CN113049002B - Conical motion testing method of inclination angle sensor - Google Patents
Conical motion testing method of inclination angle sensor Download PDFInfo
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Abstract
The invention discloses a conical motion testing method of an inclination angle sensor, which comprises the following steps: establishing a follow-up coordinate system, and controlling a servo motor to drive a branched chain to move through a motion controller to generate conical motion around a Z axis; calibrating kinematic parameters such as spherical hinge coordinates, hooke hinge coordinates, initial offset of telescopic legs and the like of a Stewart platform through a laser tracker, establishing an accurate position orthometric model of the Stewart platform, and eliminating the amplitude attenuation and phase lag effects of closed-loop response of a servo motor; and then the MEMS inclination sensor is arranged on the movable platform, the actual conical motion track is calculated through a position forward solution model to be used as a reference measured value, and the measured value is compared with the measured value of the inclination sensor to finish the test and calibration of the MEMS inclination sensor. And the Stewart platform can generate conical motion around the Z axis, and the conical point can be changed according to the requirement, so that compared with one-dimensional rotary motion, the conical motion has more advantages.
Description
Technical Field
The invention belongs to the field of measurement and test, and is particularly suitable for dynamic test of a micro-electromechanical system (MEMS) inclination sensor and an inertial measurement unit.
Background
The MEMS dynamic inclination sensor is a high-performance inertial measurement device, can measure attitude parameters of a moving carrier, and is suitable for inclination measurement under the moving and vibrating states. The system mainly comprises an accelerometer and a gyroscope, wherein the accelerometer measurement data is usually easy to be influenced by external environment interference to generate noise, and the gyroscope measurement data has drift errors due to integration, so that real-time dynamic inclination angle output can be realized through an information fusion algorithm of the accelerometer measurement data and the gyroscope measurement data, and the working stability is improved.
To ensure the validity of the measurement results, the MEMS tilt sensor needs to be tested. At present, a rotary table and a dividing head are generally adopted to test an inclination angle sensor, and an accelerometer and a gyroscope are tested through a multi-point rolling method and a speed testing method. The existing test method is mainly used for determining a static error model of the MEMS inclination angle sensor, and comprises scale factors, deviation, non-orthogonality and the like. With increasing demands for dynamic measurement applications, the dynamic performance of MEMS tilt sensors is receiving more attention. There is therefore a need to study test equipment and methods for MEMS tilt sensor dynamics. The complete tilt motion is a two degree-of-freedom angular motion about orthogonal axes in the horizontal plane. The existing multi-axis turntable can generate multi-axis angular motion, but can only rotate around the rotating shaft, the motion form is limited by the mechanical structure of the turntable, the origin of the angular motion is the intersection point of two orthogonal axes of the turntable, and the position is fixed and cannot be adjusted.
Therefore, aiming at the problems of insufficient dynamic characteristics, single movement form and the like of the MEMS inclination sensor tested by the turntable at present, the invention provides a conical movement testing method of the inclination sensor, which is used for testing the dynamic characteristics of the inclination sensor by the inclination movement of two degrees of freedom, acquiring the response characteristics of the actual measuring environment of the sensor, ensuring the effectiveness and the reliability of an inclination measuring system and meeting the urgent requirements of various engineering application fields on the high-performance inclination sensor.
Disclosure of Invention
The invention aims to provide a conical motion testing method of an inclination sensor, which is used for generating inclination motions with two degrees of freedom through a Stewart platform, testing the dynamic characteristics of the inclination sensor and solving the defects of insufficient dynamic characteristics, single motion form and the like of a turntable testing method.
In order to achieve the purpose, the dynamic characteristics of the MEMS inclination angle sensor are tested through conical motion around the Z axis generated by the Stewart platform. The method comprises the following steps: establishing a follow-up coordinate system, and controlling a servo motor to drive a branched chain to move through a motion controller to generate conical motion around a Z axis; calibrating kinematic parameters such as spherical hinge coordinates, hooke hinge coordinates, initial offset of telescopic legs and the like of a Stewart platform through a laser tracker, establishing an accurate position orthometric model of the Stewart platform, and eliminating the amplitude attenuation and phase lag effects of closed-loop response of a servo motor; and then the MEMS inclination sensor is arranged on the movable platform, the actual conical motion track is calculated through a position forward solution model to be used as a reference measured value, and the measured value is compared with the measured value of the inclination sensor to finish the test and calibration of the MEMS inclination sensor.
The method for generating conical motion around the Z axis by using the Stewart platform specifically comprises the following steps:
conical motion about the Z-axis is formed by rotating a vector OL in the XOY plane by an angle α, and OL rotates in the XOY plane at an angular velocity ω, describing the conical motion using the quaternion method:
the angular velocity of the conical motion about the Z axis is as follows:
and establishing a follow-up coordinate system of the movable platform, so that the origin of the coordinate system coincides with the cone point of the conical motion. And calculating the length command of each telescopic leg in real time through the position inverse solution of the Stewart platform according to the position coordinates of the spherical hinge center in the dynamic platform coordinate system and the Hooke hinge center in the static platform coordinate system. The motion controller controls the servo motor to drive the motion branched chain to extend or shorten, and the motion platform is driven to generate conical motion around the Z axis.
The actual conical motion measuring method around the Z axis specifically comprises the following steps:
and calibrating kinematic parameters such as spherical hinge coordinates, hooke hinge coordinates, initial deflection of telescopic legs and the like of the Stewart platform by using a laser tracker, and establishing an accurate position orthographic model of the Stewart platform. And acquiring the encoder reading of each telescopic leg in real time to obtain real leg length information, and calculating the actual pose of the movable platform through a position orthographic model to obtain the actual conical motion around the Z axis. And eliminating the amplitude attenuation and phase lag effects of the closed loop frequency response of the servo motor.
The testing method of the MEMS inclination angle sensor based on the conical motion specifically comprises the following steps:
and the MEMS inclination sensor is arranged on the upper surface of a movable platform of the Stewart platform, and the Stewart platform is controlled to generate a series of conical motions with different frequencies and angles. Reading and calculating an actual conical motion track by an encoder through a position orthographic model to serve as a reference measurement value; and compared with the measured value of the inclination angle sensor, the MEMS inclination angle sensor is tested and calibrated.
The MEMS inclination sensor mainly comprises a triaxial accelerometer and a gyroscope, and can provide angular velocity and acceleration of the axial directions of three coordinate axes.
The sensitivity of the accelerometer with respect to the reference coordinate system of the tilt sensor is as follows:
wherein ,
and
Is the X and Y axis amplitude of the accelerometer under cone motion excitation.
The sensitivity of the gyroscope is:
wherein ,
and
Is the X and Y axis amplitude of the gyroscope under conical motion excitation.
Sensitivity of the tilt sensor is determined by the roll angle
And pitch angle θ, the sensitivity of which is shown below:
wherein 
and
Is a tilting output +.>
Is set, is a constant value, and is a constant value. />
Drawings
FIG. 1 is a schematic diagram of a Stewart platform in an embodiment of a method of the invention;
FIG. 2 is a flow chart of control and measurement of conical motion about the Z axis in a specific embodiment of the invention;
FIG. 3 is a schematic view of conical motion about the Z axis generated by a Stewart platform in an embodiment of the invention;
FIG. 4 illustrates the generation of conical motion about the Z axis in an embodiment of the present invention;
FIG. 5 is a sensitivity axis coordinate system of the gyroscope and accelerometer of the present invention;
FIG. 6 is a graph showing the deviation of the gyroscope sensitivity of conical motion from a conventional turret test in an embodiment of the invention;
fig. 7 shows the deviation of the tilt angle output sensitivity of the conical motion from the conventional turntable test in an embodiment of the present invention.
Detailed Description
In order to test the dynamic characteristics of an inclination angle sensor and solve the defects of insufficient dynamic characteristics, single movement form and the like of a turntable test method, the invention provides a conical movement test method of the inclination angle sensor, which generates inclination angle movement with two degrees of freedom through a Stewart platform. The invention is described in detail below with reference to the attached drawings and specific examples of implementation.
Referring to fig. 1, there is shown a schematic diagram of an apparatus for carrying out the method of the present invention, which comprises: the device comprises a hook joint 1, a movable joint 2, a spherical joint 3, a lower branched chain 4, an upper branched chain 5, a static platform 6, a movable platform 7, an MEMS inclination angle sensor 8 and a servo motor 9. The upper branched chain 5 and the lower branched chain 4 are connected through a movable joint 2, the upper branched chain 5 is linked with a movable platform 7 through a spherical hinge 3, and the lower branched chain 4 is connected with a static platform 6 through a hook hinge 1; the servo motor 9 is arranged on the branched chain to drive the branched chain to move, so that the movable platform 7 is driven to move, conical movement around the Z axis is generated, and the conical point can be changed according to requirements.
The MEMS tilt sensor 8 is mounted on the movable platform 7, and measures the conical motion generated by the movable platform 7 in real time.
Referring to fig. 2, a control and measurement flow chart of conical movement mainly comprises the following steps:
step S10: setting a preset conical motion of a Stewart moving platform;
step S20: according to the preset motion trail, calculating the lengths of six motion branched chains through position inverse solution;
step S30: controlling the servo motor to rotate through a motion controller;
step S40: the rotary motion is converted into telescopic motion of the motion branched chain through the ball screw, and the six motion branched chains drive the motion platform to move;
step S50: at the moment, the MEMS inclination sensor measures the conical motion of the movable platform in real time;
step S60: feeding back the encoder measurements to the driver and motion controller;
step S70: and according to the encoder, obtaining real leg length information, and solving the actual pose of the moving platform through a position orthographic solution model to obtain the actual conical motion around the Z axis.
Referring to fig. 6 and 7, experimental verification of the test results of the present invention and the conventional turntable is shown. The sensitivity deviation of the gyroscope and the inclinator output is only 0.2dB and 0.1dB different from the traditional turntable test result, and the conical motion test method based on the Stewart platform is well matched with the traditional turntable test method, so that the effectiveness of the method provided by the invention is proved. Compared with the traditional testing method, the conical motion generated by the Stewart platform provides inclination motion with two degrees of freedom, and multi-axial testing of the accelerometer, the gyroscope and the inclination output is completed without reinstallation; the conical point of conical movement generated by the Stewart platform can be flexibly adjusted according to the requirement, and the Stewart platform has better superiority.
The above detailed description is provided as a specific example of the method of the present invention and is not intended to limit the scope of the application of the present invention. A number of optimizations and improvements, equivalent modifications, etc. can be made by those skilled in the art based on the present invention. The scope of the invention should therefore be determined by the following claims.
Claims (3)
1. A conical motion testing method of an inclination angle sensor is characterized by comprising the following steps of: the method comprises the following steps: establishing a follow-up coordinate system, and controlling a servo motor to drive a branched chain to move through a motion controller to generate conical motion around a Z axis; calibrating spherical hinge coordinates, hooke hinge coordinates and initial offset kinematic parameters of the telescopic legs of the Stewart platform through a laser tracker, establishing an accurate position orthometric model of the Stewart platform, and eliminating the amplitude attenuation and phase lag effects of closed-loop response of a servo motor; then the MEMS inclination sensor is arranged on a movable platform, the actual conical motion track is calculated through a position forward solution model to be used as a reference measured value, and the measured value is compared with the measured value of the inclination sensor to finish the test and calibration of the MEMS inclination sensor; the Stewart platform generates conical motion around the Z axis, and the conical point is changed according to the requirement;
the method for generating conical motion around the Z axis by using the Stewart platform specifically comprises the following steps:
conical motion about the Z-axis is formed by rotating a vector OL in the XOY plane by an angle α, and OL rotates in the XOY plane at an angular velocity ω, describing the conical motion using the quaternion method:
the angular velocity of the conical motion about the Z axis is as follows:
establishing a follow-up coordinate system of the movable platform, so that the origin of the coordinate system coincides with the cone point of the conical movement; according to the position coordinates of the spherical hinge center in the dynamic platform coordinate system and the Hooke hinge center in the static platform coordinate system, calculating the length command of each telescopic leg in real time through the position inverse solution of the Stewart platform; the servo motor is controlled by the motion controller to drive the motion branched chain to extend or shorten, so as to drive the motion platform to generate conical motion around the Z axis;
the actual conical motion measuring method around the Z axis specifically comprises the following steps:
calibrating spherical hinge coordinates, hooke hinge coordinates and initial offset kinematic parameters of the telescopic legs of the Stewart platform by using a laser tracker, and establishing an accurate position orthometric model of the Stewart platform; acquiring encoder readings of each telescopic leg in real time to obtain real leg length information, and calculating the actual pose of the movable platform through a position orthographic model to obtain actual conical motion around a Z axis; eliminating the amplitude attenuation and phase lag effects of the closed loop frequency response of the servo motor;
the testing method of the MEMS inclination angle sensor based on the conical motion specifically comprises the following steps:
the MEMS inclination sensor is arranged on the upper surface of a movable platform of the Stewart platform, and the Stewart platform is controlled to generate a series of conical motions with different frequencies and angles; reading and calculating an actual conical motion track by an encoder through a position orthographic model to serve as a reference measurement value; comparing with the measured value of the inclination angle sensor, completing the test and calibration of the MEMS inclination angle sensor;
the MEMS inclination sensor consists of a triaxial accelerometer and a gyroscope and provides angular velocity and acceleration of the axial directions of three coordinate axes;
the sensitivity of the accelerometer with respect to the reference coordinate system of the tilt sensor is as follows:
wherein ,
and
Is the X and Y axis amplitude of the accelerometer under cone motion excitation;
the sensitivity of the gyroscope is:
wherein ,
and
X and Y axis amplitudes of the gyroscope under conical motion excitation;
sensitivity of the tilt sensor is determined by the roll angle
And pitch angle θ, the sensitivity of which is shown below:
wherein 
and
Is a tilting output +.>
Is set, is a constant value, and is a constant value.
2. The conical motion testing method of the inclination sensor according to claim 1, wherein the method comprises the following steps: the method for generating conical movement comprises the following steps:
step S10: setting a preset conical motion of a Stewart moving platform;
step S20: according to the preset motion trail, calculating the lengths of six motion branched chains through position inverse solution;
step S30: controlling the servo motor to rotate through a motion controller;
step S40: the rotary motion is converted into telescopic motion of the motion branched chain through the ball screw, and the six motion branched chains drive the motion platform to move;
step S50: at the moment, the MEMS inclination sensor measures the conical motion of the movable platform in real time;
step S60: feeding back the encoder measurements to the driver and motion controller;
step S70: and according to the encoder, obtaining real leg length information, and solving the actual pose of the moving platform through a position orthographic solution model to obtain the actual conical motion around the Z axis.
3. A conical motion testing apparatus for an inclination sensor for implementing the conical motion testing method of claim 1, wherein:
the device comprises: the device comprises a Hooke joint, a movable joint, a spherical joint, a lower branched chain, an upper branched chain, a static platform, a movable platform, an MEMS inclination sensor and a servo motor; the upper branched chain is connected with the lower branched chain through a movable joint, the upper branched chain is connected with the movable platform through a spherical hinge, and the lower branched chain is connected with the static platform through a hook hinge; the servo motor is arranged on the branched chain to drive the branched chain to move so as to drive the movable platform to move, so as to generate conical movement around the Z axis, and the conical point is changed according to the requirement; the MEMS inclination sensor is arranged on the movable platform and is used for measuring the conical motion generated by the movable platform in real time.
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| CN114427832B (en) * | 2021-12-17 | 2024-08-09 | 中国计量科学研究院 | Cone motion measurement method based on machine vision |
| CN114459734A (en) * | 2022-03-07 | 2022-05-10 | 中国科学院光电技术研究所 | Moving target simulator for precision measurement of photoelectric tracking system |
| CN115615459B (en) * | 2022-09-15 | 2024-08-27 | 中国计量科学研究院 | Dynamic testing method of MEMS inclination angle sensor based on conical movement |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102152307A (en) * | 2011-01-24 | 2011-08-17 | 西安交通大学 | Inclination-angle-constraint-based kinematic calibration method for Stewart parallel robot |
| CN104848818A (en) * | 2015-05-28 | 2015-08-19 | 中国工程物理研究院总体工程研究所 | Stewart platform attitude measurement device and measurement method |
| CN105241411A (en) * | 2015-09-30 | 2016-01-13 | 中国人民解放军军械工程学院 | Stewart platform supporting leg length-measuring apparatus, and Stewart platform pose-testing system and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152307A (en) * | 2011-01-24 | 2011-08-17 | 西安交通大学 | Inclination-angle-constraint-based kinematic calibration method for Stewart parallel robot |
| CN104848818A (en) * | 2015-05-28 | 2015-08-19 | 中国工程物理研究院总体工程研究所 | Stewart platform attitude measurement device and measurement method |
| CN105241411A (en) * | 2015-09-30 | 2016-01-13 | 中国人民解放军军械工程学院 | Stewart platform supporting leg length-measuring apparatus, and Stewart platform pose-testing system and method |
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