CN113138130B - Ultralow-temperature in-situ tensile platform and scanning electron microscope ultralow-temperature in-situ tensile test system - Google Patents
Ultralow-temperature in-situ tensile platform and scanning electron microscope ultralow-temperature in-situ tensile test system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/18—Performing tests at high or low temperatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/04—Chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
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- G01N2203/0017—Tensile
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- G—PHYSICS
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/006—Crack, flaws, fracture or rupture
- G01N2203/0062—Crack or flaws
- G01N2203/0064—Initiation of crack
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- G—PHYSICS
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
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- G01N2203/0062—Crack or flaws
- G01N2203/0066—Propagation of crack
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/006—Crack, flaws, fracture or rupture
- G01N2203/0067—Fracture or rupture
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- G—PHYSICS
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
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- G01N2203/02—Details not specific for a particular testing method
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Abstract
An ultralow temperature in-situ tensile platform and an ultralow temperature in-situ tensile testing system for a scanning electron microscope relate to the field of ultralow temperature mechanical property testing. The invention solves the problem that the traditional tensile property test can not dynamically capture the crack initiation, expansion, necking and fracture of the material under the ultralow temperature environment. The cryogenic refrigerator is arranged in a refrigerator reserved square hole of a bottom plate, a first lead screw assembly and a second lead screw assembly are arranged above the bottom plate side by side, two ends of the first lead screw assembly and the second lead screw assembly are rotatably connected with two side plates respectively, a driving device is arranged on the outer end face of one side plate of a rack, and two power output ends of the driving device are connected with the first lead screw assembly and the second lead screw assembly respectively; the first clamp assembly is installed on the end face of one side, close to the low-temperature refrigerator, of the first sliding block fixing assembly, and the second clamp assembly is installed on the end face of one side, close to the low-temperature refrigerator, of the second sliding block fixing assembly. The device is used for dynamically capturing the crack initiation, expansion, necking and fracture of the material in the ultralow temperature environment.
Description
Technical Field
The invention relates to the field of ultralow-temperature mechanical property testing, in particular to an ultralow-temperature in-situ stretching platform and an ultralow-temperature in-situ stretching testing system for a scanning electron microscope.
Background
With the rapid development of science and technology, the requirements for materials (metal, ceramic, polymer, composite material and coating material) are becoming more and more demanding, and especially in the fields of aerospace, petroleum and petrochemical industry and the like, when the material is used in a low-temperature environment, the performance, especially the mechanical performance parameters of the material show obvious changes. In general, as the temperature decreases, the strength and hardness of the material increase, while the plasticity and toughness decrease. At a certain low temperature, the metal material may have a phenomenon of sharp reduction of plasticity and toughness, which is called cold brittle transition. Cryogenic techniques are now widely used in many areas. The areas from the top to the universe and the next to the daily life are closely related to the low temperature technology. For example, the technology has been developed in rocket technology, aerospace technology, low-temperature electronics, high-energy physical research equipment, controlled thermonuclear reaction, radio microwave technology and other fields. The development of low-temperature technology also puts higher requirements on the inspection of low-temperature materials, and the low-temperature material not only needs to be subjected to a traditional mechanical property test, but also needs to be subjected to a low-temperature fracture mechanical property test and the like. However, for ultralow temperature mechanical property test, especially for in-situ observation of the fracture behavior of the material under tensile load: the analysis of dynamic processes such as crack initiation and propagation, necking and breaking is a difficult problem which needs to be solved urgently at present.
In conclusion, the conventional tensile property test cannot dynamically capture the problems of crack initiation, expansion, necking and fracture of the material in the ultralow temperature environment.
Disclosure of Invention
The invention aims to solve the problems that the traditional tensile property test cannot dynamically capture the crack initiation, expansion, necking and fracture of a material in an ultralow temperature environment, and further provides an ultralow temperature in-situ tensile platform and an ultralow temperature in-situ tensile test system of a scanning electron microscope.
The technical scheme of the invention is as follows:
an ultra-low temperature in-situ stretching table comprises a sample clamping piece 1, a low-temperature refrigerator 2, a tension sensor assembly 3, a moving lead screw mechanism 4, a driving device, a frame 8 and an electron microscope table connecting disc 9, wherein the frame 8 comprises a bottom plate 81 and two side plates 82, the bottom plate 81 is horizontally arranged, the two side plates 82 are vertically arranged on two sides of the upper end surface of the bottom plate 81, the bottom plate 81 and the two side plates 82 are of an integrated structure, each side plate 82 is provided with two lead screw reserved shaft holes, the four lead screw reserved shaft holes on the two side plates 82 are oppositely arranged in pairs, the middle part of the bottom plate 81 is provided with a refrigerator reserved square hole, a cryogenic refrigerator 2 is arranged in the refrigerator reserved square hole of the bottom plate 81, and the electron microscope table connecting disc 9 is arranged on the lower end surface of the bottom plate 81; the moving lead screw mechanism 4 comprises a first lead screw assembly 41 and a second lead screw assembly 42, the first lead screw assembly 41 and the second lead screw assembly 42 are arranged above the bottom plate 81 side by side, two ends of the first lead screw assembly 41 and the second lead screw assembly 42 are respectively rotatably connected with the two side plates 82, both the first lead screw assembly 41 and the second lead screw assembly 42 are bidirectional lead screws, a driving device is installed on the outer end face of one side plate 82 of the rack 8, and two power output ends of the driving device are respectively connected with the first lead screw assembly 41 and the second lead screw assembly 42; the sample clamping member 1 comprises a first clamping assembly 11, a second clamping assembly 12, a first sliding block fixing assembly 13, a second sliding block fixing assembly 14, and a first sliding block fixing assembly 13 and a second sliding block fixing assembly 14 which are oppositely arranged between two side plates 82, wherein two ends of the first sliding block fixing assembly 13 are respectively connected with an upper sliding block a412 of a first lead screw assembly 41 and an upper sliding block b422 of a second lead screw assembly 42, two ends of the second sliding block fixing assembly 14 are respectively connected with a lower sliding block a413 of the first lead screw assembly 41 and a lower sliding block b423 of the second lead screw assembly 42, the first clamping assembly 11 and the second clamping assembly 12 are oppositely arranged between the first sliding block fixing assembly 13 and the second sliding block fixing assembly 14, the first clamping assembly 11 is arranged on the end face of one side, close to the cryogenic refrigerator 2, of the first sliding block fixing assembly 13, the second clamping assembly 12 is arranged on the end face of one side, close to the cryogenic refrigerator 2, and a tension sensor assembly 3 is arranged on the first sliding block fixing assembly 13.
Further, the driving device comprises a speed reducer 5, a motor 6 and a belt transmission mechanism 7, the speed reducer 5 is installed on the outer end face of one side plate 82 of the frame 8, two output shafts of the speed reducer 5 are respectively connected with the first lead screw assembly 41 and the second lead screw assembly 42, the motor 6 is installed on the speed reducer 5, the belt transmission mechanism 7 comprises a driving pulley 71, a transmission belt 72 and a driven pulley 73, the driving pulley 71 is installed on the output shaft of the motor 6, the driven pulley 73 is installed on the input shaft of the speed reducer 5, and the driving pulley 71 is connected with the driven pulley 73 through the transmission belt 72.
Further, the first lead screw assembly 41 includes a lead screw shaft a411, an upper slide block a412, a lower slide block a413, two bearings a414 and two lead screw supporting seats a415, two ends of the lead screw shaft a411 are respectively inserted into lead screw reserved shaft holes corresponding to the two side plates 82, the bearings a414 are arranged between shaft ends of the lead screw shaft a411 and the corresponding side plates 82, two ends of the lead screw shaft a411 are respectively provided with left-handed threads and right-handed threads, the middle part of the lead screw shaft a411 is an optical axis, the upper slide block a412 and the lower slide block a413 are respectively installed at two ends of the lead screw shaft a411 in a spiral manner, and the two lead screw supporting seats a415 are sleeved on the optical axis of the middle part of the lead screw shaft a411 and are connected with the bottom plate 81; the second screw assembly 42 includes a screw shaft b421, an upper slide b422, a lower slide b423, two bearings b424 and two screw supporting seats b425, two ends of the screw shaft b421 are respectively inserted into screw reserved shaft holes corresponding to the two side plates 82, a bearing b424 is arranged between the shaft end of the screw shaft b421 and the corresponding side plate 82, two ends of the screw shaft b421 are respectively provided with a left-hand thread and a right-hand thread, the middle part of the screw shaft b421 is an optical axis, the upper slide b422 and the lower slide b423 are respectively installed at two ends of the screw shaft b421 in a spiral manner, and the two screw supporting seats b425 are sleeved on the optical axis of the middle part of the screw shaft b421 and are connected with the bottom plate 81.
Further, the first slider fixing assembly 13 includes an upper slider fixing plate a131, a first slider fixing block a132, a second slider fixing block a133 and a plurality of slider connectors a, the upper slider fixing plate a131 is horizontally disposed between the screw shaft a411 and the screw shaft b421, two ends of the upper slider fixing plate a131 are respectively provided with a positioning groove matched with the upper slider a412 and the lower slider a413, the first slider fixing block a132 and the second slider fixing block a133 are respectively oppositely disposed at two ends of the upper slider fixing plate a131, one ends of the first slider fixing block a132 and the second slider fixing block a133 close to the upper slider fixing plate a131 are respectively provided with a positioning groove matched with the upper slider 412 a and the lower slider a413, the first slider fixing block a132 mounts the screw shaft a411 on the upper slider fixing plate a131 through the plurality of slider connectors a, and the second slider fixing block 133 a mounts the screw shaft b421 on the upper slider fixing plate a131 through the plurality of slider connectors a; the first clamp assembly 11 comprises an upper clamp a, a lower clamp a and a clamp connecting piece a, wherein the upper clamp a is fixed at one end, close to the cryogenic refrigerator 2, of an upper slide block fixing plate a131, the end, close to the cryogenic refrigerator 2, of the upper end face of the upper clamp a is provided with a clamp reserved rectangular groove a, the bottom of the clamp reserved rectangular groove a is provided with a lower sample positioning groove a, the lower sample positioning groove a and the upper end face of the cryogenic refrigerator 2 are located on the same horizontal plane, the lower clamp a is installed in the clamp reserved rectangular groove a of the upper clamp a, the lower end face of the lower clamp a is provided with the upper sample positioning groove a, and the lower clamp a is detachably connected with the upper clamp a through the clamp connecting piece a.
Further, the second slider fixing assembly 14 includes an upper slider fixing plate b141, a first slider fixing block b142, a second slider fixing block b143, and a plurality of slider connectors b, the upper slider fixing plate b141 is horizontally disposed between the screw shaft a411 and the screw shaft b421, two ends of the upper slider fixing plate b141 are respectively provided with a positioning groove engaged with the upper slider b422 and the lower slider b423, the first slider fixing block b142 and the second slider fixing block b143 are respectively oppositely disposed at two ends of the upper slider fixing plate b141, one ends of the first slider fixing block b142 and the second slider fixing block b143 near the upper slider fixing plate b141 are respectively provided with a positioning groove engaged with the upper slider b422 and the lower slider b423, the screw shaft a411 is mounted on the upper slider fixing plate b141 by the first slider fixing block b142 through the plurality of slider connectors b, and the screw shaft b421 is mounted on the upper slider fixing plate b141 by the second slider fixing block b143 through the plurality of slider connectors b; the second clamp assembly 12 comprises an upper clamp b, a lower clamp b and a clamp connecting piece b, the upper clamp b is fixed at one end, close to the cryogenic refrigerator 2, of an upper slide block fixing plate b141, a clamp reserved rectangular groove b is formed in one end, close to the cryogenic refrigerator 2, of the upper end face of the upper clamp b, a lower sample positioning groove b is formed in the groove bottom of the clamp reserved rectangular groove b, the lower sample positioning groove b and the upper end face of the cryogenic refrigerator 2 are located on the same horizontal plane, the lower clamp b is installed in the clamp reserved rectangular groove b of the upper clamp b, the upper sample positioning groove b is formed in the lower end face of the lower clamp b, and the lower clamp b is detachably connected with the upper clamp b through the clamp connecting piece b.
Further, force sensor subassembly 3 includes force sensor 31, sensor mounting bracket 32 and lock nut 33, keep away from curb plate 82 up end middle part on one side of the drive arrangement and set up the sensor reservation groove, force sensor 31 installs the contact that force sensor 31 in the sensor reservation groove and offsets with last sliding block fixed plate a131, sensor mounting bracket 32 includes flat board and two risers, the vertical setting of two risers is connected in force sensor 31 both sides and with last sliding block fixed plate a131, the vertical setting of flat board is connected in force sensor 31 the place ahead and with two risers, the lock screw hole is seted up at dull and stereotyped middle part, lock nut 33 spiral is installed in dull and stereotyped lock screw hole and is offseted with force sensor 31.
Further, it still includes spacing subassembly 10, and spacing subassembly 10 includes spacing frock 101, limit switch 102 and grating encoder 103, and the curb plate 82 lateral part that is close to drive arrangement one side installs spacing frock 101, and first slider fixed block b142 is close to one side end face installation of spacing frock 101 and has limit switch 102, limit switch 102 sets up with spacing frock 101 relatively, and grating encoder 103 installs on the up end of the bottom plate 81 that is close to limit switch 102 one side.
A scanning electron microscope ultra-low temperature in-situ tensile test system comprising the ultra-low temperature in-situ tensile platform, the system further comprises a circulating system X1, a helium compressor X2, a cold head box X3, a control cabinet X4, a temperature control system X5, a helium transmission pipeline X6, a connecting pipeline, a scanning electron microscope platform X9, a scanning electron microscope sample cabin X11, an in-situ tensile control system X12 and a scanning electron microscope control system X13, the scanning electron microscope sample cabin X11 is of a hollow cuboid structure, the scanning electron microscope platform X9 is arranged in the scanning electron microscope sample cabin X11, the ultra-low temperature in-situ tensile platform is arranged on the upper end surface of the scanning electron microscope platform X9, a camera of the scanning electron microscope platform X9 faces to a sample clamping piece 1 of the ultra-low temperature in-situ tensile platform, one end of the helium transmission pipeline X6 is hermetically connected with the scanning electron microscope sample cabin X11, the circulating system X1 is connected with the helium compressor X2 through an air outlet pipe and an air return pipe, the circulating system X1 cools the helium compressor X2, the helium compressor X2 compresses and increases the pressure of the circulated expanded hot helium gas, and exchanges heat with compressor oil of the helium compressor X2 in a heat exchanger to enable the temperature to rapidly drop to low-temperature high-pressure helium gas, the helium compressor X2 is hermetically connected with a gas return pipe and a cold head box X3 through a gas outlet pipe, the low-temperature high-pressure helium gas compressed by the helium compressor X2 expands in the cold head box X3 to take away surrounding heat, the cold head box X3 is hermetically connected with the other end of a helium gas transmission pipeline X6, a temperature control system X5 is connected with a control cabinet X4 through a lead, the control cabinet X4 is connected with the cold head box X3 through a lead, the control cabinet X4 achieves the set temperature of the temperature control system X5 by adjusting the flow of the helium gas, the helium gas transmission pipeline X6 is connected with a gas inlet of the cryogenic refrigerator 2 through a connecting pipeline, the helium gas is introduced into the cryogenic refrigerator 2 of the ultra-low-temperature in-situ stretching table through the connecting pipeline, the in-situ stretching control system X12 is connected with a motor 6 of the ultralow-temperature in-situ stretching table through a lead, and the scanning electron microscope control system X13 is connected with a scanning electron microscope table X9 through a lead.
Further, the helium gas delivery pipe X6 is made of a heat insulating material.
Furthermore, the device also comprises a cold head cabin-penetrating flange, and one end of a helium gas transmission pipeline X6 is hermetically connected with the scanning electron microscope sample cabin X11 through the cold head cabin-penetrating flange.
Compared with the prior art, the invention has the following effects:
1. the ultra-low temperature in-situ stretching platform is arranged on a scanning electron microscope platform X9 through an electron microscope platform connecting disc 9, and a driving device drives a first lead screw assembly 41 and a second lead screw assembly 42 to drive a first sliding block fixing assembly 13 and a second sliding block fixing assembly 14 to move outwards synchronously, so that a sample clamped by a sample clamping piece 1 is stretched at ultra-low temperature. And the sample clamped by the sample clamping piece 1 is tightly attached to the low-temperature refrigerator 2 in the stretching process, so that the low-temperature refrigerator 2 is ensured to cool the sample at constant temperature.
2. The scanning electron microscope ultralow temperature in-situ tensile test system combines the scanning electron microscope and the ultralow temperature in-situ tensile platform, and can realize the recording of the whole process of crack initiation, crack propagation, contraction, crack generation and the like of the material in the ultralow temperature environment under the tensile load under the scanning electron microscope. The system combines the microstructure recorded by a scanning electron microscope and a stress-strain curve in the ultralow-temperature stretching process to realize the recording and observation of the stretching process of the material in the low-temperature environment (-196 ℃ -20 ℃), more intuitively reveals the fracture behavior mechanism of the material in the ultralow-temperature environment, and provides a theoretical basis for the design of the low-temperature environment application material. The scanning electron microscope ultralow temperature in-situ tensile test system cools the test sample by adopting helium, so that the low-temperature environment is continuously kept in the material in-situ tensile test process, and the tensile fracture process is observed in situ under the material ultralow temperature environment in the real sense. The test system has the advantages of accurate temperature, real-time recording, accurate control, visual representation, wide applicability and the like.
Drawings
FIG. 1 is an isometric view of an ultra-low temperature in situ stretching station of the present invention;
FIG. 2 is a front view of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 3 is a side view of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 4 is a top view of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 5 is an isometric view of the drive mechanism of the ultra-low temperature in situ stretching station of the present invention;
FIG. 6 is a front view of the drive mechanism of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 7 is a side view of the drive mechanism of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 8 is a top view of the drive mechanism of the ultra-low temperature in-situ stretching station of the present invention;
FIG. 9 is a schematic structural diagram of a scanning electron microscope ultra-low temperature in-situ tensile testing system of the present invention.
Detailed Description
The first specific implementation way is as follows: the embodiment is described with reference to fig. 2 to 9, and the ultra-low temperature in-situ stretching table of the embodiment comprises a sample holder 1, a cryogenic refrigerator 2, a tension sensor assembly 3, a moving screw mechanism 4, a driving device, a frame 8 and an electron microscope table connecting disc 9, wherein the frame 8 comprises a bottom plate 81 and two side plates 82, the bottom plate 81 is horizontally arranged, the two side plates 82 are vertically arranged at two sides of the upper end surface of the bottom plate 81, the bottom plate 81 and the two side plates 82 are of an integrated structure, each side plate 82 is provided with two screw reserved shaft holes, the four screw reserved shaft holes on the two side plates 82 are arranged oppositely in pairs, a reserved square hole is arranged in the middle of the bottom plate 81, the cryogenic refrigerator 2 is arranged in a refrigerator reserved square hole of the bottom plate 81, and the electron microscope table connecting disc 9 is arranged on the lower end surface of the bottom plate 81; the moving lead screw mechanism 4 comprises a first lead screw assembly 41 and a second lead screw assembly 42, the first lead screw assembly 41 and the second lead screw assembly 42 are arranged above the bottom plate 81 side by side, two ends of the first lead screw assembly 41 and the second lead screw assembly 42 are rotatably connected with the two side plates 82 respectively, the first lead screw assembly 41 and the second lead screw assembly 42 are both bidirectional lead screws, the driving device is installed on the outer end face of one side plate 82 of the rack 8, and two power output ends of the driving device are connected with the first lead screw assembly 41 and the second lead screw assembly 42 respectively; the sample clamping member 1 comprises a first clamp assembly 11, a second clamp assembly 12, a first slider fixing assembly 13, a second slider fixing assembly 14, wherein the first slider fixing assembly 13 and the second slider fixing assembly 14 are oppositely arranged between two side plates 82, two ends of the first slider fixing assembly 13 are respectively connected with an upper slide block a412 of a first lead screw assembly 41 and an upper slide block b422 of a second lead screw assembly 42, two ends of the second slider fixing assembly 14 are respectively connected with a lower slide block a413 of the first lead screw assembly 41 and a lower slide block b423 of the second lead screw assembly 42, the first clamp assembly 11 and the second clamp assembly 12 are oppositely arranged between the first slider fixing assembly 13 and the second slider fixing assembly 14, the first clamp assembly 11 is arranged on the end surface of one side, close to the cryogenic refrigerator 2, of the first slider fixing assembly 13, the second clamp assembly 12 is arranged on the end surface of one side, close to the cryogenic refrigerator 2, of the second slider fixing assembly 14, and the tension sensor assembly 3 is arranged on the first slider fixing assembly 13.
The second embodiment is as follows: the present embodiment is described with reference to fig. 6 to 9, the driving device of the present embodiment includes a speed reducer 5, a motor 6, and a belt transmission mechanism 7, the speed reducer 5 is mounted on an outer end face of one side plate 82 of the frame 8, two output shafts of the speed reducer 5 are connected to the first lead screw assembly 41 and the second lead screw assembly 42, the motor 6 is mounted on the speed reducer 5, the belt transmission mechanism 7 includes a driving pulley 71, a transmission belt 72, and a driven pulley 73, the driving pulley 71 is mounted on an output shaft of the motor 6, the driven pulley 73 is mounted on an input shaft of the speed reducer 5, and the driving pulley 71 is connected to the driven pulley 73 through the transmission belt 72. So set up, the output shaft of motor 6 drives driving pulley 71 and rotates, and driving pulley 71 drives driven pulley 73 through conveyer belt 72 and rotates, and driven pulley 73 transmits power to speed reducer 5, and two output shafts of speed reducer 5 drive first lead screw subassembly 41 and second lead screw subassembly 42 respectively and rotate. Other components and connections are the same as in the first embodiment.
The third concrete implementation mode: the present embodiment is described with reference to fig. 2 to 5, the first lead screw assembly 41 of the present embodiment includes a lead screw shaft a411, an upper slide block a412, a lower slide block a413, two bearings a414, and two lead screw support blocks a415, two ends of the lead screw shaft a411 are respectively inserted into lead screw reserved shaft holes corresponding to the two side plates 82, a bearing a414 is disposed between a shaft end of the lead screw shaft a411 and the corresponding side plate 82, two ends of the lead screw shaft a411 are respectively provided with a left-hand thread and a right-hand thread, a middle portion of the lead screw shaft a411 is an optical axis, the upper slide block a412 and the lower slide block a413 are respectively installed at two ends of the lead screw shaft a411 in a spiral manner, and the two lead screw support blocks a415 are sleeved on the optical axis of the middle portion of the lead screw shaft a411 and are connected to the bottom plate 81; the second lead screw assembly 42 comprises a lead screw shaft b421, an upper slide block b422, a lower slide block b423, two bearings b424 and two lead screw supporting seats b425, two ends of the lead screw shaft b421 are respectively inserted into lead screw reserved shaft holes corresponding to the two side plates 82, the bearings b424 are arranged between shaft ends of the lead screw shaft b421 and the corresponding side plates 82, two ends of the lead screw shaft b421 are respectively provided with left-handed threads and right-handed threads, the middle part of the lead screw shaft b421 is an optical axis, the upper slide block b422 and the lower slide block b423 are respectively installed at two ends of the lead screw shaft b421 in a spiral mode, and the two lead screw supporting seats b425 are sleeved on the optical axis of the middle part of the lead screw shaft b421 and are connected with the bottom plate 81. Other compositions and connections are the same as in the first or second embodiments.
The fourth concrete implementation mode: describing the present embodiment with reference to fig. 2 to 5, the first slider fixing assembly 13 of the present embodiment includes an upper slider fixing plate a131, a first slider fixing block a132, a second slider fixing block a133, and a plurality of slider connectors a, the upper slider fixing plate a131 is horizontally disposed between the screw shaft a411 and the screw shaft b421, two ends of the upper slider fixing plate a131 are respectively provided with positioning grooves matched with the upper slider a412 and the lower slider a413, the first slider fixing block a132 and the second slider fixing block a133 are respectively disposed at two ends of the upper slider fixing plate a131, one ends of the first slider fixing block a132 and the second slider fixing block a133 close to the upper slider fixing plate a131 are respectively opened with positioning grooves matched with the upper slider a412 and the lower slider a413, the first slider fixing block a132 mounts the screw shaft a411 on the upper slider fixing plate a131 through the plurality of slider connectors a, and the second slider fixing block a133 mounts the screw shaft b421 on the upper slider fixing plate a131 through the plurality of slider connectors a; the first clamp assembly 11 comprises an upper clamp a, a lower clamp a and a clamp connecting piece a, the upper clamp a is fixed at one end, close to the cryogenic refrigerator 2, of the upper slide block fixing plate a131, a clamp reserved rectangular groove a is formed in one end, close to the cryogenic refrigerator 2, of the upper end face of the upper clamp a, a lower sample positioning groove a is formed in the groove bottom of the clamp reserved rectangular groove a, the lower sample positioning groove a and the upper end face of the cryogenic refrigerator 2 are located on the same horizontal plane, the lower clamp a is installed in the clamp reserved rectangular groove a of the upper clamp a, the upper sample positioning groove a is formed in the lower end face of the lower clamp a, and the lower clamp a is detachably connected with the upper clamp a through the clamp connecting piece a. According to the arrangement, one end of the sheet sample is inserted into the sample positioning groove a between the upper clamp a and the lower clamp a, and the end part of the sheet sample is clamped between the lower clamp a and the upper clamp a through the clamp connector a. And lower sample constant head tank a is located same horizontal plane with cryocooler 2's up end for hug closely on cryocooler 2 through the sample with sample holder 1 centre gripping in tensile process, guarantee that cryocooler 2 carries out homothermal cooling to the sample. Other compositions and connection relationships are the same as in the first, second or third embodiment.
The fifth concrete implementation mode is as follows: describing the present embodiment with reference to fig. 2 to 5, the second slider fixing assembly 14 of the present embodiment includes an upper slider fixing plate b141, a first slider fixing block b142, a second slider fixing block b143, and a plurality of slider connectors b, the upper slider fixing plate b141 is horizontally disposed between the screw shaft a411 and the screw shaft b421, both ends of the upper slider fixing plate b141 are respectively provided with a positioning groove engaged with the upper slider b422 and the lower slider b423, the first slider fixing block b142 and the second slider fixing block b143 are respectively disposed at both ends of the upper slider fixing plate b141, one ends of the first slider fixing block b142 and the second slider fixing block b143 near the upper slider fixing plate b141 are respectively provided with a positioning groove engaged with the upper slider b422 and the lower slider b423, the first slider fixing block b142 mounts the screw shaft a on the upper slider fixing plate b141 b 411 through the plurality of slider connectors b, and the second slider fixing block b143 mounts the screw shaft b421 on the upper slider fixing plate b141 through the plurality of slider connectors b; the second clamp assembly 12 comprises an upper clamp b, a lower clamp b and a clamp connecting piece b, the upper clamp b is fixed at one end, close to the cryogenic refrigerator 2, of an upper slide block fixing plate b141, a clamp reserved rectangular groove b is formed in one end, close to the cryogenic refrigerator 2, of the upper end face of the upper clamp b, a lower sample positioning groove b is formed in the groove bottom of the clamp reserved rectangular groove b, the lower sample positioning groove b and the upper end face of the cryogenic refrigerator 2 are located on the same horizontal plane, the lower clamp b is installed in the clamp reserved rectangular groove b of the upper clamp b, the upper sample positioning groove b is formed in the lower end face of the lower clamp b, and the lower clamp b is detachably connected with the upper clamp b through the clamp connecting piece b. According to the arrangement, the other end of the sheet sample is inserted into the sample positioning groove b between the upper clamp b and the lower clamp b, and the end part of the sheet sample is clamped between the upper clamp b and the lower clamp b through the clamp connecting piece b. And lower sample constant head tank b is located the same horizontal plane with cryogenic refrigerator 2's up end, guarantees that cryogenic refrigerator 2 carries out homothermal cooling to the sample. Other compositions and connection relationships are the same as those in the first, second, third or fourth embodiment.
The sixth specific implementation mode: the embodiment is described with reference to fig. 2 to 5, the tension sensor assembly 3 of the embodiment includes a tension sensor 31, a sensor mounting bracket 32 and a locking nut 33, a sensor reservation groove is formed in the middle of the upper end surface of a side plate 82 far away from one side of a driving device, a contact of the tension sensor 31 mounted in the sensor reservation groove is abutted to an upper sliding block fixing plate a131, the sensor mounting bracket 32 includes a flat plate and two vertical plates, the two vertical plates are vertically arranged on two sides of the tension sensor 31 and connected to the upper sliding block fixing plate a131, the flat plate is vertically arranged in front of the tension sensor 31 and connected to the two vertical plates, a locking screw hole is formed in the middle of the flat plate, and the locking nut 33 is spirally mounted in the flat plate locking screw hole and abutted to the tension sensor 31. So set up, the tension sensor subassembly 3 is used for measuring sample holder 1 to the pulling force of slice sample. Other compositions and connection relationships are the same as in the first, second, third, fourth or fifth embodiment.
The seventh embodiment: the embodiment is described with reference to fig. 2 to fig. 5, the embodiment further includes a limiting assembly 10, the limiting assembly 10 includes a limiting tool 101, a limiting switch 102 and a grating encoder 103, the limiting tool 101 is installed at a side portion of the side plate 82 close to one side of the driving device, the limiting switch 102 is installed at a side end face of the first slider fixing block b142 close to the limiting tool 101, the limiting switch 102 and the limiting tool 101 are oppositely arranged, and the grating encoder 103 is installed on an upper end face of the bottom plate 81 close to one side of the limiting switch 102. So set up, limit tool 101 and limit switch 102 are used for limiting the displacement of sample holder 1. Other compositions and connection relationships are the same as in the first, second, third, fourth, fifth or sixth embodiment.
The specific implementation mode is eight: the embodiment is described with reference to fig. 1 to 5, the scanning electron microscope ultra-low temperature in-situ tensile testing system of the embodiment comprises the ultra-low temperature in-situ tensile platform, and further comprises a circulating system X1, a helium compressor X2, a cold head box X3, a control cabinet X4, a temperature control system X5, a helium transmission pipeline X6, a connecting pipeline, a scanning electron microscope platform X9, a scanning electron microscope sample cabin X11, an in-situ tensile control system X12 and a scanning electron microscope control system X13, wherein the scanning electron microscope sample cabin X11 is of a hollow cuboid structure, the scanning electron microscope platform X9 is arranged inside the scanning electron microscope sample cabin X11, the ultra-low temperature in-situ tensile platform is installed on the upper end surface of the scanning electron microscope platform X9, a camera of the scanning electron microscope platform X9 faces to a sample holder 1 of the ultra-low temperature tensile platform, one end of the helium transmission pipeline X6 is hermetically connected with the scanning electron microscope sample cabin X11, the circulating system X1 is connected with a helium compressor X2 through an air outlet pipe and an air return pipe, the circulating system X1 cools the helium compressor X2, the helium compressor X2 compresses the expanded hot helium gas which comes from circulation to increase pressure and exchanges heat with compressor oil of the helium compressor X2 in a heat exchanger to enable the temperature to rapidly decrease to low-temperature high-pressure helium gas, the helium compressor X2 is hermetically connected with a cold head box X3 through an air outlet pipe and an air return pipe, the low-temperature high-pressure helium gas which is compressed by the helium compressor X2 expands in the cold head box X3 to take away surrounding heat, the cold head box X3 is hermetically connected with the other end of a helium transmission pipeline X6, a temperature control system X5 is connected with a control cabinet X4 through a lead, the control cabinet X4 is connected with the cold head box X3 through a lead, the control cabinet X4 achieves the set temperature of the temperature control system X5 through regulating the flow of the helium gas, the helium transmission pipeline X6 is connected with an air inlet of a low-temperature refrigerator 2 through a connecting pipeline, helium is introduced into a cryogenic refrigerator 2 of the ultra-low temperature in-situ stretching table through a connecting pipeline, an in-situ stretching control system X12 is connected with a motor 6 of the ultra-low temperature in-situ stretching table through a lead, and a scanning electron microscope control system X13 is connected with a scanning electron microscope table X9 through a lead. Other compositions and connection relationships are the same as those of embodiment one, two, three, four, five, six or seven.
The scanning electron microscope ultralow temperature in-situ tensile test system has the test temperature range of-196-20 ℃; temperature measurement accuracy: plus or minus 1 ℃; temperature control accuracy: 3 ℃ C.
The ultralow temperature in-situ tensile strain rate range of the scanning electron microscope ultralow temperature in-situ tensile test system of the embodiment is as follows: (0.01-0.1)/s; the maximum load of in-situ stretching is 3kN; load measurement accuracy: 1 percent; load control accuracy: 5 percent; in-situ stretching maximum stroke: 15mm; in-situ tensile displacement measurement accuracy: 1 μm.
The scanning electron microscope ultralow temperature in-situ tensile test system can be used for testing metal materials, ceramic materials, high polymer materials, composite materials, coating system materials and the like.
The specific implementation method nine: referring to fig. 1, the helium transportation pipe X6 of the present embodiment is made of a heat insulating material. According to the arrangement, the helium conveying pipeline X6 is made of heat insulating materials, so that heat exchange with the outside in the helium conveying process is reduced as much as possible, and the temperature balance of helium is guaranteed. Other compositions and connection relationships are the same as those in the first, second, third, fourth, fifth, sixth, seventh or eighth embodiment.
The specific implementation mode is ten: the embodiment is described with reference to fig. 1, and the embodiment further includes a cold head cabin penetrating flange, and one end of the helium gas transmission pipeline X6 is hermetically connected with the scanning electron microscope sample cabin X11 through the cold head cabin penetrating flange. So set up, cold head cross cabin flange is connected helium transmission pipeline X6 is direct with scanning electron microscope sample cabin X11 to flange department will absolutely seal, guarantees scanning electron microscope's high vacuum. Other compositions and connection relations are the same as those of the first, second, third, fourth, fifth, sixth, seventh, eighth or ninth specific embodiment.
Principle of operation
The working principle of the scanning electron microscope ultralow temperature in-situ tensile test system is described with reference to fig. 1 to 9: the circulation system X1 cools the helium compressor X2; the helium compressor X2 compresses the circulated expanded hot helium gas to increase pressure, and exchanges heat with compressor oil in the heat exchanger to rapidly reduce the temperature to become low-temperature high-pressure helium gas; the cold head box X3 is an expander, and the low-temperature high-pressure helium gas compressed by the helium compressor X2 expands in the cold head box X3 to take away the ambient heat; the control cabinet X4 is used for adjusting the flow of the helium gas to reach the temperature set by the temperature control system X5. A scanning electron microscope sample cabin X11 provides an installation space for an ultralow temperature in-situ stretching platform; and the in-situ stretching control system X12 controls the stretching speed, records the mechanical property curve and the like in the ultralow-temperature in-situ stretching process. The scanning electron microscope control system X13 realizes real-time recording (microcosmic pictures and videos) of the microcosmic appearance in the ultra-low temperature in-situ stretching process. The connecting pipeline is used for introducing helium gas into the cryogenic refrigerator 2 of the ultra-low temperature in-situ stretching table through the connecting pipeline; meanwhile, a scanning microscope stage X9 provides enough space for the ultralow-temperature in-situ stretching stage; liquid helium is introduced into the ultra-low temperature in-situ stretching table through the closed and heat-insulating channel, so that in-situ stretching of the sample in the ultra-low temperature environment is realized. The sample clamped by the sample clamping piece 1 of the ultralow temperature in-situ stretching table is tightly attached to the cryogenic refrigerator 2, so that the cryogenic refrigerator 2 is ensured to cool the sample at constant temperature.
Claims (9)
1. The utility model provides a scanning electron microscope ultra-low temperature normal position tensile test system who contains ultra-low temperature normal position tensile platform which characterized in that: the device also comprises a circulating system (X1), a helium compressor (X2), a cold head box (X3), a control cabinet (X4), a temperature control system (X5), a helium gas transmission pipeline (X6), a connecting pipeline (X8), a scanning electron microscope stage (X9), a scanning electron microscope sample cabin (X11), an in-situ stretching control system (X12) and a scanning electron microscope control system (X13), wherein the scanning electron microscope sample cabin (X11) is of a hollow cuboid structure, the scanning electron microscope stage (X9) is arranged in the scanning electron microscope sample cabin (X11), an ultralow-temperature in-situ stretching stage is arranged on the upper end surface of the scanning electron microscope stage (X9), a camera of the scanning electron microscope stage (X9) faces to a sample clamping piece (1) of the ultralow-temperature in-situ stretching stage, one end of a helium gas transmission pipeline (X6) is hermetically connected with a scanning electron microscope sample cabin (X11), a circulating system (X1) is connected with a helium compressor (X2) through an air outlet pipe and an air return pipe, the circulating system (X1) cools the helium compressor (X2), the helium compressor (X2) compresses and raises the pressure of the circulated expanded hot helium gas and exchanges heat with compressor oil of the helium compressor (X2) in a heat exchanger to rapidly reduce the temperature to low-temperature high-pressure helium gas, the helium compressor (X2) is hermetically connected with a cold head box (X3) through the air return pipe and the air return pipe through an air outlet pipe, the low-temperature high-pressure helium gas compressed by the helium compressor (X2) expands in the cold head box (X3) to take away the surrounding heat, the cold head box (X3) is connected with the other end of the helium transmission pipeline (X6) in a sealing mode, a temperature control system (X5) is connected with a control cabinet (X4) through a lead, the control cabinet (X4) is connected with the cold head box (X3) through a lead, the control cabinet (X4) achieves the set temperature of the temperature control system (X5) by adjusting the flow of helium, the helium transmission pipeline (X6) is connected with an air inlet of a cryogenic refrigerator (2) through a connecting pipeline (X8), the helium is introduced into the cryogenic refrigerator (2) of the ultra-low temperature in-situ stretching table through the connecting pipeline (X8), the in-situ stretching control system (X12) is connected with a motor (6) of the ultra-low temperature in-situ stretching table through a lead, and a scanning electron microscope control system (X13) is connected with a scanning electron microscope table (X9) through a lead;
the ultra-low temperature in-situ stretching platform comprises a sample clamping piece (1), a cryogenic refrigerator (2), a tension sensor assembly (3), a moving lead screw mechanism (4), a driving device, a rack (8) and an electron microscope platform connecting disc (9), wherein the rack (8) comprises a bottom plate (81) and two side plates (82), the bottom plate (81) is horizontally arranged, the two side plates (82) are vertically arranged on two sides of the upper end surface of the bottom plate (81), the bottom plate (81) and the two side plates (82) are of an integrated structure, each side plate (82) is provided with two lead screw reserved shaft holes, the four lead screw reserved shaft holes on the two side plates (82) are oppositely arranged in pairs, a refrigerator reserved square hole is formed in the middle of the bottom plate (81), the cryogenic refrigerator (2) is installed in the refrigerator reserved square hole of the bottom plate (81), and the electron microscope platform connecting disc (9) is installed on the lower end surface of the bottom plate (81); the moving lead screw mechanism (4) comprises a first lead screw assembly (41) and a second lead screw assembly (42), the first lead screw assembly (41) and the second lead screw assembly (42) are arranged above the bottom plate (81) side by side, two ends of the first lead screw assembly (41) and the second lead screw assembly (42) are respectively rotatably connected with the two side plates (82), the first lead screw assembly (41) and the second lead screw assembly (42) are both bidirectional lead screws, the driving device is installed on the outer end face of one side plate (82) of the rack (8), and two power output ends of the driving device are respectively connected with the first lead screw assembly (41) and the second lead screw assembly (42); the sample clamping piece (1) comprises a first clamp assembly (11), a second clamp assembly (12), a first sliding block fixing assembly (13), a second sliding block fixing assembly (14), a first sliding block fixing assembly (13) and a second sliding block fixing assembly (14) are oppositely arranged between two side plates (82), two ends of the first sliding block fixing assembly (13) are respectively connected with an upper sliding block a (412) of a first lead screw assembly (41) and an upper sliding block b (422) of a second lead screw assembly (42), two ends of the second sliding block fixing assembly (14) are respectively connected with a lower sliding block a (413) of the first lead screw assembly (41) and a lower sliding block b (423) of the second lead screw assembly (42), the first clamp assembly (11) and the second clamp assembly (12) are oppositely arranged between the first sliding block fixing assembly (13) and the second sliding block fixing assembly (14), the first clamp assembly (11) is arranged on the upper end face of one side, close to the refrigerator (2), of the second sliding block fixing assembly (12) is arranged on the upper end face of the second sliding block fixing assembly (13), and a low-temperature sensor (3) is arranged on one side, and a low temperature sensor (3) of the second sliding block fixing assembly (12);
the first sliding block fixing assembly (13) comprises an upper sliding block fixing plate a (131), the first clamp assembly (11) comprises an upper clamp a (111), a lower clamp a (112) and a clamp connecting piece a (113), the upper clamp a (111) is fixed at one end, close to the cryogenic refrigerator (2), of the upper sliding block fixing plate a (131), a clamp reserved rectangular groove a is formed in one end, close to the cryogenic refrigerator (2), of the upper end face of the upper clamp a (111), a lower sample positioning groove a is formed in the bottom of the clamp reserved rectangular groove a, the lower sample positioning groove a and the upper end face of the cryogenic refrigerator (2) are located on the same horizontal plane, the lower clamp a (112) is installed in the clamp reserved rectangular groove a of the upper clamp a (111), the upper sample positioning groove a is formed in the lower end face of the lower clamp a (112), and the lower clamp a (112) is detachably connected with the upper clamp a (111) through the clamp connecting piece a (113);
the second sliding block fixing assembly (14) comprises an upper sliding block fixing plate b (141), the second clamp assembly (12) comprises an upper clamp b (121), a lower clamp b (122) and a clamp connecting piece b (123), the upper clamp b (121) is fixed at one end, close to the cryogenic refrigerator (2), of the upper sliding block fixing plate b (141), a clamp reserved rectangular groove b is formed in one end, close to the cryogenic refrigerator (2), of the upper end face of the upper clamp b (121), a lower sample positioning groove b is formed in the bottom of the clamp reserved rectangular groove b, the lower sample positioning groove b and the upper end face of the cryogenic refrigerator (2) are located on the same horizontal plane, the lower clamp b (122) is installed in the clamp reserved rectangular groove b of the upper clamp b (121), the upper sample positioning groove b is formed in the lower end face of the lower clamp b (122), and the lower clamp b (122) is detachably connected with the upper clamp b (121) through the clamp connecting piece b (123);
the sample clamped by the sample clamping piece (1) is tightly attached to the cryogenic refrigerator (2) in the stretching process, so that the cryogenic refrigerator (2) is ensured to cool the sample at constant temperature.
2. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 1, characterized in that: the driving device comprises a speed reducer (5), a motor (6) and a belt transmission mechanism (7), wherein the speed reducer (5) is installed on the outer end face of one side plate (82) of the rack (8), two output shafts of the speed reducer (5) are respectively connected with a first lead screw assembly (41) and a second lead screw assembly (42), the motor (6) is installed on the speed reducer (5), the belt transmission mechanism (7) comprises a driving belt wheel (71), a conveying belt (72) and a driven belt wheel (73), the driving belt wheel (71) is installed on the output shaft of the motor (6), the driven belt wheel (73) is installed on an input shaft of the speed reducer (5), and the driving belt wheel (71) is connected with the driven belt wheel (73) through the conveying belt (72).
3. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 1 or 2, characterized in that: the first lead screw assembly (41) comprises a lead screw shaft a (411), an upper sliding block a (412), a lower sliding block a (413), two bearings a (414) and two lead screw supporting seats a (415), two ends of the lead screw shaft a (411) are respectively inserted into lead screw reserved shaft holes corresponding to two side plates (82), a bearing a (414) is arranged between the shaft end of the lead screw shaft a (411) and the corresponding side plate (82), two ends of the lead screw shaft a (411) are respectively provided with a left-handed thread and a right-handed thread, the middle part of the lead screw shaft a (411) is an optical axis, the upper sliding block a (412) and the lower sliding block a (413) are respectively and spirally arranged at two ends of the lead screw shaft a (411), and the two lead screw supporting seats a (415) are sleeved on the optical axis of the middle part of the lead screw shaft a (411) and are connected with the bottom plate (81); second lead screw subassembly (42) includes screw shaft b (421), last slider b (422), lower slider b (423), two bearing b (424) and two lead screw supporting seat b (425), the both ends of screw shaft b (421) cartridge respectively is equipped with bearing b (424) between the axle head of screw shaft b (421) and the corresponding curb plate (82) in the lead screw reserved axle hole that two curb plates (82) correspond, screw shaft b (421) both ends are equipped with left-hand thread and right-hand thread respectively, screw shaft b (421) middle part is the optical axis, both ends at screw shaft b (421) are installed to last slider b (422) and lower slider b (423) spiral respectively, two lead screw supporting seat b (425) cover are established on the middle part optical axis of screw shaft b (421) and are connected with bottom plate (81).
4. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 3, characterized in that: the first sliding block fixing assembly (13) further comprises a first sliding block fixing block a (132), a second sliding block fixing block a (133) and a plurality of sliding block connecting pieces a, an upper sliding block fixing plate a (131) is horizontally arranged between the screw shaft a (411) and the screw shaft b (421), two ends of the upper sliding block fixing plate a (131) are respectively provided with a positioning groove matched with the upper sliding block a (412) and the upper sliding block b (422), the first sliding block fixing block a (132) and the second sliding block fixing block a (133) are respectively and oppositely arranged at two ends of the upper sliding block fixing plate a (131), one ends, close to the upper sliding block fixing plate a (131), of the first sliding block fixing block a (132) and the second sliding block fixing block a (133) are respectively provided with a positioning groove matched with the upper sliding block a (412) and the upper sliding block b (422), the first sliding block fixing block a (132) installs the screw shaft a (411) on the upper sliding block fixing plate a (131) through the plurality of sliding block connecting pieces a, and the second sliding block fixing block a (133) installs the sliding block fixing plate (131) on the upper sliding block fixing plate b (131) through the plurality of sliding block connecting pieces a.
5. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 1 or 4, characterized in that: the second slider fixing assembly (14) further comprises a first slider fixing block b (142), a second slider fixing block b (143) and a plurality of slider connecting pieces b, the upper slider fixing block b (141) is horizontally arranged between the screw shaft a (411) and the screw shaft b (421), two ends of the upper slider fixing block b (141) are respectively provided with a positioning groove matched with the lower slider a (413) and the lower slider b (423), the first slider fixing block b (142) and the second slider fixing block b (143) are respectively and oppositely arranged at two ends of the upper slider fixing block b (141), one ends, close to the upper slider fixing block b (141), of the first slider fixing block b (142) and the second slider fixing block b (143) are respectively provided with a positioning groove matched with the lower slider a (413) and the lower slider b (423), the screw shaft a (411) is arranged on the upper slider fixing block b (141) by the first slider fixing block b (142) through the plurality of slider connecting pieces b, and the second slider fixing block b (143) is arranged on the upper slider fixing block (421 b) through the screw shaft b (141).
6. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 5, characterized in that: tension sensor subassembly (3) include tension sensor (31), sensor mounting bracket (32) and lock nut (33), keep away from curb plate (82) up end middle part on one side of the drive arrangement and set up the sensor reservation groove, tension sensor (31) are installed and are offset with last sliding block fixed plate a (131) at the contact of tension sensor (31) in the sensor reservation groove, sensor mounting bracket (32) are including dull and stereotyped and two risers, the vertical setting of two risers is connected in tension sensor (31) both sides and with last sliding block fixed plate a (131), dull and stereotyped vertical setting is connected in tension sensor (31) the place ahead and with two risers, the lock screw is seted up at dull and stereotyped middle part, lock nut (33) spiral mounting offsets in dull and plate's lock screw and with tension sensor (31).
7. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 6, characterized in that: it still includes spacing subassembly (10), and spacing subassembly (10) include spacing frock (101), limit switch (102) and grating encoder (103), and curb plate (82) lateral part that is close to drive arrangement one side installs spacing frock (101), and limit switch (102) are installed to a side end face that first slider fixed block b (142) are close to spacing frock (101), limit switch (102) set up with limit frock (101) relatively, and grating encoder (103) are installed on the up end of being close to bottom plate (81) of limit switch (102) one side.
8. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 7, characterized in that: the helium delivery line (X6) is made of a heat insulating material.
9. The scanning electron microscope ultralow temperature in-situ tensile test system according to claim 8, characterized in that: the device also comprises a cold head cabin penetrating flange (X7), and one end of a helium transmission pipeline (X6) is hermetically connected with the scanning electron microscope sample cabin (X11) through the cold head cabin penetrating flange (X7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110435406.2A CN113138130B (en) | 2021-04-22 | 2021-04-22 | Ultralow-temperature in-situ tensile platform and scanning electron microscope ultralow-temperature in-situ tensile test system |
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