CN113224970A - Miniaturized high-voltage pulse plasma driving circuit and driving method - Google Patents
Miniaturized high-voltage pulse plasma driving circuit and driving method Download PDFInfo
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- CN113224970A CN113224970A CN202110584181.7A CN202110584181A CN113224970A CN 113224970 A CN113224970 A CN 113224970A CN 202110584181 A CN202110584181 A CN 202110584181A CN 113224970 A CN113224970 A CN 113224970A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M11/00—Power conversion systems not covered by the preceding groups
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/10—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers
- H02H7/12—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers
- H02H7/122—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers for inverters, i.e. dc/ac converters
- H02H7/1227—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers for inverters, i.e. dc/ac converters responsive to abnormalities in the output circuit, e.g. short circuit
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/44—Circuits or arrangements for compensating for electromagnetic interference in converters or inverters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a miniaturized high-voltage pulse plasma driving circuit and a driving method, and relates to the technical field of driving circuits. The invention reduces the complexity of circuit calculation. Through the closed-loop control design, the high-voltage pulse signal output by the half-bridge high-voltage inverter circuit and the discharge of the dielectric barrier discharge module reach the optimal matching to obtain uniform plasma, and the energy loss caused by the mismatching of loads is avoided. The high-voltage pulse signals obtained due to the change of the capacitance value of the dielectric barrier discharge module are matched by adopting a resonance matching and stage boosting mode, so that the discharge area can reach more than 95%.
Description
Technical Field
The invention relates to the technical field of driving circuits, in particular to a miniaturized high-voltage pulse plasma driving circuit and a driving method.
Background
Dielectric Barrier Discharge (DBD) is a non-equilibrium gas Discharge with an insulating Dielectric inserted into the Discharge space, also called Dielectric Barrier corona Discharge or silent Discharge. The dielectric barrier discharge can work in a high air pressure and a wide frequency range, and the common working air pressure is 10-10000. The power supply frequency may be from 50Hz to 1 MHz. The dielectric barrier discharge can generate plasma at normal temperature. Currently, barrier discharge has been widely used in various industrial fields. The traditional dielectric barrier discharge power supply mode is an alternating-current high-frequency high-voltage power supply, but under the condition of a large load, the power supply is overlarge in size and low in efficiency, and the installation and debugging of household equipment cannot be realized.
In order to solve the problems, the application provides a miniaturized high-voltage pulse plasma driving circuit and a driving method, high-frequency high-voltage pulses are obtained through conversion and mutual adjustment among circuit modules, the frequency can reach 20KHZ, the maximum output voltage is 10KV, the output mode is a sine wave, a complete circuit protection system is formed, a circuit can be monitored in real time, and circuit protection can be performed on abnormal conditions in the circuit.
Disclosure of Invention
The invention aims to provide a miniaturized high-voltage pulse plasma driving circuit and a driving method, which can obtain high-frequency high-voltage pulses through conversion and mutual adjustment among circuit modules, monitor the circuit in real time and protect the circuit against abnormal conditions in the circuit.
The invention provides a miniaturized high-voltage pulse plasma driving circuit, comprising: a power supply;
the power supply is sequentially and electrically connected with the EMC filter circuit, the AC-DC conversion circuit, the half-bridge high-voltage inverter circuit and the dielectric barrier discharge module, and sequentially filters, rectifies, inverts the half-bridge high-voltage inverter, performs resonance matching and performs stage boosting on a power supply signal to realize plasma homogenization;
the output end of the AC-DC conversion circuit is also electrically connected with a PWM (pulse-width modulation) driving circuit and an auxiliary power supply module, the PWM driving circuit is used for providing a control signal for adjusting and driving the half-bridge high-voltage inverter circuit, and the auxiliary power supply module provides a stable power supply for the PWM driving circuit and the main control circuit;
the output end of the half-bridge high-voltage inverter circuit is electrically connected with the overcurrent and overvoltage protection circuit and the main control circuit, the overcurrent and overvoltage protection circuit is used for collecting a high-voltage pulse signal output by the half-bridge high-voltage inverter circuit, and transmits the processed data to the main control circuit, the auxiliary power supply module and the PWM driving circuit are both electrically connected with the main control circuit, the output end of the AC-DC conversion circuit is sequentially connected with the step boosting driving control module and the main control circuit, the main control circuit controls the output voltage of the AC-DC conversion circuit by controlling the step boosting drive control module, and adjusting the output voltage of the half-bridge high-voltage inverter circuit to be increased in a stepped manner, preheating the dielectric barrier discharge module through loop current, and gradually reducing the capacitive reactance of the dielectric barrier discharge module to enable the high-voltage pulse output voltage to be matched with the dielectric barrier discharge module to obtain uniform plasma.
Furthermore, the master control circuit is electrically connected with the communication module, and the communication module is connected with an upper computer for power supply debugging in a serial port mode.
Furthermore, the overcurrent and overvoltage protection circuit comprises a comparator and a peripheral resistor circuit, the overcurrent and overvoltage protection circuit inputs an overcurrent and overvoltage result into the main control circuit through control, and the main control circuit controls and turns off a relay switch of the AC-DC conversion circuit to perform circuit protection by counting overcurrent and overvoltage conditions.
Furthermore, the output end of the half-bridge high-voltage inverter circuit is provided with a temperature control switch for controlling the half-bridge high-voltage inverter circuit to stop outputting the high-voltage protection circuit at the overtemperature moment.
Further, a driving method using a miniaturized high-voltage pulse plasma driving circuit includes the steps of:
the power supply outputs a power supply signal to the EMC filter circuit for filtering, the filtered signal is input into the AC-DC conversion circuit, and the signal is rectified to obtain a corresponding direct current signal;
the half-bridge high-voltage inverter circuit receives the direct-current high-voltage electric signal, converts the direct-current electric signal into a high-voltage pulse signal under the drive of the PWM drive circuit, simultaneously the main control circuit controls the step boosting drive control module to enable the output voltage of the half-bridge high-voltage inverter circuit to be boosted in a step mode, and simultaneously the medium barrier discharge block is preheated through loop current, so that the capacitive reactance of the medium barrier discharge module is gradually reduced, and the high-voltage pulse output voltage and the medium barrier discharge module are optimally matched;
the overcurrent and overvoltage protection circuit collects voltage signals and current signals of output high-voltage pulse signals, the collected voltage signals and current signals are processed and then transmitted to the main control circuit, the main control circuit judges the received processed voltage signals, if the judgment times are larger than a preset value in a program, the judgment that the current is overcurrent or overvoltage abnormal is carried out, and the main control circuit outputs an OFF signal to shut OFF the high-voltage output of the AC-DC conversion circuit.
Furthermore, the main control circuit outputs an F _ ADJ signal to adjust the frequency of the PWM driving circuit according to the sampled current signal, and adjusts the high-voltage pulse output voltage and frequency of the half-bridge high-voltage inverter circuit in a resonance matching mode, so that the high-voltage pulse output voltage is matched with the dielectric barrier discharge module to obtain uniform plasma.
Compared with the prior art, the invention has the following remarkable advantages:
the invention provides a miniaturized high-voltage pulse plasma driving circuit and a driving method, wherein a high-voltage pulse signal of a half-bridge high-voltage inverter circuit and a dielectric barrier discharge module are optimally matched to obtain uniform plasma through closed-loop control design, and energy loss caused by mismatching of loads is avoided. The dielectric barrier discharge is driven by adopting a resonance matching and stage boosting mode, and the discharge area can reach more than 95%.
The invention provides a miniaturized high-voltage pulse plasma driving circuit and a driving method, wherein high-frequency high-voltage pulses are obtained in a resonance matching mode, a circuit is monitored in real time, abnormal conditions in the circuit are protected, a large capacitive load is driven by a small volume, uniform plasma is obtained in a resonance matching and stage boosting mode, and miniaturization, high efficiency, low cost and low power consumption are achieved. And a complex matching network circuit comprising a high-voltage resistor, a high-voltage capacitor and a high-voltage inductor is not needed, so that the complexity of circuit calculation is reduced.
Drawings
FIG. 1 is a block diagram of a driving circuit according to the present invention;
fig. 2 is a flowchart of the operation of the driving circuit according to the present invention.
Description of reference numerals: the power supply comprises a 1-EMC filter circuit, a 2-AC-DC conversion circuit, a 3-half-bridge high-voltage inverter circuit, a 4-dielectric barrier discharge module, a 5-PWM drive circuit, a 6-auxiliary power supply module, a 7-overcurrent and overvoltage protection circuit, an 8-main control circuit, a 9-communication module and a 10-step boosting drive control module.
Detailed Description
The technical solutions of the embodiments of the present invention are clearly and completely described below with reference to the drawings in the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
For easy understanding and explanation, as shown in fig. 1, the present invention provides a miniaturized high voltage pulse plasma driving circuit, comprising: a power supply;
the power supply is sequentially and electrically connected with the EMC filter circuit 1, the AC-DC conversion circuit 2, the half-bridge high-voltage inverter circuit 3 and the dielectric barrier discharge module 4, and sequentially filters, rectifies, performs half-bridge high-voltage inversion, performs resonance matching and performs stage boosting on a power supply signal to realize plasma homogenization;
the output end of the AC-DC conversion circuit 2 is also electrically connected with a PWM (pulse-width modulation) driving circuit 5 and an auxiliary power supply module 6, the PWM driving circuit 5 is used for providing a control signal for adjusting and driving the half-bridge high-voltage inverter circuit 3, and the auxiliary power supply module 6 provides a stable power supply for the PWM driving circuit 5 and the main control circuit 8;
the output end of the half-bridge high-voltage inverter circuit 3 is electrically connected with an overcurrent and overvoltage protection circuit 7 and a main control circuit 8, the overcurrent and overvoltage protection circuit 7 is used for collecting high-voltage pulse signals output by the half-bridge high-voltage inverter circuit 3 and transmitting the high-voltage pulse signals to the main control circuit 8 after processing, the auxiliary power supply module 6 and the PWM drive circuit 5 are electrically connected with the main control circuit 8, the output end of the AC-DC conversion circuit 2 is sequentially connected with a step boosting drive control module 10 and the main control circuit 8, the main control circuit 8 controls the output voltage of the AC-DC conversion circuit 2 by controlling the step boosting drive control module 10, so that the output voltage of the half-bridge high-voltage inverter circuit 3 is regulated to be increased in a step manner, the dielectric barrier discharge module 4 is preheated by loop current, and the capacitive reactance of the dielectric barrier discharge module 4 is gradually reduced, the high-voltage pulse output voltage is optimally matched with the dielectric barrier discharge module 4 to obtain uniform plasma.
The master control circuit 8 is electrically connected with the communication module 9, the communication module 9 is connected with an upper computer for power supply debugging through a serial port mode, and the upper computer modifies and debugs the high-voltage pulse output voltage through an agreed communication protocol, so that the power supply debugging and the setting of each parameter in the circuit are facilitated.
The overcurrent and overvoltage protection circuit 7 internally comprises a comparator and a peripheral resistor circuit, analog-to-digital conversion is carried out on collected voltage signals and current signals, the voltage signals and the current signals are transmitted to the main control circuit 8, the overcurrent and overvoltage protection circuit 7 inputs overcurrent and overvoltage results into the main control circuit 8, and the main control circuit 8 counts the overcurrent and overvoltage conditions to control and turn off a relay switch of the AC-DC conversion circuit 2 to carry out circuit protection.
The output end of the half-bridge high-voltage inverter circuit 3 is provided with a temperature control switch for controlling the half-bridge high-voltage inverter circuit 3 to stop outputting the high-voltage protection circuit at the overtemperature moment.
The invention provides a miniaturized high-voltage pulse plasma driving circuit, which is designed by closed-loop control: the half-bridge high-voltage inverter circuit 3-the main control circuit 8-the PWM drive circuit 5-the half-bridge high-voltage inverter circuit 3-the dielectric barrier discharge module 4 discharges, so that the high-voltage pulse signal of the half-bridge high-voltage inverter circuit 3 and the dielectric barrier discharge module 4 discharge to achieve the best matching to obtain uniform plasma, and energy loss caused by mismatching of loads is avoided. The miniaturized high-voltage pulse plasma driving circuit drives dielectric barrier discharge in a mode of resonant matching and stage boosting, and the discharge area can reach more than 95%.
Example 1
As shown in fig. 2, a driving method of a miniaturized high voltage pulsed plasma driving circuit includes the following steps:
the power supply outputs a power supply signal to the EMC filter circuit 1 for filtering, the filtered signal is input to the AC-DC conversion circuit 2, and the signal is rectified to obtain a corresponding direct current signal;
the half-bridge high-voltage inverter circuit 3 receives the direct-current high-voltage electric signal, converts the direct-current electric signal into a high-voltage pulse signal under the drive of the PWM drive circuit 5, meanwhile, the main control circuit 8 controls the step boosting drive control module 10 to enable the output voltage of the half-bridge high-voltage inverter circuit 3 to be increased in a step mode, meanwhile, the dielectric barrier discharge block 4 is preheated through loop current, the capacitive reactance of the dielectric barrier discharge module 4 is gradually reduced, and the high-voltage pulse output voltage and the dielectric barrier discharge module 4 are optimally matched;
the overcurrent and overvoltage protection circuit 7 collects voltage signals and current signals of output high-voltage pulse signals, the collected voltage signals and current signals are processed and then transmitted to the main control circuit 8, the main control circuit 8 judges the received processed voltage signals, if the judgment times are larger than preset values in a program, the judgment result shows that the current is overcurrent or overvoltage abnormal, and the main control circuit 8 outputs an OFF signal to turn OFF the high-voltage output of the AC-DC conversion circuit 2.
The main control circuit 8 outputs an F _ ADJ signal to adjust the frequency of the PWM driving circuit 5 according to the sampled current signal, and adjusts the high-voltage pulse output voltage of the half-bridge high-voltage inverter circuit 3 in a resonant matching manner, so that the high-voltage pulse output voltage is matched with the dielectric barrier discharge module 4 to obtain uniform plasma.
The above disclosure is only for a few specific embodiments of the present invention, however, the present invention is not limited to the above embodiments, and any variations that can be made by those skilled in the art are intended to fall within the scope of the present invention.
Claims (6)
1. A miniaturized high voltage pulsed plasma driver circuit, comprising: a power supply;
the power supply is sequentially and electrically connected with the EMC filter circuit (1), the AC-DC conversion circuit (2), the half-bridge high-voltage inverter circuit (3) and the dielectric barrier discharge module (4), and sequentially filters, rectifies, inverts the half-bridge high voltage, performs resonance matching and boosts stage by stage on a power supply signal to realize plasma homogenization;
the output end of the AC-DC conversion circuit (2) is also electrically connected with a PWM (pulse-width modulation) driving circuit (5) and an auxiliary power supply module (6), the PWM driving circuit (5) is used for providing a control signal for adjusting and driving the half-bridge high-voltage inverter circuit (3), and the auxiliary power supply module (6) provides a stable power supply for the PWM driving circuit (5) and the main control circuit (8);
the output end of the half-bridge high-voltage inverter circuit (3) is electrically connected with an overcurrent and overvoltage protection circuit (7) and a main control circuit (8), the overcurrent and overvoltage protection circuit (7) is used for collecting high-voltage pulse signals output by the half-bridge high-voltage inverter circuit (3) and transmitting the high-voltage pulse signals to the main control circuit (8) after processing, the auxiliary power supply module (6) and the PWM driving circuit (5) are electrically connected with the main control circuit (8), the output end of the AC-DC conversion circuit (2) is sequentially connected with a step boosting driving control module (10) and the main control circuit (8), the main control circuit (8) controls the output voltage of the AC-DC conversion circuit (2) by controlling the step boosting driving control module (10), so that the output voltage of the half-bridge high-voltage inverter circuit (3) is adjusted to be stepped and the dielectric barrier discharge module (4) is preheated by loop current, and gradually reducing the capacitive reactance of the dielectric barrier discharge module (4) to enable the high-voltage pulse output voltage to be matched with the dielectric barrier discharge module (4) to obtain uniform plasma.
2. The miniaturized high-voltage pulse plasma driving circuit according to claim 1, wherein the main control circuit (8) is electrically connected with a communication module (9), and the communication module (9) is connected with an upper computer for power debugging in a serial port mode.
3. The miniaturized high-voltage pulse plasma driving circuit as claimed in claim 1, wherein the over-current over-voltage protection circuit (7) comprises a comparator and a peripheral resistor circuit, the over-current over-voltage protection circuit (7) inputs the over-current over-voltage result to the main control circuit (8), and the main control circuit (8) controls to turn off a relay switch of the AC-DC conversion circuit (2) for circuit protection by counting the over-current over-voltage conditions.
4. A miniaturized hppd driving circuit as claimed in claim 1, characterized in that a thermostat is provided at the output of said half-bridge hppd (3) for controlling said half-bridge hppd (3) to stop outputting the hppd protection circuit at the time of overtemperature.
5. The driving method of a miniaturized high voltage pulsed plasma driving circuit according to claim 1, comprising the steps of:
the power supply outputs a power supply signal to the EMC filter circuit (1) for filtering, the filtered signal is input to the AC-DC conversion circuit (2), and the signal is rectified to obtain a corresponding direct current signal;
the half-bridge high-voltage inverter circuit (3) receives the direct-current high-voltage electric signal, converts the direct-current electric signal into a high-voltage pulse signal under the drive of the PWM drive circuit (5), simultaneously the main control circuit (8) controls the step boosting drive control module (10) to enable the output voltage of the half-bridge high-voltage inverter circuit (3) to be increased in a step mode, simultaneously the dielectric barrier discharge block (4) is preheated through loop current, the capacitive reactance of the dielectric barrier discharge module (4) is gradually reduced, and the high-voltage pulse output voltage and the dielectric barrier discharge module (4) are optimally matched;
the overcurrent and overvoltage protection circuit (7) collects voltage signals and current signals of output high-voltage pulse signals, the collected voltage signals and current signals are processed and then transmitted to the main control circuit (8), the main control circuit (8) judges the received processed voltage signals, if the judgment times are larger than preset values in a program, the judgment is that overcurrent or overvoltage is abnormal, and the main control circuit (8) outputs an OFF signal to shut OFF the high-voltage output of the AC-DC conversion circuit (2).
6. The driving method of a miniaturized high voltage pulse plasma driving circuit as claimed in claim 5, wherein the main control circuit (8) outputs F _ ADJ signal to adjust the frequency of the PWM driving circuit (5) according to the sampled current signal, and adjusts the high voltage pulse output voltage and frequency of the half-bridge high voltage inverter circuit (3) by means of resonance matching, so that the high voltage pulse output voltage is matched with the dielectric barrier discharge module (4) to obtain uniform plasma.
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Cited By (1)
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CN114244079A (en) * | 2021-12-23 | 2022-03-25 | 西安空天紫电等离子体技术有限公司 | High-voltage pulse plasma driving circuit and driving method |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114244079A (en) * | 2021-12-23 | 2022-03-25 | 西安空天紫电等离子体技术有限公司 | High-voltage pulse plasma driving circuit and driving method |
CN114244079B (en) * | 2021-12-23 | 2023-12-12 | 西安空天紫电等离子体技术有限公司 | High-voltage pulse plasma driving circuit and driving method |
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