CN113031243B - Reflective on-chip digital holographic microscopic device based on waveguide sheet - Google Patents

Reflective on-chip digital holographic microscopic device based on waveguide sheet Download PDF

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CN113031243B
CN113031243B CN202110324225.2A CN202110324225A CN113031243B CN 113031243 B CN113031243 B CN 113031243B CN 202110324225 A CN202110324225 A CN 202110324225A CN 113031243 B CN113031243 B CN 113031243B
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light
grating
waveguide sheet
incident
waveguide
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CN113031243A (en
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刘胜林
王辉
何峰峰
熊海燕
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Hangzhou Chenjing Photoelectric Technology Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor

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Abstract

The invention discloses a reflective on-chip digital holographic microscope device based on a waveguide sheet, which comprises the waveguide sheet, a glass slide and an image sensor, wherein the waveguide sheet is engraved with two diffraction gratings, an even light grating area of the waveguide sheet is an in-coupling grating, and an even light grating area of the waveguide sheet is an out-coupling grating. The reflective on-chip digital holographic microscopic device is based on the waveguide illumination principle and utilizes the diffraction grating to realize reflective on-chip microscopic imaging. The incident grating area of the light source illumination waveguide sheet, part of diffracted light coupled into the waveguide sheet are totally reflected in the substrate, light is guided out in the incident grating area of the waveguide sheet, illumination is placed above a sample of the waveguide sheet, and light reflected by the sample is recorded on the image sensor, so that the purpose of micro-imaging on a reflective sheet is achieved.

Description

Reflective on-chip digital holographic microscopic device based on waveguide sheet
Technical Field
The invention belongs to the technical field of on-chip microscopic imaging, particularly relates to a reflective on-chip digital holographic microscope, and particularly relates to a diffraction waveguide based on a waveguide illumination principle.
Background
The on-chip micro-imaging has the advantages of miniaturization, light weight and simple imaging light path due to the experimental device without the lens. Conventional lensless on-chip microscopes mostly operate in bright field transmission mode. Taking the experimental setup of the Aydogan Ozcan team at the university of california los angeles, in transmission mode, the sample is placed 5-10 cm above the sample and illuminated by a corresponding light source, and a holographic projection of the sample is captured by an image sensor chip placed next to the sample, the image sensor being < 2mm below the sample. The light scattered by the sample interferes with the light which is not scattered to form the coaxial hologram of the sample, and then the coaxial hologram is recorded on the image sensor. In on-chip microscopy imaging devices, the sample is placed in close proximity to the image sensor in order to ensure the field of view and resolution of the imaging system. However, on-chip microscopic imaging in the reflection mode is difficult to achieve due to the too small distance between the sample and the image sensor.
Disclosure of Invention
The invention aims to provide a waveguide sheet with an incident grating area and an emergent grating area, so that light can be coupled to a waveguide through the incident grating area and reflected from the emergent grating area in the waveguide.
The technical scheme of the invention is as follows: the utility model provides a digital holographic microscopic device on reflective piece based on waveguide piece, includes waveguide piece, slide glass, image sensor, light source, wherein, the last interface of waveguide piece is equipped with even light-emitting grid district and even light-emitting grid district, the last interface at even light-emitting grid district is placed to the slide glass, image sensor arranges under waveguide piece even light-emitting grid district, and the lower interface distance with the slide glass is not more than 2mm, light source sets up the position department of 50~100m above the waveguide piece, and when making the light that light source sent incide the even light-emitting grid district and keeping away from one side of even light-emitting grid district and even light-emitting grid district midline, forms incident contained angle respectively with the normal line of even light-emitting grid district
Figure 229023DEST_PATH_IMAGE001
And
Figure 867157DEST_PATH_IMAGE002
wherein, in the step (A),
Figure 803889DEST_PATH_IMAGE001
、
Figure 39699DEST_PATH_IMAGE002
wavelength of incident light
Figure 614162DEST_PATH_IMAGE003
And period of even grating regiond 1Even-out grating region periodd 2Refractive index of waveguide sheet
Figure 847697DEST_PATH_IMAGE004
The following relationship is satisfied:
the lightAngle of incidence of the bright light source
Figure 802883DEST_PATH_IMAGE001
The first-order diffraction angle formed when the incident light enters the side of the even incident grating region far away from the even emergent grating region
Figure 780067DEST_PATH_IMAGE005
Not less than the total reflection angle of the lower interface of the waveguide sheet
Figure 707571DEST_PATH_IMAGE006
，
Figure 675790DEST_PATH_IMAGE007
All light rays coupled into the waveguide sheet from the illumination light source through the even light grid region are transmitted to the even light grid region along the waveguide sheet;
Figure 321535DEST_PATH_IMAGE008
so that the illumination light source forms an incident angle
Figure 836830DEST_PATH_IMAGE002
The incident light is incident to the central line of the even light grid region, is reflected to the central line of the even light grid region through the waveguide sheet, is perpendicular to the upper interface of the waveguide sheet, and is emitted onto the glass slide, and the central lines of the even light grid region and the even light grid region are perpendicular to the central connecting line of the even light grid region and the even light grid region.
The invention has the beneficial effects that:
1. the illumination light source forms an incident angle
Figure 681158DEST_PATH_IMAGE001
The first-order diffraction angle formed when the incident light enters the side of the even incident grating region far away from the even emergent grating regionθ 1Not less than the total reflection angle of the lower interface of the waveguide sheet
Figure 757960DEST_PATH_IMAGE006
When the light source is used, all the light coupled into the waveguide plate from the illumination light source through the incident grating region is transmitted to the emergent grating region from the waveguide plateThe first-order diffraction angle of all light rays incident on the incident grating area from the light source is larger than the total reflection angle of the lower interface of the waveguide sheet;
2. the illumination light source forms an incident angle
Figure 891002DEST_PATH_IMAGE002
When the light enters the central line of the even light grating region and is reflected to the central line of the even light grating region through the waveguide sheet, the diffraction equation is as follows:
Figure 6725DEST_PATH_IMAGE009
if the diffracted light is emitted perpendicularly from the interface on the even grating area, the diffraction equation is as follows:
Figure 174401DEST_PATH_IMAGE010
，
Figure 218843DEST_PATH_IMAGE011
then, there are:
Figure 573601DEST_PATH_IMAGE012
，
Figure 696278DEST_PATH_IMAGE013
。
3. the diffracted light is vertically emitted from the upper interface of the even grating region GO, and after a sample in the glass slide is irradiated, the included angle between the light totally reflected to the waveguide sheet and the normal line of the upper interface of the waveguide sheet is 0, namely smaller than the total reflection angle of the lower interface of the waveguide sheet
Figure 452881DEST_PATH_IMAGE006
And thus can be irradiated onto the image sensor through the waveguide sheet.
Drawings
FIG. 1 is a structural diagram of a reflective, on-chip, digital holographic microscopy apparatus of the present invention based on a waveguide plate;
FIG. 2 is a schematic diagram of the waveguide light transmission of the present invention;
fig. 3 is a schematic diagram of the light transmission parameters of the waveguide according to the present invention.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Referring to fig. 1, a reflective on-chip digital holographic microscopy device based on a waveguide sheet comprises a waveguide sheet 1, a glass slide 2, an image sensor 3 and an illumination light source 4, wherein an even light grating region GI and an even light grating region GO are arranged on an upper interface of the waveguide sheet 1, the glass slide 2 is arranged on an upper interface of the even light grating region GO, the image sensor 3 is arranged under the even light grating region GO of the waveguide sheet 1 and is not more than 2mm away from a lower interface of the glass slide 2, the illumination light source 4 is arranged at a position 50-100 m above the waveguide sheet 1, as shown in fig. 2, the illumination light source 4 irradiates the even light grating GI region of the waveguide sheet 1, part of diffracted light coupled into the waveguide sheet 1 is totally reflected in the waveguide sheet 1, the GO is guided out in the even light grating region of the waveguide sheet 1, a sample in the glass slide 2 arranged above the waveguide sheet 1 is irradiated, and light reflected by the sample is recorded on the image sensor 3, meanwhile, illumination light is irradiated on the image sensor 3 as reference light, so that the purposes of micro-imaging on a reflection type sheet and forming a coaxial hologram of a sample are achieved.
As shown in fig. 3, when light emitted from the illumination light source is incident on one side (point a) of the even entrance grating region away from the even exit grating region and the central line (point C) of the even entrance grating region, an incident angle is formed between the incident angle and the normal of the even entrance grating region
Figure 166759DEST_PATH_IMAGE001
And
Figure 775857DEST_PATH_IMAGE002
wherein, in the step (A),
Figure 498963DEST_PATH_IMAGE001
、
Figure 110073DEST_PATH_IMAGE002
wavelength of incident light
Figure 463693DEST_PATH_IMAGE003
And an even gratingPeriod of the zoned 1Even-out grating region periodd 2Refractive index of waveguide sheet
Figure 825667DEST_PATH_IMAGE014
The following relationship is satisfied:
according to the principle of waveguide light transmission, the illumination light source 4 irradiates the incident grating area GI of the waveguide sheet 1, after grating diffraction, the diffraction angle of the first-order diffraction light thereof is transmitted along the waveguide sheet if the diffraction angle meets the total reflection condition of the material of the lower interface of the waveguide sheet 1, and the upper interface and the lower interface of the waveguide sheet 1 are equivalent to two mirror surfaces, so that the first-order diffraction light thereof is reflected and imaged for multiple times. When light is transmitted to the even light-emitting grid region GO, the light is diffracted and guided out by the even light-emitting grid region GO.
As shown in fig. 3, the light incident from the illumination light source 4 to the leftmost point a of the even grating GI is diffracted, and the first-order diffraction angle thereof in the upper interface of the waveguide sheet 1θ 1If the total reflection angle is larger than the total reflection angle of the lower interface, the light propagates along the waveguide plate to the right, and the first-order diffraction angle of all the light rays incident on the even grating region GI from the illumination light source 4 is larger than the total reflection angle of the lower interface.
Total angle of reflection at the lower boundary of
Figure 352463DEST_PATH_IMAGE015
；
Satisfy the requirement of
Figure 818080DEST_PATH_IMAGE016
：
Figure 139340DEST_PATH_IMAGE017
（1）
Let the period of the even grating region GI bed 1The diffraction equation is:
Figure 660713DEST_PATH_IMAGE018
（2）
obtaining:
Figure 460042DEST_PATH_IMAGE019
（3）
the diffraction equation of light incident to the central point C of the even grating GI is:
Figure 45744DEST_PATH_IMAGE020
（4）
Figure 803484DEST_PATH_IMAGE021
included angle of incidence for light source
Figure 331594DEST_PATH_IMAGE002
First order diffraction angle formed when incident on the central line (point C) of the incident grating region
Figure 934613DEST_PATH_IMAGE022
。
Figure 843663DEST_PATH_IMAGE023
（5）
Figure 241147DEST_PATH_IMAGE024
（6）
Figure 32385DEST_PATH_IMAGE025
（7）
The period of the even light-emitting grid region GO is set asd 2The light is transmitted to the central F point of the even light grid region GO and takes alpha1At angle of incidence, the diffraction equation is:
Figure 674981DEST_PATH_IMAGE026
（8）
if the diffracted light is emitted perpendicularly from the surface of the even grating region GO, the diffraction angle is adjusted
Figure 235276DEST_PATH_IMAGE027
Then, there are:
Figure 803660DEST_PATH_IMAGE028
（9）
substituting the formula (5) and the formula (2) into the formula to obtain:
Figure DEST_PATH_IMAGE029
（10）
the diffracted light is vertically emitted from the upper interface of the even grating region GO, and after a sample in the glass slide is irradiated, the included angle between the light totally reflected to the waveguide sheet and the normal line of the upper interface of the waveguide sheet is 0, namely smaller than the total reflection angle of the lower interface of the waveguide sheet 1
Figure 114818DEST_PATH_IMAGE015
And thus can be irradiated onto the image sensor through the waveguide sheet 1. Light coupled out by the waveguide sheet is reflected by a sample in the glass slide to form object light which is recorded on the image sensor, illumination light is used as reference light to irradiate the image sensor, micro-imaging on the reflective sheet is achieved, and a coaxial hologram of the sample is formed.

Claims (1)

1. The utility model provides a digital holographic microscopic device on reflective piece based on waveguide piece, includes waveguide piece, slide glass, image sensor, light source, its characterized in that, the last interface of waveguide piece is equipped with even light grating zone and even light grating zone, the last interface at even light grating zone is placed to the slide glass, image sensor arranges under waveguide piece even light grating zone, and the lower interface distance with the slide glass is not more than 2mm, light source sets up the position department of 50~100m above the waveguide piece, and when making the light that light source sent incide the even light grating zone and keeping away from one side of even light grating zone and even light grating zone on-line, it forms incident contained angle respectively with the normal of even light grating zone and goes into the light grating zone
Figure 680105DEST_PATH_IMAGE001
And
Figure 761194DEST_PATH_IMAGE002
wherein, in the step (A),
Figure 236038DEST_PATH_IMAGE001
、
Figure 591933DEST_PATH_IMAGE002
wavelength of incident light
Figure 325578DEST_PATH_IMAGE003
And period of even grating regiond 1Even-out grating region periodd 2Refractive index of waveguide sheet
Figure 780830DEST_PATH_IMAGE004
The following relationship is satisfied:
the illumination light source forms an incident angle
Figure 742970DEST_PATH_IMAGE001
The first-order diffraction angle formed when the incident light enters the side of the even incident grating region far away from the even emergent grating region
Figure 371397DEST_PATH_IMAGE005
Not less than the total reflection angle of the lower interface of the waveguide sheet
Figure 962DEST_PATH_IMAGE006
，
Figure 925318DEST_PATH_IMAGE007
All light rays coupled into the waveguide sheet from the illumination light source through the even light grid region are transmitted to the even light grid region along the waveguide sheet;
Figure 374754DEST_PATH_IMAGE008
so that the illumination light source forms an incident angle
Figure 10134DEST_PATH_IMAGE002
The light is incident to the central line of the even light grating region, reflected to the central line of the even light grating region by the waveguide sheet and vertical to the waveguideThe upper interface of the slide is emitted onto the slide, and the central line of the even light-incident grating region and the even light-emitting grating region is vertical to the central connecting line of the even light-incident grating region and the even light-emitting grating region.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109656026A (en) * 2019-02-25 2019-04-19 京东方科技集团股份有限公司 A kind of holographic optical waveguide display device and method of big field angle
CN110658195A (en) * 2019-10-25 2020-01-07 浙江大学 Frequency shift unmarked super-resolution microscopic chip and imaging method thereof

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DE19841931C2 (en) * 1998-09-14 2002-06-20 Zeiss Carl Jena Gmbh Microscope for optical near-field microscopy
WO2012061797A2 (en) * 2010-11-07 2012-05-10 Council For Scientific And Industrial Research On-chip 4d lightfield microscope
US10459241B2 (en) * 2014-04-30 2019-10-29 Hewlett-Packard Development Company, L.P. Imaging apparatus and methods using diffraction-based illumination
DE102014113188B4 (en) * 2014-09-12 2024-01-04 Carl Zeiss Microscopy Gmbh Digital microscope and method for putting it into operation
BR112018005822A2 (en) * 2015-09-24 2018-10-09 Leica Biosystems Imaging Inc real-time focus in line scan imaging
GB2549298B (en) * 2016-04-12 2022-02-02 Univ I Tromsoe Norges Arktiske Univ Super-resolution imaging
CN107966110A (en) * 2017-11-21 2018-04-27 北京理工大学 A kind of bimodal Digital holographic microscopy device

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Publication number Priority date Publication date Assignee Title
CN109656026A (en) * 2019-02-25 2019-04-19 京东方科技集团股份有限公司 A kind of holographic optical waveguide display device and method of big field angle
CN110658195A (en) * 2019-10-25 2020-01-07 浙江大学 Frequency shift unmarked super-resolution microscopic chip and imaging method thereof

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