CN113108891A - Swing sensor - Google Patents

Swing sensor Download PDF

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Publication number
CN113108891A
CN113108891A CN202110044785.2A CN202110044785A CN113108891A CN 113108891 A CN113108891 A CN 113108891A CN 202110044785 A CN202110044785 A CN 202110044785A CN 113108891 A CN113108891 A CN 113108891A
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China
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section
elastic beam
deformation
sensor
optical fiber
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CN202110044785.2A
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Chinese (zh)
Inventor
张建平
陈涛
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Feixun Sensor Technology Shanghai Co ltd
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Aulton New Energy Automotive Technology Co Ltd
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Publication of CN113108891A publication Critical patent/CN113108891A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The invention discloses a swing sensor, and belongs to the technical field of sensors. The swing sensor comprises a suspended elastic beam and an optical fiber, wherein the elastic beam comprises a deformation area, and the deformation area bends along with the swing of the elastic beam; the optical fiber comprises a deformation induction section, and the deformation induction section is fixed in a deformation area of the elastic beam; when the vibration is borne, the elastic beam swings in the vibration direction, so that the deformation induction section of the optical fiber is bent along with the deformation area, and further, an optical signal returned by the optical fiber is changed. The swing sensor detects vibration by using the deformation induction section of the optical fiber, has good stability, and can adapt to severe environments, such as electromagnetic, radiation, high temperature, strong corrosion and the like.

Description

Swing sensor
This application claims priority from chinese patent application 2020200658197 filed as 2020/1/13. The present application refers to the above-mentioned chinese patent application in its entirety.
Technical Field
The invention relates to the technical field of sensors, in particular to a swing sensor.
Background
The swing sensor is used for detecting vibration information of an object. The existing swing sensor converts a mechanical signal into an electrical signal and outputs the electrical signal, but the electrical signal is greatly influenced by the environment, for example, in an electromagnetic interference environment, an atomic radiation interference environment, a high-temperature environment and a strong corrosion environment, the operation of the swing sensor is unstable due to the fact that the electrical signal cannot be stably transmitted.
Disclosure of Invention
The present invention is directed to overcoming the above-mentioned drawbacks of the prior art and providing a swing sensor.
The invention solves the technical problems through the following technical scheme:
the present invention provides a swing sensor, comprising:
a suspended spring beam, said spring beam including a deformation region, said deformation region bending in response to oscillation of said spring beam; and a process for the preparation of a coating,
the optical fiber comprises a deformation induction section, and the deformation induction section is fixed in the deformation area of the elastic beam;
when the swing sensor moves, the elastic beam swings, so that the deformation sensing section of the optical fiber bends along with the deformation area, and further, an optical signal returned by the optical fiber changes.
Preferably, the swing sensor includes a housing having a cavity, the elastic beam is disposed in the cavity and fixedly connected to the housing, and when the swing sensor moves, the elastic beam swings in the cavity.
In this scheme, through setting up the casing, and protected elastic beam and deformation response section to a certain extent to further improved swing sensor's stability and life-span.
Preferably, the elastic beam includes a fixed section and a cantilever section, the fixed section is configured to be stationary relative to the housing, and the cantilever section is configured to swing relative to the housing when the swing sensor generates motion, wherein the deformation region is completely located in the cantilever section, or the deformation region is partially located in the cantilever section and partially located in the fixed section.
Preferably, the elastic beam is fixed to the housing through the fixing section, and the cantilever section is suspended in the cavity.
Preferably, be equipped with the bellied installation department of cavity side earlier on the inner wall of casing, the elastic beam the fixed segment rigid coupling in on the installation department.
Preferably, one end of the deformation sensing section is clamped between the fixing section and the mounting section, and the other end of the deformation sensing section is arranged on the cantilever section; alternatively, the first and second electrodes may be,
and the two end parts of the deformation induction section are arranged on the cantilever section.
Two end parts of the deformation induction section are arranged on the cantilever section and are close to the mounting part; or the elastic beam is an equal-strength beam.
The elastic beam is made of rigid materials.
Preferably, the deformation induction section is fixedly connected with the elastic beam at least at the positions of the two end parts.
Preferably, the optical fiber is connected with the elastic beam at multiple points along the length direction; or the like, or, alternatively,
the optical fiber is attached to the elastic beam in the length direction and is bonded with the elastic beam.
Preferably, the elastic beam is provided with an installation groove in a length direction thereof, and the optical fiber is disposed in the installation groove.
Preferably, the swing sensor further includes a swing sensing element, the swing sensing element is disposed at an end of the cantilever section of the elastic beam, and the swing sensing element is configured to amplify a swing amplitude of the elastic beam during a swing.
The swing sensor is used as a vibration sensor, when the swing sensor moves, the elastic beam swings, so that the deformation sensing section of the optical fiber bends along with the deformation area, and further, an optical signal returned by the optical fiber changes.
In some embodiments, a wobble sensor is used as a vibration sensor, the solution of which is as follows:
a vibration sensor, comprising:
a suspended spring beam, said spring beam including a deformation region, said deformation region bending in response to oscillation of said spring beam; and a process for the preparation of a coating,
the optical fiber comprises a deformation induction section, and the deformation induction section is fixed in the deformation area of the elastic beam;
when the optical fiber is subjected to vibration, the elastic beam swings in the vibration direction, so that the deformation induction section of the optical fiber is bent along with the deformation area, and further, an optical signal returned by the optical fiber is changed.
Preferably, the vibration sensor includes a housing having a cavity, the elastic beam is disposed in the cavity and fixedly connected to the housing, and the elastic beam swings in the cavity when receiving vibration.
In this scheme, through setting up the casing, and protected elastic beam and deformation response section to a certain extent to further improved vibration sensor's stability and life-span.
Preferably, the elastic beam includes a fixed section and a cantilever section, the fixed section is configured to be stationary relative to the housing, and the cantilever section is configured to swing relative to the housing when receiving vibration, wherein the deformation region is completely located in the cantilever section, or the deformation region is partially located in the cantilever section and partially located in the fixed section.
Preferably, the elastic beam is fixed to the housing through the fixing section, and the cantilever section is suspended in the cavity.
Preferably, be equipped with the bellied installation department of cavity side earlier on the inner wall of casing, the elastic beam the fixed segment rigid coupling in on the installation department.
Preferably, one end of the deformation sensing section is clamped between the fixing section and the mounting section, and the other end of the deformation sensing section is arranged on the cantilever section; alternatively, the first and second electrodes may be,
and the two end parts of the deformation induction section are arranged on the cantilever section.
Preferably, the deformation induction section is fixedly connected with the elastic beam at least at the positions of the two end parts.
Preferably, the optical fiber is connected with the elastic beam at multiple points along the length direction; or the like, or, alternatively,
the optical fiber is attached to the elastic beam in the length direction and is bonded with the elastic beam.
Preferably, the elastic beam is provided with an installation groove in a length direction thereof, and the optical fiber is disposed in the installation groove.
Preferably, the vibration sensor further includes a vibration sensing member, the vibration sensing member is disposed at an end of the cantilever section of the elastic beam, and the vibration sensing member is configured to amplify a swing amplitude of the elastic beam when the vibration sensing member is subjected to vibration.
On the basis of the common knowledge in the field, the above preferred conditions can be combined randomly to obtain the preferred embodiments of the invention.
The positive progress effects of the invention are as follows:
in the invention, the swing sensor detects vibration by using the deformation induction section of the optical fiber, has good stability, and can adapt to various severe environments, such as electromagnetic, radiation, high temperature, strong corrosion and the like.
Drawings
FIG. 1 is a schematic structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 4 is a schematic structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 5 is a schematic structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 6 is a first structural diagram of a wobble sensor according to an embodiment of the invention;
FIG. 7 is a second structural diagram of a swing sensor according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a third structure of a pendulum sensor according to an embodiment of the present invention;
FIG. 9 is a fourth structural diagram of a swing sensor according to an embodiment of the present invention;
fig. 10 is a fifth structural diagram of a swing sensor according to an embodiment of the invention.
Description of reference numerals:
elastic beam 1
Deformation zone 11
Fixed segment 12
Cantilever section 13
Optical fiber 2
Deformation sensing section 21
Case 3
Mounting part 4
Vibration sensor 5
Detailed Description
The present invention is further illustrated by the following examples, but is not limited thereby in the scope of the examples described below.
Referring to fig. 1, 5 and 6, an embodiment of the invention provides a swing sensor, including a suspended elastic beam 1 and an optical fiber 2, where the elastic beam 1 includes a deformation region 11, and the deformation region 11 bends with the swing of the elastic beam 1; the optical fiber 2 comprises a deformation induction section 21, and the deformation induction section 21 is fixed in the deformation area 11 of the elastic beam 1; when the swing sensor moves, the elastic beam 1 swings, so that the deformation sensing section 21 of the optical fiber 2 is bent along with the deformation area 11, and further, an optical signal returned by the optical fiber 2 changes.
Specifically, the elastic beam 1 is suspended in a space, for example, the elastic beam 1 is connected to the object to be measured and located in a space of the object to be measured, and for example, the elastic beam 1 is connected to a member and is located on the object to be measured together with the member when in use.
The elastic beam 1 is a flexible structure having a certain elasticity, such as an elastic rod or a carbon fiber plate. The elastic beam 1 may at least partially swing, for example, a suspended portion of the elastic beam 1 may swing due to an external force. The elastic beam 1 can swing due to vibration, for example, if the extending direction of the elastic beam 1 is not perpendicular to the propagation direction of the wave, the suspended part of the elastic beam 1 swings under the action of the wave.
The deformation area 11 is at least partially located on the portion of the elastic beam 1 that can swing, and when the elastic beam 1 swings, the deformation area 11 will bend.
The deformation sensing section 21 is a part of the optical fiber 2, and each part of the deformation sensing section 21 deforms when being bent, so that the reflected optical signal changes, that is, the optical signal returned by the optical fiber 2 changes. In addition, the deformation sensing section 21 is preferably a grating.
The swing sensor in the embodiment of the invention can be used for detecting the motion parameters of the object to be detected. During the use, directly or indirectly set up elastic beam 1 on the object that awaits measuring, preferably make the extending direction of elastic beam 1 and the vibration direction or the direction of motion of the object that awaits measuring perpendicular, then deformation induction section 21 can be because of the vibration of the object that awaits measuring or the effort that the motion produced to it and bending deformation to make the output signal of optic fibre 2 change, then the signal of accessible outside equipment to optic fibre 2 output carries out analysis and calculation, thereby obtains the motion parameter of the object that awaits measuring. The motion parameters in this embodiment include vibration/oscillation frequency, acceleration, and the like. Wherein, the vibration/swing frequency can be obtained by resolving the wavelength change according to the signal output by the optical fiber 2 and demodulating by adopting FFT (fast algorithm of discrete Fourier transform); the acceleration can be converted from the change value of the wavelength analyzed from the signal output from the optical fiber 2. As can be seen from the above, in the embodiment of the present invention, the deformation sensing section 21 of the optical fiber 2 is used to detect the vibration, and the detection is based on the sensitivity of the optical fiber 2 to light, so that the swing sensor has good stability and can stably work in the environments of electromagnetic, radiation, high temperature, strong corrosion, and the like.
In one embodiment, the resilient beam is an isostrength beam. In some embodiments, the flexible beam is a flexible beam 1 for detecting low frequency oscillations; in some other embodiments, the flexible beam is a rigid beam made of metal for detecting low and high frequency oscillations.
Referring to fig. 2-4 and fig. 7, in an embodiment of the present invention, the swing sensor further includes a housing 3 having a cavity, the elastic beam 1 is disposed in the cavity and fixedly connected to the housing 3, and the elastic beam 1 swings in the cavity when receiving vibration.
Specifically, the housing 3 provides an installation space and a carrier for installation for the elastic beam 1. The cavity may be open or closed. The spring beam 1 is at least partially suspended in the cavity.
In use, the housing 3 is placed or attached on an object to be measured, and the length direction of the elastic beam 1 (i.e. the extending direction thereof) is not perpendicular to the vibration direction of the object to be measured.
As can be seen from the above, in the embodiment of the present invention, the housing 3 is disposed, and the elastic beam 1 and the deformation sensing section 21 of the optical fiber 2 are disposed in the cavity of the housing 3, so that the elastic beam 1 and the deformation sensing section 21 are protected, and the service life of the swing sensor is further prolonged.
Referring to fig. 8-9, further, the elastic beam 1 includes a fixed section 12 and a cantilever section 13, the fixed section 12 is configured to be stationary relative to the housing 3, and the cantilever section 13 is configured to swing relative to the housing 3 when receiving vibration, wherein the deformation region 11 is completely located in the cantilever section 13, or the deformation region 11 is partially located in the cantilever section 13 and partially located in the fixed section 12.
Specifically, the fixed section 12 is stationary relative to the housing 3, which can be achieved by affixing the fixed section 12 to the housing 3. The cantilever section 13 is configured to be suspended in the cavity, and thus, the cantilever section 13 can swing due to vibration. The deformation-sensitive segment 21 located on the deformation region 11 may be located entirely on the cantilever segment 13, or a part of the deformation-sensitive segment may be located on the cantilever segment 13 and another part of the deformation-sensitive segment may be located on the fixed segment 12.
With reference to fig. 8-9, the elastic beam 1 is further fixed to the housing 3 by the fixing section 12, and the cantilever section 13 is suspended in the cavity. Be equipped with on the inner wall of casing 3 one cavity side bellied installation department 4, elastic beam 1 canned paragraph 12 rigid coupling in on the installation department 4.
Specifically, the fixing section 12 is fixed on the mounting portion 4 in a manner that, for example, a part of the outer surface of the fixing section 12 is directly adhered on the mounting portion 4, and for example, the mounting portion 4 is provided with a groove matching with the partial outer contour of the fixing section 12, and the fixing section 12 is adhered in the groove.
With reference to fig. 8-9, further, one end of the deformation sensing section 21 is sandwiched between the fixing section 12 and the mounting section 4, and the other end of the deformation sensing section 21 is disposed on the cantilever section 13; alternatively, both ends of the strain sensitive section 21 are disposed on the cantilever section 13.
Specifically, in the approach shown in fig. 8, one part of the deformation sensing section 21 is fixed between the fixing section 12 and the mounting section 4, and the other part is fixed on the cantilever section 13, so as to obtain a more significant amount of deformation, thereby more accurately detecting the vibration information of the object to be measured.
Alternatively, in the approach shown in fig. 9, the deformation sensing section 21 is disposed on the cantilever section 13 as a whole, and compared to the approach shown in fig. 8, when the same degree of vibration is applied, the degree of bending of the deformation sensing section 21 in the approach shown in fig. 9 is relatively small, so that the deformation sensing section 21 is less damaged by a single bending, and thus the deformation sensing section 21 in the approach shown in fig. 9 has a longer service life.
In one embodiment, both ends of the strain sensitive section 21 are disposed on the cantilever section 13 and close to the mounting portion 4.
In the embodiment of the present invention, the deformation sensing section 21 is fixedly connected to the elastic beam 1 at least at the two end portions, and the fixed connection is, for example, by soft glue, so that when the deformation sensing section 21 is subjected to vibration, the deformation sensing section 21 can stably bend along with the deformation area 11.
Further, the optical fiber 2 is connected with the elastic beam 1 at multiple points along the length direction; alternatively, the optical fiber 2 is attached to the elastic beam 1 in the longitudinal direction and bonded to the elastic beam 1.
Specifically, in one approach, the optical fiber 2 has a plurality of connection points with the elastic beam 1 in the length direction thereof, the connection points being disposed at intervals, and the optical fiber 2 is bonded to the elastic beam 1 at the connection points or fixed to the elastic beam 1 by an external member.
As an alternative means, a part of the surface of the optical fiber 2 is adhered to the elastic beam 1 in the length direction, and it is true that in this means, the stability of the optical fiber 2 and the elastic beam 1 can be enhanced by providing an installation groove recessed inward in the length direction of the elastic beam 1, and adhering the elastic beam 1 to the installation groove.
Referring to fig. 10, in the embodiment of the present invention, the swing sensor further includes a swing sensing element disposed at an end of the cantilever section 13 of the elastic beam 1, and the swing sensing element is configured to amplify a swing amplitude of the elastic beam 1 when receiving a vibration. Wherein, the swing response piece has certain quality, and the material is not restricted, and the shape is not restricted. As shown in fig. 10, in one embodiment, the oscillation sensing member employs a vibration sensing member 5.
One of the functions of the wobble sensor is to be used as a vibration sensor, which is explained below with reference to fig. 6 to 10 in terms of detecting vibration parameters of the object to be measured.
Referring to fig. 6, an embodiment of the invention provides a vibration sensor, including a suspended elastic beam 1 and an optical fiber 2, where the elastic beam 1 includes a deformation region 11, and the deformation region 11 bends with the swing of the elastic beam 1; the optical fiber 2 comprises a deformation induction section 21, and the deformation induction section 21 is fixed in the deformation area 11 of the elastic beam 1; when the vibration is received, the elastic beam 1 swings in the vibration direction, so that the deformation sensing section 21 of the optical fiber 2 is bent along with the deformation region 11, and further, the optical signal returned by the optical fiber 2 is changed.
Specifically, the elastic beam 1 is suspended in a space, for example, the elastic beam 1 is connected to the object to be measured and located in a space of the object to be measured, and for example, the elastic beam 1 is connected to a member and is located on the object to be measured together with the member when in use.
The elastic beam 1 is a flexible structure having a certain elasticity, such as an elastic rod or a carbon fiber plate. The elastic beam 1 may at least partially swing, for example, a suspended portion of the elastic beam 1 may swing due to an external force. The elastic beam 1 can oscillate due to vibrations, for example, if the extension direction of the elastic beam 1 is perpendicular to the propagation direction of the wave, the suspended portion of the elastic beam 1 oscillates due to the wave.
The deformation area 11 is at least partially located on the portion of the elastic beam 1 that can swing, and when the elastic beam 1 swings, the deformation area 11 will bend.
The deformation sensing section 21 is a part of the optical fiber 2, and each part of the deformation sensing section 21 deforms when being bent, so that the reflected optical signal changes, that is, the optical signal returned by the optical fiber 2 changes. In addition, the deformation sensing section 21 is preferably a grating.
During the use, directly or indirectly set up elastic beam 1 on the object that awaits measuring to make the extending direction of elastic beam 1 perpendicular with the vibration direction of the object that awaits measuring, then deformation induction section 21 is crooked because of the vibration and makes the output signal of optic fibre 2 change, then the signal of accessible outside equipment to optic fibre 2 output carries out analysis and calculation, thereby obtains the vibration parameter of the object that awaits measuring.
As can be seen from the above, in the embodiment of the present invention, the deformation sensing section 21 of the optical fiber 2 is used to detect the vibration, which is based on the sensitivity of the optical fiber 2 to light, so that the vibration sensor has good stability and can stably operate in the environments of electromagnetic, radiation, high temperature, strong corrosion, etc.
Referring to fig. 7, in an embodiment of the invention, the vibration sensor further includes a housing 3 having a cavity, the elastic beam 1 is disposed in the cavity and fixed to the housing 3, and the elastic beam 1 swings in the cavity when receiving vibration.
Specifically, the housing 3 provides an installation space and a carrier for installation for the elastic beam 1. The cavity may be open or closed. The spring beam 1 is at least partially suspended in the cavity.
In use, the housing 3 is placed or attached on an object to be measured, and the length direction of the elastic beam 1 (i.e. the extending direction thereof) is not perpendicular to the vibration direction of the object to be measured.
As can be seen from the above, in the embodiment of the present invention, the housing 3 is disposed, and the elastic beam 1 and the deformation sensing section 21 of the optical fiber 2 are disposed in the cavity of the housing 3, so that the elastic beam 1 and the deformation sensing section 21 are protected, and the service life of the vibration sensor is further prolonged.
Referring to fig. 8-9, further, the elastic beam 1 includes a fixed section 12 and a cantilever section 13, the fixed section 12 is configured to be stationary relative to the housing 3, and the cantilever section 13 is configured to swing relative to the housing 3 when receiving vibration, wherein the deformation region 11 is completely located in the cantilever section 13, or the deformation region 11 is partially located in the cantilever section 13 and partially located in the fixed section 12.
Specifically, the fixed section 12 is stationary relative to the housing 3, which can be achieved by affixing the fixed section 12 to the housing 3. The cantilever section 13 is configured to be suspended in the cavity, and thus, the cantilever section 13 can swing due to vibration. The deformation-sensitive segment 21 located on the deformation region 11 may be located entirely on the cantilever segment 13, or a part of the deformation-sensitive segment may be located on the cantilever segment 13 and another part of the deformation-sensitive segment may be located on the fixed segment 12.
With reference to fig. 8-9, the elastic beam 1 is further fixed to the housing 3 by the fixing section 12, and the cantilever section 13 is suspended in the cavity. Be equipped with on the inner wall of casing 3 one cavity side bellied installation department 4, elastic beam 1 canned paragraph 12 rigid coupling in on the installation department 4.
Specifically, the fixing section 12 is fixed on the mounting portion 4 in a manner that, for example, a part of the outer surface of the fixing section 12 is directly adhered on the mounting portion 4, and for example, the mounting portion 4 is provided with a groove matching with the partial outer contour of the fixing section 12, and the fixing section 12 is adhered in the groove.
With reference to fig. 8-9, further, one end of the deformation sensing section 21 is sandwiched between the fixing section 12 and the mounting section 4, and the other end of the deformation sensing section 21 is disposed on the cantilever section 13; alternatively, both ends of the strain sensitive section 21 are disposed on the cantilever section 13.
Specifically, in the approach shown in fig. 8, one part of the deformation sensing section 21 is fixed between the fixing section 12 and the mounting section 4, and the other part is fixed on the cantilever section 13, so as to obtain a more significant amount of deformation, thereby more accurately detecting the vibration information of the object to be measured.
Alternatively, in the approach shown in fig. 9, the deformation sensing section 21 is disposed on the cantilever section 13 as a whole, and compared to the approach shown in fig. 8, when the same degree of vibration is applied, the degree of bending of the deformation sensing section 21 in the approach shown in fig. 9 is relatively small, so that the deformation sensing section 21 is less damaged by a single bending, and thus the deformation sensing section 21 in the approach shown in fig. 9 has a longer service life.
In the embodiment of the present invention, the deformation sensing section 21 is fixedly connected to the elastic beam 1 at least at the two end portions, and the fixed connection is, for example, by soft glue, so that when the deformation sensing section 21 is subjected to vibration, the deformation sensing section 21 can stably bend along with the deformation area 11.
Further, the optical fiber 2 is connected with the elastic beam 1 at multiple points along the length direction; alternatively, the optical fiber 2 is attached to the elastic beam 1 in the longitudinal direction and bonded to the elastic beam 1.
Specifically, in one approach, the optical fiber 2 has a plurality of connection points with the elastic beam 1 in the length direction thereof, the connection points being disposed at intervals, and the optical fiber 2 is bonded to the elastic beam 1 at the connection points or fixed to the elastic beam 1 by an external member.
As an alternative means, a part of the surface of the optical fiber 2 is adhered to the elastic beam 1 in the length direction, and it is true that in this means, the stability of the optical fiber 2 and the elastic beam 1 can be enhanced by providing an installation groove recessed inward in the length direction of the elastic beam 1, and adhering the elastic beam 1 to the installation groove.
Referring to fig. 10, in the embodiment of the present invention, the vibration sensor further includes a vibration sensing element 5, the vibration sensing element 5 is disposed at an end of the cantilever section 13 of the elastic beam 1, and the vibration sensing element 5 is configured to amplify a swing amplitude of the elastic beam 1 when receiving vibration. Wherein, the vibration sensing piece has certain quality, and the material is unrestricted, and the shape is unrestricted.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.

Claims (13)

1. A wobble sensor, comprising:
a suspended spring beam, said spring beam including a deformation region, said deformation region bending in response to oscillation of said spring beam; and a process for the preparation of a coating,
the optical fiber comprises a deformation induction section, and the deformation induction section is fixed in the deformation area of the elastic beam;
when the swing sensor moves, the elastic beam swings, so that the deformation sensing section of the optical fiber bends along with the deformation area, and further, an optical signal returned by the optical fiber changes.
2. The oscillation sensor of claim 1 wherein the oscillation sensor includes a housing having a cavity, the beam being disposed within the cavity and secured to the housing, the beam oscillating within the cavity as the oscillation sensor moves.
3. The wobble sensor of claim 2, wherein the spring beam comprises a fixed section and a cantilever section, the fixed section is configured to be stationary relative to the housing, and the cantilever section is configured to wobble relative to the housing when the wobble sensor generates motion, wherein the deformation region is located entirely on the cantilever section, or the deformation region is located partially on the cantilever section and partially on the fixed section.
4. The oscillation sensor of claim 3 wherein the spring beam is secured to the housing by the fixed segment and suspends the cantilevered segment within the cavity.
5. The oscillation sensor of claim 4 wherein the inner wall of the housing has a mounting portion projecting toward the chamber, the fixed portion of the beam being fixedly attached to the mounting portion.
6. The oscillation sensor of claim 5 wherein one end portion of the strain sensitive section is interposed between the fixed section and the mounting portion, and the other end portion of the strain sensitive section is disposed on the cantilever section; alternatively, the first and second electrodes may be,
and the two end parts of the deformation induction section are arranged on the cantilever section.
7. The wobble sensor of claim 6, wherein both ends of the strain sensitive segment are disposed on the cantilever segment and proximate to the mounting portion; or the elastic beam is an equal-strength beam.
8. The oscillation sensor of claim 7 wherein the flexible beam is rigid.
9. The oscillation sensor of any one of claims 1 to 8 wherein the strain sensitive section is fixedly connected to the elastic beam at least at the positions of both end portions.
10. The oscillation sensor of claim 7 wherein,
the optical fiber is connected with the elastic beam at multiple points along the length direction; or the like, or, alternatively,
the optical fiber is attached to the elastic beam in the length direction and is bonded with the elastic beam.
11. The oscillation sensor of claim 7 wherein the elastic beam is provided with a mounting groove in a length direction thereof, the optical fiber being disposed in the mounting groove.
12. The oscillation sensor of any one of claims 1 to 8 further comprising an oscillation sensing member disposed at an end of the cantilever section of the elastic beam, the oscillation sensing member being configured to amplify an oscillation amplitude of the elastic beam during oscillation.
13. The vibration sensor according to any one of claims 1 to 8, wherein the vibration sensor is used as a vibration sensor, and when the vibration sensor is moved, the elastic beam is swung, so that the deformation sensing section of the optical fiber is bent together with the deformation region, thereby changing an optical signal returned from the optical fiber.
CN202110044785.2A 2020-01-13 2021-01-13 Swing sensor Pending CN113108891A (en)

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CN2020200658197 2020-01-13

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