CN113063353B

CN113063353B - Coordinate system establishment method, detection device, detection equipment and storage medium

Info

Publication number: CN113063353B
Application number: CN202110351337.7A
Authority: CN
Inventors: 陈鲁; 刘欢敏; 吕肃; 李青格乐
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2021-03-31
Filing date: 2021-03-31
Publication date: 2023-05-09
Anticipated expiration: 2041-03-31
Also published as: CN113063353A

Abstract

The application provides a coordinate system establishment method, a detection device, a detection apparatus and a computer readable storage medium. The coordinate system establishment method comprises the following steps: acquiring a two-dimensional image of the to-be-detected piece through a first sensor, and acquiring distance information between the to-be-detected piece and a second sensor through a second sensor; determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; and establishing a first coordinate system according to the position deviation and the second coordinate system. According to the coordinate system establishment method, the two-dimensional image of the to-be-detected piece and the distance information between the to-be-detected piece and the second sensor are collected, the two-dimensional image and the distance information are compared with the information corresponding to the standard model of the to-be-detected piece, so that the position deviation between the first coordinate system of the to-be-detected piece and the second coordinate system of the standard model is determined, and the first coordinate system of the to-be-detected piece can be accurately established according to the position deviation and the second coordinate system.

Description

Coordinate system establishment method, detection device, detection equipment and storage medium

Technical Field

The present invention relates to the field of semiconductor inspection technology, and more particularly, to a coordinate system establishment method, an inspection apparatus, an inspection device, and a non-volatile computer-readable storage medium.

Background

In industrial detection, the information of the sample to be detected acquired by the detection device is required to be compared with the information in the standard model of the sample to be detected to detect whether the sample to be detected meets the standard, at the moment, a coordinate system is required to be established for the sample to be detected, the established coordinate system is required to be consistent with the coordinate system in the standard model of the sample to be detected, and then the information of the sample to be detected is acquired and matched with the information of the standard model. Therefore, the coordinate system of the sample to be detected needs to be determined in the detection process so as to meet the detection requirement. When the 3D shape profile of the sample to be measured is irregular, how to accurately establish the coordinate system of the irregular sample to be measured becomes a problem to be solved.

Disclosure of Invention

The embodiment of the application provides a coordinate system establishment method, a detection device, a detection apparatus and a nonvolatile computer readable storage medium.

The coordinate system establishment method of the embodiment of the application comprises the following steps: acquiring a two-dimensional image of a piece to be detected through a first sensor, and acquiring distance information between the piece to be detected and a second sensor through a second sensor; determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; and establishing the first coordinate system according to the position deviation and the second coordinate system.

The detection device of the embodiment of the application comprises an acquisition module, a first processing module and a second processing module. The acquisition module acquires a two-dimensional image of the to-be-detected piece through a first sensor and acquires distance information between the to-be-detected piece and a second sensor through a second sensor; the first processing module determines the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; and the second processing module establishes the first coordinate system according to the position deviation and the second coordinate system.

The detection device of the embodiment of the application comprises a first sensor, a second sensor and a processor. The first sensor is used for acquiring a two-dimensional image of the to-be-detected piece, and the second sensor is used for acquiring distance information between the to-be-detected piece and the second sensor; the processor is configured to: determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; and establishing the first coordinate system according to the position deviation and the second coordinate system.

The non-transitory computer readable storage medium of the embodiments of the present application contains a computer program, which when executed by a processor, causes the processor to perform the following method: controlling a first sensor to acquire a two-dimensional image of a piece to be detected, and controlling a second sensor to acquire distance information between the piece to be detected and the second sensor; determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; and establishing the first coordinate system according to the position deviation and the second coordinate system.

According to the coordinate system establishment method, the two-dimensional image of the to-be-detected piece and the distance information between the to-be-detected piece and the second sensor are collected, the two-dimensional image and the distance information are compared with the information corresponding to the standard model of the to-be-detected piece, so that the position deviation between the first coordinate system of the to-be-detected piece and the second coordinate system of the standard model is determined, and the first coordinate system of the to-be-detected piece can be accurately established according to the position deviation and the second coordinate system.

Additional aspects and advantages of embodiments of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a flow chart of a coordinate system establishment method of some embodiments of the present application;

FIG. 2 is a schematic illustration of a detection device according to certain embodiments of the present application;

FIG. 3 is a schematic diagram of a detection apparatus of certain embodiments of the present application;

FIG. 4 is a schematic illustration of a first sensor and a second sensor in a test device for collecting or testing a part under test in accordance with certain embodiments of the present application;

FIGS. 5-12 are flow diagrams of coordinate system establishment methods of certain embodiments of the present application;

FIG. 13 is a schematic diagram of a non-transitory computer readable storage medium coupled to a processor according to some embodiments of the present application.

Detailed Description

Embodiments of the present application are further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings refer to the same or similar elements or elements having the same or similar functions throughout.

In addition, the embodiments of the present application described below in conjunction with the drawings are exemplary only and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

Referring to fig. 1 and 4, the coordinate system establishment method in the embodiment of the present application includes:

01: acquiring a two-dimensional image of the to-be-measured piece through the first sensor 30, and acquiring distance information between the to-be-measured piece 200 and the second sensor 50 through the second sensor 50;

03: determining a position deviation between a first coordinate system of the part to be measured 200 and a second coordinate system X 'OY' of the standard model of the part to be measured 200 according to the two-dimensional image and the distance information; a kind of electronic device with high-pressure air-conditioning system

05: and establishing a first coordinate system XOY according to the position deviation and the second coordinate system X 'OY'.

Referring to fig. 2, an embodiment of the present application provides a detection apparatus 10. The detection device 10 comprises an acquisition module 11, a first processing module 13 and a second processing module 15. The coordinate system establishment method of the embodiment of the present application may be applied to the detection device 10, where the acquisition module 11, the first processing module 13, and the second processing module 15 are respectively used to execute the methods in 01, 03, and 05. That is, the acquisition module 11 acquires a two-dimensional image of the part to be measured by the first sensor 30 and acquires distance information between the part to be measured 200 and the second sensor 50 by the second sensor 50; the first processing module 13 determines a positional deviation between a first coordinate system XOY of the part 200 to be measured and a second coordinate system X 'OY' of the standard model of the part 200 to be measured according to the two-dimensional image and the distance information; the second processing module 15 establishes a first coordinate system XOY from the positional deviation and the second coordinate system X 'OY'.

Referring to fig. 3 and 4, the present application further provides a detection apparatus 100. The detection device 100 includes a first sensor 30, a second sensor 50, and a processor 70. The coordinate system establishment method of the embodiment of the present application may be applied to the detection apparatus 100, wherein the first sensor 30 and the first sensor 50 are used to perform the method in 01, and the processor 70 is used to perform the methods in 03 and 05. That is, the first sensor 30 is used to collect a two-dimensional image of the part 200 to be measured, and the second sensor 50 is used to collect distance information between the part 200 to be measured and the second sensor 50; the processor 70 is configured to: determining a position deviation between a first coordinate system of the part to be measured 200 and a second coordinate system X 'OY' of the standard model of the part to be measured 200 according to the two-dimensional image and the distance information; and establishing a first coordinate system XOY according to the position deviation and the second coordinate system X 'OY'.

In industrial detection, in the process of manufacturing a workpiece, the manufactured workpiece often has a certain error with a designed standard model of the workpiece, the information of the sample to be detected acquired by a detection device is required to be compared with the information in the standard model of the sample to be detected to detect whether the sample to be detected accords with the standard, at the moment, a coordinate system is required to be established for the sample to be detected, the established coordinate system is required to be consistent with the coordinate system in the standard model of the sample to be detected, and then the information of the sample to be detected is acquired and matched with the information of the standard model. Therefore, the coordinate system of the sample to be detected needs to be determined in the detection process so as to meet the detection requirement. When the 3D shape profile of the sample to be measured is irregular, it is often difficult to establish an accurate coordinate system for the irregular sample to be measured.

Of the present applicationIn the coordinate system establishing method, by collecting the two-dimensional image of the workpiece 200 and the distance information between the workpiece 200 and the second sensor 50, and comparing the two-dimensional image information and the distance information with the information corresponding to the standard model of the workpiece 200, the position deviation between the first coordinate system of the workpiece 200 and the second coordinate system X 'OY' of the standard model is determined, and the first coordinate system XOY of the workpiece 200 can be accurately established according to the position deviation and the second coordinate system, wherein the position deviation comprises six coefficients (X, Y, X, θ) of the position and the posture _x ，θ _y ，θ _z )。

Referring to fig. 4, specifically, the workpiece 200 may be an irregular wafer (patterned wafer, non-patterned wafer), a chip, a display panel, glass, a lens, or other precise devices, where the irregular workpiece 200 refers to a shape of the workpiece that is not generally triangular, rectangular, circular, elliptical, regular polygon, or other shapes. It should be noted that the present application is also applicable to other 3D irregularly shaped devices, which are not listed here. The standard model is a model designed before the manufacture of the part 200 to be tested, and a coordinate system (i.e. a second coordinate system) of the standard model is established when the standard model is established, so that the manufactured part 200 to be tested is compared with the standard model, and whether the part 200 to be tested meets the standard is detected.

The to-be-measured piece 200 is arranged on the motion platform 20, and the motion platform is used for driving the to-be-measured piece 200 so as to realize omnibearing detection of the to-be-measured piece 200. The first sensor 30 may be an image sensor, such as a CCD sensor, a CMOS sensor, or the like, for acquiring two-dimensional image information formed by two-dimensional edge points on the workpiece 200, and two-dimensional straight lines or curves constructed by the two-dimensional edge points. The second sensor 50 may be a depth sensor for acquiring distance information between the dut 200 and the depth sensor. The two-dimensional image information (such as a two-dimensional edge line) acquired by the first sensor 30 and the distance information between the to-be-measured piece 200 and the second sensor 50 acquired by the second sensor 50 are compared with corresponding information in the standard model, so that the position deviation between the first coordinate system of the to-be-measured piece 200 and the second coordinate system X 'OY' of the standard model is determined, and the first coordinate system XOY of the to-be-measured piece 200 can be accurately established by utilizing the position information and the second coordinate system X 'OY' due to the position deviation calculated according to the second coordinate system X 'OY', so that the coordinate value of the acquired to-be-measured feature point of the to-be-measured piece 200 in the first coordinate system XOY is compared with the coordinate value of the feature point corresponding to the to-be-measured feature point in the standard model in the second coordinate system X 'OY' in order to detect whether the to-be-measured piece 200 meets the standard.

Referring to fig. 4 and 5, in some embodiments, 01: collecting distance information between the part under test 200 and the second sensor 50 by the second sensor 50 may include:

011: determining motion coordinates of the motion platform 20 under a preset third coordinate system when the second sensor 50 collects the to-be-measured piece 200 based on a preset position conversion relation between the first sensor 30 and the second sensor 50 and image coordinates corresponding to an image area where the to-be-measured piece 200 is located in the two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

013: and acquiring distance information according to the motion coordinates.

Referring to fig. 2, the first processing module 13 and the acquisition module 11 are further configured to perform the

methods

011 and 013, that is, the first processing module 13 is further configured to: determining motion coordinates of the motion platform 20 under a preset third coordinate system when the second sensor 50 collects the to-be-measured piece 200 based on a preset position conversion relation between the first sensor 30 and the second sensor 50 and image coordinates corresponding to an image area where the to-be-measured piece 200 is located in the two-dimensional image; the acquisition module 11 is used for acquiring distance information according to the motion coordinates.

Referring to fig. 3, the processor 70 is further configured to perform the

methods

011 and 013, i.e., the processor 70 is further configured to: determining motion coordinates of the motion platform 20 under a preset third coordinate system when the second sensor 50 collects the to-be-measured piece 200 based on a preset position conversion relation between the first sensor 30 and the second sensor 50 and image coordinates corresponding to an image area where the to-be-measured piece 200 is located in the two-dimensional image; and controlling the second sensor 50 to collect distance information according to the motion coordinates.

Specifically, the positional conversion relationship may be determined by the deviation between the motion coordinates of the preset feature point in the third coordinate system when the first sensor 30 and the second sensor 50 collect the same preset feature point of the calibration member.

For example, the calibration piece may be a center-hole-digging chrome-plated plate with high processing precision, which is a hole array of a round hole of 9*9, the center of a circle in the middle of the calibration piece is used as a calibration feature, the calibration piece is placed on the motion platform 20, the coordinates of the center of the circle collected by the first sensor 30 under a third coordinate system (2, 3) (the unit is mm), and the collected picture pixels are 100 x 100, wherein the third coordinate system is the coordinate system of the motion platform 20; if the pixel coordinate of the center circle is (48, 51), the pixel size is 0.1mm; the center of the center is (2-0.1) (100/2-48), 2+0.1 (51-100/2), and 3), namely (1.8,2.1,3). In the three-dimensional point cloud information of the calibration piece acquired by the second sensor 50, the coordinates of the center and the center of the calibration piece are (10, 10, 13) (the unit is mm), and then the corresponding relationship between the first sensor 30 and the second sensor 50 is as follows: the center-to-center coordinate (1.8,2.1,3) acquired by the first sensor 30 corresponds to the center-to-center coordinate (1.8,2.1,3) acquired by the second sensor 50, that is, the deviation to be adjusted when the coordinate point acquired by the first sensor 30 is converted to the coordinate point acquired by the second sensor 50 is: +8.2, +7.9, +10, the deviation to be adjusted when the coordinate point acquired by the second sensor 50 is converted to the first sensor 30 is: -8.2, -7.9, -10. Finally, the position information of the same feature point of the to-be-measured piece 200 in different sensors can be quickly and accurately obtained through the position conversion relation between the first sensor 30 and the second sensor 50, so that deviation caused by manually trying to properly acquire the coordinate position is avoided.

The first sensor 30 acquires a two-dimensional image in alignment with a certain characteristic point (e.g., characteristic point S) of the part 200 to be measured, and when the characteristic point S of the part 200 to be measured is acquired using the second sensor 50, the accurate photographing coordinates of the feature points S acquired by the second sensor 50 are obtained by utilizing a preset position conversion relation, so that deviation caused by manually attempting to properly acquire the coordinate positions is avoided, and the fact that different sensors can acquire information of the same feature point is ensured.

In one example, the first processing module 13 or the processor 70 compares the relative positions of the motion platform 20 and the standard model of the part 200 to obtain a deviation between the motion platform 20 and the standard model, and establishes the second coordinate system X 'OY' according to the deviation and the third coordinate system.

Referring to fig. 4 and 6, in some embodiments, the workpiece 200 is disposed on a motion platform 20, and the motion platform is used to drive the workpiece 200, 03: determining a positional deviation between the first coordinate system XOY of the part under test 200 and the second coordinate system X 'OY' of the standard model of the part under test 200 based on the two-dimensional image and the distance information may include:

031: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

032: and comparing the motion coordinates of the motion platform 20 corresponding to the central feature point with the motion coordinates corresponding to the central feature point of the standard model to determine a first coordinate deviation X and a second coordinate deviation Y between the first coordinate system XOY and the second coordinate system X 'OY'.

Referring to fig. 2, the first processing module 13 is further configured to perform the

methods

031 and 033, that is, the first processing module 13 is further configured to: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image; and comparing the motion coordinates of the motion platform 20 corresponding to the central feature point with the motion coordinates corresponding to the central feature point of the standard model to determine a first coordinate deviation X and a second coordinate deviation Y between the first coordinate system XOY and the second coordinate system X 'OY'.

Referring to fig. 3, the processor 70 is further configured to perform the

methods

031 and 033, i.e., the processor 70 is further configured to: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image; and comparing the motion coordinates of the motion platform 20 corresponding to the central feature point with the motion coordinates corresponding to the central feature point of the standard model to determine a first coordinate deviation X and a second coordinate deviation Y between the first coordinate system XOY and the second coordinate system X 'OY'.

Specifically, the workpiece 200 includes a plurality of feature points, and information included in each feature point is determined by the manufacturing process. The central feature point may be a feature point that is easily identified in the part 200 to be measured.

In one example, the first processing module 13 or the processor 70 identifies the center feature point of the part 200 to be measured in the two-dimensional image, and obtains the motion coordinate of the center feature point a of the part 200 to be measured carried on the motion platform 20 in the third coordinate system (i.e., the coordinate system of the motion platform 20); meanwhile, the coordinates of the central feature point a ' of the standard model (corresponding to the central feature point a of the to-be-measured piece 200) under the second coordinate X ' OY ' are obtained, and the motion coordinates of the standard model under the third coordinate system can be obtained by using the deviation of the obtained standard model and the motion platform 20. Coordinate deviations between the motion coordinates of the center feature point a of the part under test 200 in the third coordinate system and the motion coordinates of the center feature point a ' of the standard model in the second coordinate system X ' OY ' are calculated, thereby determining a first coordinate deviation X and a second coordinate deviation Y between the first coordinate system XOY and the second coordinate system X ' OY '. For example, the motion coordinate of the center feature point a of the workpiece 200 in the third coordinate system is (1.2,3.4,4), the motion coordinate of the center feature point a' of the standard model in the third coordinate system is (2.1,2.7,4.3), and the first coordinate deviation x=2.1-1.2=0.9 and the second coordinate deviation y=2.7-3.4= -0.7.

Referring to fig. 4 and 7, in some embodiments, 03: determining a positional deviation between the first coordinate system of the part under test 200 and the second coordinate system of the standard model of the part under test 200 based on the two-dimensional image and the distance information may further include:

033: identifying edge feature points of the to-be-detected piece 200 in the two-dimensional image;

034: fitting the edge feature points to generate a fitted graph; a kind of electronic device with high-pressure air-conditioning system

035: determining a first angular deviation theta between the first coordinate system XOY and the second coordinate system X 'OY' according to the fitting pattern and the standard model _z 。

methods

033, 034 and 035, that is, the first processing module 13 is further configured to: identifying edge feature points of the to-be-detected piece 200 in the two-dimensional image; fitting the edge feature points to generate a fitted graph; and determining a first angle deviation theta between the first coordinate system XOY and the second coordinate system X 'OY' according to the fitting pattern and the standard model _z 。

Referring to FIG. 3, the processor 70 is further configured to perform the

methods

033, 034, and 035, i.e., processesThe device 70 is also configured to: identifying edge feature points of the to-be-detected piece 200 in the two-dimensional image; fitting the edge feature points to generate a fitted graph; and determining a first angle deviation theta between the first coordinate system XOY and the second coordinate system X 'OY' according to the fitting pattern and the standard model _z 。

In one example, after determining the first coordinate deviation X and the second coordinate deviation Y of the part under test 200, the first processing module 13 or the processor 70 controls the first sensor 30 to identify the edge feature points B of the two-dimensional image and perform fitting processing according to the plurality of edge feature points B to generate a fitting pattern; and the edge feature point B acquired by the first sensor 30 is converted into a coordinate system detected by the second sensor 50 through a position conversion relation, and the coordinates of the converted edge feature point B are the coordinates of the edge feature point B' of the standard model under the second coordinates, so that the edge contour information of the standard model is known. The first processing module 13 or the processor 70 performs two-dimensional best fit registration of the fitted pattern and the standard model, and calculates a first angular deviation θ of the part 200 to be measured around the Z 'axis of the second coordinate system X' OY _z 。

Referring to fig. 4 and 8, in some embodiments, the workpiece 200 is disposed on the motion platform 20, and the motion platform 20 is used to drive the workpiece 200, 03: determining a positional deviation between the first coordinate system XOY of the part under test 200 and the second coordinate system X 'OY' of the standard model of the part under test 200 according to the two-dimensional image and the distance information may further include:

031: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image;

036: and comparing the distance information corresponding to the central characteristic points with the distance information corresponding to the central characteristic points of the standard model, and determining a third coordinate deviation Z between the first coordinate system XOY and the second coordinate system X 'OY'.

methods

031 and 036, that is, the first processing module 13 is further configured to: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image; and comparing the distance information corresponding to the central characteristic points with the distance information corresponding to the central characteristic points of the standard model, and determining a third coordinate deviation Z between the first coordinate system XOY and the second coordinate system X 'OY'.

Referring to fig. 3, the processor 70 is further configured to perform the

methods

033, 034, and 035, i.e., the processor 70 is further configured to: identifying a central characteristic point of the to-be-detected piece 200 in the two-dimensional image; and comparing the distance information corresponding to the central characteristic points with the distance information corresponding to the central characteristic points of the standard model, and determining a third coordinate deviation Z between the first coordinate system XOY and the second coordinate system X 'OY'.

Likewise, the third coordinate deviation Z between the first coordinate system XOY and the second coordinate system X 'OY' is determined on the same principle as the first coordinate deviation X and the second coordinate deviation Y between the first coordinate system XOY and the second coordinate system X 'OY' described above. The distance information between the central feature point a of the part under test 200 or the central feature point a 'of the standard model and the second sensor 50 is the coordinate value of the central feature point a or a' on the Z axis in the coordinate system. The first processing module 13 or the processor 70 controls the second sensor 50 to scan the part 200 to be measured to obtain the distance information d1 between the central feature point a of the part 200 to be measured and the second sensor 50, and simultaneously controls the second sensor 50 to collect the distance information d1 'between the central feature point a' of the standard model and the second sensor 50, and compares the deviations d1-d1 'between d1 and d 1', thereby obtaining the third coordinate deviation Z between the first coordinate system XOY and the second coordinate system X 'OY'.

Referring to fig. 4 and 9, in some embodiments, 03: determining a positional deviation between the first coordinate system of the part under test 200 and the second coordinate system of the standard model of the part under test 200 based on the two-dimensional image and the distance information may further include:

037: comparing the distance information corresponding to the plurality of characteristic points of the to-be-detected piece 200 with the distance information corresponding to the plurality of characteristic points in the standard model, and determining a second angle deviation theta between the first coordinate system and the second coordinate system _x Third angular deviation θ _y 。

Referring to fig. 2, the first processing module 13 is further configured to execute the method in 037, that is, the first processing module 13 is further configured to compare distance information corresponding to a plurality of feature points of the part under test 200 with distance information corresponding to a plurality of feature points in the standard model, and determine a second angular deviation θ between the first coordinate system and the second coordinate system _x Third oneAngle deviation theta _y 。

Referring to fig. 3, the processor 70 is further configured to execute the method in 037, that is, the processor 70 is further configured to compare distance information corresponding to a plurality of feature points of the to-be-measured device 200 with distance information corresponding to a plurality of feature points in the standard model to determine a second angular deviation θ between the first coordinate system and the second coordinate system _x Third angular deviation θ _y 。

The first processing module 13 or the processor 70 controls the second sensor 50 to collect distance information between a plurality of feature points in the part to be measured 200 and the second sensor 50, and controls the second sensor 50 to collect distance information between a plurality of corresponding feature points in the standard model and the second sensor 50, and performs three-dimensional best fit registration by using the collected plurality of feature points in the part to be measured 200 and the corresponding plurality of feature points in the standard model, wherein an ICP algorithm may be used to perform three-dimensional best fit registration on the plurality of feature points in the part to be measured 200 and the corresponding plurality of feature points in the standard model when performing three-dimensional best fit registration on the part to be measured 200 and the standard model, and the second angular deviation θ between the first coordinate system XOY and the second coordinate system X 'OY' is determined according to a rotation matrix obtained after the ICP algorithm registration _x And a third angular deviation theta _y 。

Referring to fig. 10, in some embodiments, 037: comparing the distance information corresponding to the plurality of characteristic points of the to-be-detected piece 200 with the distance information corresponding to the plurality of characteristic points in the standard model, and determining a second angle deviation theta between the first coordinate system and the second coordinate system _x Third angular deviation θ _y May include:

0371: selecting any point in the two-dimensional image as a point corresponding to the coordinate origin of the first coordinate system, and establishing a first coordinate axis and a second coordinate axis in the two-dimensional image;

0372: acquiring a plurality of first coordinate axis feature points positioned on a first coordinate axis and a plurality of second coordinate axis feature points positioned on a second coordinate axis in a two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

0373: comparing the distance information corresponding to the characteristic points of the first coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the first coordinate axis in the standard model, and calculating the first coordinate axisTwo angle deviation theta _x And comparing the distance information corresponding to the characteristic points of the second coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the second coordinate axis in the standard model to calculate a third angle deviation theta _y 。

methods

0371, 0372 and 0373, that is, the first processing module 13 is further configured to: selecting any point in the two-dimensional image as a point corresponding to the coordinate origin of the first coordinate system, and establishing a first coordinate axis and a second coordinate axis in the two-dimensional image; acquiring a plurality of first coordinate axis feature points positioned on a first coordinate axis and a plurality of second coordinate axis feature points positioned on a second coordinate axis in a two-dimensional image; comparing the distance information corresponding to the characteristic points of the first coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the first coordinate axis in the standard model, and calculating a second angle deviation theta _x And comparing the distance information corresponding to the characteristic points of the second coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the second coordinate axis in the standard model to calculate a third angle deviation theta _y 。

Referring to fig. 3, the processor 70 is further configured to perform the

methods

0371, 0372, and 0373, i.e., the processor 70 is further configured to: selecting any point in the two-dimensional image as a point corresponding to the coordinate origin of the first coordinate system, and establishing a first coordinate axis and a second coordinate axis in the two-dimensional image; acquiring a plurality of first coordinate axis feature points positioned on a first coordinate axis and a plurality of second coordinate axis feature points positioned on a second coordinate axis in a two-dimensional image; comparing the distance information corresponding to the characteristic points of the first coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the first coordinate axis in the standard model, and calculating a second angle deviation theta _x And comparing the distance information corresponding to the characteristic points of the second coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the second coordinate axis in the standard model to calculate a third angle deviation theta _y 。

Specifically, the first processing module 13 or the processor 70 scans the two-dimensional image, selects any one of the feature points in the two-dimensional image as a point corresponding to the origin of coordinates of the first coordinate system XOY, and establishes a first coordinate axis (horizontal axis) and a second coordinate axis (vertical axis) in the two-dimensional image according to the determined first coordinate deviation X and the determined second coordinate deviation Y.

Wherein, in determining the second angular deviation θ _x In the process of (1), the first processing module 13 or the processor 70 acquires a plurality of feature points located at two ends of the second coordinate axis (i.e. at the origin of coordinates and at one end of the longitudinal axis at infinity) in the two-dimensional image, that is, the first processing module 13 or the processor 70 acquires a plurality of feature points of the second coordinate axis, so that the acquired feature points are ensured to be as discrete as possible, and the accuracy of the registration result is improved. And then the coordinates of the first sensor 30 are converted into the second sensor 50 through a position conversion relationship so as to acquire the deviation required to be regulated of the motion platform 20, and the information of the same characteristic point acquired by the second sensor 50 and the first sensor 30 is ensured. And the distance information of the plurality of second coordinate axis feature points (assumed to be C) acquired by the second sensor 50 and the distance information of the corresponding second coordinate axis feature points C 'in the standard model are acquired, wherein the second coordinate axis feature points C' of the standard model are feature points at two ends of a vertical axis of the standard model in the second coordinate system X 'OY'. Finally, three-dimensional best fit registration is carried out on the two groups of first coordinate axis feature points, and a second angle deviation theta between the first coordinate system XOY and the second coordinate system X 'OY' is determined according to registration results _x 。

Similarly, in determining the third angular deviation θ _y In the process of (1), the first processing module 13 or the processor 70 acquires a plurality of feature points located at two ends of the first coordinate axis (namely, at the origin of coordinates and at one end of the infinite horizontal axis) in the two-dimensional image, that is, the first processing module 13 or the processor 70 acquires a plurality of feature points of the first coordinate axis, so that the acquired feature points are ensured to be as discrete as possible, and the accuracy of the registration result is improved. And then the coordinates of the first sensor 30 are converted into the second sensor 50 through a position conversion relationship so as to acquire the deviation required to be regulated of the motion platform 20, and the information of the same characteristic point acquired by the second sensor 50 and the first sensor 30 is ensured. And then the distance information of the plurality of first coordinate axis feature points (assumed to be C) acquired by the second sensor 50 is compared with the distance information of the corresponding first coordinate axis feature point C 'in the standard model, wherein the first coordinate axis feature point C' of the standard model is the distance information of the standard model in the standard modelCharacteristic points at both ends of the transverse axis in the first coordinate system X 'OY'. Finally, carrying out three-dimensional best fit registration on the two groups of first coordinate axis feature points, and determining a third angle deviation theta between the first coordinate system XOY and the second coordinate system X 'OY' according to registration results _y 。

In the coordinate system establishment method of the present application, the first sensor 30 and the second sensor 50 collect two-dimensional images of the workpiece 200 and distance information between the workpiece 200 and the second sensor 50, the first processing module 13 or the processor 70 compares the two-dimensional image information and the distance information with information corresponding to a standard model of the workpiece 200, and the second processing module 15 or the processor 70 combines the positional deviation (X, Y, Z, θ) between the first coordinate system XOY and the second coordinate system X' OY _x ，θ _y ，θ _z ) And the second coordinate system X 'OY' can accurately establish the first coordinate system XOY of the part 200 to be measured.

Referring to fig. 4 and 11, in some embodiments, the coordinate system establishment method may further include:

07: the first sensor 30 and/or the second sensor 50 are controlled to detect the part 200 to be detected according to the first coordinate system.

Referring to fig. 2, the inspection apparatus 10 may further include a third processing module 17, where the third processing module 17 is configured to perform the method in 07, that is, the third processing module 17 is configured to control the first sensor 30 and/or the second sensor 50 to inspect the part 200 according to the first coordinate system.

Referring to fig. 3, the processor 70 is further configured to perform the method in 07, that is, the processor 70 is further configured to control the first sensor 30 and/or the second sensor 50 to detect the workpiece 200 according to the first coordinate system.

The third processor 17 or the processor 70 may control the first sensor 30 to perform two-dimensional measurement on the workpiece 200 or control the second sensor 50 to perform three-dimensional measurement on the workpiece 200 according to the determined first coordinate system XOY and the positional conversion relationship. For example, the first sensor 30 is used to measure the position degree of a certain characteristic point of the part 200 to be measured; the second sensor 50 is used to measure the three-dimensional profile of the test piece 200, the flatness of a certain plane of the test piece 200, the parallelism of the test piece 200, or the height difference between any two feature points in the test piece 200.

Referring to fig. 4 and 12, in some embodiments, 07: controlling the first sensor 30 and/or the second sensor 50 to detect the part 200 according to the first coordinate system may include:

071: obtaining parameters to be detected of the workpiece 200, wherein the parameters to be detected comprise a first parameter to be detected and a second parameter to be detected, the first parameter to be detected is detected by the first sensor 30, and the second parameter to be detected is detected by the second sensor 50;

072: when the parameter to be detected includes the first parameter to be detected, a fourth coordinate system is established according to the first coordinate system and a preset position conversion relationship between the first sensor 30 and the second sensor 50, and the first sensor 30 is controlled to detect the first parameter to be detected of the piece to be detected 200 according to the fourth coordinate system; a kind of electronic device with high-pressure air-conditioning system

073: when the parameter to be inspected includes the second parameter to be inspected, the second sensor 50 is controlled to detect the second parameter to be inspected of the part to be inspected 200 according to the first coordinate system.

Referring to fig. 2, the third processing module 17 is further configured to perform the

methods

071, 072 and 073, i.e. the third processing module 17 is further configured to: obtaining parameters to be detected of the workpiece 200, wherein the parameters to be detected comprise a first parameter to be detected and a second parameter to be detected, the first parameter to be detected is detected by the first sensor 30, and the second parameter to be detected is detected by the second sensor 50; when the parameter to be detected includes the first parameter to be detected, a fourth coordinate system is established according to the first coordinate system and a preset position conversion relationship between the first sensor 30 and the second sensor 50, and the first sensor 30 is controlled to detect the first parameter to be detected of the piece to be detected 200 according to the fourth coordinate system; and when the parameter to be detected comprises the second parameter to be detected, controlling the second sensor 50 to detect the second parameter to be detected of the workpiece 200 according to the first coordinate system.

Referring to fig. 3, the processor 70 is further configured to perform the

methods

071, 072, and 073, i.e., the processor 70 is further configured to: obtaining parameters to be detected of the workpiece 200, wherein the parameters to be detected comprise a first parameter to be detected and a second parameter to be detected, the first parameter to be detected is detected by the first sensor 30, and the second parameter to be detected is detected by the second sensor 50; when the parameter to be detected includes the first parameter to be detected, a fourth coordinate system is established according to the first coordinate system and a preset position conversion relationship between the first sensor 30 and the second sensor 50, and the first sensor 30 is controlled to detect the first parameter to be detected of the piece to be detected 200 according to the fourth coordinate system; and when the parameter to be detected comprises the second parameter to be detected, controlling the second sensor 50 to detect the second parameter to be detected of the workpiece 200 according to the first coordinate system.

Specifically, the first to-be-detected parameter in the to-be-detected parameters comprises a position degree, and the second to-be-detected parameter comprises a contour degree, a flatness, a parallelism degree and a height difference.

In one example, when the third processing module 17 or the processor 70 detects the position degree of the central feature point a of the part to be measured 200, when the position degree of the central feature point a of the part to be measured 200 needs to be detected, the third processing module 17 or the processor 70 obtains the coordinate information of the central feature point a of the part to be measured 200 in the first coordinate system XOY, because the first coordinate system XOY of the part to be measured 200 is established based on the second sensor 50, in order to ensure that the first sensor 30 collects accurate position information, a fourth coordinate system needs to be established through a position conversion relationship of the coordinate information, wherein the fourth coordinate system is a coordinate system corresponding to the first sensor 30, and finally, the coordinate system is compared with the information of the corresponding central feature point a' in the standard model, so as to obtain the position degree of the central feature point a.

In another example, when the third processing module 17 or the processor 70 controls the second sensor 50 to measure the three-dimensional profile, the plane flatness, the plane parallelism or the height difference between any two feature points of the to-be-measured member 200, the third processing module 17 or the processor 70 directly obtains the information corresponding to the second to-be-detected parameter to be detected of the to-be-measured member 200 in the first coordinate system XOY, and compares the information with the corresponding information in the standard model, thereby obtaining the second to-be-detected parameter of the to-be-measured member 200.

Referring to fig. 13, the present application also provides a non-transitory computer readable storage medium 300 storing a computer program 301. The computer program 301, when executed by the processor 70, causes the processor 70 to perform the coordinate system establishment method of any of the embodiments described above.

For example, the computer program 301, when executed by the processor 70, causes the processor 70 to perform the following coordinate system establishment method:

03: determining a position deviation between a first coordinate system XOY of the piece to be measured 200 and a second coordinate system X 'OY' of the standard model of the piece to be measured 200 according to the two-dimensional image and the distance information; a kind of electronic device with high-pressure air-conditioning system

Also for example, the computer program 301, when executed by the processor 70, causes the processor 70 to perform the following coordinate system establishment method:

013: and acquiring distance information according to the motion coordinates.

036: and comparing the distance information corresponding to the central characteristic points with the distance information corresponding to the central characteristic points of the standard model, and determining a third coordinate deviation Z between the first coordinate system and the second coordinate system.

0373: comparing the distance information corresponding to the characteristic points of the first coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the first coordinate axis in the standard model, and calculating a second angle deviation theta _x And comparing the distance information corresponding to the characteristic points of the second coordinate axis with the distance information of the characteristic points corresponding to the characteristic points of the second coordinate axis in the standard model to calculate a third angle deviation theta _y 。

013: and acquiring distance information according to the motion coordinates.

035: determining first coordinates from the fitted graph and the standard modelA first angular deviation θ between the system XOY and the second coordinate system X' OY _z 。

072: when the parameter to be detected includes the first parameter to be detected, a fourth coordinate system is established according to the first coordinate system XOY and a preset position conversion relationship between the first sensor 30 and the second sensor 50, and the first sensor 30 is controlled to detect the first parameter to be detected of the workpiece 200 according to the fourth coordinate system; a kind of electronic device with high-pressure air-conditioning system

073: when the parameter to be inspected includes the second parameter to be inspected, the second sensor 50 is controlled to detect the second parameter to be inspected of the part to be inspected 200 according to the first coordinate system XOY.

In the description of the present specification, reference to the terms "certain embodiments," "one embodiment," "some embodiments," "an exemplary embodiment," "an example," "a particular example," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, for example two, three, unless explicitly defined otherwise.

Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application, which is defined by the claims and their equivalents.

Claims

1. A coordinate system establishment method, comprising:

acquiring a two-dimensional image of a piece to be detected through a first sensor, and acquiring distance information between the piece to be detected and a second sensor through a second sensor;

determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; a kind of electronic device with high-pressure air-conditioning system

Establishing the first coordinate system according to the position deviation and the second coordinate system;

the acquiring, by the second sensor, distance information between the part to be measured and the second sensor includes:

and determining the distance information based on a preset position conversion relation between the first sensor and the second sensor and an image coordinate corresponding to an image area where the to-be-detected piece is located in the two-dimensional image.

2. The coordinate system establishment method according to claim 1, wherein the piece to be measured is disposed on a motion platform, the motion platform is configured to drive the piece to be measured, the acquiring distance information between the piece to be measured and the second sensor by the second sensor includes:

determining motion coordinates of the motion platform under a preset third coordinate system when the second sensor collects the to-be-detected piece based on a preset position conversion relation between the first sensor and the second sensor and image coordinates corresponding to an image area where the to-be-detected piece is located in the two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

And acquiring the distance information according to the motion coordinates.

3. The method according to claim 1, wherein the workpiece is disposed on a motion platform, the motion platform is configured to drive the workpiece, and determining a positional deviation between a first coordinate system of the workpiece and a second coordinate system of a standard model of the workpiece according to the two-dimensional image and the distance information includes:

Identifying a central characteristic point of the piece to be detected in the two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

And comparing the motion coordinates of the motion platform corresponding to the central feature points with the motion coordinates corresponding to the central feature points of the standard model, and determining a first coordinate deviation and a second coordinate deviation between the first coordinate system and the second coordinate system.

4. The coordinate system establishing method according to claim 1, wherein the determining a positional deviation between a first coordinate system of the object to be measured and a second coordinate system of a standard model of the object to be measured based on the two-dimensional image and the distance information includes:

identifying edge characteristic points of the to-be-detected piece in the two-dimensional image;

fitting the edge characteristic points to generate a fitting graph; a kind of electronic device with high-pressure air-conditioning system

And determining a first angle deviation between the first coordinate system and the second coordinate system according to the fitting graph and the standard model.

5. The method according to claim 1, wherein the workpiece is disposed on a motion platform, the motion platform is configured to drive the workpiece, and determining a positional deviation between a first coordinate system of the workpiece and a second coordinate system of a standard model of the workpiece according to the two-dimensional image and the distance information includes:

And comparing the distance information corresponding to the central characteristic point with the distance information corresponding to the central characteristic point of the standard model, and determining a third coordinate deviation between the first coordinate system and the second coordinate system.

6. The coordinate system establishing method according to claim 1, wherein the determining a positional deviation between a first coordinate system of the object to be measured and a second coordinate system of a standard model of the object to be measured based on the two-dimensional image and the distance information includes:

and comparing the distance information corresponding to the plurality of feature points of the to-be-detected piece with the distance information corresponding to the plurality of feature points in the standard model, and determining a second angle deviation and a third angle deviation between the first coordinate system and the second coordinate system.

7. The method of claim 6, wherein comparing the distance information corresponding to the plurality of feature points of the to-be-measured object with the distance information corresponding to the plurality of feature points in the standard model to determine the second angle deviation and the third angle deviation between the first coordinate system and the second coordinate system, comprises:

Selecting any point in the two-dimensional image as a point corresponding to the coordinate origin of the first coordinate system, and establishing a first coordinate axis and a second coordinate axis in the two-dimensional image;

acquiring a plurality of first coordinate axis feature points positioned in the first coordinate axis and a plurality of second coordinate axis feature points positioned in the second coordinate axis in the two-dimensional image; a kind of electronic device with high-pressure air-conditioning system

And comparing the distance information corresponding to the first coordinate axis feature points with the distance information of feature points corresponding to the first coordinate axis feature points in the standard model, calculating the second angle deviation, and comparing the distance information corresponding to the second coordinate axis feature points with the distance information of feature points corresponding to the second coordinate axis feature points in the standard model, and calculating the third angle deviation.

8. A detection apparatus, characterized by comprising:

the acquisition module acquires a two-dimensional image of the to-be-detected piece through a first sensor and acquires distance information between the to-be-detected piece and a second sensor through a second sensor;

the first processing module is used for determining the position deviation between the first coordinate system of the to-be-detected piece and the second coordinate system of the standard model of the to-be-detected piece according to the two-dimensional image and the distance information; a kind of electronic device with high-pressure air-conditioning system

The second processing module establishes the first coordinate system according to the position deviation and the second coordinate system;

9. The detection equipment is characterized by comprising a first sensor, a second sensor and a processor, wherein the first sensor is used for acquiring a two-dimensional image of a piece to be detected, and the second sensor is used for acquiring distance information between the piece to be detected and the second sensor;

the processor is configured to: determining the position deviation between a first coordinate system of the to-be-detected piece and a second coordinate system of a standard model of the to-be-detected piece according to the two-dimensional image and the distance information; establishing the first coordinate system according to the position deviation and the second coordinate system;

the processor is further configured to:

10. The inspection apparatus of claim 9, wherein the part to be inspected is disposed on a motion platform, the motion platform being configured to drive the part to be inspected, the processor being further configured to:

And acquiring the distance information according to the motion coordinates.

11. The inspection apparatus of claim 9, wherein the part to be inspected is disposed on a motion platform, the motion platform being configured to drive the part to be inspected, the processor being further configured to:

12. The inspection apparatus of claim 9, wherein the part to be inspected is disposed on a motion platform, the motion platform being configured to drive the part to be inspected, the processor being further configured to:

13. The inspection apparatus of claim 9, wherein the part to be inspected is disposed on a motion platform, the motion platform being configured to drive the part to be inspected, the processor being further configured to:

14. The detection apparatus of claim 9, wherein the processor is further configured to:

15. The detection apparatus of claim 14, wherein the processor is further configured to:

16. A non-transitory computer readable storage medium containing a computer program which, when executed by a processor, causes the processor to perform the coordinate system establishment method of any one of claims 1 to 7.