CN113198404A - Hollow cathode array discharge jet device - Google Patents
Hollow cathode array discharge jet device Download PDFInfo
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- CN113198404A CN113198404A CN202110614563.XA CN202110614563A CN113198404A CN 113198404 A CN113198404 A CN 113198404A CN 202110614563 A CN202110614563 A CN 202110614563A CN 113198404 A CN113198404 A CN 113198404A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0845—Details relating to the type of discharge
- B01J2219/0847—Glow discharge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
Abstract
The invention discloses a hollow cathode array discharge jet device, and belongs to the technical field of material surface treatment. Comprises a hollow cathode array electrode discharge generating device and a glow jet generating device; the glow jet generating device comprises a high-pressure air supply cavity, a low-pressure working cavity, a negative pressure generating device and a glow jet area control device; the high-pressure air supply cavity is provided with an adjustable air resistance and an electrode cathode side connecting port, and the electrode cathode side connecting port is hermetically connected with the outer wall of an electrode bottom lining of the hollow cathode array electrode; the low-pressure working cavity is provided with an electrode anode side connector and a feed inlet sealing door; the low-pressure working cavity is connected with a negative pressure generating device through a negative pressure pipe so as to generate negative pressure in the low-pressure working cavity; the anode side connector of the electrode is hermetically connected with the outer wall of the electrode bottom lining of the hollow cathode array electrode; the glow jet area control device enables the high-pressure air supply cavity to keep a given air pressure. The method can be applied to the field of material surface treatment, and has the characteristics of good treatment effect, convenience in implementation and the like.
Description
Technical Field
The invention relates to the technical field of material surface treatment.
Background
In the field of material surface treatment at present, Dielectric Barrier (DBD) and atmospheric pressure jet discharge (APPJ) plasma sources under high-frequency voltage are often applied, the requirement on the working frequency of a power supply is high, the frequency is often 10-50kHz, the uniformity of plasmas generated by discharge jet is poor and is only about 30-40%, the energy of discharge electrons is low and is about 0.1-1.0 eV, the molecular structure of a stable material is difficult to damage, and the material treatment effect is poor.
Disclosure of Invention
The invention aims to provide a hollow cathode array discharge jet device which can be applied to the field of material surface treatment and has the characteristics of good treatment effect, convenience in implementation and the like.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a hollow cathode array discharge jet device comprises a hollow cathode array electrode discharge generating device and a glow jet generating device;
the hollow cathode array electrode discharge generating device comprises a high-voltage direct-current power supply and a hollow cathode array electrode, wherein the high-voltage direct-current power supply supplies power to the hollow cathode array electrode so as to form a power supply loop circuit connection structure of the hollow cathode array electrode, and a cathode side glow discharge area is generated on the cathode side of the hollow cathode array electrode;
the glow jet generating device comprises a high-pressure air supply cavity, a low-pressure working cavity, a negative pressure generating device and a glow jet area control device; the controllable glow jet area is generated on the anode side of the hollow cathode array electrode;
the high-pressure air supply cavity is provided with an adjustable air resistance and an electrode cathode side connecting port, the adjustable air resistance is used for adjusting the air resistance of the atmosphere entering the high-pressure air supply cavity, and the electrode cathode side connecting port is hermetically connected with the outer wall of an electrode bottom lining of the hollow cathode array electrode, so that the cathode side of the hollow cathode array electrode is positioned in the high-pressure air supply cavity;
the low-pressure working cavity is provided with an electrode anode side connector and a feed inlet sealing door;
the low-pressure working cavity is connected with a negative pressure generating device through a negative pressure pipe so as to generate negative pressure in the low-pressure working cavity;
the anode side connector of the electrode is hermetically connected with the outer wall of the electrode bottom lining of the hollow cathode array electrode, so that the anode side of the hollow cathode array electrode is positioned in the low-pressure working cavity; the feed inlet sealing door is used for placing or taking out materials to be processed into or from the low-pressure working cavity, and a sealing connection structure is arranged between the feed inlet sealing door and the wall of the low-pressure working cavity so as to keep the air seal of the low-pressure working cavity;
the glow jet area control device comprises a pressure transmitter PT, a pressure regulating valve PV and a pressure regulator PC; the pressure transmitter PT is used for detecting absolute air pressure in the high-pressure air supply cavity, the pressure regulating valve PV is installed on the negative pressure pipe, and the pressure regulator PC is used for receiving an absolute air pressure signal in the high-pressure air supply cavity detected by the pressure transmitter PT and outputting a control signal to control the opening degree of the pressure regulating valve PV so as to enable the high-pressure air supply cavity to keep given air pressure.
The invention further improves that:
the negative pressure generating device 7 is a vacuum pump.
The pressure regulator PC controls the absolute air pressure of the high-pressure air supply cavity 1 to be 35mbar to 75 mbar.
The high-voltage direct-current power supply adjusts the power supply voltage range to be 100-400V; in the process that air in the high-pressure air supply cavity flows through the cathode hole to the low-pressure working cavity, the air resistance can be adjusted to control the airflow range of the cathode hole to be 30-55 m/s, so that the jet flow length of the glow jet flow area is 8-9 cm.
The pressure regulator PC in the glow jet area control device adopts a programmable logic controller PLC.
Adopt the produced beneficial effect of above-mentioned technical scheme to lie in:
the invention utilizes a hollow cathode glow discharge mode under direct current voltage, and under the cooperation of a glow jet generating device, the cathode side of the hollow cathode array electrode works in a high-pressure gas supply cavity under the negative pressure state of 35-75 mbar absolute pressure to provide a reaction area for high-density plasma at the cathode side, and the electron density can reach 1022-1m, the power supply voltage is only 100-400V, the uniformity of the space charged particles is more than 96%, and the electron energy is up to 10-13 eV; due to the absolute pressure of the low-pressure working chamber in the glow jet generator<The plasma counter diffusion device comprises a high-pressure air supply cavity, a low-pressure working cavity and a high-pressure air supply cavity, wherein the high-pressure air supply cavity and the low-pressure working cavity are combined to enable plasma to be in counter diffusion, the absolute pressure of the low-pressure working cavity is 0.7-1.3 mbar, a diffusion environment is provided for discharge particles, atomic particles, metastable particles, positive ions, negative ions and electrons are transported conveniently, a stable glow jet area is formed, diffusion areas and jet characteristics of different radial and axial dimensions can be achieved by controlling the air pressure of the low-pressure working cavity, the jet length can reach 8-9 cm, and the radial diffusion radius is 40cm multiplied by 40 cm. Can be used for material tablesThe flour is processed, and the application potential is huge.
The method can be applied to the field of material surface treatment, and has the characteristics of good treatment effect, convenience in implementation and the like.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the hollow cathode array electrode of fig. 1.
In the drawings: 1. a high pressure gas supply cavity; 2. a hollow cathode array electrode; 3. a high voltage direct current power supply; 4. cathode side glow discharge area is generated on cathode side; 5. a low pressure working chamber; 6. a glow jet zone; 7. a negative pressure generating device; 8. the air resistance can be adjusted; 9. an electrode substrate; 10. and a cathode hole.
Detailed Description
The invention will be described in further detail below with reference to the figures and specific examples.
The standard parts used in the invention can be purchased from the market, the special-shaped parts can be customized according to the description and the description of the attached drawings, and the specific connection mode of each part adopts the conventional means of mature bolts, rivets, welding, sticking and the like in the prior art, and the detailed description is not repeated.
As can be seen from the embodiments shown in fig. 1-2, the present embodiment includes a hollow cathode array electrode discharge generating device and a glow jet generating device;
the hollow cathode array electrode discharge generating device comprises a high-voltage direct-current power supply 3 and a hollow cathode array electrode 2, wherein the high-voltage direct-current power supply 3 supplies power to the hollow cathode array electrode 2 to form a power supply loop circuit connection structure of the hollow cathode array electrode 2, so that a cathode side glow discharge area 4 is generated on the cathode side of the hollow cathode array electrode 2;
the glow jet generating device comprises a high-pressure air supply cavity 1, a low-pressure working cavity 5, a negative pressure generating device 7 and a glow jet area control device; for generating a controllable glow jet region 6 on the anode side of the hollow cathode array electrode 2;
the high-pressure air supply cavity 1 is provided with an adjustable air resistance 8 and an electrode cathode side connecting port, the adjustable air resistance 8 is used for adjusting the air resistance of the atmosphere entering the high-pressure air supply cavity 1, and the electrode cathode side connecting port is hermetically connected with the outer wall of an electrode bottom lining 9 of the hollow cathode array electrode 2, so that the cathode side of the hollow cathode array electrode 2 is positioned in the high-pressure air supply cavity 1;
the low-pressure working cavity 5 is provided with an electrode anode side connector and a feed inlet sealing door (not shown in the figure);
the low-pressure working cavity 5 is connected with a negative pressure generating device 7 through a negative pressure pipe so as to generate negative pressure in the low-pressure working cavity 5;
a connecting port on the anode side of the electrode is hermetically connected with the outer wall of an electrode bottom lining 9 of the hollow cathode array electrode 2, so that the anode side of the hollow cathode array electrode 2 is positioned in the low-pressure working cavity 5; the cathode hole 10 provides through connection between the high-pressure air supply cavity 1 and the low-pressure working cavity 5, the feed inlet sealing door is used for placing or taking out materials to be processed into or from the low-pressure working cavity 5, and a sealing connection structure is arranged between the feed inlet sealing door and the wall of the low-pressure working cavity 5 so as to keep the air sealing of the low-pressure working cavity 5;
the glow jet area control device comprises a pressure transmitter PT, a pressure regulating valve PV and a pressure regulator PC; the pressure transmitter PT is used for detecting absolute air pressure in the high-pressure air supply cavity 1, the pressure regulating valve PV is installed on the negative pressure pipe, and the pressure regulator PC is used for receiving an absolute air pressure signal in the high-pressure air supply cavity 1 detected by the pressure transmitter PT and outputting a control signal to control the opening degree of the pressure regulating valve PV so as to keep given air pressure in the high-pressure air supply cavity 1.
The negative pressure generating device 7 is a vacuum pump.
The pressure regulator PC controls the absolute air pressure of the high-pressure air supply cavity 1 to be 35mbar to 75 mbar.
The high-voltage direct-current power supply 3 adjusts the power supply voltage range to be 100-400V; in the process that air flow in the high-pressure air supply cavity 1 flows from the cathode hole 10 to the low-pressure working cavity 5, the adjustable air resistance 8 controls the air flow range of the cathode hole 10 to be 30-55 m/s, so that the jet flow length of the glow jet flow area 6 is 8-9 cm.
The pressure regulator PC in the glow jet area control device adopts a programmable logic controller PLC.
The working principle is as follows:
the material to be processed is placed into the low-pressure working chamber 5 through the feed inlet sealing door, and then the feed inlet sealing door is closed to keep the air seal of the low-pressure working chamber 5; the negative pressure generating device 7 is started, the absolute air pressure of the high-pressure air supply cavity 1 is controlled to be 35mbar to 75mbar through the glow jet area control device, and the high-voltage direct current power supply 3 adjusts the power supply voltage range within 100V to 400V; making the cathode side of the hollow cathode array electrode 2 generate a cathode side glow discharge area 4; in the process that air in the high-pressure air supply cavity 1 flows through the cathode holes 10 to the low-pressure working cavity 5, the cathode holes 10 form a passage between the high-pressure air supply cavity 1 and the low-pressure working cavity 5 and also form air resistance between the high-pressure air supply cavity 1 and the low-pressure working cavity 5, the number, the diameter and the length of the cathode holes 10 determine the size of the air resistance, the size of the air resistance is positively correlated with the pressure difference between the high-pressure air supply cavity 1 and the low-pressure working cavity 5, the absolute pressure of the low-pressure working cavity is controlled to be 0.7-1.3 mbar under the combined action of the glow jet generating device and the air resistance, a diffusion environment is provided for discharge particles, the air flow of the cathode holes 10 is adjusted through the adjustable air resistance 8, the range of the air flow is controlled to be 30-55 m/s, the jet area 6 is 8-9 cm in length, and therefore surface treatment is carried out on materials to be treated.
Claims (5)
1. A hollow cathode array discharge fluidic device, characterized in that: comprises a hollow cathode array electrode discharge generating device and a glow jet generating device;
the hollow cathode array electrode discharge generating device comprises a high-voltage direct-current power supply (3) and a hollow cathode array electrode (2), wherein the high-voltage direct-current power supply (3) supplies power to the hollow cathode array electrode (2) to form a power supply loop circuit connecting structure of the hollow cathode array electrode (2), so that a cathode side glow discharge area (4) is generated on the cathode side of the hollow cathode array electrode (2);
the glow jet generating device comprises a high-pressure air supply cavity (1), a low-pressure working cavity (5), a negative pressure generating device (7) and a glow jet area control device; for generating a controllable glow jet zone (6) on the anode side of the hollow cathode array electrode (2);
the high-pressure air supply cavity (1) is provided with an adjustable air resistance (8) and an electrode cathode side connecting port, the adjustable air resistance (8) is used for adjusting the air resistance of the atmosphere entering the high-pressure air supply cavity (1), and the electrode cathode side connecting port is hermetically connected with the outer wall of an electrode bottom lining (9) of the hollow cathode array electrode (2), so that the cathode side of the hollow cathode array electrode (2) is positioned in the high-pressure air supply cavity (1);
the low-pressure working cavity (5) is provided with an electrode anode side connector and a feed inlet sealing door;
the low-pressure working cavity (5) is connected with a negative pressure generating device (7) through a negative pressure pipe so as to generate negative pressure in the low-pressure working cavity (5);
the anode side connecting port of the electrode is hermetically connected with the outer wall of an electrode bottom lining (9) of the hollow cathode array electrode (2), so that the anode side of the hollow cathode array electrode (2) is positioned in the low-pressure working cavity (5); the feed inlet sealing door is used for placing or taking out materials to be processed into or from the low-pressure working cavity (5), and a sealing connection structure is arranged between the feed inlet sealing door and the wall of the low-pressure working cavity (5) so as to keep the air sealing of the low-pressure working cavity (5);
the glow jet area control device comprises a pressure transmitter PT, a pressure regulating valve PV and a pressure regulator PC; the pressure transmitter PT is used for detecting absolute air pressure in the high-pressure air supply cavity (1), the pressure regulating valve PV is installed on the negative pressure pipe, and the pressure regulator PC is used for receiving an absolute air pressure signal in the high-pressure air supply cavity (1) detected by the pressure transmitter PT and outputting a control signal to control the opening degree of the pressure regulating valve PV so as to enable the high-pressure air supply cavity (1) to keep given air pressure.
2. The hollow cathode array discharge fluidic device of claim 1, wherein: the negative pressure generating device (7) is a vacuum pump.
3. A hollow cathode array discharge fluidic device according to claim 1 or 2, wherein: the pressure regulator PC controls the absolute air pressure of the high-pressure air supply cavity (1) to be 35mbar to 75 mbar.
4. A hollow cathode array discharge fluidic device according to claim 3, wherein: the high-voltage direct-current power supply (3) adjusts the power supply voltage range to be 100-400V; in the process that air in the high-pressure air supply cavity (1) flows to the low-pressure working cavity (5) through the cathode hole (10), the adjustable air resistance (8) controls the air flow range of the cathode hole (10) to be 30-55 m/s, so that the jet flow length of the glow jet flow area 6 is 8-9 cm.
5. The hollow cathode array discharge fluidic device of claim 4, wherein: and a pressure regulator PC in the glow jet area control device adopts a programmable logic controller PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110614563.XA CN113198404B (en) | 2021-06-02 | 2021-06-02 | Hollow cathode array discharge jet device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110614563.XA CN113198404B (en) | 2021-06-02 | 2021-06-02 | Hollow cathode array discharge jet device |
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| CN113198404A true CN113198404A (en) | 2021-08-03 |
| CN113198404B CN113198404B (en) | 2022-07-22 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH435215A (en) * | 1957-10-02 | 1967-05-15 | Berghaus Elektrophysik Anst | Process for performing chemical or physical processes |
| CN204014247U (en) * | 2014-09-02 | 2014-12-10 | 厦门大学 | A kind of acceleration jet flow generating apparatus |
| CN105848399A (en) * | 2016-05-19 | 2016-08-10 | 北京交通大学 | Glow discharge jet plasma generating structure |
| CN106973482A (en) * | 2017-05-17 | 2017-07-21 | 北京交通大学 | A kind of petal type glow discharge jet plasma generating structure |
| CN108848604A (en) * | 2018-07-18 | 2018-11-20 | 中国科学院电工研究所 | A kind of portable micro-hollow cathode discharge plasma fluidic device |
-
2021
- 2021-06-02 CN CN202110614563.XA patent/CN113198404B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH435215A (en) * | 1957-10-02 | 1967-05-15 | Berghaus Elektrophysik Anst | Process for performing chemical or physical processes |
| CN204014247U (en) * | 2014-09-02 | 2014-12-10 | 厦门大学 | A kind of acceleration jet flow generating apparatus |
| CN105848399A (en) * | 2016-05-19 | 2016-08-10 | 北京交通大学 | Glow discharge jet plasma generating structure |
| CN106973482A (en) * | 2017-05-17 | 2017-07-21 | 北京交通大学 | A kind of petal type glow discharge jet plasma generating structure |
| CN108848604A (en) * | 2018-07-18 | 2018-11-20 | 中国科学院电工研究所 | A kind of portable micro-hollow cathode discharge plasma fluidic device |
Non-Patent Citations (1)
| Title |
|---|
| 何寿杰等: "低气压氩气空心阴极放电自脉冲特性", 《高电压技术》 * |
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