CN113155345B - Flexible touch sensor based on flexible piezoresistive array and magnet coil array - Google Patents
Flexible touch sensor based on flexible piezoresistive array and magnet coil array Download PDFInfo
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- CN113155345B CN113155345B CN202110311847.1A CN202110311847A CN113155345B CN 113155345 B CN113155345 B CN 113155345B CN 202110311847 A CN202110311847 A CN 202110311847A CN 113155345 B CN113155345 B CN 113155345B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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Abstract
The invention discloses a flexible touch sensor based on a flexible piezoresistive array and a magnet coil array, which comprises an elastic body, a permanent magnet, the flexible piezoresistive array and a conductive coil array, wherein the elastic body is provided with a first elastic layer; the permanent magnet is arranged in the elastic body; the bottom of the elastomer is connected with the action end of the flexible piezoresistive array; the conductive coil array is arranged below the flexible piezoresistive array; this application is through the elastomer, the permanent magnet, flexible pressure drag array, the setting and the connection of conductive coil array, effectual two kinds of sensitive units with flexible pressure drag unit array and magnet coil array combine organically, based on pressure drag effect and electromagnetic induction principle, can realize three-dimensional power (be normal pressure and two-dimensional frictional force) and gliding detection on the flexible contact surface, can distinguish gliding two-dimensional direction, compromise power and the static behavior and the dynamic behavior that slide and detect, and have the characteristics that the cost of manufacture is low.
Description
Technical Field
The invention relates to the technical field of touch sensors, in particular to a flexible touch sensor based on a flexible piezoresistive array and a magnet coil array.
Background
Object grasping is a fundamental function of many robots or dexterous manipulators. In order to be able to grasp an object safely and reliably, a robot or a smart manipulator generally requires a tactile sensor to sense the state of the object. During the object grabbing process, the touch sensor is in direct contact with the object, and the contact can be divided into rigid contact and flexible contact according to the properties of materials of the two parts. For grasping soft or fragile objects (e.g., eggs, fruits, vegetables, etc.), flexible contact is more desirable to reduce the impact/impact damage to the objects, and thus some flexibility of the touch sensor is required. When in flexible contact, the detection of force and sliding on the contact surface has extremely important significance on the object grabbing efficiency, so the force and sliding detection performance of the flexible touch sensor directly influences the grabbing efficiency of a robot or a dexterous hand.
At present, the flexible touch sensor mainly realizes the detection of the contact surface force or the sliding based on the principles of optical waveguide effect, piezoresistive effect, piezoelectric effect or electromagnetic induction. The touch sensor based on the optical waveguide effect mainly comprises a flexible layer with a convex contact array, an optical fiber, a Charge Coupled Device (CCD) camera, a supporting structure and the like, and has the characteristic of high sensitivity. The touch sensor adopting the piezoresistive effect is mainly based on sensitive elements such as silicon-based piezoresistive units and pressure-sensitive conductive rubber in a Micro Electro Mechanical System (MEMS) process, and is embedded into a flexible matrix made of rubber materials in an independent unit or array mode to realize surface flexibility or overall flexibility. The touch sensor adopting the piezoelectric effect is mainly based on a polyvinylidene fluoride (PVDF) sensitive unit, and the surface flexibility or the whole flexibility is realized by embedding a flexible matrix in an independent unit or array form. The touch sensor adopting the electromagnetic induction principle is mainly based on a magnet-coil array structure unit, namely, a permanent magnet is embedded into an elastic body made of rubber, and the detection of the force or the sliding of a contact surface is realized by utilizing the mode that the elastic body is stressed and deformed to drive the permanent magnet inside the elastic body to generate the motion of cutting magnetic induction lines above a coil array.
The disadvantages of the conventional techniques are: the touch sensor using the optical waveguide effect has a high sensitivity, but is generally large in size, requires complicated image processing, and has a limited application range. The touch sensor adopting the piezoresistive effect is mainly based on sensitive elements such as a silicon-based piezoresistive unit and pressure-sensitive conductive rubber of an MEMS (micro-electromechanical system) process, wherein the silicon-based piezoresistive unit of the MEMS process has high force detection precision and good dynamic performance but high manufacturing cost, and the silicon-based sensor is brittle, so that the bearing capacity and the impact resistance of the touch sensor are obviously reduced; the pressure-sensitive conductive rubber has low force detection precision and poor dynamic performance, and is suitable for application occasions with low requirements on detection precision and dynamic performance. The touch sensor adopting the piezoelectric effect is mainly based on a PVDF sensitive unit, and has better dynamic detection performance but poorer static force detection precision. The touch sensor adopting the electromagnetic induction principle is mainly based on a magnet-coil structure unit, has better dynamic detection performance, but also has the problem of poor static force detection precision. In addition, the current flexible touch sensor generally adopts a single principle to detect the force or the sliding of the contact surface, and the static performance and the dynamic performance of the force and the sliding detection cannot be considered simultaneously.
There is a need to develop a flexible tactile sensor based on a flexible piezoresistive array and a magnet coil array to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and designs a flexible touch sensor based on a flexible piezoresistive array and a magnet coil array.
The invention realizes the purpose through the following technical scheme:
flexible tactile sensor based on a flexible piezoresistive array and a magnet coil array, comprising:
an elastomer for flexible contact;
a permanent magnet; the permanent magnet is arranged in the elastic body;
a flexible piezoresistive array; the bottom of the elastomer is connected with the action end of the flexible piezoresistive array;
a conductive coil array; the conductive coil array is arranged below the flexible piezoresistive array, and the elastic body deforms under the action of horizontal friction force, so that the internal permanent magnet is driven to generate cutting magnetic induction lines above the conductive coil array.
Specifically, flexible tactile sensor still includes the casing, shielding cable and bottom, the casing includes first cell body, the second cell body, the spread groove, cross the line groove, first cell body is seted up on the upper surface of casing, the second cell body is seted up on the lower surface of casing, the spread groove is even the first cell body of intercommunication, the second cell body, cross the line groove, flexible piezoresistive array installs in first cell body, the electrically conductive coil array is installed in the second cell body, the bottom lid is established on the second cell body, the shielding cable is installed in crossing the line groove, the shielding cable through the spread groove not do not with flexible piezoresistive array, the electrically conductive coil array electricity is connected.
The flexible piezoresistive array comprises a flexible substrate, a piezoresistive material unit assembly, a positive electrode unit, a common negative electrode unit and a bonding pad, wherein the piezoresistive material unit assembly, the common negative electrode unit and the bonding pad are all installed in the flexible substrate, the common negative electrode unit is arranged at the bottom, the piezoresistive material unit assembly is arranged at the upper part of the common negative electrode unit, the bonding pad is arranged at one end part of the flexible substrate, a plurality of cathodes of the piezoresistive material unit assembly are all electrically connected with the common negative electrode unit, a plurality of anodes of the piezoresistive material unit assembly are respectively and electrically connected with a plurality of welding points on the bonding pad through a plurality of leads, the common negative electrode unit is electrically connected with the welding points on the bonding pad through leads, and the bonding pad is electrically connected with a shielding cable.
Furthermore, the piezoresistive material unit assembly comprises a piezoresistive material unit A, a piezoresistive material unit B, a piezoresistive material unit C and a piezoresistive material unit D, wherein the piezoresistive material unit A, the piezoresistive material unit B, the piezoresistive material unit C and the piezoresistive material unit D are uniformly distributed in a ring shape in the flexible substrate.
Specifically, the second slot body comprises a slot A, a slot B, a slot C, a slot D and a slot E, the slot A, the slot B, the slot C and the slot D are sequentially and uniformly distributed in an annular shape, the conductive coil array comprises four conductive coils, and the four conductive coils are respectively arranged in the slot A, the slot B, the slot C and the slot D; the slotted hole E is arranged around the slotted hole A, the slotted hole B, the slotted hole C and the slotted hole D, and the two ends of the plurality of wires are respectively electrically connected with the conductive coil and the shielding cable after passing through the slotted hole E.
Preferably, the flexible piezoresistive array and the electrically conductive coil array are arranged in parallel.
The invention has the beneficial effects that:
1. this application is through the elastomer, the permanent magnet, flexible pressure drag array, the setting and the connection of conductive coil array, effectual two kinds of sensitive units with flexible pressure drag unit array and magnet coil array combine organically, based on pressure drag effect and electromagnetic induction principle, can realize three-dimensional power (be normal pressure and two-dimensional frictional force) and gliding detection on the flexible contact surface, can distinguish gliding two-dimensional direction, compromise power and the static behavior and the dynamic behavior that slide and detect, and have the characteristics that the cost of manufacture is low.
Drawings
FIG. 1 is a cross-sectional view of the present application;
FIG. 2 is a top view of the present application;
FIG. 3 is a bottom view of the present application;
FIG. 4 is a top view of an ultra-thin flexible piezoresistive array in the present application;
FIG. 5 is a cross-sectional view of an ultra-thin flexible piezoresistive array in the present application;
FIG. 6 is a top view of the housing of the present application;
FIG. 7 is a bottom view of the housing of the present application;
FIG. 8 is a cross-sectional view of the housing of the present application;
in the figure: 1-elastomer, 2-permanent magnet, 3-flexible piezoresistive array, 31-flexible substrate, 32-piezoresistive material unit assembly, 321-piezoresistive material unit a, 322-piezoresistive material unit B, 323-piezoresistive material unit C, 324-piezoresistive material unit D, 33-positive electrode unit, 34-common negative electrode unit, 35-pad, 4-shell, 41-first groove body, 42-second groove body, 421-slotted hole a, 422-slotted hole B, 423-slotted hole C, 424-slotted hole D, 425-slotted hole E, 43-connecting groove, 44-wire passing groove, 5-shielding cable, 6-sealant, 7-conductive coil array, 8-bottom cover.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "inside", "outside", "left", "right", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the present invention are conventionally placed in use, or the orientations or positional relationships that are conventionally understood by those skilled in the art, and are used for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be further noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" and the like are to be broadly construed, for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The following detailed description of embodiments of the invention refers to the accompanying drawings.
As shown in fig. 1-3, a flexible tactile sensor based on a flexible piezoresistive array 3 and a magnet coil array, comprises:
an elastic body 1 for flexible contact; the elastomer 1 is selected to be cylindrical; the elastic body 1 is made of an elastic, insulating and non-magnetic field shielding material; preferably a rubber elastic member;
a permanent magnet 2; the permanent magnet 2 is arranged in the elastic body 1; the permanent magnet 2 is positioned on the central axis of the elastic body 1 and is arranged close to the upper surface of the elastic body 1; the permanent magnet 2 is preferably disc-shaped;
a flexible piezoresistive array 3; the bottom of the elastic body 1 is connected with the action end of the flexible piezoresistive array 3;
a conductive coil array 7; the conductive coil array 7 is arranged below the flexible piezoresistive array 3, and the elastic body 1 deforms under the action of horizontal friction force, so that the internal permanent magnet 2 is driven to generate cutting magnetic induction line motion above the conductive coil array 7.
As shown in fig. 6 to 8, the flexible tactile sensor further includes a housing 4, a shielding cable 5 and a bottom cover 8, the housing 4 includes a first slot 41, a second slot 42, a connecting slot 43 and a wire passing slot 44, the first slot 41 is disposed on an upper surface of the housing 4, the second slot 42 is disposed on a lower surface of the housing 4, the connecting slot 43 is connected to the first slot 41, the second slot 42 and the wire passing slot 44, the flexible piezoresistive array 3 is installed in the first slot 41, the conductive coil array 7 is installed in the second slot 42, the bottom cover 8 covers the second slot 42, the shielding cable 5 is installed in the wire passing slot 44, and the shielding cable 5 is electrically connected to the flexible piezoresistive array 3 and the conductive coil array 7 through the connecting slot 43.
As shown in fig. 5, the flexible piezoresistive array 3 includes a flexible substrate 31, a piezoresistive material cell assembly 32, a positive electrode cell 33, a common negative electrode cell 34, and a bonding pad 35, wherein the piezoresistive material cell assembly 32, the common negative electrode cell 34, and the bonding pad 35 are all mounted in the flexible substrate 31, the common negative electrode cell 34 is disposed at the bottom, the piezoresistive material cell assembly 32 is disposed at the upper part of the common negative electrode cell 34, the bonding pad 35 is disposed at one end of the flexible substrate 31, a plurality of cathodes of the piezoresistive material cell assembly 32 are all electrically connected with the common negative electrode cell 34, a plurality of anodes of the piezoresistive material cell assembly 32 are respectively electrically connected with a plurality of welding points on the bonding pad 35 through a plurality of wires, the common negative electrode cell 34 is electrically connected with the welding points on the bonding pad 35 through a wire, and the bonding pad 35 is electrically connected with the shielding cable 5.
As shown in fig. 4, the piezoresistive material unit assembly 32 includes a piezoresistive material unit a321, a piezoresistive material unit B322, a piezoresistive material unit C323, and a piezoresistive material unit D324, wherein the piezoresistive material unit a321, the piezoresistive material unit B322, the piezoresistive material unit C323, and the piezoresistive material unit D324 are uniformly distributed in a ring shape in sequence in the flexible substrate 31.
The piezoresistive material unit A321, the piezoresistive material unit B322, the piezoresistive material unit C323 and the piezoresistive material unit D324 are respectively and correspondingly attached with a positive electrode unit 33, the piezoresistive material unit A321, the piezoresistive material unit B322, the piezoresistive material unit C323 and the piezoresistive material unit D324 share a common negative electrode unit 34, four positive electrode units 33 and one common negative electrode unit 34 are led to a bonding pad 35, and five welding points are shared. As shown in fig. 1, when an object is in contact with the flexible touch sensor (in contact with the elastic member), the flexible touch sensor is subjected to a positive pressure along the Z-axis and a two-dimensional friction force along the XY-plane, and the three-dimensional force acts to make the four piezoresistive material units in the ultrathin flexible piezoresistive array 3 subjected to different distribution pressures, and the corresponding resistance values of the four piezoresistive material units change, so that three-dimensional force distribution information can be obtained by measuring the change. The sum of the pressure of the four flexible piezoresistive units, namely the piezoresistive material unit A321, the piezoresistive material unit B322, the piezoresistive material unit C323 and the piezoresistive material unit D324 is positive pressure, the pressure distribution of the piezoresistive material unit B322 and the piezoresistive material unit D324 corresponds to X-axis stress, the pressure distribution of the piezoresistive material unit A321 and the piezoresistive material unit C323 corresponds to Y-axis stress, and three-dimensional force information on the contact surface can be obtained through a corresponding matrix decoupling formula.
As shown in fig. 7, the second slot 42 includes a slot a421, a slot B422, a slot C423, a slot D424, and a slot E425, the slot a421, the slot B422, the slot C423, and the slot D424 are uniformly distributed in a ring shape, the conductive coil array 7 includes four conductive coils, and the four conductive coils are respectively disposed in the slot a421, the slot B422, the slot C423, and the slot D424; the slot E425 is disposed around the slot a421, the slot B422, the slot C423, and the slot D424, and a plurality of wires are electrically connected to the conductive coil and the shielding cable 5 through the rear ends of the slot E425.
The slot A421, the slot B422, the slot C423 and the slot D424 are all circular grooves, the slot E425 is used for internal wiring, the slot E425 is formed into a ring shape and arranged to surround the slot A421, the slot B422, the slot C423 and the slot D424, and the slot E425 is respectively communicated with the slot A421, the slot B422, the slot C423 and the slot D424. The four conductive coils are respectively arranged in the slot A421, the slot B422, the slot C423 and the slot D424 and are adhered and fixed by insulating glue. When an object is in contact with the flexible touch sensor (in contact with the elastic piece) and moves relatively, the elastic body 1 deforms under the action of horizontal friction force, so that the internal permanent magnet 2 is driven to move above the conductive coil array 7 to cut magnetic induction lines, the movement information of the magnet can be obtained by measuring output signals of the four conductive coils, and then the deformation information and the horizontal friction force information of the elastic body 1 can be obtained. The corresponding conductive coils in the slot B422 and the slot D424 acquire horizontal friction force information along the X axis, and the corresponding conductive coils in the slot A421 and the slot C423 acquire horizontal friction force information along the Y axis. According to stress analysis, when the elastic body 1 deforms to meet a certain small deformation condition, the output of the conductive coils is in direct proportion to the deformation rate of the elastic body 1, and the deformation rate of the elastic body 1 and the derivative of the horizontal friction force are in a linear relation, so that horizontal two-dimensional friction force information can be obtained through the four conductive coil arrays 7, the two-dimensional stick-slip state of the contact surface can be evaluated, and the two-dimensional slip direction can be distinguished.
As shown in fig. 1, the flexible piezoresistive array 3 and the conductive coil array 7 are arranged in parallel.
In some embodiments, the flexible piezoresistive array 3 and the electrically conductive coil array 7 are each connected with a corresponding core wire inside the shielded cable 5. When all the wires are connected, the gap in the shell 4 is filled and sealed by the sealant 6, so as to protect the internal guide and ensure the connection performance. All adopt the insulating cement to bond fixedly in the connection between each part in this application, casing 4 is nonmetal spare, and bottom 8 is the metalwork, and bottom 8 has the inside conductive coil array 7 of protection to and the function of shielding the external magnetic field in sensor below, and bottom 8 still is used for casing 4 to seal.
The technical solution of the present invention is not limited to the limitations of the above specific embodiments, and all technical modifications made according to the technical solution of the present invention fall within the protection scope of the present invention.
Claims (5)
1. Flexible tactile sensor based on flexible piezoresistive array and magnet coil array, characterized in that includes:
an elastomer for flexible contact;
a permanent magnet; the permanent magnet is arranged in the elastic body;
a flexible piezoresistive array; the bottom of the elastomer is connected with the action end of the flexible piezoresistive array; the flexible piezoresistive array comprises a flexible substrate, a piezoresistive material unit assembly, a positive electrode unit, a common negative electrode unit and a bonding pad, wherein the piezoresistive material unit assembly, the common negative electrode unit and the bonding pad are all arranged in the flexible substrate;
a conductive coil array; the conductive coil array is arranged below the flexible piezoresistive array, and the elastic body deforms under the action of horizontal friction force, so that the internal permanent magnet is driven to generate cutting magnetic induction lines above the conductive coil array.
2. The flexible touch sensor based on the flexible piezoresistive array and the magnet coil array according to claim 1, wherein the flexible touch sensor further comprises a housing, a shielding cable and a bottom cover, the housing comprises a first groove body, a second groove body, a connecting groove and a wire passing groove, the first groove body is arranged on the upper surface of the housing, the second groove body is arranged on the lower surface of the housing, the connecting groove is connected with the first groove body, the second groove body and the wire passing groove, the flexible piezoresistive array is installed in the first groove body, the conductive coil array is installed in the second groove body, the bottom cover is arranged on the second groove body, the shielding cable is installed in the wire passing groove, and the shielding cable is electrically connected with the flexible piezoresistive array and the conductive coil array through the connecting groove.
3. The flexible piezoresistive array and solenoid array based flexible tactile sensor according to claim 1, wherein the piezoresistive material unit assembly comprises a piezoresistive material unit A, a piezoresistive material unit B, a piezoresistive material unit C, and a piezoresistive material unit D, and the piezoresistive material unit A, the piezoresistive material unit B, the piezoresistive material unit C, and the piezoresistive material unit D are uniformly distributed in a ring shape in the flexible substrate.
4. The flexible piezoresistive array and magnet coil array-based flexible tactile sensor according to claim 2, wherein the second tank comprises a slot a, a slot B, a slot C, a slot D, and a slot E, the slot a, the slot B, the slot C, and the slot D are uniformly distributed in a ring shape in sequence, the conductive coil array comprises four conductive coils, and the four conductive coils are respectively disposed in the slot a, the slot B, the slot C, and the slot D; the slotted hole E is arranged around the slotted hole A, the slotted hole B, the slotted hole C and the slotted hole D, and the two ends of the plurality of wires are respectively electrically connected with the conductive coil and the shielding cable after passing through the slotted hole E.
5. The flexible piezoresistive array and magnetic coil array-based flexible tactile sensor according to claim 1, wherein the flexible piezoresistive array and the electrically conductive coil array are arranged in parallel.
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| EP1516595A1 (en) * | 2003-09-18 | 2005-03-23 | Bruno Starek | Device for measuring the pressure between two pressed bodies |
| KR100600808B1 (en) * | 2004-12-08 | 2006-07-18 | 주식회사 엠디티 | Variable inductor type MEMS pressure sensor using magnetostrictive effect |
| CN104697678B (en) * | 2015-03-09 | 2017-07-21 | 中国科学院宁波材料技术与工程研究所 | It is a kind of to be used to detect sensor of faint stress and preparation method thereof |
| CN106225961B (en) * | 2016-07-18 | 2021-12-07 | 河北工业大学 | Touch sensor for robot |
| CN108759918B (en) * | 2018-05-30 | 2020-10-23 | 中国人民解放军国防科技大学 | Vibration-stress composite sensor for monitoring flange bolt of wind power tower |
| CN110954251A (en) * | 2019-12-24 | 2020-04-03 | 哈尔滨工业大学 | Pressure-capacitance and piezoresistive coupling proximity sensing and contact force sensor |
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