CN113125449B - Scanning device for detecting surface of integrated product and assembling method thereof - Google Patents
Scanning device for detecting surface of integrated product and assembling method thereof Download PDFInfo
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- CN113125449B CN113125449B CN202110423845.1A CN202110423845A CN113125449B CN 113125449 B CN113125449 B CN 113125449B CN 202110423845 A CN202110423845 A CN 202110423845A CN 113125449 B CN113125449 B CN 113125449B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a scanning device for detecting the surface of an integrated product and an assembling method thereof, which relate to the technical field of product surface detection and comprise a light-emitting mechanism for emitting light to the surface of a product to be detected and a reflected light receiving mechanism for receiving the light reflected by the surface of the product; the light-emitting mechanism comprises a first fixed support, and a plurality of channels penetrate through the upper surface of the first diaphragm part and are used for enabling light to pass through so as to form a folded light path. The direction of making the light path route changes, decompose long light path into a plurality of short light paths to compact each structure with this, make whole device volume reduce, it is convenient, stable in the time of guaranteeing to use, first fixed bolster and the second fixed bolster that play the fixed action do not all contact rather than the first frame and the second frame in the outside, can guarantee the stability of light-emitting mechanism and reverberation receiving mechanism in the use effectively, avoid them can receive the collision influence of first frame and second frame and the curb plate on them.
Description
Technical Field
The invention relates to the technical field of product surface detection, in particular to a scanning device for integrated product surface detection and an assembling method thereof.
Background
The CCD sensor, as a photosensor, is made of a semiconductor material having high sensitivity, and converts light into electric charges, which are converted into digital signals by an analog-to-digital converter for processing by a computer. At present, the method is widely applied to the detection of the surface defects of industrial products. In particular to the detection of various defects on the surface of a product.
At present, when flaw detection is carried out on the surface of an object, a scanning device with a CCD camera is generally used, a light source is utilized to irradiate the surface of the object, a light path is reflected from the surface of the object, and then a light sensor collects the reflected light path.
Disclosure of Invention
The invention mainly aims to provide a scanning device for detecting the surface of an integrated product and an assembling method thereof, so that the scanning device has a compact and stable structure and small overall occupied space.
The purpose of the invention can be achieved by adopting the following technical scheme:
an integrated scanning device for detecting the surface of a product,
comprises a light-emitting mechanism for emitting light to the surface of a product to be detected and a reflected light receiving mechanism for receiving the light reflected by the surface of the product;
the illuminating mechanism comprises a first fixing support, a first diaphragm part is arranged on one side of the first fixing support, a plurality of channels penetrate through the upper surface of the first diaphragm part and are used for enabling light to pass through so as to form a folded light path, a first focusing lens is arranged below the first diaphragm part, a light source is arranged below the first focusing lens and is used for illuminating the surface of a product to be inspected, and the illuminating mechanism further comprises a light path first reflecting part and a light path first reflecting part, wherein the light path first reflecting part is used for reflecting light paths penetrating out of the channels of the first diaphragm part for multiple times so that the light paths form a light path section which is connected end to end, and light rays emitted by the light source are enabled to be abutted to the surface of the product to be inspected;
the utility model discloses a light path reflection of light, including the light path reflection of light mechanism, the light path reflection of light mechanism is including the second fixed bolster, one side of second fixed bolster is provided with light path second reflection part for multiple reflection comes from the aforesaid light of waiting to examine the product surface reflection, so that light path redirecting, one side of second fixed bolster still is provided with second diaphragm part and second prime lens, the upper surface of second diaphragm part is run through and is had a plurality of passageways, is used for making light after the reflection of light path second reflection part passes through to form folding light path route, second prime lens be used for receiving come from light after the reflection of light path second reflection part, and follow the light that first prime lens was worn out and the light that penetrates the second prime lens and the confocal of same frequency.
Preferably, the first reflection part of light path is including the first speculum and the second mirror that distribute from top to bottom, first speculum is used for the reflection of syncline below to come from the light that the light source jetted out to make light support extremely the second mirror, the second mirror be used for upwards the reflection come from the light that first speculum reflected to make light support to the surface of examining the product of examining that is located the top, the below of second prime lens is provided with optical sensor.
Preferably, the first diaphragm part comprises a plurality of first diaphragms distributed from top to bottom, each first diaphragm is provided with three channels distributed from left to right in a penetrating manner on the upper surface, the left and right channels of the two vertically adjacent first diaphragms vertically correspond to each other, the middle channels of the first diaphragms are positioned on the same inclined plane, and the right channel of the first diaphragm is positioned between the first focusing lens and the first reflecting mirror.
Preferably, the second reflecting component of the optical path comprises a fifth reflecting mirror, a third reflecting mirror and a fourth reflecting mirror which are distributed vertically, the third reflecting mirror is used for receiving the light reflected by the surface of the product to be detected and reflecting the light to the fourth reflecting mirror, the fourth reflecting mirror is used for reflecting the light from the third reflecting mirror to the fifth reflecting mirror, and the fifth reflecting mirror is used for reflecting the light from the fourth reflecting mirror to the mirror surface of the second fixed focus lens.
Preferably, the second diaphragm component includes a second diaphragm, three channels distributed from right to left penetrate through the upper surface of the second diaphragm, and are used for enabling three light paths generated by reflection of the light path second reflection component to pass through, the second fixed-focus lens is arranged below the fifth reflection mirror, and the second diaphragm is arranged between the second fixed-focus lens and the fifth reflection mirror.
Preferably, the second diaphragm part is still including being located the third diaphragm of fourth speculum top and being located the fourth diaphragm of fifth speculum below, the third diaphragm with two passageways that distribute about the upper surface of fourth diaphragm all runs through, the right passageway of third diaphragm with the right passageway of second diaphragm is vertical to correspond from top to bottom, the left passageway of fourth diaphragm with the left passageway of second diaphragm is vertical to correspond from top to bottom, the intermediate channel of second diaphragm with the left passageway of third diaphragm and with the right passageway of fourth diaphragm is in same inclined plane, the top of second mirror still is provided with the fifth diaphragm, the fifth diaphragm set up in between the second mirror and the first diaphragm, the upper surface of fifth diaphragm has run through two passageways that left and right distribute, the left passageway of fifth diaphragm is vertical to correspond with the left passageway of the first diaphragm above it, the right passageway of fifth diaphragm is located the oblique below of the intermediate channel of the first diaphragm above it.
Preferably, still including PMKD, the second fixed bolster is provided with two, and distributes around them, first fixed bolster is provided with two, and distributes around they, two second fixed bolster and two first fixed bolster all with PMKD fixed connection, just still be fixed with first frame and second frame on the PMKD, first frame is used for surrounding two first fixed bolsters, the second frame is used for surrounding two second fixed bolsters, just the lateral surface of first frame is fixed with four first curb plates, the lateral surface of second frame is fixed with four second curb plates, the top of second frame is fixed with speculum second protection box and speculum third protection box, speculum second protection box set up in the top of fifth speculum, speculum third protection box set up in the top of third speculum, just the inboard of speculum third protection box is provided with the sixth diaphragm that distributes from top to bottom, every the surface of sixth diaphragm all runs through there is the passageway for make the reflection light that waits to examine the product of examining that is located the top pass through to the third reflection mirror reflection to the reflection.
Preferably, the top of first curb plate is fixed with fixed roof, the upper surface of fixed roof runs through slottedly, fixed roof on the groove with vertical correspondence about the left passageway of first diaphragm, just the top of fixed roof is provided with the diffuse light source for the secondary provides and shines the light on waiting to examine the product surface, the top of first speculum is provided with the first protection box of speculum, reverberation receiving mechanism with adjacent about the luminous mechanism, PMKD's below is provided with the light source box, the light source set up in the inboard of light source box.
The method for assembling scanning device for detecting surface of integrated product includes the following steps
Step A, respectively assembling a light-emitting mechanism and a reflected light receiving mechanism;
b, respectively fixing the light-emitting mechanism and the reflected light receiving mechanism on a fixed bottom plate, and respectively installing a light source box and a light sensor;
and C, sealing and protecting the light-emitting mechanism and the reflected light receiving mechanism, and installing a protective box above the reflector exposed outside.
Preferably, the specific steps include the following
The step A is as follows
a1. Sequentially fixing a fifth diaphragm and three first diaphragms between two first fixed brackets, and fixing a fourth diaphragm, a second diaphragm and a third diaphragm between two second fixed brackets according to the up-down sequence;
a2. sequentially fixing a first reflector and a second reflector at the top and the bottom between the two first fixing supports, and fixing a fifth reflector, a third reflector and a fourth reflector at the top and the bottom between the two second fixing supports;
the step B is as follows
b1. Respectively fixing two first fixing brackets and two second fixing brackets in the step a2 on a fixing bottom plate;
b2. respectively sleeving the first frame on the outer side of the first fixing support and sleeving the second frame on the outer side of the second fixing support, so that the first frame and the second frame are respectively and fixedly connected with the fixing bottom plate, the first frame is not contacted with the first fixing support, and the second frame is not contacted with the second fixing support;
b3. fixedly mounting a first fixed-focus lens and a light source box provided with a light source, inserting the first fixed-focus lens upwards to the top of a fixed base plate, fixedly mounting a second fixed-focus lens and a light sensor, and inserting the second fixed-focus lens upwards to the top of the fixed base plate;
step C is as follows
c1. Sealing the periphery of the first frame by using a first side plate, installing a fixed top plate at the top of the first side plate, and installing a first protective box of a reflector to protect the first reflector;
c2. sealing the periphery of the second frame by using a second side plate, installing a second reflector protection box at the top of the fifth reflector, simultaneously installing a third reflector protection box to protect the third reflector, and installing high-transmittance glass on the inner side of the third reflector protection box to construct a space where the second fixed-focus lens is located into a closed space;
c3. a diffuse light source is arranged on the periphery of a groove penetrating through the fixed top plate, and high-transmittance glass is arranged on the groove of the fixed top plate and used for constructing a space where the first focusing lens is located into a closed space.
The invention has the beneficial technical effects that:
1. the light-emitting mechanism and the reflected light receiving mechanism provided by the invention can be used in a matched manner, so that light rays can be reflected for multiple times, the direction of a light path is changed, a long light path is divided into a plurality of short light paths, the structures are compacted, the size of the whole device is reduced, convenience and stability in use are ensured, the first fixing support and the second fixing support which play a role in fixing are not in contact with the first frame and the second frame which are arranged on the outer sides of the first fixing support and the second fixing support, the stability of the light-emitting mechanism and the reflected light receiving mechanism in the use process can be effectively ensured, and the light-emitting mechanism and the reflected light receiving mechanism can be prevented from being influenced by collision of the first frame, the second frame and side plates arranged on the first fixing support and the second fixing support.
2. The first side plate, the second side plate, the fixed top plate and the reflector protection box positioned above the fixed top plate can protect the light-emitting mechanism and the reflected light receiving mechanism, so that the dust prevention and the whole structure stabilization are effectively realized, the co-focused illumination light source with the same frequency can be instantly lightened, the high effective brightness is realized, and the characteristics of effective illumination of single-point pixels of the optical sensor, low power consumption, high parallelism, small size and low heat generation are realized.
Drawings
FIG. 1 is a perspective view of a scanning device according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a light emitting mechanism and a reflected light receiving mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic front view of a light emitting mechanism and a reflected light receiving mechanism according to an embodiment of the present invention;
FIG. 4 is a schematic perspective view of a light-emitting mechanism according to an embodiment of the present invention;
FIG. 5 is a schematic perspective view of a light-emitting mechanism according to an embodiment of the present invention;
fig. 6 is a perspective view of a first diaphragm assembly according to an embodiment of the present invention;
fig. 7 is a structural diagram of a third protection case of the reflecting mirror according to the embodiment of the invention.
In the figure: 1-a light-emitting mechanism, 101-a first fixed mount, 102-a first focus lens, 103-a first diaphragm part, 1031-a first diaphragm, 104-an optical path first reflecting part, 1041-a first reflecting mirror, 1042-a second reflecting mirror, 2-a reflected light receiving mechanism, 201-a second fixed mount, 202-a second diaphragm part, 2021-a second diaphragm, 2022-a third diaphragm, 2023-a fourth diaphragm, 203-an optical path second reflecting part, 2031-a third reflecting mirror, 2032-a fourth reflecting mirror, 2033-a fifth reflecting mirror, 204-a second focus lens, 3-a fixed top plate, 4-a diffuse light source, 5-a fixed bottom plate, 6-a light source box, 7-a light sensor, 8-a fifth diaphragm, 9-a first side plate, 10-a second side plate, 11-a reflecting mirror first shield box, 12-a reflecting mirror second shield box, 13-a reflecting mirror third shield box, 14-a sixth diaphragm, 15-a first frame, 16-a second frame.
Detailed Description
In order to make the technical solutions of the present invention more clear and definite for those skilled in the art, the present invention is further described in detail below with reference to the examples and the accompanying drawings, but the embodiments of the present invention are not limited thereto.
As shown in fig. 1-7, the present embodiment provides a scanning device for integrated product surface inspection,
comprises a light-emitting mechanism 1 for emitting light to the surface of a product to be detected and a reflected light receiving mechanism 2 for receiving the light reflected by the surface of the product;
the light-emitting mechanism 1 comprises a first fixing support 101 which plays a role of supporting and fixing, a first diaphragm part 103 is arranged on one side of the first fixing support 101, a plurality of channels penetrate through the upper surface of the first diaphragm part 103 and are used for enabling light rays to pass through so as to form a folded light path and play a role of preventing stray light, a first focusing lens 102 is arranged below the first diaphragm part 103, a light source is arranged below the first focusing lens 102 and is used for illuminating the surface of a product to be detected, the light-emitting mechanism 1 further comprises a light path first reflecting part 104 which is used for reflecting the light paths penetrating through the channels of the first diaphragm part 103 for multiple times so that the light paths form a light path section which is connected end to end, the whole volume can be reduced, and the whole occupied space of the reducing device is reduced so that the light rays emitted by the light source can be abutted to the surface of the product to be detected;
the reflected light receiving mechanism 2 includes a second fixing support 201, a second light path reflecting component 203 is disposed on one side of the second fixing support 201, and is used for reflecting light reflected from the surface of the product to be detected for multiple times, so that the direction of the light path is changed, a second diaphragm component 202 and a second fixed focus lens 204 are further disposed on one side of the second fixing support 201, a plurality of channels are penetrated through the upper surface of the second diaphragm component 202, and are used for allowing light reflected by the second light path reflecting component 203 to pass through, so as to form a folded light path, the second fixed focus lens 204 is used for receiving light reflected by the second light path reflecting component 203, and light passing through the first fixed focus lens 102 and light passing through the second fixed focus lens 204 are co-focused at the same frequency, that is, a light source below the first fixed focus lens 102 is a co-focused illumination light source at the same frequency.
In this embodiment, as shown in fig. 1, the optical path first reflection component 104 includes a first reflection mirror 1041 and a second reflection mirror 1042 distributed up and down, the first reflection mirror 1041 is located above the second reflection mirror 1042 in an oblique direction, the first reflection mirror 1041 is used for reflecting the light emitted from the light source to the oblique direction, so that the light is abutted to the second reflection mirror 1042, the second reflection mirror 1042 is used for reflecting the light reflected from the first reflection mirror 1401 upwards, so that the light is abutted to the surface of the product to be inspected located above, a light imaging sensor 7 is disposed below the second focus fixing lens 204, and when in use, the product to be inspected is located above the scanning device.
In this embodiment, as shown in fig. 2, the first diaphragm component 103 includes a plurality of first diaphragms 1031 distributed from top to bottom, and three channels distributed from left to right penetrate through the upper surface of each first diaphragm 1031, and the left and right channels of two adjacent first diaphragms 1031 vertically correspond to each other, and the middle channels of the plurality of first diaphragms 1031 are located on the same inclined plane, and the right channel of each first diaphragm 1031 is located between the first focusing lens 102 and the first reflector 1041, that is, three optical paths penetrate through the first diaphragm component 103.
In this embodiment, as shown in fig. 2, the second reflecting member 203 of the optical path includes a fifth reflecting mirror 2033, a third reflecting mirror 2031 and a fourth reflecting mirror 2032 distributed vertically, the third reflecting mirror 2031 is used for receiving the light reflected by the surface of the product to be inspected and reflecting the light to the fourth reflecting mirror 2032, the fourth reflecting mirror 2032 is used for reflecting the light from the third reflecting mirror 2031 to the fifth reflecting mirror 2033, the fifth reflecting mirror 2033 is used for reflecting the light from the fourth reflecting mirror 2032 to the mirror surface of the second fixed focus lens 204, and the third reflecting mirror 2031 is located at the lower right of the fifth reflecting mirror 2033.
In this embodiment, as shown in fig. 1, the second diaphragm assembly 202 includes a second diaphragm 2021, three channels are disposed on the upper surface of the second diaphragm 2021 from right to left, and are used for passing three light paths generated by the reflection of the second reflection assembly 203, the second fixed focus lens 204 is disposed below the fifth reflection mirror 2033, and the second diaphragm 2021 is disposed between the second fixed focus lens 204 and the fifth reflection mirror 2033, and is used for making the light reach the second fixed focus lens 204 after passing through the second diaphragm 2021.
In this embodiment, as shown in fig. 2, the second diaphragm assembly 202 further includes a third diaphragm 2022 located above the fourth reflector 2032 and a fourth diaphragm 2023 located below the fifth reflector 2033, two channels distributed left and right penetrate through upper surfaces of the third diaphragm 2022 and the fourth diaphragm 2023, a right channel of the third diaphragm 2022 vertically corresponds to a right channel of the second diaphragm 2021, a left channel of the fourth diaphragm 2023 vertically corresponds to a left channel of the second diaphragm 2021, a middle channel of the second diaphragm 2021 vertically corresponds to the left channel of the third diaphragm 2022 and is inclined to the right channel of the fourth diaphragm 2023, a fifth diaphragm 8 is further disposed above the second reflector 1042, the fifth diaphragm 8 is disposed between the second reflector 1042 and the first diaphragm 1031, two channels distributed left and right penetrate through an upper surface of the fifth diaphragm 8, the left channel of the fifth diaphragm 8 vertically corresponds to the left channel of the first diaphragm 1031 above the fifth diaphragm, the right channel of the fifth diaphragm 8 is inclined to reduce stray light, and limit stray light rays in a range above the fifth diaphragm 1031.
In this embodiment, as shown in fig. 2, the optical module further includes a fixing base plate 5, two second fixing brackets 201 are provided, and they are distributed front and back, two first fixing brackets 101 are provided, and they are distributed front and back, two second fixing brackets 201 and two first fixing brackets 101 are all fixedly connected to the fixing base plate 5, and a first frame 15 and a second frame 16 are further fixed on the fixing base plate 5, the first frame 15 is used for surrounding two first fixing brackets 101, the second frame 16 is used for surrounding two second fixing brackets 201, and four first side plates 9 are fixed on an outer side surface of the first frame 15, four second side plates 10 are fixed on an outer side surface of the second frame 16, a second protective box 12 and a third protective box 13 for reflecting mirrors are fixed on a top of the second frame 16, the second protective box 12 for reflecting mirrors is disposed above a fifth reflecting mirror 2033, the third protective box 13 for reflecting light from a third reflective mirror 2031, and a plurality of sixth protective boxes 14 distributed up and down are disposed on an inner side of the third protective box 13, and a surface of each sixth aperture 14 for allowing light to pass through a third reflective mirror 2031 and to pass through a third reflective mirror 2031.
In this embodiment, as shown in fig. 1, a fixed top plate 3 is fixed on the top of the first side plate 9, a slot penetrates through the upper surface of the fixed top plate 3, the slot on the fixed top plate 3 vertically corresponds to the left channel of the first diaphragm 1031 up and down, in order to enable light to be reflected upwards, and the top of the fixed top plate 3 is provided with a diffused light source 4 for secondary light providing on the surface of a product to be inspected, the light source in the light source box (6) is provided for one time, a first protection box 11 of a reflector is arranged above the first reflector 1041, which plays a role of dust protection, the reflected light receiving mechanism 2 and the light emitting mechanism 1 are adjacent left and right, the light source box 6 is arranged below the fixed bottom plate 5, and the light source is arranged inside the light source box 6.
The method for assembling scanning device for detecting surface of integrated product includes the following steps
Step A, respectively assembling a light-emitting mechanism 1 and a reflected light receiving mechanism 2;
b, respectively fixing the light-emitting mechanism 1 and the reflected light receiving mechanism 2 on a fixed bottom plate 5, and respectively installing a light source box 6 and a light sensor 7, wherein the light sensor 7 can be a CCD sensor;
and C, sealing and protecting the light-emitting mechanism 1 and the reflected light receiving mechanism 2, and installing a protective box above the reflector exposed outside.
In this embodiment, as shown in fig. 1, the specific steps include the following
The step A is as follows
a1. The fifth diaphragm 8 and the three first diaphragms 1031 are fixed between the two first fixing brackets 101 in sequence, and the fourth diaphragm 2023, the second diaphragm 2021 and the third diaphragm 2022 are fixed between the two second fixing brackets 201 in the vertical sequence;
a2. sequentially fixing the first reflector 1041 and the second reflector 1042 at the top and bottom between the two first fixing brackets 101, and fixing the fifth reflector 2033, the third reflector 2031 and the fourth reflector 2032 at the top and bottom between the two second fixing brackets 201;
step B is specifically as follows
b1. Fixing the two first fixing brackets 101 and the two second fixing brackets 201 in a2 on the fixing base plate 5 respectively;
b2. respectively sleeving the first frame 15 on the outer side of the first fixing support 101 and the second frame 16 on the outer side of the second fixing support 201, so that the first frame 15 and the second frame 16 are respectively and fixedly connected with the fixing bottom plate 5, the first frame 15 is not contacted with the first fixing support 101, and the second frame 16 is not contacted with the second fixing support 201;
b3. fixedly installing a first fixed-focus lens 102 and a light source box 6 provided with a light source, inserting the first fixed-focus lens 102 upwards to the top of a fixed bottom plate 5, fixedly installing a second fixed-focus lens 204 and a light sensor 7, and inserting the second fixed-focus lens 204 upwards to the top of the fixed bottom plate 5;
step C is as follows
c1. The periphery of the first frame 15 is sealed by using a first side plate 9, a fixed top plate 3 is arranged at the top of the first side plate 9, and a reflector first protection box 11 is arranged to protect a first reflector 1041;
c2. the periphery of the second frame 16 is sealed by using a second side plate 10, a second reflector protection box 12 is installed at the top of the fifth reflector 2033, a third reflector protection box 13 is installed at the same time to protect the third reflector 2031, and high-transmittance glass is installed on the inner side of the third reflector protection box 13 to construct a space where the second fixed-focus lens 204 is located into a closed space;
c3. a diffuse light source 4 is attached to the periphery of a groove penetrating the fixed top plate 3, and a high-transmittance glass is attached to the groove of the fixed top plate 3 to form a closed space in which the first focusing lens 102 is located.
In summary, in this embodiment, the light emitting mechanism and the reflected light receiving mechanism provided in this embodiment can reflect light for multiple times to change the direction of the light path, and divide the long light path into multiple short light paths, so as to compact the structures, and reduce the volume of the whole device, so as to ensure convenience and stability in use, and the first fixing bracket 101 and the second fixing bracket 201, which play a role in fixing, do not contact with the first frame 15 and the second frame 16 outside the first fixing bracket 101 and the second fixing bracket 201, so as to effectively ensure the stability of the light emitting mechanism and the reflected light receiving mechanism in use, and avoid the impact of the first frame 15 and the second frame 16 and the side plates thereon.
The above description is only for the purpose of illustrating the present invention and is not intended to limit the scope of the present invention, and any person skilled in the art can substitute or change the technical solution of the present invention and its conception within the scope of the present invention.
Claims (10)
1. A scanning device for detecting the surface of an integrated product is characterized in that:
comprises a light-emitting mechanism (1) for emitting light to the surface of a product to be detected and a reflected light receiving mechanism (2) for receiving the light reflected by the surface of the product;
the light-emitting mechanism (1) comprises a first fixing support (101), a first diaphragm part (103) is arranged on one side of the first fixing support (101), a plurality of channels penetrate through the upper surface of the first diaphragm part (103) and are used for enabling light to pass through so as to form a folded light path, a first focusing lens (102) is arranged below the first diaphragm part (103), a light source is arranged below the first focusing lens (102) and is used for illuminating the surface of a product to be detected, and the light-emitting mechanism (1) further comprises a light path first reflecting part (104) which is used for reflecting light paths penetrating out of the channels of the first diaphragm part (103) for multiple times so that the light paths form a light path section which is connected end to end, so that the light emitted by the light source can be abutted to the surface of the product to be detected;
the reflected light receiving mechanism (2) comprises a second fixing support (201), a light path second reflecting part (203) is arranged on one side of the second fixing support (201) and used for reflecting light reflected by the surface of the product to be detected for multiple times so as to change the direction of the light path, a second diaphragm part (202) and a second focusing lens (204) are further arranged on one side of the second fixing support (201), a plurality of channels penetrate through the upper surface of the second diaphragm part (202) and are used for enabling the light reflected by the light path second reflecting part (203) to pass through so as to form a folded light path, the second focusing lens (204) is used for receiving the light reflected by the light path second reflecting part (203), and the light penetrating out of the first focusing lens (102) and the light penetrating into the second focusing lens (204) are subjected to confocal at the same frequency.
2. The scanning device for detecting the surface of the integrated product according to claim 1, wherein: the first reflecting part (104) of light path is including first speculum (1041) and second speculum (1042) that distribute from top to bottom, first speculum (1041) are used for the below reflection of syncline to come from the light that the light source jetted out, so that light supports to second speculum (1042), second speculum (1042) are used for upwards reflecting come from the light that first speculum (1041) was reflected, so that light supports to the surface that is located the product of waiting to examine of top, the below of second prime lens (204) is provided with light sensor (7).
3. The scanning device for detecting the surface of the integrated product according to claim 2, wherein: the first diaphragm part (103) comprises a plurality of first diaphragms (1031) distributed from top to bottom, each first diaphragm (1031) has three passages distributed from left to right through the upper surface of the first diaphragm (1031), the left and right passages of two vertically adjacent first diaphragms (1031) vertically correspond to each other, the middle passages of the first diaphragms (1031) are positioned on the same inclined plane, and the right passages of the first diaphragms (1031) are positioned between the first focusing lens (102) and the first reflecting mirror (1041).
4. The integrated product surface inspection scanner of claim 3 further comprising: the light path second reflecting component (203) comprises a fifth reflecting mirror (2033), a third reflecting mirror (2031) and a fourth reflecting mirror (2032) which are distributed vertically, the third reflecting mirror (2031) is used for receiving light reflected by the surface of a product to be detected and reflecting the light to the fourth reflecting mirror (2032), the fourth reflecting mirror (2032) is used for reflecting the light from the third reflecting mirror (2031) to the fifth reflecting mirror (2033), and the fifth reflecting mirror (2033) is used for reflecting the light from the fourth reflecting mirror (2032) to the mirror surface of the second fixed focus lens (204).
5. The integrated scanning device for detecting the surface of the product according to claim 4, wherein: the second diaphragm part (202) comprises a second diaphragm (2021), three channels distributed from right to left penetrate through the upper surface of the second diaphragm (2021) and are used for enabling three light paths generated by reflection of the light path second reflection part (203) to pass through, the second fixed-focus lens (204) is arranged below the fifth reflection mirror (2033), and the second diaphragm (2021) is arranged between the second fixed-focus lens (204) and the fifth reflection mirror (2033).
6. The integrated scanning device for detecting the surface of the product according to claim 5, wherein: the second diaphragm component (202) further includes a third diaphragm (2022) located above the fourth reflector (2032) and a fourth diaphragm (2023) located below the fifth reflector (2033), two channels distributed left and right are respectively penetrated through the upper surfaces of the third diaphragm (2022) and the fourth diaphragm (2023), a right channel of the third diaphragm (2022) vertically corresponds to a right channel of the second diaphragm (2021), a left channel of the fourth diaphragm (2023) vertically corresponds to a left channel of the second diaphragm (2021), a middle channel of the second diaphragm (2021) vertically corresponds to the left channel of the third diaphragm (2022) and the right channel of the fourth diaphragm (2023) on the same inclined plane, a fifth diaphragm (8) is further disposed above the second reflector (1042), the fifth diaphragm (8) is disposed between the third diaphragm (2022) and the first diaphragm (1031), the upper surfaces of the fifth diaphragm (8) are penetrated through the left channels of the fifth diaphragm (1031), and the upper surfaces of the fifth diaphragm (8) are disposed above the left channel of the fifth diaphragm (1031).
7. The integrated product surface inspection scanner of claim 6 further comprising: also comprises a fixed bottom plate (5), two second fixed brackets (201) are arranged, the two first fixing supports (101) are distributed in the front-back direction, the two second fixing supports (201) and the two first fixing supports (101) are fixedly connected with the fixed bottom plate (5), and a first frame (15) and a second frame (16) are fixed on the fixed bottom plate (5), the first frame (15) is used for surrounding two first fixing brackets (101), the second frame (16) is used for surrounding two second fixing brackets (201), and four first side plates (9) are fixed on the outer side surface of the first frame (15), four second side plates (10) are fixed on the outer side surface of the second frame (16), a second reflector protection box (12) and a third reflector protection box (13) are fixed at the top of the second frame (16), the mirror second protective box (12) is arranged above the fifth mirror (2033), the reflector third protection box (13) is arranged above the third reflector (2031), and the inner side of the reflector third protection box (13) is provided with a plurality of sixth diaphragms (14) which are distributed up and down, the surface of each sixth diaphragm (14) is penetrated with a channel, the third reflector (2031) is used for allowing the reflected light of the product to be detected positioned above to pass through and abut on.
8. The integrated product surface inspection scanner of claim 7 further comprising: the top of first curb plate (9) is fixed with fixed roof (3), the upper surface of fixed roof (3) runs through slottedly, fixed roof (3) on the groove with vertical correspondence about the left passageway of first diaphragm (1031), just the top of fixed roof (3) is provided with diffuse light source (4) for the secondary provides and shines the light on waiting to examine the product surface, the top of first speculum (1041) is provided with the first protection box of speculum (11), reverberation receiving mechanism (2) with adjacent about luminous mechanism (1), the below of PMKD (5) is provided with light source box (6), the light source set up in the inboard of light source box (6).
9. The method for assembling a scanning device for surface inspection of integrated products of claim 8, wherein: comprises the following steps
Step A, respectively assembling a light-emitting mechanism (1) and a reflected light receiving mechanism (2);
b, respectively fixing the light-emitting mechanism (1) and the reflected light receiving mechanism (2) on a fixed bottom plate (5), and respectively installing a light source box (6) and a light sensor (7);
and C, sealing and protecting the light-emitting mechanism (1) and the reflected light receiving mechanism (2), and installing a protective box above the reflector exposed outside.
10. The method of assembling a scanning device for inspecting the surface of an integrated product according to claim 9, wherein: the method comprises the following steps
The step A is as follows
a1. A fifth diaphragm (8) and three first diaphragms (1031) are fixed between the two first fixing brackets (101) in sequence, and a fourth diaphragm (2023), a second diaphragm (2021) and a third diaphragm (2022) are fixed between the two second fixing brackets (201) in an up-down sequence;
a2. sequentially fixing a first reflector (1041) and a second reflector (1042) at the top and bottom between two first fixing brackets (101), and fixing a fifth reflector (2033), a third reflector (2031) and a fourth reflector (2032) at the top and bottom between two second fixing brackets (201);
the step B is as follows
b1. Respectively fixing two first fixing brackets (101) and two second fixing brackets (201) in a2 on a fixing bottom plate (5);
b2. respectively sleeving a first frame (15) on the outer side of a first fixing support (101) and sleeving a second frame (16) on the outer side of a second fixing support (201), so that the first frame (15) and the second frame (16) are respectively and fixedly connected with a fixing bottom plate (5), the first frame (15) is not in contact with the first fixing support (101), and the second frame (16) is not in contact with the second fixing support (201);
b3. fixedly installing a first fixed-focus lens (102) and a light source box (6) provided with a light source, inserting the first fixed-focus lens (102) upwards to the top of a fixed bottom plate (5), fixedly installing a second fixed-focus lens (204) and a light sensor (7), and inserting the second fixed-focus lens (204) upwards to the top of the fixed bottom plate (5);
step C is specifically as follows
c1. The periphery of the first frame (15) is sealed by using a first side plate (9), a fixed top plate (3) is arranged at the top of the first side plate (9), and a reflector first protection box (11) is arranged to protect a first reflector (1041);
c2. the periphery of a second frame (16) is sealed by using a second side plate (10), a reflector second protective box (12) is arranged at the top of a fifth reflector (2033), a reflector third protective box (13) is arranged to protect a third reflector (2031), and high-transmittance glass is arranged on the inner side of the third protective box (13) and used for constructing a space where a second fixed-focus lens (204) is located into a closed space;
c3. a diffuse light source (4) is mounted on the periphery of a groove penetrating through the fixed top plate (3), and high-transmittance glass is mounted on the groove of the fixed top plate (3) for forming a space where the first focusing lens (102) is located into a closed space.
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| CN202110423845.1A CN113125449B (en) | 2021-04-20 | 2021-04-20 | Scanning device for detecting surface of integrated product and assembling method thereof |
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| CN113125449B true CN113125449B (en) | 2022-10-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5815329A (en) * | 1996-09-13 | 1998-09-29 | Umax Data Systems, Inc. | Tri-mirror multi-reflection optical path folding apparatus |
| US20050013021A1 (en) * | 2003-06-10 | 2005-01-20 | Olympus Corporation | Decentered optical system, light transmitting device, light receiving device, and optical system |
| KR100662560B1 (en) * | 2005-11-11 | 2006-12-28 | 삼성전자주식회사 | Scanning apparatus and image forming apparatus including the same |
| CN201499208U (en) * | 2009-05-15 | 2010-06-02 | 一品光学工业股份有限公司 | Image scanning module with five reflectors |
| CN103278919B (en) * | 2013-05-28 | 2015-08-26 | 上海理工大学 | A kind of color solid region confocal microscopic imaging method |
| CN204009232U (en) * | 2013-08-01 | 2014-12-10 | 矽创电子股份有限公司 | Optical imaging device |
| JP6568672B2 (en) * | 2015-11-13 | 2019-08-28 | コグネックス・コーポレイション | System and method for detecting defects on specular surfaces in a vision system |
| CN208921603U (en) * | 2017-03-07 | 2019-05-31 | 伊鲁米那股份有限公司 | Imaging system |
| CN108918543B (en) * | 2018-05-14 | 2021-03-23 | 上海工程技术大学 | Dynamic detection device and method for mirror surface scratch |
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