CN113075128A - Probe mechanism and variable-temperature vacuum probe platform - Google Patents
Probe mechanism and variable-temperature vacuum probe platform Download PDFInfo
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- CN113075128A CN113075128A CN202110376402.1A CN202110376402A CN113075128A CN 113075128 A CN113075128 A CN 113075128A CN 202110376402 A CN202110376402 A CN 202110376402A CN 113075128 A CN113075128 A CN 113075128A
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- 238000010438 heat treatment Methods 0.000 claims description 36
- 238000001816 cooling Methods 0.000 claims description 13
- 230000007704 transition Effects 0.000 claims description 10
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 238000005057 refrigeration Methods 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
- 238000007789 sealing Methods 0.000 description 12
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- 235000017166 Bambusa arundinacea Nutrition 0.000 description 7
- 235000017491 Bambusa tulda Nutrition 0.000 description 7
- 241001330002 Bambuseae Species 0.000 description 7
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 7
- 239000011425 bamboo Substances 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
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- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
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- Physics & Mathematics (AREA)
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Abstract
The invention discloses a probe mechanism which comprises a probe assembly, wherein the probe assembly comprises a fixing part, a probe and a first elastic part, the probe is connected with the fixing part in a sliding manner along the self axial direction, and the first elastic part is connected with the fixing part and the probe and is used for providing elastic damping for the movement of the probe relative to the fixing part. The invention can effectively prevent the probe from scratching the sample to be detected.
Description
Technical Field
The invention relates to the technical field of material electrical property measurement, in particular to a probe mechanism and a temperature-variable vacuum probe platform.
Background
In the process of developing new materials, it is necessary to measure electrical performance parameters such as sheet resistance, resistivity, resistance temperature coefficient and the like of the new materials.
Four probe testers on the present market, when treating the material that detects through the probe and testing, the probe is close to the material that detects gradually, but because the mechanism rigid connection that probe and drive probe removed, if the atress continues to remove after the probe butt in the material that detects, can lead to ordering about the power that the probe removed direct action to the material that detects, the material that detects is detected in easy scratch, and the design is unreasonable.
Disclosure of Invention
In view of this, it is necessary to provide a probe mechanism and a variable temperature vacuum probe platform, which solve the technical problem that the probe easily scratches the material to be detected in the prior art.
In order to achieve the above technical object, a technical solution of the present invention provides a probe mechanism, including:
the probe assembly comprises a fixing part, a probe and a first elastic part, wherein the probe is connected to the fixing part in a sliding manner along the axial direction of the probe, and the first elastic part is connected to the fixing part and the probe and used for providing elastic damping for the movement of the probe relative to the fixing part.
Furthermore, the probe mechanism further comprises a three-dimensional moving assembly, wherein the three-dimensional moving assembly is connected to the fixing portion and used for driving the fixing portion, the probe and the first elastic portion to move along the three-dimensional direction.
Further, probe mechanism still includes coupling assembling, coupling assembling includes the connecting block, the connecting block connect in the three-dimensional subassembly that removes, the fixed part can dismantle connect in the connecting block.
The invention also relates to a temperature-variable vacuum probe platform which comprises a plurality of probe mechanisms
Further, but variable temperature vacuum probe platform still includes vacuum mechanism, sample supporting mechanism and heating refrigeration mechanism, vacuum mechanism includes a vacuum section of thick bamboo, be equipped with the vacuum cavity in the vacuum section of thick bamboo, sample supporting mechanism includes the sample brace table, place in the sample brace table in the vacuum cavity, it is a plurality of probe mechanism follows the circumference interval of vacuum section of thick bamboo sets up, heating refrigeration mechanism includes refrigeration subassembly and heating element, place in refrigeration subassembly's the refrigeration end the vacuum cavity is connected with the sample brace table for it is right sample on the sample brace table refrigerates, place in the heating element the vacuum cavity is used for right sample on the sample brace table heats.
Furthermore, the holding tank has been seted up to one side that sample supporting bench keeps away from the refrigeration end of refrigeration subassembly, heating element includes the heating wire, place in the heating wire the holding tank.
Further, the tip opening of a vacuum section of thick bamboo, vacuum mechanism still includes apron and light-passing board, the apron is relative the opening setting of a vacuum section of thick bamboo is connected in a vacuum section of thick bamboo, the observation hole has been seted up to the apron, the light-passing board is relative the observation hole sets up and can dismantle connect in the apron.
Further, but variable temperature vacuum probe platform still includes microscope mechanism, microscope mechanism includes the microscope, the microscope is relative the light-passing board sets up.
Further, a plurality of fixed orificess that the vacuum chamber is linked together are still seted up to the vacuum section of thick bamboo, probe mechanism with the fixed orifices one-to-one sets up, place in the probe in the vacuum chamber, coupling assembling still includes transition piece and connecting rod, the transition piece connect in the connecting block, the one end of connecting rod connect in the shoulder hole has been seted up along the axial in transition piece, the other end, the shoulder hole runs through connecting rod and its path section relative big footpath section are close to the connecting block runs through the connecting rod, the fixed part is the echelonment, but the path section slidable of fixed part inserts and locates the big footpath section of shoulder hole.
Further, the outer wall of the circumferential direction of the other end of the connecting rod is provided with at least one first limiting hole, the first limiting hole is communicated with the stepped hole, the fixing part is provided with a second limiting hole opposite to the first limiting hole, the connecting assembly further comprises a thimble, a second elastic part and a limiting part, the thimble is in a step shape, the small diameter section of the thimble can be inserted into the small diameter section of the stepped hole in a sliding manner, the large diameter section of the thimble can be arranged in the large diameter section of the stepped hole in a sliding manner, the second elastic part is arranged in the large diameter section of the stepped hole in a sliding manner, one end of the second elastic part is connected to the inner wall of the bottom of the large diameter section of the stepped hole, the other end of the second elastic part is connected to the large diameter section of the thimble for pushing the large diameter section of the thimble to abut against the small diameter section of the fixing part, and the limiting part is inserted into the first limiting, for limiting the sliding of the fixing portion relative to the connecting rod.
Compared with the prior art, the invention has the beneficial effects that: through setting up first elastic part, when the probe butt continues to remove after waiting to detect the sample, the relative fixed part of probe slides and extrudes first elastic part, avoids the direct rigid contact of probe to wait to detect the sample, avoids the probe fish tail to detect the sample, and when the probe separates with the sample that waits to detect, the probe resets under the effect of first elastic part.
Drawings
FIG. 1 is a schematic structural view of a variable temperature vacuum probe platform according to the present invention;
FIG. 2 is a schematic view of another aspect of the variable temperature vacuum probe stage according to the present invention;
FIG. 3 is a schematic structural view of the variable temperature vacuum probe platform according to the present invention after the microscope mechanism is hidden;
FIG. 4 is a schematic structural diagram of a vacuum mechanism, a microscope mechanism, a sample supporting mechanism, a probe mechanism and a heating and cooling mechanism in the variable temperature vacuum probe platform according to the present invention;
FIG. 5 is a schematic structural diagram of the vacuum mechanism, the microscope mechanism, the sample supporting mechanism, the probe mechanism and the heating and cooling mechanism of the variable temperature vacuum probe platform according to the present invention after the cover plate is hidden;
FIG. 6 is a schematic structural diagram of another view angle of the vacuum mechanism, the microscope mechanism, the sample supporting mechanism, the probe mechanism and the heating and cooling mechanism in the variable temperature vacuum probe platform according to the present invention;
FIG. 7 is a cross-sectional view taken along line A-A of FIG. 6;
FIG. 8 is an enlarged partial schematic view at B of FIG. 7;
FIG. 9 is an enlarged partial schematic view at C of FIG. 7;
FIG. 10 is a schematic structural diagram of a sample supporting mechanism, a thermal cooling mechanism and a sample to be tested in the variable temperature vacuum probe platform according to the present invention;
FIG. 11 is a schematic diagram of the structure of the three-dimensional moving assembly of the variable temperature vacuum probe stage according to the present invention;
FIG. 12 is a schematic view of another perspective of the three-dimensional moving assembly of the variable temperature vacuum probe stage according to the present invention;
FIG. 13 is a cross-sectional view taken along line D-D of FIG. 12;
FIG. 14 is an enlarged partial schematic view at E of FIG. 13;
FIG. 15 is a cross-sectional view of the connection portion, the fixing portion and the connection screw of the variable temperature vacuum probe stage according to the present invention;
fig. 16 is an exploded view of the sample support mechanism, heating element and sample in the variable temperature vacuum probe platform according to the present invention.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
The invention provides a temperature-variable vacuum probe platform, which comprises a fixing mechanism 1, a vacuum mechanism 2, a microscope mechanism 3, a sample supporting mechanism 4, a plurality of probe mechanisms 5 and a heating and refrigerating mechanism 6, wherein the fixing mechanism 1 comprises a first shell 11, a second shell 12 and two U-shaped supports 13, the first shell 11 is hollow and is provided with an opening at the top, the second shell 12 is hollow and is provided with an opening at the bottom, the top of the second shell 12 is provided with a first mounting hole, the opening end of the second shell 12 is arranged opposite to the opening end of the first shell 11 and is detachably connected with the first shell 11, the two U-shaped supports 13 are respectively arranged at two sides of the first shell 11 and are arranged in parallel, and two ends of each U-shaped support 13 are connected with the first shell 11.
The vacuum mechanism 2 includes a vacuum cylinder 21, the vacuum cylinder 21 is disposed in a cavity defined by the first housing 11 and the second housing 12, and a vacuum chamber is disposed in the vacuum cylinder 21.
In this embodiment, the circumferential outer wall of the vacuum cylinder 21 is provided with a communication hole, and the vacuum mechanism 2 further includes a pipe joint 22, and the pipe joint 22 is disposed opposite to the communication hole and connected to the vacuum cylinder 21.
In this embodiment, the vacuum cylinder 21 is hollow and has two open ends, one open end of the vacuum cylinder 21 is disposed opposite to the first mounting hole, the vacuum mechanism 2 further includes a cover plate 23 and a first sealing ring 24, the cover plate 23 is disposed above the second housing 12 and disposed opposite to the open end of the vacuum cylinder 21, the cover plate 23 is detachably connected to the vacuum cylinder 21 through a screw, and the first sealing ring 24 is disposed between the cover plate 23 and the vacuum cylinder 21 and abuts against the cover plate 23 and the vacuum cylinder 21, respectively.
In this embodiment, the cover plate 23 has an observation hole, the vacuum mechanism 2 further includes a transparent plate 25, and the transparent plate 25 is disposed opposite to the observation hole and detachably connected to the cover plate 23.
By arranging the observation hole, the distance between the probe 512 and the sample 7 to be measured can be observed conveniently, and observation is facilitated.
Wherein, the observation hole is the shoulder hole, the observation hole includes the first through-hole that the diameter reduces in proper order, second through-hole and third through-hole, first through-hole, the equal coaxial setting of second through-hole and third through-hole, vacuum mechanism 2 still includes solid fixed ring 26, second sealing washer 27, third sealing washer 28, place first through-hole in solid fixed ring 26 in and can dismantle the bottom inner wall in first through-hole through the screw, light-passing board 25 sets up between the bottom inner wall of solid fixed ring 26 and second through-hole, second sealing washer 27 sets up between solid fixed ring 26 and light-passing board 25 and respectively the butt in solid fixed ring 26 and light-passing board 25, third sealing washer 28 sets up between the bottom inner wall of solid fixed ring 26 and second through-hole and respectively the butt in the bottom inner wall of light-.
Through setting up solid fixed ring 26, first sealing washer 24 and second sealing washer 27, realized being connected dismantled of light-passing board 25 and apron 23 to realized sealed between light-passing board 25 and the apron 23, when the sample 7 that detects is perhaps put into to needs take out, pull down light-passing board 25, in the sample 7 observation hole that will detect is put into vacuum tube 21, realized detecting the sample 7 of detecting and has got and put.
The microscope mechanism 3 includes a microscope 31, and the microscope 31 is disposed opposite to the light-transmitting plate 25.
When the probe approaches to the sample 7 to be detected, the microscope 31 can be used to carefully observe the distance between the probe and the sample 7 to be detected, so as to further prevent the probe 512 from scratching the sample 7 to be detected.
In this embodiment, four second mounting holes are opened at the top of the second housing 12, the four second mounting holes are distributed in a matrix, the microscope mechanism 3 further includes a fixing frame 32, the bottom of the fixing frame 32 is provided with four fixing feet 33, the four fixing feet 33 and the four second mounting holes are arranged in a one-to-one correspondence manner, the fixing feet 33 can be slidably inserted into the corresponding second mounting holes, a third mounting hole is opened in the fixing frame 32 through a third through hole, one end of the microscope 31 passes through the third mounting hole, and the microscope 31 is detachably connected to the fixing frame 32 through a set screw.
Through setting up mount 32, realized the fixed of microscope 31 relative second casing 12, through set up four fixed feet 33 in the bottom at mount 32, when needs use microscope 31, set up microscope 31 in the top of second casing 12 together with mount 32, when putting the sample 7 that waits to detect, take off mount 32 and microscope 31 from second casing 12, can be convenient to microscope 31 installation or dismantlement.
The sample support mechanism 4 includes a sample support stage 41, and the sample support stage 41 is built in the vacuum chamber.
The material of the sample support platform 41 may be copper, aluminum, silver, or other heat conductive material.
As shown in fig. 3 to 5, a plurality of probe mechanisms 5 are arranged at intervals along the circumferential direction of the vacuum cylinder 21, each probe mechanism 5 includes a probe assembly 51 and a three-dimensional moving assembly 52, each probe assembly 51 includes a fixed portion 511, a probe 512 and a first elastic portion 513, each probe 512 is slidably connected to the fixed portion 511 along the axial direction thereof, each probe 512 is disposed in the vacuum chamber and arranged opposite to the sample 7 to be detected on the sample support table 41, and each first elastic portion 513 is connected to the fixed portion 511 and the probe 512 and is used for providing elastic damping for the movement of the probe 512 relative to the fixed portion 511.
The probe 512 may be made of copper, tungsten, or steel.
As shown in fig. 11 and 12, the three-dimensional moving assembly 52 is connected to the fixed portion 511 for driving the fixed portion 511, the probe 512 and the first elastic portion 513 to move in the three-dimensional direction.
In this embodiment, the probe mechanism 5 further includes a connection component 53, the connection component 53 includes a connection block 531, the connection block 531 is connected to the three-dimensional moving component 52, and the fixing portion 511 is detachably connected to the connection block 531.
As shown in fig. 13, 14, and 15, in this embodiment, a plurality of fixing holes communicated with the vacuum chamber are further formed in the circumferential outer wall of the vacuum cylinder 21, the probe mechanisms 5 are disposed in one-to-one correspondence with the fixing holes, the connection assembly 53 further includes a transition block 532 and a connection rod 533, the transition block 532 is connected to the connection block 531, one end of the connection rod 533 is connected to the transition block 532, a stepped hole is axially formed in the other end of the connection rod 533, the stepped hole penetrates through the connection rod 533, and the small-diameter section of the stepped hole is close to the connection block 531 and penetrates through the connection rod 533, the probe assembly 51 further includes a connection portion 515, the connection portion 515 is in a stepped shape, the small-diameter section of the connection portion 515.
In the present embodiment, the number of the fixing holes formed in the vacuum cylinder 21 may be three, four, five, etc., in which the number of the fixing holes formed in the vacuum cylinder 21 is four, the number of the corresponding probe mechanisms 5 is four, the four probe mechanisms 5 are equidistantly distributed along the circumferential direction of the vacuum cylinder 21, and the number of the fixing holes and the number of the probe mechanisms 5 are not limited thereto.
The connecting rod 533 penetrates through the fixing hole, the connecting assembly 53 further includes a first fixing block 534, a second fixing block 535, and a bellows 536, the connecting rod 533 and the transition block 532 are sleeved with the bellows 536, one end of the bellows 536 is connected to the connecting block 531 through the first fixing block 534, and the other end of the bellows 536 is connected to the vacuum cylinder 21 through the second fixing block 535.
Through the arrangement of the corrugated pipe 536 and the connecting block 531, the connecting rod 533 and the probe 512 are not hindered from moving, and meanwhile, the fixing hole of the vacuum cylinder 21 is sealed, so that air leakage at the fixing hole of the vacuum cylinder 21 is avoided.
In this embodiment, the circumferential outer wall of the other end of the connecting rod 533 is provided with at least one first limiting hole, the first limiting hole is communicated with the stepped hole, the connecting portion 515 is provided with a second limiting hole opposite to the first limiting hole, the connecting assembly 53 further includes a thimble 537, a second elastic portion 538 and a limiting portion 539, the thimble 537 is in a step shape, a small diameter section of the thimble 537 is slidably inserted into a small diameter section of the stepped hole, a large diameter section of the thimble 537 is slidably arranged in the large diameter section of the stepped hole, the second elastic portion 538 is arranged in the large diameter section of the stepped hole, one end of the second elastic portion 538 is connected to the bottom inner wall of the large diameter section of the stepped hole, and the other end of the second elastic portion is connected to the large diameter section of, the large-diameter section for pushing the thimble 537 abuts against the small-diameter section of the connecting portion 515, and the limiting portion 539 is inserted into the first limiting hole and the second limiting hole, and is used for limiting the sliding of the connecting portion 515 relative to the connecting rod 533.
The large-diameter section of the connecting portion 515 is provided with at least one countersunk hole along the axial direction of the connecting rod 533, the large-diameter section of the countersunk hole is close to the connecting rod 533 relative to the small-diameter section, the fixing portion 511 is provided with a threaded hole relative to the countersunk hole, the probe assembly 51 further comprises a connecting screw 516, and the threaded end of the connecting screw 516 can rotatably penetrate through the countersunk hole and is in threaded connection with the threaded hole.
By providing the connection portion 515 and the connection screw 516, the detachable connection of the connection portion 515 and the fixing portion 511 is achieved.
Wherein the connecting portion 515 and the fixing portion 511 are rotators, the connecting portion 515 is provided with a first through hole, the first through hole is arranged in a downward inclination manner along a direction close to the sample support platform 41, the first through hole comprises a fourth mounting hole and a fifth mounting hole which are communicated, the inner diameter of the fifth mounting hole is larger than that of the fourth mounting hole, the fifth mounting hole is far away from the connecting rod 533 relative to the fourth mounting hole, the fixing portion 511 is provided with a second through hole along the axial direction of the first through hole, the second through hole comprises a sixth mounting hole and a seventh mounting hole which are communicated, the diameter of the sixth mounting hole is larger than that of the seventh mounting hole, the sixth mounting hole is close to the connecting portion 515 relative to the seventh mounting hole, the sixth mounting hole and the fifth mounting hole are coaxially arranged, the diameter of the sixth mounting hole is equal to that of the fifth mounting hole, the probe 512 can slide through the fourth mounting hole, the fifth mounting hole, the sixth mounting hole and the seventh mounting hole, the ring body 514 and the probe 512 are arranged and can be arranged in the fifth mounting hole or the sixth mounting hole in a sliding mode, the outer diameter of the ring body 514 is larger than the inner diameters of the fourth mounting hole and the seventh mounting hole, the first elastic part 513 is a spring, the probe 512 is sleeved with the first elastic part 513, one end of the first elastic part abuts against the ring body 514, and the other end of the first elastic part abuts against the inner wall of the top of the fifth mounting hole.
The probe 512 is detachable from the fixing portion 511 by providing the fourth, fifth, sixth, and seventh mounting holes.
Through setting up first elastic part 513, when probe 512 butt continues to remove behind the object, probe 512 compresses first elastic part 513 through ring body 514, avoids the direct rigid contact object of probe 512, avoids probe 512 fish tail to wait to detect sample 7, through setting up the through-hole, can fix probe 512, through setting up fourth mounting hole, fifth mounting hole, sixth mounting hole, seventh mounting hole and ring body 514, can restrict probe 512 slidable distance.
In this embodiment, the number of the counter bores and the number of the connecting screws 516 may be one, two, three, or the like, and the number of the counter bores and the number of the connecting screws 516 are two, and the counter bores and the connecting screws 516 are disposed in a one-to-one correspondence, but the number of the counter bores and the connecting screws 516 is not limited thereto.
The second elastic portion 538 is a spring, and the second elastic portion 538 is sleeved on the small diameter section of the thimble 537.
The fixing portion 511 is axially fixed relative to the connecting rod 533 by arranging the first limiting hole and the second limiting hole, and the second elastic portion 538 pushes the large-diameter section of the thimble 537 to abut against the small-diameter section of the fixing portion 511 by arranging the thimble 537 and the second elastic portion 538, so that the fixing portion 511 can be prevented from rotating or shaking relative to the connecting rod 533.
Wherein, the quantity of the first spacing hole that connecting rod 533 seted up can be one, two, three etc., in this embodiment, the quantity of the first spacing hole that connecting rod 533 seted up is two, and two first spacing holes are parallel to each other and the interval sets up, and the quantity of corresponding spacing portion 539 is two, and spacing portion 539 is limiting screw, and spacing portion 539 and the setting of first spacing hole one-to-one, and the quantity of first spacing hole and spacing portion 539 is all not spacing here.
In the present embodiment, the three-dimensional moving element 52 is used for driving the fixed portion 511, the probe 512 and the first elastic portion 513 to move in three directions, i.e., a first direction X, a second direction Y and a third direction Z.
The three-dimensional moving assembly 52 may be a robot, a manipulator, a three-axis moving mechanism, and the like, and in the embodiment, the three-dimensional moving assembly 52 includes an X-axis moving assembly 521, a Y-axis moving assembly 522, and a Z-axis moving assembly 253. Any motion assembly adopts a screw rod mechanism and a guide rail sliding block mechanism, namely a rotating handle drives a screw rod, and the screw rod drives a screw rod nut and a sliding block to move along the guide of a guide rail. Specifically, the X-axis moving assembly 521 drives the Y-axis moving assembly 522 connected with the lead screw nut and the slider thereof to move in the first direction X, the Y-axis moving assembly 522 drives the Z-axis moving assembly 253 connected with the lead screw nut and the slider thereof to move in the second direction Y, and the Z-axis moving assembly 253 drives the connecting block 531 connected with the lead screw nut and the slider thereof to move in the third direction Z.
As shown in fig. 16, in the present embodiment, the temperature-variable vacuum probe platform further includes a heating and cooling mechanism 6, the heating and cooling mechanism 6 includes a cooling component 61 and a heating component 62, a cooling end of the cooling component 61 is disposed in the vacuum chamber and connected to the sample supporting platform 41 for cooling the sample on the sample supporting platform 41, and the heating component 62 is disposed in the vacuum chamber for heating the sample on the sample supporting platform 41.
The sample 7 to be detected can be selectively heated or cooled by arranging the refrigerating assembly 61 and the heating assembly 62.
In this embodiment, the fixing mechanism 1 further includes a fixing cylinder 14, the fixing cylinder 14 is disposed in the first housing 11, the fixing cylinder 14 is hollow and has two open ends, one end of the fixing cylinder 14 is connected to the other open end of the vacuum cylinder 21, the refrigerating component 61 is disposed in the first housing 11, the refrigerating component 61 is a thermo-acoustic refrigerator, a cold head of the thermo-acoustic refrigerator passes through the fixing cylinder 14 and is connected to the sample support platform 41, and a housing of the thermo-acoustic refrigerator is connected to the other open end of the fixing cylinder 14.
Through can be thermal acoustic refrigerator, liquid nitrogen pump and liquid helium pump etc. with refrigeration subassembly 61, in this embodiment, refrigeration subassembly 61 is thermal acoustic refrigerator, through setting up refrigeration subassembly 61 as thermal acoustic refrigerator, need not to give refrigeration subassembly 61 filling refrigerant, has reduced refrigeration subassembly 61's volume, can reduce the volume of probe platform equipment greatly.
The other end of the fixed cylinder 14 is connected with the other end of the vacuum cylinder 21 through a screw, a sealing ring is arranged at the joint of the fixed cylinder 14 and the vacuum cylinder 21, and the joint of the fixed cylinder 14 and the vacuum cylinder 21 is sealed through the sealing ring.
The shell of the thermoacoustic refrigerator is connected with the other end of the fixed cylinder 14 through a screw, a sealing ring is arranged at the joint of the thermoacoustic refrigerator and the fixed cylinder 14, and the joint of the thermoacoustic refrigerator and the fixed cylinder 14 is sealed through the sealing ring.
Wherein, the heating assembly 62 may be an infrared heating device, a silicon nitride heating plate, a PTC ceramic plate, a heating wire, etc.
In this embodiment, the sample supporting platform 41 has a holding groove on a side thereof away from the refrigerating end of the refrigerating element 61, the heating element 62 includes a heating wire 621, and the heating wire 621 is disposed in the holding groove.
As shown in fig. 6 to 10, the sample support mechanism 4 further includes a fixing stage 42, the fixing stage 42 is disposed at the bottom of the sample support stage 41 and connected to the sample support stage 41, a first fixing groove is formed by inwardly recessing a side of the fixing stage 42 away from the sample support stage 41, and the sample support mechanism 4 further includes a first insulating sheet 43, and the first insulating sheet 43 is disposed in the first fixing groove and connected to the cold head of the thermoacoustic refrigerator.
By arranging the first insulating sheet 43, the sample supporting table 41 and the cold head of the thermoacoustic refrigerator can be effectively insulated.
Wherein, sample supporting mechanism 4 still includes second insulating piece 44, silver electrode 45 and platinum electrode 46, and second insulating piece 44 sets up in sample supporting bench 41 and keeps away from one side of the refrigeration end of refrigeration subassembly 61 and connects in sample supporting bench 41, and the second fixed slot has been seted up to one side that sample supporting bench 41 was kept away from to second insulating piece 44 inwards, and the second fixed slot is inlayed and is located to the one end of silver electrode 45, and platinum electrode 46 is connected in the other end of silver electrode 45.
By arranging the second insulating sheet 44, the silver electrode 45, the platinum electrode 46 and the sample 7 to be measured can be effectively insulated.
The sample supporting mechanism 4 further includes a third insulating sheet 47, the third insulating sheet 47 has a circular hole corresponding to the platinum electrode 46, and the third insulating sheet 47 is sleeved on the platinum electrode 46 through the circular hole and connected to one side of the second insulating sheet 44 away from the sample supporting platform 41.
The specific working process of the invention is as follows: putting a sample 7 to be detected into a vacuum cylinder 21 from an opening end of the top of the vacuum cylinder 21, arranging the sample 7 to be detected on a platinum electrode 46, connecting a cover plate 23 to the opening end of the bottom of the vacuum cylinder 21 to seal the top of the vacuum cylinder 21, connecting a vacuum-pumping device to a pipe joint 22, vacuumizing the vacuum cylinder 21 under the action of the vacuum-pumping device, maintaining the inner cavity of the vacuum cylinder 21 in a negative pressure state, starting a refrigerating component 61 or a heating component 62, cooling or heating the sample to be detected through the refrigerating component 61 or the heating component 62, starting a three-dimensional moving component 52, and enabling a connecting component 53 and a probe component 51 to move along an X axis and/or a Y axis and/or a Z axis through the three-dimensional moving component 52 so that the probe component 51 approaches the sample 7 to be detected until the probe component 51 abuts against the sample 7 to be detected, the detection of the sample 7 to be detected is realized.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (10)
1. A probe mechanism, comprising:
the probe assembly comprises a fixing part, a probe and a first elastic part, wherein the probe is connected to the fixing part in a sliding manner along the axial direction of the probe, and the first elastic part is connected to the fixing part and the probe and used for providing elastic damping for the movement of the probe relative to the fixing part.
2. The probe mechanism according to claim 1, further comprising a three-dimensional moving member connected to the fixed portion for driving the fixed portion, the probe and the first elastic portion to move in three dimensions.
3. The probe mechanism of claim 2, further comprising a connecting assembly, wherein the connecting assembly comprises a connecting block, the connecting block is connected to the three-dimensional moving assembly, and the fixing portion is detachably connected to the connecting block.
4. A variable temperature vacuum probe platform comprising a plurality of probe mechanisms according to any one of claims 1 to 3.
5. The temperature-variable vacuum probe platform according to claim 4, further comprising a vacuum mechanism, a sample supporting mechanism and a heating and refrigerating mechanism, wherein the vacuum mechanism comprises a vacuum cylinder, a vacuum chamber is arranged in the vacuum cylinder, the sample supporting mechanism comprises a sample supporting table, the sample supporting table is arranged in the vacuum chamber, the plurality of probe mechanisms are arranged at intervals along the circumferential direction of the vacuum cylinder, the heating and refrigerating mechanism comprises a refrigerating component and a heating component, a refrigerating end of the refrigerating component is arranged in the vacuum chamber and connected to the sample supporting table for refrigerating the sample on the sample supporting table, and the heating component is arranged in the vacuum chamber for heating the sample on the sample supporting table.
6. The variable temperature vacuum probe platform of claim 5, wherein a receiving groove is formed on a side of the sample support platform away from the cooling end of the cooling assembly, and the heating assembly comprises a heating wire, and the heating wire is disposed in the receiving groove.
7. The variable temperature vacuum probe platform of claim 5, wherein the vacuum cylinder has an opening at an end thereof, the vacuum mechanism further comprises a cover plate and a transparent plate, the cover plate is disposed opposite to the opening of the vacuum cylinder and connected to the vacuum cylinder, the cover plate is provided with an observation hole, and the transparent plate is disposed opposite to the observation hole and detachably connected to the cover plate.
8. The variable temperature vacuum probe platform of claim 7, further comprising a microscope mechanism comprising a microscope disposed relative to the light-transmissive plate.
9. The variable temperature vacuum probe platform of claim 7, wherein the vacuum cylinder further defines a plurality of fixing holes communicating with the vacuum chamber, the probe mechanisms are disposed in one-to-one correspondence with the fixing holes, the probe is disposed in the vacuum chamber, the connecting assembly further includes a transition block and a connecting rod, the transition block is connected to the connecting block, one end of the connecting rod is connected to the transition block, the other end of the connecting rod defines a step hole along an axial direction, the step hole penetrates through the connecting rod, and a small diameter section of the connecting rod is close to the connecting block and penetrates through the connecting rod, the probe assembly further includes a connecting portion, the connecting portion is in a step shape, the small diameter section of the connecting portion is slidably inserted into the large diameter section of the step hole, and the fixing portion is detachably connected to the connecting portion.
10. The variable temperature vacuum probe platform of claim 9, wherein the connecting member further comprises a thimble, a second elastic portion and a limiting portion, the thimble is in a step shape, the small diameter section of the thimble is slidably inserted into the small diameter section of the stepped hole, the large diameter section of the thimble is slidably inserted into the large diameter section of the stepped hole, the second elastic portion is inserted into the large diameter section of the stepped hole, one end of the second elastic portion is connected to the inner wall of the bottom of the large diameter section of the stepped hole, the other end of the second elastic portion is connected to the large diameter section of the thimble, and the second elastic portion is used for pushing the large diameter section of the thimble to abut against the small diameter section of the small diameter connecting portion, the limiting part is inserted in the first limiting hole and the second limiting hole and used for limiting the sliding of the connecting part relative to the connecting rod.
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