CN113201721B - Coating equipment for manufacturing double-sided transparent conductive oxide film - Google Patents
Coating equipment for manufacturing double-sided transparent conductive oxide film Download PDFInfo
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- CN113201721B CN113201721B CN202110368849.4A CN202110368849A CN113201721B CN 113201721 B CN113201721 B CN 113201721B CN 202110368849 A CN202110368849 A CN 202110368849A CN 113201721 B CN113201721 B CN 113201721B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
- B08B5/043—Cleaning travelling work
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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Abstract
The invention discloses a coating device for manufacturing a double-sided transparent conductive oxide film, which belongs to the technical field of film preparation and comprises a base, wherein a vacuum chamber is fixed at the top of the base, a vacuum pump is arranged at one side of the vacuum chamber, partition plates are fixed at two sides of the interior of the vacuum chamber, and through grooves are symmetrically formed in the partition plates. The invention can remove dust before the coating of the device by the dust collection mechanism consisting of the U-shaped tube, the cover plate, the dust collection bin, the negative pressure fan and the filter screen, so as to avoid the effect of dust affecting the coating, and can reduce the adhesion effect between dust and a film by the dust collection mechanism matched with the static electricity eliminating mechanism consisting of the U-shaped plate and the static electricity eliminating brush, thereby improving the dust collection effect, and ensuring the effect of coating.
Description
Technical Field
The invention relates to a coating device, in particular to a coating device for manufacturing a double-sided transparent conductive oxide film, and belongs to the technical field of film preparation.
Background
The transparent conductive oxide film is a film material with high transmittance and low resistivity In the visible light spectrum range (380 nm < lambda < 780 nm), mainly comprises CdO, in2O3, snO2, znO and other oxides and corresponding compound multi-compound semiconductor materials, has wide application range, is mainly used In the fields of transparent electrodes of liquid crystal displays, touch screens, flexible LED screens, self-thin film solar cells of components, and the like, and needs to be produced and processed by plating equipment In the manufacturing process of the transparent conductive oxide film;
however, the conventional device cannot clean the surface of the transparent film in the using process, the ion coating is easy to drop after the coating is finished, and the conventional device adopts two groups of ion coating sources to carry out coating in an up-down simultaneous processing mode, so that the manufacturing cost of equipment is increased, the upper surface and the lower surface of the film cannot be uniformly coated simultaneously in the coating process, the coating effect is poor, and the conventional device is easy to wrinkle when conveying the film, so that the coating effect is influenced.
Disclosure of Invention
The invention mainly aims to provide a coating device for manufacturing a double-sided transparent conductive oxide film, so as to solve the problem of poor coating effect in the prior art.
The aim of the invention can be achieved by adopting the following technical scheme:
the utility model provides a coating equipment of two-sided transparent conductive oxide film of preparation, includes the base, the top of base is fixed with the vacuum chamber, the vacuum pump is installed to one side of vacuum chamber, the inside both sides of vacuum chamber all are fixed with the baffle, all symmetrically seted up logical groove on the baffle, the coating film source is installed at the indoor top of vacuum, the top of vacuum chamber one side is provided with the film roll that unreels, the bottom that the vacuum chamber is close to film roll one side is provided with the receipts membrane roll, the inside one side that is close to film roll that unreels of vacuum chamber is provided with actuating mechanism, the position department that the vacuum chamber top is close to film roll is provided with dust absorption mechanism, the inside one side that is close to film roll that is provided with the guide roll, the guide roll is installed on the baffle, the inside one side that is kept away from film roll that unreels of vacuum chamber is provided with film roll, the inside one side that is close to film roll is provided with tensioning mechanism.
Preferably: a baffle is fixed between the two groups of baffle plates, and the baffle plates are positioned on the outer side of the film.
Preferably: the driving mechanism comprises a first rotating rod, a second rotating rod and a driving gear, the first rotating rod is rotatably arranged on the vacuum chamber, the second rotating rod is located at the bottom of the first rotating rod, the second rotating rod is rotatably connected with the inner wall of the vacuum chamber, the film unwinding roll is located on the first rotating rod, the film winding roll is located on the second rotating rod, the driving gear is fixed at one end of the first rotating rod, the driven gear is fixed at one end, close to the driving gear, of the second rotating rod, the driving gear is meshed with the driven gear, a motor is arranged on the outer side of the vacuum chamber, and the output end of the motor is connected with the first rotating rod.
Preferably: the dust collection mechanism comprises a U-shaped tube, a cover plate and a dust collection bin, wherein the U-shaped tube is located inside the vacuum chamber, the cover plate is arranged at the top and the bottom of the inner side of the U-shaped tube, a film between the film unreeling roll and the film reeling roll passes through the inside of the U-shaped tube, the dust collection bin is arranged on the outer side of the vacuum chamber, the dust collection bin is communicated with the inside of the U-shaped tube, a negative pressure fan is arranged at one end of the inside of the dust collection bin, and a filter screen is arranged at the other end of the inside of the dust collection bin.
Preferably: the inside of the vacuum chamber is provided with a static eliminating mechanism, and the static eliminating mechanism is positioned between the film unreeling roll and the dust collecting mechanism.
Preferably: the static eliminating mechanism comprises a U-shaped plate and a static eliminating hairbrush, the static eliminating hairbrush is fixed at the inner top and the inner bottom of the U-shaped plate, and a film between the film unreeling roll and the film reeling roll passes through the inside of the U-shaped plate.
Preferably: the film tilting mechanism includes first horizontal compression roller, the horizontal compression roller of second, first vertical compression roller and the vertical compression roller of second, first horizontal compression roller is provided with two sets of, and the one end in vacuum chamber is installed in the rotation of first horizontal compression roller, the horizontal compression roller of second is provided with two sets of, the horizontal compression roller of second is located same horizontal plane with first horizontal compression roller, the one end in keeping away from first horizontal compression roller is installed in the rotation of second horizontal compression roller, the one side in vacuum chamber inside near first horizontal compression roller rotates and installs first vertical compression roller, first vertical compression roller is provided with two sets of, the one side in vacuum chamber inside near the horizontal compression roller of second rotates and installs the vertical compression roller of second, the vertical compression roller of second is provided with two sets of.
Preferably: the tensioning mechanism comprises a sleeve, a sliding rod and a conveying roller, wherein the sleeve is fixed on one side, close to the film turnover mechanism, inside the vacuum chamber, the sliding rod is slidably installed inside the sleeve, one end, far away from the sleeve, of the sliding rod is rotatably provided with the conveying roller, the conveying roller is horizontally arranged between the conveying roller and the first longitudinal pressing roller and the second longitudinal pressing roller, one end, far away from the conveying roller, of the conveying roller is fixedly provided with a limiting block, a spring is sleeved on the outer side of the sliding rod, and the spring is located between the limiting block and the inner end portion of the sleeve.
Preferably: the outer end of the vacuum chamber is provided with access doors, three groups of access doors are arranged, and the distances between adjacent access doors are the same.
Preferably: a transparent window is arranged at the middle position of the end part of the vacuum chamber.
The beneficial effects of the invention are as follows:
according to the coating equipment for manufacturing the double-sided transparent conductive oxide film, dust can be removed before coating of a device by the dust collection mechanism consisting of the U-shaped pipe, the cover plate, the dust collection bin, the negative pressure fan and the filter screen, the effect of the coating is avoided, the dust collection mechanism is matched with the static eliminating mechanism consisting of the U-shaped plate and the static eliminating brush, the adhesion effect between the dust and the film can be reduced, the dust removal effect is improved, the film turnover mechanism consisting of the first transverse press roller, the second transverse press roller, the first longitudinal press roller and the second longitudinal press roller in the vacuum chamber is arranged, the front side and the back side of the film can be coated simultaneously, the coating effect is ensured, only a single coating source is needed, the production cost of the device is reduced, the tensioning mechanism consisting of the sleeve pipe, the slide rod, the conveying roller, the limiting block and the spring in the vacuum chamber is arranged, the surface of the film is prevented from being wrinkled in the film conveying process, the film is ensured to be coated uniformly, and the film can be stably conveyed in the film conveying process by the driving mechanism consisting of the first rotating rod, the driving gear and the driven gear is arranged, and the film can be stably conveyed.
Drawings
FIG. 1 is a front cross-sectional view of the present invention;
FIG. 2 is a top cross-sectional view of the present invention;
FIG. 3 is a diagram of a driving mechanism of the present invention;
FIG. 4 is a diagram of a static elimination mechanism of the present invention;
FIG. 5 is a diagram of a vacuum cleaner of the present invention;
FIG. 6 is a diagram of a film inversion mechanism according to the present invention;
FIG. 7 is a schematic front view of the present invention;
FIG. 8 is a schematic view of a separator of the present invention;
fig. 9 is a schematic view of the tensioning mechanism of the present invention.
In the figure: 1. a base; 2. a vacuum chamber; 3. a vacuum pump; 4. a partition plate; 5. a through groove; 6. plating a mold source; 7. a driving mechanism; 8. unreeling the film roll; 9. film winding; 10. a guide roller; 11. a static electricity eliminating mechanism; 12. a dust collection mechanism; 13. a film turnover mechanism; 14. a tensioning mechanism; 15. a baffle; 16. a first rotating lever; 17. a second rotating rod; 18. a drive gear; 19. a motor; 20. a driven gear; 21. a U-shaped plate; 22. static removing hairbrushes; 23. a U-shaped tube; 24. a cover plate; 25. a dust collection bin; 26. a negative pressure fan; 27. a filter screen; 28. a first transverse press roll; 29. a second transverse press roll; 30. a first longitudinal press roll; 31. a second longitudinal press roll; 32. an access door; 33. a transparent window; 34. a sleeve; 35. a slide bar; 36. a conveying roller; 37. a limiting block; 38. and (3) a spring.
Detailed Description
In order to make the technical solution of the present invention more clear and clear to those skilled in the art, the present invention will be described in further detail with reference to examples and drawings, but the embodiments of the present invention are not limited thereto.
As shown in fig. 1-9, this embodiment provides a coating apparatus for producing a double-sided transparent conductive oxide film, which comprises a base 1, the top of the base 1 is fixed with a vacuum chamber 2, one side of the vacuum chamber 2 is provided with a vacuum pump 3, both sides of the interior of the vacuum chamber 2 are fixed with a partition board 4, through grooves 5 are symmetrically arranged on the partition board 4, a coating source 6 is arranged at the top of the interior of the vacuum chamber 2, an unwinding roll 8 is arranged at the top of one side of the vacuum chamber 2, a film winding 9 is arranged at the bottom of one side of the vacuum chamber 2, which is close to the unwinding roll 8, a driving mechanism 7 is arranged at the position of the interior of the vacuum chamber 2, which is close to the unwinding roll 8, a dust collection mechanism 12 is arranged at the top of the interior of the vacuum chamber 2, one side, which is close to the winding 9, of the interior of the vacuum chamber 2 is provided with a guide roller 10, which is arranged on the partition board 4, a film turnover mechanism 13 is arranged at one side of the interior of the vacuum chamber 2, which is far from the unwinding roll 8, and a tensioning mechanism 14 is arranged at one side of the interior of the vacuum chamber 2, which is close to the film turnover mechanism 13.
In this embodiment, as shown in fig. 2, a baffle 15 is fixed between two groups of the baffles 4, the baffle 15 is located at the outer side of the film, and the baffle 15 is horizontally arranged between two groups of the baffles 4, so that ion particles are effectively prevented from floating towards the bottom of the baffles 4, and the film coating effect is ensured.
In this embodiment, as shown in fig. 3, the driving mechanism 7 includes a first rotating rod 16, a second rotating rod 17 and a driving gear 18, the first rotating rod 16 is rotatably installed on the vacuum chamber 2, the second rotating rod 17 is located at the bottom of the first rotating rod 16, the second rotating rod 17 is rotatably connected with the inner wall of the vacuum chamber 2, the film unwinding roll 8 is located on the first rotating rod 16, the film winding roll 9 is located on the second rotating rod 17, one end of the first rotating rod 16 is fixed with the driving gear 18, one end of the second rotating rod 17, which is close to the driving gear 18, is fixed with a driven gear 20, the driving gear 18 is meshed with the driven gear 20, a motor 19 is installed at the outer side of the vacuum chamber 2, the output end of the motor 19 is connected with the first rotating rod 16, the rotation of the motor 19 controls the film unwinding roll 8 on the first rotating rod 16, and in the film unwinding roll 8 is rotated in the film releasing process, the film winding roll 9 is controlled to rotate in cooperation with the driven gear 20 on the second rotating rod 17, and the film winding process is simultaneously performed.
In this embodiment, as shown in fig. 5, the dust collection mechanism 12 includes a U-shaped tube 23, a cover plate 24 and a dust collection bin 25, the U-shaped tube 23 is located inside the vacuum chamber 2, the top and the bottom of the inner side of the U-shaped tube 23 are both provided with the cover plate 24, the film between the film unreeling roll 8 and the film collecting roll 9 passes through the inner side of the U-shaped tube 23, the dust collection bin 25 is installed on the outer side of the vacuum chamber 2, the dust collection bin 25 is communicated with the inner side of the U-shaped tube 23, one end of the inner side of the dust collection bin 25 is provided with a negative pressure fan 26, the other end of the inner side of the dust collection bin 25 is provided with a filter screen 27, and in the release process of the film, the negative pressure fan 26 is started to generate negative pressure inside the dust collection bin 25, and dust on the surface of the film is sucked into the inner side of the dust collection bin 25 through the U-shaped tube 23 for storage.
In this embodiment, as shown in fig. 1, a static electricity eliminating mechanism 11 is disposed in the vacuum chamber 2, the static electricity eliminating mechanism 11 is located between the film unreeling roll 8 and the dust absorbing mechanism 12, and the static electricity eliminating mechanism 11 is used to reduce the adhesion effect between dust and film, so as to facilitate dust removal.
In this embodiment, as shown in fig. 4, the static electricity eliminating mechanism 11 includes a U-shaped plate 21 and static electricity eliminating brushes 22, the static electricity eliminating brushes 22 are fixed on the inner top and the inner bottom of the U-shaped plate 21, the film between the film unreeling roll 8 and the film reeling roll 9 passes through the inside of the U-shaped plate 21, and after the film is released from the outer side of the film unreeling roll 8, the film passes through the space between the U-shaped plate 21, so that static electricity is disinfected, and dust is removed by the dust collecting mechanism 12.
In this embodiment, as shown in fig. 6, the film turning mechanism 13 includes a first transverse press roll 28, a second transverse press roll 29, a first longitudinal press roll 30 and a second longitudinal press roll 31, the first transverse press roll 28 is provided with two sets, and the first transverse press roll 28 is rotatably mounted at one end inside the vacuum chamber 2, the second transverse press roll 29 is provided with two sets, the second transverse press roll 29 is located on the same horizontal plane as the first transverse press roll 28, the second transverse press roll 29 is rotatably mounted at one end far from the first transverse press roll 28, the first longitudinal press roll 30 is rotatably mounted at one side inside the vacuum chamber 2 near the first transverse press roll 28, the first longitudinal press roll 30 is provided with two sets, the second longitudinal press roll 31 is rotatably mounted at one side inside the vacuum chamber 2 near the second transverse press roll 29, the film is horizontally conveyed through the two sets of the first transverse press rolls 28, then the film is turned ninety degrees through the two sets of the first longitudinal press rolls 30, and the second longitudinal press roll 31, and then the film is turned ninety degrees through the second transverse press rolls 29.
In this embodiment, as shown in fig. 9, the tensioning mechanism 14 includes a sleeve 34, a slide bar 35 and a conveying roller 36, the sleeve 34 is fixed at one side of the vacuum chamber 2 near the film turnover mechanism 13, the slide bar 35 is slidably mounted in the sleeve 34, the conveying roller 36 is rotatably mounted at one end of the slide bar 35 far away from the sleeve 34, the conveying roller 36 is horizontally arranged between the conveying roller 36 and the first and second longitudinal press rollers 30 and 31, a limiting block 37 is fixed at one end of the conveying roller 36 far away from the conveying roller 36, a spring 38 is sleeved outside the slide bar 35, the spring 38 is positioned between the limiting block 37 and the inner end of the sleeve 34, the conveying roller 36 is attached to the inner side of the film in the film conveying process, and the film is tightly fixed under the elastic force of the spring 38.
In this embodiment, as shown in fig. 7, the outer end of the vacuum chamber 2 is provided with the access door 32, the access door 32 is provided with three groups, and the distances between the adjacent access doors 32 are the same, so that the vacuum chamber 2 can be overhauled at different positions conveniently, and the use is more convenient.
In this embodiment, as shown in fig. 7, a transparent window 33 is provided at the middle position of the end of the vacuum chamber 2 to facilitate the observation of the condition of the coating.
As shown in fig. 1 to 9, the present embodiment provides a process for manufacturing a dual-sided transparent conductive oxide film, which comprises the following steps:
step 1: before use, the film outside the film unreeling roll 8 passes through the inside of the static eliminating mechanism 11 and the dust absorbing mechanism 12, then passes through the through groove 5 on the partition board 4, rotates through the film turning mechanism 13 after passing through the through groove 5, and is tensioned through the tensioning mechanism 14, and passes through the inside of the through groove 5 again after turning for one hundred eighty degrees, and is wound on the film reeling roll 9 on the top of the guide roller 10;
step 2: when the film winding device is used, the vacuum pump 3 is started to vacuumize the interior of the vacuum chamber 2, the motor 19 is started, the motor 19 rotates, the film unwinding roll 8 on the first rotating rod 16 is controlled to rotate, the driving gear 18 on the first rotating rod 16 rotates in the process of releasing the film by the film unwinding roll 8, and the film winding roll 9 is controlled to rotate in cooperation with the driven gear 20 on the second rotating rod 17, so that the film winding process is performed simultaneously;
step 3: when the film passes through the inside of the static eliminating mechanism 11, the static eliminating brush 22 is attached to the upper surface and the lower surface of the film to eliminate static, and then the negative pressure fan 26 in the dust collecting mechanism 12 is started to absorb dust on the outer surface of the film and store the dust in the dust collecting bin 25;
step 4: after the film passes through the bottom of the coating source 6, the coating source 6 is started to coat the upper and lower surfaces of the film simultaneously.
The above description is merely a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art will be able to apply equivalents and modifications according to the technical solution and the concept of the present invention within the scope of the present invention disclosed in the present invention.
Claims (5)
1. A coated device for producing a double-sided transparent conductive oxide film, characterized in that: the vacuum pump comprises a base (1), a vacuum chamber (2) is fixed at the top of the base (1), a vacuum pump (3) is arranged at one side of the vacuum chamber (2), partition boards (4) are respectively fixed at two sides of the inner part of the vacuum chamber (2), through grooves (5) are symmetrically formed in the partition boards (4), a coating source (6) is arranged at the top of the inner part of the vacuum chamber (2), an unwinding roll (8) is arranged at the top of one side of the vacuum chamber (2), a film winding (9) is arranged at the bottom of one side, close to the unwinding roll (8), of the vacuum chamber (2), a driving mechanism (7) is arranged at one side, close to the unwinding roll (8), of the inner part of the vacuum chamber (2), a guide roller (10) is arranged at one side, close to the unwinding roll (9), of the inner part of the vacuum chamber (2), close to the unwinding roll (9), of the vacuum chamber (2), a film (13) is arranged at one side, close to the inner part of the unwinding roll (13), of the vacuum chamber (2), and a film (13) is arranged at one side, close to the film turning mechanism (13);
a baffle plate (15) is fixed between the two groups of baffle plates (4), and the baffle plate (15) is positioned at the outer side of the film;
the driving mechanism (7) comprises a first rotating rod (16), a second rotating rod (17) and a driving gear (18), wherein the first rotating rod (16) is rotatably arranged on the vacuum chamber (2), the second rotating rod (17) is positioned at the bottom of the first rotating rod (16), the second rotating rod (17) is rotatably connected with the inner wall of the vacuum chamber (2), the film unwinding roll (8) is positioned on the first rotating rod (16), the film winding roll (9) is positioned on the second rotating rod (17), one end of the first rotating rod (16) is fixedly provided with the driving gear (18), one end, close to the driving gear (18), of the second rotating rod (17) is fixedly provided with the driven gear (20), the driving gear (18) is meshed with the driven gear (20), a motor (19) is arranged on the outer side of the vacuum chamber (2), and the output end of the motor (19) is connected with the first rotating rod (16).
The dust collection mechanism (12) comprises a U-shaped tube (23), a cover plate (24) and a dust collection bin (25), wherein the U-shaped tube (23) is positioned in the vacuum chamber (2), the top and the bottom of the inner side of the U-shaped tube (23) are both provided with the cover plate (24), a film between the film unreeling roll (8) and the film reeling roll (9) passes through the inner side of the U-shaped tube (23), the dust collection bin (25) is arranged on the outer side of the vacuum chamber (2), the dust collection bin (25) is communicated with the inner side of the U-shaped tube (23), one end of the inner side of the dust collection bin (25) is provided with a negative pressure fan (26), and the other end of the inner side of the dust collection bin (25) is provided with a filter screen (27);
a static electricity eliminating mechanism (11) is arranged in the vacuum chamber (2), and the static electricity eliminating mechanism (11) is positioned between the film unreeling roll (8) and the dust collecting mechanism (12);
film tilting mechanism (13) are including first horizontal compression roller (28), second horizontal compression roller (29), first vertical compression roller (30) and second vertical compression roller (31), first horizontal compression roller (28) are provided with two sets of, and first horizontal compression roller (28) rotate and install the one end in vacuum chamber (2) inside, second horizontal compression roller (29) are provided with two sets of, second horizontal compression roller (29) are located same horizontal plane with first horizontal compression roller (28), second horizontal compression roller (29) rotate and install the one end in keeping away from first horizontal compression roller (28), first vertical compression roller (30) are installed in the rotation of one side that is close to first horizontal compression roller (28) in vacuum chamber (2) inside, first vertical compression roller (30) are provided with two sets of, second vertical compression roller (31) are installed in the rotation of one side that is close to second horizontal compression roller (29) in vacuum chamber (2) inside, second vertical compression roller (31) are provided with two sets of.
2. The apparatus for coating a transparent conductive oxide film on both surfaces according to claim 1, wherein: the static eliminating mechanism (11) comprises a U-shaped plate (21) and a static eliminating brush (22), the static eliminating brush (22) is fixed at the inner top and the inner bottom of the U-shaped plate (21), and a film between the film unreeling roll (8) and the film reeling roll (9) passes through the inside of the U-shaped plate (21).
3. The apparatus for coating a double-sided transparent conductive oxide film according to claim 2, wherein: the tensioning mechanism (14) comprises a sleeve (34), a sliding rod (35) and a conveying roller (36), wherein the sleeve (34) is fixed on one side, close to the film turnover mechanism (13), of the inside of the vacuum chamber (2), the sliding rod (35) is slidably mounted in the sleeve (34), the conveying roller (36) is rotatably mounted at one end, far away from the sleeve (34), of the sliding rod (35), the conveying roller (36) is horizontally arranged between the conveying roller (36) and the first longitudinal pressing roller (30) and the second longitudinal pressing roller (31), a limiting block (37) is fixed at one end, far away from the conveying roller (36), of the conveying roller (36), a spring (38) is sleeved on the outer side of the sliding rod (35), and the spring (38) is located between the limiting block (37) and the inner end of the sleeve (34).
4. A coating apparatus for producing a double-sided transparent conductive oxide film according to claim 3, wherein: an access door (32) is arranged at the outer end part of the vacuum chamber (2), three groups of access doors (32) are arranged, and the distances between adjacent access doors (32) are the same.
5. The apparatus for coating a transparent conductive oxide film on both surfaces according to claim 4, wherein: a transparent window (33) is arranged at the middle position of the end part of the vacuum chamber (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110368849.4A CN113201721B (en) | 2021-04-06 | 2021-04-06 | Coating equipment for manufacturing double-sided transparent conductive oxide film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110368849.4A CN113201721B (en) | 2021-04-06 | 2021-04-06 | Coating equipment for manufacturing double-sided transparent conductive oxide film |
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| CN113201721A CN113201721A (en) | 2021-08-03 |
| CN113201721B true CN113201721B (en) | 2023-07-14 |
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| CH501486A (en) * | 1969-01-07 | 1971-01-15 | Windmoeller & Hoelscher | Laying-down and pull-off device for blown plastic tubular films |
| US4760627A (en) * | 1987-03-23 | 1988-08-02 | Enrique Schele | Apparatus for an oscillating pinch roll assembly utilized in the extrusion of blown films |
| DE10040688A1 (en) * | 2000-08-19 | 2002-02-28 | Bernd Lagemann | Woven reinforcement material comprises a glass fiber netting, passed through a fixing zone to be coated by latex directly after weaving and before its path is deflected by a roller |
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| US6708919B2 (en) * | 2002-03-19 | 2004-03-23 | Kimberly-Clark Worldwide, Inc. | Turning bar assembly for use with a moving web |
| CN1712554A (en) * | 2005-05-11 | 2005-12-28 | 上海奥移电器有限公司 | Double-face metallation film coating machine from high vacuum evaporation |
| CN204429787U (en) * | 2014-12-17 | 2015-07-01 | 扬州万润薄膜有限公司 | A kind of film dust arrester with function of eliminating static |
| CN104611680B (en) * | 2015-02-09 | 2016-11-23 | 常州工学院 | A kind of fast two-sided reciprocal continuous high-efficient plated film magnetic-control sputtering coiling film coating machine of quick change target |
| CN210341039U (en) * | 2019-06-18 | 2020-04-17 | 绍兴诚宇薄膜科技有限公司 | Manufacturing equipment of aluminizer |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB770723A (en) * | 1955-05-06 | 1957-03-20 | Levey Fred K H Co Inc | Improvements in turning bars for web material |
| CH501486A (en) * | 1969-01-07 | 1971-01-15 | Windmoeller & Hoelscher | Laying-down and pull-off device for blown plastic tubular films |
| US4760627A (en) * | 1987-03-23 | 1988-08-02 | Enrique Schele | Apparatus for an oscillating pinch roll assembly utilized in the extrusion of blown films |
| DE10040688A1 (en) * | 2000-08-19 | 2002-02-28 | Bernd Lagemann | Woven reinforcement material comprises a glass fiber netting, passed through a fixing zone to be coated by latex directly after weaving and before its path is deflected by a roller |
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| CN113201721A (en) | 2021-08-03 |
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Address after: No. 66 Jingxiu Road, Yizheng Economic Development Zone, Yangzhou City, Jiangsu Province, 225000 Applicant after: Yangzhou Wanrun Photoelectric Technology Co.,Ltd. Address before: No. 66 Jingxiu Road, Yizheng Economic Development Zone, Yangzhou City, Jiangsu Province, 225000 Applicant before: YANGZHOU ALVIN FILM CO.,LTD. |
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