CN113036445B - High-frequency electromagnetic energy collector based on metamaterial - Google Patents
High-frequency electromagnetic energy collector based on metamaterial Download PDFInfo
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- CN113036445B CN113036445B CN202110276301.7A CN202110276301A CN113036445B CN 113036445 B CN113036445 B CN 113036445B CN 202110276301 A CN202110276301 A CN 202110276301A CN 113036445 B CN113036445 B CN 113036445B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
Abstract
The invention discloses a high-frequency electromagnetic energy collector based on a metamaterial structure. The metamaterial-based high-frequency electromagnetic energy collector specifically comprises metamaterial response elements, and can work singly or in cascade. The metamaterial response element comprises an electromagnetic resonance structure and an energy conversion structure. When energy is collected, the electromagnetic resonance structure acts with electromagnetic waves to generate a required local electric field and a magnetic field, and the electric field and the magnetic field act on the energy conversion structure in the area together, so that free carriers in the energy conversion structure are subjected to the action of Lorentz force direct current components to generate directional deflection, and potential differences are formed at the boundaries of the two ends of the energy conversion structure. The energy storage modules are connected to the two ends of the energy conversion structure, so that energy storage can be realized by utilizing the potential difference, and high-frequency electromagnetic energy collection is completed. The high-frequency electromagnetic energy collector provided by the invention has the advantages of universal frequency band, simple structure, no need of a rectifier circuit, convenience in integration, room-temperature work and the like.
Description
Technical Field
The invention belongs to the technical field of electromagnetic energy collection, and particularly relates to a metamaterial-based high-frequency electromagnetic energy collector.
Background
With the development of society, the demand for energy has become more remarkable. Electromagnetic energy is one of the main forms of energy, and its reasonable collection, transmission and use is a long-term research and application hotspot in the energy and electromagnetic fields. Among them, how to collect electromagnetic wave energy effectively is one of the core problems that researchers have been paying attention to. If effective high-frequency electromagnetic energy collection can be realized, the electromagnetic wave can be collected in the environment, and point-to-point wireless energy transmission can be realized. High frequency rectification is the physical basis in electromagnetic energy collection, and at present, an antenna is often adopted to combine with a diode for rectification in the microwave section so as to collect energy, but the application of the method in higher frequency is limited; however, at present, semiconductor junctions are commonly used for realizing energy collection and conversion in an optical band, but the structure is complex, the requirements on the material are strict, and the energy collection speed is fundamentally limited. Therefore, the development of a method which is universal in frequency band and simple in structure is of great application significance in realizing high-frequency electromagnetic energy collection. On the other hand, the rapid development of artificial structure-metamaterial provides a means for controlling electromagnetic waves. According to the design thought of the metamaterial, a new technical route can be developed to realize high-frequency electromagnetic energy collection, and meanwhile, the high-frequency electromagnetic energy collector can be effectively integrated in an electronic micro system and an implantable electronic device based on the characteristic of the sub-wavelength size of the metamaterial.
Disclosure of Invention
The invention aims to provide a metamaterial-based high-frequency electromagnetic energy collector.
The metamaterial-based high-frequency electromagnetic energy collector provided by the invention at least comprises one metamaterial response element.
The metamaterial-based high-frequency electromagnetic energy collector provided by the invention can be composed of only a single metamaterial response element and can also work in an array mode. The single metamaterial response primitive has smaller volume, and is beneficial to integrating and miniaturizing application scenes; an array formed by a plurality of metamaterial response elements can accumulate energy, so that energy collection efficiency is improved.
The metamaterial response element consists of an electromagnetic resonance structure and an energy conversion structure, and the whole structure is arranged on a low-loss substrate. When the metamaterial response element is excited by high-frequency electromagnetic waves, the electromagnetic resonance structure can form an enhanced electric field and a magnetic field in a local area. The energy conversion structure is positioned in a local enhanced electromagnetic field area generated by the electromagnetic resonance structure, and free carriers of the energy conversion structure are deflected by Lorentz force under the combined action of an electric field and a magnetic field. The motion comprises a direct current motion component with a constant direction, so that charged free carriers directionally move and finally gather at the physical boundary of the energy conversion structure, thereby forming direct current voltage and completing the high-frequency rectification process from high-frequency electromagnetic waves to direct current signals. The circuit leads are arranged at the two ends of the energy conversion structure and are connected into the energy storage module, so that the energy storage module can be charged, and the energy collection is completed.
The geometry of the electromagnetic resonant structure is generally smaller than the wavelength of the target electromagnetic wave, and is of sub-wavelength size, and the electromagnetic resonant structure mainly aims at resonating with the target electromagnetic wave to generate a required local electric field and a required magnetic field. The electromagnetic resonance structure has no fixed shape requirement in terms of shape, and can be geometrically continuous or formed by combining a plurality of discrete structures. Any structure that meets the electromagnetic resonance and electromagnetic field enhancement requirements described above may be used as the electromagnetic resonance structure herein. According to one embodiment of the invention, as shown in fig. 1, the electromagnetic resonant structure is formed by a U-shaped metal ring, in which the desired local electromagnetic field can be generated both in the inner and in part in the outer region of the U-shaped ring, so that an energy conversion structure can be placed.
The material selection of the electromagnetic resonance structure needs to meet the requirement of electromagnetic resonance on the material, and the electromagnetic resonance structure can be good conductor metal such as gold, silver, copper, aluminum and the like, semiconductor such as heavily doped or undoped silicon, germanium, gallium phosphide and the like, and dielectric material such as titanium dioxide, barium titanate, aluminum oxide, silicon nitride, silicon carbide, calcium titanate, barium strontium titanate and the like. The doped elements in the heavily doped or undoped semiconductor comprise silicon element, boron element, phosphorus element, arsenic element, gallium element and the like.
The energy conversion structure is a region that provides free carriers and effects movement of the free carriers. The shape of the material can be geometrically continuous or geometrically discrete; either a structure with independent geometry or a doped region on the substrate; so long as it is located within the localized electromagnetic field region created by the electromagnetic resonance structure. According to one embodiment of the present invention, the striped region, as in fig. 1, is a block of n-doped regions on a silicon substrate.
The energy conversion structure is composed of a material capable of providing free carriers, and can be n-type or p-type doped semiconductor materials such as silicon, germanium, gallium arsenide, gallium phosphide, indium antimonide, cadmium sulfide, zinc sulfide, gallium aluminum arsenide, gallium arsenic phosphide and the like, two-dimensional materials such as graphene, molybdenum disulfide, tungsten disulfide, MXene and the like, semi-metallic materials such as bismuth, cadmium arsenide and the like, and conductor metals such as gold, silver, copper, aluminum and the like. The free carriers, which may be electrons or holes, may be intrinsic to the material or may be generated by other means including, but not limited to, elemental doping, impact ionization, photoexcitation, intrinsic excitation, thermal excitation, or excitation by energetic charged particles.
The substrate mainly serves to support the metamaterial structure, so that loss of electromagnetic waves should be reduced as much as possible. Specifically, the material may be a semiconductor material such as silicon, germanium, gallium arsenide, or indium phosphide, a dielectric material such as quartz, glass, or sapphire, or a polymer or polymer material such as teflon, FR-4, polyimide (Polyimide), polydimethylsiloxane (PDMS), or Parylene (Parylene). The specific choice of which material depends on the operating wavelength and the operating scenario.
The metamaterial response elements can be arranged in a periodic array, and the cumulative enhancement of the total conversion voltage can be realized by connecting the metamaterial response elements in series; by connecting the metamaterial response elements in parallel, cumulative enhancement of the total switching current can be achieved. The cascade mode of the periodic structure is not limited to simple series connection or parallel connection, and can be mixed in series and parallel connection, and the specific mode is determined according to requirements. In addition, a plurality of array structures can be arranged randomly, so that the specific scene requirement is met.
The high-frequency electromagnetic energy collector provided by the invention is mainly based on a metamaterial structure to complete a high-frequency energy conversion process, and has the following beneficial effects:
1. the high-frequency electromagnetic energy collector provided by the invention is applicable to wide wave bands, can cover a plurality of electromagnetic wave bands (the wave range covers 400nm-1 m) such as a radio frequency wave band, a terahertz wave band, a middle infrared wave band, a visible wave band and the like, and is a general energy collection scheme for the wave bands. The adjustment of the working wavelength can be realized by the following method: adjusting the size or material composition of the electromagnetic resonance structure, adjusting the arrangement period of metamaterial response elements and adjusting the dielectric constant of the substrate;
2. compared with the conventional energy acquisition devices in microwave, infrared, terahertz, visible light and other wavebands, the high-frequency electromagnetic energy acquisition device provided by the invention has the advantages that a complex rectifier circuit or a semiconductor PN junction and other structures are not needed, a low-temperature environment is also not needed, and the integration level is high;
3. the high-frequency energy collector provided by the invention has no strict requirements on the constituent materials, and can be obtained from commercial use paths, so that the processing and preparation difficulty and cost can be reduced by selecting materials with good process compatibility.
Drawings
FIG. 1 is a metamaterial response element for a metamaterial-based high-frequency electromagnetic energy harvester as provided in example 1, wherein 1 is an electromagnetic resonant structure and the material is gold; 2 is an energy conversion structure, specifically an n-type doped region on a silicon substrate, and the doped impurity is phosphorus; 3 is a substrate, in particular high-resistance silicon, and the resistivity is not lower than 10000 Ω cm;
like reference numerals in the drawings denote like parts.
Fig. 2 is an electromagnetic wave frequency domain response diagram of the metamaterial-based high-frequency electromagnetic energy collector provided in embodiment 1, wherein the structural design resonance in embodiment 1 is 1.35THz, and the strongest magnetic field and electric field enhancement are obtained.
Fig. 3 is a lorentz force distribution of the metamaterial response element designed in example 1, electromagnetic waves are incident along the z direction with x polarization, and lorentz force is along the y direction.
FIG. 4 shows the integrated voltage along the y-direction on a single metamaterial response cell designed in example 1, at an electric field strength of 10 7 An integrated voltage of about 90mV can be obtained by irradiation of electromagnetic waves of V/m.
Fig. 5 is a schematic diagram of a cascade connection designed in embodiment 1, wherein the series connection is selected to accumulate voltage and connect to the energy storage module.
Fig. 6 is a three-dimensional schematic diagram of the high frequency electromagnetic energy harvester designed in example 1 when harvesting energy.
Detailed Description
The invention will be further illustrated with reference to the following specific examples, but the invention is not limited to the following examples. The methods are conventional methods unless otherwise specified. The starting materials are available from published commercial sources unless otherwise specified.
The invention will be further illustrated with reference to the following specific examples, but the invention is not limited to the following examples. The methods are conventional methods unless otherwise specified. The starting materials are available from published commercial sources unless otherwise specified.
Example 1
The embodiment provides a specific metamaterial-based high-frequency electromagnetic energy collector, the working frequency of the metamaterial-based high-frequency electromagnetic energy collector is 1.35THz, a specific structure of a single metamaterial response element is shown in fig. 1, and the preparation of a metamaterial structure can be carried out by adopting an ultraviolet exposure or laser direct writing technology.
Wherein, the 1 part is an electromagnetic resonance structure, the specific material is gold, the line width is 3 mu m, the length is 20 mu m, the width is 16 mu m, the thickness is 300nm, and the specific processing technology can adopt magnetron sputtering or thermal evaporation to deposit gold. The 2 part is n-type doped silicon, the doped impurity is phosphorus, the size is 24 mu m multiplied by 10 mu m, the thickness is 300nm, and the specific processing technology can adopt ion implantation selective doping. The 3 part is a high-resistance silicon substrate, the thickness is 10 mu m, and the resistivity is 20000 omega cm.
The metamaterial response elements can be respectively expanded into arrays in the x and y directions with the period of 35 μm and 30 μm.
FIG. 2 is a graph of electromagnetic wave frequency domain response of a high frequency electromagnetic energy harvester, where the incident wave is normal incidence with plane waves, and resonance is designed to be 1.35THz, resulting in the strongest magnetic and electric field enhancement.
Fig. 3 shows the lorentz force distribution calculated in the metamaterial structure in example 1, wherein the lorentz force distribution has a direct current component, so that free carriers in the energy conversion structure region can be driven to a physical boundary, and a high-frequency rectification process is realized. The arrow direction shown in the figure is the lorentz force direction, along the y direction, the incident electromagnetic wave is x polarized, and along the z direction.
Fig. 4 is an integrated voltage value detected on a single metamaterial response element in example 1, where the integrated voltage value is obtained by integrating the electric field E along the y direction by the center of the energy conversion structure. In the present embodiment, the electric field strength of the incident electromagnetic wave is 10 7 V/m, an integrated voltage of about 90mV can be obtained, which can be said that the structure can realize electromagnetic wave energy collection.
Fig. 5 is a schematic diagram of a cascade connection of voltage series connection of a 2×3 periodic structure, wherein the connection can enhance voltage accumulation, and energy is connected into an energy storage module for storage, so as to complete collection of high-frequency electromagnetic energy. The connection mode of the metamaterial-based high-frequency electromagnetic energy collector is not limited to the mode in the embodiment, and is not limited to the number of 2×3, and the higher the number of metamaterial response elements is, the higher the efficiency of collecting the high-frequency electromagnetic energy is. The specific mode can be determined according to the energy collection mode or the size of the energy collection area of the energy storage module.
Fig. 6 is a three-dimensional schematic diagram of the energy harvester designed in the embodiment 1 when in operation, electromagnetic waves are irradiated to the designed energy harvester in a certain polarization mode, and the collected energy is introduced into the energy storage module from two ports.
In the present invention, the operating frequency can be adjusted by: the size or material composition of the electromagnetic resonance structure is adjusted, the arrangement period of the metamaterial response elements is adjusted, and the dielectric constant of the substrate is adjusted. For example, the period is enlarged, the structure size is enlarged, and the response wavelength is shifted to a long wavelength; the cycle is reduced, the structure size is reduced, and the response wavelength is shifted to a short wavelength. Therefore, the energy collection scheme is universal in wave band, and meanwhile, when the energy collection scheme is used, only the metamaterial-based high-frequency electromagnetic energy collector is connected into the energy storage module or the working circuit, so that the energy collection scheme is simple in structure and convenient to integrate.
Claims (8)
1. A metamaterial-based high-frequency electromagnetic energy collector, which is characterized in that: the high-frequency electromagnetic energy collector at least comprises a metamaterial response element;
the metamaterial response element consists of an electromagnetic resonance structure and an energy conversion structure, and the whole structure is arranged on the substrate;
the electromagnetic resonance structure is composed of a U-shaped metal ring, required local electromagnetic fields are generated in the inner area and part of the outer area of the U-shaped ring, and the energy conversion structure is supported to be placed outside the plane where the U-shaped metal ring is located;
the electromagnetic resonance structure is positioned above the energy conversion structure;
the energy conversion structure is an area where energy collection actually occurs, and needs to be located in a local electromagnetic field area generated by the electromagnetic resonance structure.
2. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1, wherein: the electromagnetic resonance structure can be coupled with an incident electromagnetic wave to generate a locally enhanced electric field and a locally enhanced magnetic field.
3. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the electromagnetic resonance structure is made of any one of the following materials: dielectric material, good conductor metal, heavily doped or undoped semiconductor material.
4. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the energy conversion structure is a structure with independent geometry or a doped region on the substrate.
5. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the energy conversion structure is made of a material with free carriers, and is selected from any one of the following materials: metal materials, n-type or p-type doped semiconductor materials, semi-metal materials, graphene, molybdenum disulfide, tungsten disulfide, and MXene;
the free carriers are electrons, or holes, which are intrinsic to the material, or are otherwise generated by means including elemental doping, impact ionization, photoexcitation, intrinsic excitation, thermal excitation, or excitation by energetic charged particles.
6. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the substrate is used for supporting a metamaterial structure, and the loss of electromagnetic waves is reduced as much as possible; the materials selected include Teflon, high purity silicon, high purity gallium arsenide, glass, quartz, FR-4, polyimide, polydimethylsiloxane, and parylene.
7. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the metamaterial-based high-frequency electromagnetic energy collector consists of a single metamaterial response element;
or the metamaterial-based high-frequency electromagnetic energy collector consists of a periodic array formed by a plurality of metamaterial response primitives; the cascade mode comprises series connection, parallel connection or series-parallel connection mixture.
8. The metamaterial-based high-frequency electromagnetic energy harvester of claim 1 or 2, wherein: the high-frequency electromagnetic energy collector based on the metamaterial structure does not need an external rectifying circuit, can cover a plurality of electromagnetic wave bands from a radio frequency wave band, a terahertz wave band, a middle infrared wave band to a visible light wave band, covers 400nm-1m in a wavelength range, and simultaneously adjusts the working frequency band in at least one of the following modes: the size or the material composition of the electromagnetic resonance structure is adjusted, the arrangement period of the metamaterial response elements is adjusted, and the dielectric constant of the substrate is adjusted.
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