CN113213420A - Microarray structure patterning device - Google Patents
Microarray structure patterning device Download PDFInfo
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- CN113213420A CN113213420A CN202010682179.9A CN202010682179A CN113213420A CN 113213420 A CN113213420 A CN 113213420A CN 202010682179 A CN202010682179 A CN 202010682179A CN 113213420 A CN113213420 A CN 113213420A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
Abstract
The invention provides a device for patterning a microarray structure, which overcomes the defect of high cost of equipment and instruments for manufacturing micron-level array patterns in the prior art, and comprises a condensing box and a connecting pipeline; the condensing box comprises a second cavity, a second temperature control component and a second monitoring component which are arranged on the second cavity, a substrate arranged in the second cavity, a resin injection channel which penetrates through the second cavity and extends to the upper part of the substrate, and a refrigerating structure which is used for cooling liquid microbeads condensed on the substrate into a solid state; the connecting pipeline is used for introducing gaseous medium into the second cavity. The device has the advantages of simple structure, low cost and the like.
Description
Technical Field
The invention relates to the technical field of micromachining, in particular to a micromachining device.
Background
To produce array patterns, especially on the micrometer scale, photolithography is commonly used. Although photolithography can produce array patterns of various sizes, it requires a whole set of specialized equipment and instruments, which are expensive, and the fabrication process of array patterns using the equipment and instruments is complicated and tedious, time-consuming and expensive; in addition, the photolithography requires a template to be prepared first, and the pattern of the template can be obtained by reducing the template through repeated processes, which is complicated. Also, other methods require higher equipment and equipment costs to produce micron-scale array patterns.
Therefore, when the micron-scale array pattern is manufactured by using the existing equipment and apparatus disclosed in the prior art, the problems of high cost of the manufacturing equipment and apparatus, complex manufacturing process and the like exist.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defect of high cost of the apparatus and equipment for manufacturing the micro-scale array pattern disclosed in the prior art, thereby providing a patterning device for the micro-array structure with simple structure and low cost.
An apparatus for patterning a microarray structure, comprising:
the condensation box comprises a second cavity, a second temperature control component and a second monitoring assembly which are arranged on the second cavity, a substrate arranged in the second cavity, a resin injection channel which penetrates through the second cavity and extends to the upper part of the substrate, and a refrigeration structure which is used for cooling the liquid microbeads condensed on the substrate into a solid state;
and the connecting pipeline is communicated with the second cavity and is used for providing a gaseous medium introduction interface for the second cavity.
And a connecting valve is arranged on the connecting pipeline. And the second cavity is also provided with a pressure regulating hole with a valve. The second monitoring assembly comprises a humidity detection structure, a temperature detection structure and a pressure detection structure.
The invention also comprises an evaporation box communicated with the connecting pipeline; the evaporation box comprises a first cavity for containing a medium and a first temperature control component for heating the medium in the first cavity.
Furthermore, a liquid injection hole with a valve is arranged on the first cavity.
Further, a first monitoring assembly is arranged on the first cavity; the first monitoring assembly includes a temperature detection structure and a pressure detection structure.
The substrate is made of silicon, silicon dioxide, mica, glass or graphite; the medium is a liquid medium which has a low boiling point and is easy to evaporate, such as water or dioxane.
The surface layer of the substrate is also provided with a contact angle regulation and control film, or the substrate is treated by adopting a chemical solvent to realize the regulation and control of the contact angle; the treatment is by placing the substrate directly into a chemical solvent for immersion, including but not limited to hydrogen peroxide, sodium hydroxide, potassium hydroxide, hydrofluoric acid, hydrochloric acid, sulfuric acid, nitric acid.
And the second cavity is also provided with a transparent observation window or/and a monitoring equipment mounting hole.
And the monitoring equipment mounting hole is provided with a fiber probe.
The refrigerating structure is a semiconductor refrigerating sheet and is arranged below the substrate.
The technical scheme of the invention has the following advantages:
1. the invention provides a device for patterning a microarray structure, which mainly comprises a condensation box and a connecting pipeline for providing a gas medium introduction interface for the condensation box, wherein the gas medium can be introduced into a second cavity only by connecting the connecting pipeline with external gas medium providing equipment, the condensation molding of microbeads with specific sizes on a substrate in the second cavity is realized by controlling the temperature, the pressure and the humidity of the second cavity, then the condensed liquid microbeads are cooled into a solid state by a refrigeration structure to realize the molding of a microbead array pattern, finally, resin is injected onto the substrate through a resin injection channel, a patterned microarray structure can be formed on the resin after the resin is cured, and the medium on the resin is removed by heating and cleaning; the device has the advantages of relatively simple integral structure, low manufacturing cost and simple and convenient operation; therefore, the invention provides a novel device which has lower cost and simpler and more convenient operation and can effectively realize the patterning of the microarray structure.
2. The device can adopt the existing gas medium supply equipment to directly supply gas for the device, and can also design the gas medium supply equipment by self. In order to ensure the controllability of the sizes of the microbeads, the invention provides an evaporation box capable of providing a gaseous medium for a condensation box, wherein the evaporation box comprises a first cavity for containing the medium and a first temperature control part for heating the medium in the first cavity; the first cavity and the second cavity are communicated through the connecting pipeline, the liquid medium contained in the first cavity is converted into a gaseous state through the first temperature control component, then the gaseous medium in the first cavity is guided into the second cavity through the connecting pipeline, and then the forming of follow-up microbeads of the second cavity can be realized.
3. In order to better control the patterning of the microbead microarray structure, the invention additionally arranges a contact angle regulation and control film on the surface layer of the substrate, the contact angle regulation and control film preferably adopts monomolecular films such as HMDS (hexamethyldisiloxane), APTMS (3-aminopropyltrimethoxysilane), APTES (3-aminopropyltriethoxysilane), HMMA (hexamethoxymethyl melamine) and the like, or gold is plated on the surface of the substrate, for example, gold is plated on the surface of a silicon wafer, then the monomolecular films such as alkyl mercaptan and the like are used for modification, the contact angle between the liquid microbead and the substrate can be effectively regulated and controlled through the contact angle regulation and control film, the formation of the microbead microarray structure is better realized, and the size of the microbead is better regulated and controlled.
4. The second cavity is also provided with a transparent observation window or an optical fiber probe extending into the second cavity, so that the shape, size and formed array pattern of the formed microbeads can be effectively observed in real time, and the operation is more controllable.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of the condensation tank of the present invention;
description of reference numerals:
1-an evaporation tank, 2-a condensation tank and 3-a connecting pipeline;
11-a first cavity, 12-a first temperature control component, 13-a first monitoring component, 14-a liquid injection hole;
21-a second cavity, 22-a second temperature control component, 23-a second monitoring component, 24-a substrate, 25-a resin injection channel, 26-a refrigeration structure, 27-a transparent observation window, 28-a fiber-optic probe and 29-a pressure regulating hole.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Examples
An apparatus for patterning a microarray structure, as shown in fig. 1 and 2, includes a condensation tank 2 and a connection line 3. Wherein, the condensation case 2 includes: the device comprises a second cavity 21, a second temperature control component 22 and a second monitoring component 23 which are arranged on the second cavity 21, a substrate 24 which is arranged in the second cavity 21, and a resin injection channel 25 which penetrates through the second cavity 21 and extends to the position above the substrate 24, wherein the resin injection channel is used for cooling liquid microbeads condensed on the substrate 24 into a solid refrigeration structure 26. And a connecting pipeline 3 for communicating with an external gas medium supply device so as to introduce the gaseous medium in the gas medium supply device into the second cavity 21.
The device mainly comprises a condensation box and a connecting pipeline for providing a gas medium introduction interface for the condensation box, wherein a gas medium can be introduced into a second cavity only by connecting the connecting pipeline with an external gas medium providing device, the condensation molding of microbeads with specific sizes on a substrate in the second cavity is realized by controlling the temperature, pressure and humidity of the second cavity, then the condensed liquid microbeads are cooled into a solid state through a refrigeration structure, the molding of a microbead array pattern is realized, finally, resin is injected onto the substrate through a resin injection channel, a patterned microarray structure can be formed on the resin after the resin is cured, and the medium on the resin is removed through heating and cleaning; the device has simple integral structure, low cost and very simple operation; therefore, the invention provides a novel device which has lower cost and simpler and more convenient operation and can effectively realize the patterning of the microarray structure.
The device can directly provide the gas medium for the device by adopting the existing gas medium providing equipment, and can also design the gas medium providing equipment by self. The invention provides a self-designed evaporation box 1 as a gas medium supply device, wherein the evaporation box 1 comprises a first cavity 11 for containing a medium, and a first temperature control component 12 for heating the medium in the first cavity 11 to change the medium into a gas state. The medium used in the present invention may be any inert medium which is nonflammable and has good thermal stability, and is more preferably a liquid medium which has a low boiling point and is easily evaporated, and the medium having good thermal stability means a medium which does not thermally decompose within the designed operating temperature range, and in the present invention, water, silicone oil, or dioxane is preferable.
In order to facilitate timely regulation and control of the medium condition in the evaporation box 1, the first cavity 11 is provided with a liquid injection hole 14 with a valve, and when the medium content in the first cavity 11 is insufficient, the medium can be replenished to the cavity through the liquid injection hole 14. The first cavity 11 is also provided with a first monitoring component 13; the first monitoring assembly 13 includes a temperature detection structure and a pressure detection structure. The temperature and the pressure in the evaporation box 1 are monitored in time through the temperature detection structure and the pressure detection structure.
In the present invention, the second temperature control component 22 and the first temperature control component 12 are both temperature control bases, which are disposed below the corresponding cavity, that is, the temperature control bases are heating devices disposed below the corresponding cavity and used for heating the cavity, as shown in fig. 1 and fig. 2.
In order to control the size of the microbeads more accurately, the two cavities can be completely and independently opened through the connecting valve arranged on the connecting pipeline 3, so that the independent control of the temperature, the humidity and the pressure in the second cavity is effectively realized, and the more accurate control of the size of the microbeads can be realized. The method specifically comprises the following steps: set up the connecting valve on connecting line 3, set up the second monitoring subassembly 23 including humidity detection structure, temperature detection structure and pressure detection structure simultaneously on second cavity 21 to the pressure regulating hole 29 of taking the valve that sets up on second cavity 21. According to the invention, the quantity of the medium introduced into the second cavity 21 is controlled through the connecting valve arranged on the connecting pipeline 3, so that the humidity in the second cavity 21 can be effectively regulated and controlled; the pressure in the second cavity 21 can be effectively adjusted through the pressure adjusting hole 29 with a valve arranged on the second cavity 21; the temperature in the second cavity 21 can be timely adjusted by the second temperature control part 22. Therefore, the invention can timely adjust the temperature, humidity and pressure introduced into the second temperature control part 22 by the matching of the connecting valve, the pressure adjusting hole 29 and the second temperature control part 22, thereby realizing the accurate control of the size of the micro-bead.
In order to visually understand the formation of the micro-bead, the second cavity 21 is further provided with a transparent observation window 27 or/and a monitoring device mounting hole. The transparent observation window 27 can be arranged on the side surface of the second cavity 21 shown in fig. 1, and can also be arranged on the top surface of the second cavity 21; when the second cavity 21 is provided with the monitoring device mounting hole, a detection device, such as an optical fiber probe 28, capable of seeing the condition of the microbeads in the second cavity 21 is mounted on the monitoring device mounting hole, and the molding condition of the microbeads on the substrate 24 can be more visually seen through the arrangement of the device.
The substrate material is further limited in the present invention in order to form beads with ordered microarray structure on the substrate surface, and the substrate 24 material in the present invention is preferably silicon, silicon dioxide, mica or graphite; as long as the surface of the substrate prepared from the adopted material is smooth and the roughness is smaller than the size of the microspheres, the preparation requirement of the microspheres with corresponding sizes can be met through the arrangement.
In order to enable the forming of the microbeads to be more uniform and better regulate and control the contact angle between the medium and the substrate and ensure that the contact angle of the microbeads on the substrate reaches 30-150 degrees, a contact angle regulating and controlling film is further arranged on the surface layer of the substrate 24; the contact angle regulation and control film can better ensure the consistency of the surface properties of the substrate 24 and is convenient for the regulation and control of the contact angle. In the present invention, any material that can be used to control the contact angle between the medium and the substrate may be used for surface modification of the substrate 24, and a contact angle control film may be formed on the surface of the substrate 24, but the material of the contact angle control film in this embodiment is preferably a monomolecular film such as HMDS (hexamethyldisiloxane), APTMS (3-aminopropyltrimethoxysilane), APTES (3-aminopropyltriethoxysilane), HMMA (hexamethoxymethylmelamine), or gold-plated on the surface of the substrate, for example, gold-plated on the surface of a silicon wafer, and then modified with a monomolecular film such as alkylthiol. Among them, alkyl mercaptans include, but are not limited to, octadecyl mercaptan.
The invention aims to ensure that the contact angle of the micro-beads on the substrate reaches 30-150 degrees; the substrate can also be treated by adopting a chemical solvent, so that the regulation and control of the contact angle can be realized. For example: the substrate is soaked by adopting a chemical solvent of hydrogen peroxide or sodium hydroxide solution, and the contact angle of the treated substrate can be regulated and controlled.
To better enable more rapid solidification of the liquid microbeads, the cooling structure 26 is preferably a semiconductor cooling plate disposed below the substrate 24. More preferably, refrigeration structure 26 is the peltier semiconductor refrigeration piece, and inside the refrigeration face of this peltier semiconductor refrigeration piece was towards condensing box 2, the cooling surface setting was on the tank wall of condensing box, and the power supply line was followed the condensing box and is inserted, and the basement setting was on the refrigeration face, selected the power of peltier semiconductor refrigeration piece according to the basement size, can realize the quick refrigeration of basement after the circular telegram.
The specific process of patterning a microarray structure using the apparatus of the present invention described above:
firstly, a medium, which is water, silicon oil or dioxane in this embodiment, is supplemented into the first cavity 11 of the evaporation box 1, and the medium is heated by the first temperature control component 12 to be converted into a gaseous state, so that the temperature of the gaseous medium in the first cavity 11 reaches 290K-400K, and the pressure reaches 100kPa-200 kPa.
Secondly, introducing a gas medium into the condensing box 2 through the connecting pipeline 3, controlling the humidity in the condensing box 2 to reach 20% -80%, adjusting the temperature in the second cavity 21 to 280-360K and the pressure to 90-150kPa, so that the medium begins to condense on the surface of the substrate 24, adjusting the temperature of the substrate to 220-350K, and observing the size of the microbeads when the size of the microbeads reaches the size in a specific range after a system in the second cavity 21 slowly reaches dynamic balance, and further forming the microbeads with specific size by adjusting the temperature, the pressure and the humidity in the second cavity 21.
The refrigeration structure 26 is then activated to flash cool and solidify the condensed microbeads to obtain solid microbeads, i.e., a microarray of solid microbeads is formed on the substrate 24.
Finally, resin is slowly injected or sprayed through the resin injection channel 25 to be attached to the surface of the solid bead, the resin is maintained for a certain time to be leveled, so that the microarray formed by condensation on the surface of the substrate is completely covered, and then the resin is cured to form a stable structure. The resin is a thermosetting or photocurable resin.
The stable structure is subjected to medium separation and cleaning to obtain a patterned microarray structure.
The invention takes water as an example, the material of the substrate is silicon dioxide, the surface is provided with a HMDS monomolecular film layer, the surface roughness is 0.1 μm, at the moment, the contact angle of the microbeads on the substrate is 65 degrees, and the process of generating the microarray structure of the microbeads with the size of 1 μm by adopting the device of the invention is as follows:
controlling the temperature in the first cavity 11 to be 350K and the pressure to be 100kPa, opening a connecting valve of the first cavity 11 and the second cavity 21, and also opening a pressure regulating valve of the second cavity 21, namely a valve on a pressure regulating hole 29, so that water vapor slowly enters the second cavity 21, controlling the temperature in the second cavity 21 to be 320K and the pressure to be 100kPa, controlling the substrate temperature to be 290K-320K, and beginning to condense the water vapor on the substrate surface, when the system slowly reaches dynamic balance, observing the size of the microbeads, if the size of the microbeads is overlarge, closing the connecting valve communicated with the first cavity 11, opening the pressure regulating valve on the second cavity 21, and gradually reducing the size of the microbeads to 1 mu m; if the size of the bead is too small, the connection valve communicating with the first chamber 11 is opened, and the pressure regulating valve on the second chamber 21 is closed, at which time the size of the bead is gradually increased to increase the size of the bead to 1 μm. When the size of the micro-beads reaches 1 mu m, the connecting valve on the connecting pipeline 3 and the pressure regulating valve on the second cavity 21 are closed, at the moment, the Peltier semiconductor refrigerating sheet is started, and the substrate is cooled at the extreme speed, so that the liquid micro-beads are solidified. And slowly injecting light-cured resin with proper temperature and viscosity, wherein the light-cured resin with the viscosity of 6000mPa.s is adopted in the embodiment, the temperature is 300K, the light-cured resin is attached to the surface of the solid bead and is maintained for 15 minutes, and ultraviolet light can be started to cure the resin after the surface of the light-cured resin is leveled, so that a stable structure is formed. Finally, the system is simply returned to normal temperature, the second cavity 21 is opened, and the photo-cured stable structure is taken out, and at this time, the resin layer in the stable structure is separated from the medium, so that the separation surface has a circular hole array structure with the size of about 1 μm.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. An apparatus for patterning a microarray structure, comprising:
the condensation box (2) comprises a second cavity (21), a second temperature control component (22) and a second monitoring component (23) which are arranged on the second cavity (21), a substrate (24) which is arranged in the second cavity (21), a resin injection channel (25) which penetrates through the second cavity (21) and extends to the position above the substrate (24), and a refrigeration structure (26) which is used for cooling liquid microbeads condensed on the substrate (24) into a solid state;
and the connecting pipeline (3) is communicated with the second cavity (21) and is used for providing a gaseous medium introduction interface for the second cavity (21).
2. The apparatus according to claim 1, wherein the connecting line (3) is provided with a connecting valve; the second cavity (21) is also provided with a pressure regulating hole (29) with a valve; the second monitoring assembly (23) comprises a humidity detection structure, a temperature detection structure and a pressure detection structure.
3. The apparatus of claim 1 or 2, further comprising an evaporation tank (1) in communication with the connecting line (3); the evaporation box (1) comprises a first cavity (11) for containing a medium and a first temperature control component (12) for heating the medium in the first cavity (11).
4. The device for patterning a microarray structure according to claim 3, wherein the first chamber (11) is provided with a valved liquid injection hole (14).
5. The device for patterning a microarray structure according to claim 3 or 4, wherein the first chamber (11) is further provided with a first monitoring assembly (13); the first monitoring assembly (13) comprises a temperature detection structure and a pressure detection structure.
6. The device for patterning a microarray structure according to any one of claims 1 to 5, wherein the substrate (24) is made of silicon, silica, mica, glass or graphite.
7. The device for patterning a microarray structure according to claim 6, wherein the surface layer of the substrate (24) is further provided with a contact angle-regulating film.
8. The apparatus for patterning a microarray structure according to any of claims 1 to 7, wherein the second chamber (21) is further provided with a transparent viewing window (27) or/and a monitoring device mounting hole.
9. An apparatus for patterning a microarray structure according to claim 8, wherein the monitoring device mounting holes have fibre-optic probes (28) mounted thereon.
10. The device for patterning a microarray structure according to any of claims 1 to 9, wherein the cooling structure (26) is a semiconductor cooling plate, which is disposed under the substrate (24).
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| CN202010682179.9A CN113213420A (en) | 2020-07-15 | 2020-07-15 | Microarray structure patterning device |
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| CN202010682179.9A CN113213420A (en) | 2020-07-15 | 2020-07-15 | Microarray structure patterning device |
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| CN101146595A (en) * | 2005-01-28 | 2008-03-19 | 杜克大学 | Apparatuses and methods for manipulating droplets on a printed circuit board |
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