CN113125350A - Microphone capable of sensing hydrogen concentration and photoacoustic signal simultaneously and sensing method - Google Patents
Microphone capable of sensing hydrogen concentration and photoacoustic signal simultaneously and sensing method Download PDFInfo
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- CN113125350A CN113125350A CN202110284689.5A CN202110284689A CN113125350A CN 113125350 A CN113125350 A CN 113125350A CN 202110284689 A CN202110284689 A CN 202110284689A CN 113125350 A CN113125350 A CN 113125350A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention discloses a microphone capable of sensing hydrogen concentration and photoacoustic signals simultaneously and a sensing method, wherein multi-component and high-sensitivity detection of dissolved fault characteristic gas in transformer oil including hydrogen can be realized only by adopting the microphone capable of sensing hydrogen and photoacoustic signals simultaneously and combining a spectrometer and the like; the white light interference demodulation algorithm based on fast Fourier transform and Buneman frequency estimation can realize fast demodulation of the absolute cavity length of the optical fiber Fabry-Perot interference cavity, and the amplitude of the photoacoustic signal is obtained through the dynamic cavity length variation, so that the CO and CO to be detected are calculated through inversion2And the hydrocarbon gas concentration, the hydrogen concentration is inverted through the cavity length variable quantity of the cantilever beam equilibrium position (static state) obtained by dynamic averaging of the absolute cavity length, and the hydrogen concentration inversion method has the advantages of simple structure, intrinsic safety, high sensitivity, high response speed and the like.
Description
Technical Field
The invention relates to a technology for analyzing gas with dissolved fault characteristics in transformer oil (photoacoustic DGA technology for short) based on a photoacoustic spectrum trace gas detection method, in particular to a microphone and a sensing method which have the advantages of simple structure, intrinsic safety, high sensitivity and high response speed and can simultaneously sense hydrogen concentration and photoacoustic signals.
Background
An oil-filled transformer unit is commonly adopted in ultrahigh-voltage and high-capacity transformers, namely, an iron core and a winding are immersed in transformer oil (insulating oil) together. If a transformer has faults such as local discharge or overheating caused by aging of an insulating material, dissolved gas (hydrogen, carbon monoxide, carbon dioxide and various hydrocarbon gases) is generated in the transformer oil, and the components and the concentration of the dissolved gas are related to the type and the severity of the faults inside the transformer, so that the online monitoring of the running state of the transformer is realized by detecting the dissolved gas of the transformer oil in the prior art, and the sudden faults are avoided.
In recent years, a transformer dissolved gas analysis (photoacoustic DGA for short) technology based on a photoacoustic spectroscopy trace gas detection method has become one of the mainstream solutions of the online detection technology for the operation state of large-scale power transformers, and an optical microphone adopting a cantilever beam structure as a photoacoustic signal measurement sensor of a photoacoustic spectrometer is a development trend of the technology in recent years. The Chinese patent with the publication number of CN 104865192B discloses a fiber cantilever beam microphone for photoacoustic spectrometry and a manufacturing method thereof, wherein the fiber cantilever beam microphone comprises a single-mode fiber, a fiber ceramic sleeve, a polymer cantilever beam (high polymer material) and a polymer annular film; the polymer cantilever beam is obtained by etching the polymer annular film in a manner of processing nanosecond laser pulses; and inserting the single-mode optical fiber into the optical fiber ceramic sleeve, and adjusting the distance between the tail end of the single-mode optical fiber and the polymer cantilever beam to form an optical Fabry-Perot cavity (F-P). When the excitation light source is modulated at a certain frequency, the target gas can generate a photoacoustic effect to generate periodic photoacoustic signals, and the cantilever beam 1-1 generates high-frequency forced vibration under the action of the photoacoustic signals, so that the length of the Fabry-Perot cavity is changed. The frequency of the vibration signal is obtained through Fast Fourier Transform (FFT) calculation, the detection of the frequency can be realized through a 2f harmonic detection technology, toxic and harmful gases such as carbon monoxide, methane, hydrogen sulfide and the like can be detected, but the concentration of hydrogen without infrared activity cannot be detected.
The hydrogen concentration is an important parameter for representing the frequency and the intensity of partial discharge in the transformer, and the measurement of the hydrogen is indispensable in the photoacoustic DGA system, so most of the current photoacoustic DGA systems need to be provided with independent hydrogen sensors and demodulation modules thereof so as to realize the detection of the dissolved hydrogen in the transformer oil. For example, a semiconductor or electrochemical hydrogen sensor module is added in the gas path, and the sensor not only can not meet the requirements of the photoacoustic DGA system on detection sensitivity and long-term working characteristics, but also increases the complexity of the system structure. In addition, the probe of the electrical gas sensor needs to be charged and even heated at high temperature, and there is a possibility of causing danger in detecting high-concentration hydrogen or in an inflammable and explosive gas environment. A typical optical Fiber Hydrogen Sensor structure is reported in documents J, Jiang, S, Member, G, Ma, C, Li and S, Member, "high throughput Sensitive dispersed Hydrogen Sensor Based on Side-polarized Fiber Bragg Grating," vol.27, No. 13, pp. 1453 and 1456, 2015, wherein a palladium-silver composite film is sputtered as a Hydrogen Sensitive material after the Side wall of an optical Fiber Bragg Grating (FBG) is Polished, so that the optical sensing of the Hydrogen component in the DGphotoacoustic A system is realized. The polished FBG side wall improves the sensitivity of hydrogen sensing to a certain extent, but increases the complexity of the manufacturing process and reduces the yield of the mechanical strength of the optical fiber. Document J.T. Gurusamyet al"MEMS based hydrogen sensing with parts-per-bipolar resolution," Sensors Actuators, B chem., vol.281, pp. 335-342, 2019, which adopts a hydrogen sensitive element with a cantilever beam structure to build a set of optical hydrogen measuring system, and realizes hydrogen sensing by monitoring the variation of the light beam intensity in the hydrogen atmosphere. The documents J, Ma, Y, Zhou, X, Bai, K, Chen, and B, O, Guan, "High-sensitivity and fast-response fiber-tip Fabry-P not-P, Na not-P, Vol, 11, No. 34, pp. 15821, 15827, 2019 modify two-dimensional graphene material with High mechanical strength by using palladium metal, thus realizing the optical fiber method based on the circular membraneAccording to the scheme, the mechanical strength of the optical fiber hydrogen sensor is improved to a certain extent, interference of light intensity fluctuation on measurement is avoided through interference type demodulation, the circular membrane can deform under the hydrogen atmosphere, and the concentration of hydrogen can be obtained through measuring the deflection of the center of the circular membrane. Besides poor sensitivity, anti-interference performance and practicability, the optical hydrogen sensors also need to design a separate measuring unit and a gas circuit, so that the volume of sample gas and the complexity of a transformer oil dissolved gas analysis system are increased.
In order to solve the problems of complex structure and the like existing in the independent arrangement of a hydrogen sensor, the document Zhangwei, a photoacoustic DGA system for inverting the concentration of hydrogen by measuring the influence of hydrogen on the sound velocity in mixed gas is reported by the research on the detection of dissolved gas in transformer oil by using photoacoustic spectroscopy (electromechanical technology, pp.97, 2018), and the measurement of the multi-component gas containing hydrogen is realized.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a microphone and a sensing method which have the advantages of simple structure, intrinsic safety, high sensitivity and high response speed and can simultaneously sense the hydrogen concentration and the photoacoustic signal.
The technical solution of the invention is as follows: a microphone capable of sensing hydrogen and photoacoustic signals simultaneously comprises a shell, wherein an optical fiber ceramic contact pin and a cantilever beam for fixing a single-mode optical fiber are arranged in the shell, the cantilever beam is positioned above the optical fiber ceramic contact pin and forms an F-P cavity with the flat end face of the optical fiber in the optical fiber ceramic contact pin, the cantilever beam is of a rectangular cantilever structure with one fixed end and consists of a single crystal silicon layer, a palladium/palladium alloy layer plated on the upper surface of the single crystal silicon layer and a gold layer plated on the lower surface of the single crystal silicon layer, the thickness of the single crystal silicon layer is 5-20 mu m, the thickness of the palladium/palladium alloy layer is 0.1-1 mu m, and the thickness of the gold layer is 30-100 nm.
The method for sensing the microphone capable of simultaneously sensing the hydrogen and the photoacoustic signals is to simultaneously sense the hydrogen and the photoacoustic signalsThe micro-speaker of the photoacoustic signal is arranged at the acoustic wave guide hole of the photoacoustic cell, the photoacoustic cell is provided with a gas inlet and a gas outlet, one side of the photoacoustic cell is provided with an excitation light source, a single-mode optical fiber of the micro-speaker capable of sensing hydrogen and the photoacoustic signal simultaneously is connected with an optical fiber circulator, the input end of the optical fiber circulator is coupled with a super-radiation light-emitting diode, the output end of the optical fiber circulator is connected with a spectrometer, and the spectrometer is connected with a computer through a data acquisition and control circuit; pumping gas to be detected into a photoacoustic cell and irradiating the gas by an excitation light source, enabling wide-spectrum light emitted by a superradiation light-emitting diode to enter a microphone capable of sensing hydrogen and photoacoustic signals simultaneously after passing through an optical fiber circulator to form F-P interference, and enabling interference light carrying F-P cavity length information to pass through the optical fiber circulator and then to enter a spectrometer; interference spectrum output by spectrometerI(λ) The data is transmitted to a computer through a data acquisition and control circuit; the computer demodulates the interference spectrum by a white light interference signal demodulation algorithmI(λ) Cavity length of middle F-P cavity, said interference spectrumI(λ) Comprises the following steps:
in the formula:λis the wavelength of light,I 0(λ) Is the luminous intensity of the superluminescent light-emitting diode,γin order to be fine in the F-P interference fringes,d 0+Δdis the cavity length of the F-P cavity,d 0is the static cavity length of the F-P cavity,Δdis the dynamic alternating cavity length change amplitude of the F-P cavity;
by measuring Δ by computerdObtaining the amplitude of the photoacoustic signal in the photoacoustic system, and calculating the concentration of the gas generating the photoacoustic signal through calibration; computer computingd 0+ΔdAs a dynamic average ofd 0Amount of change ofΔd 0By calibrationΔ d 0The hydrogen concentration was obtained.
The invention can realize the multi-component and high-flexibility of dissolving fault characteristic gas in transformer oil including hydrogen by only adopting a microphone capable of sensing hydrogen and photoacoustic signals simultaneously and combining a spectrometer and the likeDetecting the sensitivity; the white light interference demodulation algorithm based on fast Fourier transform and Buneman frequency estimation can realize fast demodulation of the absolute cavity length of the optical fiber Fabry-Perot interference cavity, and the amplitude of the photoacoustic signal is obtained through the dynamic cavity length variation, so that the CO and CO to be detected are calculated through inversion2And the hydrocarbon gas concentration, the hydrogen concentration is inverted through the cavity length variable quantity of the cantilever beam equilibrium position (static state) obtained by dynamic averaging of the absolute cavity length, and the hydrogen concentration inversion method has the advantages of simple structure, intrinsic safety, high sensitivity, high response speed and the like.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic view of a cantilever structure according to an embodiment of the present invention.
Fig. 3 is a block diagram of an application system according to an embodiment of the present invention.
Detailed Description
The microphone capable of sensing hydrogen and photoacoustic signals simultaneously is provided with a shell 1-3 as shown in figures 1 and 2, wherein the shell 1-3 is internally provided with an optical fiber ceramic inserting needle 1-2 for fixing a single-mode optical fiber 1-4 and a cantilever beam 1-1, the cantilever beam 1-1 is positioned above the optical fiber ceramic inserting needle 1-2 and forms an F-P cavity (optical fiber Fabry-Perot interference cavity) with the flat end surface of the optical fiber in the optical fiber ceramic inserting needle 1-2, the cantilever beam 1-1 is a rectangular cantilever structure with one fixed end, and the difference from the prior art is that the cantilever beam 1-1 is composed of a single crystal silicon layer 1-1-1, a palladium layer 1-1-2 plated on the upper surface of the single crystal silicon layer 1-1-1-1 by magnetron sputtering and a gold layer 1-1-3 plated on the lower surface of the single crystal silicon layer 1-1-1 by magnetron sputtering, the single crystal Silicon layer 1-1-1 is obtained by anisotropic dry etching On an SOI (Silicon-On-Insulator) sheet by using a micro electro mechanical system. In order to maintain the mechanical strength of the sensitive element and improve the sensitivity, the thickness of the monocrystalline silicon layer 1-1-1 is 6 microns, the thickness of the palladium layer 1-1-2 is 1 micron, the thickness of the gold layer 1-1-3 is 50nm, and the gold layer 1-1-3 can improve the contrast of an F-P interference spectrum and eliminate the interface reflection interference of the palladium layer.
The sensing method of the microphone capable of sensing hydrogen and photoacoustic signals simultaneously according to the present invention is first as shown in fig. 3: will sense hydrogen simultaneouslyThe gas and photoacoustic signal microphone 1 is arranged at the acoustic waveguide of the photoacoustic cell 2, the photoacoustic cell 2 is provided with a gas inlet 3 and a gas outlet 4, one side of the photoacoustic cell 2 is provided with an excitation light source 5, the single-mode optical fibers 1-4 of the microphone 1 capable of sensing hydrogen and photoacoustic signals simultaneously are connected with an optical fiber circulator 7, the input end of the optical fiber circulator 7 is coupled with a super-radiation light-emitting diode 6 (a wide-spectrum light source with mW-level output power), the output end of the optical fiber circulator 7 is connected with a spectrometer 8, and the spectrometer 8 is connected with a computer 10 through a data acquisition and control circuit 9; pumping gas to be detected into a photoacoustic cell 2 and irradiating the gas by an excitation light source 5, enabling wide-spectrum light emitted by a superluminescent light-emitting diode 6 to enter a microphone 1 capable of sensing hydrogen and photoacoustic signals simultaneously after passing through an optical fiber circulator 7 to form F-P interference, and enabling interference light carrying F-P cavity length information to pass through the optical fiber circulator 7 and then reach a spectrometer 8; interference spectrum output by spectrometer 8I(λ) Transmitted to the computer 10 through the data acquisition and control circuit 9; the computer 10 demodulates the interference spectrum by a white light interference signal demodulation algorithmI(λ) Cavity length of middle F-P cavity, said interference spectrumI(λ) Comprises the following steps:
in the formula:λis the wavelength of light,I 0(λ) Is the luminous intensity of the superluminescent light-emitting diode,γin order to be fine in the F-P interference fringes,d 0+Δdis the cavity length of the F-P cavity,d 0is the static cavity length of the F-P cavity,Δdis the dynamic alternating cavity length change amplitude of the F-P cavity;
The principle is as follows: when the gas to be detected contains hydrogen, methane, acetylene or carbon dioxide and the like, quasi-static deflection and forced vibration occur to the cantilever beam 1-1 at the same time, and the quasi-static deflection is mainly caused by the reaction of the hydrogen sensitive palladium layer 1-1-2 and the hydrogen. The lattice of the palladium layer 1-1-2 is a face-centered cubic structure, the standard lattice constant is about 0.3890 nm under normal temperature and pressure, when palladium metal absorbs hydrogen, hydrogen atoms are dissolved into the palladium layer 1-1-2 and randomly occupy octahedral interstitial sites of the face-centered cubic structure of the palladium lattice, so that the palladium lattice is isotropically expanded, and the expansion scale is positively correlated with the hydrogen concentration. The cantilever beam 1-1 is deflected towards the silicon layer direction by utilizing the difference of the expansion coefficients of silicon and palladium under the hydrogen atmosphere, so that the expansion amount is amplified. The forced vibration is mainly generated under the action of photoacoustic signals, the gas to be detected is irradiated by an excitation light source, when the excitation light source is modulated at a certain frequency, target gas (methane, acetylene, carbon dioxide or the like) can generate photoacoustic effect to generate periodic photoacoustic signals, and the cantilever beam 1-1 generates high-frequency forced vibration under the action of the photoacoustic signals. Therefore, when hydrogen and other target gases are simultaneously present in the gas to be measured, the deformation of the cantilever beam 1-1 is superimposed by quasi-static deflection caused by hydrogen and forced vibration under the photoacoustic signal of the target gas.
Claims (2)
1. The utility model provides a can sense hydrogen and photoacoustic signal's microphone simultaneously, has casing (1-3), has fixed single mode fiber (1-4) optic fibre pottery contact pin (1-2) and cantilever beam (1-1) in casing (1-3), cantilever beam (1-1) are located optic fibre pottery contact pin (1-2) the top and constitute F-P chamber with optic fibre ceramic contact pin (1-2) terminal optic fibre flush end, cantilever beam (1-1) are the fixed rectangle cantilever structure of one end, its characterized in that: the cantilever beam (1-1) is composed of a single crystal silicon layer (1-1-1), a palladium/palladium alloy layer (1-1-2) plated on the upper surface of the single crystal silicon layer (1-1-1) and a gold layer (1-1-3) plated on the lower surface of the single crystal silicon layer (1-1-1), the thickness of the single crystal silicon layer (1-1-1) is 5-20 mu m, the thickness of the palladium/palladium alloy layer (1-1-2) is 0.1-1 mu m, and the thickness of the gold layer (1-1-3) is 30-100 nm.
2. The method of claim 1 for simultaneously sensing hydrogen and photoacoustic lightA method for sensing a signal microphone comprises the steps that a microphone (1) capable of sensing hydrogen and photoacoustic signals simultaneously is arranged at an acoustic waveguide hole of a photoacoustic cell (2), the photoacoustic cell (2) is provided with a gas inlet (3) and a gas outlet (4), one side of the photoacoustic cell (2) is provided with an excitation light source (5), a single-mode optical fiber (1-4) of the microphone (1) capable of sensing the hydrogen and the photoacoustic signals simultaneously is connected with an optical fiber circulator (7), the input end of the optical fiber circulator (7) is coupled with a super-radiation light-emitting diode (6), the output end of the optical fiber circulator (7) is connected with a spectrometer (8), and the spectrometer (8) is connected with a computer (10) through a data acquisition and control circuit (9); pumping gas to be detected into a photoacoustic cell (2) and irradiating the gas by an excitation light source (5), allowing wide-spectrum light emitted by a superluminescent light-emitting diode (6) to enter a microphone (1) capable of sensing hydrogen and photoacoustic signals simultaneously after passing through an optical fiber circulator (7) to form F-P interference, and allowing interference light carrying F-P cavity length information to pass through the optical fiber circulator (7) and then reach a spectrometer (8); interference spectrum output by the spectrometer (8)I(λ) Transmitted to a computer (10) through a data acquisition and control circuit (9); the method is characterized in that: the computer (10) demodulates the interference spectrum by a white light interference signal demodulation algorithmI(λ) Cavity length of middle F-P cavity, said interference spectrumI(λ) Comprises the following steps:
in the formula:λis the wavelength of light,I 0(λ) Is the luminous intensity of the superluminescent light-emitting diode,γin order to be fine in the F-P interference fringes,d 0+Δdis the cavity length of the F-P cavity,d 0is the static cavity length of the F-P cavity,Δdis the dynamic alternating cavity length change amplitude of the F-P cavity;
the computer (10) measures deltadObtaining the amplitude of the photoacoustic signal in the photoacoustic system, and calculating the concentration of the gas generating the photoacoustic signal through calibration; computer (10) calculatesd 0+ΔdAs a dynamic average ofd 0Amount of change ofΔd 0By calibrationΔd 0The hydrogen concentration was obtained.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567818A (en) * | 2021-08-16 | 2021-10-29 | 重庆大学 | Fabry-Perot type partial discharge sensing device and method based on cantilever support structure |
| CN114112924A (en) * | 2021-12-24 | 2022-03-01 | 中国科学院电工研究所 | In-situ monitoring device for dissolved gas in oil by adopting insulating material probe |
| CN114414010A (en) * | 2022-01-20 | 2022-04-29 | 福州大学 | Double-bending beam weighing sensor |
| CN113567818B (en) * | 2021-08-16 | 2024-05-03 | 重庆大学 | Fabry-Perot partial discharge sensing device and method based on cantilever supporting structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102539338A (en) * | 2011-12-30 | 2012-07-04 | 昆山和智电气设备有限公司 | Online monitoring system for gas content in transformer oil by using photoacoustic spectrum |
| CN104865192A (en) * | 2015-05-12 | 2015-08-26 | 中国科学院合肥物质科学研究院 | Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method |
| CN110346296A (en) * | 2019-07-20 | 2019-10-18 | 大连理工大学 | A kind of multi-cavity type is partly begun to speak resonance light sound pond and multiple gases measuring system simultaneously |
| WO2020173974A1 (en) * | 2019-02-26 | 2020-09-03 | Hahn-Schickard-Gesellschaft Für Angewandte Forschung E. V. | Photoacoustic spectroscope having a vibrating structure as sound detector |
-
2021
- 2021-03-17 CN CN202110284689.5A patent/CN113125350A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102539338A (en) * | 2011-12-30 | 2012-07-04 | 昆山和智电气设备有限公司 | Online monitoring system for gas content in transformer oil by using photoacoustic spectrum |
| CN104865192A (en) * | 2015-05-12 | 2015-08-26 | 中国科学院合肥物质科学研究院 | Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method |
| WO2020173974A1 (en) * | 2019-02-26 | 2020-09-03 | Hahn-Schickard-Gesellschaft Für Angewandte Forschung E. V. | Photoacoustic spectroscope having a vibrating structure as sound detector |
| CN110346296A (en) * | 2019-07-20 | 2019-10-18 | 大连理工大学 | A kind of multi-cavity type is partly begun to speak resonance light sound pond and multiple gases measuring system simultaneously |
Non-Patent Citations (2)
| Title |
|---|
| J.T.GURUSAMY ET AL.: "MEMS based hydrogen sensing with parts-per-billion resolution", 《SENSORS AND ACTUATORS B: CHEMICAL》 * |
| KE CHEN ET AL.: "Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone", 《SENSORS AND ACTUATORS A: PHYSICAL》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567818A (en) * | 2021-08-16 | 2021-10-29 | 重庆大学 | Fabry-Perot type partial discharge sensing device and method based on cantilever support structure |
| CN113567818B (en) * | 2021-08-16 | 2024-05-03 | 重庆大学 | Fabry-Perot partial discharge sensing device and method based on cantilever supporting structure |
| CN114112924A (en) * | 2021-12-24 | 2022-03-01 | 中国科学院电工研究所 | In-situ monitoring device for dissolved gas in oil by adopting insulating material probe |
| CN114414010A (en) * | 2022-01-20 | 2022-04-29 | 福州大学 | Double-bending beam weighing sensor |
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Application publication date: 20210716 |