CN113176231A - Spectrometer for micro-area analysis - Google Patents
Spectrometer for micro-area analysis Download PDFInfo
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- CN113176231A CN113176231A CN202110301303.7A CN202110301303A CN113176231A CN 113176231 A CN113176231 A CN 113176231A CN 202110301303 A CN202110301303 A CN 202110301303A CN 113176231 A CN113176231 A CN 113176231A
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- optical fiber
- spectrometer
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- 238000004458 analytical method Methods 0.000 title claims abstract description 10
- 239000013307 optical fiber Substances 0.000 claims abstract description 66
- 230000002093 peripheral effect Effects 0.000 claims abstract description 23
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 239000000835 fiber Substances 0.000 claims description 15
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000010183 spectrum analysis Methods 0.000 description 6
- 238000002189 fluorescence spectrum Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000000701 chemical imaging Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000012306 spectroscopic technique Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N2021/559—Determining variation of specular reflection within diffusively reflecting sample
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- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses a spectrometer for micro-area analysis. The spatial resolution of existing spectrometers is typically greater than 10 μm. The spectrometer comprises a spectrometer body, a light source, a Y-shaped optical fiber and a focusing lens. The Y-shaped optical fiber is provided with a section of trunk part and two sections of branch parts, the trunk part comprises an inner core optical fiber and a plurality of peripheral optical fibers which are symmetrically arranged around the inner core optical fiber, the inner core optical fiber extends to be used as one branch part, and the plurality of peripheral optical fibers extend to be gathered into the other branch part. The bifurcation part formed by the inner core optical fiber of the Y-shaped optical fiber is connected with an optical signal output port of the light source, and the bifurcation part formed by the peripheral optical fiber is connected with an optical signal input port of the spectrometer body; the focusing lens is arranged right below the port of the trunk part of the Y-shaped optical fiber. The invention has simple structure, high spatial resolution, low cost and convenient use, and can analyze 1 mu m order of micro samples.
Description
Technical Field
The invention belongs to the technical field of spectral analysis, and relates to a spectrometer for micro-area analysis.
Background
Fluorescence spectrum and reflection spectrometer are two common spectrum analysis instruments, can be used for analyzing the luminous performance and the reflection performance of an object, and have wide application in the aspects of material luminous performance research, object surface color measurement, criminal identification, artwork authenticity identification and the like. Theoretically, these two spectroscopic techniques are well developed, but they are generally directed to samples with large size, and have a disadvantage in the measurement of micro-areas of the order of 1 μm. The spectral information of a local area can be acquired by a hyperspectral imaging technology, but the existing hyperspectral imaging equipment is expensive, the spatial resolution is generally more than 10 mu m, and only a reflection spectrum can be measured, but not a fluorescence spectrum of a micro area with the magnitude of 1 mu m.
Disclosure of Invention
The invention aims to provide a spectrometer for micro-area analysis, aiming at the defects of the prior art.
The spectrometer comprises a spectrometer body, a light source, a Y-shaped optical fiber and a focusing lens.
The Y-shaped optical fiber is provided with a trunk part and two branch parts; the trunk part comprises an inner core optical fiber and a plurality of peripheral optical fibers which are symmetrically arranged around the inner core optical fiber; one core optical fiber extends to serve as a branch part, and a plurality of peripheral optical fibers extend to be gathered into another branch part.
The bifurcation part formed by the inner core optical fiber of the Y-shaped optical fiber is connected with an optical signal output port of the light source, and the bifurcation part formed by the peripheral optical fiber is connected with an optical signal input port of the spectrometer body; the focusing lens is arranged right below the port of the trunk part of the Y-shaped optical fiber.
The micro-area analysis spectrometer provided by the invention can be used for analyzing 1-micrometer-scale micro samples, such as natural and artificially synthesized textile fibers, hair, fine fragments collected on cultural relics and artworks and the like, and also can be used for analyzing micro-LED and micro-LED light-emitting devices with small sizes, namely micrometer-scale particle luminescence and the like. The spectrometer for micro-area analysis has the characteristics of simple structure, high spatial resolution, low cost, convenience in use and the like, and can realize line and surface scanning of sample reflection and fluorescence characteristics by combining a 2-dimensional displacement platform.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of a trunk portion of the Y-shaped optical fiber of FIG. 1;
fig. 3 is a schematic view of a detection light path.
Detailed Description
For light beams in the visible light band, the minimum spot diameter after being focused by the lens can be less than 1 μm. Therefore, if the diameter of the light beam incident on the sample is controlled to be within 1 μm, it is possible to measure the reflection spectrum and fluorescence spectrum of an object having a size of the order of 1 μm.
As shown in fig. 1, a spectrometer for micro-area analysis includes a spectrometer body 1, a light source 2, a Y-shaped optical fiber 3, and a focusing lens 4. And carrying out spectral analysis through the spectrometer body to obtain a measurement result. The spectrometer body adopts a conventional micro optical fiber spectrometer without change. The light source 2 is a light source for various spectrometers and has an optical signal output port.
The Y-shaped optical fiber 3 is a mature optical fiber product having a trunk portion and two branch portions. The trunk portion structure is shown in fig. 2, and includes a core optical fiber 31 and a plurality of peripheral optical fibers 32 symmetrically disposed around the core optical fiber 31. A core optical fiber 31 extends as one furcation portion and a plurality of peripheral optical fibers 32 extend and merge into another furcation portion.
The bifurcated part formed by the inner core fiber 31 of the Y-shaped fiber is connected to the optical signal output port of the light source, and the bifurcated part formed by the peripheral fiber 32 is connected to the optical signal input port of the spectrometer. The focusing lens 4 is arranged right below the port of the trunk part of the Y-shaped optical fiber.
As shown in fig. 1, during detection, the sample 5 to be detected is placed under the focusing lens 4, the light source 2 is turned on, and the position of the focusing lens 4 is adjusted. The diameter of the main part of the Y-shaped optical fiber is 50-100 μm, detection light is emitted from the outlet of the main part through the inner core optical fiber 31, the focusing lens 4 shrinks the light beam to be within 1 μm, and a beam spot incident on the surface of a sample to be detected is close to the diffraction limit of light. The minimum beam spot at the focal point of the lens may be less than 1 μm for the visible wavelength band. If the distance between the sample to be measured and the focusing lens is exactly equal to the focal length of the focusing lens, namely the sample is placed at the focal point of the focusing lens, the illuminated area of the sample can be smaller than 1 μm during measurement, and therefore, the reflected light of the sample or the fluorescence emitted by the sample only comes from the area. After the reflected light is diffused by the focusing lens, the parallel reflected light/fluorescence reversely enters the peripheral optical fiber, as shown in fig. 3, and is sent to the spectrometer body for spectral analysis after being gathered. The specific use scenarios are as follows:
1. a reflection spectrometer:
in which case the light source is white light. The white light enters the inner core optical fiber after being focused, the light emitted from the inner core optical fiber is also white light, and the diameter of the light beam is equal to that of the inner core optical fiber. The light beam emitted from the inner core fiber is focused by the focusing lens and then is incident on a sample to be measured. If the sample to be measured is not a perfect mirror surface, there is generally diffuse reflection of the reflected light from the sample to be measured. The diffusely reflected light from the sample to be measured passes back through the focusing lens. Because the sample to be measured is positioned at the focus of the convex lens, the reflected light which reversely penetrates through the focusing lens becomes parallel light, and part of the parallel light enters the peripheral optical fiber of the Y-shaped optical fiber. The reflected light output from the peripheral optical fiber enters a micro optical fiber spectrometer for spectral analysis, so that the reflection performance of the sample, the color of the sample and the like can be measured.
For a sample with a very smooth surface, such as a semiconductor wafer, the diffuse reflection light is very weak, and the light reflected by the sample returns to the core fiber after passing through the lens in a reverse direction, so that the peripheral fiber cannot receive the reflection light or the intensity of the received reflection light is too weak. In order to avoid that no reflected light enters the peripheral optical fiber due to insufficient diffuse reflection light on the surface of the sample when a smooth sample is measured, in the reflection-type spectrometer provided by the application, a small angle deviation exists between the ports of the trunk part of the Y-shaped optical fiber, the central axes of the inner core optical fiber and the peripheral optical fiber so as to ensure that enough reflected light enters the peripheral optical fiber, but the angle is not too large so as to prevent the light spot from becoming an elliptical shape to influence the spatial resolution, and is generally preferably 3-5 degrees.
2. A fluorescence spectrometer:
in this case, the light source is monochromatic light or laser light with a specific wavelength, and the sample can be excited to emit light. The laser light enters the inner core fiber after being focused, the light emitted from the inner core fiber is also laser light, and the diameter of the light beam is equal to that of the inner core fiber. The light beam emitted from the inner core fiber is focused by the focusing lens and then is incident on a sample to be measured. If the sample to be measured can fluoresce under laser irradiation, the emitted fluorescence is generally isotropic, similar to the light emitted by a point source. The fluorescence emitted by the sample to be measured reversely passes through the focusing lens, and because the sample is positioned at the focus of the focusing lens, the fluorescence which reversely passes through the focusing lens becomes parallel light, and part of the parallel light enters the peripheral optical fiber of the Y-shaped optical fiber. The reflected light output from the peripheral optical fiber enters a micro optical fiber spectrometer for spectral analysis, so that the fluorescence property of the sample can be measured.
3. Line and surface scanning:
the sample to be measured or the Y-shaped optical fiber and the focusing lens are arranged on a 2-dimensional displacement platform, so that the linear scanning or the surface scanning of the sample to be measured can be realized, and the 1-dimensional and 2-dimensional reflection/fluorescence spectrum image can be obtained.
The spectrometer can analyze 1 mu m-level tiny samples, such as natural and artificial textile fibers, hair, fine fragments collected on cultural relics and artworks, and the like, and can also analyze micro-LED and micro-LED light-emitting devices with small sizes, namely micron-level particle light emission, and the like. The spectrometer has the characteristics of simple structure, high spatial resolution, low cost, convenience in use and the like, and can realize line and surface scanning of the reflection characteristic and the fluorescence characteristic of a sample by combining a 2-dimensional displacement platform. In addition, a small angle deviation exists between the central axes of the inner core optical fiber and the peripheral optical fiber of the Y-shaped optical fiber in the reflection type spectrometer, so that the situation that no or insufficient diffuse reflection light enters the peripheral optical fiber due to the fact that the surface of a sample to be measured is too smooth is avoided.
Claims (2)
1. The utility model provides a spectrometer is used in micro-area analysis, includes spectrum appearance body (1) and light source (2), its characterized in that:
the optical fiber laser also comprises a Y-shaped optical fiber (3) and a focusing lens (4);
the Y-shaped optical fiber (3) is provided with a trunk part and two branch parts; the trunk part comprises an inner core optical fiber (31) and a plurality of peripheral optical fibers (32) which are symmetrically arranged around the inner core optical fiber (31); a core optical fiber (31) extends to be a branch part, and a plurality of peripheral optical fibers (32) extend to be gathered to be another branch part;
a bifurcation part formed by an inner core fiber (31) of the Y-shaped fiber is connected to an optical signal output port of the light source (2), and a bifurcation part formed by a peripheral fiber (32) is connected to an optical signal input port of the spectrometer body (1); and the focusing lens (4) is arranged right below the port of the trunk part of the Y-shaped optical fiber.
2. A spectrometer for micro-domain analysis according to claim 1, wherein: the spectrometer body (1) is a reflection spectrometer or a fluorescence spectrometer and is provided with an optical signal input port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110301303.7A CN113176231A (en) | 2021-03-22 | 2021-03-22 | Spectrometer for micro-area analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110301303.7A CN113176231A (en) | 2021-03-22 | 2021-03-22 | Spectrometer for micro-area analysis |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113176231A true CN113176231A (en) | 2021-07-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110301303.7A Pending CN113176231A (en) | 2021-03-22 | 2021-03-22 | Spectrometer for micro-area analysis |
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| CN (1) | CN113176231A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101315333A (en) * | 2008-02-02 | 2008-12-03 | 中国海洋大学 | Micro-fluorescence spectrum measuring apparatus of single oil gas inclusion |
| DE102008020902A1 (en) * | 2008-04-18 | 2009-10-29 | Universität Stuttgart | Chromatic-confocal spectral two beam- interferometry arrangement for e.g. microprofile measurement, has semitransparent mirrors and Fabry-perot- interferometer attached to chromatic-confocal spectral two beam- interferometer in rays path |
| CN203117097U (en) * | 2013-03-11 | 2013-08-07 | 上海复享仪器设备有限公司 | Y type fiber optic bundle light guide structure and micro positioning spectrum detection device utilizing same |
| CN203148835U (en) * | 2013-04-03 | 2013-08-21 | 上海复享仪器设备有限公司 | Device capable of simultaneously measuring micro spectrums and angle-resolved spectrums |
| CN210015037U (en) * | 2019-04-01 | 2020-02-04 | 东南大学 | Micro-area spectrum acquisition and analysis device of integrated form |
-
2021
- 2021-03-22 CN CN202110301303.7A patent/CN113176231A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101315333A (en) * | 2008-02-02 | 2008-12-03 | 中国海洋大学 | Micro-fluorescence spectrum measuring apparatus of single oil gas inclusion |
| DE102008020902A1 (en) * | 2008-04-18 | 2009-10-29 | Universität Stuttgart | Chromatic-confocal spectral two beam- interferometry arrangement for e.g. microprofile measurement, has semitransparent mirrors and Fabry-perot- interferometer attached to chromatic-confocal spectral two beam- interferometer in rays path |
| CN203117097U (en) * | 2013-03-11 | 2013-08-07 | 上海复享仪器设备有限公司 | Y type fiber optic bundle light guide structure and micro positioning spectrum detection device utilizing same |
| CN203148835U (en) * | 2013-04-03 | 2013-08-21 | 上海复享仪器设备有限公司 | Device capable of simultaneously measuring micro spectrums and angle-resolved spectrums |
| CN210015037U (en) * | 2019-04-01 | 2020-02-04 | 东南大学 | Micro-area spectrum acquisition and analysis device of integrated form |
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Application publication date: 20210727 |