CN113029002A - Linear displacement measuring device and method - Google Patents
Linear displacement measuring device and method Download PDFInfo
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Abstract
The invention belongs to the technical field of photoelectric displacement precision measurement, and designs a linear displacement measuring device and a measuring method, wherein the linear displacement measuring device comprises the following steps: reading head, parallel light source, sliding guide, scale grating, transmission cable. The reading head is arranged on the sliding guide rail and can move along the direction of the sliding guide rail; the scale grating is positioned between the reading head and the parallel light source, and light rays emitted by the parallel light source penetrate through the blank-leaking marked lines on the scale grating and map patterns of the marked lines to the reading head. The reading head realizes the linear displacement measurement with the anti-pollution capacity by identifying the pattern of the marked line and adopting the technology that the double image sensors are mutually backup. The measured value will be output through the transmission cable. The invention can immunize stains such as sewage, dust and the like, and has higher reliability.
Description
Technical Field
The invention belongs to the technical field of photoelectric displacement precision measurement, and particularly relates to a linear displacement measuring device with stain resistance and a measuring method.
Background
Digital displacement measurement is a high-precision measurement technology integrating light collection machines and electronics, and has become a key technology in the fields of industrial manufacturing, aerospace, military equipment and the like due to the advantages of high precision, high resolution, wide measurement range, easiness in butt joint with digital equipment and the like. With the increasing development of the production and manufacturing industry, higher requirements are put forward on the digital displacement measurement technology, which mainly comprises the following steps: high resolution and high measurement precision. Therefore, the research on the displacement measurement technology with high resolution and high precision is popular in the basic manufacturing research field and has important research value.
When the scale grating is covered with dirt during photoelectric displacement measurement, the measurement performance is seriously influenced, and even errors occur. For the anti-stain performance, the sealing performance of the measuring device is increased at present, but the sealing performance is difficult to achieve completely under the influence of the sliding guide rail. In addition, to reduce the effect of stains, two methods have been mainly studied for improving the stain-resistant ability. One method is to use a "magnetic induction" type displacement measurement technique, such as: a displacement measurement method based on a magnetic grid. Another method is to use a steel tape ruler to replace the glass grating, such as: the RESOLUTE series absolute grating ruler produced by Renyshao corporation in England adopts a steel strip ruler and a built-in redundant code technology, so that the absolute grating ruler has strong anti-pollution capability, can correctly read data when slightly polluted, and has the resolution of 1 nm. The RESOLUTE series absolute grating ruler of Raney Shao of England adopts a steel strip ruler which has certain stain resistance and realizes higher measurement resolution. However, due to the technical monopoly of renisha, domestic equipment needs to be imported to realize higher measurement performance.
Disclosure of Invention
In order to develop a linear displacement measuring device with anti-pollution performance, the invention discloses a linear displacement measuring device with anti-pollution performance. In order to achieve the purpose, the invention adopts the following specific technical scheme:
a linear displacement measuring device comprising: the scale grating comprises a reading head, a parallel light source, a sliding guide rail and a scale grating positioned between the reading head and the parallel light source;
the scale grating is fixed on the sliding guide rail and is parallel to the extending direction of the sliding guide rail, and the hollow mark line surface of the scale grating is vertical to the sliding guide rail;
the reading head and the parallel light source are slidably arranged on the sliding guide rail to form a correlation;
the irradiation area of the parallel light source is divided into two parts, and the two image sensors of the reading head are used for imaging the blank-leaking mark line respectively;
obtaining the coded value A, the displacement detail value B and the offset delta x of the displacement detail value B through the images of N leaky hollow lines on the scale grating identified by the reading headab。
Preferably, the scale grating comprises a scale body with the length range of L and M blank-leaking marked lines engraved on the scale body according to a coding mode of a pseudo-random sequence; the hollow leaking graticule is arranged along the measuring range direction of the scale grating, and the hollow leaking graticule is a transparent rectangular graticule with the same center-of-mass distance.
Preferably, the drain empty bar contains a wide bar and a narrow bar, representing the code elements "1" and "0", respectively; the width of the wide marked line is not more than L/M, and the width of the narrow marked line is not more than L/2M.
Preferably, N is the number of binary bits of the number M of the drain margin lines, and N is a preset value.
Preferably, the read head comprises: a first image sensor, a second image sensor and a processing circuit; the first image sensor and the second image sensor are respectively connected with the processing circuit and are positioned on the lower side surface of the processing circuit;
the visual field ranges of the first image sensor and the second image sensor are both larger than N.L/M.
The processing circuit is used for receiving the image data of the image sensor, judging whether the blank leakage marking lines have dirt or not according to the image data, and performing subdivision operation and decoding operation.
Preferably, the collimated light source includes: a first parallel light source and a second parallel light source; and light rays emitted by the first parallel light source and the second parallel light source respectively penetrate through the N blanking lines above the first parallel light source and the second parallel light source, and patterns of the blanking lines are respectively mapped onto the first image sensor and the second image sensor to form projection imaging.
Preferably, the linear displacement measuring device further comprises a transmission cable which is connected with the reading head and outputs the linear displacement measuring value X obtained through calculation processing.
A linear displacement measurement method, comprising:
s1, calculating the mass center of the leaky line obtained by the linear displacement measuring device through a mass center algorithm, and meanwhile calculating and judging whether the distance and the width between two adjacent leaky line change or not so as to judge whether the scale grating has dirt or not;
s2, calculating the offset delta D between the two image sensors according to the difference between the position of the uncontaminated leaky line in the image sensor with the stain and the position of the corresponding leaky line in the other image sensor;
and S3, calculating the linear displacement measured value D of the uncontaminated scale grating and subtracting the linear displacement measured value D from the offset delta D to obtain the linear displacement measured value X of the contaminated area.
Preferably, the offset Δ D includes an offset Δ x of the displacement detail valueabAnd decoding the difference Δ A, offset Δ xabObtained by the following formula:
wherein the content of the first and second substances,
an is the position of any undisturbed marking line pixel in the visual field in a coordinate system established by taking the central point of the image sensor where the polluted area is located as a zero point;
xanis the centroid of an;
bn is the position of the marking line pixel in the coordinate system which is established by taking the central point of the other non-polluted image sensor as a zero point and corresponds to an;
xbnis the centroid of bn;
xbm、xbm+1respectively, the centroids of the adjacent marked lines on two sides of the coordinate axis of the image sensor which is not polluted.
Preferably, the acquisition of the linear displacement measurement D comprises the following steps:
s301, identifying wide marked lines and narrow marked lines in the N blank-leaking marked line patterns to obtain a coding numerical value of a current identification area, and obtaining a decoding value A of the area through decoding;
s302, calculating the relative displacement of two adjacent hollow leaking marks in the middle of the area to obtain a displacement detail value B;
s303, obtaining a linear displacement measurement value D by:
D＝A×K+B (2)
wherein K is 2MIs a subdivision multiple.
The invention can obtain the following technical effects:
1. the metal grating is adopted and matched with the double image sensors, so that the anti-pollution performance is strong.
2. The method has robust performance, can ensure the continuity of output and does not generate error codes.
Drawings
FIG. 1 is a schematic diagram of a linear displacement measuring device in accordance with an embodiment of the present invention;
FIG. 2 is a schematic view of a leaky null line according to an embodiment of the invention;
FIG. 3 is a schematic view of a readhead according to one embodiment of this invention;
FIG. 4 is a schematic illustration of the subdivision principle of one embodiment of the present invention;
FIG. 5 is a schematic view of the stain resistance of one embodiment of the present invention;
FIG. 6 is a schematic view of another collimated light source according to one embodiment of the present invention;
fig. 7 is a flow chart of a measurement method according to an embodiment of the invention.
Reference numerals:
a reading head 1, a first image sensor 11, a second image sensor 12, a processing circuit 13, a parallel light source 2, a first parallel light source 21, a second parallel light source 22,
A sliding guide rail 3,
Scale grating 4, scale body 41, void-leaking mark line 42,
A transmission cable 5.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention aims to provide a linear displacement measuring device and a linear displacement measuring method, which are used for improving the stain resistance of linear displacement measurement. The following describes a linear displacement measuring device and method according to the present invention in detail with reference to specific embodiments.
As shown in fig. 1, the device of the present invention comprises a reading head 1, a parallel light source 2, a sliding guide rail 3 and a scale grating 4; the reading head 1 and the parallel light source 2 are slidably arranged on the sliding guide rail 3 and are in a correlation; the scale grating 4 is fixed on the sliding guide rail 3 and is parallel to the extending direction of the sliding guide rail 3, and the void leakage marking line surface of the scale grating 4 is vertical to the sliding guide rail 3;
the irradiation area of the parallel light source 2 is divided into two parts, and imaging is respectively carried out by a first image sensor 11 and a second image sensor 12 which are included in the reading head 1;
the scale grating 4 is positioned between the reading head 1 and the parallel light source 2; obtaining the corresponding code value A, the displacement detail value B and the offset delta x of the displacement detail value B through the N blank mark lines 42 on the scale grating 4 in the current imaging area identified by the reading head 1ab。
In a preferred embodiment of the present invention, the scale grating 4 comprises two parts, i.e. a ruler body 41 and a blank space line 42, and referring to fig. 2, M blank space lines 42 arranged according to a pseudo-random sequence coding mode are marked on the ruler body 41 with a length range of L, wherein the M blank space lines 42 are transparent rectangular lines with the same centroid distance.
Wherein, the wide marked line represents a coded element '1', the narrow marked line represents a coded element '0', the width of the wide marked line is not more than L/M, and the width of the narrow marked line is not more than L/2M;
the readhead 1 as shown in fig. 3 comprises a first image sensor 11, a second image sensor 12 and processing circuitry 13; the first image sensor 11 and the second image sensor 12 are respectively connected with the processing circuit 13, are both positioned on the lower side surface of the processing circuit 13 and are opposite to the parallel light source 2;
the visual field ranges of the first image sensor 11 and the second image sensor 12 are both larger than N.L/M;
the processing circuit 13 is configured to receive image data of the first image sensor 11 and the second image sensor 12, determine whether the blank space line 42 has dirt according to the obtained image data, and perform a subdividing operation and a decoding operation.
In a preferred embodiment of the present invention, the measuring device further comprises a transmission cable 5 connected to the reading head 1 for outputting the calculated linear displacement measurement value X.
In another preferred example of the present invention, one parallel light source 2 or two parallel light sources 2; as shown in fig. 6, when two parallel light sources 2 are used, the first parallel light source 21 and the second parallel light source 22 are in a correlation with the first image sensor 11 and the second image sensor 12, respectively. Even if the light rays emitted by the first parallel light source 21 and the second parallel light source 22 respectively transmit the N overhead lines 42, and the patterns of the overhead lines 42 are respectively mapped onto the first image sensor 11 and the second image sensor 12, thereby forming projection imaging.
FIG. 7 shows a method for measuring linear displacement when there is dirt on the scale grating using a linear displacement measuring device of the present invention, where a linear displacement measurement value X of a contaminated area is obtained by subtracting a linear displacement measurement value D calculated by identifying an image of an image sensor corresponding to another uncontaminated area from an offset value Δ D
First, the processing circuit 13 performs feature recognition on the images acquired by the first image sensor 11 and the second image sensor 12, and determines whether or not there is dirt on the scale grating 4.
In a preferred embodiment of the present invention, the spacing, width information of the leaky null lines 42 is known from the settings. Therefore, the centroid algorithm is used to calculate the distance and width between the adjacent ones of the N leaky hollow lines 42 in each of the acquired images. When the data of the distance and the width are changed, the existence of dirt in the bar of the air leakage mark line 42 is judged.
Secondly, performing anti-stain calculation, as shown in fig. 5, assuming that stains exist in the area of the scale grating 4 corresponding to the first image sensor 11;
in a preferred embodiment of the present invention, the processing circuit 13 obtains the encoded value of the current identified area by identifying the wide and narrow lines in the pattern of the N blank lines 42 on the second image sensor 12, and obtains the decoded value a of the current area through decoding;
and establishing a coordinate system by taking the central point of the second image sensor 12 as a zero point, wherein the x axis of the coordinate system is the pixel position of the second image sensor 12, and the y axis is a gray value. x is the number ofb5And xa6The centroid of the adjacent marked lines on both sides of the coordinate axis, respectively, then the displacement component value B is expressed as:
in the formula, eta is a quantization value, and the larger the numerical value of eta is, the larger the subdivision multiple can be realized;
with reference to any undisturbed leaky null line 42 in the field of view of the first image sensor 11 in fig. 4, for example: a is11Calculating its centroid as xa11；
In the second image sensor 12, and11corresponding to the leaky null line 42 being b11Calculate b11Center of mass relative to a11Is xb11-xa11(ii) a Quantizing the offset value to be in the range of eta, as shown in formula (1):
equation (1) is an offset amount of the detailed value between the first image sensor 11 and the second image sensor 12;
when the first image sensor11, the amount of displacement Deltax is calculated by the second image sensor 12abAdding the obtained subdivision value into the calculation, wherein the obtained subdivision value is shown as a formula (4):
in another embodiment of the present invention, since the decoded values have low resolution, the difference between the decoding values of the first image sensor 11 and the second image sensor 12 is preset to be Δ a, when it is detected that the first image sensor 11 is dirty, Δ a is subtracted from the decoded values of the second image sensor 12, so that the decoded values a' of the first image sensor 11 can be obtained,
A′＝A-ΔA (5)
finally, a linear displacement measurement value X of the pollution area is obtained by using the formula (4) and the formula (5):
X＝A′×K+B′ (2)
wherein K is 2MIs a subdivision multiple;
the method has robust performance, can ensure the continuity of output and does not generate error codes.
If stains appear in the visual field of the second image sensor 12, the first image sensor 11 is used to calculate the numerical value, and the method is the same and is not repeated.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A linear displacement measuring device, comprising: the scale grating reading device comprises a reading head, a parallel light source, a sliding guide rail and a scale grating positioned between the reading head and the parallel light source;
the scale grating is fixed on the sliding guide rail and is parallel to the extending direction of the sliding guide rail, and the void leakage marking line surface of the scale grating is vertical to the sliding guide rail;
the reading head and the parallel light source are slidably arranged on the sliding guide rail to form a correlation;
the irradiation area of the parallel light source is divided into two parts, and the two image sensors of the reading head are used for imaging the blank leakage marking line respectively;
obtaining a coded value A, a displacement detail value B and an offset delta x of the displacement detail value B through the images of N perforated lines on the scale grating identified by the reading headab。
2. The linear displacement measuring device of claim 1, wherein the scale grating comprises a scale body with a length range of L and M blank lines marked on the scale body according to a pseudo-random sequence coding mode; the hollow leaking graticule is arranged along the measuring range direction of the scale grating, and the hollow leaking graticule is a transparent rectangular graticule with the same center-of-mass distance.
3. The linear displacement measuring device of claim 2, wherein the leaky hollow graticule includes wide graticules and narrow graticules representing coded symbols "1" and "0", respectively; the width of the wide marked line is not more than L/M, and the width of the narrow marked line is not more than L/2M.
4. The linear displacement measuring device of claim 3, wherein N is a binary number of the number M of the leaky graticules, and N is a preset value.
5. The linear displacement measuring device of claim 4, wherein the read head comprises: a first image sensor, a second image sensor and a processing circuit; the first image sensor and the second image sensor are respectively connected with the processing circuit and are positioned on the lower side surface of the processing circuit;
the field of view of the first image sensor and the field of view of the second image sensor are both larger than N.L/M;
the processing circuit is used for receiving the image data of the image sensor, judging whether the blank leakage mark line has dirt or not according to the image data, and performing subdivision operation and decoding operation.
6. The linear displacement measuring device of claim 1, the collimated light source comprising: a first parallel light source and a second parallel light source; and light rays emitted by the first parallel light source and the second parallel light source respectively penetrate through the N pieces of blanking lines above the first parallel light source and the second parallel light source, and patterns of the blanking lines are respectively mapped onto the first image sensor and the second image sensor to form projection imaging.
7. The linear displacement measuring device of claim 6, further comprising a transmission cable connected to the reading head for outputting the calculated linear displacement measurement value X.
8. A linear displacement measuring method, comprising:
s1, calculating the mass center of the void-leaking marked line obtained by the linear displacement measuring device according to any one of claims 1-7 through a mass center algorithm, and simultaneously calculating and judging whether the distance and the width between two adjacent void-leaking marked lines are changed or not so as to judge whether the scale grating has stains or not;
s2, calculating the offset delta D between the two image sensors according to the difference between the position of the non-polluted leakage space mark line in the image sensor with the dirt and the position of the corresponding leakage space mark line in the other image sensor;
s3, calculating a linear displacement measurement value D of the scale grating which is not polluted, and obtaining the linear displacement measurement value X of the polluted area by making a difference with the offset delta D.
9. The linear displacement measuring method according to claim 8, wherein the offset amount Δ D includes an offset amount Δ x of the displacement subtlety valueabAnd a decoding difference Δ A, said offset Δ xabObtained by the following formula:
wherein the content of the first and second substances,
an is the position of any undisturbed marking line pixel in the visual field in a coordinate system established by taking the central point of the image sensor where the polluted area is located as a zero point;
xanis the centroid of an;
bn is the position of the marking line pixel in the coordinate system which is established by taking the central point of the other non-polluted image sensor as a zero point and corresponds to an;
xbnis the centroid of bn;
xbm、xbm+1the centroids of the adjacent marked lines on two sides of the coordinate axis of the uncontaminated image sensor are respectively.
10. The linear displacement measuring method according to claim 9, wherein the obtaining of the linear displacement measurement value D includes the steps of:
s301, identifying the wide marked lines and the narrow marked lines in the N blank-leaking marked line patterns to obtain the encoding numerical value of the current identification area, and decoding to obtain a decoding value A of the area;
s302, calculating the relative displacement of two adjacent leaky line marks in the middle of the area to obtain a displacement detail value B;
s303, obtaining the linear displacement measurement value D by:
D＝A×K+B (2)
wherein K is 2MIs a subdivision multiple.
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