CN113153691A - Split type evacuating device - Google Patents

Split type evacuating device Download PDF

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Publication number
CN113153691A
CN113153691A CN202110636261.2A CN202110636261A CN113153691A CN 113153691 A CN113153691 A CN 113153691A CN 202110636261 A CN202110636261 A CN 202110636261A CN 113153691 A CN113153691 A CN 113153691A
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CN
China
Prior art keywords
molecular pump
vacuum
interface
gauge
pump unit
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Pending
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CN202110636261.2A
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Chinese (zh)
Inventor
闫庆鑫
张建斌
刘宇
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Beijing Huatuo Green Energy Technology Co ltd
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Beijing Huatuo Green Energy Technology Co ltd
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Priority to CN202110636261.2A priority Critical patent/CN113153691A/en
Publication of CN113153691A publication Critical patent/CN113153691A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention discloses a split type vacuumizing device, which comprises a mechanical pump unit and a molecular pump unit, wherein the mechanical pump unit comprises a mechanical pump body, a control module and a vacuum gauge which are connected with the mechanical pump body, and a mechanical pump frame trolley for bearing the mechanical pump body and the control module; the molecular pump unit comprises a molecular pump body, a vacuum five-way and molecular pump controller connected with the molecular pump body, and a molecular pump frame trolley for bearing the molecular pump body and the molecular pump controller; the vacuum tee joint is connected with a first resistance gauge and a vacuum hose for measuring the vacuum degree; the vacuum hose is connected with the molecular pump body to realize linkage; the control module comprises a PLC integrated machine for controlling the mechanical pump unit and the molecular pump unit and an electric control module respectively connected with the mechanical pump unit and the molecular pump unit. The invention has the advantages of being suitable for vacuumizing the low-temperature heat-insulating gas cylinder and also suitable for vacuumizing low-temperature storage tanks in various heat-insulating forms.

Description

Split type evacuating device
Technical Field
The invention relates to the field of low-temperature heat-insulation gas cylinders and low-temperature storage tanks, in particular to a split type vacuumizing device.
Background
The low-temperature heat-insulation gas cylinder is also called a Dewar bottle and can be used for storing low-temperature liquid (also called as low-temperature liquid gas) such as liquid nitrogen, liquid oxygen, liquid natural gas and the like; the low-temperature heat-insulation gas cylinder adopts a vacuum double-layer heat insulation mode, and a sealing interlayer between the inner container and the outer container is a vacuum heat insulation layer so as to realize the long-time storage of liquid gas;
the low-temperature storage tank is a double-layer vacuum heat insulation storage tank for storing liquid oxygen, nitrogen, argon and other media, the inner container of the low-temperature storage tank is made of austenitic stainless steel, the jacket is made of low-carbon steel or low-alloy steel, the interlayer in the middle of the storage tank is filled with pearled sand, and then the interlayer is vacuumized to achieve the heat insulation effect.
At present, most of devices for online vacuumizing a low-temperature heat-insulation gas cylinder and a low-temperature storage tank are vacuumizing devices integrating a mechanical pump and a molecular pump, and the vacuumizing devices are suitable for vacuumizing the low-temperature heat-insulation gas cylinder but not suitable for vacuumizing the low-temperature storage tanks in all forms;
cryogenic storage tanks include two forms of insulation: a high vacuum multilayer winding heat insulation form and a pearlife heat insulation form; the high-vacuum multilayer winding heat insulation forms are all high vacuum degrees, and a vacuumizing device with an integrated mechanical pump and a molecular pump can be adopted for vacuumizing; the pearlife insulation form is a low vacuum degree, and a molecular pump cannot be used when a low-temperature storage tank in the pearlife insulation form is vacuumized, because fine pearlife can pollute the molecular pump if being pumped into a cavity by the molecular pump, and can cause fatal damage to a rotor of the molecular pump. Therefore, the conventional integrated vacuum-pumping device has a low structural state versatility, and cannot perform vacuum-pumping for a low-temperature storage tank of a pearlife heat-insulating type.
Disclosure of Invention
In order to solve the technical problems, the invention aims to disclose a split type vacuumizing device to realize the purposes of vacuumizing a low-temperature heat-insulation gas cylinder and vacuumizing low-temperature storage tanks in various heat-insulation forms.
The invention is realized by the following technical scheme: a split type vacuumizing device comprises a mechanical pump unit and a molecular pump unit, wherein the mechanical pump unit comprises a mechanical pump body, a control module connected with the mechanical pump body, and a mechanical pump frame trolley for bearing the mechanical pump body and the control module; the molecular pump unit comprises a molecular pump body, a vacuum five-way and molecular pump controller connected with the molecular pump body, and a molecular pump frame trolley for bearing the molecular pump body and the molecular pump controller;
the vacuum tee joint is connected with a first resistance gauge and a vacuum hose for measuring the vacuum degree; the vacuum hose is connected with the molecular pump body to realize linkage; the control module comprises a PLC integrated machine for controlling the mechanical pump unit and the molecular pump unit and an electric control module respectively connected with the mechanical pump unit and the molecular pump unit.
Through the technical scheme, the split type vacuumizing device provided by the invention divides the existing vacuumizing unit with an integrated structure in the market into two independent parts, one part is the mechanical pump unit, the other part is the molecular pump unit, the vacuumizing device can be used for vacuumizing a low-temperature heat-insulation gas cylinder and a multi-layer winding vacuum heat-insulation low-temperature storage tank in a matching way, and the mechanical pump unit can also be used for vacuumizing the low-temperature storage tank in a pearly-lustre vacuum heat-insulation way, so that the universality and the flexibility of the use process are improved.
Furthermore, the electric control module comprises a power supply assembly, an electrical appliance assembly connected with the power supply assembly, and an interface assembly connected with the electrical appliance assembly; the power supply assembly supplies power to the mechanical pump unit and the molecular pump unit simultaneously.
Further, the power supply assembly comprises a 220V mechanical pump direct current power supply, a 96V molecular pump power supply and a voltage converter arranged in the mechanical pump frame trolley.
Further, the electrical assembly comprises a first ionization gauge and a vacuum gauge which are installed in the mechanical pump unit.
Furthermore, the electrical component also comprises a second resistance gauge, an ionization gauge, a 485 communication, a collector and a molecular pump external control which are arranged in the molecular pump unit.
Furthermore, the interface assembly comprises a system switch connected with the electrical appliance assembly, a resistance gauge communication interface connected with the first resistance gauge and an ionization gauge communication interface connected with the ionization gauge.
Furthermore, the interface component also comprises a collector interface, a molecular pump power supply interface, a 485 communication interface and a molecular pump external control interface; the second resistance gauge is connected with the resistance gauge communication interface, and the ionization gauge is connected with the ionization gauge communication interface; the 485 communication interface, the collector interface, the molecular pump power interface and the molecular pump external control interface are correspondingly connected with the 485 communication interface, the collector interface, the molecular pump power interface and the molecular pump external control interface respectively.
Through the technical scheme, the molecular pump unit is provided with the ionization gauge, the resistance gauge, the 485 communication, the collector, the molecular pump power supply and the plug corresponding to the molecular pump external control, and the plugs are correspondingly connected with the interfaces, so that the purpose of controlling the molecular pump unit by the mechanical pump unit is achieved.
Furthermore, the electrical component also comprises an air switch, a power socket, a leakage protector and a vacuum gauge circuit board, wherein the air switch, the power socket and the leakage protector are arranged in the mechanical pump unit, and the vacuum gauge circuit board is connected with the vacuum gauge.
Further, the electrical component also comprises a molecular pump driver connected with the molecular pump controller, and the molecular pump controller is connected with the molecular pump power interface.
Through the technical scheme, the molecular pump controller has the function of a voltage converter, namely converting 220V voltage into 96V voltage and supplying the 96V voltage to the molecular pump for starting.
Further, the molecular pump driver is connected with the PLC all-in-one machine through a relay group.
Through above-mentioned technical scheme, portable evacuation unit does not basically take PLC control in the market, and what have PLC control alone also all uses the PLC host computer to match the secondary instrument again and use alone, and spare part has PLC host computer and display screen at least like this, occupies the great installation space of quick-witted case and leads to the quick-witted case can't do little and do lightly. The invention adopts a Haonaire PLC integrated machine, has small volume, self-provided display screen, short depth, no occupation of case space and convenient programming and panel installation. The PLC control program mainly considers the problem of saving the waiting time of operators;
specifically, the molecular pump needs to be started in a vacuum state, generally the vacuum degree is lower than 10Pa, the molecular pump can be started, otherwise the damage to the rotor of the molecular pump is easily caused, the atmospheric pressure of the environment is 101.325KPa, a mechanical pump needs to be used for starting the molecular pump to start vacuumizing from the atmospheric pressure of the environment, a certain time is needed when the atmospheric pressure is below 10Pa, and the time needs to be waited by an operator; namely, after the vacuum pumping is finished, the molecular pump needs to be closed firstly, and the mechanical pump can be closed only after the rotating speed of the molecular pump is reduced to 0, so that the front end of the molecular pump is a preset negative pressure to ensure that the rotating speed of the molecular pump is slowly reduced, thereby prolonging the service life of the molecular pump, wherein the time is usually about 20-30 minutes, and the time for reducing the rotating speed of the magnetic suspension molecular pump to 0 is longer; considering that the two time points needing waiting of operators are basically inefficiently waiting, the PLC programming realizes automatic control, so that the system can automatically complete the turning on of the molecular pump and the turning off of the mechanical pump without waiting of personnel beside the equipment.
Compared with the prior art, the invention has the following advantages:
the split type vacuumizing device divides the existing vacuumizing unit with an integrated structure in the market into two independent parts, one part is a mechanical pump unit, the other part is a molecular pump unit, the vacuumizing device can be used for vacuumizing a low-temperature heat-insulation gas cylinder and a multi-layer winding vacuum heat-insulation low-temperature storage tank in a matching mode, and the mechanical pump unit can be used for vacuumizing the low-temperature storage tank in a pearly-lustre vacuum heat-insulation mode independently, so that the universality and the flexibility of the use process are improved.
Drawings
FIG. 1 is a schematic structural view of a mechanical pump assembly embodying the present invention;
FIG. 2 is a schematic structural view of an interface assembly of a mechanical pump assembly embodying the present invention;
FIG. 3 is a schematic structural diagram of a circuit module of a mechanical pump unit embodying the present invention;
FIG. 4 is a circuit diagram of a circuit module embodying the present invention for a mechanical pump unit;
FIG. 5 is a schematic structural view of a mechanical pump assembly and a molecular pump assembly embodying the present invention;
FIG. 6 is a schematic diagram of the construction of a molecular pump assembly embodying the present invention;
fig. 7 is a schematic view showing the linkage of the mechanical pump unit and the molecular pump unit according to the present invention.
In the figure, 1, a mechanical pump unit; 11. a mechanical pump body; 12. a PLC all-in-one machine; 13. an interface component; 131. a resistance gauge communication interface; 132. an ionization gauge communication interface; 133. a collector interface; 134. a molecular pump power interface; 135. 485 communication interface; 136. an external control interface of the molecular pump; 137. a system switch; 138. a vacuum gauge; 139. a first resistance gauge; 14. an electronic control module; 141. a relay group; 142. a power supply component; 143. a molecular pump driver; 144. a molecular pump controller; 145. opening in the air; 146. a vacuum gauge circuit board; 147. a leakage protector; 148. a power socket; 15. a vacuum tee joint; 16. a vacuum angle valve; 17. a vacuum hose; 18. a mechanical pump frame trolley; 19. an air outlet of the mechanical pump body; 2. a molecular pump unit; 21. a molecular pump body; 22. five-way connection; 23. a molecular pump frame trolley; 24. a molecular pump gas outlet; 26. an ionization gauge; 28. a second resistance gauge.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
A split vacuum pumping device, as shown in fig. 1, 5 and 7, comprising a mechanical pump unit 1 and a molecular pump unit 2, wherein the mechanical pump unit 1 comprises a mechanical pump body 11, a control module connected with the mechanical pump body 11, and a mechanical pump frame trolley 18 for carrying the mechanical pump body 11 and the control module; the molecular pump unit 2 comprises a molecular pump body 21, a vacuum five-way and molecular pump controller 144 connected with the molecular pump body 21, and a molecular pump frame trolley 23 for bearing the molecular pump body 21 and the molecular pump controller 144; wherein, the air inlet of the mechanical pump body 11 is provided with a vacuum tee 15, and the vacuum tee 15 is respectively connected with a first resistance gauge 139 and a vacuum hose 17 for measuring the vacuum degree; the vacuum hose 17 is connected with the molecular pump body 21 to realize linkage;
as shown in fig. 5, the control module includes a PLC integrated machine 12 for controlling the mechanical pump assembly 1 and the molecular pump assembly 2, and an electronic control module 14 connected to the mechanical pump assembly 1 and the molecular pump assembly 2, respectively.
Specifically, as shown in fig. 1 and 2, a vacuum tee 15 is installed at an air inlet of the mechanical pump body 11, two ends of the vacuum tee 15 are respectively connected with a first resistance gauge 139 and a vacuum angle valve 16, and a vacuum hose 17 communicated with a low-temperature storage tank (not shown in the figure) in a pearlife vacuum heat insulation mode is connected along an outlet of the vacuum angle valve 16; .
As shown in fig. 2, 3 and 4, the interface assembly 13 includes a resistance gauge communication interface 131, an ionization gauge communication interface 132, a collector interface 133, a molecular pump power interface 134, a 485 communication interface 135, a molecular pump external control interface 136, a vacuum gauge 138 and a system switch 137; when the vacuum gauge is used, in order that the vacuum gauge 138 can monitor the vacuum degree of the mechanical pump unit 1 in real time during vacuum pumping, the first resistance gauge 139 and the vacuum gauge 138 are connected to monitor the vacuum degree value of the mechanical pump unit 1 in low vacuum; wherein, the MJ2 interface on the PLC all-in-one machine is connected with the 485 communication interface 135, and the other end of the 485 communication interface 135 is connected with the RS485 interface of the molecular pump driver 143, so that the PLC all-in-one machine 12 can read the relevant data on the molecular pump driver 143; meanwhile, a Q2 point on the PLC all-in-one machine is connected with a relay group 141, the relay group 141 is connected with a molecular pump external control interface 136, the other end of the molecular pump external control interface 136 is connected with an external control input of a molecular pump driver 143, and the relay group 141 is driven to be closed and opened through PLC programming of the PLC all-in-one machine 12, so that the purpose of automatically starting the molecular pump unit 2 is achieved.
As shown in fig. 1, 3 and 4, the electronic control module 14 includes a power supply component, an electrical component connected to the power supply component, and an interface component 13 connected to the electrical component; wherein the power supply assembly simultaneously supplies power to the mechanical pump assembly 1 and the molecular pump assembly 2.
Based on the above, the power supply assembly 142 includes a 220V mechanical pump dc power supply, a 96V molecular pump power supply, and a voltage converter mounted within the mechanical pump frame cart 18.
As shown in fig. 1, 2, 3 and 4, the electrical components include a first ionization gauge, a vacuum gauge 138, mounted within the mechanical pump assembly 1; the second resistance gauge 28, the ionization gauge 26 and the 485 are arranged in the molecular pump unit 2 and are communicated with each other, and the collector and the molecular pump are externally controlled; the system switch 137 is connected with an electrical appliance component, the resistance gauge communication interface 131 is connected with the first resistance gauge 139, the ionization gauge communication interface 132 is connected with the ionization gauge 26, and the second resistance gauge 28 is connected with the resistance gauge communication interface 131; the 485 communication interface, the collector interface 133, the molecular pump power interface 134 and the molecular pump external control interface 136 in the molecular pump unit 2 are correspondingly connected with the 485 communication interface 135, the collector interface 133, the molecular pump power interface 134 and the molecular pump external control interface 136 respectively.
On the basis of the above scheme, the electrical assembly further comprises an air switch 145 installed in the mechanical pump unit 1, a power socket 148, a leakage protector 147, and a vacuum gauge circuit board 146 connected with the vacuum gauge 138.
On the basis of the above scheme, as shown in fig. 1, fig. 2, fig. 3 and fig. 4, the electrical component further includes a molecular pump driver 143 connected to the molecular pump controller 144, and the molecular pump controller 144 is connected to the molecular pump power interface 134; the molecular pump driver 143 is connected with the PLC all-in-one machine 12 through the relay group 141; the relay group 141 comprises a 24v relay I and a 24v relay II, a power line of the mechanical pump body 11 is electrically connected with the 24v relay I, and the 24v relay I, a power supply assembly 142, the 24v relay II, the air switch 145 and the PLC all-in-one machine 12 form an electric loop; the 24v relay is respectively connected with the molecular pump driver 143, the vacuum gauge circuit board 146, the touch screen PLC all-in-one machine and the molecular pump controller to form an electric loop so as to realize the purpose that the PLC all-in-one machine 12 controls the molecular pump controller 144; the electronic control module 14 further includes a leakage protector 147 for preventing leakage of electricity, and a power socket 148 for electrically connecting each electrical component with the electronic control module 14. Aiming at the low-temperature storage tank with the pearlife vacuum heat insulation form, the specific operation of independently adopting the mechanical pump unit 1 to vacuumize is as follows:
the mechanical pump unit 1 is suitable for a low-temperature storage tank in a pearlife vacuum heat insulation mode and is used under the condition that the requirement of vacuum degree is not higher than 0.1Pa, one end of a vacuum hose 17 is fixedly connected to the inlet end of a vacuum angle valve 16, and the other end of the vacuum hose is communicated with an air outlet of the low-temperature storage tank in the pearlife vacuum heat insulation mode; pressing the system switch 137 to start the mechanical pump unit 1, that is, starting the mechanical pump body 11, and displaying the vacuum degree of the real-time vacuum pumping of the mechanical pump body 11 by the vacuum gauge 138; when the vacuum degree value obtained when the mechanical pump body 11 is vacuumized reaches the starting value of the molecular pump unit 2 set by the PLC all-in-one machine 12, the PLC all-in-one machine 12 transmits a signal to the molecular pump controller 144 so as to control the molecular pump unit 2 to be automatically started; when the vacuumizing operation needs to be stopped, when the rotating speed of the molecular pump unit 2 is reduced to 0, the mechanical pump unit 1 directly and automatically shuts down the power supply of the mechanical pump unit 1 under the control of the PLC all-in-one machine 12.
On the basis of the above scheme, preferably, the mechanical pump body 11 is fixedly connected with the mechanical pump frame trolley 18 through a fastening bolt;
on the basis of the above scheme, as shown in fig. 5, 6 and 7, the molecular pump unit 2 includes a molecular pump body 21, a five-way 22 installed at an air inlet of the molecular pump body 21, an ionization gauge 26 installed along an upper way of the five-way 22, vacuum angle valves 16 installed along two symmetrical ways of the five-way 22, a vacuum three-way 15 of the mechanical pump unit 1 and an air outlet 24 of the molecular pump are communicated through a vacuum hose 17, and a second resistance gauge 28 is installed along the other way of the five-way 22. In order to facilitate the mechanical pump unit 1 to control the molecular pump unit 2, a power supply of the mechanical pump unit 1 is connected to an input interface of a molecular pump controller (similar to a voltage reducer), an output interface of the molecular pump controller 144 is connected to a molecular pump power interface 134 on the interface component 13, and the other end of the molecular pump power interface 134 is connected to a molecular pump driver 143, so that the molecular pump unit is powered to drive the molecular pump unit 2 to work, and the molecular pump unit 2 is automatically controlled through a PLC integrated machine. In order to facilitate the overall movement of the molecular pump unit 2, the molecular pump unit 2 is integrally mounted on a molecular pump frame cart 23.
On the basis of the above scheme, the vacuum gauge 138 is an instrument for displaying the vacuum degree, the numerical value of the vacuum degree is read by the resistance gauge and the ionization gauge, and the read numerical value is displayed on the vacuum gauge 138; specifically, the first resistance gauge 139 is used for reading a vacuum degree value of the mechanical pump unit 1; the second resistance gauge 28 and the ionization gauge 26 are used for reading the vacuum degree value of the molecular pump unit 2; also, the resistance gauge monitored a low vacuum, with a measurement range of 1.0x105-1.0x10-1Pa, and the ultimate vacuum of the mechanical pump body 11 is1.0x10-1Pa; the resistance gauge is used for basically measuring the vacuum degree of a pipeline in the mechanical pump unit 1, a connecting line of the resistance gauge is connected with a resistance gauge communication interface 131 on the interface component 13, and the other end of the resistance gauge communication interface 131 is connected with a vacuum gauge 138, so that data of the vacuum degree of the mechanical pump body 11 measured by the resistance gauge is displayed on the vacuum gauge 138;
on the basis of the scheme, the ionization gauge 26 monitors high vacuum degree, and the measurement range of the high vacuum degree is 1.0x10-1-1.0x10-5Pa, the ionization gauge 26 is arranged on a vacuum five-way 22 of an air inlet at the top end of the molecular pump unit 2, and the ultimate vacuum of the molecular pump is 1x10-6Pa, so that the second ionization gauge 26 basically measures the vacuum degree of the high vacuum pipeline of the molecular pump unit 2, the connecting line thereof is connected with the ionization gauge communication interface 132 on the interface component 13, and the other end of the ionization gauge communication interface 132 is connected with the vacuum gauge 138, so that the data measured by the second ionization gauge 26 is displayed on the vacuum gauge 138. Specifically, the vacuum gauge 138 displays resistance gauge values on the left side of the screen and ionization gauge values on the right side.
Based on the above scheme, the resistance gauge and the ionization gauge ionize air molecules to generate currents, the collector connected to the collector interface 133 captures the currents to calculate the vacuum degree, and the larger the current in the air is, the lower the vacuum degree is, the smaller the current is, and the higher the vacuum degree is.
On the basis of the above scheme, the starting voltage of the mechanical pump unit 1 is 220V, and the starting voltage of the molecular pump unit 2 is 96V, so that the mechanical pump and the molecular pump can only start the mechanical pump body 11 by supplying 220V voltage at the same time, and the molecular pump body 21 cannot be started, so that a molecular pump controller 144 is required to convert the 220V voltage into 96V voltage and supply the 96V voltage to the molecular pump for starting.
On the basis of the scheme, the 485 communication is that the PLC all-in-one machine 12 reads relevant data such as the rotation speed, the voltage, the current and the like of the molecular pump on the molecular pump driver 143, so that the opening and the closing of the relay group 141 are controlled through programming of the PLC all-in-one machine to automatically drive the opening and the closing of the molecular pump unit 2.
When the low-temperature heat-insulation gas cylinder, the multi-layer winding high-vacuum low-temperature storage tank and the vacuumized gas cylinder with high vacuum degree requirement are vacuumized or vacuumized again for use, the specific operation process is as follows:
two ends of the vacuum hose 17 are respectively communicated with the vacuum tee 15 and the molecular pump air outlet 24 to form a whole set of vacuum system; connecting plugs corresponding to an ionization gauge, a second resistance gauge, 485 communication, a collector, a molecular pump power supply and a molecular pump external control in the molecular pump unit 2 with interfaces corresponding to the interface component 13 of the mechanical pump unit 1; the starting vacuum degree of the molecular pump body 21 is input into the PLC all-in-one machine 12, when the vacuum degree reaches a set value after the mechanical pump unit 1 is started, the molecular pump unit 2 can be automatically started through the 485 communication interface 135, when the required vacuum degree is pumped out, the molecular pump unit 2 is closed, the rotating speed of the molecular pump body 21 gradually decreases for a certain time, and when the rotating speed of the molecular pump body 21 is 0, the mechanical pump unit 1 can be automatically closed. The molecular pump is started when the molecular pump unit 2 is started in a vacuum state, namely the vacuum degree is lower than 10Pa, otherwise, the rotor of the molecular pump is easily damaged; when the vacuum pumping is finished, the molecular pump needs to be closed firstly, the mechanical pump can be closed only after the rotating speed of the molecular pump is reduced to 0, the purpose is to ensure that the rotating speed of the molecular pump is slowly reduced by ensuring that the front end of the molecular pump has a preset negative pressure, so that the service life of the molecular pump is prolonged, the time is usually about 20-30 minutes, and the time for reducing the rotating speed of the magnetic suspension molecular pump to 0 is longer; therefore, the PLC programming is used for realizing automatic control, so that personnel do not need to wait beside the equipment, and the system can automatically finish the starting of the molecular pump unit 2 and the closing of the mechanical pump unit 1. And based on the PLC all-in-one machine 12, the automatic mode only needs an operator to press the keys for starting the mechanical pump unit 1 and stopping the molecular pump unit 2 once, and does not need other complicated operation processes.
On the basis of the scheme, the mechanical pump unit and the molecular pump unit based on the conventional portable vacuumizing unit occupy a larger installation space of a case, so that the case cannot be made small and light; the PLC all-in-one machine adopts a Haonaire PLC all-in-one machine, has small volume, is provided with a display screen, has short depth, does not occupy the space of a case, and is convenient for programming and panel installation.
On the basis of the above scheme, preferably, the vacuum hose 17 is a corrugated pipe made of metal;
the above-described embodiments are merely illustrative of one or more embodiments of the present invention, which are described in more detail and detail, but are not to be construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention.

Claims (10)

1. A split type vacuumizing device comprises a mechanical pump unit (1) and a molecular pump unit (2), and is characterized in that the mechanical pump unit (1) comprises a mechanical pump body (11), a control module connected with the mechanical pump body (11), and a mechanical pump frame trolley (18) for bearing the mechanical pump body (11) and the control module;
the molecular pump unit (2) comprises a molecular pump body (21), a reversing valve and a molecular pump controller (144) which are connected with the molecular pump body (21), and a molecular pump frame trolley (23) which bears the molecular pump body (21) and the molecular pump controller (144);
the vacuum three-way valve is characterized in that a vacuum three-way valve (15) is installed at an air inlet of the mechanical pump body (11), and the vacuum three-way valve (15) is respectively connected with a first resistance gauge (139) and a vacuum hose (17) for measuring the vacuum degree; the vacuum hose (17) is connected with a molecular pump body (21) to realize linkage;
the control module comprises a PLC (programmable logic controller) all-in-one machine (12) for controlling the mechanical pump unit (1) and the molecular pump unit (2) and an electric control module (14) respectively connected with the mechanical pump unit (1) and the molecular pump unit (2).
2. The split vacuum extractor as claimed in claim 1, wherein the electronic control module (14) comprises a power supply assembly (142), an electrical component connected to the power supply assembly (142), and an interface assembly (13) connected to the electrical component; the power supply assembly supplies power to the mechanical pump unit (1) and the molecular pump unit (2) simultaneously.
3. The split vacuum extractor as claimed in claim 2, wherein the power supply assembly (142) comprises a 220V mechanical pump dc power supply, a 96V molecular pump power supply, and a voltage converter mounted within the mechanical pump frame cart (18).
4. The split vacuum extractor as claimed in claim 2, wherein the electrical assembly comprises a first ionization gauge, a vacuum gauge (138) mounted in the mechanical pump assembly (1).
5. The split type vacuum extractor as claimed in claim 4, wherein the electrical assembly further comprises a second resistance gauge (28), an ionization gauge (26), a 485 communication, a collector and a molecular pump external control which are installed in the molecular pump unit (2).
6. The split vacuum extractor as claimed in claim 5, wherein the interface assembly (13) comprises a system switch (137) connected to the electrical assembly, a resistance gauge communication interface (131) connected to the first resistance gauge (139), and an ionization gauge communication interface (132) connected to the ionization gauge (26).
7. The split type vacuum extractor as claimed in claim 6, wherein the interface assembly (13) further comprises a collector interface (133), a molecular pump power interface (134), a 485 communication interface (135), and a molecular pump external control interface (136); wherein the second resistance gauge (28) is connected with the resistance gauge communication interface (131), and the ionization gauge (26) is connected with the ionization gauge communication interface (132); the 485 communication interface, the collector interface (135), the collector interface (133), the molecular pump power interface (134) and the molecular pump external control interface (136) are correspondingly connected with the molecular pump external control interface, the molecular pump power supply and the molecular pump external control interface respectively.
8. The split vacuum extractor as claimed in claim 4, wherein the electrical assembly further comprises an air switch (145) installed in the mechanical pump assembly (1), a power socket (148), a leakage protector (147), and a vacuum gauge circuit board (146) connected to the vacuum gauge (138).
9. The split vacuum extractor of claim 7, wherein the electrical assembly further comprises a molecular pump driver (143) coupled to the molecular pump controller (144), and the molecular pump controller (144) is coupled to the molecular pump power interface (134).
10. The split type vacuum extractor as claimed in claim 9, wherein the molecular pump driver (143) is connected to the PLC integrated machine (12) through a relay set (141).
CN202110636261.2A 2021-06-08 2021-06-08 Split type evacuating device Pending CN113153691A (en)

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Application Number Priority Date Filing Date Title
CN202110636261.2A CN113153691A (en) 2021-06-08 2021-06-08 Split type evacuating device

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Application Number Priority Date Filing Date Title
CN202110636261.2A CN113153691A (en) 2021-06-08 2021-06-08 Split type evacuating device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114486115A (en) * 2021-12-30 2022-05-13 合肥鑫波焊接波纹管有限公司 Bellows vacuum leak detection device
CN114910213A (en) * 2022-04-19 2022-08-16 广州美东能源有限公司 Efficient LNG storage tank vacuum degree detection and maintenance method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114486115A (en) * 2021-12-30 2022-05-13 合肥鑫波焊接波纹管有限公司 Bellows vacuum leak detection device
CN114910213A (en) * 2022-04-19 2022-08-16 广州美东能源有限公司 Efficient LNG storage tank vacuum degree detection and maintenance method

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