CN113009497A - Laser emission module, TOF assembly and electronic equipment - Google Patents
Laser emission module, TOF assembly and electronic equipment Download PDFInfo
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- CN113009497A CN113009497A CN202110391075.7A CN202110391075A CN113009497A CN 113009497 A CN113009497 A CN 113009497A CN 202110391075 A CN202110391075 A CN 202110391075A CN 113009497 A CN113009497 A CN 113009497A
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- 230000003287 optical effect Effects 0.000 claims abstract description 72
- 239000000463 material Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4911—Transmitters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
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Abstract
The application provides a laser emission module, TOF subassembly and electronic equipment, laser emission module includes: a laser for emitting laser light; the collimating element is used for adjusting laser emitted by the laser into parallel light; and the diffraction optical element is used for dividing the parallel light into a plurality of light beams, and the material expansion coefficient of the diffraction optical element is matched with the grating period of the diffraction optical element, the initial wavelength of the laser emitted by the laser and the temperature drift coefficient, so that the absolute value of the difference value of the angle of the light beam projection along with the temperature change is within a tolerance range. The angle of the final projected light beam of the laser emission module has a certain relation with the grating period of the diffractive optical element and the wavelength of the laser emitted by the laser, and the material of the diffractive optical element is selected according to the grating period of the diffractive optical element, the initial wavelength of the laser emitted by the laser and the temperature drift coefficient, so that the change of the grating period of the diffractive optical element and the change of the laser wavelength emitted by the laser are offset.
Description
Technical Field
The application relates to the field of laser devices, in particular to a laser emission module, a TOF assembly and electronic equipment.
Background
Currently, a depth camera is one of important research directions in electronic devices, and the working principle of the depth camera is to measure the distance of a target object by a Time of Flight (TOF) component, while laser is widely used as an important light source in the TOF component.
Due to the higher emitted laser power of the laser emitter in the TOF assembly, as the usage time of the laser emitter increases, the temperature of the whole TOF assembly rises, the grating period of the diffractive optical element in the TOF assembly and the wavelength of the laser emitted by the laser emitter are affected, and finally the angle at which the laser emitter projects the light beam is shifted.
Disclosure of Invention
The application discloses laser emission module can solve the technical problem that the angle of projecting light beam takes place the skew.
In a first aspect, the present application provides a laser emission module, comprising:
a laser for emitting laser light;
the collimation element is used for adjusting the laser emitted by the laser into parallel light;
the diffraction optical element is used for dividing the parallel light into a plurality of light beams, and the material expansion coefficient of the diffraction optical element is matched with the grating period of the diffraction optical element, the initial wavelength of the laser emitted by the laser and the temperature drift coefficient, so that the absolute value of the difference of the angle of the light beam projection with the temperature change is within a tolerance range.
The angle of the final projected light beam of the laser emission module has a certain relation with the grating period of the diffractive optical element and the wavelength of the laser emitted by the laser, and the material of the diffractive optical element is selected according to the grating period of the diffractive optical element, the initial wavelength of the laser emitted by the laser and the temperature drift coefficient, so that the change of the grating period of the diffractive optical element and the change of the laser wavelength emitted by the laser are offset, and the change of the angle of the light beam projected by the laser emission module is in a tolerance range.
Further, the material expansion coefficient of the diffractive optical element satisfies the formula:
wherein Δ d is a product of a material expansion coefficient of the diffractive optical element and a temperature change value, d is a grating period of the diffractive optical element, Δ λ is a product of a temperature drift coefficient of laser light emitted by the laser and a temperature change value, and λ is an initial wavelength of the laser light emitted by the laser.
Further, the overall temperature of the laser emission module at the first time is different from that at the second time, and the grating period of the diffractive optical element at the first time is d1The grating period of the diffractive optical element at the second time is d2And d is2＝d1- Δ d, the laser emitter emitting a laser wavelength λ at said first instant1The laser wavelength emitted by the laser emitter at the second moment is lambda2And λ2＝λ1-Δλ。
Further, the diffraction angle of the laser emitted by the diffractive optical element is a first angle at a first time, and is a second angle at a second time, and a difference between the first angle and the second angle is smaller than a preset threshold value.
Further, the laser is a vertical cavity surface laser transmitter.
Further, the laser wavelength emitted by the laser emitter perpendicular to the cavity surface is 940nm, and the material expansion coefficient of the diffraction optical element is 70ppm according to the grating period of the diffraction optical element, the initial wavelength of the laser emitted by the laser and the temperature drift coefficient.
In a second aspect, the present application further provides a TOF assembly, including the laser emission module and the receiving and sensing module according to the first aspect, where the laser emission module is configured to emit a light beam to an object to be measured; the receiving and sensing module is used for receiving the light beam which is emitted by the laser emitting module and reflected by the object to be measured.
Further, the receiving and sensing module is any one or more of a single photon avalanche diode, a silicon photomultiplier and a charge coupled device.
In a third aspect, the present application further provides an electronic device, where the electronic device includes a substrate and the TOF assembly as described in the second aspect, and the substrate is used for carrying the TOF assembly.
Furthermore, the electronic device further comprises a processor, the processor is respectively electrically connected with the laser emission module and the receiving and sensing module, the processor controls the laser emission module to emit a light beam, and the distance of the object to be measured is calculated according to the light beam received by the receiving and sensing module.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for a person skilled in the art to obtain other drawings based on the drawings without any inventive exercise.
Fig. 1 is a schematic diagram of a laser emission module frame according to an embodiment of the present disclosure.
Fig. 2 is a schematic diagram of a TOF assembly framework according to an embodiment of the present disclosure.
Fig. 3 is a partial schematic view of an electronic device according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments obtained by a person of ordinary skill in the art without any inventive work based on the embodiments in the present application are within the scope of protection of the present application.
Referring to fig. 1, fig. 1 is a schematic diagram of a laser emitting module frame according to an embodiment of the present disclosure. The laser emission module 1 includes: a laser 11, a collimating element 12 and a diffractive optical element 13. The laser 11 is configured to emit laser light, the collimating element 12 is configured to collimate the laser light emitted by the laser 11 into parallel light, and the diffractive optical element 13 is configured to split the parallel light into a plurality of light beams. And the material expansion coefficient of the diffractive optical element 13 is matched with the grating period d of the diffractive optical element 13, the initial wavelength lambda and the temperature drift coefficient of the laser emitted by the laser 11, so that the absolute value of the difference of the angle theta of the light beam projection along with the temperature change is within a tolerance range.
Specifically, the laser light emitted by the laser 11 is adjusted by the collimating element 12 into parallel light, which is incident on the diffractive optical element 13, and is divided into a plurality of light beams by the diffractive optical element 13 to be projected onto the object 22 to be measured (see fig. 2). The collimating element 12 may be a micro-lens array, which is not limited in this application.
It can be understood that as the operating time of the laser 11 increases, the temperature of the laser 11 increases, and the temperature change value is Δ T, so that the temperature of the entire laser emitting module 1 increases accordingly. Due to the expansion and contraction of the material of the diffractive optical element 13 with temperature, the grating period d of the diffractive optical element 13 changes accordingly, for example, the grating period d of the diffractive optical element 13 increases due to the expansion and contraction of the material with temperature, and vice versa. Similarly, the wavelength λ of the laser light emitted by the laser 11 changes with temperature, for example, the wavelength λ of the laser light emitted by the laser 11 increases due to the temperature rise, and vice versa.
As can be seen from the beam projection angle formula (1), the beam projection angle θ of the laser emission module 1 has the following relationship with the grating period d of the diffractive optical element 13 and the wavelength λ of the laser light emitted by the laser 11:
d sinθ＝kλ (1)
where d is a grating period of the diffractive optical element 13, θ is a beam projection angle, k is a rank coefficient, and λ is a wavelength of laser light emitted by the laser 11.
It can be understood that, in the present embodiment, the angle θ at which the laser emission module 1 finally projects the light beam has a certain relationship with the grating period d of the diffractive optical element 13 and the wavelength λ of the laser light emitted by the laser 11, and the material of the diffractive optical element 13 is selected according to the grating period d of the diffractive optical element 13, the initial wavelength λ of the laser light emitted by the laser 11, and the temperature drift coefficient Δ λ, so as to offset the variation of the grating period of the diffractive optical element 13 and the laser wavelength emitted by the laser 11, so that the variation of the angle of the light beam projected by the laser emission module 1 is within the tolerance range.
In one possible embodiment, the product Δ d of the coefficient of expansion of the material of the diffractive optical element 13 and the value of the temperature change Δ T satisfies the formula (2):
where Δ d is a product of a material expansion coefficient of the diffractive optical element 13 and a temperature change value Δ T, d is a grating period of the diffractive optical element 13, Δ λ is a product of a temperature drift coefficient of the laser light emitted by the laser 11 and the temperature change value Δ T, and λ is an initial wavelength of the laser light emitted by the laser 11.
It should be noted that a change in the grating period d of the diffractive optical element 13 caused by a temperature change will result in a change in the projection angle θ, and a change in the wavelength λ of the laser light emitted by the laser 11 caused by a temperature change will also result in a change in the projection angle θ.
It is understood that, in the present embodiment, when the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T satisfies the above formula (2), the variation of the projection angle θ caused by the variation of the grating period d and the variation of the projection angle θ caused by the variation of the laser wavelength λ cancel each other out, so that the variation of the beam angle θ projected by the laser emission module 1 is within the tolerance range.
In one possible embodiment, the overall temperature of the laser emission module 1 at the first time is different from the overall temperature of the laser emission module 1 at the second time, and the grating period of the diffractive optical element 13 at the first time is d1The grating period of the diffractive optical element 13 at the second time is d2And d is2＝d1- Δ d, the laser emitter emitting a laser wavelength λ at said first instant1The laser wavelength emitted by the laser emitter at the second moment is lambda2And λ2＝λ1-Δλ。
Specifically, when the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T satisfies the above-described formula (2), it can be derived from the following equation: the laser wavelength lambda of the second time2Grating period d from the second moment2Is equal to the laser wavelength λ of said first instant1Grating period d from the first moment1The ratio of (a) to (b).
Meanwhile, the light beam projection angle θ formula (1) is deformed and substituted into the grating period d of the diffractive optical element 13 at the first time point respectively1With the laser wavelength λ emitted by said laser 111And the grating period d of the diffractive optical element 13 at the second instant in time2With the laser wavelength λ emitted by said laser 112The following equation can be derived:
wherein, theta1Is the beam projection angle theta of the laser emission module 1 at the first time2Is the beam projection angle of the laser emission module 1 at the second moment.
As can be seen from the above derivation process, when the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T satisfies the above formula (2), the change in the projection angle caused by the change in the grating period d of the diffractive optical element 13 and the change in the projection angle θ caused by the change in the laser wavelength λ emitted by the laser 11 cancel each other out.
In one possible embodiment, the diffraction angle of the laser light emitted by the diffractive optical element 13 is the first angle θ at the first time1The second time is a second angle theta2The first angle theta1To the second angle theta2The absolute value of the difference value of (a) is less than a preset threshold value.
It should be noted that, ideally, the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T may satisfy the above formula (2). In other possible embodiments, the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T may approximately satisfy the above formula (2), in other words, the product Δ d of the material expansion coefficient of the diffractive optical element 13 and the temperature change value Δ T is approximately equal to the ratio of the grating period d of the diffractive optical element 13 to the wavelength λ of the laser light emitted by the laser 11, and then multiplied by the temperature drift coefficient Δ λ of the laser light emitted by the laser 11. The term "approximately equal" means that the difference between the two values does not exceed the variation threshold, for example, the ratio of the difference between the two values and one of the two values does not exceed 5%, or the ratio of the difference between the two values and one of the two values does not exceed 10%, and the variation threshold may be adjusted according to the actual situation, which is not limited in this application.
It is understood that, in the present embodiment, the first angle θ1To the second angle theta2There is a certain deviation and due to the diffractive optical elementThe product Δ d of the material expansion coefficient of the piece 13 and the temperature change value Δ T approximately satisfies the above-mentioned formula (2), and the first angle θ1To the second angle theta2Is smaller than a preset threshold, that is, the first angle θ1To the second angle theta2The absolute value of the difference is within an allowable tolerance range, and the influence on the projection beam angle theta of the laser emitting module 1 caused by temperature change is avoided.
In one possible embodiment, the laser 11 is a vertical cavity surface laser transmitter.
Specifically, when the laser 11 is a vertical cavity surface laser transmitter, the laser emitted by the laser 11 can be emitted perpendicular to the laser emitting surface, so that the collimating element 12 can better collimate the laser emitted by the laser 11. In other possible embodiments, the laser 11 may also be other types of laser emitters, which is not limited in this application.
Specifically, in this embodiment, the laser wavelength λ emitted by the vertical cavity surface laser emitter is 940nm, which is obtained according to the grating period d of the diffractive optical element 13, the initial wavelength λ of the laser emitted by the laser 11, and the product Δ λ of the temperature drift coefficient and the temperature change value Δ T, and the material of the diffractive optical element 13 having the material expansion coefficient of 70ppm is selected.
It should be noted that, when the laser 11 is a vertical cavity surface laser transmitter, the initial wavelength λ of the laser light emitted by the laser 11 is 940nm, and the temperature drift coefficient Δ λ of the laser light emitted by the laser 11 is 0.07 nm/deg.c, that is, the change ratio of the product Δ λ of the temperature drift coefficient and the temperature change value Δ T of the laser light emitted by the laser 11 to the initial wavelength λ is approximately 0.00007, a material having a material expansion coefficient of 70ppm of the diffractive optical element 13 needs to be selected, for example, a photosensitive resin is used as the material of the diffractive optical element 13, so that the material expansion coefficient of the diffractive optical element 13 is 70 ppm.
Fig. 2 is a schematic view of a TOF assembly 2 according to an embodiment of the present disclosure, and fig. 2 is a schematic view of a frame of the TOF assembly. The TOF assembly 2 comprises the laser emitting module 1 and the receiving and sensing module 21, wherein the laser emitting module 1 is used for emitting a light beam to an object 22 to be measured; the receiving and sensing module 21 is configured to receive the light beam emitted by the laser emitting module 1 and reflected by the object 22 to be measured.
Specifically, please refer to the above description for the laser emitting module 1, which is not described herein again. The object 22 to be detected may be different according to the application scene of the TOF assembly 2, for example, the TOF assembly 2 may be applied to face recognition, and then the object 22 to be detected may be a human face; for another example, the TOF assembly 2 may be applied to target ranging, and the object 22 to be measured may be a target obstacle, etc., which is not limited in this application.
In one possible embodiment, the receiving and sensing module 21 is any one or more of a single photon avalanche diode, a silicon photomultiplier, and a charge coupled device.
Specifically, when the receiving sensor module 21 is a Single Photon Avalanche Diode (SPAD), the receiving sensor module 21 can capture a Single photon with a very high laser arrival time resolution, which is on the order of tens of picoseconds, and can be used in a dedicated semiconductor process or a standard CMOS process. A single SPAD can be regarded as a 1-bit ultra-high-speed analog-to-digital converter, and a simple inverter can be electrically connected to directly generate digital signals, such as outputting 0 when no signal exists and outputting 1 when the signal exists. It is understood that, in other possible embodiments, the receiving and sensing module 21 may also be a silicon photomultiplier, a charge coupled device, or other components that convert an optical signal into an electrical signal, which is not limited in this application.
Fig. 3 is a partial schematic view of an electronic device 3 according to an embodiment of the present disclosure. The electronic device 3 includes a substrate 31 and the TOF assembly 2 as described above, the substrate 31 is used for carrying the TOF assembly 2.
Specifically, please refer to the above description for the TOF assembly 2, which is not repeated herein. The electronic device 3 includes, but is not limited to, an electronic device 3 having a communication function, such as a mobile phone, an internet device (MID), an electronic book, a Portable Player Station (PSP), or a Personal Digital Assistant (PDA).
In a possible implementation manner, please refer to fig. 3 again, the electronic device 3 further includes a processor 32, the processor 32 is electrically connected to the laser emitting module 1 and the receiving and sensing module 21, respectively, the processor 32 controls the laser emitting module 1 to emit a light beam, and calculates the distance of the object 22 to be measured according to the light beam received by the receiving and sensing module 21.
Specifically, the substrate 31 may be a circuit board in the electronic device 3, as shown in fig. 3, the processor 32 is disposed on the substrate 31 and electrically connected to the laser emitting module 1 and the receiving and sensing module 21 through a circuit on the substrate 31.
When the laser emission module 1 emits a light beam, the laser emission module 1 generates an emission electric signal and sends the emission electric signal to the processor 32, and when the receiving and sensing module 21 receives the laser reflected by the object 22 to be measured, the receiving and sensing module 21 generates a receiving electric signal and sends the receiving electric signal to the processor 32. The processor 32 can calculate the laser transmission time according to the time difference between the reception of the transmission electrical signal and the reception of the reception electrical signal, thereby calculating the distance of the object 22 to be measured.
The principle and the embodiment of the present application are explained herein by applying specific examples, and the above description of the embodiment is only used to help understand the core idea of the present application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. A laser transmitter module, comprising:
a laser for emitting laser light, the laser light having an initial wavelength;
the collimation element is used for adjusting the laser emitted by the laser into parallel light;
the diffraction optical element is used for dividing the parallel light into a plurality of light beams, and the material expansion coefficient of the diffraction optical element is matched with the grating period, the initial wavelength and the temperature drift coefficient of the diffraction optical element, so that the absolute value of the difference of the angle of the light beam projection along with the temperature change is within a tolerance range.
2. The laser transmitter module of claim 1, wherein the diffractive optical element has a material expansion coefficient that satisfies the formula:
wherein Δ d is a product of a material expansion coefficient of the diffractive optical element and a temperature change value, d is a grating period of the diffractive optical element, Δ λ is a product of a temperature drift coefficient of laser light emitted by the laser and a temperature change value, and λ is an initial wavelength of the laser light emitted by the laser.
3. The laser transmitter module of claim 2, wherein the overall temperature of the laser transmitter module at the first time is different from that at the second time, and the grating period of the diffractive optical element at the first time is d1The grating period of the diffractive optical element at the second time is d2And d is2＝d1- Δ d, the laser emitter emitting a laser wavelength λ at said first instant1The laser wavelength emitted by the laser emitter at the second moment is lambda2And λ2＝λ1-Δλ。
4. The laser transmitter module of claim 3, wherein the diffraction angle of the laser light emitted from the diffractive optical element is a first angle at a first time and a second angle at a second time, and an absolute value of a difference between the first angle and the second angle is smaller than a predetermined threshold.
5. The laser transmitter module of claim 1, wherein the laser is a vertical cavity surface laser transmitter.
6. The laser transmitter module of claim 5, wherein the vertical cavity surface laser transmitter emits a laser wavelength of 940nm and the diffractive optical element has a coefficient of expansion of 70ppm of material.
7. A TOF assembly, comprising a laser emission module according to any one of claims 1-6, a receiving sensing module, the laser emission module configured to emit a light beam to an object to be measured; the receiving and sensing module is used for receiving the light beam which is emitted by the laser emitting module and reflected by the object to be measured.
8. The TOF assembly of claim 7, wherein the receiving sensing module is any one or more of a single photon avalanche diode, a silicon photomultiplier, a charge coupled device.
9. An electronic device comprising a substrate and the TOF assembly of claim 7, the substrate being configured to carry the TOF assembly.
10. The electronic device of claim 9, further comprising a processor electrically connected to the laser emitting module and the receiving and sensing module, respectively, wherein the processor controls the laser emitting module to emit a light beam and calculates the distance of the object to be measured according to the light beam received by the receiving and sensing module.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114112327A (en) * | 2021-12-07 | 2022-03-01 | 中国科学院国家天文台南京天文光学技术研究所 | Structural parallel light source for telescope collimation and aberration simulation and mounting method thereof |
| CN114895477A (en) * | 2022-04-13 | 2022-08-12 | 北京驭光科技发展有限公司 | Laser projector, camera assembly, and electronic device |
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| CN105242399A (en) * | 2015-11-02 | 2016-01-13 | 长春理工大学 | Athermalization method based on thermal characteristic of multi-layer diffractive optical element |
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