CN113209655B - Liquid ammonia evaporation deoiling impurity removing device for electronic grade ammonia water production - Google Patents
Liquid ammonia evaporation deoiling impurity removing device for electronic grade ammonia water production Download PDFInfo
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- CN113209655B CN113209655B CN202110782108.0A CN202110782108A CN113209655B CN 113209655 B CN113209655 B CN 113209655B CN 202110782108 A CN202110782108 A CN 202110782108A CN 113209655 B CN113209655 B CN 113209655B
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- liquid ammonia
- tank body
- pipe
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 238000001704 evaporation Methods 0.000 title claims abstract description 31
- 230000008020 evaporation Effects 0.000 title claims abstract description 29
- 239000012535 impurity Substances 0.000 title claims abstract description 27
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 235000011114 ammonium hydroxide Nutrition 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 31
- 238000009826 distribution Methods 0.000 claims description 139
- 238000005192 partition Methods 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 9
- 238000012824 chemical production Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 10
- 239000003921 oil Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The invention discloses a liquid ammonia evaporation deoiling and impurity removing device for electronic-grade ammonia water production, and belongs to the technical field of electronic-grade chemical production. The device sets up the blast pipe on the last closing cap at jar body top, sets up the fluid-discharge tube on the lower closing cap of jar body bottom to set up a plurality of heat exchange tubes that are used for the evaporation at jar internal portion, internal being located heat exchange tube top and inlet pipe below department of jar is equipped with the distributor that can evenly distribute liquid ammonia and can evenly channel into in the heat exchange tube with liquid ammonia. The device can utilize the heat exchange tube to carry out low-temperature evaporation on the liquid ammonia and simultaneously remove moisture and low-boiling-point oil, can carry out continuous evaporation production without stopping, and improves the production effect; and the distributor of the device has overflow weir effect and flow guide effect, can form uniform liquid film on the inner wall of the heat exchange tube, improves the evaporation efficiency, and greatly reduces the local scale deposition phenomenon on the inner wall of the heat exchange tube.
Description
Technical Field
The invention relates to a device for producing electronic-grade ammonia water, in particular to a device for evaporating, deoiling and removing impurities from liquid ammonia for producing electronic-grade ammonia water, and belongs to the technical field of production of electronic-grade chemicals.
Background
In the semiconductor industry, the electrical resistivity of a pure semiconductor product is greatly changed by doping a trace amount of impurity elements into the product. Thus, the semiconductor industry has very high demands on the purity of the chemical materials used therein, and typically uses electronic grade chemicals.
Electronic-grade ammonia water is one of eight electronic-grade chemical materials commonly used in the semiconductor industry, the consumption of the electronic-grade ammonia water is the third in the electronic product industry, and the electronic-grade ammonia water is mainly used for diffusion, corrosion, cleaning and other processes of silicon wafers. The purity and cleanliness of electronic grade chemicals used in chip processing have a significant impact on the yield, electrical performance and reliability of integrated circuits. The method can activate the surfaces of silicon wafers and particles by utilizing the alkalescence of ammonia water, and can remove surface particles and partial metal impurities. Therefore, the electronic grade ammonia water is widely applied to the chip cleaning and etching processes.
The production process of the electronic grade ammonia water mainly comprises an intermittent rectification method, a membrane filtration absorption method, a resin filtration method and the like. The above-mentioned production processes are diversified, but most of them include evaporation, purification, and absorption processes, in which liquid ammonia is pressure-fed from a raw material tank into an evaporator by a compressor, and evaporated into ammonia gas by hot vapor in the evaporator; then the vaporized ammonia gas passes through a drainage separator and an activated carbon adsorber in turn to obtain purified ammonia gas; adsorbing and deoiling the purified and filtered ammonia gas by using adsorption resin, and washing and removing impurities by using ultrapure water and saturated ammonia water; separating the treated ammonia gas into water gas and ammonia gas by a water-gas separator, absorbing the separated ammonia gas by ultrapure water in an absorption tower, and performing ultrafiltration to obtain electronic-grade ammonia water.
In the above production process, evaporation is mostly performed by using a conventional evaporation kettle, and the introduced hot steam medium has a high temperature (usually water vapor), so that moisture and part of oil with a relatively low boiling point in the hot steam medium are also evaporated and discharged to a subsequent process along with ammonia gas. Therefore, in the subsequent steps, it is necessary to purify these water and oil components by draining water from a drain separator, absorbing water from an activated carbon adsorber, absorbing oil from an adsorption resin, and the like, and then absorb the water and oil components with ultrapure water. After the kettle-type evaporator adopted in the prior art is used for a period of time in an evaporation mode, deposited impurities in the kettle-type evaporator need to be cleaned regularly, so that the production continuity is influenced, and the production efficiency is greatly influenced; and meanwhile, the corresponding water, oil and impurity removing device is arranged, so that the equipment cost and the maintenance cost of production are greatly improved.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides a liquid ammonia evaporation deoiling and impurity removing device for producing electronic-grade ammonia water, which can efficiently and safely remove oily components and other impurities in industrial-grade liquid ammonia.
In order to achieve the purpose, the invention provides the following technical scheme:
an evaporation, deoiling and impurity removal device for liquid ammonia for producing electronic-grade ammonia water, which comprises a tank body,
the top sealing cover of the tank body is provided with an upper sealing cover, and the top of the upper sealing cover is fixedly provided with an exhaust pipe communicated with the inside of the tank body and used for exhausting ammonia gas; the bottom of the tank body is provided with a lower sealing cover, and the bottom of the lower sealing cover is fixedly provided with a liquid discharge pipe which is communicated with the inside of the tank body and is used for discharging oil stains and impurities; a feed pipe for introducing liquid ammonia into the tank body is fixedly arranged at the top end of the outer side wall of the tank body, and a plurality of heat exchange tubes with central axes parallel to the central axis of the tank body and with openings at two ends are positioned in the tank body;
a distributor which can uniformly distribute liquid ammonia and can uniformly introduce the liquid ammonia into the heat exchange tube is positioned at the lower part of the tank body corresponding to the outlet of the feed pipe; the distributor comprises a second distribution plate, a first distribution plate and a distribution disc ladder which are sequentially arranged from bottom to top, the second distribution plate is fixedly connected to the inner peripheral wall of the tank body and fixedly connected to the top ends of the plurality of heat exchange tubes in a penetrating manner, the first distribution plate is fixedly connected to the inner peripheral wall of the tank body, and the distribution disc ladder is fixedly arranged on the upper surface of the first distribution plate and is positioned right below the outlet of the feeding tube;
a plurality of distribution pipes which are distributed with the heat exchange pipes in a staggered way are fixedly arranged on the first distribution plate and between the first distribution plate and the second distribution plate, the tops of the plurality of distribution pipes penetrate through the first distribution plate and are communicated with the plate surface of the first distribution plate, and the bottom end surfaces of the plurality of distribution pipes are fixedly connected to the upper surface of the second distribution plate and form discharge holes with the upper surface of the second distribution plate; the feed pipe, the distribution disc ladder, the first distribution plate, the distribution pipe, the discharge hole, the second distribution plate and the heat exchange pipe are communicated to form a liquid ammonia flow channel.
The further technical scheme is as follows:
a plurality of the open-top of heat exchange tube be honeycomb net distribution in on the second distribution board, it is a plurality of honeycomb net distribution is personally submitted in the bottom of distribution pipe on the upper surface of second distribution board, and every equal evenly distributed has six around the open-top of heat exchange tube the bottom face of distribution pipe.
The further technical scheme is as follows:
correspond every on the top surface of second distribution board the opening part of heat exchange tube all is formed with an annular boss protruding in second distribution board face, and all is formed with a plurality of direction partitions that are central symmetric distribution in the week side that lies in every annular boss on the top surface of second distribution board, and these a plurality of direction partitions form a plurality of unit check that are petal form and arrange as the center with the upper surface separation of second distribution board, and every all be equipped with one in the unit check the bottom surface of distribution tube.
The further technical scheme is as follows:
the heights of the guide partitions are equal to the heights of the annular bosses.
The further technical scheme is as follows:
the top inner edge of the annular boss extends downwards to the inner peripheral wall of the heat exchange tube along the inner side wall of the top end of the heat exchange tube, and a horn mouth expanding downwards is formed.
The further technical scheme is as follows:
and the inner surface wall of the bell mouth is provided with a spiral line which has the same guiding direction with the guiding partition.
The further technical scheme is as follows:
every all seted up two on the distributing pipe the discharge gate, these two discharge gates are seted up respectively and are corresponded the direction department that forms two direction walls of cell on the bottom terminal surface of distributing pipe.
The further technical scheme is as follows:
the inside that lies in every distributing pipe on the second distributor all sets firmly an equalizer baffle, and the height of this equalizer baffle is not less than the height of discharge gate, and two the both sides of this equalizer baffle are located to the discharge gate branch.
The further technical scheme is as follows:
the distribution box ladder comprises a plurality of tray bodies and a ladder rack in a ladder shape, and the tray bodies are distributed and fixed on the top of the ladder rack in the ladder shape.
The further technical scheme is as follows:
two steam pipe groups for steam inlet/outlet are positioned on the outer wall of the tank body in the area corresponding to the heat exchange pipe.
Compared with the prior art, the invention has the beneficial effects that:
1. this application the device adopts falling liquid film formula heat exchange tube as evaporation subject, and the liquid ammonia that lets in gets into and forms even liquid film on the heat exchange tube inner wall after in the heat exchange tube, through adding low temperature hot water as the evaporation medium in the zone of heating, can discharge from jar body top after the ammonia in the liquid film comes out from the direct low temperature evaporation of liquid ammonia from the top down flow in-process, and moisture and the low boiling point oil content that contain in the liquid film can not be evaporated out, and it is direct to discharge from the bottom of heat exchange tube with the liquid state. Therefore, the evaporation device does not need to be stopped for cleaning, liquid ammonia can be continuously evaporated to form high-purity ammonia gas, continuous production can be realized, and the production efficiency is improved; meanwhile, corresponding water and oil removing devices are not required to be additionally arranged, so that the production cost can be greatly reduced;
2. this application the device is provided with the distributor that is used for making in the even leading-in heat-exchange tube of liquid ammonia and forms even liquid film on the heat-exchange tube inner wall in the below of inlet pipe, this distributor is from central point to diffusion all around via the distribution dish ladder, evenly distributed is back on the first distribution face, evenly reachs the second distribution face again, overflow weir effect and water conservancy diversion effect that the cell formed on utilizing the second distribution face, can make the even laminating heat exchange tube inner surface wall of liquid ammonia flow, improve the homogeneity of liquid film on the heat exchange tube inner surface wall, thereby can make the evaporation of liquid ammonia more homogeneous, reduce the phenomenon of the local scale deposit of heat exchange tube inner wall.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention.
In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the distributor of the present invention;
FIG. 3 is a schematic top view of a second distribution plate according to the present invention;
fig. 4 is a partially enlarged structural schematic view of a second distribution plate in the invention, wherein the arrow direction is the flowing direction of the liquid flowing out from the discharge hole.
In the figure:
1. a tank body; 11. a feed pipe; 12. an exhaust pipe; 13. a liquid discharge pipe; 14. a steam pipe group;
2. a distribution disc ladder; 21. a tray body; 22. a plate ladder frame;
3. a first distribution plate; 31. a distribution pipe; 311. a discharge port; 32. a material homogenizing baffle;
4. a second distribution plate; 401. guiding and separating; 41. a heat exchange pipe; 411. an annular boss; 42. a bell mouth; 421. a spiral wire.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides the following technical solutions:
this concrete embodiment has recorded in detail the application a device for removing oil and impurity is evaporated with liquid ammonia to production of electronic grade aqueous ammonia.
The device mainly comprises a tank body 1 which is a straight-end tank body with two open ends. The top sealing cover of the tank body 1 is provided with an upper sealing cover, and the top of the upper sealing cover is fixedly provided with an exhaust pipe 12 which is communicated with the interior of the tank body and used for exhausting ammonia gas; the bottom of the tank body 1 is provided with a lower sealing cover, and the bottom of the lower sealing cover is fixedly provided with a liquid discharge pipe 13 which is communicated with the inside of the tank body and is used for discharging oil stains and impurities; the can, the upper closure and the lower closure together form a housing portion of the device.
A feed pipe 11 for introducing liquid ammonia as an original raw material into the tank is fixedly provided at the top end of the outer side wall of the tank 1, and the feed pipe has a reverse-shaped structure and extends into the tank through a transverse section so that a vertical section is located at the center of a radial surface of the tank. The inside location of jar body 1 is equipped with a plurality of central axis and jar body the central axis be parallel to each other and both ends open-ended heat exchange tube 41, and the concrete fixed mode of this heat exchange tube is: an upper tube plate and a lower tube plate are respectively and fixedly arranged at the upper end and the lower end of the circumferential inner side wall of the tank body 1 along the radial cross section in a sealing manner, the heat exchange tube 41 is inserted on the upper tube plate and the lower tube plate, and the two ends of the heat exchange tube respectively penetrate through the upper tube plate and the lower tube plate, so that a heating area is formed among the upper tube plate, the lower tube plate, the circumferential inner side wall of the tank body and the circumferential outer side wall of the heat exchange tube. Two steam tube groups 14 for steam inlet/outlet are positioned on the outer wall of the tank body 1 in the area corresponding to the heat exchange tube 41 (i.e. corresponding to the heating area), steam enters the heating area through one of the steam tube groups, liquid ammonia in the heat exchange tube is heated and evaporated, and the vapor is discharged from the heating area through the other steam tube group.
The lower part of the tank body 1 corresponding to the outlet of the feeding pipe 11 is provided with a distributor which can uniformly distribute liquid ammonia and can uniformly introduce the liquid ammonia into the heat exchange pipe 41.
The distributor comprises a second distribution plate 4, a first distribution plate 3 and a distribution disc ladder 2 which are sequentially arranged from bottom to top.
The peripheral side of the second distribution plate 4 is fixedly connected to the inner peripheral wall of the tank body 1, and the second distribution plate is fixedly connected to the top ends of the plurality of heat exchange tubes 41 in a penetrating manner. The top end of each heat exchange tube is fixedly connected to the second distribution plate, and the top end opening of each heat exchange tube is arranged on the second distribution plate, so that the plate surface of the second distribution plate is communicated with the inside of each heat exchange tube.
The peripheral sides of the first distribution plates 3 are fixedly connected to the inner peripheral wall of the tank body 1, and the first distribution plates and the second distribution plates are arranged at intervals.
The distributor ladder 2 is fixedly mounted on the upper surface of the first distributor plate 3 and is located directly below the outlet of the feed pipe 11. The distribution disc ladder 2 comprises a plurality of disc bodies 21 and a stepped disc ladder frame 22, wherein the disc bodies 21 are distributed in a stepped manner and fixed at the top of the disc ladder frame 22. The disc ladder frame 22 is set into four stages in the embodiment, each stage is set into the shape matched with the inner diameter of the tank body 1, the top of each stage is provided with a plurality of disc bodies 21 distributed at intervals, and the circumferential edge of each disc body on the upper layer is just opposite to the disc surface of the disc body on the lower layer. The topmost stage is only provided with a disc body, and the outlet end of the feeding pipe 11 is opposite to the central position of the disc body. In the specific embodiment, the disc body is designed into a disc-shaped structure, the top surface of the disc-shaped structure gradually inclines outwards along the radial direction from the central position, the inclination angle is 1-2 degrees, and the design of the disc-shaped structure and the design of the inclination angle can enable liquid to fall from the edge of the disc more uniformly and smoothly. Through the dish ladder frame that sets up the echelonment and installing the disk body on dish ladder frame, when liquid ammonia passes through the disk body that the echelonment distributes, can be by central point to diffusion all around to even distribution is to on the upper surface of whole first distribution board.
A plurality of distributing pipes 31 which are distributed with the heat exchanging pipes 41 in a staggered way are fixedly arranged between the first distributing plate and the second distributing plate on the first distributing plate 3. The tops of the plurality of distribution pipes 31 penetrate through the first distribution plate 3 and are communicated with the plate surface of the first distribution plate 3; namely, the top ends of the plurality of distribution pipes 31 are fixedly connected to the first distribution plate 3, and the top end opening of each distribution pipe 31 is arranged on the first distribution plate, so that the plate surface of the first distribution plate is communicated with the inside of each distribution pipe 31. The bottom end faces of the distribution pipes 31 are fixedly connected to the upper surface of the second distribution plate 4, and a discharge hole 311 is formed between the bottom of the distribution pipe and the upper surface of the second distribution plate, and is mainly used for enabling the liquid flowing into the distribution pipe to flow out from the discharge hole. The feed pipe 11, the distribution disc ladder 2, the first distribution plate 3, the distribution pipe 31, the discharge port 311, the second distribution plate 4 and the heat exchange pipe 41 are communicated to form a liquid ammonia flow channel.
The distribution mode of the distribution pipe 31 and the heat exchange pipe 41 is as follows:
the top openings of the plurality of heat exchange tubes 41 are distributed on the second distribution plate 4 in a honeycomb net shape, the bottom ends of the plurality of distribution tubes 31 are distributed on the upper surface of the second distribution plate 4 in a honeycomb net shape, and the bottom end surfaces of the six distribution tubes 31 are uniformly distributed around the top opening of each heat exchange tube 41. Through the bottom face that sets up evenly distributed's distribution pipe in the feed inlet circumference department at every heat exchange tube, can with the even direction of liquid ammonia to the heat exchange tube around, make liquid ammonia flow gradually to the heat exchange tube around the heat exchange tube again in to make liquid ammonia can even orderly flow, be favorable to forming even liquid film at the inner wall of heat exchange tube.
The more specific structure is as follows:
an annular boss 411 protruding from the surface of the second distribution plate is formed at the opening of the top surface of the second distribution plate 4 corresponding to each heat exchange tube 41, a plurality of guide partitions 401 distributed in central symmetry are formed on the top surface of the second distribution plate 4 on the periphery of each annular boss, the guide partitions partition the upper surface of the second distribution plate to form a plurality of cells arranged in a petal shape by taking the annular boss as the center, a bottom end surface of each distribution tube 31 is arranged in each cell, and each cell is connected with the annular boss positioned at the center; when designing the height of the guide partitions, the heights of the guide partitions 401 are all equal to the height of the annular boss 411. After liquid ammonia flows from the discharge gate of the bottom face of distribution pipe, can accumulate in the cell earlier, can overflow from the annular boss that links to each other with the cell after the liquid volume is full in the cell, and then flow to the center along the even all around from annular boss of liquid flow direction, the effect of overflow weir is played with annular boss to cell and cell jointly like this, impact force when can slowing down liquid ammonia and flow to the second distribution board in the distribution pipe, play gentle liquid flow's effect.
In addition, a flared opening 42 which is expanded downwards is formed on the inner side wall of the top end of the heat exchange tube 41 and extends downwards to the inner peripheral wall of the heat exchange tube along the inner edge of the top of the annular boss 411, and the downward expansion gradient of the flared opening is relatively slow. Preferably, the inner surface wall of the bell mouth 42 is provided with a spiral line 421 having the same guiding direction as the guiding direction of the guiding partition 401. Liquid ammonia that overflows from annular boss diffuses in to the heat exchange tube through bellmouth down, can make the even flow of liquid ammonia form the liquid film at the inner wall of heat exchange tube, and above-mentioned helix and the setting that is central symmetry distribution's cell can make more homogeneous smooth and easy that liquid flows to keep the even form of liquid film.
Two discharge ports 311 are formed in each distribution pipe 31, and the two discharge ports are respectively formed in the guide directions of the two guide partitions 401, which correspond to the cells, on the end surface of the bottom of the distribution pipe 31. And, a material homogenizing baffle 32 is fixedly arranged inside each distribution pipe 31 on the second distribution plate 4, the height of the material homogenizing baffle is not lower than that of the material outlet 311, preferably equal to the height of the material outlet, and the two material outlets 311 are respectively arranged at two sides of the material homogenizing baffle.
Through setting up the homogenization baffle and being located homogenization baffle both sides and the discharge gate of direction relevant position department that the direction cut off, can make the liquid ammonia that flows out from the distribution pipe along the even flow of direction cut off to the heat exchange tube in to can guarantee to form stable liquid film on the internal perisporium of heat exchange tube.
The working principle and the using process of the invention are as follows:
when the evaporation deoiling and impurity removing device is used for evaporating, deoiling and impurity removing industrial-grade liquid ammonia, the liquid ammonia is guided into the tank body 1 from the feeding pipe 11 and flows into the heat exchange pipe through the distributor, and a uniform liquid film is formed on the peripheral wall of the inner side of the heat exchange pipe. The heat exchange tubes in the heating area are heated at low temperature by using the steam tube group, so that a liquid film formed by liquid ammonia in the heat exchange tubes is evaporated at low temperature, the ammonia is directly evaporated from the liquid film formed in the process of flowing from top to bottom in the heat exchange tubes, and finally the ammonia is directly discharged from the exhaust pipe 12 above in a gas state; the non-volatile substances such as oily impurities in the liquid ammonia flow downwards along the inner wall of the heat exchange tube, are discharged from the bottom opening of the heat exchange tube and are collected into a liquid discharge tube below for concentrated discharge. The device can make the evaporation purification process of liquid ammonia incessant, need not shut down and maintain and arrange operations such as miscellaneous, can incessant production, improves production efficiency.
In addition, when liquid ammonia flows and distributes on the distributor in the tank body, at first along inlet pipe 11 downward flow to the top layer that is the distribution disc ladder 2 of echelonment distribution, from the disk body 21 center on top layer to spreading all around to the disk body 21 of lower floor, and then even distribution is to the upper surface of whole first distribution plate 3. Then enters each distribution pipe through the openings of the distribution pipes 31 arranged on the first distribution plate, continues to flow downwards along the distribution pipes, and flows out from the discharge holes on the bottom end face of the distribution pipes to reach the upper surface of the second distribution plate 4. Because the upper surface of the second distribution plate 4 is divided into a plurality of cells which are distributed around the heat exchange tube in a central symmetry manner by the guide partitions, and the cells are connected with the annular bosses 411, the liquid ammonia flowing out of the discharge port 311 can firstly fill the cells surrounded by the guide partitions 401, and then overflows from the annular bosses to flow into the heat exchange tube 41, so that the liquid ammonia can flow by being attached to the inner surface wall of the heat exchange tube 41, and flows downwards in a spiral direction under the guide effect and spiral line guide effect of liquid flow, the uniformity of the liquid flow is improved, the liquid flow is not easy to break, and the uniformity of a liquid film formed on the inner wall of the heat exchange tube is improved.
In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The utility model provides an electronic grade ammonia water production is with liquid ammonia evaporation edulcoration device that deoils, includes jar body (1), its characterized in that:
the top sealing cover of the tank body is provided with an upper sealing cover, and the top of the upper sealing cover is fixedly provided with an exhaust pipe (12) which is communicated with the inside of the tank body and used for exhausting ammonia gas; the bottom of the tank body is provided with a lower sealing cover, and the bottom of the lower sealing cover is fixedly provided with a liquid discharge pipe (13) which is communicated with the inside of the tank body and is used for discharging oil stains and impurities; a feed pipe (11) for introducing liquid ammonia into the tank body is fixedly arranged at the top end of the outer side wall of the tank body, and a plurality of heat exchange pipes (41) with central axes parallel to the central axis of the tank body and with openings at two ends are positioned in the tank body;
a distributor which can uniformly distribute liquid ammonia and can uniformly introduce the liquid ammonia into the heat exchange tube is positioned at the lower part of the tank body (1) corresponding to the outlet of the feed tube; the distributor comprises a second distribution plate (4), a first distribution plate (3) and a distribution disc ladder (2) which are sequentially arranged from bottom to top, the second distribution plate is fixedly connected to the inner peripheral wall of the tank body and fixedly connected to the top ends of the plurality of heat exchange tubes (41) in a penetrating mode, the first distribution plate is fixedly connected to the inner peripheral wall of the tank body, and the distribution disc ladder is fixedly arranged on the upper surface of the first distribution plate and is positioned right below an outlet of the feeding tube (11);
a plurality of distribution pipes (31) which are distributed with the heat exchange pipes in a staggered manner are fixedly arranged on the first distribution plate and between the first distribution plate and the second distribution plate, the tops of the plurality of distribution pipes penetrate through the first distribution plate and are communicated with the plate surface of the first distribution plate, the bottom end surfaces of the plurality of distribution pipes are fixedly connected to the upper surface of the second distribution plate, and discharge holes (311) are formed between the bottom end surfaces of the plurality of distribution pipes and the upper surface of the second distribution plate; the feeding pipe (11), the distribution disc ladder (2), the first distribution plate (3), the distribution pipe (31), the discharge hole (311), the second distribution plate (4) and the heat exchange pipe (41) are communicated to form a liquid ammonia flow channel;
correspond every on the top surface of second distribution board (4) the opening part of heat exchange tube (41) all is formed with one and protrudes in annular boss (411) of second distribution board face, and all is formed with a plurality of direction wall (401) that are central symmetric distribution in the week that lie in every annular boss on the top surface of second distribution board, and this a plurality of direction wall forms a plurality of unit check that are petal form and arrange as the center with the upper surface separation of second distribution board, and every all be equipped with one in the unit check the bottom surface of distribution pipe (31).
2. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: a plurality of the open-top of heat exchange tube (41) is honeycomb net distribution in on second distributor plate (4), and is a plurality of the bottom of distributor tube (31) is personally submitted honeycomb net distribution in on the upper surface of second distributor plate (4), and every equal evenly distributed has six around the open-top of heat exchange tube (41) the bottom face of distributor tube (31).
3. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: the heights of the guide partitions (401) are equal to the height of the annular boss (411).
4. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: the top inner edge of the top end inner side wall of the heat exchange tube (41) extends downwards to the inner peripheral wall of the heat exchange tube along the inner edge of the top part of the annular boss (411) to form a horn mouth (42) which expands downwards.
5. The device of claim 4, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein: and a spiral line (421) with the same guiding direction as the guiding partition (401) is arranged on the inner surface wall of the bell mouth (42).
6. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: every all seted up two on distributing pipe (31) discharge gate (311), these two discharge gates are seted up respectively and are corresponded the direction department that forms two direction partitions (401) of cell on the bottom terminal surface of distributing pipe (31).
7. The device of claim 6, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein: the inside that lies in every distributing pipe (31) on second distributing plate (4) all sets firmly a mixing baffle (32), and the height of this mixing baffle is not less than the height of discharge gate (311), and two the both sides of this mixing baffle are located in discharge gate (311) branch.
8. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: the distribution disc ladder (2) comprises a plurality of disc bodies (21) and a stepped disc ladder frame (22), and the disc bodies (21) are distributed in a stepped manner and fixed at the top of the disc ladder frame (22).
9. The device of claim 1, comprising a liquid ammonia evaporation oil and impurity removal device for producing electronic-grade ammonia water, wherein the device comprises: two steam pipe groups (14) for steam inlet/outlet are positioned on the outer wall of the tank body (1) corresponding to the area of the heat exchange pipe (41).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110782108.0A CN113209655B (en) | 2021-07-12 | 2021-07-12 | Liquid ammonia evaporation deoiling impurity removing device for electronic grade ammonia water production |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110782108.0A CN113209655B (en) | 2021-07-12 | 2021-07-12 | Liquid ammonia evaporation deoiling impurity removing device for electronic grade ammonia water production |
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| CN113209655B true CN113209655B (en) | 2021-09-28 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS5993181A (en) * | 1982-11-19 | 1984-05-29 | Hitachi Ltd | Liquid film vaporization type heat exchanger |
| CN201389353Y (en) * | 2009-02-11 | 2010-01-27 | 赛鼎工程有限公司 | Gas stripping type falling film evaporator |
| CN201701759U (en) * | 2010-06-02 | 2011-01-12 | 苏州桥立环境科技有限公司 | Liquid material distribution film forming device of falling film evaporator |
| CN205199000U (en) * | 2015-11-30 | 2016-05-04 | 重庆天奕恒化科技有限公司 | Pipe type falling -film evaporator |
| CN112619191B (en) * | 2020-11-30 | 2021-11-09 | 浙江万享科技股份有限公司 | High-efficient quick film evaporator |
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Address after: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Lianshi New Materials (Suzhou) Co.,Ltd. Address before: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Lianshi (Kunshan) chemical materials Co.,Ltd. |