CN113045046A - Semiconductor grinding wastewater treatment device and method - Google Patents
Semiconductor grinding wastewater treatment device and method Download PDFInfo
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- CN113045046A CN113045046A CN202110328461.1A CN202110328461A CN113045046A CN 113045046 A CN113045046 A CN 113045046A CN 202110328461 A CN202110328461 A CN 202110328461A CN 113045046 A CN113045046 A CN 113045046A
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0028—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions provided with antibacterial or antifungal means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
- B01D46/64—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series arranged concentrically or coaxially
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/91—Bacteria; Microorganisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/003—Downstream control, i.e. outlet monitoring, e.g. to check the treating agents, such as halogens or ozone, leaving the process
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/03—Pressure
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- Life Sciences & Earth Sciences (AREA)
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Abstract
The invention relates to a semiconductor grinding wastewater treatment device and a semiconductor grinding wastewater treatment method, which comprises a wastewater collection pool, a wastewater treatment tank, a pressure filter and a filter cake recovery device.
Description
Technical Field
The invention relates to the technical field of wastewater treatment equipment, in particular to a semiconductor grinding wastewater treatment device and method.
Background
As is well known, the semiconductor industry has become a high-value-added, high-tech industry beyond the conventional steel industry and automobile industry. The main production procedures of the semiconductor comprise: cleaning a silicon wafer, oxidizing/diffusing, chemical vapor deposition, photoetching, photoresist removing, dry etching, wet etching, ion implantation, metallization, chemical mechanical polishing and detection. Wherein, the grinding wastewater in the working procedures of grinding and the like can be discharged only by wastewater treatment.
For example, the patent publication "CN 103539278B" is named as: the invention discloses a crystal grinding wastewater treatment method and a crystal grinding wastewater treatment device, relates to the technical field of water treatment, and particularly relates to and discloses a crystal grinding wastewater treatment method which comprises the steps of primary filtration treatment by a grid, primary precipitation, secondary precipitation, ultrafiltration filtration treatment, ultrafiltration concentrated water circulation reflux treatment and the like. The invention also discloses a crystal grinding wastewater treatment device, which comprises a grid, a primary sedimentation tank, a secondary sedimentation tank, an ultrafiltration treatment device and a water production tank which are connected in sequence, wherein a raw water port of the ultrafiltration treatment device is connected with a water outlet of the secondary sedimentation tank, a water production port of the ultrafiltration treatment device is connected with a water inlet of the water production tank, and a concentrated water port of the ultrafiltration treatment device is connected with a water inlet of the primary sedimentation tank. The crystal grinding wastewater treatment method and the crystal grinding wastewater treatment device adopt the immersion type ultrafiltration treatment to treat the acidic wastewater into the acidic product water for direct recycling and application, do not need to adjust the pH value of the solution, greatly simplify the steps of treatment, recycling and utilization, save the cost, realize zero waste liquid discharge, and have the advantages of low membrane wire replacement frequency, low energy consumption, low cost and high economic benefit.
The existing crystal grinding wastewater treatment method and device find that the wastewater treatment is insufficient, no waste gas filtering device is provided, and recoverable substances in the wastewater are inconvenient to recover, so that the use limitation is high.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a semiconductor grinding wastewater treatment method which is convenient for recovering materials and has the function of waste gas treatment.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme: a semiconductor grinding wastewater treatment device comprises a wastewater collecting pool, a wastewater treatment tank, a pressure filter and a filter cake recovery device, wherein a water feeding device is arranged below one side of the wastewater collecting pool, one end of the water feeding device is connected with the wastewater collecting pool, the other end of the water feeding device is connected with the wastewater treatment tank, a stirring device is arranged above the wastewater treatment tank, one end above the wastewater treatment tank is provided with a first feed inlet, a connecting pipe is arranged below the wastewater treatment tank, the connecting pipe is connected with one end above the pressure filter, a liquid crystal control screen is arranged outside the pressure filter, the other end above the pressure filter is provided with a second feed inlet, one end below the pressure filter is provided with a solid discharge port, the other end below the pressure filter is provided with a first discharge pipe and a second discharge pipe, a water return device is arranged above one side of the wastewater collecting, one end of the water return device is connected with the wastewater collecting tank, the other end of the water return device is connected with the first discharge pipe, the filter cake recovery device is matched with the solid discharge port, the filter cake recovery device comprises a collection box, a pressure bearing table and an indicator, the indicator is arranged on the front face of the pressure bearing table, the collection box is arranged above the pressure bearing table, and the indicator is matched with the liquid crystal control screen.
In order to conveniently know whether the collecting box is full, the invention has the improvement that the pressure bearing table is provided with a pressure sensor, and the pressure sensor is connected with the indicator.
In order to conveniently detect whether the wastewater is qualified or not, the invention has the improvement that a sampling detector is arranged in the filter press and is connected with the liquid crystal control screen.
In order to facilitate the filtration of reaction waste gas, the invention improves that a waste gas treatment device is arranged at the other end above the waste water treatment tank, and the first feeding hole and the waste gas treatment device are arranged on the periphery of the stirring device.
In order to facilitate odor absorption and sterilization, the invention has the improvement that an active carbon filter screen, a silver fiber filter screen and a sterilizer are arranged in the waste gas treatment device, the sterilizer is arranged above the waste gas treatment device, and the active carbon filter screen is arranged on the periphery of the silver fiber filter screen.
The invention provides a semiconductor grinding wastewater treatment method, which comprises the following steps:
step 1, a water delivery device delivers wastewater in a wastewater collection tank into a wastewater treatment tank, a stirring device in the wastewater treatment tank stirs the wastewater, calcium salt is added through a first feed port, and the stirring device stirs the wastewater for 15min at a rotating speed of 450 r/min;
and 4, treating the full collecting box, placing the unfilled collecting box on the pressure bearing table, and continuously operating through the liquid crystal control screen control device to continuously treat the sewage.
(III) advantageous effects
Compared with the prior art, the invention provides a semiconductor grinding wastewater treatment method, which has the following beneficial effects:
this semiconductor grinding wastewater treatment method, the waste water in the waste water collecting tank is through the agitating unit stirring on the waste water treatment jar, the abundant reaction, the gas that the reaction produced filters through gas filtration device, ware body filter equipment conveniently carries out the peculiar smell absorption to waste gas, the disinfection of disinfecting, waste water after the reaction gets into the filter press and carries out the filter-pressing, conveniently press recoverable material into the filter cake and conveniently retrieve, detect through the sampling detector, liquid detection is qualified in the filter-pressing machine and discharges into the clean water basin from the second discharging pipe, liquid detection is unqualified in the filter-pressing machine returns the waste water collecting tank from first discharging pipe and carries out secondary wastewater treatment, the filter cake is retrieved through filter cake recovery unit, and.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a partially enlarged view of FIG. 1 according to the present invention;
FIG. 3 is a partial schematic view of the structure of the present invention.
In the figure: 1. a wastewater collection tank; 2. a wastewater treatment tank; 3. a filter press; 4. a filter cake recovery device; 5. a water delivery device; 6. a stirring device; 7. a first feed port; 8. an exhaust gas treatment device; 9. a connecting pipe; 10. a second feed port; 11. a solid discharge port; 12. a first discharge pipe; 13. a second discharge pipe; 14. a water return device; 15. a liquid crystal control screen; 16. a collection box; 17. a pressure bearing table; 18. an indicator; 19. a pressure sensor; 20. a sampling detector; 21. an active carbon filter screen; 22. a silver fiber filter screen; 23. a sterilizer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a semiconductor grinding wastewater treatment device comprises a wastewater collection pool 1, a wastewater treatment tank 2, a filter press 3 and a filter cake recovery device 4, wherein a water feeding device 5 is arranged below one side of the wastewater collection pool 1, one end of the water feeding device 5 is connected with the wastewater collection pool 1, the other end of the water feeding device 5 is connected with the wastewater treatment tank 2, a stirring device 6 is arranged above the wastewater treatment tank 2, a first feed inlet 7 is arranged at one end above the wastewater treatment tank 2, a connecting pipe 9 is arranged below the wastewater treatment tank 2, the connecting pipe 9 is connected with one end above the filter press 3, a liquid crystal control screen 15 is arranged outside the filter press 3, a second feed inlet 10 is arranged at the other end above the filter press 3, a solid discharge port 11 is arranged at one end below the filter press 3, a first discharge pipe 12 and a second discharge pipe 13 are arranged at the other end below the filter press 3, waste water collecting tank 1 one side top is provided with backwater device 14, backwater device 14 one end with waste water collecting tank 1 is connected, backwater device 14 other end with first discharging pipe 12 is connected, filter cake recovery unit 4 with solid discharge gate 11 phase-match, filter cake recovery unit 4 includes collecting box 16, pressure-bearing platform 17 and indicator 18, indicator 18 sets up pressure-bearing platform 17 is positive, the collecting box 16 sets up pressure-bearing platform 17 top, indicator 18 with liquid crystal control screen 15 phase-match.
In this embodiment, the pressure bearing table 17 is provided with a pressure sensor 19, and the pressure sensor 19 is connected with the indicator 18 to facilitate understanding whether the collecting box 16 is full.
In this embodiment, a sampling detector 20 is disposed in the filter press 3, and the sampling detector 20 is connected to the liquid crystal control screen 15, so as to detect whether the wastewater is qualified or not in order to facilitate the detection.
In this embodiment, waste water treatment tank 2 top other end is provided with exhaust treatment device 8, first feed inlet 7 and exhaust treatment device 8 set up stirring device 6 week side, for the convenience filter reaction waste gas.
In this embodiment, be provided with active carbon filter screen 21, silver fibre filter screen 22 and sterilizer 23 in the exhaust treatment device 8, sterilizer 23 sets up exhaust treatment device 8 top, active carbon filter screen 21 sets up silver fibre filter screen 22 week side, for the convenience absorb the peculiar smell and disinfect the disinfection.
The invention provides a semiconductor grinding wastewater treatment method, which comprises the following steps:
step 1, a water delivery device delivers wastewater in a wastewater collection tank into a wastewater treatment tank, a stirring device in the wastewater treatment tank stirs the wastewater, calcium salt is added through a first feed port, and the stirring device stirs the wastewater for 15min at a rotating speed of 450 r/min;
and 4, treating the full collecting box, placing the unfilled collecting box on the pressure bearing table, and continuously operating through the liquid crystal control screen control device to continuously treat the sewage.
The flocculant used in this example consists of the following parts by weight: deionized water 45, acrylamide 40, acrylic acid 8 and sodium hydroxide 7.
The design of the polymer property and structure is reflected, namely the selection and the dosage of the synthetic monomer; the improvement of the preparation process of the polymeric flocculant, namely the selection of the synthesis temperature, the synthesis time and the synthesis environment; and the aspects of the initiation system of the polymeric flocculant, the selection of the processing aid and the like are improved, so that the modified flocculant has better application effect and higher efficiency, and further the wastewater treatment efficiency is improved to ensure the water quality.
In conclusion, when the semiconductor grinding wastewater treatment device is used, semiconductor grinding wastewater collected by the wastewater collection pool 1 is sent to the wastewater treatment tank 2 through the water sending device 5, the wastewater treatment tank 2 is provided with the stirring device 6, the wastewater is uniformly stirred and fully reacted, waste gas generated in the reaction process is treated by the waste gas treatment device 8, the reacted wastewater is discharged into the filter press 3 for filter pressing, recoverable substances are formed into filter cakes and are discharged from the solid discharge port 11, the water after filter pressing is detected by the sampling detector 20 to be qualified, the water is discharged from the second discharge pipe 13 to be unqualified, the water is discharged from the first discharge pipe 12 and returns to the wastewater collection pool 1 through the water returning device 14 for secondary treatment, the filter cakes are collected in the collection box 16 of the collection device, and when the collection box 16 is full, the indicator 18 prompts workers to replace the new collection box 16 under the action of the pressure sensor 19, meanwhile, the indicator 18 transmits information to the liquid crystal control screen 15, the liquid crystal control screen 15 controls the filter press 3 to pause, and after the new collecting box 16 is replaced, the filter press continues to work under the control of staff.
The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a semiconductor grinds effluent treatment plant, includes waste water collecting pit (1), waste water treatment tank (2), pressure filter (3) and filter cake recovery unit (4), its characterized in that: a water delivery device (5) is arranged below one side of the wastewater collection pool (1), one end of the water delivery device (5) is connected with the wastewater collection pool (1), the other end of the water delivery device (5) is connected with the wastewater treatment tank (2), a stirring device (6) is arranged above the wastewater treatment tank (2), a first feed inlet (7) is arranged at one end above the wastewater treatment tank (2), a connecting pipe (9) is arranged below the wastewater treatment tank (2), the connecting pipe (9) is connected with one end above the filter press (3), a liquid crystal control screen (15) is arranged outside the filter press (3), a second feed inlet (10) is arranged at the other end above the filter press (3), a solid discharge port (11) is arranged at one end below the filter press (3), a first discharge pipe (12) and a second discharge pipe (13) are arranged at the other end below the filter press (3), waste water collecting tank (1) one side top is provided with backwater device (14), backwater device (14) one end with waste water collecting tank (1) is connected, backwater device (14) other end with first discharging pipe (12) are connected, filter cake recovery unit (4) with solid discharge gate (11) phase-match, filter cake recovery unit (4) are including collecting box (16), pressure-bearing platform (17) and indicator (18), indicator (18) set up pressure-bearing platform (17) are positive, collecting box (16) set up pressure-bearing platform (17) top, indicator (18) with liquid crystal control screen (15) phase-match.
2. The semiconductor grinding wastewater treatment device according to claim 1, wherein: the pressure bearing table (17) is provided with a pressure sensor (19), and the pressure sensor (19) is connected with the indicator (18).
3. The semiconductor grinding wastewater treatment device according to claim 1, wherein: and a sampling detector (20) is arranged in the filter press (3), and the sampling detector (20) is connected with the liquid crystal control screen (15).
4. The semiconductor grinding wastewater treatment device according to claim 1, wherein: the other end of the upper part of the wastewater treatment tank (2) is provided with a waste gas treatment device (8), and the first feed inlet (7) and the waste gas treatment device (8) are arranged on the periphery side of the stirring device (6).
5. The semiconductor grinding wastewater treatment device according to claim 4, wherein: be provided with active carbon filter screen (21), silver fibre filter screen (22) and sterilizer (23) in exhaust treatment device (8), sterilizer (23) set up exhaust treatment device (8) top, active carbon filter screen (21) set up silver fibre filter screen (22) week side.
6. A semiconductor grinding wastewater treatment method is characterized by comprising the following steps:
step 1, a water delivery device delivers wastewater in a wastewater collection tank into a wastewater treatment tank, a stirring device in the wastewater treatment tank stirs the wastewater, calcium salt is added through a first feed port, and the stirring device stirs the wastewater for 15min at a rotating speed of 450 r/min;
step 2, arranging an electromagnetic valve on the connecting pipe, controlling the electromagnetic valve to be opened by the liquid crystal control screen after the wastewater treatment tank is uniformly stirred, enabling the uniformly stirred wastewater to enter a filter press, putting a flocculating agent into a second feeding hole, pressing impurities in the ground wastewater into a filter cake and discharging the filter cake from a solid discharge hole, detecting the water in the filter press by a sampling detector to be qualified, discharging the water to a clean water tank by a second discharge pipe, detecting the water to be unqualified, and starting a water return device to enable the water in the filter press to return to a sewage treatment tank for secondary treatment;
step 3, enabling the filter cake to enter a collecting box of the filter cake recovery device, wherein the collecting box is arranged above a pressure bearing table, a pressure sensor is arranged on the pressure bearing table, when the collecting box is full, the gravity reaches the threshold value of the pressure sensor, the pressure sensor transmits information to an indicator, the indicator gives out a prompt, the indicator transmits the information to a liquid crystal control screen, and the press machine stops working;
and 4, treating the full collecting box, placing the unfilled collecting box on the pressure bearing table, and continuously operating through the liquid crystal control screen control device to continuously treat the sewage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110328461.1A CN113045046A (en) | 2021-03-26 | 2021-03-26 | Semiconductor grinding wastewater treatment device and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110328461.1A CN113045046A (en) | 2021-03-26 | 2021-03-26 | Semiconductor grinding wastewater treatment device and method |
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| CN113045046A true CN113045046A (en) | 2021-06-29 |
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| CN202110328461.1A Pending CN113045046A (en) | 2021-03-26 | 2021-03-26 | Semiconductor grinding wastewater treatment device and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115432849A (en) * | 2022-08-15 | 2022-12-06 | 苏州市创联净化设备有限公司 | Semiconductor wastewater treatment equipment and treatment process thereof |
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| US6413417B1 (en) * | 1999-01-28 | 2002-07-02 | Sharp Kabushiki Kaisha | Waste water treatment apparatus |
| CN208234672U (en) * | 2018-03-09 | 2018-12-14 | 泉州运城制版有限公司 | Grinding water self-loopa utilizes Zero discharging system |
| CN110194540A (en) * | 2019-05-22 | 2019-09-03 | 陈思宇 | A kind of chemical engineering sewage and exhaust gas purification and treatment device |
| CN210506015U (en) * | 2019-08-07 | 2020-05-12 | 北京亦盛精密半导体有限公司 | Semiconductor material grinding wastewater sludge treatment system |
| CN212700712U (en) * | 2020-07-10 | 2021-03-16 | 青岛中恒能瑞华环保设备有限公司 | Small plate-and-frame filter press |
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2021
- 2021-03-26 CN CN202110328461.1A patent/CN113045046A/en active Pending
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| US6413417B1 (en) * | 1999-01-28 | 2002-07-02 | Sharp Kabushiki Kaisha | Waste water treatment apparatus |
| CN208234672U (en) * | 2018-03-09 | 2018-12-14 | 泉州运城制版有限公司 | Grinding water self-loopa utilizes Zero discharging system |
| CN110194540A (en) * | 2019-05-22 | 2019-09-03 | 陈思宇 | A kind of chemical engineering sewage and exhaust gas purification and treatment device |
| CN210506015U (en) * | 2019-08-07 | 2020-05-12 | 北京亦盛精密半导体有限公司 | Semiconductor material grinding wastewater sludge treatment system |
| CN212700712U (en) * | 2020-07-10 | 2021-03-16 | 青岛中恒能瑞华环保设备有限公司 | Small plate-and-frame filter press |
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| Title |
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| 中国石油天然气总公司编: "《石油底面工程设计手册》", 31 October 1995, 石油大学出版社 * |
| 王启广等: "《选煤机械》", 8 February 2009, 中国矿业大学出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115432849A (en) * | 2022-08-15 | 2022-12-06 | 苏州市创联净化设备有限公司 | Semiconductor wastewater treatment equipment and treatment process thereof |
| CN115432849B (en) * | 2022-08-15 | 2023-10-17 | 苏州市创联净化设备有限公司 | Semiconductor wastewater treatment equipment and treatment process thereof |
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