CN113176020A - Manufacturing process for producing PDMS-GR polymer film piezoresistive flexible pressure sensor and product thereof - Google Patents
Manufacturing process for producing PDMS-GR polymer film piezoresistive flexible pressure sensor and product thereof Download PDFInfo
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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Abstract
The invention provides a manufacturing process for producing a PDMS-GR polymer film piezoresistive flexible pressure sensor, which comprises the following steps: the method comprises the following steps that firstly, the other side, opposite to a microstructure, of the PDMS-GR polymer ultrathin film is placed on a glass slide downwards, the middle part of the PDMS-GR polymer ultrathin film is cut in a rectangular mode by avoiding the edge part of the PDMS-GR polymer ultrathin film, and the PDMS-GR polymer ultrathin film is rolled up; step two, placing the PDMS-GR polymer mixed solution with the graphene nanosheet mass percent of 23-27 wt% into a heat-resistant container; step three, the film rolls manufactured in the step one are freely arranged according to the requirement and are placed in the polymer mixed solution in the step two; and step four, putting the container into an oven for heat preservation at 45-50 ℃ for 3-4h, raising the temperature to 80-85 ℃ for curing for 3-4h, generating a substrate after the PDMS-GR polymer is cured, and contacting 2 substrates with the first-level pressure-sensitive layer to assemble the sensor. By adopting the technical scheme, the used raw materials are common, the preparation process is simple, the manufacturing steps are simplified, the manufacturing period is shortened, and the mass production can be realized.
Description
Technical Field
The invention relates to the field of sensors, in particular to a manufacturing process for producing a PDMS-GR polymer film piezoresistive flexible pressure sensor and a product thereof.
Background
A flexible pressure sensor is an electronic component built on a flexible or extensible substrate that can be used to detect the amount of surface force between two contact surfaces. Because it has stronger pliability, the laminating human performance is better, simple structure and characteristics such as light for flexible pressure sensor has very good application prospect in fields such as health monitoring, medical instrument, flexible electron skin, flexible touch-sensitive screen and wearable electronic product, and in the health monitoring field, flexible sensor can laminate each position of human, thereby realizes the monitoring of various human parameters and makes things convenient for medical workers to analyze patient's health condition according to data at ordinary times.
Common flexible sensors are piezoresistive, capacitive, and piezoelectric. Among them, the piezoresistive flexible pressure sensor has the advantages of simple structure, easy integration and data output, etc., and is one of the most widely studied flexible pressure sensors at present. Piezoresistive flexible pressure sensors typically comprise three parts, a substrate, a pressure sensitive layer and electrodes. The pressure sensitive layer is the most important part of the piezoresistive sensor, and the piezoresistive properties, the conductivity and other properties of the pressure sensitive layer directly determine the sensing performance of the sensor.
Disclosure of Invention
Based on the above problems, the present invention aims to provide a capacitive flexible pressure sensor with high sensitivity and low cost using PDMS-PS polymer dielectric and a manufacturing process thereof.
Aiming at the problems, the following technical scheme is provided: a manufacturing process for producing a PDMS-GR polymer film piezoresistive flexible pressure sensor comprises the following steps:
the method comprises the following steps that firstly, the other side, opposite to a microstructure, of the PDMS-GR polymer ultrathin film is placed on a glass slide downwards, the middle part of the PDMS-GR polymer ultrathin film is cut in a rectangular mode by avoiding the edge part of the PDMS-GR polymer ultrathin film, and the PDMS-GR polymer ultrathin film is rolled up;
step two, placing the PDMS-GR polymer mixed solution with the graphene nanosheet mass percent of 23-27 wt% into a heat-resistant container;
step three, the film rolls manufactured in the step one are freely arranged according to the requirement and are placed in the polymer mixed solution in the step two;
and step four, putting the container into an oven for heat preservation at 45-50 ℃ for 3-4h, raising the temperature to 80-85 ℃ for curing for 3-4h, generating a substrate after the PDMS-GR polymer is cured, and contacting 2 substrates with the first-level pressure-sensitive layer to assemble the sensor.
The invention has the beneficial effects that: according to the invention, the pressure-sensitive layer and the substrate are combined, the conductive polymer has the characteristics of conductivity and excellent mechanical property, the conductivity seepage theory is used as a guide theory to combine with the microstructure, the sensitivity of the sensor is improved, meanwhile, the substrate layer is the pressure-sensitive layer, the substrate and the pressure-sensitive layer are not required to be respectively prepared, the manufacturing steps are simplified, the manufacturing period is shortened, the sensitivity and the measurement range are changed into nonlinear changes along with the change of the geometric dimension of the sensor, the flexible piezoresistive pressure sensor capable of being cut can be realized, the applicability is wider, and the assembly is simple.
A manufacturing process for producing PDMS-GR polymer ultrathin film comprises the following steps:
step one, weighing 100ml of absolute ethyl alcohol per 2g of graphene nanosheet, mixing the absolute ethyl alcohol, and ultrasonically dispersing the mixture for 3-4 hours under 600W of power by using an ultrasonic disperser to uniformly disperse the graphene nanosheets in the ethyl alcohol to form a dispersion liquid;
step two, weighing 10g of PDMS (polydimethylsiloxane) main agent for every 2g of graphene nano-sheets, preheating to 80 ℃, mixing the PDMS main agent into the absolute ethyl alcohol and the graphene nano-sheet dispersion liquid dispersed in the step one, keeping the temperature of 80 ℃ or above, and performing ultrasonic stirring until the absolute ethyl alcohol is completely volatilized;
step three, taking deionized water to prepare a saturated NaCl solution, weighing a curing agent of 10wt% of PDMS main agent, adding the curing agent into the PDMS-GR mixed solution mixed in the last step, stirring uniformly, and placing the mixture in a vacuum box for defoaming treatment;
placing a flat PP ring with the inner diameter of 100mm on the surface of the saturated NaCl solution, slowly and uniformly transferring 1.2-1.4ml of PDMS-GR mixed solution to the surface of the saturated NaCl solution by using an injector after the mixed solution added with the curing agent is completely defoamed, and placing the container in a dry ventilation environment for natural solidification;
and fifthly, because the residue of the mixed solution in the injector is unavoidable, the average thickness of the finally obtained film is 0.11mm-0.13mm, the obtained naturally solidified film is transferred to an oven with the temperature of 85-90 ℃ for drying for 3-4h, and microcracks appear on the surface of the film contacted with dry air, so that the microstructure is obtained.
The invention has the beneficial effects that: the manufacturing of the ultrathin film is realized by using the density difference between the conductive composite material and the saturated NaCl solution and the surface tension of the liquid, the side surface of the manufactured ultrathin film, which is contacted with the air, is provided with a microstructure, the used graphene nanosheet is large-sheet-diameter multilayer graphene, the economic benefit is better than that of single-layer graphene, the preparation of the dispersion liquid is simpler than that of the single-layer graphene, the manufacturing steps are simplified, the manufacturing period is shortened, and the large-batch production can be realized.
The utility model provides a flexible pressure sensor of PDMS-GR polymer film piezoresistive formula, includes the symmetry base plate that sets up, the base plate includes one-level pressure-sensitive layer and second grade pressure-sensitive layer, one-level pressure-sensitive layer includes the ultra-thin film book of PDMS-GR polymer of a plurality of permutation and combination, second grade pressure-sensitive layer includes PDMS-GR polymer substrate, one-level pressure-sensitive layer set up in one side that second grade pressure-sensitive layer corresponds adjacent base plate.
The invention further provides that: the PDMS-GR polymer ultrathin film roll is rolled up by taking the microstructure as the inner side face of the PDMS-GR polymer ultrathin film with the microstructure on one side.
The invention further provides that: the PDMS-GR polymer ultrathin film is formed by naturally solidifying PDMS-GR slurry on the surface of a saturated NaCl solution.
The invention further provides that: the microstructure is naturally generated by contacting a PDMS-GR polymer ultrathin film with dry air.
The invention further provides that: the mass percent of the graphene nanosheets in the primary structure of the sensor is 18-22 wt%, and the mass percent of the graphene nanosheets in the secondary structure of the sensor is 23-27%.
By adopting the technical scheme, when pressure acts on the outer surface, the primary pressure-sensitive layer and the secondary pressure-sensitive layer deform simultaneously, the primary pressure-sensitive layer mainly plays a role, the primary pressure-sensitive layer deforms gradually, the contact between the films is more attached, and the number of conductive paths in the compound is increased, so that the resistivity changes; when the pressure required by the deformation of the first-stage pressure-sensitive layer is greater than that required by the deformation of the second-stage pressure-sensitive layer, the second-stage pressure-sensitive layer plays a main role, when the pressure reaches the measurement limit, the electric conductivities of the first-stage pressure-sensitive layer and the second-stage pressure-sensitive layer reach approximate values, and at the moment, the structural electric conductivity reaches an allowable limit value, so that the measurement limit of the sensor is reached; through the process, the tiny change signals of the pressure are converted into electric signals such as resistance by the thin film, and then the electric signals are transmitted to the measuring instrument through the electrodes.
Drawings
FIG. 1 is an example of the arrangement of PDMS/graphene nano-sheet ultrathin film roll of the present invention;
FIG. 2 is a schematic view of micro-cracks on the surface of the PDMS/graphene nano-sheet ultrathin film (the micro-crack pattern is randomly generated and is not controlled by human factors);
FIG. 3 is a side view of the PDMS/graphene nanosheet ultrathin film roll structure of the present invention;
FIG. 4 is a perspective view of the PDMS/graphene nanosheet ultrathin film roll structure of the present invention;
FIG. 5 is a schematic view of the overall structure of a monolithic substrate of the sensor of the present invention;
FIG. 6 is a schematic diagram of the flexible piezoresistive pressure sensor of the present invention;
the reference numbers in the figures mean: 1-a substrate; 2-a primary pressure sensitive layer; 21-PDMS-GR polymer ultrathin film roll; 211-PDMS-GR polymer ultrathin film; 212-a microstructure; 3-a secondary pressure sensitive layer; 31-PDMS-GR polymer substrate.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Referring to the attached fig. 1-6, a manufacturing process for producing a PDMS-GR polymer film piezoresistive flexible pressure sensor includes the following steps:
the film is made into a structure as shown in figure 4, PDMS-GR polymer ultrathin film rolls 21 are arranged according to the arrangement as shown in figure 1, then the film rolls are placed in 25wt% of PDMS-GR mixed solution, the placement positions of the film rolls in the substrate are shown in figures 1 and 4, the distance between the film rolls is about 20% of the diameter of the film rolls, the circle center position of the film rolls is slightly higher than the surface of the substrate as shown in figure 4, the film rolls are placed in an oven at 45-50 ℃ for heat preservation for 3-4h, and then the temperature is raised to 80-85 ℃ for curing for 3-4h, so that the substrate 1 shown in figure 4 is obtained.
And finally, combining the two single-chip substrates together in a parallel or vertical mode to obtain the sensor, wherein the whole sensor is made of a conductive composite material, and electrodes or extraction electrodes are directly attached to the top and the bottom of the sensor to perform testing.
A manufacturing process for producing PDMS-GR polymer ultrathin film comprises the following steps:
after every 2g of graphene nano-sheets are mixed with 100ml of absolute ethyl alcohol and completely dispersed by an ultrasonic disperser, the PDMS main agent preheated to 80 ℃ is mixed with the mixed solution of the absolute ethyl alcohol and the graphene nano-sheets and placed in an ultrasonic disperser to be dispersed until the absolute ethyl alcohol is completely evaporated. And (3) when the temperature of the mixture is reduced to below 40 ℃, adding a curing agent of which the mass percent is 10 percent of the PDMS main agent, uniformly stirring, and placing the mixture into a vacuum chamber for defoaming for half an hour. Then the mixed solution is transferred to the surface of a saturated NaCl solution containing a PP flat ring, and is as uniform and dispersed as possible. After natural solidification, putting the film into an oven at 85-90 ℃ for 3-4h to finally obtain the film with the microcracks.
Referring to fig. 1 to 6, the flexible pressure sensor of PDMS-GR polymer film piezoresistive type disclosed in this embodiment includes a substrate symmetrically disposed, where the substrate includes a primary pressure sensitive layer 2 and a secondary pressure sensitive layer 3, the primary pressure sensitive layer 2 includes a plurality of arranged and combined PDMS-GR polymer ultrathin film rolls 21, the secondary pressure sensitive layer 3 includes a PDMS-GR polymer base 31, and the primary pressure sensitive layer 2 is disposed on one side of the secondary pressure sensitive layer 3 corresponding to an adjacent substrate 1.
The invention further provides that: the PDMS-GR polymer ultrathin film roll 21 is rolled up from a PDMS-GR polymer ultrathin film 211 having a microstructure 212 on one side, with the microstructure 212 as an inner side.
The invention further provides that: the PDMS-GR polymer ultrathin film 211 is formed by naturally solidifying PDMS-GR slurry on the surface of a saturated NaCl solution.
The invention further provides that: the microstructure 212 is naturally generated by contacting the PDMS-GR polymer ultrathin film 211 with dry air.
The invention further provides that: the mass percent of the graphene nanosheets of the first-stage pressure-sensitive layer 2 is 20wt%, and the mass percent of the graphene nanosheets of the second-stage pressure-sensitive layer 3 is 25 wt%.
In the technical scheme of the invention, the GR refers to the graphene nanosheets, the "between" does not only refer to the directions and the positions, but also refers to the interaction between different parts, and the "upper part and the lower part" are only relatively described, so that the description and the understanding are facilitated, and other possibilities are not excluded.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and those modifications and variations assumed in the above are also considered to be within the protective scope of the present invention.
Claims (7)
1. A manufacturing process for producing a PDMS-GR polymer film piezoresistive flexible pressure sensor is characterized by comprising the following steps:
the method comprises the following steps that firstly, the other side, opposite to a microstructure, of the PDMS-GR polymer ultrathin film is placed on a glass slide downwards, the middle part of the PDMS-GR polymer ultrathin film is cut away from the edge part, and the PDMS-GR polymer ultrathin film is rolled up;
step two, placing the PDMS-GR polymer mixed solution with the graphene nanosheet mass percent of 23-27 wt% into a heat-resistant container;
step three, the film rolls manufactured in the step one are freely arranged according to the requirement and are placed in the polymer mixed solution in the step two;
and step four, putting the container into an oven for heat preservation at 45-50 ℃ for 3-4h, raising the temperature to 80-85 ℃ for curing for 3-4h, generating a substrate after the PDMS-GR polymer is cured, and contacting 2 substrates with the first-level pressure-sensitive layer to assemble the sensor.
2. A process for producing the PDMS-GR polymer ultra-thin film of claim 1, comprising the steps of:
step one, weighing 100ml of absolute ethyl alcohol per 2g of graphene nanosheet, mixing the absolute ethyl alcohol, and ultrasonically dispersing the mixture for 3-4 hours under 600W of power by using an ultrasonic disperser to uniformly disperse the graphene nanosheets in the ethyl alcohol to form a dispersion liquid;
step two, weighing 10g of PDMS (polydimethylsiloxane) main agent for every 2g of graphene nano-sheets, preheating to 80 ℃, mixing the PDMS main agent into the absolute ethyl alcohol and the graphene nano-sheet dispersion liquid dispersed in the step one, keeping the temperature of 80 ℃ or above, and performing ultrasonic stirring until the absolute ethyl alcohol is completely volatilized;
step three, taking deionized water to prepare a saturated NaCl solution, weighing a curing agent of 10wt% of PDMS main agent, adding the curing agent into the PDMS-GR mixed solution mixed in the last step, stirring uniformly, and placing the mixture in a vacuum box for defoaming treatment;
placing a flat PP ring with the inner diameter of 100mm on the surface of the saturated NaCl solution, slowly and uniformly extruding 1.2-1.4ml of PDMS-GR mixed solution to the surface of the saturated NaCl solution by using an injector after the mixed solution added with the curing agent is completely defoamed, and placing the container in a dry ventilation environment for natural solidification;
and fifthly, because the residue of the mixed solution in the injector is unavoidable, the average thickness of the finally obtained film is 0.11mm-0.13mm, the obtained naturally solidified film is transferred to an oven with the temperature of 85-90 ℃ for drying for 3-4h, and microcracks appear on the surface of the film contacted with dry air, so that the microstructure is obtained.
3. A PDMS-GR polymer film piezoresistive flexible pressure sensor produced by the manufacturing process of claim 1, wherein: the substrate comprises a symmetrically arranged substrate, the substrate comprises a first-stage pressure-sensitive layer and a second-stage pressure-sensitive layer, the first-stage pressure-sensitive layer comprises a plurality of PDMS-GR polymer ultrathin film rolls, the second-stage pressure-sensitive layer comprises a PDMS-GR polymer substrate, and the first-stage pressure-sensitive layer is arranged on one side of the second-stage pressure-sensitive layer corresponding to the adjacent substrate.
4. A PDMS-GR polymer film piezoresistive flexible pressure sensor according to claim 3, characterised in that: the PDMS-GR polymer ultrathin film roll is rolled up by taking the microstructure as the inner side face of the PDMS-GR polymer ultrathin film with the microstructure on one side.
5. A PDMS-GR polymer film piezoresistive flexible pressure sensor according to claim 4, wherein: the PDMS-GR polymer ultrathin film is formed by naturally solidifying PDMS-GR slurry on the surface of a saturated NaCl solution.
6. A PDMS-GR polymer film piezoresistive flexible pressure sensor according to claim 4, wherein: the microstructure is naturally generated by contacting a PDMS-GR polymer ultrathin film with dry air under temperature difference.
7. A PDMS-GR polymer film piezoresistive flexible pressure sensor according to claim 3, characterised in that: the mass percent of the graphene nanosheets in the primary structure of the sensor is 18-22 wt%, and the mass percent of the graphene nanosheets in the secondary structure of the sensor is 23-27 wt%.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010278370A (en) * | 2009-06-01 | 2010-12-09 | Kazufumi Ogawa | Polysilicon thin film, method of manufacturing the same, and solar cell and tft using the film, tft array and display device, and method of manufacturing them |
| CN102732037A (en) * | 2011-04-08 | 2012-10-17 | 中国科学院金属研究所 | Graphene foam/polymer high-conductivity composite material preparation method and application thereof |
| CN106531733A (en) * | 2016-12-21 | 2017-03-22 | 清华大学 | Flexible pressure sensor and preparation method therefor |
| KR20170044385A (en) * | 2015-10-15 | 2017-04-25 | 동우 화인켐 주식회사 | Method and apparatus for manufacturing film touch sensor |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN108775979A (en) * | 2018-05-10 | 2018-11-09 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor and preparation method thereof |
-
2021
- 2021-04-30 CN CN202110486478.XA patent/CN113176020B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010278370A (en) * | 2009-06-01 | 2010-12-09 | Kazufumi Ogawa | Polysilicon thin film, method of manufacturing the same, and solar cell and tft using the film, tft array and display device, and method of manufacturing them |
| CN102732037A (en) * | 2011-04-08 | 2012-10-17 | 中国科学院金属研究所 | Graphene foam/polymer high-conductivity composite material preparation method and application thereof |
| KR20170044385A (en) * | 2015-10-15 | 2017-04-25 | 동우 화인켐 주식회사 | Method and apparatus for manufacturing film touch sensor |
| CN106531733A (en) * | 2016-12-21 | 2017-03-22 | 清华大学 | Flexible pressure sensor and preparation method therefor |
| CN108318161A (en) * | 2018-02-06 | 2018-07-24 | 华东理工大学 | Wearable pressure sensor and its manufacturing method |
| CN108775979A (en) * | 2018-05-10 | 2018-11-09 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 章城等: "基于光学光刻技术的PDMS微纳敏感结构薄膜加工工艺研究", 《真空科学与技术学报》 * |
| 阮晓光 等: "碳纳米管/PDMS复合材料柔性阵列压力传感器制备与实验", 《传感技术学报》 * |
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