CN113156582B - Spiral hybrid waveguide - Google Patents

Spiral hybrid waveguide Download PDF

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Publication number
CN113156582B
CN113156582B CN202011635753.1A CN202011635753A CN113156582B CN 113156582 B CN113156582 B CN 113156582B CN 202011635753 A CN202011635753 A CN 202011635753A CN 113156582 B CN113156582 B CN 113156582B
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waveguide
straight
photonic crystal
external connection
coupling
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CN113156582A (en
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张芮闻
林炳焜
王鹏飞
周砚扬
何立平
刘乘源
章宇兵
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China Academy of Electronic and Information Technology of CETC
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China Academy of Electronic and Information Technology of CETC
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/125Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure

Abstract

The invention discloses a spiral hybrid waveguide, which comprises: a substrate; the straight bending type resonance waveguide support is arranged on the substrate; the straight-bent resonant waveguide is arranged on the straight-bent resonant waveguide support and comprises a middle section waveguide, an external connecting waveguide and a central connecting waveguide, wherein the middle section waveguide is spirally wound from one end to form a ring, the central connecting waveguide is positioned in the ring and connected with one end of the middle section waveguide, and the external connecting waveguide is positioned outside the ring and connected with the other end of the middle section waveguide; the coupling waveguide support is arranged on the substrate and is spaced from the straight-bent resonant waveguide support; and the coupling waveguide is arranged on the coupling waveguide bracket and is coupled with the partially straight-bent resonant waveguide. By adopting the invention, the excitation of the multi-wavelength Brillouin laser can be realized by introducing the straight-bent resonant waveguide and the support structure, the overall structure has small volume and simple and convenient process, and the problems of large size, high threshold value and complex process of a multi-wavelength Brillouin laser device can be solved.

Description

Spiral hybrid waveguide
Technical Field
The invention relates to the field of communication, in particular to a spiral hybrid waveguide.
Background
The echo wall resonant cavity device is often used for outputting multi-wavelength brillouin laser, however, the requirement of the echo wall resonant cavity device on the manufacturing process is too high, and the echo wall resonant cavity device is difficult to be manufactured by using a planar waveguide, which greatly hinders the integration of the device. Therefore, realizing efficient brillouin laser on an integratable photonic chip has become a hot point of research. At present, corresponding work is carried out on Brillouin laser in an integrated micro-ring resonant cavity, and the Brillouin laser is also experimentally verified in a mixed silicon/sulfur waveguide, but the devices have generally large sizes, generally reach the centimeter magnitude and are difficult to be compatible with the existing silicon-based device manufacturing process.
Disclosure of Invention
The embodiment of the invention provides a spiral hybrid waveguide, which is used for solving the problems of large size and high threshold of a multi-wavelength Brillouin laser device in the prior art.
A helical hybrid waveguide according to an embodiment of the present invention includes:
a substrate;
the straight-bent resonant waveguide support is arranged on the substrate;
the straight-bent resonant waveguide is arranged on the straight-bent resonant waveguide support and comprises a middle section waveguide, an external connection waveguide and a central connection waveguide, wherein the middle section waveguide is spirally wound from one end to form a ring, the central connection waveguide is positioned in the ring and connected with one end of the middle section waveguide, and the external connection waveguide is positioned outside the ring and connected with the other end of the middle section waveguide;
the coupling waveguide support is arranged on the substrate and is spaced from the straight-bending type resonance waveguide support;
and the coupling waveguide is arranged on the coupling waveguide bracket and is coupled with part of the straight-bent resonant waveguide.
According to some embodiments of the invention, the intermediate section waveguide is a rounded rectangular ring.
According to some embodiments of the invention, the coupling waveguide is opposite the straight segment of the rounded rectangular annulus and the middle section of the coupling waveguide is convex toward the straight segment of the rounded rectangular annulus;
the shortest distance between the coupling waveguide and the straight line segment of the round-corner rectangular ring is 0.02-0.6 micrometer.
According to some embodiments of the invention, the middle section waveguide comprises spaced first and second waveguide sections, one end of the first waveguide section being connected to one end of the central link waveguide, one end of the second waveguide section being connected to the other end of the central link waveguide, the other end of the first waveguide section being connected to one end of the external link waveguide, and the other end of the second waveguide section being connected to the other end of the external link waveguide.
According to some embodiments of the invention, the central connecting waveguide is S-shaped;
the external connection waveguide comprises a straight line section and an arc section, one end of the straight line section is connected with the other end of the first waveguide section in a smooth mode, the other end of the straight line section is connected with one end of the arc section in a smooth mode, and the other end of the arc section is connected with the other end of the second waveguide section in a smooth mode.
According to some embodiments of the present invention, the length and width of the straight-bending type resonance waveguide satisfy a brillouin phase matching condition.
According to some embodiments of the invention, the helical hybrid waveguide further comprises an acousto-photonic crystal waveguide assembly, the acousto-photonic crystal waveguide assembly being connected to the external connection waveguide.
According to some embodiments of the invention, the photonic acoustic crystal waveguide assembly comprises:
a first acousto-optic photonic crystal waveguide connected to the external connection waveguide;
and the second acoustic photonic crystal waveguide is connected with the external connection waveguide, and the second acoustic photonic crystal waveguide and the first acoustic photonic crystal waveguide are respectively positioned on two sides of the external connection waveguide.
According to some embodiments of the present invention, a side of the first photonic crystal waveguide away from the external connection waveguide and a side of the second photonic crystal waveguide away from the external connection waveguide are both provided with a plurality of semicircular gaps, a radius of each semicircular gap is 0.1 to 1.2 micrometers, and a distance between centers of two adjacent semicircular gaps is 0.2 to 1.5 micrometers.
According to some embodiments of the present invention, the widths of the straight-bent type resonance waveguide and the coupling waveguide are both 0.4 to 1.5 micrometers, and the heights of the straight-bent type resonance waveguide and the coupling waveguide are both 0.2 to 1.5 micrometers.
By adopting the embodiment of the invention, the excitation of the multi-wavelength Brillouin laser can be realized by introducing the straight-bent resonant waveguide and the bracket structure, the invention also has the advantages of high integration level and simple manufacturing process, the manufacturing process is completely compatible with the existing CMOS process, the size of the device is only hundreds of microns, the manufacturing and integration of the device can be effectively realized, thereby solving the problems of large size, high threshold value and complex process of the multi-wavelength Brillouin laser device,
the foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of a spiral hybrid waveguide according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a spiral hybrid waveguide according to an embodiment of the present invention;
FIG. 3 is a schematic view of a partial structure of a spiral hybrid waveguide in an embodiment of the present invention;
FIG. 4 is an enlarged view of the structure at A in FIG. 3;
FIG. 5 is an optical field diagram of a spiral hybrid waveguide in an embodiment of the present invention;
fig. 6 is an acoustic field diagram of a spiral hybrid waveguide in an embodiment of the present invention.
Reference numerals:
a straight-bent type resonance waveguide 1, an intermediate section waveguide 8, a first waveguide section 81, a second waveguide section 82,
the coupling waveguide 2 is coupled to the waveguide,
a substrate 3 which is to be coated with a coating,
a straight-bent type resonance waveguide support 4,
a first acousto-photonic crystal waveguide 6 is provided,
a second photonic crystal waveguide 7 is provided,
a first series of straight waveguides 10 is provided,
a first series of curved waveguides 11 is provided,
the second series of straight waveguides 12 is,
the second series of curved waveguides 13 is,
a third series of straight waveguides 14 is provided,
a third series of straight waveguides 15, which,
a fourth series of straight waveguides 16 is provided,
the fourth series of curved waveguides 17 is,
the external connection waveguide 18, straight section 181, curved section 182,
the center is connected to a waveguide 19.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
As shown in fig. 1, a spiral hybrid waveguide according to an embodiment of the present invention includes:
a substrate 3;
a straight-bent type resonance waveguide support 4 provided on the substrate 3;
the straight-bent type resonance waveguide 1 is arranged on the straight-bent type resonance waveguide support 4, and the straight-bent type resonance waveguide support 4 is used for supporting the straight-bent type resonance waveguide 1 so as to suspend the straight-bent type resonance waveguide 1 above the substrate 3. The straight-bent type resonance waveguide 1 includes a middle section waveguide 8, an external connection waveguide 18, and a center connection waveguide 19, the middle section waveguide 8 is spirally wound from one end thereof to form a ring, the center connection waveguide 19 is located in the ring and connected with one end of the middle section waveguide 8, and the external connection waveguide 18 is located outside the ring and connected with the other end of the middle section waveguide 8.
And a coupling waveguide support (not shown) provided on the substrate 3 and spaced apart from the straight-bent type resonance waveguide support 4.
The coupling waveguide 2 is arranged on a coupling waveguide support, and the coupling waveguide support is used for supporting the coupling waveguide 2 so as to suspend the coupling waveguide 2 above the substrate 3. The coupling waveguide 2 is coupled with the partially straight-bent type resonance waveguide 1.
By adopting the embodiment of the invention, the excitation of the multi-wavelength Brillouin laser can be realized by introducing the straight-bent type resonance waveguide 1 and the support structure, the overall structure has small volume and simple and convenient process, and the problems of large size, high threshold value and complex process of a multi-wavelength Brillouin laser device can be solved.
On the basis of the above-described embodiment, various modified embodiments are further proposed, and it is to be noted herein that, in order to make the description brief, only the differences from the above-described embodiment are described in the various modified embodiments.
As shown in fig. 1, the middle section waveguide 8 is in the form of a rounded rectangular ring, according to some embodiments of the invention. It can be understood that the middle waveguide section 8 is spirally wound to form a ring, the inner ring is rectangular, the outer ring is also rectangular, and four corners of the rectangle formed by the inner ring and the outer ring are rounded corners. Thereby, the manufacture of the intermediate-section waveguide 8 is facilitated.
As shown in fig. 1, according to some embodiments of the present invention, the coupling waveguide 2 is opposite to the straight line segment 181 of the rounded rectangular annulus, and the middle section of the coupling waveguide 2 is convex toward the straight line segment 181 of the rounded rectangular annulus.
The shortest distance between the coupling waveguide 2 and the straight line segment 181 of the rounded rectangular ring is 0.02-0.6 microns.
As shown in FIG. 1, the intermediate segment waveguide 8 includes spaced apart first and second waveguide segments 81 and 82, according to some embodiments of the invention. One end of the first waveguide segment 81 is connected to one end of the central connection waveguide 19, one end of the second waveguide segment 82 is connected to the other end of the central connection waveguide 19, the other end of the first waveguide segment 81 is connected to one end of the external connection waveguide 18, and the other end of the second waveguide segment 82 is connected to the other end of the external connection waveguide 18.
As shown in fig. 1, the central connecting waveguide 19 is S-shaped according to some embodiments of the present invention.
As shown in fig. 1, the external connection waveguide 18 includes a straight line section 181 and an arc-shaped section 182, one end of the straight line section 181 is smoothly connected to the other end of the first waveguide section 81, the other end of the straight line section 181 is smoothly connected to one end of the arc-shaped section 182, and the other end of the arc-shaped section 182 is smoothly connected to the other end of the second waveguide section 82. It should be noted that the term "smoothly connected" as used herein is understood to mean that the connecting portion is curved and the two portions are smoothly connected to each other.
According to some embodiments of the present invention, the length and width of the straight bending type resonance waveguide 1 satisfy the brillouin phase matching condition. The straight-bent type resonance waveguide 1 may be understood as being constructed by winding a closed elongated waveguide, the length of the straight-bent type resonance waveguide 1 is the total length of the elongated waveguide, and the total length of the elongated waveguide may be understood as the distance moved from a point of the elongated waveguide to a point of the elongated waveguide after moving around the elongated waveguide. The width of the straight-bent type resonance waveguide 1 is the width of the cross section of the strip-shaped waveguide. The elongate waveguide may be rectangular in cross-section. Therefore, the excited Brillouin sound field frequency is the integral multiple of the frequency difference of the adjacent optical resonance peaks, so that the simultaneous excitation and resonance of the optical field and the sound field are realized, and the efficient excitation of the Brillouin cascade laser is facilitated. Fig. 5 and 6 are an optical field diagram and an acoustic field diagram of the spiral hybrid waveguide according to the embodiment of the present invention, respectively.
According to some embodiments of the invention, the spiral hybrid waveguide further comprises an acousto-photonic crystal waveguide assembly, which is connected to the external connection waveguide 18. The acoustic photonic crystal waveguide component is used for further enhancing the acoustic-optical interaction and realizing the excitation of the multi-wavelength Brillouin laser.
As shown in fig. 1, 4, according to some embodiments of the present invention, an acousto-photonic crystal waveguide assembly includes:
a first acousto-optic photonic crystal waveguide 6 connected to an external connection waveguide 18;
and the second photonic crystal waveguide 7 is connected with the external connection waveguide 18, and the second photonic crystal waveguide 7 and the first photonic crystal waveguide 6 are respectively positioned at two sides of the external connection waveguide 18.
For example, one side of the first acousto-photonic crystal waveguide 6 may be connected to one side of straight segment 181, and the first acousto-photonic crystal waveguide 6 extends along the length of straight segment 181. One side of the second acoustic photonic crystal waveguide 7 may be connected to the other side of the straight line section 181, and the second acoustic photonic crystal waveguide 7 extends along the length direction of the straight line section 181.
As shown in fig. 1 and 4, according to some embodiments of the present invention, a plurality of semicircular gaps are respectively disposed on a side of the first photonic crystal waveguide 6 away from the external connection waveguide 18 and a side of the second photonic crystal waveguide 7 away from the external connection waveguide 18, a radius of each semicircular gap is 0.1 to 1.2 micrometers, and a distance between centers of two adjacent semicircular gaps is 0.2 to 1.5 micrometers.
For example, the plurality of semicircular notches on the first acousto-photonic crystal waveguide 6 may be evenly spaced along the extending direction of the first acousto-photonic crystal waveguide 6. The plurality of semicircular notches on the second acoustic photonic crystal waveguide 7 may be uniformly spaced along the extending direction of the second acoustic photonic crystal waveguide 7.
According to some embodiments of the present invention, the widths of the straight-bent type resonance waveguide 1 and the coupling waveguide 2 are both 0.4 to 1.5 micrometers, and the heights of the straight-bent type resonance waveguide 1 and the coupling waveguide 2 are both 0.2 to 1.5 micrometers.
For example, the cross section of the straight-bent type resonance waveguide 1 is rectangular, and the width of the cross section of the straight-bent type resonance waveguide 1 is 0.4 to 1.5 micrometers. The height of the cross section of the straight-bent type resonance waveguide 1 is 0.2 to 1.5 micrometers. The cross section of the coupling waveguide 2 is rectangular, and the width of the cross section of the coupling waveguide 2 is 0.4-1.5 microns. The height of the cross section of the coupling waveguide 2 is 0.2 to 1.5 micrometers.
A helical hybrid waveguide according to an embodiment of the present invention is described in detail in one specific embodiment with reference to fig. 1-4. It is to be understood that the following description is illustrative only and is not intended as a specific limitation of the invention. All similar structures and similar variations thereof adopted by the invention are intended to fall within the scope of the invention.
As shown in fig. 1 and 2, the spiral hybrid waveguide according to the embodiment of the present invention includes a straight-bent type resonance waveguide 1, a coupling waveguide 2, a straight-bent type resonance waveguide support 4, a coupling waveguide support, a first acousto-optic photonic crystal waveguide 6, a second acousto-optic photonic crystal waveguide 7, and a substrate 3.
The straight-bent type resonance waveguide support 4 is used for supporting the straight-bent type resonance waveguide 1; the coupling waveguide support is for supporting the coupling waveguide 2. The straight-bent type resonance waveguide support 4 is placed on the substrate 3. The coupling waveguide support is placed on a substrate 3. The straight-bent type resonance waveguide 1 forms a suspension structure between the straight-bent type resonance waveguide support 4 and the substrate 3; the coupling waveguide 2 forms a suspended structure with the substrate 3 through the coupling waveguide support. The optical refractive index of the straight bending type resonance waveguide 1 is higher than that of the straight bending type resonance waveguide support 4; the optical refractive index of the coupling waveguide 2 is higher than that of the coupling waveguide support.
As shown in fig. 4, the straight-bent type resonance waveguide support 4 has a structure with a cross section that is narrow at the top and wide at the bottom to support the straight-bent type resonance waveguide 1; the coupling waveguide support adopts a structure with a narrow top and a wide bottom in cross section to support the coupling waveguide 1. The ratio of the width of the upper edge of the straight-bent resonant waveguide support 4 to the width of the straight-bent resonant waveguide 1 is not more than 0.3; the ratio of the width of the upper edge of the coupling waveguide support to the width of the coupling waveguide 2 is not more than 0.3.
For the straight-bent type resonance waveguide 1, the total length L and the width w of the straight-bent type resonance waveguide need to meet the brillouin phase matching condition, so that the frequency of the excited brillouin sound field is integral multiple of the frequency difference of adjacent optical resonance peaks, and the simultaneous excitation and resonance of the optical field and the sound field are realized, which is beneficial to the high-efficiency excitation of brillouin cascade laser.
As shown in fig. 1, the straight-bent type resonance waveguide 1 has a closed structure including an intermediate waveguide 8, an external connection waveguide 18, and a central connection waveguide 19, and thus generates a resonance reinforcing effect of an optical wave. The middle section waveguide 8 is spirally wound from one end thereof to form a ring shape, the center connection waveguide 19 is located inside the ring shape and connected to one end of the middle section waveguide 8, and the outer connection waveguide 18 is located outside the ring shape and connected to the other end of the middle section waveguide 8. The external connection waveguide 18 includes a straight line section 181 and an arc section 182, one end of the straight line section 181 is smoothly connected to the other end of the first waveguide section 81, the other end of the straight line section 181 is smoothly connected to one end of the arc section 182, and the other end of the arc section 182 is smoothly connected to the other end of the second waveguide section 82. It should be noted that the term "smoothly connected" as used herein is understood to mean that the connecting portion is curved and the two portions are smoothly connected to each other. The central connecting waveguide 19 comprises 4 fifth straight waveguides and 4 fifth curved waveguides, wherein any two fifth straight waveguides are connected through one fifth curved waveguide to form the S-shaped central connecting waveguide 19.
As shown in fig. 2, the intermediate-stage waveguide 8 is composed of a combination of a first series of straight waveguides 10, a first series of curved waveguides 11, a second series of straight waveguides 12, a second series of curved waveguides 13, a third series of straight waveguides 14, a third series of straight waveguides 15, a fourth series of straight waveguides 16, and a fourth series of curved waveguides 17.
As shown in fig. 2, the first series of straight waveguides 10 includes n first straight waveguides parallel to each other and extending in the vertical direction. The first series of curved waveguides 11 includes n +1 first curved waveguides, where n first curved waveguides correspond to n first straight waveguides one-to-one, one end of any first curved waveguide is connected to one end of its corresponding first straight waveguide, and the other first curved waveguide is connected to the central connecting waveguide 19.
As shown in fig. 2, the second series of straight waveguides 12 includes n +1 second straight waveguides parallel to each other and extending in the horizontal direction. The n +1 second straight waveguides correspond to the n +1 first bent waveguides one by one, and one end of any second straight waveguide is connected with the other end of the corresponding first bent waveguide.
As shown in fig. 2, the second series of curved waveguides 13 includes n second curved waveguides, where the n second curved waveguides are in one-to-one correspondence with the n second straight waveguides, one end of any one second curved waveguide is connected to the other end of its corresponding second straight waveguide, and the other end of the other second straight waveguide is connected to the external connection waveguide 18.
As shown in fig. 2, the third series of straight waveguides 14 includes n third straight waveguides parallel to each other and extending in the vertical direction, the n third straight waveguides correspond to the n second curved waveguides one by one, and one end of any one third straight waveguide is connected to the other end of the corresponding second curved waveguide.
The third series of straight waveguides 15 includes n third curved waveguides, where the n third curved waveguides correspond to the n third straight waveguides one to one, and one end of any third curved waveguide is connected to the other end of its corresponding third straight waveguide.
As shown in fig. 2, the fourth series of straight waveguides 16 includes n fourth straight waveguides which are parallel to each other and extend in the horizontal direction, the n fourth straight waveguides correspond to the n third curved waveguides one by one, and one end of any one fourth straight waveguide is connected to the other end of the corresponding third curved waveguide.
As shown in fig. 2, the fourth series of curved waveguides 17 includes n fourth curved waveguides. The n fourth curved waveguides correspond to the n fourth straight waveguides one by one, and one end of any fourth curved waveguide is connected with the other end of the corresponding fourth straight waveguide. The n fourth curved waveguides are in one-to-one correspondence with the n first straight waveguides, and the other end of any fourth curved waveguide is connected with the other end of the corresponding first straight waveguide.
As shown in fig. 2, one of the first series of straight waveguides 10 is mutually coupled with the coupling waveguide 2. The coupling waveguide 2 is a straight-through structure consisting of three sections of fifth straight waveguides and two sections of fifth curved waveguides. The three sections of the fifth straight waveguides are arranged along the vertical direction, each section of the fifth straight waveguides extends along the vertical direction, and the fifth straight waveguide positioned in the middle is closer to the first series of straight waveguides 10 than the fifth straight waveguides at the other two ends. Any two sections of the fifth straight waveguides are connected through one section of the fifth curved waveguide. The shortest distance between the straight-bending type resonance waveguide 1 and the coupling waveguide 2 is 0.02-0.6 micron.
The width of the straight-bent resonance waveguide 1 and the width of the coupling waveguide 2 are both 0.4-1.5 microns, and the height of the straight-bent resonance waveguide 1 and the height of the coupling waveguide are both 0.2-1.5 microns.
As shown in fig. 1 to 4, the first photonic crystal waveguide 6 and the second photonic crystal waveguide 7 are respectively distributed along two sides of the straight line segment 181. The first acousto-optic photonic crystal waveguide 6 and the second acousto-optic photonic crystal waveguide 7 are respectively provided with a plurality of semicircular air holes which are periodically arranged, the radius of each semicircular air hole is 0.1-1.2 micrometers, and the length between the centers of two adjacent semicircular air holes is 0.2-1.5 micrometers, so that light waves and sound waves meeting a preset target can be limited in the straight-bent type resonance waveguide device 1 between the first acousto-optic photonic crystal waveguide 6 and the second acousto-optic photonic crystal waveguide 7, the acousto-optic interaction is further enhanced, and the excitation of multi-wavelength Brillouin laser is realized.
By adopting the embodiment of the invention, the excitation of the multi-wavelength Brillouin laser can be realized by introducing the straight-bent resonance structure, the phonon crystal structure and the support structure, thereby solving the problems of large size, high threshold value and complex process of the multi-wavelength Brillouin laser device.
It should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention, and those skilled in the art can make various modifications and changes. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Although some embodiments described herein include some but not other features included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. The particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. For example, in the claims, any of the claimed embodiments may be used in any combination.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (5)

1. A helical hybrid waveguide, comprising:
a substrate;
the straight-bent resonant waveguide support is arranged on the substrate;
the straight-bent resonant waveguide is arranged on the straight-bent resonant waveguide support and comprises a middle section waveguide, an external connection waveguide and a central connection waveguide, wherein the middle section waveguide is spirally wound from one end to form a ring, the central connection waveguide is positioned in the ring and connected with one end of the middle section waveguide, and the external connection waveguide is positioned outside the ring and connected with the other end of the middle section waveguide;
the coupling waveguide support is arranged on the substrate and is spaced from the straight bending type resonance waveguide support;
the coupling waveguide is arranged on the coupling waveguide bracket and is coupled with part of the straight bending type resonance waveguide;
the spiral hybrid waveguide further comprises an acousto-photonic crystal waveguide component, and the acousto-photonic crystal waveguide component is connected with the external connection waveguide;
the photonic crystal waveguide assembly includes:
a first acousto-optic photonic crystal waveguide connected to the external connection waveguide;
the second photonic crystal waveguide is connected with the external connection waveguide, and the second photonic crystal waveguide and the first photonic crystal waveguide are respectively positioned on two sides of the external connection waveguide;
a plurality of semicircular gaps are formed in one side, away from the external connection waveguide, of the first acousto-optic photonic crystal waveguide and one side, away from the external connection waveguide, of the second acousto-optic photonic crystal waveguide, the radius of each semicircular gap is 0.1-1.2 micrometers, and the distance between the circle centers of two adjacent semicircular gaps is 0.2-1.5 micrometers;
the second photonic crystal waveguide and the first photonic crystal waveguide are symmetrically arranged on two sides of the external connection waveguide;
the plurality of semicircular gaps on the first photonic crystal waveguide are uniformly distributed at intervals along the extension direction of the first photonic crystal waveguide, and the plurality of semicircular gaps on the second photonic crystal waveguide are uniformly distributed at intervals along the extension direction of the second photonic crystal waveguide;
one side of the first acousto-optic photonic crystal waveguide, which is connected with the external connection waveguide, is a straight line segment, and one side of the second acousto-optic photonic crystal waveguide, which is connected with the external connection waveguide, is a straight line segment;
the length and the width of the straight bending type resonance waveguide meet the Brillouin phase matching condition;
the widths of the straight-bent resonance waveguide and the coupling waveguide are both 0.4-1.5 micrometers, and the heights of the straight-bent resonance waveguide and the coupling waveguide are both 0.2-1.5 micrometers.
2. The helical hybrid waveguide of claim 1, wherein said intermediate segment waveguide is a rounded rectangular ring.
3. The spiral hybrid waveguide of claim 2, wherein the coupling waveguide is opposite a straight segment of the rounded rectangular annulus and a middle segment of the coupling waveguide is convex toward the straight segment of the rounded rectangular annulus;
the shortest distance between the coupling waveguide and the straight line segment of the round-corner rectangular ring is 0.02-0.6 micrometer.
4. The helical hybrid waveguide of claim 1, wherein said intermediate segment waveguide comprises first and second spaced waveguide segments, one end of said first waveguide segment being connected to one end of said central link waveguide, one end of said second waveguide segment being connected to the other end of said central link waveguide, the other end of said first waveguide segment being connected to one end of said external link waveguide, and the other end of said second waveguide segment being connected to the other end of said external link waveguide.
5. The helical hybrid waveguide of claim 4, wherein said central connecting waveguide is S-shaped;
the external connection waveguide comprises a straight line section and an arc section, one end of the straight line section is connected with the other end of the first waveguide section in a smooth mode, the other end of the straight line section is connected with one end of the arc section in a smooth mode, and the other end of the arc section is connected with the other end of the second waveguide section in a smooth mode.
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