CN113108610A - Cooling system for growth cavity of crystal growth furnace - Google Patents
Cooling system for growth cavity of crystal growth furnace Download PDFInfo
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- CN113108610A CN113108610A CN202110387846.5A CN202110387846A CN113108610A CN 113108610 A CN113108610 A CN 113108610A CN 202110387846 A CN202110387846 A CN 202110387846A CN 113108610 A CN113108610 A CN 113108610A
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- 238000001816 cooling Methods 0.000 title claims abstract description 170
- 239000013078 crystal Substances 0.000 title claims abstract description 97
- 239000002826 coolant Substances 0.000 claims abstract description 213
- 230000002159 abnormal effect Effects 0.000 claims abstract description 22
- 238000012544 monitoring process Methods 0.000 claims description 86
- 238000005086 pumping Methods 0.000 claims description 21
- 230000017525 heat dissipation Effects 0.000 claims description 13
- 239000012530 fluid Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000004891 communication Methods 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 6
- 238000003745 diagnosis Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000004200 deflagration Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/001—Cooling of furnaces the cooling medium being a fluid other than a gas
- F27D2009/0013—Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application discloses a cooling system for a growth cavity of a crystal growth furnace, which comprises a cooling pipe, wherein the cooling pipe comprises a cooling medium containing cavity, and a region surrounded by the cooling pipe is set as a growth cavity of a crystal; the cooling pipe is provided with a cooling medium inlet and a cooling medium outlet, the main cooling medium supply channel is communicated with the cooling medium inlet flow path, and the cooling medium outlet is communicated with the main cooling medium discharge channel flow path; the cooling system of the growth cavity of the crystal growth furnace also comprises an auxiliary cooling system and an electric control system, wherein a medium outlet of the auxiliary cooling system is communicated with a cooling medium inlet flow path, and a cooling medium outlet is communicated with a medium inlet flow path of the auxiliary cooling system; the auxiliary cooling system is controlled by the electronic control system, and when the medium flow of the main cooling medium supply channel and/or the main cooling medium discharge channel is abnormal, the auxiliary cooling system provides the cooling medium for the cooling medium accommodating cavity. The cooling system of the growth cavity of the crystal growth furnace has the advantages of being reliable in cooling, safe to use, convenient to maintain, high in automation degree and the like.
Description
Technical Field
The application belongs to the technical field of long crystal industry, and particularly relates to a cooling system for a growth cavity of a long crystal furnace.
Background
It is well known that crystals play an important role in production and life. And the crystals are often produced by long crystal furnaces. Silicon carbide is one of the important third-generation semiconductor materials, and is widely applied to the fields of power electronics, radio frequency devices, photoelectronic devices and the like due to the characteristics of large forbidden band width, high saturated electron mobility, high breakdown strength, high thermal conductivity and the like.
In the production process of silicon carbide, high-temperature heating is needed, particularly in the crystal growth process, the growth chamber of the furnace needs to be kept at a high heating temperature for a long time, meanwhile, the stability of the heating temperature is also high, and a cooling system needs to be arranged in both production and safety aspects. In the actual production process, a plurality of crystal growth furnaces are often arranged in a crystal growth workshop, share one cooling system to supply cooling media in a centralized manner, and when the cooling system has faults (such as medium channel blockage or cooling medium cutoff and the like), the normal work of the crystal growth furnaces is influenced, so that great troubles are brought to the actual production work, and even safety accidents can be caused because the faults cannot be timely discharged. Therefore, the improvement of the reliability of the cooling system of the crystal growth furnace has important significance for crystal growth production.
Most of crystal growth cavities of the existing crystal growth furnaces are designed by double-layer quartz tubes through water cooling, and an interlayer between the two layers of quartz tubes is a cooling medium flow channel. The crucible for crystal growth is positioned in a crystal growth cavity surrounded by the quartz tube at the inner side, the crucible is inductively heated by the inductance coil, and most of heat radiated by the crucible is taken away by the cooling medium in the quartz tube. However, in order to ensure the heating efficiency, the tube wall of the quartz tube is very thin and is easy to crack, so that the cooling fault is caused; if the crystal growth process cannot be monitored in real time, the crystal growth process is influenced, and even safety accidents are induced. In addition, the cooling system of the growth chamber of the crystal growth furnace is easy to cause the problems of cooling medium pipeline blockage and the like after being used for a period of time, so that the cooling medium of the quartz tube stops circulating, and under the radiation of high temperature, the cooling medium is easy to boil (even vaporize), so that the pressure in the quartz tube is increased, safety accidents such as deflagration, explosion and the like are easy to cause, and the equipment and the life safety are seriously threatened.
In addition, tiny cracks are easy to generate due to improper installation or operation or expansion caused by heat and contraction caused by cold, so that the leakage of a cooling medium is caused, a direct detection means does not exist in the prior art, and great hidden dangers are buried for the crystal growth production and the safe use of a crystal growth furnace. Based on the reasons, the applicant provides a novel cooling system for a growth cavity of a crystal growing furnace, which has the advantages of fault monitoring, reliable cooling, safe use and the like.
The above description is included in the technical recognition scope of the inventors, and does not necessarily constitute the prior art.
Disclosure of Invention
The invention provides a cooling system for a growth cavity of a crystal growth furnace, which aims to solve at least one technical problem.
The technical scheme adopted by the invention is as follows:
a cooling system for a growth cavity of a crystal growth furnace comprises a cooling pipe positioned in the crystal growth furnace, wherein the cooling pipe comprises a cooling medium cavity, and a region surrounded by the cooling pipe is set as a crystal growth cavity; the cooling pipe is provided with a cooling medium inlet and a cooling medium outlet, the main cooling medium supply channel is communicated with the cooling medium inlet flow path, and the cooling medium outlet is communicated with the main cooling medium discharge channel flow path;
the cooling system of the growth cavity of the crystal growth furnace further comprises an auxiliary cooling system and an electric control system, a medium outlet of the auxiliary cooling system is communicated with the cooling medium inlet flow path, and the cooling medium outlet is communicated with the medium inlet flow path of the auxiliary cooling system; the auxiliary cooling system is controlled by the electronic control system, and when the medium flow of the main cooling medium supply channel and/or the main cooling medium discharge channel is abnormal, the auxiliary cooling system provides cooling medium for the cooling medium cavity.
Preferably, the auxiliary cooling system comprises a pumping unit and a heat dissipation unit, a medium outlet of the heat dissipation unit is communicated with the cooling medium inlet flow path through the pumping unit, the cooling medium outlet is communicated with the medium inlet flow path of the heat dissipation unit, and the pumping unit is controlled by the electronic control system.
Preferably, a first pressure monitoring unit is arranged on the main cooling medium discharge passage, the first pressure monitoring unit is in signal connection with the electric control system, and when the pressure of the first pressure monitoring unit is greater than or less than a set value, the first pressure monitoring unit sends abnormal information to the electric control system, and the electric control system controls the auxiliary cooling system to start a cooling mode so as to provide cooling medium for the cooling medium accommodating cavity.
Preferably, a second pressure monitoring unit is arranged on the main cooling medium supply channel, the second pressure monitoring unit is in signal connection with the electric control system, and when the pressure of the second pressure monitoring unit is smaller than a set value, the second pressure monitoring unit sends abnormal information to the electric control system, and the electric control system controls the auxiliary cooling system to start the cooling mode.
Preferably, a first flow monitoring unit is arranged on the main cooling medium discharge channel, a second flow monitoring unit is arranged on the main cooling medium supply channel, the first flow monitoring unit and the second flow monitoring unit are both in signal connection with the electric control system, and when the difference value between the first flow monitoring unit and the second flow monitoring unit is larger than a set range, the electric control system sends a fault prompt signal.
Preferably, the cooling system of the growth cavity of the crystal growth furnace further comprises a pressure relief unit, the cooling medium outlet is communicated with the main cooling medium discharge channel through the pressure relief unit and the first one-way switch in sequence, and the cooling medium outlet is communicated with the medium inlet channel of the heat dissipation unit through the pressure relief unit and the second one-way switch in sequence.
Preferably, the cooling system of the growth cavity of the crystal growth furnace further comprises a cooling medium storage container, a cooling medium storage container and an electric control switch, the cooling medium storage container is positioned above the cooling pipe, the cooling medium storage container is positioned below the cooling medium storage container, a medium outlet of the cooling medium storage container is communicated with the cooling medium inlet flow path, the cooling medium outlet is communicated with the cooling medium storage container flow path, and the electric control switch is arranged on a fluid channel between the cooling medium outlet and the cooling medium storage container;
the electric control switch is controlled by the electric control system, when the electric control switch is in a power-off state, the cooling medium outlet and the cooling medium containing container are in a switch-on state, and when the electric control switch is in a power-on state, the cooling medium outlet and the cooling medium containing container are in a cut-off state.
In the structure including the pressure relief unit, it is further preferable that a pressure relief port of the pressure relief unit is provided to communicate with the cooling medium storage container.
Preferably, the cooling medium outlet is located at an upper portion of the cooling pipe, and the cooling medium inlet is located at a lower portion of the cooling pipe.
Preferably, the cooling system of the growth cavity of the crystal growth furnace further comprises an early warning unit; in specific operation, when the medium flows abnormally in the main cooling medium supply passage and the main cooling medium discharge passage, the early warning unit sends out early warning information; and/or when the pumping unit is abnormal, the early warning unit sends out early warning information.
Through the long brilliant stove growth chamber cooling system that this application provided can bring following beneficial effect:
1. according to the cooling system, the cooling system of the growth cavity of the crystal growth furnace comprises the auxiliary cooling system, the auxiliary cooling system is controlled by the electric control system, and when the flow of the medium of the main cooling medium feeding channel and/or the main cooling medium discharging channel is abnormal, the auxiliary cooling system provides the cooling medium for the cooling medium accommodating cavity, so that the cooling system of the growth cavity of the crystal growth furnace has the functions of main cooling and auxiliary cooling, the cooling reliability of the cooling system of the growth cavity of the crystal growth furnace is effectively improved, and the crystal growth furnace is safer to use; meanwhile, under the action of the electric control system, the automation degree of the cooling system can be effectively improved, and powerful temperature control guarantee is provided for the crystal growth quality of the crystal growth furnace to a certain degree.
2. According to the auxiliary cooling system, the first pressure monitoring unit is arranged on the main cooling medium discharge channel and is in signal connection with the electric control system, and when the pressure of the first pressure monitoring unit is larger than a set pressure value, the auxiliary cooling system can be started through the control system; meanwhile, a powerful clue is provided to the failure diagnosis, for example, a failure that may be caused by clogging of the piping when the pressure of the first pressure monitoring unit is greater than the set value. In addition, when the pressure of the first pressure monitoring unit is smaller than a set value, the auxiliary cooling system can be started through the control system, and meanwhile, a maintainer can pre-judge that the cooling medium is not supplied enough according to the information fed back by the first pressure monitoring unit. From this, this application is through setting up first pressure monitoring unit's effect not only can provide monitoring information to control system, ensures the cooling requirement in long brilliant stove growth chamber, has reduced the fault diagnosis and the maintenance degree of difficulty of long brilliant stove moreover effectively.
3. This application is through set up second pressure monitoring unit on the main cooling medium feeding channel, and pass through second pressure monitoring unit with electrical system signal connection, second pressure monitoring unit is right electrical system provides monitoring information, and in order to need, starts auxiliary cooling system. Therefore, the cooling of the growth cavity of the crystal growth furnace can be effectively guaranteed, and the fault diagnosis and maintenance difficulty of the crystal growth furnace can be effectively reduced. For example, when the pressure of the second pressure monitoring unit is less than a set value, it can be predicted that the cooling medium supplied from the main cooling medium supply passage may be insufficient.
4. According to the electronic control system fault prompting method, a first flow monitoring unit is arranged on a main cooling medium discharge channel, a second flow monitoring unit is arranged on a main cooling medium inlet channel, the first flow monitoring unit and the second flow monitoring unit are in signal connection with the electronic control system, and when the difference value of the first flow monitoring unit and the second flow monitoring unit is larger than a set range, the electronic control system fault prompting information is obtained; in this way, it is also possible to predict a possible leakage problem between the cooling medium inlet and the cooling medium outlet, and further predict a possibility of a breakage of the cooling pipe.
5. This application is through setting up the pressure release unit, works as when pressure in the cooling tube reaches the pressure release unit's set pressure, the pressure release unit is in the pressure release state, avoids the incident that the cooling medium holds the intracavity portion's too high pressure and causes, and then makes the use of long brilliant stove is safer.
6. This application is still through making long brilliant stove growth chamber cooling system includes coolant storage container, coolant receiver and electric control switch, makes it with the cooling tube forms the cooling water route, and further makes electric control switch is when the outage, the switch-on the cooling water route makes when its power supply the cooling water route is as reserve water route, and then leads to long brilliant stove growth chamber cooling system normal operating time owing to the outage at long brilliant in-process, can also provide coolant to long brilliant stove growth chamber.
7. The cooling system of the growth cavity of the crystal growth furnace further comprises an early warning unit, and when the medium flows in the main cooling medium supply channel and the main cooling medium discharge channel are abnormal, the early warning unit sends out early warning information; and/or when the pumping unit is abnormal, the early warning unit sends out early warning information; the crystal growth furnace is effectively monitored by reminding workers, and safety accidents can be effectively avoided.
8. This application can be convenient for carry out the periodic maintenance work to long brilliant stove through setting up relevant pressure monitoring unit andor flow monitoring unit to reduce the probability that cooling system breaks down in the long brilliant stove use.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a schematic view of a cooling system of a growth chamber of a crystal growth furnace according to an embodiment of the present application.
Wherein, 1 cooling pipe, 11 cooling medium cavities, 12 cooling medium inlets, 13 cooling medium outlets,
2 a growth chamber is arranged in the chamber,
3 a main cooling medium supply passage,
4 a main cooling medium discharge passage for discharging the cooling medium,
5 auxiliary cooling system, 51 pumping unit, 52 heat dissipation unit,
61 a first pressure monitoring unit, 62 a second pressure monitoring unit, 63 a first flow monitoring unit, 64 a second flow monitoring unit,
71 a pressure relief unit, 711 a pressure relief opening, 72 a first one-way switch, 73 a second one-way switch, 74 an electric control switch,
81 a cooling medium storage container, and 82 a cooling medium storage container.
Detailed Description
In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.
In the description of the present application, it is to be understood that the terms "central," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, references to the description of the terms "an aspect," "some aspects," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the aspect or example is included in at least one aspect or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same solution or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more aspects or examples.
In the present application, the number is included in a certain number or more, and two or more, for example.
For convenience of description, the terms "front", "rear", "left", "right", "upper" and "lower" are used in the following description to describe the orientation of the crystal growth furnace relative to the user.
A cooling system of a growth cavity of a crystal growth furnace is shown in figure 1 and comprises a cooling pipe 1 positioned in the crystal growth furnace, wherein the cooling pipe 1 comprises a cooling medium accommodating cavity 11, and a region surrounded by the cooling pipe 1 is set as a crystal growth cavity 2; a cooling medium inlet 12 and a cooling medium outlet 13 are arranged on the cooling pipe 1, the main cooling medium supply channel 3 is communicated with the cooling medium inlet 12 in a flow path, and the cooling medium outlet 13 is communicated with the main cooling medium discharge channel 4 in a flow path; the cooling system of the growth cavity of the crystal growth furnace further comprises an auxiliary cooling system 5 and an electric control system, wherein a medium outlet of the auxiliary cooling system 5 is communicated with a medium inlet 12 of the cooling medium inlet, and a cooling medium outlet 13 is communicated with a medium inlet of the auxiliary cooling system 5; the auxiliary cooling system 5 is controlled by the electronic control system, and when the flow of the medium in the main cooling medium supply passage 3 and/or the main cooling medium discharge passage 4 is abnormal, the auxiliary cooling system 5 supplies the cooling medium to the cooling medium accommodating chamber 11. It should be noted that, the cooling pipe 1 in the present application is not particularly limited, and in a specific implementation, it is preferable that the cooling pipe 1 includes a first side wall and a second side wall, the first side wall and the second side wall are nested, and the cooling medium cavity 11 is formed between the first side wall and the second side wall; in order to satisfy the requirement that the cooling tube 1 is adapted to the high-temperature working environment, the cooling tube 1 is preferably made of a double-layer quartz tube. In specific implementation, at least part of the region surrounded by the cooling tube 1 is set as a crystal growth cavity 2, when crystal growth is performed, the upper end and the lower end of the cooling tube 1 are respectively provided with a cover body, a crucible is further positioned in the growth cavity 2, and a heated region is heated at high temperature (the growth cavity 2 can be heated by an induction coil with set frequency) so as to perform a crystal growth process. In addition, the kind of crystal produced by the crystal growing furnace is not particularly limited, and the crystal growing furnace is preferably used for producing silicon carbide crystals. In addition, in practical application, the main cooling medium supply channel 3 and the main cooling medium discharge channel 4 may be connected to a plurality of crystal growth furnaces, so as to realize centralized supply of cooling medium to the plurality of crystal growth furnaces arranged in the crystal growth workshop. In addition, the cooling medium is not specifically limited, and any medium that satisfies cooling in the crystal growth production process may be selected, and it is further preferable that the cooling medium is water. In addition to the above description, it should be noted that, in the present application, the term "abnormal medium flow" includes any situation where normal cooling of the crystal growth furnace (especially, the growth chamber of the crystal growth furnace) cannot be performed, for example, the cooling medium supplied by the main cooling medium supply channel 3 does not meet the cooling requirement, specifically, the cooling medium is not supplied sufficiently. According to the cooling system, the cooling system of the growth cavity of the crystal growth furnace comprises the auxiliary cooling system 5, the auxiliary cooling system 5 is controlled by the electric control system, when the medium flow of the main cooling medium feeding channel 3 and/or the main cooling medium discharging channel 4 is abnormal, the auxiliary cooling system 5 provides cooling medium for the cooling medium accommodating cavity 11, so that the cooling system of the growth cavity of the crystal growth furnace has the functions of main cooling and auxiliary cooling, the cooling reliability of the cooling system of the growth cavity of the crystal growth furnace is effectively improved, and the crystal growth furnace is safer to use; meanwhile, a powerful temperature control guarantee is provided for the crystal growth quality of the crystal growth furnace to a certain extent. Moreover, this application auxiliary cooling system 5 is controlled by electric control system, does not need the manual work to implement the control, just can independently solve the cooling problem in long brilliant stove growth chamber.
As a preferred embodiment of the present application, in a specific implementation, it is further preferred that the auxiliary cooling system 5 includes a pumping unit 51 and a heat dissipation unit 52, a medium outlet of the heat dissipation unit 52 is in flow communication with the cooling medium inlet 12 through the pumping unit 51, the cooling medium outlet 13 is in flow communication with a medium inlet of the heat dissipation unit 52, and the pumping unit 51 is controlled by the electronic control system. In practical implementation, the pumping unit 51 is not particularly limited, and may be any fluid pump capable of pumping the cooling medium, and it is further preferable that the pumping unit 51 includes a driving motor, and the driving motor is associated with the electronic control system to achieve effective control of the auxiliary cooling system 5. In addition, the heat dissipating unit 52 is not particularly limited, and may be a heat sink that dissipates heat in a heat exchange manner or a heat sink that dissipates heat in an air cooling manner.
As a preferred embodiment in the foregoing embodiment, in a specific implementation, in this application, it may be further preferred that a first pressure monitoring unit 61 is disposed on the main cooling medium discharge passage 4, the first pressure monitoring unit 61 is in signal connection with the electronic control system, and when the pressure of the first pressure monitoring unit 61 is greater than or less than a set value, the first pressure monitoring unit 61 sends an abnormal message to the electronic control system, and the electronic control system controls the auxiliary cooling system 5 to start a cooling mode, so as to provide the cooling medium to the cooling medium accommodating cavity 11. According to the auxiliary cooling system, the first pressure monitoring unit 61 is arranged on the main cooling medium discharge channel 4, the first pressure monitoring unit 61 is in signal connection with the electric control system, and when the pressure of the first pressure monitoring unit 61 is larger than a set pressure value, the auxiliary cooling system 5 can be started through the control system; meanwhile, a powerful clue is provided to the failure diagnosis, for example, a failure may be caused by clogging of the piping when the pressure of the first pressure monitoring unit 61 is greater than the set value, so as to facilitate the removal of the failure. In addition, when the pressure of the first pressure monitoring unit 61 is smaller than the set value, the auxiliary cooling system 5 may be started through the control system, and meanwhile, the service personnel may also predict that there may be a problem of insufficient supply of the cooling medium according to the information fed back by the first pressure monitoring unit 61. From this, this application is through setting up first pressure monitoring unit 61's effect not only can provide monitoring information to control system, the cooling requirement of the crystal growth chamber of guarantee long brilliant stove has reduced the fault diagnosis and the maintenance degree of difficulty of long brilliant stove moreover effectively.
As a preferred example of the foregoing embodiment, all the foregoing embodiments, examples, alternative embodiments and alternative examples of the present application may further selectively provide a second pressure monitoring unit 62 on the main cooling medium supply passage 3, the second pressure monitoring unit 62 is in signal connection with the electronic control system, and when the pressure of the second pressure monitoring unit 62 is smaller than a set value, the second pressure monitoring unit 62 sends an abnormal message to the electronic control system, and the electronic control system controls the auxiliary cooling system 5 to start the cooling mode. This application is through set up second pressure monitoring unit 62 on main cooling medium supply channel 3, and through second pressure monitoring unit 62 with electrical system signal connection, second pressure monitoring unit 62 is right electrical system provides monitoring information, in order to need, starts auxiliary cooling system 5. Therefore, the cooling of the growth cavity of the crystal growth furnace can be effectively guaranteed, and the fault diagnosis and maintenance difficulty of the crystal growth furnace can be effectively reduced. For example, when the pressure of the second pressure monitoring unit 62 is less than a set value, it can be predicted that the cooling medium supplied from the main cooling medium supply passage 3 may be insufficient.
As a preferred example of the foregoing embodiment, all the foregoing embodiments, examples, alternative embodiments and alternative examples of the present application may further selectively provide that a first flow rate monitoring unit 63 is provided on the main cooling medium discharge passage 4, a second flow rate monitoring unit 64 is provided on the main cooling medium supply passage 3, both the first flow rate monitoring unit 63 and the second flow rate monitoring unit 64 are provided in signal connection with the electronic control system, and the electronic control system sends a fault notification message when a difference between the first flow rate monitoring unit 63 and the second flow rate monitoring unit 64 is greater than a set range. According to the method, a first flow monitoring unit 63 is arranged on a main cooling medium discharge channel 4, a second flow monitoring unit 64 is arranged on a main cooling medium inlet channel, the first flow monitoring unit 63 and the second flow monitoring unit 64 are in signal connection with an electric control system, and when the difference value between the first flow monitoring unit 63 and the second flow monitoring unit 64 is larger than a set range, the electric control system sends out fault prompt information; in this way, it is possible to predict the possibility of a leakage problem between the cooling medium inlet 12 and the cooling medium outlet 13, and further, to predict the possibility of a breakage of the cooling pipe 1.
As a preferable example of the foregoing embodiment, all of the foregoing embodiments, examples, alternative embodiments, alternative examples and alternative examples of the present application may further selectively allow the cooling system of the growth chamber of the crystal growth furnace to further include a pressure relief unit 71, the cooling medium outlet 13 is in flow communication with the main cooling medium discharge passage 4 through the pressure relief unit 71 and a first one-way switch 72 in this order, and the cooling medium outlet 13 is in flow communication with the medium inlet of the heat dissipation unit 52 through the pressure relief unit 71 and a second one-way switch 73 in this order. In specific implementation, the pressure relief unit 71 may be selectively set as a pressure relief valve, and in specific operation, the pressure relief unit 71 has a flow guiding function of the cooling medium, and when the pressure in the cooling medium accommodating cavity 11 is greater than a set pressure value, the pressure relief unit 71 performs a pressure relief function. In addition, in a specific implementation, the first one-way switch 72 and the second one-way switch 73 may be further selectively provided as one-way valves. This application is through setting up pressure release unit 71, work as when pressure in the cooling tube 1 reaches pressure release unit 71's set pressure, pressure release unit 71 is in the pressure release state, avoids the incident that the inside high pressure of coolant holding chamber 11 caused, and then makes the use of long brilliant stove is safer.
As a preferable feature of the present application, all of the aforementioned embodiments, examples, alternative embodiments, alternative examples and alternative examples of the present application may further selectively enable the cooling system of the growth chamber of the crystal growth furnace to further comprise a cooling medium storage container 81, a cooling medium storage container 82 and an electronic control switch 74, wherein the cooling medium storage container 81 is located above the cooling pipe 1, the cooling medium storage container 82 is located below the cooling medium storage container 81, a medium outlet of the cooling medium storage container 81 is in flow communication with the cooling medium inlet 12, a cooling medium outlet 13 is in flow communication with the cooling medium storage container 82, and the electronic control switch 74 is arranged on a fluid channel between the cooling medium outlet 13 and the cooling medium storage container 82; the electronic control switch 74 is controlled by the electronic control system, when the electronic control switch 74 is in a power-off state, the cooling medium outlet 13 and the cooling medium container 82 are in a power-on state, and when the electronic control switch 74 is in a power-on state, the cooling medium outlet 13 and the cooling medium container 82 are in a power-off state. In a specific embodiment, the pressure relief port 711 of the pressure relief unit 71 may be further selectively provided to communicate with the cooling medium storage container 81. This application is still through making long brilliant stove growth chamber cooling system includes coolant storage container 81, coolant receiver 82 and electric control switch 74, make it with cooling tube 1 forms the cooling water route, and further makes electric control switch 74 switches on when the outage the cooling water route makes when supplying power to it the cooling water route is as reserve water route, and then leads to long brilliant stove growth chamber cooling system normal operating time owing to the outage at long brilliant in-process, can also provide the cooling to long brilliant stove growth chamber. In addition, in the present application, by providing the cooling medium storage container 81 and the cooling medium storage container 82 and limiting the relative positions thereof, the growth chamber of the crystal growth furnace can be cooled by the action of gravity when the power is cut off in the crystal growth workshop.
As a preference of the foregoing embodiment, in order to achieve better cooling effect, in practical implementation, the present application may further selectively locate the cooling medium outlet 13 at an upper portion of the cooling pipe 1, and the cooling medium inlet 12 at a lower portion of the cooling pipe 1.
As a preference in the foregoing embodiment, the present application may further selectively enable the cooling system of the growth cavity of the crystal growth furnace to further include an early warning unit; when the medium flows of the main cooling medium supply passage 3 and the main cooling medium discharge passage 4 are abnormal, the early warning unit sends out early warning information; and/or, when the pumping unit 51 is abnormal, the early warning unit sends out early warning information. It should be noted that the abnormality of the pumping unit 51 includes that the pumping unit 51 cannot work normally, for example, the auxiliary cooling system 5 cannot work normally due to power failure of the driving motor of the pumping unit 51. The cooling system of the growth cavity of the crystal growth furnace further comprises an early warning unit, and when the medium flows of the main cooling medium supply channel 3 and the main cooling medium discharge channel 4 are abnormal, the early warning unit sends out early warning information; and/or, when the pumping unit 51 is abnormal, the early warning unit sends out early warning information; the crystal growth furnace monitoring system can remind workers of more effectively and more specifically monitoring the crystal growth furnace, and then safety accidents can be effectively avoided.
In the present application, it is noted that, in the implementation, necessary components may be provided at necessary positions according to actual needs, for example, in order to control the flow direction of the cooling medium and avoid the problems of backflow, a check valve may be provided in the relevant flow passage according to actual needs.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (10)
1. A cooling system of a growth cavity of a crystal growth furnace, which is characterized in that,
the cooling device comprises a cooling pipe positioned in a crystal growth furnace, wherein the cooling pipe comprises a cooling medium cavity, and a region surrounded by the cooling pipe is a crystal growth cavity; the cooling pipe is provided with a cooling medium inlet and a cooling medium outlet, the main cooling medium supply channel is communicated with the cooling medium inlet flow path, and the cooling medium outlet is communicated with the main cooling medium discharge channel flow path;
the cooling system of the growth cavity of the crystal growth furnace further comprises an auxiliary cooling system and an electric control system, a medium outlet of the auxiliary cooling system is communicated with the cooling medium inlet flow path, and the cooling medium outlet is communicated with the medium inlet flow path of the auxiliary cooling system; the auxiliary cooling system is controlled by the electronic control system, and when the medium flow of the main cooling medium supply channel and/or the main cooling medium discharge channel is abnormal, the auxiliary cooling system provides cooling medium for the cooling medium cavity.
2. The cooling system of the growth cavity of the crystal growth furnace according to claim 1,
the auxiliary cooling system comprises a pumping unit and a heat dissipation unit, a medium outlet of the heat dissipation unit is communicated with a cooling medium inlet flow path through the pumping unit, a cooling medium outlet is communicated with a medium inlet flow path of the heat dissipation unit, and the pumping unit is controlled by the electric control system.
3. The cooling system of the growth cavity of the crystal growth furnace according to claim 2,
the cooling system comprises a main cooling medium discharge channel, wherein a first pressure monitoring unit is arranged on the main cooling medium discharge channel and is in signal connection with an electric control system, and when the pressure of the first pressure monitoring unit is larger than or smaller than a set value, the first pressure monitoring unit sends abnormal information to the electric control system, so that the electric control system controls the auxiliary cooling system to start a cooling mode to provide cooling medium for the cooling medium accommodating cavity.
4. The cooling system of the growth cavity of the crystal growth furnace of claim 3,
and a second pressure monitoring unit is arranged on the main cooling medium supply channel and is in signal connection with the electric control system, and when the pressure of the second pressure monitoring unit is smaller than a set value, the second pressure monitoring unit sends abnormal information to the electric control system and enables the electric control system to control the auxiliary cooling system to start the cooling mode.
5. The cooling system of the growth cavity of the crystal growth furnace according to claim 2,
the main cooling medium discharge passage is provided with a first flow monitoring unit, the main cooling medium supply passage is provided with a second flow monitoring unit, the first flow monitoring unit and the second flow monitoring unit are in signal connection with the electric control system, and when the difference value between the first flow monitoring unit and the second flow monitoring unit is larger than a set range, the electric control system sends a fault prompt signal.
6. The cooling system of the growth cavity of the crystal growth furnace according to claim 2,
the cooling system for the growth cavity of the crystal growth furnace further comprises a pressure relief unit, wherein the cooling medium outlet sequentially passes through the pressure relief unit and the first one-way switch and is communicated with the main cooling medium discharge channel flow path, and the cooling medium outlet sequentially passes through the pressure relief unit and the second one-way switch and is communicated with the medium inlet flow path of the heat dissipation unit.
7. The crystal growth furnace growth cavity cooling system of any one of claims 1 to 6,
the cooling system for the growth cavity of the crystal growth furnace further comprises a cooling medium storage container, a cooling medium storage container and an electric control switch, wherein the cooling medium storage container is positioned above the cooling pipe, the cooling medium storage container is positioned below the cooling medium storage container, a medium outlet of the cooling medium storage container is communicated with the cooling medium inlet flow path, the cooling medium outlet is communicated with the cooling medium storage container flow path, and the electric control switch is arranged on a fluid channel between the cooling medium outlet and the cooling medium storage container;
the electric control switch is controlled by the electric control system, when the electric control switch is in a power-off state, the cooling medium outlet and the cooling medium containing container are in a switch-on state, and when the electric control switch is in a power-on state, the cooling medium outlet and the cooling medium containing container are in a cut-off state.
8. The cooling system of the growth cavity of the crystal growth furnace of claim 7,
in the structure comprising the pressure relief unit, a pressure relief opening of the pressure relief unit is communicated with the cooling medium storage container.
9. The crystal growth furnace growth cavity cooling system of any one of claims 1 to 6,
the cooling medium outlet is positioned at the upper part of the cooling pipe, and the cooling medium inlet is positioned at the lower part of the cooling pipe.
10. The crystal growth furnace growth cavity cooling system of any one of claims 2 to 6,
the cooling system of the growth cavity of the crystal growth furnace also comprises an early warning unit;
when the medium flows in the main cooling medium supply channel and the main cooling medium discharge channel are abnormal, the early warning unit sends out early warning information; and/or the presence of a gas in the gas,
when the pumping unit is abnormal, the early warning unit sends out early warning information.
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| CN202110387846.5A CN113108610A (en) | 2021-04-12 | 2021-04-12 | Cooling system for growth cavity of crystal growth furnace |
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| CN202110387846.5A CN113108610A (en) | 2021-04-12 | 2021-04-12 | Cooling system for growth cavity of crystal growth furnace |
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| TW201126035A (en) * | 2010-01-29 | 2011-08-01 | Toes Opto Mechatronics Co | Cooling system for crystal growth furnace |
| CN205482384U (en) * | 2016-01-30 | 2016-08-17 | 江苏永超磁性材料有限公司 | Stove top cooling system |
| CN111342615A (en) * | 2020-03-30 | 2020-06-26 | 中国科学院电工研究所 | Stator core liquid cooling system |
| CN111847868A (en) * | 2020-08-24 | 2020-10-30 | 四川和泰光纤有限公司 | Intermediate frequency furnace emergency cooling processing device and method based on power-off state |
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2021
- 2021-04-12 CN CN202110387846.5A patent/CN113108610A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201126035A (en) * | 2010-01-29 | 2011-08-01 | Toes Opto Mechatronics Co | Cooling system for crystal growth furnace |
| CN205482384U (en) * | 2016-01-30 | 2016-08-17 | 江苏永超磁性材料有限公司 | Stove top cooling system |
| CN111342615A (en) * | 2020-03-30 | 2020-06-26 | 中国科学院电工研究所 | Stator core liquid cooling system |
| CN111847868A (en) * | 2020-08-24 | 2020-10-30 | 四川和泰光纤有限公司 | Intermediate frequency furnace emergency cooling processing device and method based on power-off state |
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Application publication date: 20210713 |