CN113042160A - Getter applied to extreme ultraviolet equipment and preparation device - Google Patents
Getter applied to extreme ultraviolet equipment and preparation device Download PDFInfo
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- CN113042160A CN113042160A CN202110258757.0A CN202110258757A CN113042160A CN 113042160 A CN113042160 A CN 113042160A CN 202110258757 A CN202110258757 A CN 202110258757A CN 113042160 A CN113042160 A CN 113042160A
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- fixedly connected
- shell
- getter
- fixed connection
- extreme ultraviolet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C17/00—Disintegrating by tumbling mills, i.e. mills having a container charged with the material to be disintegrated with or without special disintegrating members such as pebbles or balls
- B02C17/10—Disintegrating by tumbling mills, i.e. mills having a container charged with the material to be disintegrated with or without special disintegrating members such as pebbles or balls with one or a few disintegrating members arranged in the container
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/0203—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising compounds of metals not provided for in B01J20/04
- B01J20/0274—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising compounds of metals not provided for in B01J20/04 characterised by the type of anion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
- B01J20/08—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04 comprising aluminium oxide or hydroxide; comprising bauxite
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/103—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate comprising silica
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C17/00—Disintegrating by tumbling mills, i.e. mills having a container charged with the material to be disintegrated with or without special disintegrating members such as pebbles or balls
- B02C17/18—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C23/00—Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
- B02C23/08—Separating or sorting of material, associated with crushing or disintegrating
- B02C23/10—Separating or sorting of material, associated with crushing or disintegrating with separator arranged in discharge path of crushing or disintegrating zone
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
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- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Crushing And Grinding (AREA)
Abstract
The invention discloses a getter applied to extreme ultraviolet equipment and a preparation device thereofA section of thick bamboo fixed connection, stopper and damping spring fixed connection, inner tube and stopper fixed connection, ball-milling mechanism rotates with the inner tube to be connected, actuating mechanism and shell fixed connection, actuating mechanism and ball-milling mechanism fixed connection, shock pad and baffle fixed connection, dead lever and shock pad fixed connection, outer lane and dead lever fixed connection, steel ball and outer lane sliding connection, inner circle and steel ball fixed connection, inner circle and ball-milling mechanism fixed connection, screening mechanism and shell fixed connection, it is Si to make the granule composition3N4、Si、SiO2、Al2O3C, Mo, Zr, V, Fe, Ti and rare earth, the particle size of the getter is 1-1000nm, and the problem of poor stability of the getter preparation device applied to extreme ultraviolet equipment is solved.
Description
Technical Field
The invention relates to the technical field of getters, in particular to a getter applied to extreme ultraviolet equipment and a preparation device.
Background
The getter technology has the characteristics of economy, simplicity, convenience, effectiveness, durability and the like for obtaining good vacuum atmosphere in a tube, and the vibration generated by a grinding mechanism influences the working stability of the getter preparation device applied to the extreme ultraviolet equipment when the existing getter preparation device applied to the extreme ultraviolet equipment grinds the getter.
Disclosure of Invention
The invention aims to provide a getter applied to extreme ultraviolet equipment and a preparation device thereof, and aims to solve the problem of poor stability of the getter preparation device applied to the extreme ultraviolet equipment.
To achieve the above object, in a first aspect, the present invention provides a getter applied to an extreme ultraviolet device, comprising:
the particle components of the getter applied to the extreme ultraviolet equipment are as follows: si3N4、Si、SiO2、Al2O3C, Mo, Zr, V, Fe, Ti and rare earth, wherein the particle size of the getter applied to the extreme ultraviolet equipment is 1-1000 nm.
In a second aspect, the invention provides a getter preparation device applied to extreme ultraviolet equipment, which comprises a shell, four supporting legs, a partition plate, a stirring mechanism, two outer cylinders, two damping springs, two limiting blocks, two inner cylinders, a ball milling mechanism, a driving mechanism, a damping pad, a fixed rod, an outer ring, a plurality of steel balls, an inner ring and a screening mechanism, wherein the four supporting legs are respectively and fixedly connected with the shell and are all positioned at one side of the shell, the shell is provided with a feed inlet and a discharge outlet, the feed inlet is positioned at one side far away from the supporting legs, the discharge outlet is positioned at one side close to the supporting legs, the partition plate is fixedly connected with the shell and positioned in the shell, the partition plate is provided with a discharge outlet, the stirring mechanism is fixedly connected with the partition plate and penetrates through the partition plate, the two outer cylinders are respectively and fixedly, the damping device is characterized in that the damping device is positioned in the shell, the two damping springs are respectively fixedly connected with the two outer barrels and are positioned in the outer barrels, the two limiting blocks are respectively fixedly connected with the two damping springs and are positioned in the outer barrels, the two inner barrels are respectively fixedly connected with the two limiting blocks and are positioned outside the outer barrels, two sides of the ball milling mechanism are respectively rotatably connected with the two inner barrels and are positioned between the two inner barrels, one side of the driving mechanism is fixedly connected with the shell and is positioned in the shell, the other side of the driving mechanism is fixedly connected with the ball milling mechanism and is positioned around the ball milling mechanism, the damping pad is fixedly connected with the clapboard and is positioned at one side close to the ball milling mechanism, the fixed rod is fixedly connected with the other side of the damping pad, and the outer ring is fixedly connected with the other side of the fixed rod, the screening mechanism is fixedly connected with the shell and is positioned inside the outer ring.
Wherein, rabbling mechanism includes first motor, first pivot and stirring fan blade, first motor with baffle fixed connection to be located and be close to one side of ball-milling mechanism, first pivot with first motor output fixed connection, and run through the baffle, stirring fan blade with the opposite side fixed connection of first pivot.
The stirring mechanism further comprises a scraper, and the scraper is fixedly connected with the first rotating shaft and is positioned on the outer side wall of the first rotating shaft.
The ball milling mechanism comprises a shell, a ball milling mechanism, a driving mechanism, a ball milling mechanism and a ball milling mechanism, wherein the driving mechanism comprises a second motor, a second rotating shaft, a first gear and a second gear, the second motor is fixedly connected with the shell and is positioned inside the shell, the second rotating shaft is fixedly connected with an output end of the second motor, the first gear is fixedly connected with the other side of the second rotating shaft, the second gear is fixedly connected with the ball milling mechanism and is positioned around the ball milling mechanism, and the first gear is meshed with the second gear.
The getter preparation device applied to the extreme ultraviolet equipment further comprises a dust suppression cover and a finished product box, wherein the dust suppression cover is detachably connected with the shell and is positioned at the discharge port, and the finished product box is detachably connected with the dust suppression cover and is positioned on one side far away from the shell.
The getter preparation device applied to the extreme ultraviolet equipment further comprises a sealing ring, wherein the sealing ring is fixedly connected with the dust suppression cover and is positioned between the dust suppression cover and the shell.
The invention relates to a getter applied to extreme ultraviolet equipment and a preparation device thereof, wherein four supporting legs are respectively and fixedly connected with a shell and are all positioned at one side of the shell, the shell is provided with a feed inlet and a discharge outlet, the feed inlet is positioned at one side far away from the supporting legs, the discharge outlet is positioned at one side close to the supporting legs, a partition plate is fixedly connected with the shell and positioned in the shell, the partition plate is provided with a discharge outlet, a stirring mechanism is fixedly connected with the partition plate and penetrates through the partition plate, two outer cylinders are respectively and fixedly connected with the shell and are both positioned in the shell, two damping springs are respectively and fixedly connected with two outer cylinders and are both positioned in the outer cylinders, two limiting blocks are respectively and fixedly connected with the two damping springs and are both positioned in the outer cylinders, and two inner cylinders are respectively and fixedly connected with the two limiting blocks, the ball milling mechanism is characterized in that the ball milling mechanism is arranged outside the outer barrel, two sides of the ball milling mechanism are respectively connected with the two inner barrels in a rotating manner and are arranged between the two inner barrels, one side of the driving mechanism is fixedly connected with the shell and is arranged inside the shell, the other side of the driving mechanism is fixedly connected with the ball milling mechanism and is arranged around the ball milling mechanism, the shock pad is fixedly connected with the partition plate and is arranged at one side close to the ball milling mechanism, the fixed rod is fixedly connected with the other side of the shock pad, the outer ring is fixedly connected with the other side of the fixed rod, a plurality of steel balls are respectively connected with the outer ring in a sliding manner and are arranged at the inner side of the outer ring, one side of the inner ring is fixedly connected with the plurality of steel balls and is arranged at one side far away from the outer ring, and the screening mechanism is fixedly connected with the shell and is positioned in the outer ring, so that the problem of poor stability of the getter preparation device applied to the extreme ultraviolet equipment is solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a cross-sectional view of a getter preparation apparatus applied to an extreme ultraviolet device;
FIG. 2 is a schematic structural diagram of the outer ring, the steel balls, the inner ring and the ball milling mechanism.
1-shell, 2-supporting legs, 3-feeding port, 4-discharging port, 5-clapboard, 6-stirring mechanism, 7-outer cylinder, 8-damping spring, 9-limiting block, 10-inner cylinder, 11-ball milling mechanism, 12-damping pad, 13-fixing rod, 14-outer ring, 15-steel ball, 16-inner ring, 17-screening mechanism, 18-driving mechanism, 19-first motor, 20-first rotating shaft, 21-stirring fan blade, 22-scraper, 23-second motor, 24-second rotating shaft, 25-first gear, 26-second gear, 27-dust suppression cover, 28-finished product box, 29-sealing ring, 30-sealing cover, 31-anti-slip ring and 32-discharge opening.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like refer to the orientation or positional relationship as shown in the drawings, which is for convenience of description and simplicity of description, and does not indicate or imply that the referenced device or element must be constructed and operated in a particular orientation or orientation, and thus, is not to be construed as limiting the present invention. In addition, in the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In a first aspect, the present invention provides a getter for use in an extreme ultraviolet device, comprising:
the particle components of the getter applied to the extreme ultraviolet equipment are as follows: si3N4、Si、SiO2、Al2O3C, Mo, Zr, V, Fe, Ti and rare earth, wherein the particle size of the getter applied to the extreme ultraviolet equipment is 1-1000 nm.
The getter applied to the extreme ultraviolet equipment is dispersed powder, needs to be activated for 30min at 400 ℃, and has an initial gas suction rate higher than 300ml/cm2. The air suction amount is more than 0.2Pa x L/cm2. The getter applied to the extreme ultraviolet device can also show the air suction capability and the removal effect on suspended micro-particles in a vacuum environment without activation.
Referring to fig. 1 to 2, in a second aspect, the present invention provides a getter preparation apparatus applied to an extreme ultraviolet device, including a housing 1, four support legs 2, a partition plate 5, a stirring mechanism 6, two outer cylinders 7, two damping springs 8, two limiting blocks 9, two inner cylinders 10, a ball milling mechanism 11, a driving mechanism 18, a damping pad 12, a fixing rod 13, an outer ring 14, a plurality of steel balls 15, an inner ring 16, and a sieving mechanism 17, wherein the four support legs 2 are respectively and fixedly connected to the housing 1, and are all located at one side of the housing 1, the housing 1 has a feed inlet 3 and a discharge outlet 4, the feed inlet 3 is located at one side far away from the support legs 2, the discharge outlet 4 is located at one side near the support legs 2, the partition plate 5 is fixedly connected to the housing 1 and is located inside the housing 1, the partition plate 5 has a discharge outlet 32, the stirring mechanism 6 is fixedly connected with the partition plate 5 and penetrates through the partition plate 5, the two outer cylinders 7 are respectively fixedly connected with the shell 1 and are positioned inside the shell 1, the two damping springs 8 are respectively fixedly connected with the two outer cylinders 7 and are positioned inside the outer cylinders 7, the two limit blocks 9 are respectively fixedly connected with the two damping springs 8 and are positioned inside the outer cylinders 7, the two inner cylinders 10 are respectively fixedly connected with the two limit blocks 9 and are positioned outside the outer cylinders 7, two sides of the ball milling mechanism 11 are respectively rotatably connected with the two inner cylinders 10 and are positioned between the two inner cylinders 10, one side of the driving mechanism 18 is fixedly connected with the shell 1 and is positioned inside the shell 1, and the other side of the driving mechanism 18 is fixedly connected with the ball milling mechanism 11, and be located ball-milling mechanism 11 is all around, shock pad 12 with baffle 5 fixed connection to be located and be close to one side of ball-milling mechanism 11, dead lever 13 with the opposite side fixed connection of shock pad 12, outer lane 14 with the opposite side fixed connection of dead lever 13, it is a plurality of steel ball 15 respectively with 14 sliding connection in outer lane all is located 14 inboard in the outer lane, one side and a plurality of 16 in the inner circle 15 fixed connection to be located and keeping away from one side of outer lane 14, 16 in the opposite side in the inner circle 16 with ball-milling mechanism 11 fixed connection, and be located ball-milling mechanism 11 is all around, screening mechanism 17 with shell 1 fixed connection all is located inside outer lane 14.
In this embodiment, firstly, the configured raw materials are poured onto the partition plate 5 in the housing 1 through the feed port 3, the stirring mechanism 6 stirs the configured raw materials until the configured raw materials are uniformly mixed, the mixed raw materials flow into the ball milling mechanism 11 from the discharge port 32 on the partition plate 5, the driving mechanism 18 drives the ball milling mechanism 11 to rotate to grind the raw materials, the ground raw materials flow into the sieving mechanism 17 to sieve the raw materials, the sieved semi-finished product is discharged from the discharge port 4 of the housing 1, the semi-finished product is poured onto the partition plate 5 on the housing 1 through the feed port 3 again, the other raw materials are added to the semi-finished product for secondary configuration, the stirring mechanism 6 stirs the semi-finished product and the other raw materials until the semi-finished product and the other raw materials are uniformly mixed, and the ball mill grinds the mixed semi-finished product and the other raw materials, the screening mechanism 17 screens the ground semi-finished product and other raw materials, the screened finished product is discharged from the discharge port 4 of the housing 1, the ground finished product is mainly in powder form, and can also be pressed and sintered into other shapes, such as ring shape, disk shape, and sheet shape, etc., when the ball milling mechanism 11 works, the vibration generated is transmitted to the damping spring 8 inside the outer cylinder 7 through the inner cylinder 10 connected with the damping spring 8 via the limiting block 9, the vibration is absorbed and damped by the damping spring 8, the steel balls 15 on the inner ring 16 around the ball milling mechanism 11 slide inside the outer ring 14 along the rotation direction when the ball milling mechanism 11 rotates, the fixing rod 13 connected with the outer ring 14 shares the pressure of the outer ring 14 generated by the gravity of the ball milling mechanism 11 to the partition plate 5, for the inner tube 10 shares the gravity of the ball milling mechanism 11, the fixed rod 13 and the shock pad 12 between the partition plates 5 can absorb shock to the shock received by the fixed rod 13, so that the shock generated during the working of the ball milling mechanism 11 is prevented from influencing the stability of other mechanisms, and the problem of poor stability of a getter preparation device applied to extreme ultraviolet equipment is solved.
Further, rabbling mechanism 6 includes first motor 19, first pivot 20 and stirring fan blade 21, first motor 19 with baffle 5 fixed connection to be located and be close to one side of ball-milling mechanism 11, first pivot 20 with first motor 19 output fixed connection, and run through baffle 5, stirring fan blade 21 with the opposite side fixed connection of first pivot 20.
In this embodiment, the first motor 19 drives the first rotating shaft 20 to drive the stirring blades 21 to stir the proportioned raw materials on the partition board 5 until the raw materials are uniformly mixed.
Further, the stirring mechanism 6 further includes a scraper 22, and the scraper 22 is fixedly connected to the first rotating shaft 20 and is located on an outer side wall of the first rotating shaft 20.
In the present embodiment, in order to avoid the raw material from remaining on the partition plate 5 when flowing into the ball milling mechanism 11, the scraper 22 is provided on the outer side wall of the first rotating shaft 20, and the scraper 22 scrapes the raw material on the partition plate 5 toward the discharge opening 32 on the partition plate 5 when rotating along with the first rotating shaft 20.
Further, the driving mechanism 18 includes a second motor 23, a second rotating shaft 24, a first gear 25 and a second gear 26, the second motor 23 is fixedly connected to the housing 1 and is located inside the housing 1, the second rotating shaft 24 is fixedly connected to an output end of the second motor 23, the first gear 25 is fixedly connected to the other side of the second rotating shaft 24, the second gear 26 is fixedly connected to the ball milling mechanism 11 and is located around the ball milling mechanism 11, and the first gear 25 is engaged with the second gear 26.
In this embodiment, the second motor 23 drives the second rotating shaft 24 to rotate the first gear 25, and when the first gear 25 rotates, the second gear 26 engaged with the first gear is driven to rotate, so as to drive the ball milling mechanism 11 on the second gear 26 to rotate.
Further, the getter preparation device applied to the extreme ultraviolet equipment further comprises a dust suppression cover 27 and a finished product box 28, wherein the dust suppression cover 27 is detachably connected with the shell 1 and is positioned at the discharge hole 4, and the finished product box 28 is detachably connected with the dust suppression cover 27 and is positioned at one side far away from the shell 1.
In the present embodiment, the finished product discharged from the discharge port 4 flows into the finished product box 28, and the dust suppressing cover 27 is provided on the finished product box 28 in order to prevent the finished product from floating in the air from the box and affecting the indoor environment.
Further, the getter preparation device applied to the extreme ultraviolet equipment further comprises a sealing ring 29, and the sealing ring 29 is fixedly connected with the dust suppression cover 27 and is positioned between the dust suppression cover 27 and the shell 1.
In the present embodiment, the sealing ring 29 is provided between the housing 1 and the dust control cover 27 in order to prevent a finished product from splashing out of a gap between the housing 1 and the dust control cover 27 and affecting an indoor environment.
Further, the getter preparation device applied to the extreme ultraviolet equipment further comprises a sealing cover 30, wherein the sealing cover 30 is detachably connected with the housing 1 and is positioned at the feed port 3.
In the present embodiment, the sealing cap 30 is provided at the discharge port 4 in order to prevent the raw material from being splashed out of the discharge port 4 by the stirring mechanism 6 during the stirring.
Further, the getter preparation device applied to the extreme ultraviolet equipment further comprises an anti-slip ring 31, wherein the anti-slip ring 31 is fixedly connected with the sealing cover 30 and is positioned around the sealing cover 30.
In the present embodiment, in order to avoid the difficulty in applying force to the sealing cover 30 due to the excessively smooth force applying surface, the anti-slip ring 31 is disposed around the sealing cover 30, and the anti-slip ring 31 increases the friction force with the sealing cover 30.
The invention relates to a getter preparation device applied to extreme ultraviolet equipment, which comprises the steps of firstly pouring prepared raw materials onto a partition plate 5 in a shell 1 through a feed port 3, stirring the prepared raw materials by a stirring mechanism 6 until the raw materials are uniformly mixed, allowing the mixed raw materials to flow into a ball milling mechanism 11 from a discharge port 32 on the partition plate 5, driving the ball milling mechanism 11 to rotate by a driving mechanism 18 to grind the raw materials, allowing the ground raw materials to flow into a screening mechanism 17 to screen the raw materials, discharging screened semi-finished products from a discharge port 4 of the shell 1, pouring the semi-finished products onto the partition plate 5 on the shell 1 through the feed port 3 again, adding other raw materials into the semi-finished products for secondary preparation, and stirring the semi-finished products and the other raw materials by the stirring mechanism 6 until the semi-finished products and the other raw materials are uniformly mixed, the ball mill grinds the mixed semi-finished product and other raw materials, the screening mechanism 17 screens the ground semi-finished product and other raw materials, the screened finished product is discharged from the discharge port 4 of the housing 1, the ground finished product is mainly in powder form, and can be pressed and sintered into other shapes, such as rings, discs, sheets, and the like, when the ball milling mechanism 11 works, the vibration generated by the ball milling mechanism 11 is transmitted to the damping spring 8 inside the outer cylinder 7 through the inner cylinder 10 connected with the ball milling mechanism via the limiting block 9, the damping spring 8 absorbs the vibration for damping, the steel balls 15 on the inner ring 16 around the ball milling mechanism 11 slide inside the outer ring 14 along the rotation direction when the ball milling mechanism 11 rotates, the fixing rod 13 connected with the outer ring 14 shares the pressure of the outer ring 14 generated by the gravity of the ball milling mechanism 11 to the partition plate 5, for the inner tube 10 shares the gravity of ball-milling mechanism 11 self, the fixed plate with shock pad 12 between baffle 5 can be right the vibrations that dead lever 13 received carry out the shock attenuation, avoid ball-milling mechanism 11 produced vibrations influence the stability of other mechanisms during operation, solved the relatively poor problem of getter preparation facilities stability of being applied to extreme ultraviolet equipment.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. A getter for use in an extreme ultraviolet device, comprising:
the particle components of the getter applied to the extreme ultraviolet equipment are as follows: si3N4、Si、SiO2、Al2O3C, Mo, Zr, V, Fe, Ti and rare earth, wherein the particle size of the getter applied to the extreme ultraviolet equipment is 1-1000 nm.
2. A getter preparation device applied to extreme ultraviolet equipment, which is applied to preparing the getter applied to extreme ultraviolet equipment as claimed in claim 1, and is characterized by comprising a shell, four supporting legs, a partition plate, a stirring mechanism, two outer cylinders, two damping springs, two limit blocks, two inner cylinders, a ball milling mechanism, a driving mechanism, a damping pad, a fixed rod, an outer ring, a plurality of steel balls, an inner ring and a screening mechanism, wherein the four supporting legs are respectively and fixedly connected with the shell and are positioned at one side of the shell, the shell is provided with a feeding hole and a discharging hole, the feeding hole is positioned at one side far away from the supporting legs, the discharging hole is positioned at one side close to the supporting legs, the partition plate is fixedly connected with the shell and is positioned in the shell, the partition plate is provided with a discharging hole, and the stirring mechanism is fixedly connected with the, and penetrates through the partition board, the two outer cylinders are respectively and fixedly connected with the shell and are positioned in the shell, the two damping springs are respectively and fixedly connected with the two outer cylinders and are positioned in the outer cylinders, the two limiting blocks are respectively and fixedly connected with the two damping springs and are positioned in the outer cylinders, the two inner cylinders are respectively and fixedly connected with the two limiting blocks and are positioned outside the outer cylinders, two sides of the ball milling mechanism are respectively and rotatably connected with the two inner cylinders and are positioned between the two inner cylinders, one side of the driving mechanism is fixedly connected with the shell and is positioned in the shell, the other side of the driving mechanism is fixedly connected with the ball milling mechanism and is positioned around the ball milling mechanism, the damping pad is fixedly connected with the partition board and is positioned at one side close to the ball milling mechanism, the dead lever with the opposite side fixed connection of shock pad, the outer lane with the opposite side fixed connection of dead lever, it is a plurality of the steel ball respectively with outer lane sliding connection all is located the outer lane is inboard, one side of inner circle and a plurality of steel ball fixed connection to be located and keep away from one side of outer lane, the opposite side of inner circle with ball-milling mechanism fixed connection, and be located ball-milling mechanism is all around, sift the mechanism with shell fixed connection all is located inside the outer lane.
3. The device for preparing the getter applied to the extreme ultraviolet equipment as claimed in claim 2, wherein the stirring mechanism comprises a first motor, a first rotating shaft and stirring blades, the first motor is fixedly connected with the partition plate and is positioned at one side close to the ball milling mechanism, the first rotating shaft is fixedly connected with the output end of the first motor and penetrates through the partition plate, and the stirring blades are fixedly connected with the other side of the first rotating shaft.
4. The device for preparing the getter applied to the extreme ultraviolet equipment in claim 3, wherein the stirring mechanism further comprises a scraper fixedly connected with the first rotating shaft and positioned on the outer side wall of the first rotating shaft.
5. The getter preparation device as claimed in claim 2, wherein the driving mechanism comprises a second motor, a second rotating shaft, a first gear and a second gear, the second motor is fixedly connected to the housing and located inside the housing, the second rotating shaft is fixedly connected to an output end of the second motor, the first gear is fixedly connected to the other side of the second rotating shaft, the second gear is fixedly connected to the ball milling mechanism and located around the ball milling mechanism, and the first gear is engaged with the second gear.
6. The getter preparation device applied to the extreme ultraviolet equipment as recited in claim 2, further comprising a dust suppression cover and a finished product box, wherein the dust suppression cover is detachably connected with the housing and is positioned at the discharge port, and the finished product box is detachably connected with the dust suppression cover and is positioned at a side far away from the housing.
7. The getter preparation device applied to the extreme ultraviolet equipment as recited in claim 6, further comprising a sealing ring, wherein the sealing ring is fixedly connected with the dust suppression cover and is located between the dust suppression cover and the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110258757.0A CN113042160A (en) | 2021-03-10 | 2021-03-10 | Getter applied to extreme ultraviolet equipment and preparation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110258757.0A CN113042160A (en) | 2021-03-10 | 2021-03-10 | Getter applied to extreme ultraviolet equipment and preparation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113042160A true CN113042160A (en) | 2021-06-29 |
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| CN112044545A (en) * | 2020-09-03 | 2020-12-08 | 苏州仁尔必思电子科技有限公司 | Recovery unit is smashed to waste paper for environmental protection |
| CN112295684A (en) * | 2020-09-30 | 2021-02-02 | 邱敏 | Traditional chinese medicine raw materials smashes sieving mechanism |
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| CN103131410A (en) * | 2005-04-01 | 2013-06-05 | 三菱化学株式会社 | Alloy powder for raw material of inorganic functional material and phosphor |
| CN101971098A (en) * | 2008-02-22 | 2011-02-09 | 工程吸气公司 | Lithography apparatus using extreme uv radiation and having a volatile organic compounds sorbing member comprising a getter material |
| CN101661883A (en) * | 2008-08-25 | 2010-03-03 | 台湾积体电路制造股份有限公司 | Manufacturing method for semiconductor element |
| CN101422749A (en) * | 2008-12-05 | 2009-05-06 | 青岛碱业股份有限公司 | Wet ball mill with feeding piece |
| CN102302923A (en) * | 2011-05-03 | 2012-01-04 | 南京华东电子真空材料有限公司 | Combined getter |
| CN105344466A (en) * | 2015-12-09 | 2016-02-24 | 永兴县灿阳贵金属有限责任公司 | Comprehensive treatment system for calcination slag |
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| CN112295684A (en) * | 2020-09-30 | 2021-02-02 | 邱敏 | Traditional chinese medicine raw materials smashes sieving mechanism |
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