CN113048875A - Optical phase-shifting device - Google Patents
Optical phase-shifting device Download PDFInfo
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- CN113048875A CN113048875A CN202110267487.XA CN202110267487A CN113048875A CN 113048875 A CN113048875 A CN 113048875A CN 202110267487 A CN202110267487 A CN 202110267487A CN 113048875 A CN113048875 A CN 113048875A
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- fixing
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- fixed seat
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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Abstract
The invention discloses an optical phase-shifting device, comprising: the device comprises a fixed seat, a movable seat, a sealing plate, a light through hole, a first fixing device, a second fixing device, a buffer groove, a buffer device limiting column, a first buffer device, a movable block and a fixing device hole; the movable seat is connected to the bottom of the fixed seat through a plurality of second fixing devices, the sealing plate is installed at the top of the fixed seat through the first fixing devices, the position of the second fixing devices corresponding to the fixed seat is provided with the buffer groove, the two ends of the buffer groove are provided with the buffer device limiting columns, the first buffer devices are sleeved on the buffer device limiting columns, one end, close to the second fixing devices, of the first buffer devices is connected with the movable block, and the position of the first fixing devices corresponding to the fixed seat is provided with the fixing device holes. The device can improve the stability, the bearing capacity and the service life of the optical phase shifting device during movement.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to an optical phase-shifting device.
Background
With the development of optical measurement technology, the optical measurement technology is increasingly applied in the field of precision measurement, in particular to a phase-shifting interference technology in the optical measurement technology. Phase shifting interferometry is generally performed by adding phase shifters to the optical structure to perform pattern acquisition or phase recovery.
Chinese patent publication No. CN100494878 discloses a technical solution entitled multi-dimensional adjustable optical phase shifting apparatus, specifically, the solution employs three piezoelectric ceramics arranged in a triangle to drive phase shifting, and a guiding structure for displacement movement employs a suspension structure composed of a cylindrical pin and a movable joint bearing, the suspension structure generates tangential displacement during forward and backward movement, and due to the existence of friction and movement gap, the accuracy of the guiding structure is seriously reduced, and the suspension structure cannot be applied to an occasion with a higher requirement on tangential coupling, and the movable joint can shorten the service life of the whole optical phase shifting apparatus.
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention provides an optical phase shifter. The technical problem to be solved by the invention is realized by the following technical scheme:
an optical phase shifting device, the device comprising: the device comprises a fixed seat, a movable seat, a sealing plate, a light through hole, a first fixing device, a second fixing device, a buffer groove, a buffer device limiting column, a first buffer device, a movable block and a fixing device hole; the movable seat is connected to the bottom of the fixed seat through a plurality of second fixing devices, the sealing plate is installed at the top of the fixed seat through the first fixing devices, the position of the second fixing devices corresponding to the fixed seat is provided with the buffer groove, the two ends of the buffer groove are provided with the buffer device limiting columns, the first buffer device is sleeved on the buffer device limiting columns, one end, close to the second fixing devices, of the first buffer device is connected with the movable block, and the position of the first fixing devices corresponding to the fixed seat is provided with the fixing device holes.
In one embodiment of the present invention, the apparatus further comprises a mounting groove, a second buffer element, a third buffer element, a fixing sheet, a third fixing element, and a piezoelectric ceramic; the mounting groove is formed in the position of the second fixing device corresponding to the moving seat, the second buffer device is sleeved inside the mounting groove, the fixing piece is installed at the joint between the fixing seat and the moving seat through the third fixing device, the piezoelectric ceramic is inserted in the middle of the fixing piece, and the third buffer device is sleeved on the third fixing device, far away from one end of the sealing plate, of the fixing piece.
In one embodiment of the invention, the moving block comprises a clamping groove, a limiting sliding block and a limiting sliding groove; the middle of the moving block is provided with the clamping groove, the two ends of the moving block are provided with the limiting sliding blocks, and the limiting sliding grooves are formed in the positions, corresponding to the fixing seats, of the limiting sliding blocks.
The invention has the beneficial effects that:
according to the invention, the buffer groove is arranged, the buffer device limiting columns are arranged at the two ends of the buffer groove, the first buffer device is sleeved on the buffer device limiting columns, and the moving block is connected to one end, close to the second fixing device, of the first buffer device, so that the tangential force can be borne by the first buffer device, the stability of the moving seat during moving is improved, and the service life of the whole device is prolonged.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
FIG. 1 is a schematic diagram of an optical phase shifter according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a top view of an optical phase shifter according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an internal structure of an optical phase shifter according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a moving block according to an embodiment of the present invention;
in the figure: 1, fixing a base; 2, moving the seat; 3 a first fixing device; 4, sealing a plate; 5, a light through hole; 6 a second fixing device; 7 a buffer tank; 8 buffer element limiting column; 9 a first buffer element; 10 moving block; 11, limiting a sliding block; 12 card slots; 13 a fixed device aperture; 14, mounting grooves; 15 a second buffer element; 16 fixing sheets; 17 a third fixation device; 18 a third buffer element; 19 piezoelectric ceramics.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but the embodiments of the present invention are not limited thereto.
Examples
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of an optical phase shifting device according to an embodiment of the present invention, and fig. 2 is a schematic structural diagram of a top view of the optical phase shifting device according to the embodiment of the present invention, as can be seen from the above drawings, an optical phase shifting device according to the present invention includes: fixing base 1, remove seat 2, closing plate 4, logical unthreaded hole 5, first fixing device 3, second fixing device 6, dashpot 7, spacing post 8 of dashpot, first dashpot 9, movable block 10 and fixing device hole 13.
The movable seat 2 is connected to the bottom of the fixed seat 1 through a plurality of second fixing devices 6, the sealing plate 4 is installed on the top of the fixed seat 1 through the first fixing devices 3, the position of the second fixing devices 6 corresponding to the fixed seat 1 is provided with the buffer groove 7, two ends of the buffer groove 7 are provided with the buffer device limiting columns 8, the first buffer device 9 is sleeved on the buffer device limiting columns 8, one end, close to the second fixing devices 6, of the first buffer device 9 is connected with the movable block 10, and the position of the first fixing devices 3 corresponding to the fixed seat 1 is provided with the fixing device holes 13.
It should be noted that the number of the second fixing devices 6 is set by those skilled in the art according to the needs, and the invention is not limited thereto. The first fixing device 3 is used to fix the sealing plate 4 and the fixing seat 1 together, the second fixing device 6 is used to fix the movable seat 2 and the fixing seat 1 together, the fixing device may be a fixing bolt, etc., and the fixing device is not particularly limited in the present invention.
The first buffer device 9 is used for buffering tangential displacement of the moving seat 2, and the buffer device may be a buffer spring or the like. The buffer tank 7 is used for deploying the first buffer device 9; the buffer device limiter 8 is used for regulating and controlling the buffer range of the first buffer device 9; the displacement block 10 is used to connect the first damping means 9 and the second fixing means 6. The sealing plate 4 arranged at the top of the fixing seat 1 can cover the mounting hole, so that the fixing seat 1 is more attractive. The fixing device hole 13 is formed in the position of the first fixing device 3 corresponding to the fixing seat 1, and is used for installing and fixing the fixing seat 1.
According to the embodiment of the invention, when the movable base 2 moves, the tangential force can be borne by the first buffer device 9, so that the stability and the bearing capacity of the optical phase-shifting device during moving are improved.
Optionally, the light passing hole 5 is formed in the middle of the fixed seat 1, the movable seat 2 and the sealing plate 4, so that the optical phase shifting device can conveniently collect light.
Optionally, the device further comprises a mounting groove 14, a second buffer element 15, a third buffer element 18, a fixing sheet 16, a third fixing element 17 and a piezoelectric ceramic 19; the position of the second fixing device 6 corresponding to the movable seat 2 is provided with the mounting groove 14, the second buffer device is sleeved inside the mounting groove 14, the fixing plate 16 is mounted at the joint between the fixed seat 1 and the movable seat 2 through the third fixing device, the piezoelectric ceramic 19 is inserted in the middle of the fixing plate 16, and the third buffer device 18 is sleeved on the third fixing device 17 at one end, far away from the sealing plate 4, of the fixing plate 16.
Fig. 3 is a schematic structural diagram of an interior of an optical phase shifting apparatus according to an embodiment of the present invention. The third buffer means 18 can fasten the fixing plate 16 and buffer and bear the axial force when the movable base 2 moves, and similarly, the second buffer means 15 is used for buffering the axial displacement of the movable base 2 and bearing the axial force, thereby further improving the stability and the bearing capacity of the movable base 2 when moving. The second buffer element 15 may be a second buffer spring, and the third buffer element 18 may also be a third buffer spring, which is not limited in the present invention.
The mounting groove 14 is used for disposing the second buffer element 15, and the fixing piece 16 is used for fixing the fixing base 1, the movable base 2 and the piezoelectric ceramic. The third fixing device 17 may be a third fixing bolt or the like, and the present invention does not specifically limit the fixing device.
Optionally, the moving block 10 includes a slot 12, a limiting slide block 11 and a limiting chute; the middle of the moving block 10 is provided with the clamping groove 12, the two ends of the moving block 10 are provided with the limiting slide blocks, and the limiting slide grooves are formed in the positions, corresponding to the limiting slide blocks 11, of the fixed seats 1.
Fig. 4 is a schematic structural diagram of a moving block 10 according to an embodiment of the present invention, where the limiting slider 11 can slide in the limiting sliding groove, so as to limit the moving block 10.
Optionally, a circular hole is formed at a position of the piezoelectric ceramic 19 corresponding to the fixing piece 16, and a diameter of the circular hole is larger than a width of the piezoelectric ceramic 19.
The piezoelectric ceramic 19 is arranged between the fixed seat 1 and the movable seat 2, and when the diameter of the round hole is larger than the width of the piezoelectric ceramic 19, the piezoelectric ceramic 19 can be displaced at the round hole to a certain extent.
Compared with the mode that a suspension structure is formed by a cylindrical pin and a movable joint bearing to perform phase shifting in the prior art, the embodiment of the invention can effectively avoid the influence of friction force and movement clearance on the accuracy of the optical phase shifting device when the optical phase shifting device is displaced by combining the guide structures of the first buffer element 9, the second buffer element and the third buffer element 18, so that the optical phase shifting device can be suitable for occasions with higher requirements on tangential coupling degree, the displacement stability is improved, and the service life of the whole optical phase shifting device is prolonged.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by those skilled in the art.
While the present application has been described in connection with various embodiments, other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed application, from a review of the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other elements or steps, and the word "a" or "an" does not exclude a plurality. A single processor or other unit may fulfill the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (5)
1. An optical phase shifting device, comprising: the device comprises a fixed seat, a movable seat, a sealing plate, a light through hole, a first fixing device, a second fixing device, a buffer groove, a buffer device limiting column, a first buffer device, a movable block and a fixing device hole;
the movable seat is connected to the bottom of the fixed seat through a plurality of second fixing devices, the sealing plate is installed at the top of the fixed seat through the first fixing devices, the position of the second fixing devices corresponding to the fixed seat is provided with the buffer groove, the two ends of the buffer groove are provided with the buffer device limiting columns, the first buffer device is sleeved on the buffer device limiting columns, one end, close to the second fixing devices, of the first buffer device is connected with the movable block, and the position of the first fixing devices corresponding to the fixed seat is provided with the fixing device holes.
2. The apparatus of claim 1, further comprising a mounting groove, a second buffer member, a third buffer member, a fixing plate, a third fixing member, and a piezoelectric ceramic;
the mounting groove is formed in the position of the second fixing device corresponding to the moving seat, the second buffer device is sleeved inside the mounting groove, the fixing piece is installed at the joint between the fixing seat and the moving seat through the third fixing device, the piezoelectric ceramic is inserted in the middle of the fixing piece, and the third buffer device is sleeved on the third fixing device, far away from one end of the sealing plate, of the fixing piece.
3. The device according to claim 1, wherein the moving block comprises a clamping groove, a limiting slide block and a limiting sliding groove;
the middle of the moving block is provided with the clamping groove, the two ends of the moving block are provided with the limiting slide blocks, and the limiting slide grooves are formed in the positions, corresponding to the fixing seats, of the limiting slide blocks.
4. The device of claim 2, wherein a circular hole is formed at a position of the piezoelectric ceramic corresponding to the fixing piece, and the diameter of the circular hole is larger than the width of the piezoelectric ceramic.
5. The apparatus of claim 1, wherein the light passing hole is opened at a middle portion of the fixed seat, the movable seat and the sealing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110267487.XA CN113048875B (en) | 2021-03-11 | 2021-03-11 | Optical phase-shifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110267487.XA CN113048875B (en) | 2021-03-11 | 2021-03-11 | Optical phase-shifting device |
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| Publication Number | Publication Date |
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| CN113048875A true CN113048875A (en) | 2021-06-29 |
| CN113048875B CN113048875B (en) | 2022-06-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110267487.XA Active CN113048875B (en) | 2021-03-11 | 2021-03-11 | Optical phase-shifting device |
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| JP2005233301A (en) * | 2004-02-19 | 2005-09-02 | Koyo Seiko Co Ltd | Power transmission device |
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| CN105467581A (en) * | 2015-12-22 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical phase shift device with piezoelectric driving |
| CN111338038A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111854611A (en) * | 2020-08-10 | 2020-10-30 | 上海乾曜光学科技有限公司 | Flexible hinge phase shifter |
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| CN111879729A (en) * | 2020-08-10 | 2020-11-03 | 上海乾曜光学科技有限公司 | Flexible plate structure phase shifter |
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2021
- 2021-03-11 CN CN202110267487.XA patent/CN113048875B/en active Active
Patent Citations (9)
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| US5231468A (en) * | 1991-11-06 | 1993-07-27 | Eg&G Idaho, Inc. | Beam shuttering interferometer and method |
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| JP2005233301A (en) * | 2004-02-19 | 2005-09-02 | Koyo Seiko Co Ltd | Power transmission device |
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| CN105467581A (en) * | 2015-12-22 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical phase shift device with piezoelectric driving |
| CN111338038A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111854611A (en) * | 2020-08-10 | 2020-10-30 | 上海乾曜光学科技有限公司 | Flexible hinge phase shifter |
| CN111855616A (en) * | 2020-08-10 | 2020-10-30 | 上海乾曜光学科技有限公司 | Guide rail structure phase shifter |
| CN111879729A (en) * | 2020-08-10 | 2020-11-03 | 上海乾曜光学科技有限公司 | Flexible plate structure phase shifter |
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| CN113048875B (en) | 2022-06-24 |
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