CN113122905A - Electrochemical polishing solution recovery device and method - Google Patents
Electrochemical polishing solution recovery device and method Download PDFInfo
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- CN113122905A CN113122905A CN201911410727.6A CN201911410727A CN113122905A CN 113122905 A CN113122905 A CN 113122905A CN 201911410727 A CN201911410727 A CN 201911410727A CN 113122905 A CN113122905 A CN 113122905A
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- polishing solution
- scraper
- net bag
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
- C25F7/02—Regeneration of process liquids
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
- C25F3/22—Polishing of heavy metals
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- Chemical Kinetics & Catalysis (AREA)
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- Materials Engineering (AREA)
- Metallurgy (AREA)
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- Electrolytic Production Of Metals (AREA)
Abstract
The invention provides an electrochemical polishing solution recovery device and method, wherein the device comprises: the electrolytic tank is provided with an opening at the upper part and is used for containing polishing solution; an electrode plate assembly comprising an electrode plate; the electrode plate comprises a cathode plate and an anode plate which are respectively connected with a direct current power supply; the electrode plate is immersed into the polishing solution and deposits solid substances during electrolysis; a scraper assembly comprising a scraper for scraping off solid matter; the driving assembly is used for driving the scraper and the electrode plate to move relatively, so that the scraper scrapes solid substances from the electrode plate; the filter assembly comprises a net bag, wherein the net bag surrounds and isolates the electrode plate and is used for filtering solid substances. The invention leads precipitated metal to be automatically scraped and collected in the net bag when being taken out of the electrolytic bath after the electrolytic process is finished by introducing components such as a driving component, a scraper component, a filtering component and the like. The invention avoids the secondary pollution of the precipitated metal to the polishing solution, solves the problem of rapid recovery of the precipitated metal, and improves the operation efficiency.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing equipment, in particular to a device and a method for recovering electrochemical polishing solution.
Background
In semiconductor processing, electrochemical polishing is an important process for polishing a material layer such as metal on the surface of a wafer to obtain a flat surface. During the electrochemical polishing process, metal ions such as copper in the metal layer will dissolve in the polishing solution during the polishing process. If the free copper ions in the polishing solution are not recycled, the polishing solution cannot be reused, so that the production cost is raised, and the surrounding environment is polluted.
Currently, for polishing solutions containing metal ions after electrochemical polishing, the recovery of the metal ions is generally performed by an electrolytic process. In the electrolytic process, an electrode plate is introduced to supply direct current to the polishing solution, so that free metal ions in the polishing solution are converted into metal simple substances after getting electrons and are separated out from a cathode, and the metal ions are removed from the polishing solution and can be recycled.
However, in the conventional electrolytic recovery device, the metal simple substance is deposited on the electrode plate as the cathode, and the metal deposited and attached on the surface of the electrode plate is extremely difficult to clean, which seriously affects the operation efficiency of the electrolytic recovery device, and the metal layer attached on the electrode plate has the risk of peeling off and polluting the polishing solution and the surrounding working environment.
Therefore, there is a need for a new electrochemical polishing solution recycling apparatus and method to solve the above-mentioned problems.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide an apparatus and a method for recovering an electrochemical polishing solution, which are used to solve the problem in the prior art that it is difficult to clean and recover a metal after a simple substance is precipitated.
In order to achieve the above objects and other related objects, the present invention provides an electrochemical polishing solution recycling apparatus, comprising:
the electrolytic tank is provided with an electrolytic tank opening above the electrolytic tank and is used for accommodating polishing solution for electrolysis;
an electrode plate assembly including an electrode plate; the electrode plate comprises a cathode plate and an anode plate, and the cathode plate and the anode plate are respectively connected with a direct current power supply; the electrode plate is immersed into the polishing solution in the electrolytic tank from the opening of the electrolytic tank in an electrolytic process; the cathode plate or the anode plate is used for depositing solid substances precipitated in the electrolytic process;
a scraper assembly comprising a scraper for scraping the solid matter from the cathode plate or the anode plate;
the driving assembly is used for driving the scraper to move relative to the cathode plate or the anode plate so as to enable the scraper to scrape the solid substance from the cathode plate or the anode plate;
a filter assembly including a net bag; the net bag surrounds and isolates the immersion area of the electrode plate in the electrolytic bath and is used for filtering the solid substances scraped by the scraper out of the electrolytic bath.
As an alternative of the present invention, the number of the cathode plates and the anode plates is plural, and the plural cathode plates and the plural anode plates are alternately arranged.
As an alternative of the invention, the pole plate assembly further comprises a top fixing structure and a bottom fixing structure; the cathode plate and the anode plate are vertically fixed between the top fixing structure and the bottom fixing structure which are arranged up and down; the driving assembly is connected with the top fixing structure and drives the cathode plate and the anode plate to move up and down relative to the opening of the electrolytic cell in the vertical direction through the top fixing structure; the scraper component also comprises a scraper seat used for installing the scraper, the scraper seat enables the scraper to be fixed relative to the electrolytic tank, and the blade side of the scraper clings to the surface of the cathode plate or the anode plate.
As an alternative of the present invention, a cathode terminal for connecting the cathode plate and the dc power supply and an anode terminal for connecting the anode plate and the dc power supply are disposed on the top fixing structure.
As an alternative of the invention, the filter assembly further comprises a string bag fixing piece, an inner pressing block and an outer pressing block; the net bag is made of flexible materials and is arranged around the side surfaces and the lower parts of the cathode plate and the anode plate in a pocket shape; the net bag fixing piece is used for fixing the opening part of the net bag at the opening of the electrolytic cell; the inner pressing block and the outer pressing block are fixed to the bottom of the net bag, the inner pressing block is located above the bottom of the net bag, the outer pressing block is located below the bottom of the net bag, and the inner pressing block and the outer pressing block penetrate through the connecting piece to be fixedly connected with each other.
As an alternative of the invention, a detachable suspension rod is arranged on the bottom fixing structure, and the inner pressing block is connected with the suspension rod through a lifting rope; the bottom of the net bag, the inner pressing block and the outer pressing block move up and down along with the cathode plate and the anode plate in the vertical direction through the lifting rope.
As an alternative of the present invention, when the cathode plate and the anode plate are in the extreme positions of moving upward, the bottom fixing structure is higher than the opening portion of the net bag, and the bottom of the net bag is not higher than the opening portion of the net bag; when the cathode plate and the anode plate are at the extreme positions moving downwards, the bottom fixing structure is lower than the opening part of the net bag, and the bottom of the net bag is lower than the opening part of the net bag.
As an alternative of the present invention, the electrochemical polishing solution recovery device further comprises a liquid storage tank, which is communicated with the electrolytic tank and is used for storing the polishing solution which is recovered in the electrolytic tank by electrolysis.
The invention also provides a method for recovering the electrochemical polishing solution, which is characterized by comprising the following steps:
providing an electrochemical polishing solution recovery device according to the invention;
polishing solution to be electrolyzed and recovered is led into the electrolytic bath, and the cathode plate and the anode plate are positioned at the limit positions moving downwards through the driving assembly;
electrifying the cathode plate and the anode plate through the direct current power supply to electrolyze the polishing solution, and depositing solid substances precipitated in the electrolytic process on the cathode plate or the anode plate;
after the electrolysis process is finished, the cathode plate and the anode plate move upwards through the driving assembly, the scraper scrapes the solid substances from the cathode plate or the anode plate, and the solid substances are filtered out by the net bag.
As an alternative of the present invention, after the cathode plate and the anode plate are moved upward to the extreme position, the method further comprises the steps of disassembling the filter assembly and recovering the solid substance.
As described above, the present invention provides an apparatus and a method for recycling electrochemical polishing solution, which have the following advantages:
the invention leads the metal precipitated and deposited on the electrode plate to be automatically scraped by the scraper and collected in the net bag when being taken out of the electrolytic bath after the electrolytic process is finished by introducing the driving component, the scraper component and the filtering component. The invention avoids the secondary pollution of the precipitated metal to the polishing solution, solves the problem of rapid recovery of the precipitated metal, and improves the operating efficiency of the electrochemical polishing solution recovery device.
Drawings
Fig. 1 is a perspective view illustrating a pole plate assembly provided in a first embodiment of the present invention.
Fig. 2 is an exploded view of a plate assembly according to an embodiment of the present invention.
Fig. 3 is a schematic view of a bottom fixing structure provided in the first embodiment of the invention.
Fig. 4 shows a perspective view of a filter assembly provided in a first embodiment of the invention.
Fig. 5 is a top view of a filter assembly provided in a first embodiment of the present invention.
Fig. 6 shows a lower side perspective view of a filter assembly provided in a first embodiment of the invention.
Fig. 7 is a side cross-sectional view of a filter assembly provided in a first embodiment of the invention.
Fig. 8 shows a perspective view of a doctor assembly and a cathode plate provided in a first embodiment of the invention.
Fig. 9 is a perspective view of an electrochemical polishing solution recovery apparatus provided in the first embodiment of the present invention, when an electrode plate is lowered.
Fig. 10 is a front cross-sectional view of an electrochemical polishing solution recycling apparatus provided in an embodiment of the present invention, when an electrode plate is lowered.
Fig. 11 is a perspective view of an electrochemical polishing solution recycling apparatus provided in the first embodiment of the present invention, when an electrode plate is lifted.
FIG. 12 is a front cross-sectional view of an electrochemical polishing solution recycling apparatus provided in the first embodiment of the present invention, when an electrode plate is lifted.
Description of the element reference numerals
101 electrolytic cell
102 liquid storage tank
2 polar plate assembly
201 cathode plate
202 anode plate
203 top fixing structure
203a cathode terminal
203b anode terminal
204 bottom fixing structure
204a suspension rod
204b fixed plug
3 scraper assembly
301 scraper
302 scraper seat
4 drive assembly
5 Filter assembly
501 Net bag
502 string bag fixing part
503 internal pressure block
503a lifting rope
504 external pressure block
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 12. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention in a schematic manner, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the layout form of the components may be more complicated.
Example one
Referring to fig. 1 to 12, the present embodiment provides an electrochemical polishing solution recycling apparatus, including:
an electrolytic bath 101, which is provided with an electrolytic bath opening above and is used for accommodating polishing solution for electrolysis;
an electrode plate assembly 2 including an electrode plate; the electrode plates comprise a cathode plate 201 and an anode plate 202, and the cathode plate 201 and the anode plate 202 are respectively connected to a direct current power supply; the electrode plate is immersed into the polishing solution in the electrolytic bath 101 from the electrolytic bath opening 101 during electrolysis; the cathode plate 201 or the anode plate 202 is used for depositing solid substances precipitated in the electrolytic process;
a scraper assembly 3 including a scraper 301 for scraping the solid substance from the cathode plate 201 or the anode plate 202;
the driving assembly 4 is used for driving the scraper 301 to move relative to the cathode plate 201 or the anode plate 202 so as to enable the scraper 301 to scrape the solid substance from the cathode plate 201 or the anode plate 202;
a filter assembly 5 comprising a net bag 501; the net bag 501 surrounds and isolates the immersion area of the electrode plate in the electrolytic bath 101, and is used for filtering the solid substances scraped by the scraper 301 out of the electrolytic bath 101.
Fig. 9 is a perspective view of the electrochemical polishing solution recycling apparatus provided in this embodiment, and fig. 10 is a front cross-sectional view thereof. As can be seen from FIGS. 9 and 10, in this embodiment, the electrolytic bath 101 is provided with an electrolytic bath opening above it, and the polishing liquid to be electrolytically recovered is accommodated in the electrolytic bath 101. The polar plate assembly 2 is arranged at an opening of the electrolytic bath 101. The driving assembly 4 is connected with the electrode plate assembly 2 and drives the electrode plate to enter and exit the electrolytic bath 101 from the opening of the electrolytic bath 101. The scraper assembly 3 is mounted adjacent to the pole plate assembly 2 and is fixed relative to the electrolytic cell 101. The filtering component 5 is arranged on the side surface and the lower part of the polar plate component 2. Optionally, as shown in fig. 10, the electrochemical polishing solution recycling device further includes a storage tank 102, which is communicated with the electrolytic tank 101, and is used for storing the polishing solution recycled by electrolysis in the electrolytic tank 101. The clean polishing solution after completing the electrolytic recycling process can flow from the electrolytic tank 101 into the liquid storage tank 102 through a communication pipeline not shown in fig. 10 for storage, and can be used as the polishing solution meeting the process standard for the subsequent electrochemical polishing process, thereby achieving the recycling of the polishing solution. For specific components in the components in fig. 9 to 12, please refer to the detailed schematic diagrams of the components in fig. 1 to 8.
Specifically, as shown in fig. 1, it is a perspective view of the pole plate assembly 2 provided in this embodiment, and fig. 2 is an exploded view thereof. As can be seen from fig. 1 and 2, in the present embodiment, the cathode plate 201 and the anode plate 202 are plural, and the plural cathode plates 201 and the anode plates 202 are alternately arranged. Two cathode plates 201 and three anode plates 202 are provided, and the two cathode plates 201 are clamped between the three anode plates 202, so that the cathode plates 201 and the anode plates 202 are alternately arranged. The pole plate assembly 2 further comprises a top fixing structure 203 and a bottom fixing structure 204. A plurality of the cathode plates 201 and the anode plates 202 are vertically fixed between the top fixing structure 203 and the bottom fixing structure 204 which are disposed up and down. The top fixing structure 203 is further provided with a cathode terminal 203a for connecting the cathode plate 201 with the dc power supply and an anode terminal 203b for connecting the anode plate 202 with the dc power supply. Alternatively, as shown in fig. 2, the bottom fixing structures 204 are fixing structures arranged in pairs, and are provided with clamping grooves for fixing electrode plates, and the clamping and fixing are performed from two sides of the cathode plate 201 and the anode plate 202. Fig. 3 is a schematic view of the bottom fixing structure 204 provided in this embodiment. As can be seen from fig. 3, the bottom fixing structure 204 is further provided with a detachable hanging rod 204a, the hanging rod 204a is clamped on the bottom fixing structure 204 through a fixing plug 204b, and when the fixing plug 204b is released, the hanging rod 204a can be detached from the bottom fixing structure 204.
Fig. 4 is a perspective view of the filter assembly 5 provided in the present embodiment, fig. 5 is a plan view thereof, fig. 6 is a perspective view of a lower side thereof, and fig. 7 is a side sectional view thereof. Fig. 4 is a view illustrating the mesh bag 501 transparently to show the components of the filter assembly 5. The net bag 501 in this embodiment is a flexible material that can pass through the polishing liquid and filter the solid substances from the polishing liquid. The net bag 501 is in a pocket shape and is arranged on the side surface and the lower part of the cathode plate 201 and the anode plate 202 of the pole plate assembly 2. As can also be seen from fig. 4 to 7, the filter assembly 5 includes a string bag holder 502, an inner press block 503 and an outer press block 504 in addition to the string bag 501. The net bag fixing piece 502 fixes the opening part of the net bag 501 at the opening of the electrolytic cell. Interior briquetting 503 with outer briquetting 504 is fixed in the bottom of string bag 501, interior briquetting 503 is located the top of string bag 501 bottom, outer briquetting 504 is located the below of string bag 501 bottom, interior briquetting 503 passes through connecting pieces such as set screw string bag 501 with outer briquetting 504 mutual fixed connection.
As an example, the inner pressing block 503 is connected to the suspension rod 204a by a suspension rope 503 a. Because the tuck net 501 is made of flexible materials, the bottom of the tuck net 501, the inner pressing block 503 and the outer pressing block 504 are driven by the lifting rope 503a and can move up and down in the vertical direction along with the cathode plate 201 and the anode plate 202. For the string bag 501 made of flexible material, the fixed positions of the string bag fixing member 502 around and the structural shapes and weights of the inner pressing block 503 and the outer pressing block 504 together enable the string bag 501 to be unfolded according to a determined shape and to be surrounded on the side surfaces and the lower parts of the cathode plate 201 and the anode plate 202 in a pocket shape, so as to ensure that the string bag fixing member does not touch the electrode plate or the side wall of the electrolytic cell 101 in the electrolytic process and during up-and-down movement.
Fig. 8 is a perspective view of the doctor assembly 3 and the cathode plate 201 provided in this embodiment. The doctor assembly 3 comprises the doctor blade 301 and a doctor blade holder 302 for mounting the doctor blade 301. The scraper holder 302 is mounted at an opening position of the electrolytic bath 101, so that the scraper 301 is fixed relative to the electrolytic bath 101, and the blade side of the scraper 301 is tightly attached to the surface of the cathode plate 201. Optionally, the scraper 301 is installed on the scraper seat 302 through a bolt and a long waist hole, and the attachment degree of the scraper 301 and the electrode plate can be flexibly adjusted through the arrangement of the long waist hole. When the driving assembly 4 is connected with the top fixing structure 203 and drives the cathode plate 201 and the anode plate 202 to move up and down in the vertical direction relative to the opening of the electrolytic cell through the top fixing structure 203, the scraper 301 which is closely attached to the cathode plate 201 can scrape the solid substances deposited on the surface of the cathode plate 201.
It should be noted that, in the case of metal ions such as copper, when the ions are electrolyzed in the polishing solution, the obtained electrons are converted into a simple metal substance and are precipitated. Therefore, the solid substances obtained by the electrolysis of metal ions such as copper are precipitated and deposited on the cathode plate 201. In this embodiment, the scrapers 301 fixed in pairs are provided to scrape and recover the solid materials on the front and back surfaces of the cathode plate 201 from both sides. In other embodiments of the present invention, the solid material that precipitates upon losing electrons during electrolysis is precipitated and deposited on the anode plate 202. At this time, the scraper 301 should scrape and recover the solid substance on the surface of the anode plate 202. Alternatively, the structure of the electrochemical polishing solution recovery device provided by the invention can be kept unchanged, and the cathode plate 201 is equivalently converted into an anode plate for use by exchanging the connection relationship between a direct current power supply and the cathode terminal 203a and the anode terminal 203b, so that the scraper 301 can scrape the solid substances deposited on the surface of the scraper.
As an example, as shown in fig. 9 and 10, when the cathode plate 201 and the anode plate 202 are at the extreme position of moving downward, the bottom fixing structure 204 is higher than the opening portion of the string bag 501, and the bottom of the string bag 501 is lower than the opening portion of the string bag 501. As shown in fig. 11 and 12, when the cathode plate 201 and the anode plate 202 are at the extreme positions of moving upward, the bottom fixing structure 204 is higher than the opening portion of the net bag 501, and the bottom of the net bag 501 is not higher than the opening portion of the net bag 501. For specific components in the components in fig. 9 to 12, please refer to the detailed schematic diagrams of the components in fig. 1 to 8.
Optionally, the driving assembly 4 includes a screw transmission structure, and the movable end of the screw transmission structure is connected to the top fixing structure 203 and moves up and down along with the rotation of the screw. The lead screw can be driven by a motor or can be rotated by manpower through a transmission mechanism connected with the lead screw.
Example two
Referring to fig. 1 to 12, the present embodiment provides a method for recycling an electrochemical polishing solution, including the following steps:
1) providing an electrochemical polishing solution recovery apparatus as described in example one;
2) a polishing solution to be electrolyzed and recovered is introduced into the electrolytic bath 101, and the cathode plate 201 and the anode plate 202 are positioned at the limit positions moving downwards through the driving assembly 4;
3) electrifying the cathode plate 201 and the anode plate 202 through the direct current power supply to electrolyze the polishing solution, and depositing solid substances precipitated in the electrolytic process on the cathode plate 201 or the anode plate 202;
4) after the electrolysis process is completed, the cathode plate 201 and the anode plate 202 are moved upward by the driving assembly 4, the scraper 301 scrapes the solid substance from the cathode plate 201 or the anode plate 202, and the solid substance is filtered out by the net bag 501.
In step 1), referring to fig. 9 to 12, an electrochemical polishing solution recycling apparatus according to a first embodiment is provided. Wherein, the situation when the cathode plate 201 and the anode plate 202 are at the extreme position of downward movement is shown in fig. 9 and 10; shown in fig. 11 and 12 are the cathode plate 201 and the anode plate 202 in extreme positions of upward movement. For specific components in the components in fig. 9 to 12, please refer to the detailed schematic diagrams of the components in fig. 1 to 8.
In step 2), referring to fig. 9 and 10, polishing solution to be recycled by electrolysis is introduced into the electrolytic bath 101, and the cathode plate 201 and the anode plate 202 are in the limit position of moving downward by the driving assembly 4. At this time, most of the cathode plate 201 and the anode plate 202 are immersed in the polishing liquid contained in the electrolytic bath 101.
In step 3), referring to fig. 9 and 10, the direct current power supply is used to supply electricity to the cathode plate 201 and the anode plate 202 to electrolyze the polishing solution, and solid substances precipitated in the electrolytic process are deposited on the cathode plate 201 or the anode plate 202. Specifically, in this embodiment, a polishing solution containing metal copper ions is electrolyzed, and a copper simple substance separated by electrolysis is deposited on the cathode plate 201.
In step 4), referring to fig. 11 and 12, after the electrolysis process is completed, the cathode plate 201 and the anode plate 202 are moved upward by the driving assembly 4, and the scraper 301 scrapes the solid material from the cathode plate 201 or the anode plate 202. The bottom of the net bag 501, the inner pressing block 503 and the outer pressing block 504 are driven by the lifting rope 503a to move upward together with the cathode plate 201 and the anode plate 202. The solid matter is filtered out by the net bag 501 and is carried out of the electrolytic cell 101 as the net bag 501 rises.
Illustratively, after the cathode plate 201 and the anode plate 202 are moved upward to the extreme positions, the method further includes the steps of disassembling the filter assembly 5 and recovering the solid substance. By releasing the fixing plugs 204b, the hanging rods 204a can be detached from the bottom fixing structure 204, and by detaching the string bag fixing members 502, the filter assembly 5 can be detached from the electrolytic bath 101. After the inner pressing block 503 and the outer pressing block 504 are disassembled, the net bag 501 is cleaned or replaced, and the filtered solid substances are removed, so that the electrochemical polishing solution can be used in the next electrochemical polishing solution recovery process.
In summary, the present invention provides an electrochemical polishing solution recycling apparatus and method, wherein the electrochemical polishing solution recycling apparatus comprises: the electrolytic tank is provided with an electrolytic tank opening above the electrolytic tank and is used for accommodating polishing solution for electrolysis; an electrode plate assembly including an electrode plate; the electrode plate comprises a cathode plate and an anode plate, and the cathode plate and the anode plate are respectively connected with a direct current power supply; the electrode plate is immersed into the polishing solution in the electrolytic tank from the opening of the electrolytic tank in an electrolytic process; the cathode plate or the anode plate is used for depositing solid substances precipitated in the electrolytic process; a scraper assembly comprising a scraper for scraping the solid matter from the cathode plate or the anode plate; the driving assembly is used for driving the scraper to move relative to the cathode plate or the anode plate so as to enable the scraper to scrape the solid substance from the cathode plate or the anode plate; a filter assembly including a net bag; the net bag surrounds and isolates the immersion area of the electrode plate in the electrolytic bath and is used for filtering the solid substances scraped by the scraper out of the electrolytic bath. The invention leads the metal precipitated and deposited on the electrode plate to be automatically scraped by the scraper and collected in the net bag when being taken out of the electrolytic bath after the electrolytic process is finished by introducing the driving component, the scraper component and the filtering component. The invention avoids the secondary pollution of the precipitated metal to the polishing solution, solves the problem of rapid recovery of the precipitated metal, and improves the operating efficiency of the electrochemical polishing solution recovery device.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. An electrochemical polishing solution recovery device, comprising:
the electrolytic tank is provided with an electrolytic tank opening above the electrolytic tank and is used for accommodating polishing solution for electrolysis;
an electrode plate assembly including an electrode plate; the electrode plate comprises a cathode plate and an anode plate, and the cathode plate and the anode plate are respectively connected with a direct current power supply; the electrode plate is immersed into the polishing solution in the electrolytic tank from the opening of the electrolytic tank in an electrolytic process; the cathode plate or the anode plate is used for depositing solid substances precipitated in the electrolytic process;
a scraper assembly comprising a scraper for scraping the solid matter from the cathode plate or the anode plate;
the driving assembly is used for driving the scraper to move relative to the cathode plate or the anode plate so as to enable the scraper to scrape the solid substance from the cathode plate or the anode plate;
a filter assembly including a net bag; the net bag surrounds and isolates the immersion area of the electrode plate in the electrolytic bath and is used for filtering the solid substances scraped by the scraper out of the electrolytic bath.
2. The electrochemical polishing solution recycling device of claim 1, wherein the number of the cathode plates and the anode plates is plural, and the plural cathode plates and the plural anode plates are alternately arranged.
3. The electrochemical polishing solution recovery apparatus of claim 1, wherein the plate assembly further comprises a top securing structure and a bottom securing structure; the cathode plate and the anode plate are vertically fixed between the top fixing structure and the bottom fixing structure which are arranged up and down; the driving assembly is connected with the top fixing structure and drives the cathode plate and the anode plate to move up and down relative to the opening of the electrolytic cell in the vertical direction through the top fixing structure; the scraper component also comprises a scraper seat used for installing the scraper, the scraper seat enables the scraper to be fixed relative to the electrolytic tank, and the blade side of the scraper clings to the surface of the cathode plate or the anode plate.
4. The electrochemical polishing solution recycling device according to claim 3, wherein the top fixing structure is provided with a cathode terminal for connecting the cathode plate and the DC power supply and an anode terminal for connecting the anode plate and the DC power supply.
5. The electrochemical polishing solution recovery device according to claim 3, wherein the filter assembly further comprises a string bag fixing member, an inner pressing block and an outer pressing block; the net bag is made of flexible materials and is arranged around the side surfaces and the lower parts of the cathode plate and the anode plate in a pocket shape; the net bag fixing piece is used for fixing the opening part of the net bag at the opening of the electrolytic cell; the inner pressing block and the outer pressing block are fixed to the bottom of the net bag, the inner pressing block is located above the bottom of the net bag, the outer pressing block is located below the bottom of the net bag, and the inner pressing block and the outer pressing block penetrate through the connecting piece to be fixedly connected with each other.
6. The electrochemical polishing solution recovery device according to claim 5, wherein the bottom fixing structure is provided with a detachable suspension rod, and the inner pressing block is connected with the suspension rod through a lifting rope; the bottom of the net bag, the inner pressing block and the outer pressing block move up and down along with the cathode plate and the anode plate in the vertical direction through the lifting rope.
7. The electrochemical polishing solution recovery device according to claim 6, wherein when the cathode plate and the anode plate are in the extreme positions of upward movement, the bottom fixing structure is higher than the opening portion of the net bag, and the bottom of the net bag is not higher than the opening portion of the net bag; when the cathode plate and the anode plate are at the extreme positions moving downwards, the bottom fixing structure is lower than the opening part of the net bag, and the bottom of the net bag is lower than the opening part of the net bag.
8. The electrochemical polishing solution recovery device of claim 1, further comprising a storage tank, connected to the electrolytic tank, for storing the polishing solution electrolytically recovered in the electrolytic tank.
9. The method for recovering the electrochemical polishing solution is characterized by comprising the following steps of:
providing an electrochemical polishing solution recovery apparatus according to any one of claims 1 to 8;
polishing solution to be electrolyzed and recovered is led into the electrolytic bath, and the cathode plate and the anode plate are positioned at the limit positions moving downwards through the driving assembly;
electrifying the cathode plate and the anode plate through the direct current power supply to electrolyze the polishing solution, and depositing solid substances precipitated in the electrolytic process on the cathode plate or the anode plate;
after the electrolysis process is finished, the cathode plate and the anode plate move upwards through the driving assembly, the scraper scrapes the solid substances from the cathode plate or the anode plate, and the solid substances are filtered out by the net bag.
10. The method for recycling electrochemical polishing solution according to claim 9, further comprising the step of disassembling the filter assembly and recycling the solid substance after the cathode plate and the anode plate are moved upward to the extreme positions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911410727.6A CN113122905A (en) | 2019-12-31 | 2019-12-31 | Electrochemical polishing solution recovery device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911410727.6A CN113122905A (en) | 2019-12-31 | 2019-12-31 | Electrochemical polishing solution recovery device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113122905A true CN113122905A (en) | 2021-07-16 |
Family
ID=76770300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911410727.6A Pending CN113122905A (en) | 2019-12-31 | 2019-12-31 | Electrochemical polishing solution recovery device and method |
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| Country | Link |
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| CN (1) | CN113122905A (en) |
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2019
- 2019-12-31 CN CN201911410727.6A patent/CN113122905A/en active Pending
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