CN113137395A - Acceleration control method of molecular pump - Google Patents

Acceleration control method of molecular pump Download PDF

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Publication number
CN113137395A
CN113137395A CN202110523735.2A CN202110523735A CN113137395A CN 113137395 A CN113137395 A CN 113137395A CN 202110523735 A CN202110523735 A CN 202110523735A CN 113137395 A CN113137395 A CN 113137395A
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molecular pump
speed
motor
rotating speed
loop
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CN113137395B (en
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李强
李建
陶继忠
陈一
刘广民
黄小津
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

The invention relates to the technical field of vacuum pump control, in particular to a method for controlling the acceleration of a molecular pump, which comprises the following steps: pre-positioning, open-loop acceleration, open-loop rotation speed detection and closed-loop control; the pre-positioning is carried out twice or more than twice, and the rotor of the molecular pump is controlled to be positioned on a target position, so that the successful positioning is ensured, and the failure of speed raising is avoided; the closed-loop control comprises a closed-loop speed-up process and a speed stabilization control process, wherein the closed-loop speed-up process judges whether the motor is out of step in real time, if the motor is out of step, the output current is reduced, whether the motor is out of step is continuously judged, and corresponding action is executed according to a real-time judgment result; if the motor is not out of step, continuously judging whether the current rotating speed of the molecular pump reaches a set rotating speed, if so, entering a speed stabilizing control process, if not, increasing the output current, continuously judging whether the motor is out of step or not, and executing corresponding action; the closed-loop speed-up process of the invention does not use the speed value of the molecular pump as a feedback value any more, thereby avoiding the failure of speed-up when the motor is out of step.

Description

Acceleration control method of molecular pump
Technical Field
The invention relates to the technical field of vacuum pump control, in particular to a method for controlling the speed increase of a molecular pump.
Background
A molecular pump is a common vacuum obtaining device, and is a vacuum pump that transfers momentum to gas molecules by using high-speed rotating blades, so that the gas generates a directional velocity on the surface of a rigid body, is driven to an exhaust port, and is then pumped away by a preceding stage vacuum.
The general structure of the molecular pump motor of the prior art is shown in fig. 1, and generally comprises a stator 1 and a rotor 2, wherein a winding a3, a winding B4 and a winding C5 which are connected in a Y-shape are wound on the stator, and the stator has three leads: a lead wire R6, a lead wire G7 and a lead wire B8, each lead wire having one end connected to one winding and the other end connected to the molecular pump controller, each winding connected to a common point com 9, the common point com 9 being common to all three windings.
The rotor is formed by permanent magnets of opposite polarity around the circumference of the motor, and when any two phase winding, such as winding a and winding B, is energized, the stator can generate a magnetic field, the direction of which is indicated by the N and S marks on the right in fig. 1, at which time the rotor rotates under the action of the field torque, so that the N pole of the rotor is aligned with the S pole of the stator field, and likewise, the S pole of the rotor is aligned with the N pole of the stator field.
The speed-up process of the molecular pump in the prior art is shown in an attached figure 2 and comprises four stages of (1) pre-positioning, (2) open-loop acceleration, (3) - (4) open-loop rotating speed detection and (5) closed-loop control, wherein the pre-positioning stage firstly energizes two phase windings, a synthetic magnetic field in a certain direction is generated in the two phase stator windings after energization, and if the magnetic field is strong enough, the rotor of the molecular pump can be dragged to a position which is overlapped with the axis of the synthetic magnetic field of the stator windings by the synthetic electromagnetic torque through delaying for a period of time, so that the positioning process is completed.
After the prepositioning is finished, the motor enters an open loop acceleration stage, and in the process, the rotor can be accelerated according to an acceleration curve of the motor by a boosting method; after the open-loop acceleration stage is finished, entering an open-loop rotating speed detection stage, setting a switching speed value in advance according to the back electromotive force characteristic of the motor by a power-off switching method, powering off all windings for a plurality of periods when the motor is accelerated to the switching speed value in an open-loop manner, detecting the rotating speed of the molecular pump, realizing closed-loop switching, and entering a closed-loop control stage; and in the closed-loop control stage, the rotating speed value of the molecular pump is used as feedback, and the rotating speed of the molecular pump is controlled through a control algorithm to ensure that the rotating speed of the molecular pump rises.
The molecular pump speed-up control method in the prior art has two problems:
firstly, in the pre-positioning stage, a special condition exists, if the combined magnetic field of the rotor magnetic field and the stator winding of the motor just has a mechanical angle of 180 degrees before pre-positioning, the electromagnetic torque is just zero at the moment, pre-positioning cannot be completed at the moment, and the acceleration failure of the molecular pump is caused.
Secondly, in the closed-loop control stage, the motor can lose step in the speed-up stage of the closed-loop control, at the moment, the rotating speed of the molecular pump can not be accurately detected, even the detection value of the rotating speed is suddenly changed, and the difference between the detection value and the real rotating speed value of the molecular pump is very large; at this time, the closed-loop operation control algorithm will further deteriorate the effect of the rotation speed control due to the error of the rotation speed feedback, resulting in the failure of the acceleration of the molecular pump.
Disclosure of Invention
The invention aims to provide a method for controlling the speed of a molecular pump, which solves the technical problems that pre-positioning cannot be completed and the speed of the molecular pump fails to be increased in the speed increasing control process of the molecular pump in the prior art.
The invention is realized by the following technical scheme: the method comprises the following steps:
(1) pre-positioning: performing pre-positioning operation twice or more, wherein the pre-positioning operation is to electrify any two-phase winding, the winding combination electrified in the Nth pre-positioning operation is different from the winding combination electrified in the (N-1) th pre-positioning operation, N is an integer greater than or equal to 2, and the rotor of the molecular pump is controlled to be positioned on a target position;
(2) and (3) open loop acceleration: controlling the rotor to accelerate;
(3) open-loop rotation speed detection: detecting a molecular pump rotating speed signal, and judging whether to enter the closed-loop control according to the rotating speed signal;
(4) closed-loop control: and controlling the rotation speed of the molecular pump to rise, reaching the set rotation speed and finally stabilizing at the set rotation speed.
Preferably, the closed-loop control comprises a closed-loop speed-up process and a speed-stabilizing control process;
the closed loop speed-up process judges whether the motor is out of step in real time, and executes the following corresponding actions according to the real-time judgment result:
if the motor is out of step, the molecular pump controller reduces the output current and continuously judges whether the motor is out of step, and the molecular pump controller executes corresponding action according to a real-time judgment result;
if the motor is not out of step, whether the current rotating speed of the molecular pump reaches the set rotating speed or not is continuously judged, if yes, the molecular pump controller enters a speed stabilizing control process, if not, the output current of the molecular pump controller is increased, whether the motor is out of step or not is continuously judged, and then the molecular pump controller executes corresponding action.
Preferably, the method for determining the step loss of the motor comprises the following steps: setting a rotation speed increment threshold delta V of the molecular pump, and detecting the rotation speed V of the molecular pump in real time1Compared to the real-time speed V1Rotational speed V at the previous moment0Comparison V1-V0The absolute value of (a) and the threshold value Δ V, as the absolute value abs (V)1-V0)>Δ V, it is determined that step loss has occurred in the motor, and abs (V)1-V0) And if the current is less than or equal to the delta V, judging that the motor is not out of step.
Preferably, the output current of the molecular pump controller to the electrified winding is current which is increased by a certain step length delta I at intervals of delta t, and the step length delta I is a positive value.
Preferably, the method for increasing or decreasing the output current of the molecular pump controller according to the loss of step of the motor is as follows:
if the motor is not out of step and the rotating speed of the molecular pump is judged not to reach the set rotating speed, the molecular pump controller continues to increase the output current by taking the step length delta I as increment at intervals of time delta t, and if the motor is not out of step and the rotating speed of the molecular pump reaches the set rotating speed, the molecular pump controller does not continue to increase the output current;
if the motor is out of step, the molecular pump controller does not increase the current any more, and controls the current output current to be reduced by the step length delta I.
Preferably, the speed stabilizing control process adopts a PID control algorithm to control the rotating speed of the molecular pump to be stabilized at a set rotating speed.
Preferably, the open-loop rotation speed detection process is as follows: after the open-loop acceleration is finished, all windings of the molecular pump are powered off for a plurality of electric cycles, the current rotating speed of the molecular pump is detected, if the rotating speed signal of the molecular pump is detected, the molecular pump controller enters a closed-loop acceleration process, and if the rotating speed signal of the molecular pump cannot be detected, the molecular pump controller enters a pre-positioning process to restart.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) the pre-positioning process is carried out for two times or more, the condition that the pre-positioning cannot be successful when the condition that the combined magnetic field of the rotor magnetic field and the stator winding is exactly 180 degrees of mechanical angle occurs in only one pre-positioning process is avoided, and the molecular pump rotor is ensured to be fixed on the target position by the two times or more pre-positioning methods.
(2) The control algorithm of the closed-loop speed-up process does not use the speed value of the molecular pump as a feedback value any more, but uses whether the motor step-out phenomenon occurs or not as a feedback value, so that the motor step-out phenomenon occurs, the molecular pump can normally speed up, and the problem of failed speed-up when the motor of the molecular pump is out of step is solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a structural view of a conventional molecular pump motor.
FIG. 2 is a flow chart of a method for controlling the acceleration of a molecular pump in the prior art.
FIG. 3 is a flow chart of the method for controlling the acceleration of the molecular pump according to the present invention.
In the figure: 1 stator, 2 rotor, 3 winding A, 4 winding B, 5 winding C, 6 lead R, 7 lead G, 8 lead B, 9 common point com, 10 molecular pump controller.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
The invention provides a method for controlling the acceleration of a molecular pump, which comprises the following steps:
(1) pre-positioning: performing pre-positioning operation twice or more than twice, wherein the pre-positioning operation can be selected twice or three times, four times and the like, and setting is performed according to requirements; in each pre-positioning operation, any two phases of windings are electrified, the winding combination electrified in the Nth pre-positioning operation is different from the winding combination electrified in the (N-1) th pre-positioning operation, wherein N is an integer greater than or equal to 2; for example, pre-positioning for the first time, electrifying any two-phase winding, pre-positioning for the second time, electrifying any two-phase winding different from the first time, and controlling the rotor of the molecular pump to be positioned on a target position, namely dragging the rotor of the molecular pump to a position which is overlapped with the axis of the magnetic field synthesized by the stator winding;
(2) and (3) open loop acceleration: after the prepositioning is finished, controlling the rotor to accelerate, wherein the process is the same as the existing open-loop acceleration process;
(3) open-loop rotation speed detection: after the open-loop acceleration is finished, all windings of the stator are powered off for a plurality of electrical cycles, then a rotating speed signal of the molecular pump is detected, whether the closed-loop control is started or not is judged according to the rotating speed signal, if the rotating speed of the molecular pump can be detected, a control program of the molecular pump controller 10 is switched into the closed-loop acceleration process, and if the rotating speed of the molecular pump cannot be detected, the control program jumps to a pre-positioning stage and restarts;
(4) closed-loop control: comprises a closed-loop speed-up process and a speed-stabilizing control process, wherein in the closed-loop speed-up process, a winding is passed through a first windingInitial value of current I0，I0The value cannot be too large, otherwise, the motor is out of step; otherwise, the rotating speed of the molecular pump cannot be maintained and reduced, and the initial value of the current needs to be determined according to the characteristics of the motor, such as the number of turns of a stator winding, the resistance value of the winding, the rated power and the like, and I is recorded1＝I0Parameter I1The current output value at the last moment is shown, and the current I is output to the winding at intervals of time delta t by taking delta I as step lengthout＝I1+ Δ I, and1＝Iouthere, taking the time interval Δ t as 0.1s and the step Δ I as 0.1A as an example, the current passing through all the energized windings is 1A in the previous 0.1s and 1.1A in the next 0.1 s.
The closed loop speed-up process judges whether the motor is out of step in real time, and the molecular pump controller 10 executes the following corresponding actions according to the judgment result:
if the motor is out of step, the molecular pump controller 10 reduces the output current, and continuously determines whether the motor is out of step, and according to the real-time determination result, the molecular pump controller 10 continues the above actions until the detected rotating speed of the molecular pump reaches the set rotating speed, and then enters a speed stabilizing control process.
If the motor is not out of step, continuously judging whether the current molecular pump rotating speed reaches the set rotating speed, if so, entering a speed stabilizing control process by the molecular pump controller 10, if not, increasing the output current by the molecular pump controller 10, continuously judging whether the motor is out of step, and then continuing the actions by the molecular pump controller 10 until detecting that the molecular pump rotating speed reaches the set rotating speed, entering the speed stabilizing control process.
The method for specifically judging the motor step loss comprises the following steps: setting a rotation speed increment threshold value delta V of the molecular pump, wherein the threshold value delta V can be adjusted according to actual needs, and detecting the rotation speed V of the molecular pump in real time1Compared to the real-time speed V1Rotational speed V at the previous moment0Comparison V1-V0The absolute value of (a) and the threshold value Δ V, as the absolute value abs (V)1-V0) Equal to or less than delta V, judging that the motor is not out of step, and then judging whether the rotating speed of the molecular pump at the current momentIf the set rotating speed is reached, the speed stabilizing control process is started, if the set rotating speed is reached, the output current is continuously increased by taking the delta I as the step length at intervals of time delta t, whether the motor is out of step is continuously judged, the molecular pump controller 10 executes corresponding actions according to the judgment result until the rotating speed of the molecular pump reaches the set rotating speed, and if the absolute value abs (V) is reached1-V0)>Delta V, judging that the motor is out of step and not increasing I any moreoutAt this time, order Iout＝I1Δ I to reduce the output current and continuously determine whether the motor is out of step, and then the molecular pump controller 10 performs a corresponding action according to the determination result.
And the speed stabilizing control process adopts a PID control algorithm to control the rotating speed of the molecular pump to be stabilized at a set rotating speed.
The following is detailed in specific cases:
a method for controlling the speed increase of a molecular pump comprises the following steps (1) to (11), wherein the steps (1) to (2) are pre-positioning stages, the step (3) is an open-loop acceleration stage, the steps (4) to (5) are open-loop rotating speed detection stages, the steps (6) to (11) are closed-loop control stages, the steps (6) to (10) are closed-loop speed increase processes, and the step (11) is a speed stabilizing control process.
The specific steps are as follows, and the process is as shown in the attached figure 3:
(1) pre-positioning for the first time, electrifying a winding A and a winding B of the molecular pump, and passing current I through the winding A and the winding Bout12A, and delay t1The rotor was held in place for 2 s.
(2) Pre-positioning for the second time, electrifying a winding B and a winding C of the molecular pump, wherein the current passing through the winding B and the winding C is Iout24A, and delay t2The rotor was held in place for 4 s.
(3) And after the two pre-positioning processes are finished, carrying out open-loop acceleration, and setting the open-loop switching rotating speed to be 10% of the set rotating speed of the molecular pump.
(4) And after the open-loop acceleration is finished, all windings of the stator are powered off for 2 electrical cycles, and the current rotating speed of the molecular pump is detected.
(5) If the rotating speed of the molecular pump can be detected, the control program of the molecular pump controller enters a closed-loop speed-up process and enters the step (6); and (3) if the rotating speed of the molecular pump cannot be detected, the control program of the molecular pump controller jumps to the step (1), and the whole process is restarted.
(6) In closed-loop control, a current initial value I is fed to the winding01A and I1＝I0Parameter I1The current output value of the molecular pump controller at the previous moment is shown.
(7) At intervals of time delta t-2 s, taking delta I-0.1A as a current step length, and passing current I to the windingout＝I1+ Δ I, and1＝Iout。
(8) setting a speed increment threshold value delta V to be 1% of a set rotating speed, detecting the rotating speed V1 of the molecular pump at the current moment in real time, comparing the rotating speed V0 of the molecular pump at the last moment, if abs (V1-V0) > delta V, judging that the motor has step-out phenomenon, controlling the molecular pump controller to enter the step (9), and if the step-out phenomenon does not occur, controlling the molecular pump controller to enter the step (10).
(9) When the step loss phenomenon occurs, I is not increased any moreoutAt this time, order Iout＝I1- Δ I, and1＝Ioutand (5) the control program is transferred to step (8), whether the step is out or not is continuously judged, and the molecular pump controller continuously executes corresponding action according to the judgment result.
(10) And (3) judging whether the current rotating speed of the molecular pump reaches the set rotating speed or not when the step-out phenomenon does not occur, if so, entering the step (11), otherwise, entering the step (7) by the speed-up program, continuing to increase the output current until the rotating speed of the molecular pump reaches the set rotating speed, and entering the step (11).
(11) After the speed raising program is finished, a speed stabilizing control process is started, the speed stabilizing control process adopts a PID calculation algorithm to control so that the rotating speed of the molecular pump is always stabilized at a set rotating speed, in the process, a proportional gain Kp is set to be 2, an integral gain Ki is set to be 5, and a differential gain Kd is set to be 0, of course, each parameter Kp, Ki and Kd can be adjusted according to needs, and the PID calculation algorithm is a known technology and is a prior art that should be mastered by a person skilled in the art, and is not described herein again.
All the above control steps (1) to (11) are performed by a molecular pump controller, and in addition, the molecular pump controller needs to perform detection of a rotation speed signal and output a control current to a winding, and the molecular pump controller is the prior art, and its specific structure and control principle are the prior art that should be grasped by those skilled in the art.
In the above process, the time Δ t, the current step Δ I, and the initial value of current I0Speed increment threshold value delta V and current I of two pre-positioningout1And Iout2Two pre-positioning delay time t1And t2All parameters can be adjusted according to different requirements, and different set rotating speeds to be achieved are set according to different types of molecular pumps.
It will be understood by those skilled in the art that all or part of the steps of the above-described facts and methods can be implemented by hardware related to instructions of a program, and the related program or programs can be stored in a computer readable storage medium, and when executed, the program includes the following steps: the storage medium from which the corresponding method steps are derived may be ROM/RAM, magnetic disk, optical disk, etc.
The above embodiments are provided to further explain the objects, technical solutions and advantages of the present invention in detail, it should be understood that the above embodiments are merely exemplary embodiments of the present invention and are not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (7)

1. A method for controlling the acceleration of a molecular pump is characterized by comprising the following steps:
(1) pre-positioning: performing pre-positioning operation twice or more, wherein the pre-positioning operation is to electrify any two-phase winding, the winding combination electrified in the Nth pre-positioning operation is different from the winding combination electrified in the (N-1) th pre-positioning operation, N is an integer greater than or equal to 2, and the rotor of the molecular pump is controlled to be positioned on a target position;
(2) and (3) open loop acceleration: controlling the rotor to accelerate;
(3) open-loop rotation speed detection: detecting a molecular pump rotating speed signal, and judging whether to enter the closed-loop control according to the rotating speed signal;
(4) closed-loop control: and controlling the rotation speed of the molecular pump to rise, reaching the set rotation speed and finally stabilizing at the set rotation speed.
2. A method of controlling the acceleration rate of a molecular pump according to claim 1, characterized in that: the closed-loop control comprises a closed-loop speed-up process and a speed stabilization control process;
the closed loop speed-up process judges whether the motor is out of step in real time, and executes the following corresponding actions according to the real-time judgment result:
if the motor is out of step, the molecular pump controller reduces the output current and continuously judges whether the motor is out of step, and the molecular pump controller executes corresponding action according to a real-time judgment result;
if the motor is not out of step, whether the current rotating speed of the molecular pump reaches the set rotating speed or not is continuously judged, if yes, the molecular pump controller enters a speed stabilizing control process, if not, the output current of the molecular pump controller is increased, whether the motor is out of step or not is continuously judged, and then the molecular pump controller executes corresponding action.
3. A method of controlling the acceleration rate of a molecular pump according to claim 2, characterized in that: the method for judging the step loss of the motor comprises the following steps: setting a rotation speed increment threshold delta V of the molecular pump, and detecting the rotation speed V of the molecular pump in real time1Compared to the real-time speed V1Rotational speed V at the previous moment0Comparison V1-V0The absolute value of (a) and the threshold value Δ V, as the absolute value abs (V)1-V0)>Δ V, it is determined that step loss has occurred in the motor, and abs (V)1-V0) And if the current is less than or equal to the delta V, judging that the motor is not out of step.
4. A method of controlling the acceleration rate of a molecular pump according to claim 2 or 3, characterized in that: the output current transmitted to the electrified winding by the molecular pump controller is the current which is increased by a certain step length delta I at intervals of time delta t, and the step length delta I is a positive value.
5. The method of claim 4, wherein the step of controlling the acceleration rate of the molecular pump comprises: the method for increasing or decreasing the output current of the molecular pump controller according to the step loss of the motor comprises the following steps:
if the motor is not out of step and the rotating speed of the molecular pump is judged not to reach the set rotating speed, the molecular pump controller continues to increase the output current by taking the step length delta I as increment at intervals of time delta t, and if the motor is not out of step and the rotating speed of the molecular pump reaches the set rotating speed, the molecular pump controller does not continue to increase the output current;
if the motor is out of step, the molecular pump controller does not increase the current any more, and controls the current output current to be reduced by the step length delta I.
6. The method of claim 5, wherein the step of controlling the acceleration rate of the molecular pump comprises: and the speed stabilizing control process adopts a PID control algorithm to control the rotating speed of the molecular pump to be stabilized at a set rotating speed.
7. A method of controlling the acceleration rate of a molecular pump according to claim 5 or 6, characterized in that: the open loop rotating speed detection process comprises the following steps: after the open-loop acceleration is finished, all windings of the molecular pump are powered off for a plurality of electric cycles, the current rotating speed of the molecular pump is detected, if the rotating speed signal of the molecular pump is detected, the molecular pump controller enters a closed-loop acceleration process, and if the rotating speed signal of the molecular pump cannot be detected, the molecular pump controller enters a pre-positioning process to restart.
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