CN113073296B

CN113073296B - Knocking device for vacuum coating by adopting magnetic fluid sealing treatment

Info

Publication number: CN113073296B
Application number: CN202110297842.8A
Authority: CN
Inventors: 张心凤; 夏正卫; 刘洋; 陈玉梅; 范洪跃
Original assignee: Anhui Chunyuan Plated Film Science & Technology Co ltd
Current assignee: Anhui Chunyuan Plated Film Science & Technology Co ltd
Priority date: 2021-03-19
Filing date: 2021-03-19
Publication date: 2023-01-20
Anticipated expiration: 2041-03-19
Also published as: CN113073296A

Abstract

The invention relates to a knocking device for vacuum coating by adopting magnetic fluid sealing treatment, which comprises a knocking rod, wherein one end of the knocking rod is provided with a knocking carbon head, the other end of the knocking rod is arranged at one end of a rotating rod, the knocking rod and the rotating rod are arranged in an included angle manner, the rotating rod is rotatably arranged, a magnetic fluid component is arranged on the rotating rod, and the rotating rod is connected with a rotation adjusting component for adjusting the rotating rod to rotate. In the above scheme, the traditional oil seal structure of the knocking device is replaced by the magnetic fluid seal structure, so that the problem of air leakage of the knocking rod part can be solved.

Description

Knocking device for vacuum coating by adopting magnetic fluid sealing treatment

Technical Field

The invention relates to the field of sputtering coating equipment, in particular to a knocking device for vacuum coating, which adopts magnetofluid sealing treatment.

Background

Pure Ion Coating (PIC) equipment is used as novel coating equipment, can be used for preparing high-performance diamond-like coating, pure metal and other composite films, and the prepared films have the advantages of high hardness, good wear resistance and corrosion resistance, and can be widely applied to a plurality of fields of military industry and civil use. PIC equipment strikes target arc striking through strikeing the carbon head and produces arc discharge, and the knocking device is through gear and seal assembly combined operation, and traditional knocking device generally uses two oil blanket, sealing washer to realize gas seal's function, and in the in-service use process, because the knocking device temperature often than higher, the condition of wearing and tearing often appears in the reciprocal friction of oil blanket under long-term high temperature, causes the knocking device gas leakage to make rete performance sharply decline or even whole stove product condemned condition.

Disclosure of Invention

The invention aims to provide a knocking device for vacuum coating by adopting magnetic fluid sealing treatment, which can overcome at least one defect.

The utility model provides an adopt magnetic fluid seal processing's knocking device that is used for vacuum coating which characterized in that: including knocking the pole, knocking the one end of pole and being equipped with and knocking the carbon head, knocking the other end assembly of pole in the one end of dwang, knocking pole and dwang are the contained angle form and arrange, and the dwang rotates the installation, is provided with the magnetic current body subassembly on the dwang, and the dwang is connected with adjusting it and carrying out pivoted rotation regulating assembly.

The further scheme is as follows: the magnetic fluid component is provided with a heat dissipation structure.

The heat dissipation structure is composed of heat dissipation pipelines arranged on the magnetic fluid assembly.

The magnetic fluid component comprises a magnetic fluid main body seat, the magnetic fluid main body seat is made of a magnetic conductive material, a cavity which penetrates through the magnetic fluid main body seat is arranged in the magnetic fluid main body seat, the magnetic fluid main body seat is sleeved on the rotating rod, a magnetic fluid is assembled in the cavity of the magnetic fluid main body seat, the rotating rod penetrates through the cavity of the magnetic fluid main body to be assembled when the rotating rod is assembled, the magnetic fluid is integrally attached to the cavity wall of the magnetic fluid main body and the circumferential surface of the rotating rod in an annular liquid state, and A, B sealing elements for realizing the sealing assembly between the magnetic fluid main body seat and the rotating rod are respectively arranged at the two ends of the magnetic fluid。

The heat dissipation pipeline is arranged on the magnetic fluid main body seat.

The length direction of the heat dissipation pipeline is consistent with that of the rotating shaft.

The detailed scheme is as follows:

the one end of dwang is rotated and is installed on the A support, the other end of dwang is installed on the B support, A, B assembles magnetic fluid component on the pole body of dwang between the support, the pole is struck in the dwang tip assembly in the A support outside, the side of the dwang in the B support outside is provided with the determine module that is used for detecting the dwang rotation state, determine module carries the signal that detects to regulate and control the subassembly and carries out analysis processes, the regulation and control subassembly rotates determine module's running state according to analysis processes's result regulation and control.

The tip of knocking the pole and keeping away from the dwang is provided with the pilot hole, the pilot hole is the through-hole, the part that knocks the carbon head extends to the outside of pilot hole one end and is used for knocking the carbon target, the other end of pilot hole is provided with and is used for leaning on the carbon head that knocks the carbon head and leans on the piece, the carbon head leans on the surface of piece and knocks the carbon head and laminate mutually and lean on.

The sensor piece is assembled on the rod body of the rotating rod outside the B support, the notch of the mark is formed in the sensor piece, the detection assembly is composed of a A, B sensor which is arranged on the periphery of the sensor piece and used for detecting the position of the notch, and the A, B sensor is assembled on the B support.

The rotation adjusting component comprises a gear A arranged on the rotating rod and a rotary cylinder arranged on the knocking mounting seat, a gear B is arranged on a power output rotating shaft of the rotary cylinder, the gear A, B is in transmission meshing connection, the control component comprises a PC end, a forward rotation controller and a reverse rotation controller, the PC end receives a signal detected by a A, B sensor for analysis and processing, the forward rotation controller and the reverse rotation controller adjust the power output rotating shaft of the rotary cylinder to perform forward rotation and reverse rotation through adjusting and controlling the ventilation state, and the PC end sends an instruction to adjust and control the ventilation state of the forward rotation controller and the reverse rotation controller.

The pole body of the dwang in the A support outside is provided with A screw thread pole section, and the tip of knocking the pole is provided with the screw thread mounting hole, knocks the pole and passes through the screw thread mounting hole assembly on A screw thread pole section, when knocking the carbon head and knocking the carbon target, the carbon target acts on the reaction force of knocking the carbon head and makes screw thread mounting hole and A screw thread pole section between have the trend of screwing up.

The A gear is assembled between the magnetic fluid assembly and the B support.

The scheme provided by the invention has the following advantages:

1. the traditional oil seal structure of the knocking device is replaced by a magnetic fluid seal structure, so that the problem of axial air leakage of the rotating rod at the part of the knocking rod can be thoroughly solved;

2. the knocking rod is replaced by a traditional combined structure into an integrated structure, the knocking rod cannot be blown by large current in the instant of target adhesion, and therefore coating can be effectively guaranteed to be continuously carried out.

Drawings

FIG. 1 is a schematic structural view of the knocking rod in a knocking return position in the present invention;

FIG. 2 is a schematic view of the knocking lever in a knocking position;

FIG. 3 is the assembly structure of the rotating rod and the magnetic fluid main body seat in the present invention;

FIG. 4 is a schematic view of the knocking lever;

FIG. 5 is a schematic view showing an assembled state of the knocking device;

FIG. 6 is a schematic view showing the assembly of the knocking lever device on the vacuum coating apparatus.

101-thread mounting hole, 111-knocking rod, 112-knocking carbon head, 113-carbon head abutting block, 121-rotating rod, 12a-A thread rod section, 12B-B thread rod section, 122-A gear, 123-A support, 124-B support, 125-A sensor, 126-B sensor, 127-sensing piece, 131-rotating cylinder, 132-forward controller, 133-reverse controller, 134-B gear, 135-mounting seat, 210-magnetic fluid component, 211-magnetic fluid main body seat, 212-magnetic fluid, 213-A sealing piece, 214-B sealing piece, 215-end cover, 300-carbon target, 400-PC end and 500-vacuum coating device.

Detailed Description

In order that the objects and advantages of the invention will be more clearly understood, the invention will now be described in detail with reference to the following examples. It is to be understood that the following text is merely illustrative of one or more specific embodiments of the invention and does not strictly limit the scope of the invention as specifically claimed.

As shown in fig. 1, 2, 3, 4, 5, a knocking device for vacuum coating adopting magnetic fluid sealing treatment, the knocking rod assembly comprises a knocking rod 111, one end of the knocking rod 111 is provided with a knocking carbon head 112, the other end of the knocking rod 111 is assembled at one end of a rotating rod 121, the knocking rod 111 and the rotating rod 121 are arranged in an included angle shape, the rotating rod 121 is rotatably installed, a magnetic fluid assembly is arranged on the rotating rod 121, and the rotating rod 121 is connected with a rotation adjusting assembly for adjusting the rotation of the rotating rod 121. As shown in fig. 5, the rotating rod 121 passes through the center of the magnetic fluid assembly 210, that is, through the center of the magnetic fluid 212 and the magnetic Hyuna body seat channel, and simultaneously passes through the screw hole of the knocking rod 111, the central hole of the gear 122, and the central hole of the sensing piece 127, and is integrated with the magnetic fluid assembly 210, the knocking rod 111 assembly, the gear 122, and the sensing piece 127, and when the knocking device works, the rotating rod 121 drives the integrated assembly to rotate.

The magnetic fluid assembly 210 is adopted for sealing, and the principle is as follows: under the action of magnetic field generated by magnet, the magnetic fluid placed in the gap between shaft and top end of pole shoe is concentrated to form a so-called O-shaped ring, so that the gap channel is blocked to attain the goal of sealing.

The further scheme is as follows: the magnetic fluid assembly is provided with a heat dissipation structure, and the heat dissipation structure is formed by heat dissipation pipelines arranged on the magnetic fluid assembly. Specifically, the heat dissipation pipe is disposed on the magnetic fluid main body seat 211, and the length direction of the heat dissipation pipe is consistent with the length direction of the rotating shaft. The invention does not deform when working at high temperature by passing cooling fluid (cooling water) to the heat dissipation pipe.

The method can be implemented according to the scheme shown in FIG. 3: the magnetic fluid component comprises a magnetic fluid main body seat 211, a cavity which penetrates through the magnetic fluid main body seat 211 is arranged on the magnetic fluid main body seat 211, the magnetic fluid main body seat 211 is arranged on a rotating rod 121 in a penetrating mode, a magnetic fluid 212 is assembled on the rod body of the rotating rod 121, A,

B sealing elements

213 and 214 which are used for achieving sealing assembly between the magnetic fluid main body seat 211 and the rotating rod 121 are arranged at two ends of the magnetic fluid 212 respectively, an end cover 215 is arranged on the outer side of the A sealing element 213, the magnetic fluid 212 and the B sealing element 214 are limited in the cavity of the magnetic fluid main body seat 211 through the end covers, the self-lubricating and guiding sealing effects on the rotating rod 121 are achieved, and air cannot enter a knocking rod 111 device along the rotating rod 121 when the rotating rod 121 rotates. As shown in fig. 6, the knocking device is installed on the vacuum coating device 500, and the present invention adopts the magnetic fluid sealing technology; the rotating rod and the magnetic fluid main body seat are both made of magnetic conductive materials, when the rotating rod rotates, the magnetic fluid in the magnetic fluid main body seat is in a liquid O-shaped ring form, so that a leakage-free sealing form is formed around the rotating rod, and the magnetic fluid sealing effect is achieved.

The more detailed operation is: one end of the rotating rod 121 is rotatably installed on the A support 123, the other end of the rotating rod 121 is installed on the B support 124, the magnetofluid component 210 is assembled on the rod body of the rotating rod 121 between the A, B supports 124, the knocking rod 111 is assembled at the end part of the rotating rod 121 outside the A support 123, a detection component for detecting the rotating state of the rotating rod 121 is arranged beside the rotating rod 121 outside the B support 124, the detection component transmits a detected signal to the regulation and control component for analysis processing, and the regulation and control component regulates and controls the operating state of the rotating and control component according to the analysis processing result. The tip of knocking pole 111 and keeping away from dwang 121 is provided with the pilot hole, the pilot hole is the through-hole, and the part that knocks carbon head 112 extends to the outside of pilot hole one end and is used for knocking carbon target 300, and the other end of pilot hole is provided with and is used for leaning on the carbon head who knocks carbon head 112 and supports piece 113, and the carbon head supports the surface of piece 113 and knocks carbon head 112 and laminate mutually and support and lean on. The shaft of the rotating rod 121 outside the B support 124 is provided with a sensing piece 127, the sensing piece 127 is provided with a notch due to a mark, the detection assembly is composed of A,

B sensors

125 and 126 arranged on the periphery of the sensing piece 127 and used for detecting the position of the notch, and the A,

B sensors

125 and 126 are arranged on the B support 124. The notch may be a V-shaped notch formed around the sensor sheet 127. The rotation adjusting assembly comprises an A gear 122 arranged on the rotating rod 121 and a rotating cylinder 131 arranged on the knocking mounting seat 135, a B gear 134 is arranged on a power output rotating shaft of the rotating cylinder 131, the A gear 122 and the B gear 122 are in transmission meshing connection, the control assembly comprises a PC end 400, a forward rotation controller and a reverse rotation controller, the PC end 400 receives signals detected by A,

B sensors

125 and 126 for analysis and processing, the forward rotation controller and the reverse rotation controller adjust the power output rotating shaft of the rotating cylinder 131 to rotate forwards and reversely through adjusting and controlling ventilation states, and the PC end 400 sends instructions to adjust and control the ventilation states of the forward rotation controller and the reverse rotation controller. The A thread rod section 12A is arranged on the rod body of the rotating rod 121 outside the A support 123, the thread mounting hole 101 is formed in the end portion of the knocking rod 111, the knocking rod 111 is assembled on the A thread rod section 12A through the thread mounting hole 101, and when the carbon head 112 is knocked to knock the carbon target 300, the carbon target 300 acts on the reaction force of knocking the carbon head 112, so that the thread mounting hole 101 and the A thread rod section 12A have a screwing tendency. The a-gear 122 is assembled between the magnetic fluid assembly 210 and the B-carrier 124. Thus, when the knocking carbon head 112 knocks the carbon target 300, the loosening phenomenon does not occur, but the knocking becomes tighter. In detail, the other end of the rotating rod 121 is provided with a B threaded rod section 12b, the rotating directions of the A and B threaded rod sections are opposite, and the sensing piece 127 is assembled at the B threaded rod section 12B through a bolt assembly. Specifically, the a-thread section 12a may be a reverse-thread section, and the B-thread section 12B may be a forward-thread section.

The assembly process of the invention is as follows: the knocking carbon head 112 is mounted on the knocking rod 111, and the knocking carbon head 112 is fixed on the knocking rod 111 by abutting the knocking carbon head against the block 113 with a screw. Then the assembled rod section A is fixed on the threaded rod section 12a of the rotating rod 121 through the threaded mounting hole 101; the A,

B sealing members

213 and 214 and the magnetic fluid 212 are arranged in the magnetic fluid body seat 211, and then are fixed on the magnetic fluid body seat 211 through the end cover 215 by screws to form the magnetic fluid assembly 210. The a-mount 123, the magnetic fluid assembly 210, the a-gear 122, and the sensor sheet 127 are mounted at predetermined positions on the rotating lever 121. A. The B sensor 126 is mounted at a designated position of the B support 124; the B-mount 124 is mounted on the mount 135. The rotary cylinder 131 is installed at a designated position of the installation seat 135; a forward controller 132 and a reverse controller 133 are installed at designated positions on the rotary cylinder 131; the B gear 134 is mounted on the power output shaft of the rotary cylinder 131. A. The B gear 134 is disposed in mesh.

When the invention is powered on and in an operating state, the knocking rod 111 and the V-shaped notch are arranged corresponding to the B sensor 126 and are in a 'return state' as shown in FIG. 1, and the knocking rod 111 and the V-shaped notch are arranged corresponding to the A sensor 125 and are in an 'operating trigger state' as shown in FIG. 2. When the PC terminal 400 issues a trigger operation command, the forward controller 132 supplies air to the rotary cylinder 131, so that the rotary cylinder 131 drives the B gear 134 to rotate, and the a gear 122 is driven to rotate, so that the rotary rod 121 rotates to drive the sensor 127 and the knocking rod 111 to rotate toward the carbon target 300 and touch the carbon target 300, and the present invention is in a "work trigger state". When the V-notch of the sensor piece 127 is at the position of the a sensor 125, the a sensor 125 feeds back a detection signal to the end.

When the PC terminal 400 sends a return instruction, the reverse controller 133 supplies air to the rotary cylinder 131 to drive the B gear 134 to rotate in reverse, and further drives the a gear 122 to rotate, so that the rotary rod 121 rotates to drive the knocking rod 111 and the sensing piece 127 to rotate, so that the knocking rod 111 device is restored to a "return state" from a "work trigger state", and when the V-shaped notch of the sensing piece 127 is located at the position of the B sensor 126, the B sensor 126 feeds back a detection signal to the terminal.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be construed as the protection scope of the present invention. Structures, devices, and methods of operation not specifically described or illustrated herein are generally practiced in the art without specific recitation or limitation.

Claims

1. The utility model provides an adopt magnetic fluid seal processing's knocking device that is used for vacuum coating which characterized in that: the device comprises a knocking rod, wherein one end of the knocking rod is provided with a knocking carbon head, the other end of the knocking rod is arranged at one end of a rotating rod, the knocking rod and the rotating rod are arranged in a right-angle shape, the rotating rod is rotatably arranged, a magnetic fluid component is arranged on the rotating rod, and the rotating rod is connected with a rotation adjusting component for adjusting the rotating rod to rotate; the magnetofluid component is provided with a heat dissipation structure; the heat dissipation structure is formed by a heat dissipation pipeline arranged on the magnetic fluid assembly; the magnetofluid component comprises a magnetofluid main body seat, a cavity which penetrates through the magnetofluid main body seat is arranged in the magnetofluid main body seat, the magnetofluid main body seat is sleeved on the rotating rod in a penetrating manner, magnetofluid is assembled in the magnetofluid main body seat, and A, B sealing elements for realizing sealing assembly between the magnetofluid main body seat and the rotating rod are respectively arranged at two ends of the magnetofluid; the heat dissipation pipeline is arranged on the magnetic fluid main body seat; the length direction of the heat dissipation pipeline is consistent with that of the rotating shaft; one end of dwang is rotated and is installed on the A support, the other end of dwang is installed on the B support, A, B assembles magnetic fluid component on the pole body of dwang between the support, the dwang tip assembly in the A support outside strikes the pole, the side of the dwang in the B support outside is provided with the determine module that is used for detecting the dwang rotation state, the signal that determine module will detect is carried the regulation and control subassembly and is carried out analysis processes, the regulation and control subassembly regulates and control the running state that rotates the adjusting part according to analysis processes's result regulation and control.

2. The knocking device for vacuum coating adopting magnetic fluid sealing treatment according to claim 1, characterized in that: the tip of knocking the pole and keeping away from the dwang is provided with the pilot hole, and the pilot hole is the through-hole, and the part that knocks the carbon head extends to the outside of pilot hole one end and is used for knocking the carbon target, and the other end of pilot hole is provided with and is used for leaning on the carbon head that knocks the carbon head and leans on the piece, and the carbon head leans on the surface of piece and knocks the carbon head and laminate mutually and lean on.

3. The knocking device for vacuum coating adopting magnetic fluid sealing treatment according to claim 2, characterized in that: the sensor piece is assembled on the shaft body of the rotating rod outside the B support, the notch position marked on the sensor piece is arranged on the sensor piece, the detection assembly consists of a A, B sensor which is arranged on the periphery of the sensor piece and used for detecting the position of the notch position, and the A, B sensor is assembled on the B support.

4. The knocking device for vacuum coating adopting magnetic fluid sealing treatment according to claim 3, characterized in that: the rotation adjusting assembly comprises a gear A arranged on the rotating rod and a rotary cylinder arranged on the knocking mounting seat, a gear B is arranged on a power output rotating shaft of the rotary cylinder, the gear A, B is in transmission meshing connection, the control assembly comprises a PC end, a forward rotation controller and a reverse rotation controller, the PC end receives a signal detected by a A, B sensor for analysis and processing, the forward rotation controller and the reverse rotation controller adjust the power output rotating shaft of the rotary cylinder to perform forward rotation and reverse rotation through adjusting and controlling the ventilation state, and the PC end sends an instruction to adjust the ventilation state of the forward rotation controller and the reverse rotation controller.