passing through a laser collimation system, and the target gas to be detected absorbs part of laser energy;
laser is focused to the root position of quartz tuning fork interdigital through focusing lens facula after the gas chamber that awaits measuring is emergent, because the thermal elastic deformation of light induced and piezoelectric effect, the vibration signal conversion who produces is the signal of telecommunication and inputs this signal of telecommunication into the lock-in amplifier and carries out harmonic signal collection, and the harmonic data is input in the computer at last and is handled, the inversion gas concentration.
2. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 1, wherein said tunable semiconductor laser is a distributed feedback semiconductor laser with a single longitudinal mode output that is continuously tunable in the near infrared or other wavelength band.
3. The device for detecting trace gas based on cavity-enhanced photothermal spectroscopy of claim 1, wherein a certain gap is reserved between the quartz tuning fork and the resonance tube.
4. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 3, wherein a gap of 0.5 mm is reserved between the quartz tuning fork and the resonance tube when the thickness of the quartz tuning fork is 0.32 mm.
5. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 1, wherein the relative distance in height between the quartz tuning fork top and the resonance tube is not more than 2 mm.
6. The device for detecting trace gas based on cavity-enhanced photothermal spectroscopy of claim 1, wherein the quartz tuning fork is in a sealed gas chamber, and the gas pressure of the sealed gas chamber is between 50 Torr and 500 Torr.
7. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 1, wherein the quartz tuning fork has an equivalent impedance value of less than 200 k Ω and a quality factor of greater than 10000.
8. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 1, wherein the sine wave generated by said lock-in amplifier modulates the laser output wavelength and the modulation frequency is equal to half of the resonant frequency of the quartz tuning fork.
9. The cavity-enhanced photothermal spectroscopy trace gas detection apparatus according to claim 1, wherein the resonance tube is replaced with a cylindrical cavity, a circular cavity, or an elliptical cavity.
10. A method for cavity-enhanced photothermal spectroscopy based trace gas detection using the device of any of claims 1-9, characterized in that it comprises the steps of:
the method comprises the following steps: adjusting a light path sequentially passing through a tunable semiconductor laser, a laser collimation system, a gas chamber to be measured, a focusing lens and a quartz tuning fork, ensuring that the light path is straight in the horizontal and vertical directions, and reasonably selecting the inner diameter and the length of a resonance tube;
step two: the laser controller controls the output wavelength of the tunable semiconductor laser in a mode of changing temperature and current, and finds the temperature and the current of the corresponding detection gas absorption line;
step three: using a computer to control a phase-locked amplifier to scan the resonance frequency of the quartz tuning fork, setting half of the obtained resonance frequency as the frequency of a sine wave, and then scanning the modulation depth to obtain the optimal modulation depth;
step four: the position of the quartz tuning fork is adjusted in a three-dimensional mode, the laser is ensured to be incident on the root positions of two interdigital parts of the quartz tuning fork, and the relative positions of the two sections of resonance tubes and the quartz tuning fork are optimized to enable the experiment effect to be optimal;
step five: the temperature or the current is changed through the laser controller, so that the wavelength of the tunable semiconductor laser is adjusted to a proper range, the low-frequency sawtooth wave output by the signal generator acts on the tunable semiconductor laser, and a complete second harmonic signal is obtained through data processing of a computer and the phase-locked amplifier;
step six: the electric signal generated by the quartz tuning fork due to the piezoelectric effect is transmitted to the phase-locked amplifier, the second harmonic signal is obtained by processing the electric signal by the computer and the phase-locked amplifier, and the concentration information of the target gas can be inverted according to the peak value of the second harmonic signal.
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Cited By (5)
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| CN113984675A (en) * | 2021-11-11 | 2022-01-28 | 哈尔滨工业大学 | Device and method for improving detection performance of quartz enhanced photoacoustic spectroscopy trace gas |
| CN114166797A (en) * | 2021-11-24 | 2022-03-11 | 安徽理工大学 | Gas concentration measuring system based on wavelength modulation spectrum technology |
| CN114563594A (en) * | 2022-02-24 | 2022-05-31 | 山东省科学院激光研究所 | Tuning fork demodulation gas flow velocity detection system and method |
| CN115326755A (en) * | 2022-09-14 | 2022-11-11 | 哈尔滨工业大学 | Photothermo-elastic spectrum trace gas detection device and method based on grating demodulation |
| CN115473119A (en) * | 2022-10-10 | 2022-12-13 | 湖南五凌电力科技有限公司 | Tunable semiconductor laser modulation circuit |
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| CN113984675B (en) * | 2021-11-11 | 2023-06-30 | 哈尔滨工业大学 | Device and method for improving detection performance of quartz-enhanced photoacoustic spectroscopy trace gas |
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| CN115326755B (en) * | 2022-09-14 | 2024-05-28 | 哈尔滨工业大学 | Photo-induced thermoelastic spectrum trace gas detection device and method based on grating demodulation |
| CN115473119A (en) * | 2022-10-10 | 2022-12-13 | 湖南五凌电力科技有限公司 | Tunable semiconductor laser modulation circuit |
| CN115473119B (en) * | 2022-10-10 | 2024-06-25 | 湖南五凌电力科技有限公司 | Tunable semiconductor laser modulation circuit |
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